JP2005038902A - Automatic carrying system and passive device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a passive device which is capable of easily carrying out the carrier transfer sequence check of a loading port. <P>SOLUTION: An automatic carrying system is equipped with two loading ports 3 and 5 where two optical transmission apparatuses 7 and 9 are arranged, respectively. The optical transmission apparatuses 7 and 9 are capable of communicating with each other and have a receiving I/O interface function and a transmitting I/O interface function, and the loading ports 3 and 5 have a switching means capable of switching receiving/transmitting I/O interface functions from one to the other. Furthermore, the automatic carrying system switches one of the two transmission apparatuses 7 and 9 of the loading ports 3 and 5 to a receiving I/O interface function, and switches the other of the two transmission apparatuses 7 and 9 to a transmitting I/O interface function, whereby a carrier transfer sequence check can be carried out between the loading ports. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a passive device equipped with an optical transmission device compatible with the enhanced carrier transfer parallel I / O interface specification, and more particularly to a passive device having a load port carrier transfer sequence inspection function.
[0002]
[Prior art]
In the manufacturing process of a semiconductor device, the carrier is transferred to the load port of a passive apparatus (for example, an exposure apparatus or a measurement apparatus) by an active apparatus (for example, an automatic carrier transfer apparatus). The passive device and the active device are controlled by using an optical transmission device compatible with the SEMI E84 enhanced carrier transfer parallel I / O interface specification. Conventionally, an automatic transfer system of a passive device has only a parallel I / O interface function of a passive device, and an active device has only a parallel I / O interface function of an active device (see Non-Patent Document 1).
[0003]
[Non-Patent Document 1]
Specification of SEMI E84-0701 Enhanced Carrier Transfer Parallel I / O Interface
[Problems to be solved by the invention]
Conventionally, when performing a carrier transfer sequence inspection of a load port of such a passive device, a SEMI E84 simulator or the active device itself is used instead of the active device. When using an inspection tool such as the SEMI E84 simulator, the inspection apparatus is brought into the site where the apparatus is installed, and the inspection is performed. Therefore, there is a problem that it takes time to install the inspection apparatus and deteriorates the manufacturing throughput. Further, when the inspection is performed using the active device itself, there is a problem that an active device as an inspection facility is required, and the cost of facility investment is excessive.
[0005]
The present invention has been made in view of the above problems, and an object thereof is to provide a passive device that can easily perform a carrier transfer sequence inspection of a load port.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, according to the present invention, there is provided an automatic conveyance system having two load ports each having an optical transmission device arranged therein, the optical transmission devices being capable of communicating with each other, each receiving I / O interface function and transmission I / O interface function, and each of the load ports has switching means for switching the quantity I / O interface function, and the switching means allows one of the load ports to be switched. By switching the transmission device to the reception I / O interface function and switching the other transmission device of the load port to the transmission I / O interface function, the carrier transfer sequence inspection between the two load ports It is possible to provide an automatic conveyance system characterized in that
[0007]
Moreover, in the automatic conveyance system of this invention, it is preferable that the said optical transmission apparatus respond | corresponds to a SEMI E84 enhanced carrier transfer parallel I / O interface.
[0008]
Moreover, in the automatic conveyance system of this invention, it is preferable that the said optical transmission apparatus provided in the said load port is arranged so that it can mutually face.
[0009]
According to the present invention, there is also a passive device having a load port in which each first optical transmission device compliant with the SEMI E84 enhanced carrier transfer parallel I / O interface specification is arranged, and is attached to the load port or the passive device. It has at least one second optical transmission device having a parallel I / O interface function of an active device, and the first and second optical transmission devices can communicate with each other, and the first optical transmission device and the first optical transmission device Provided is a passive device capable of performing a carrier transfer sequence inspection with a second transmission device.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a schematic front view of a passive device equipped with a carrier transfer sequence inspection function according to a first embodiment of the present invention. FIG. 2 is a schematic diagram during execution of the carrier transfer sequence inspection function according to the first embodiment. FIG. 3 is a schematic diagram of I / O connection in the first embodiment. FIG. 4 is a schematic view during execution of the carrier transfer sequence inspection function according to the second embodiment of the present invention. FIG. 5 is a schematic diagram of I / O connection in the second embodiment.
[0011]
(First embodiment)
FIG. 1 shows a passive device 1 having two load ports 3, 5. The two load ports 3 and 5 include an optical transmission device provided in an active device (not shown) and an optical transmission device 7 that transmits and receives a carrier transfer sequence based on the SEMI E84 enhanced carrier transfer parallel I / O interface specification. 9 is arranged. Carriers 11 and 13 are arranged in the two load ports 3 and 5. The wafers in the carriers 11 and 13 are subjected to predetermined processing by the automatic transfer system of the passive device 1. After all wafers have been processed, the carrier is replaced with a new carrier by the active device. The passive apparatus 1 includes a manufacturing apparatus such as an exposure apparatus and a measurement apparatus, and the active apparatus includes a carrier loading / unloading apparatus.
[0012]
When the carrier of the load ports 3 and 5 is exchanged for a new carrier, the active device and the passive device 1 communicate with each other via the optical transmission equipment provided in each, and a predetermined carrier transfer sequence The carrier is transferred based on this. The specification of communication and the like used at this time uses the SEMI E84 enhanced carrier transfer parallel I / O interface specification (hereinafter abbreviated as SEMI E84 specification).
[0013]
FIG. 2 shows a state where the operation inspection of the carrier transfer sequence of the automatic transport system is performed using the optical transmission devices 7 and 9 of the load ports 3 and 5 in the passive device 1 shown in FIG.
[0014]
2 and 3, the optical transmission devices 7 and 9 provided in the load ports 3 and 5 are attached to support substrates 7a and 9a that can be changed by approximately 90 degrees so as to face each other, and are formed so as to be able to send and receive signals. Yes. The passive device 1 has a parallel I / O interface function 21 of the passive device and a parallel I / O interface function 23 of the active device, and the parallel I / O interface function 21 of the passive device and the parallel of the active device. Interface switching means 25 for switching the I / O interface function 23 according to an instruction from the operation unit 19 is provided. With this configuration, the interface function of the passive device 1 can be switched to the parallel I / O interface function 21 of the passive device or the parallel I / O interface function 23 of the active device. In this way, the passive device 1 is configured.
[0015]
In the first embodiment, after the optical transmission devices 7 and 9 are faced to each other, the switching means 25 is connected to the load port 3 side by the parallel I / O interface function of the passive device according to an instruction from the operation unit 19 of the passive device 1. 21 and the load port 5 side is set to the active device interface function 23. Then, by executing the carrier transfer sequence inspection program for the active device built in the passive device 1, the carrier transfer sequence of the active device is executed from the optical transmission device 9 on the load port 5 side. The carrier transfer sequence inspection of the transport system can be performed.
[0016]
Further, in response to an instruction from the operation unit 19 of the passive device 1, the switching unit 25 sets the load port 5 side to the parallel I / O interface function 21 of the passive device, and sets the load port 3 side to the parallel I / O interface of the active device. Function 23 is set. Then, by executing the carrier transfer sequence inspection program for the active device built in the passive device 1, the carrier transfer sequence of the active device is executed from the optical transmission device 7 on the load port 3 side, and the load port 5 automatically The carrier transfer sequence inspection of the transport system can be performed. In either case, the inspection result is displayed on the monitor 20 of the passive device 1.
[0017]
Thus, according to the first embodiment, the carrier transfer sequence inspection of the load ports 3 and 5 can be executed only by the passive device 1 without attaching the inspection device, and the inspection time can be shortened, or A quick response at the time of failure diagnosis becomes possible, and the throughput of the passive device 1 can be improved.
[0018]
(Second Embodiment)
Next, a second embodiment according to the present invention will be described with reference to the drawings. As in the first embodiment, the same reference numerals are given to the members and the description thereof is omitted.
[0019]
4 and 5, the passive device 1 has two load ports 3 and 5. The two load ports 3 and 5 include optical transmitters 7 and 9 having a parallel I / O interface function 31 of a passive device, and parallel I / O interfaces of an active device connected to the load ports 3 and 5 or the passive device 1. Optical transmission devices 15 and 17 each having a function 33 are provided. The optical transmission devices 7, 9, 15, and 17 transmit and receive carrier transfer sequences based on the SEMI E84 enhanced carrier transfer parallel I / O interface specifications. In this way, the passive device 1 is configured.
[0020]
Carriers 11 and 13 are arranged in the two load ports 3 and 5. The wafers in the carriers 11 and 13 are subjected to predetermined processing by the passive device 1. After all wafers have been processed, the carrier is replaced with a new carrier by the active device. The passive apparatus 1 includes a manufacturing apparatus such as an exposure apparatus and a measurement apparatus, and the active apparatus includes a carrier loading / unloading apparatus.
[0021]
In the passive device 1, the load port 3 using the optical transmission devices 7 and 9 of the load ports 3 and 5 and the optical transmission devices 15 and 17 having the parallel I / O interface function of the active device connected to the passive device 1. 5 shows a state where the carrier transfer sequence inspection is performed.
[0022]
In the second embodiment, in FIGS. 4 and 5, the optical transmission devices 7 and 9 provided in the load ports 3 and 5 and the optical transmission devices 15 and 17 connected to the passive device 1 are mutually connected. Signals can be transmitted and received by being arranged to face each other. After the optical transmission devices 7 and 15 and 9 and 17 face each other, an active device carrier transfer sequence inspection program built in the passive device 1 is executed by an instruction from the operation unit 19, and the optical transmission device 15 And 17 side, the carrier transfer sequence of the active device is executed, and the carrier transfer sequence inspection of the automatic transfer system of the load ports 3 and 5 is performed. The inspection result is displayed on the monitor 20 of the passive device 1.
[0023]
As described above, according to the second embodiment, the carrier transfer sequence inspection of the automatic transfer system of the load ports 3 and 5 can be executed only by the passive device 1. As a result, the inspection time can be shortened or prompt response can be made at the time of failure diagnosis, and the throughput of the passive device 1 can be improved.
[0024]
Note that the present embodiment can achieve the same effect even when an optical data transmission apparatus of a half-duplex bidirectional transmission system (a transmission system that alternately performs reception) is used as an optical transmission device.
[0025]
The above-described embodiment is merely an example, and is not limited to the above-described configuration and shape, and can be appropriately modified and changed within the scope of the present invention.
[0026]
【The invention's effect】
As described above, the present invention can provide a passive device that can easily perform a carrier transfer sequence inspection of a load port.
[Brief description of the drawings]
FIG. 1 is a schematic front view of a passive device equipped with a carrier transfer sequence inspection function according to a first embodiment of the present invention.
FIG. 2 is a schematic diagram during execution of a carrier transfer sequence inspection function according to the first embodiment;
FIG. 3 is a schematic diagram of I / O connection in the first embodiment.
FIG. 4 is a schematic diagram during execution of a carrier transfer sequence inspection function according to a second embodiment of the present invention.
FIG. 5 is a schematic diagram of I / O connection in the second embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Passive apparatus 3, 5 Load port 7, 9, 15, 17 Optical transmission apparatus 11, 13 Carrier 19 Operation part 21, 31 Passive apparatus parallel I / O interface function 23, 33 Active apparatus parallel I / O interface function 25 Switching means

Claims (4)

An automatic conveyance system having two load ports each having an optical transmission device arranged therein,
The optical transmission devices can communicate with each other, and each has an I / O interface function for reception and an I / O interface function for transmission,
Each of the load ports has switching means for switching the quantity I / O interface function,
The switching means switches one of the transmission devices of the load port to a reception I / O interface function, and switches the other transmission device of the load port to a transmission I / O interface function. An automatic transfer system capable of performing a carrier transfer sequence inspection between the load ports. The automatic transport system according to claim 1, wherein the optical transmission device is compatible with a SEMI E84 enhanced carrier transfer parallel I / O interface. The automatic transport system according to claim 1, wherein the optical transmission devices provided in the load port are arranged so as to face each other. SEMI E84 is a passive device having a load port in which each first optical transmission device corresponding to the enhanced carrier transfer parallel I / O interface specification is arranged,
At least one second optical transmission device having a parallel I / O interface function of an active device attached to the load port or the passive device;
The first and second optical transmission devices can communicate with each other;
A passive device capable of performing a carrier transfer sequence inspection between the first optical transmission device and the second transmission device.

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