JP2005050644A - Microwave heating device - Google Patents

Microwave heating device Download PDF

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JP2005050644A
JP2005050644A JP2003281006A JP2003281006A JP2005050644A JP 2005050644 A JP2005050644 A JP 2005050644A JP 2003281006 A JP2003281006 A JP 2003281006A JP 2003281006 A JP2003281006 A JP 2003281006A JP 2005050644 A JP2005050644 A JP 2005050644A
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heated
cavity
microwave
microwave heating
sheet
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Tadashi Okamoto
正 岡本
Masahiro Yasuda
昌弘 安田
Hiyo Son
冰 孫
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Tokyo Denshi KK
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Tokyo Denshi KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an improved microwave heating device with a broad width and thin wall thickness, uniformly and effectively heating an object to be heated having a large microwave loss. <P>SOLUTION: The microwave heating device is constructed so as to excite a microwave in resonance mode generating a constant electric field in one direction in a resonance cavity 1, and to make the object to be heated W absorb a leaked power by generating leakage power having uniform electric field generated at the inside of the cavity 1, by forming a leakage hole 7 on a part of a side wall 6 of the resonance cavity 1 from which, a part of microwave leaks. By the above, a uniform microwave heating with high efficiency can be applied even to the object to be heated having a relatively large microwave loss. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

この発明は、シート状被加熱物を均一に、効率よく加熱することができるマイクロ波加熱装置に関する。   The present invention relates to a microwave heating apparatus that can uniformly and efficiently heat a sheet-like object to be heated.

マイクロ波は被加熱物を直接昇温させて加熱できるので、急速で効率の高い加熱が可能である。しかしながら、一般に均一に被加熱物を加熱することは難しい。例えば、セラミックグリーンシートをマイクロ波加熱乾燥装置で乾燥させる技術が特許文献1に記載されている。これは、乾燥前のセラミックグリーンシートを、マイクロ波加熱乾燥装置内をベルトに乗せて移送する間に、マイクロ波を照射して乾燥させるものである。しかしながら、一般に、加熱物が薄いシート状の場合には、そのシートの厚さが薄いことから、シートに吸収されるマイクロ波電力が少なくなってくるので、効率よく加熱することはさらに難しくなる。特許文献1に記載されたマイクロ波加熱乾燥装置も同様で、十分に均一で効率的な加熱は期待することができない。このため、マイクロ波による高効率で均一な加熱を望む声が強い。
特開平7−294122号公報
Since microwaves can be heated by directly raising the temperature of an object to be heated, rapid and efficient heating is possible. However, it is generally difficult to heat the object to be heated uniformly. For example, Patent Document 1 discloses a technique for drying a ceramic green sheet with a microwave heating and drying apparatus. In this method, the ceramic green sheet before drying is dried by being irradiated with microwaves while being transported on a belt in a microwave heating and drying apparatus. However, in general, when the heated object is a thin sheet, the thickness of the sheet is thin, so that the microwave power absorbed by the sheet is reduced, so that it is more difficult to heat efficiently. The same applies to the microwave heating and drying apparatus described in Patent Document 1, and sufficient uniform and efficient heating cannot be expected. For this reason, there is a strong demand for high-efficiency and uniform heating using microwaves.
JP 7-294122 A

この発明は上記のような従来技術における不都合を解決し、幅が広く、肉薄で、しかも、マイクロ波損失の大きい被加熱物に対しても、均一で効率的な加熱を行うことができる改善されたマイクロ波加熱装置を提供することを目的とする。   The present invention solves the disadvantages in the prior art as described above, and is improved in that uniform and efficient heating can be performed even on an object to be heated that is wide, thin, and has a large microwave loss. Another object is to provide a microwave heating apparatus.

共振空胴1内に、一の方向に一定電界を発生する共振モードのマイクロ波を励起し、この共振空胴1の側壁6の一部にマイクロ波が漏洩する漏洩孔7を設けることによって、空胴1内から、均一な電界の漏洩を発生させ、この漏洩電力を被加熱物Wに吸収させるように装置を構成する。この方法により、比較的損失の大きい被加熱物Wに対しても、均一で高効率のマイクロ波加熱を行うことが出来る。   By exciting a resonance mode microwave that generates a constant electric field in one direction in the resonance cavity 1, and providing a leak hole 7 through which a microwave leaks in a part of the side wall 6 of the resonance cavity 1, The apparatus is configured to generate a uniform electric field leakage from inside the cavity 1 and to absorb the leakage power in the heated object W. By this method, uniform and highly efficient microwave heating can be performed even on an object to be heated W with relatively large loss.

本発明においては、被加熱物Wを空胴1内に直接挿入せず、空胴1の外部において、漏洩孔7から漏れるマイクロ波を被加熱物Wに照射する。漏洩孔7を有する側壁6は、空胴1内に励起されるマイクロ波の共振モード、例えばTM110に殆ど影響を与えない。このため、被加熱物Wの幅方向に対し均一な高効率加熱が可能である。また被加熱物Wを移動させることによって、移動方向についてもマイクロ波電力が平均化されるので、被加熱物W全体にわたって均一に加熱できる。共振空胴1内に被加熱物Wを直接挿入しないので、被加熱物Wによるマイクロ波の損失が大きい場合でも、安定的に、均一で高効率の加熱が実現できる。   In the present invention, the object to be heated W is irradiated with microwaves leaking from the leak hole 7 outside the cavity 1 without directly inserting the object to be heated W into the cavity 1. The side wall 6 having the leak hole 7 hardly affects the resonance mode of the microwave excited in the cavity 1, for example, TM 110. For this reason, uniform high-efficiency heating is possible in the width direction of the article W to be heated. Moreover, since microwave power is averaged also about a moving direction by moving the to-be-heated object W, it can heat uniformly over the to-be-heated object W. Since the object to be heated W is not directly inserted into the resonant cavity 1, even when the microwave loss due to the object to be heated W is large, stable and uniform heating can be realized.

図面を参照して本発明の実施の形態を説明する。図1において、加熱装置は、直方体形状を持つ金属製の共振空胴1と、共振空胴1にマイクロ波を結合する導波管2と、共振空胴1の下部に配置されるマイクロ波遮蔽部材3と、この遮蔽部材3を通過するようにシート状被加熱物Wを移動させる移送手段4とを具備する。図示しないが、導波管2の上流には、マイクロ波の整合を取るための同調器、空胴から反射したマイクロ波がさらに上流へ戻ることを防ぐサーキュレータ、マイクロ波電力を発生するためのマイクロ波発振器等が接続されている。   Embodiments of the present invention will be described with reference to the drawings. In FIG. 1, the heating device includes a metal resonant cavity 1 having a rectangular parallelepiped shape, a waveguide 2 that couples microwaves to the resonant cavity 1, and a microwave shield that is disposed below the resonant cavity 1. A member 3 and a transfer unit 4 that moves the sheet-like object W so as to pass through the shielding member 3 are provided. Although not shown, a tuner for matching microwaves, a circulator for preventing microwaves reflected from the cavity from returning further upstream, and a microwave for generating microwave power are not shown. A wave oscillator or the like is connected.

共振空胴1の第1の側壁(図において上側壁)5の中央に導波管2が結合されて空胴内に例えばTM110モードの電磁界を発生する。共振空胴1の側壁5に平行な共振空胴1の中心軸xを長軸と定義すると、このモードの電界は長軸x方向に向かい長軸x方向に対して一定で、この長軸xに対し直角な方向yで正弦半波状に変化している。この側壁5に平行に対向する第2の側壁(図において下側壁)6には、長軸xにほぼ平行に複数のスロット状の漏洩孔7が設けられ、この漏洩孔7から適当な強さのマイクロ波がシート状被加熱物Wに向けて漏洩する。側壁6の下部には、これを覆って内側に加熱空間8を形成する箱形の遮蔽部材3が設けられている。遮蔽部材3の、長軸xに対し平行で互いに対向する側壁9,10の対向位置には、共振空胴1の長軸に沿うスロット状の搬入口11と搬出口12が設けられている。   A waveguide 2 is coupled to the center of a first side wall (upper side wall in the figure) 5 of the resonant cavity 1 to generate, for example, a TM110 mode electromagnetic field in the cavity. If the central axis x of the resonant cavity 1 parallel to the side wall 5 of the resonant cavity 1 is defined as the major axis, the electric field in this mode is constant in the major axis x direction toward the major axis x direction. It changes in a sine half-wave shape in a direction y perpendicular to. A second side wall (lower side wall in the figure) 6 that faces the side wall 5 in parallel is provided with a plurality of slot-like leak holes 7 substantially parallel to the long axis x. The microwave leaks toward the sheet-like object to be heated W. A box-shaped shielding member 3 is provided at the lower portion of the side wall 6 so as to cover the inside and form a heating space 8 inside. A slot-like carry-in port 11 and a carry-out port 12 along the long axis of the resonance cavity 1 are provided at opposing positions of the side walls 9, 10 facing each other parallel to the long axis x of the shielding member 3.

共振空胴1内に励起されたマイクロ波は、側壁6に設けた漏洩孔7から加熱空間8内へ長軸x方向に一定の電界を漏洩してシート状被加熱物Wを加熱する。側壁6と被加熱物Wとの間隔は、漏洩孔7によるマイクロ波電力の強弱によって、加熱が不均一にならないよう、適切な距離に設定される。なお、ここで被加熱物を共振空胴1内に通過させない理由は、空胴内に損失の大きい物体を挿入すると、TM110モードの電界が相当大きく乱されてしまうからである。空胴外で漏洩電界の照射を受ける場合は、TM110モードの電界を殆ど乱さない。   The microwave excited in the resonance cavity 1 leaks a constant electric field in the major axis x direction from the leakage hole 7 provided in the side wall 6 into the heating space 8 and heats the sheet-like object W to be heated. The distance between the side wall 6 and the article to be heated W is set to an appropriate distance so that the heating does not become uneven due to the strength of the microwave power due to the leakage hole 7. Here, the reason why the object to be heated is not allowed to pass through the resonant cavity 1 is that if an object with a large loss is inserted into the cavity, the electric field of the TM110 mode is considerably disturbed. When receiving the leakage electric field outside the cavity, the electric field of TM110 mode is hardly disturbed.

側壁6は、薄い金属板で、空胴1に発生する電界による壁面電流は空胴1の長軸x方向に流れるので、スロット状の漏洩孔7を切ったことによって、この壁面電流を殆ど乱さない。したがって、TM110モードの電磁界は殆ど影響を受けない。側壁6の厚さを適切な値にすることにより、空胴1内に励起されるマイクロ波電力の一部が加熱空間8内へ漏洩し、これが被加熱物Wを加熱する。漏洩孔7の幅と側壁6の厚さを適切に設定することにより、漏洩量を調節する。   The side wall 6 is a thin metal plate, and the wall surface current due to the electric field generated in the cavity 1 flows in the long axis x direction of the cavity 1, so that the wall surface current is almost disturbed by cutting the slot-like leakage hole 7. Absent. Therefore, the electromagnetic field of TM110 mode is hardly affected. By setting the thickness of the side wall 6 to an appropriate value, a part of the microwave power excited in the cavity 1 leaks into the heating space 8, and this heats the article to be heated W. The amount of leakage is adjusted by appropriately setting the width of the leakage hole 7 and the thickness of the side wall 6.

図6に示す他の実施形態においては、側壁6に比較的小さな丸孔からなる多数の漏洩孔7をほぼ均等に配列した。壁面電流は少し乱れるが、空胴1の共振モードに大きな影響は与えない。マイクロ波はこの漏洩孔7から漏洩し、被加熱物Wを加熱する。漏洩孔7の配置や径、側壁6の厚さを適切に設定することにより、漏洩量を調節する。   In another embodiment shown in FIG. 6, a large number of leak holes 7 made of relatively small round holes are arranged almost uniformly on the side wall 6. Although the wall current is slightly disturbed, the resonance mode of the cavity 1 is not greatly affected. The microwave leaks from the leakage hole 7 and heats the article to be heated W. The amount of leakage is adjusted by appropriately setting the arrangement and diameter of the leakage holes 7 and the thickness of the side wall 6.

被加熱物Wを加熱する電力は、漏洩孔7によるだけでなく、導波管2から印加するマイクロ波電力によっても調節できる。被加熱物Wを移動させる早さは時間当たりの加熱処理量を決める重要なパラメータであるので、この値に応じてマイクロ波電力の値や漏洩孔7の寸法等を定めることになる。   The power for heating the article to be heated W can be adjusted not only by the leakage hole 7 but also by the microwave power applied from the waveguide 2. The speed of moving the article to be heated W is an important parameter that determines the amount of heat treatment per hour, and the value of the microwave power, the size of the leakage hole 7 and the like are determined according to this value.

以上、直方体状の空胴1について説明したが、長軸xと直角方向に空胴1を切ったときの形は必ずしも長方形である必要はなく、円形、楕円形であってもかまわない。また、図示の実施形態において空胴1の側壁6は平面状であるが、空胴1の断面形状に合わせた適切な形に変形できる。   Although the rectangular parallelepiped cavity 1 has been described above, the shape when the cavity 1 is cut in the direction perpendicular to the major axis x is not necessarily rectangular, and may be circular or elliptical. Further, in the illustrated embodiment, the side wall 6 of the cavity 1 is planar, but can be deformed into an appropriate shape in accordance with the cross-sectional shape of the cavity 1.

空胴1内の電界は、被加熱物Wの移動方向に対しては正弦半波状に変化しているが、被加熱物Wを移動させることによって、被加熱物Wの特定の位置からみたマイクロ波電界は平均化されるので、被加熱物Wの移動方向zに対しても均一な加熱が行われる。   The electric field in the cavity 1 changes in a sinusoidal half-wave shape with respect to the moving direction of the object to be heated W, but by moving the object to be heated W, the micro as viewed from a specific position of the object to be heated W is shown. Since the wave electric field is averaged, uniform heating is performed in the moving direction z of the article to be heated W.

図示しないが、被加熱物Wの温度を監視し、その信号をフィードバックしてマイクロ波電力を制御装置で制御すると、被加熱物Wは過熱することなく、安定に加熱できる。   Although not shown, when the temperature of the object to be heated W is monitored, the signal is fed back and the microwave power is controlled by the control device, the object to be heated W can be stably heated without overheating.

この発明は、例えば水等を含浸するシート状の被加熱物であって、マイクロ波損失が大きく、共振空胴に直接入れると空胴内の電界を大きく乱してしまうような物を加熱して乾燥させるための装置として利用することができる。   The present invention heats, for example, a sheet-like object to be heated that is impregnated with water or the like, which has a large microwave loss and greatly disturbs the electric field in the cavity when directly inserted into the resonant cavity. And can be used as an apparatus for drying.

マイクロ波加熱装置の一部を切り欠いた概略的斜視図である。It is the schematic perspective view which notched a part of microwave heating device. 共振空胴の概略的斜視図である。It is a schematic perspective view of a resonance cavity. 共振空胴の正面図である。It is a front view of a resonance cavity. 共振空胴の縦断面図である。It is a longitudinal cross-sectional view of a resonance cavity. 共振空胴の横断面図である。It is a cross-sectional view of a resonant cavity. 共振空胴の他の実施形態を示す横断面図である。It is a cross-sectional view showing another embodiment of a resonant cavity.

符号の説明Explanation of symbols

1 マイクロ波共振空胴
2 マイクロ波導波管
3 マイクロ波遮蔽部材
4 移送手段
5 共振空胴の第1の側壁
6 共振空胴の第2の側壁
7 マイクロ波漏洩孔
8 加熱空間
9 遮蔽部材の側壁
10 遮蔽部材の対向側壁
11 搬入口
12 搬出口
W シート状被加熱物
DESCRIPTION OF SYMBOLS 1 Microwave resonance cavity 2 Microwave waveguide 3 Microwave shielding member 4 Transfer means 5 First side wall of resonance cavity 6 Second side wall of resonance cavity 7 Microwave leakage hole 8 Heating space 9 Side wall of shielding member DESCRIPTION OF SYMBOLS 10 Opposite side wall 11 of shielding member Carry-in entrance 12 Carry-out exit W Sheet-like to-be-heated object

Claims (7)

空胴内の一定方向に一定の電界を生じるように、空胴の一の側壁に結合された導波管からマイクロ波が空胴内へ導入されるマイクロ波共振空胴を備えたシート状被加熱物のためのマイクロ波加熱装置において、
前記共振空胴の一の側壁に対向する対向側壁が電磁波漏洩孔を備え、
前記シート状被加熱物を前記共振空胴外で、前記電磁波漏洩孔に対向させて、前記一定方向と直角方向に移動させる移送手段をさらに具備することを特徴とするマイクロ波加熱装置。
A sheet-like covering with a microwave resonant cavity through which microwaves are introduced into the cavity from a waveguide coupled to one side wall of the cavity so as to produce a constant electric field in a certain direction within the cavity. In the microwave heating device for heated objects,
The opposite side wall facing one side wall of the resonant cavity includes an electromagnetic wave leakage hole,
A microwave heating apparatus, further comprising: a transfer unit configured to move the sheet-like object to be heated in a direction perpendicular to the fixed direction so as to face the electromagnetic wave leakage hole outside the resonance cavity.
前記共振空胴を直方体形状としたことを特徴とする請求項1に記載のマイクロ波加熱装置。   The microwave heating apparatus according to claim 1, wherein the resonant cavity has a rectangular parallelepiped shape. 前記電磁波漏洩孔を一様に配置された多数の孔で構成したことを特徴とする請求項1に記載のマイクロ波加熱装置。   The microwave heating device according to claim 1, wherein the electromagnetic wave leakage hole is configured by a plurality of holes arranged uniformly. 前記漏洩孔を複数個の短冊状のスロットで構成したことを特徴とする請求項1ないし3の何れかに記載のマイクロ波加熱装置。   The microwave heating apparatus according to any one of claims 1 to 3, wherein the leakage hole is constituted by a plurality of strip-shaped slots. 前記共振空胴をシート状被加熱物の移動方向に複数個並べて配置し、各共振空胴により、順次シート状被加熱物を加熱するようにしたことを特徴とする請求項1ないし4の何れかに記載のマイクロ波加熱装置。   5. The resonance cavity according to claim 1, wherein a plurality of the resonance cavities are arranged side by side in the moving direction of the sheet-like object to be heated, and the sheet-like object to be heated is sequentially heated by each resonance cavity. A microwave heating apparatus according to claim 1. 前記シート状被加熱物に吸収されなかった漏洩マイクロ波の外部への漏洩を防止するための遮蔽手段をさらに具備することを特徴とする請求項1ないし5の何れかに記載のマイクロ波加熱装置。   The microwave heating apparatus according to any one of claims 1 to 5, further comprising shielding means for preventing leakage of leaked microwaves that have not been absorbed by the sheet-like object to be heated. . 加熱されたシートの温度を監視し、その信号をフィードバックしてマイクロ波電力を制御する制御装置をさらに具備することを特徴とする請求項1ないし6の何れかに記載のマイクロ波加熱装置。   The microwave heating device according to any one of claims 1 to 6, further comprising a control device that monitors the temperature of the heated sheet and feeds back a signal to control the microwave power.
JP2003281006A 2003-07-28 2003-07-28 Microwave heating device Pending JP2005050644A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009075332A1 (en) * 2007-12-12 2009-06-18 Saida Fds Inc. Microwave applicator
JP2019087410A (en) * 2017-11-07 2019-06-06 国立研究開発法人産業技術総合研究所 Microwave heating device and chemical reaction method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009075332A1 (en) * 2007-12-12 2009-06-18 Saida Fds Inc. Microwave applicator
JP2009146650A (en) * 2007-12-12 2009-07-02 Saida Fds Inc Microwave applicator
CN101897235A (en) * 2007-12-12 2010-11-24 株式会社斎田Fds Microwave applicator
JP2019087410A (en) * 2017-11-07 2019-06-06 国立研究開発法人産業技術総合研究所 Microwave heating device and chemical reaction method

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