JP2005028554A - Fine motion actuator and recording medium drive device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fine motion actuator which is fixed to a driven member with sufficiently high rigidity. <P>SOLUTION: The fine motion actuator 41 is equipped with a first fixing member 51 which extends to a predetermined longitudinal direction and receives the driven member 22 at a reference position 52 of the middle of the longitudinal direction. A second fixing member 54 is connected to the one end of the first fixing member. The second fixing member receives the driven member at least at the tip end. A third fixing member 57 is connected to the other end of the first fixing member. The third fixing member receives the driven member at least at the tip end. Piezoelectric elements 56, 59 are fixed to the outer surfaces of the second and third fixing members. The driven member rotates around the central axis CR based on the contraction of the piezoelectric element. Many adhesive places are secured between the driven member 22 and the fixing members 51, 54, 57. The driven member is firmly fixed to the fine motion actuator. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a fine actuator that applies a rotational driving force to a driven member received by a supporting member on an arbitrary surface around a central axis that penetrates the surface.

For example, as disclosed in Japanese Patent Application Laid-Open No. 2003-123416, a fine actuator that is incorporated into a head assembly by a hard disk drive (HDD) is widely known. The fine movement actuator is incorporated, for example, between the head suspension and the head slider. The head slider can rotate around an arbitrary central axis on the head suspension by the action of the fine actuator. Based on such rotation, the electromagnetic transducer on the head slider can be positioned on the recording track on the magnetic disk with high accuracy.
JP 2003-123416 A JP 2002-74870 A International Publication No. WO00 / 30081 Pamphlet JP 2000-348321 A

  In the case of such a fine movement actuator, the bonding area with the head slider is significantly limited. The adhesive strength between the fine movement actuator and the head slider decreases. If the adhesive strength is not sufficiently increased, the head slider is separated from the fine actuator when a large impact is applied to the HDD from the outside. Moreover, as described above, when the head slider rotates around the central axis by the action of the fine movement actuator, an unexpected change in posture is often caused in the head slider.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide a fine movement actuator that can be fixed to a driven member with sufficiently high strength. Another object of the present invention is to provide a micro drive device that can stabilize the posture of a driven member.

  To achieve the above object, according to the first aspect of the present invention, a first fixing member that extends in a predetermined longitudinal direction and receives a driven member at a reference position at the center in the longitudinal direction, and at least a first fixing member from one end of the first fixing member. A second fixing member extending in one direction and receiving the driven member at least at the tip; and at least extending in a second direction opposite to the first direction from the other end of the first fixing member and receiving the driven member at least at the tip. There is provided a fine actuator including a third fixing member, a first piezoelectric element fixed to the outer surface of the second fixing member, and a second piezoelectric element fixed to the outer surface of the third fixing member. .

  In such a fine movement actuator, for example, the tip of the second fixing member is drawn toward the first fixing member based on the contraction of the first piezoelectric element. Similarly, the tip of the third fixing member is drawn toward the first fixing member based on the contraction of the second piezoelectric element. Thus, a couple is generated around a predetermined central axis. The driven member rotates about the central axis.

  In this fine actuator, a large number of adhesion points can be secured between the driven member and the fixed member. Therefore, the driven member can be firmly fixed to the fine actuator. The driven member can be reliably prevented from dropping or detaching. The first, second and third fixing members may be integrally formed.

  According to the second invention, the first fixing member extending in a predetermined longitudinal direction and receiving the driven member at the reference position in the center in the longitudinal direction, and extending in two opposite directions from one end of the first fixing member, at least two points A second fixing member that receives the driven member, a third fixing member that extends in two opposite directions from the other end of the first fixing member, and receives the driven member at at least two points, and an outer surface of the second fixing member A first piezoelectric element that is fixed to the first fixing member in an inactive region that separates the pair of elastic bodies from each other, and a pair of expansion and contractions that are fixed to the outer surface of the third fixing member There is provided a fine actuator comprising: a second piezoelectric element aligned with a first fixing member in an inactive region that separates the bodies from each other.

  In such a fine movement actuator, for example, when one of the elastic members contracts by the first piezoelectric element, one end of the second fixing member is drawn toward the first fixing member. Similarly, when one elastic body contracts by the second piezoelectric element, one end of the third fixing member is drawn toward the first fixing member. Thus, a couple can be generated around a predetermined central axis. The driven member rotates about the central axis. On the contrary, when the other elastic body contracts by the first piezoelectric element, the other end of the second fixing member is drawn toward the first fixing member. When the other elastic body contracts by the second piezoelectric element, the other end of the third fixing member is drawn toward the first fixing member. Couples can be created around a predetermined central axis. The driven member can rotate in the opposite direction about the central axis.

  In this fine actuator, as described above, a large number of adhesion points can be secured between the driven member and the fixed member. Therefore, the driven member can be firmly fixed to the fine actuator. The driven member can be reliably prevented from dropping or detaching. The first, second and third fixing members may be integrally formed.

  Here, in the first piezoelectric element and the second piezoelectric element, the stretchable body, the inactive region, and the stretchable body may be configured by one continuous ceramic body. Such a ceramic body can be easily formed from, for example, a green sheet. However, any manufacturing method may be used for forming the ceramic body.

  In the fine movement actuator as described above, the attachment member that extends in the lateral width direction orthogonal to the longitudinal direction of the first fixing member may be formed integrally with the first fixing member. According to such an attachment member, the adhesive layer can be formed not only on the first fixing member but also on the attachment member when attaching the first fixing member. The range of the adhesive layer can be expanded. The first fixing member can be firmly fixed.

  A conductive wiring pattern may be formed on the first fixing member. Such a wiring pattern can connect the wiring on the second fixing member and the wiring on the third fixing member to each other. As a result, the wiring leading to the fine movement actuator can be simplified. In addition, the first fixing member may be made of a conductive material.

  The fine actuator as described above can be used by being incorporated in a recording medium driving device such as a hard disk driving device (HDD). At this time, the fine actuator may be sandwiched between a head slider and a head suspension that face each other on the recording medium. The head slider can be rotated at a minute angle by the action of the fine actuator. For example, the electromagnetic transducer on the head slider can follow the recording track with high accuracy.

  At this time, the recording medium driving device includes, for example, a swing arm, a head suspension that extends forward from the tip of the swing arm, a head slider, and a head suspension, and extends in a predetermined longitudinal direction. A first fixing member that receives the head slider at the reference position, a second fixing member that extends at least in the first direction from one end of the first fixing member, and that receives the head slider at least at the tip, and from the other end of the first fixing member. A third fixing member extending at least in a second direction opposite to one direction and receiving the head slider at least at the tip; a first piezoelectric element fixed to the outer surface of the second fixing member; and fixed to the outer surface of the third fixing member. The second piezoelectric element may be provided. In addition, the recording medium driving device includes a swing arm, a head suspension extending forward from the tip of the swing arm, a head slider, and a reference position at the center in the longitudinal direction extending in a predetermined longitudinal direction while being fixed to the head suspension. The first fixing member that receives the head slider at 2 and extends in two opposite directions from one end of the first fixing member, and the second fixing member that receives the head slider at at least two points and 2 opposite from the other end of the first fixing member. A third fixing member that extends in the direction and receives the head slider at at least two points, and is fixed to the outer surface of the second fixing member, and is positioned with respect to the first fixing member in an inactive region that separates the pair of elastic bodies from each other The first piezoelectric element to be aligned and the third fixing member are fixed to the outer surface, and are aligned with the first fixing member in an inactive region that separates the pair of elastic members from each other. A, and a second piezoelectric element.

  Such a recording medium driving device is disposed, for example, in a conductive terminal pad disposed on the head slider, a flexible printed wiring board separated from the head suspension in the floating area, and a floating area of the flexible printed wiring board. A conductive pad and a bonding member sandwiched between the terminal pad on the head slider and the conductive pad may be further provided. Thus, a current can be supplied to the head element on the head slider. In addition, the recording medium driving device includes a conductive terminal pad disposed on the head slider, a conductive pad disposed on the surface of the head suspension, a terminal pad on the head slider, and a conductive pad when supplying current. And a wire bonding member interposed therebetween.

  According to the third aspect of the present invention, the support member that receives the driven member, the first actuator that is coupled to the driven member and the support member, and causes the posture change of the driven member with respect to the support member, and the driven member are separated from the driven member. There is provided a micro drive device comprising a second actuator that is fixed to the support member while causing the support member to bend.

  In such a micro drive device, the driven member is driven relative to the support member by the action of the first actuator. In addition, the attitude of the driven member can be controlled based on the deflection of the support member. Thus, stabilization of the posture can be realized in the driven member.

  The first actuator and the second actuator may include, for example, one or more piezoelectric elements that are arranged point-symmetrically around the central axis that penetrates the driven member. In such a case, the support member is likely to be bent when the first actuator is operated. The second actuator can correct such deflection of the support member. Stabilization of the posture is realized in the driven member.

  According to the fourth aspect of the present invention, the apparatus includes: a support member that is continuous with the gimbal spring; a head slider that is received on the surface of the support member; and an actuator that is fixed to the support member while being separated from the head slider and causes the support member to bend. A head suspension assembly is provided.

  In such a head suspension assembly, the posture of the head slider can be controlled based on the deflection of the support member. The actuator need not be directly coupled to the head slider. The head slider can be bonded to the support member over a wide area.

  In particular, such a head suspension assembly may further include a piezoelectric element that is connected to the head slider and the support member and causes a change in the posture of the head slider with respect to the support member. In such a case, the support member is bent when the piezoelectric element is operated. The aforementioned actuator can correct such deflection of the support member. Stabilization of the posture is realized in the driven member.

  For example, this type of piezoelectric element may be arranged point-symmetrically around the central axis that passes through the head slider. In such a configuration, the support member is likely to be bent when the actuator is operated. Such deflection can be reliably corrected. In the head slider, the posture is stabilized. In this case, the actuator may be provided with one or more piezoelectric elements arranged symmetrically about the central axis that penetrates the head actuator.

  As described above, according to the present invention, it is possible to provide a fine movement actuator that can be fixed to a driven member with sufficiently high strength.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

  FIG. 1 schematically shows an internal structure of a hard disk drive (HDD) 11 according to a specific example of a recording medium drive. The HDD 11 includes, for example, a box-shaped housing body 12 that partitions a flat rectangular parallelepiped housing space. In the accommodation space, one or more magnetic disks 13 as recording media are accommodated. The magnetic disk 13 is mounted on the rotation shaft of the spindle motor 14. The spindle motor 14 can rotate the magnetic disk 13 at a high speed such as 7200 rpm or 10000 rpm. A lid body, that is, a cover (not shown) that seals the housing space with the housing body 12 is coupled to the housing body 12.

  The head actuator 15 is further accommodated in the accommodation space. The head actuator 15 includes an actuator block 17 rotatably connected to a support shaft 16 extending in the vertical direction. A plurality of actuator arms 18 extending in the horizontal direction from the support shaft 16 are defined in the actuator block 17. Such an actuator block 17 may be formed from aluminum based on casting, for example.

  A head suspension assembly 19 is attached to the tip of each actuator arm 18. In the head suspension assembly 19, a head suspension 21 extends forward from the tip of the actuator arm 18. A load beam that swings relative to the actuator arm 18 based on elastic deformation is incorporated in the head suspension 21.

  A flying head slider 22 is supported at the tip of the head suspension 21. A pressing force acts on the flying head slider 22 toward the surface of the magnetic disk 13 by the action of the load beam. When the magnetic disk 13 rotates, buoyancy acts on the flying head slider 22 by the action of an air flow generated along the surface of the magnetic disk 13. Due to the balance between the pressing force of the load beam and the buoyancy, the flying head slider 22 can continue to float with relatively high rigidity during the rotation of the magnetic disk 13.

  When the head actuator 15 rotates around the support shaft 16 during the flying of the flying head slider 22, the flying head slider 22 can move along the radial line of the magnetic disk 13. Based on such movement, the flying head slider 22 is positioned on a desired recording track on the magnetic disk 13. The rotation of the head actuator 15, that is, the swing of the actuator arm 18 may be realized through the action of a power source 23 such as a voice coil motor (VCM).

  As shown in FIG. 2, in the head suspension assembly 19 according to the first embodiment of the present invention, a so-called flexure 24 is fixed to the tip of the load beam. A flat plate member 25 is punched into the flexure 24. The flat plate member 25 can change its posture by the action of a so-called gimbal spring 26. The flying head slider 22 is received on the surface of the flat plate member 25. The flying head slider 22 can change the flying posture with respect to the surface of the magnetic disk 13 by the action of the gimbal spring 26.

The flying head slider 22 includes a slider body 27 made of Al ₂ O ₃ —TiC (Altic) formed in a flat rectangular parallelepiped. An electromagnetic conversion element, that is, a read / write head 28 is mounted on the slider body 27. The read / write head 28 is embedded in a head element built-in film 29 made of Al ₂ O ₃ (alumina) joined to the air outflow end of the slider body 27. The read / write head 28 writes information to the magnetic disk 13, for example, a read element such as a giant magnetoresistive effect (GMR) element or a tunnel junction magnetoresistive effect (TMR) element used when reading information from the magnetic disk 13. What is necessary is just to be comprised with writing elements, such as a thin film magnetic head used at the time.

  Two pairs of electrode terminals 31, 32, that is, terminal pads are arranged on the air outflow side end face of the flying head slider 22, that is, the surface of the head element built-in film 29. The pair of electrode terminals 31 is electrically connected to a reading element of the read / write head 28, for example. Thus, a sense current is supplied from the pair of electrode terminals 31 to the reading element. The voltage change of the sense current is taken out from the electrode terminal 31. The other pair of electrode terminals 32 is electrically connected to a write element of the read / write head 28, for example. A write current is supplied from the electrode terminal 32 to the write element. In response to the supply of the write current, a magnetic field is generated, for example, with a thin film coil pattern.

  The slider main body 27 and the head element built-in film 29 define a medium facing surface, that is, an air bearing surface 33 that faces the magnetic disk 13. A front rail 34 extending along the air inflow end of the slider main body 27 and a rear rail 35 extending adjacent to the air outflow end of the slider main body 27 are formed on the air bearing surface 33. So-called ABS (air bearing surfaces) 36 and 37 are defined on the top surfaces of the front rail 34 and the rear rail 35. The air inflow ends of the ABSs 36 and 37 are connected to the top surfaces of the rails 34 and 35 by steps 38 and 39. The read / write head 28 exposes the front end with the ABS 37. However, a DLC (diamond-like carbon) protective film that covers the front end of the read / write head 28 may be formed on the surface of the ABS 37.

  The airflow generated based on the rotation of the magnetic disk 13 is received by the air bearing surface 33. At this time, a relatively large positive pressure, that is, buoyancy is generated in the ABSs 36 and 37 by the action of the steps 38 and 39. Moreover, a large negative pressure is generated behind the front rail 34, that is, behind the front rail 34. The flying posture of the flying head slider 22 is established based on the balance between these buoyancy and negative pressure. The form of the flying head slider 22 is not limited to this form.

  A microactuator 41 is sandwiched between the flying head slider 22 and the flat plate member 25 of the flexure 24. The microactuator 41 connects the flying head slider 22 to the flat plate member 25. With the action of the microactuator 41, the flying head slider 22 can rotate around the rotation center axis CR that penetrates the flying surface 33. The rotation center axis CR is orthogonal to the surface of the flat plate member 25. Details of the microactuator 41 will be described later.

  A predetermined wiring pattern 42 is formed on the surface of the flexure 24. The wiring pattern 42 includes an electrode extraction conductive pattern 43 used for supplying the above-described sense current and write current, and a conductive pattern 44 used for supplying a driving voltage to the microactuator 41. The electrode extraction conductive pattern 43 includes a conductive pad extending along one horizontal plane orthogonal to one vertical plane including the surfaces of the electrode terminals 31 and 32.

  The electrode extraction conductive pattern 43 and the electrode terminals 31 and 32 are connected to each other by a conductive wire 45. Each conductive wire 45 includes a first contact 46 that stands upright from the surface of the electrode terminals 31 and 32, and a second contact 47 that stands upright from the surface of the conductive pattern 43 for conducting extraction. The first and second contacts 46 and 47 are connected to each other by a wire body 48. The 90 degree angle difference between the first and second contacts 46 and 47 is absorbed by the curvature of the wire body 48. Such a conductive wire 45 may be formed based on, for example, a wire bonding method.

  As shown in FIG. 3, the microactuator 41 according to an embodiment of the present invention includes a long first fixing member 51 extending in the lateral width direction of the flying head slider 22. The first fixing member 51 receives the upper surface of the flying head slider 22 at the reference position in the center in the lateral width direction. At this reference position, the flying head slider 22 is bonded to the first fixing member 51 by the action of the first adhesive layer 52. The first adhesive layer 52 extends from the rotation center axis CR toward the periphery. However, the first adhesive layer 52 exhibits an adhesive force to such an extent that the rotation of the flying head slider 22 is not hindered with respect to the first fixing member 51. The first fixing member 51 is fixed to the flat plate member 25 by the action of the adhesive layer 53. The first adhesive layer 52 and the adhesive layer 53 may be made of, for example, an epoxy adhesive.

  A second fixing member 54 extending in two opposite directions is integrally formed at one end of the first fixing member 51. The second fixing member 54 only needs to extend in the front-rear direction orthogonal to the aforementioned width direction. The front end and the rear end of the second fixing member 54 receive the side surface of the flying head slider 22. The flying head slider 22 is bonded to the front end and the rear end of the second fixing member 54 by the action of the second adhesive layer 55. The second adhesive layers 55 are separated from each other at a predetermined interval. The second adhesive layer 55 may be made of, for example, an epoxy adhesive. A first piezoelectric element 56 is attached to the outward surface of the second fixing member 54. For the attachment, for example, an adhesive is used. Details of the first piezoelectric element 56 will be described later.

  Similarly, a third fixing member 57 extending in two opposite directions is integrally formed at the other end of the first fixing member 51. The first to third fixing members 51, 54, and 57 may be molded from a zirconia green sheet based on firing, for example. The third fixing member 57 only needs to extend in the front-rear direction perpendicular to the lateral width direction. The front end and the rear end of the third fixing member 57 receive the side surface of the flying head slider 22. The flying head slider 22 is bonded to the front end and the rear end of the third fixing member 57 by the action of the third adhesive layer 58. The third adhesive layers 58 are separated from each other at a predetermined interval. The third adhesive layer 58 may be made of, for example, an epoxy adhesive. A second piezoelectric element 59 is attached to the outward surface of the third fixing member 57. For the attachment, for example, an adhesive is used.

  As shown in FIG. 4, the first piezoelectric element 56 includes a first elastic body 62a on the front end side and a second elastic body 62b on the rear end side. The first and second elastic bodies 62 a and 62 b are separated from each other by an inactive region 63. The first piezoelectric element 56 is positioned on the second fixing member 54 based on the inactive region 63. That is, the first elastic body 62 a is disposed between the front end of the second fixing member 54 and the first fixing member 51. The second elastic body 62 b is disposed between the rear end of the second fixing member 54 and the first fixing member 51.

  The first and second elastic bodies 62a and 62b are formed of a laminate of piezoelectric ceramic thin plates. The piezoelectric ceramic thin plates are sequentially stacked in an upright posture on the surface of the flat plate member 25. The piezoelectric ceramic thin plate may be made of a piezoelectric material such as PNN-PT-PZ. Here, the first stretchable body 62a, the inert region 63, and the second stretchable body 62b are composed of one continuous ceramic body.

  In the first elastic body 62a, the first electrode layer 64 and the second electrode layer 65 are alternately sandwiched between the piezoelectric ceramic thin plates. A first extraction electrode layer 66 is joined to the outer wall of the first elastic body 62a. All the first electrode layers 64 are connected to the first extraction electrode layer 66. Similarly, in the second elastic body 62b, the first electrode layer 64 and the second electrode layer 65 are alternately sandwiched between the piezoelectric ceramic thin plates. A first extraction electrode layer 66 is joined to the outer wall of the second elastic body 62b. All the first electrode layers 64 are connected to the first extraction electrode layer 66.

  On the other hand, the second extraction electrode layer 67 is joined to the outer wall of the inactive region 63. All the second electrode layers 65 are connected to the second extraction electrode layer 67. Here, the second electrode layer 65 in the first elastic body 62a and the second electrode layer 65 in the second elastic body 62b are continuous through the inactive region 63. The first and second electrode layers 64 and 65 and the first and second extraction electrode layers 66 and 67 may be made of a conductive metal material such as Pt.

  For example, when a driving voltage is supplied to the first extraction electrode layer 66 on the front end side, a potential difference is generated between the first electrode layer 64 and the second electrode layer 65 in the first elastic body 62a. In an individual piezoceramic sheet, polarization is induced depending on the direction of the voltage established between the first and second electrode layers 64, 65. At the same time, a voltage is applied in this polarization direction. As a result, the first elastic body 62a contracts in the front-rear direction. Similarly, when a driving voltage is supplied to the first extraction electrode layer 66 on the rear end side, the second stretchable body 62b contracts in the front-rear direction. The second piezoelectric element 59 may be configured in the same manner as the first piezoelectric element 56. However, in the second piezoelectric element 59, the first elastic body 62a is disposed between the rear end of the third fixing member 57 and the first fixing member 51, and the second elastic body 62b is connected to the front end of the third fixing member 57. It arrange | positions between the 1st fixing members 51.

  For example, a PNN-PT-PZ green sheet is used in manufacturing the piezoelectric elements 56 and 59. First and second electrode layers 64 and 65 are formed on each green sheet. For example, screen printing may be used for the formation. For the material of the first and second electrode layers 64 and 65, a conductive material such as Pt may be used. The green sheets are laminated in order and then fired in the atmosphere. The green sheet is exposed to a high temperature of about 1050 ° C., for example. The plurality of piezoelectric elements 56 and 59 can be cut out from the ceramic body thus formed. The cut piezoelectric elements 56 and 59 are bonded to the second fixing member 54 and the third fixing member 57. In addition, the piezoelectric elements 56 and 57 may be formed based on a printing method of PNN-PT-PZ paste or Pt paste. In this case, the piezoelectric ceramic thin plate and the first and second electrodes 64 and 65 are formed directly on the surfaces of the second fixing member 54 and the third fixing member 57.

  Assume that the read / write head 28 on the flying head slider 22 is positioned with respect to the recording track on the magnetic disk 13. Based on the swing of the actuator arm 18, the read / write head 28 is positioned with respect to the recording track. When the read / write head 28 follows the recording track, the controller chip supplies an electric signal to the microactuator 41 based on so-called servo control.

  As shown in FIG. 5, when a driving voltage is supplied to the first elastic body 62a by the first and second piezoelectric elements 56 and 59, the first elastic body 62a contracts. The front end of the first piezoelectric element 56 is drawn toward the first fixing member 51. Similarly, the rear end of the second piezoelectric element 59 is drawn toward the first fixing member 51. Thus, a couple is generated around the rotation center axis CR. The flying head slider 22 rotates clockwise around the rotation center axis CR. In accordance with this rotation, the read / write head 28 moves in the radial direction of the magnetic disk 13. On the other hand, when a driving voltage is supplied to the second elastic body 62b by the first and second piezoelectric elements 56 and 59, the second elastic body 62b contracts as shown in FIG. The rear end of the first piezoelectric element 56 is drawn toward the first fixing member 51. Similarly, the front end of the second piezoelectric element 59 is drawn toward the first fixing member 51. A couple is generated around the rotation center axis CR. The flying head slider 22 rotates counterclockwise around the rotation center axis CR. In accordance with this rotation, the read / write head 28 moves in the radial direction of the magnetic disk 13. Thus, the read / write head 28 can keep following the recording track with high accuracy.

  As is clear from FIGS. 5 and 6, the first extraction electrode layer 66 of the first elastic bodies 62 a and 62 a is electrically connected to the first conductive pad 71 on the flat plate 25. For the connection, for example, a conductive ball terminal 72 can be used. A driving voltage is supplied from the conductive pattern 44 to the first conductive pad 71. The first conductive pads 71 may be connected to each other by, for example, an arbitrary wiring pattern 73. In this way, a drive voltage can be supplied to the pair of first elastic bodies 62a from the controller chip by the single wiring pattern 44.

  Similarly, the first extraction electrode layer 66 of the second elastic bodies 62 b and 62 b is electrically connected to the second conductive pad 74 on the flat plate 25. For the connection, for example, a conductive ball terminal 75 can be used. A driving voltage is supplied from the conductive pattern 44 to the second conductive pad 74. The second conductive pads 74 may be connected to each other by an arbitrary wiring pattern 76, for example. In this way, a drive voltage can be supplied to the pair of second elastic bodies 62b from the controller chip by the single wiring pattern 44.

  Furthermore, the second extraction electrode layer 67 in the inactive regions 63 and 63 is electrically connected to the third conductive pad 77 on the flat plate 25. For the connection, for example, a conductive ball terminal 78 can be used. The driving voltage supplied to the first elastic body 62 a and the second elastic body 62 b is released from the third conductive pad 77 to the conductive pattern 44. The third conductive pads 77 may be connected to each other by, for example, an arbitrary wiring pattern 79. Thus, the drive voltage can be released from the pair of second extraction electrode layers 67 by the single wiring pattern 44. For example, the wiring pattern 79 may be formed on the first fixing member 51.

  In the head suspension assembly 19 as described above, the rotation of the flying head slider 22 is used for minute movement of the read / write head 28. The moment of inertia generated by the flying head slider 22 during rotation is kept low. Therefore, only a relatively small moment acts on the microactuator 41. As a result, the natural frequency of the vibration system composed of the flying head slider 22 and the microactuator 41 can be increased. The frequency of the servo signal can be secured in a wide frequency band.

  In addition, as compared with the case where the first piezoelectric element 56 and the second piezoelectric element 59 are directly bonded to the flat plate member 25 of the flexure 24, a large number of bonding positions are secured between the flying head slider 22 and the microactuator 41. Can. Therefore, the flying head slider 22 can be firmly fixed to the microactuator 41. For example, even when a large impact is applied from the outside of the HDD 11, the flying head slider 22 can be reliably prevented from dropping or detaching.

  In the microactuator 41 as described above, for example, as shown in FIG. 7, a mounting member 81 that extends in the width direction orthogonal to the longitudinal direction of the first fixing member 51, that is, the front-rear direction of the flying head slider 22 is integrally formed. Also good. Such a mounting member 81 can expand the range of the adhesive layer 53 as compared to the first fixing member 51 described above. Therefore, the first fixing member 51 can be more firmly fixed to the flat plate member 25. The first fixing member 51, that is, the flying head slider 22 can be more reliably prevented from dropping.

  In addition, for example, as illustrated in FIG. 8, the first fixing member 51 may be configured as a member different from the second and third fixing members 54 and 57. In such a case, the first fixing member 51 may be made of, for example, a conductive metal material. If conductivity is imparted to the first fixing member 51, the first fixing member 51 can function as the wiring pattern 79 that connects the third conductive pads 77 to each other as described above. Even in this case, for example, as shown in FIG. 9, the first fixing member 51 may be integrally formed with an attachment member 82 extending in the width direction. The attachment member 82 greatly contributes to the expansion of the range of the adhesive layer 53. Here, on the second fixing member 54 and the third fixing member 57, for example, as shown in FIGS. 8 and 9, the second extraction electrode 67 is connected to connect the second extraction electrode layer 67 and the third conductive pad 77. An overhanging portion 77a may be formed on the surface.

  The second fixing member 54 and the third fixing member 57 need only extend from the first fixing member 51 to at least one of them. For example, when the second fixing member 54 extends forward from the first fixing member 51, the third fixing member 57 may extend rearward from the first fixing member 51. On the other hand, when the second fixing member 54 extends rearward from the first fixing member 51, the third fixing member 57 may extend forward from the first fixing member 51. In such a case, only one of the first and second elastic bodies 62a and 62b may be established in the piezoelectric elements 56 and 59. In addition, a space that separates the first and second elastic bodies 62a and 62b from each other may be disposed in the inactive area 63 described above. That is, the first and second elastic bodies 62a and 62b may be configured separately.

  In the head suspension assembly 19 as described above, for example, as shown in FIG. 10, a flexible printed wiring board 83 may be used for supplying a sense current and a write current. For example, the flexible printed wiring board 83 may extend from the load beam to the flying head slider 22 forward. The flexible printed wiring board 83 is separated from the head suspension 21, that is, the flexure 24 in the floating region. In other words, the flexible printed wiring board 83 does not contact the flat plate member 25 of the flexure 24.

  Conductive pads 84 are formed on the surface of the flexible printed wiring board 83. The individual conductive pads 84 are aligned with the corresponding electrode terminals 31 and 32, respectively. The electrode terminals 31 and 32 are individually connected to the corresponding conductive pads 84. For such connection, a bonding member such as a gold ball may be used. Similarly to the above, each conductive pad 84 is connected to the corresponding electrode extraction conductive pattern 43. Similarly, the electrode extraction conductive pattern 43 may be formed on the surface of the flexible printed wiring board 82. Like reference numerals are attached to the structure or components equivalent to those of the aforementioned head suspension assembly 19.

  In the head suspension assembly 19, the electrode terminals 31 and 32 move relative to the flexure 24 as the flying head slider 22 rotates. At this time, movement of the electrode terminals 31 and 32 causes deformation of the flexible printed wiring board 82. Therefore, the rotation of the flying head slider 22 is not hindered. Electrical connection can be reliably maintained between the electrode terminals 31 and 32 and the conductive pad 84.

  FIG. 11 shows a head suspension assembly 19 according to a second embodiment of the present invention. The head suspension assembly 19 incorporates a microactuator 101 according to a specific example of the present invention. The microactuator 101, that is, the micro-drive device, includes a driven member, that is, a support member that receives the flying head slider 22. This support member corresponds to the flat plate member 25 described above.

  A first actuator 102 is disposed between the flying head slider 22 and the flat plate member 25. The first actuator 102 includes a pair of piezoelectric elements, that is, first and second piezoelectric elements 103a and 103b, which are arranged point-symmetrically around the aforementioned rotation center axis CR. The first and second piezoelectric elements 103a and 103b extend in parallel with each other. The front end of the first piezoelectric element 103 a is fixed to the flat plate member 25 by the function of the first adhesive layer 104. The rear end of the first piezoelectric element 103 a is fixed to the flying head slider 22 by the action of the second adhesive layer 105. Thus, the first piezoelectric element 103 a is connected to the flying head slider 22 and the flat plate member 25. Similarly, the rear end of the second piezoelectric element 103 b is fixed to the flat plate member 25 by the function of the first adhesive layer 104. The front end of the second piezoelectric element 103 b is fixed to the flying head slider 22 by the action of the second adhesive layer 105. The second piezoelectric element 103 b is connected to the flying head slider 22 and the flat plate member 25. The first and second adhesive layers 104 and 105 may be made of, for example, an epoxy adhesive.

  As shown in FIG. 12, the first piezoelectric element 103a is composed of a laminate of piezoelectric ceramic thin plates. The piezoelectric ceramic thin plates are sequentially stacked in an upright posture on the surface of the flat plate member 25. The piezoelectric ceramic thin plate may be made of a piezoelectric material such as PNN-PT-PZ.

  In the first piezoelectric element 103a, the first electrode layer 106 and the second electrode layer 107 are alternately sandwiched between the piezoelectric ceramic thin plates. First and second extraction electrode layers 108 and 109 are joined to the front end face and the rear end face of the first piezoelectric element 103a. All the first electrode layers 106 are connected to the first extraction electrode layer 108. Similarly, all the second electrode layers 107 are connected to the second extraction electrode layer 109. The first and second electrode layers 106 and 107 and the first and second extraction electrode layers 108 and 109 may be made of a conductive metal material such as Pt. The second piezoelectric element 103b may be configured in the same manner as the first piezoelectric element 103a. However, in the second piezoelectric element 103b, the first extraction electrode layer 108 is disposed at the rear end, while the second extraction electrode layer 109 is disposed at the front end. The first and second piezoelectric elements 103a and 103b may be formed based on a green sheet of a piezoelectric material such as PNN-PT-PZ, similarly to the piezoelectric elements 56 and 59 described above.

  For example, when a driving voltage is generated between the first and second extraction electrode layers 108 and 109, a potential difference is generated between the first electrode layer 106 and the second electrode layer 107 in the first and second piezoelectric elements 103a and 103b. Is produced. In each piezoceramic thin plate, polarization is induced depending on the direction of the voltage established between the first and second electrode layers 106, 107. At the same time, a voltage is applied in this polarization direction. As a result, both the first and second piezoelectric elements 103a and 103b contract in the front-rear direction. In the first piezoelectric element 103 a, the rear end is drawn toward the front end fixed to the flat plate member 25 by the adhesive layer 104. On the other hand, in the second piezoelectric element 103b, the front end is drawn toward the rear end fixed to the flat plate member 25 by the adhesive layer 104. Thus, a couple is generated around the rotation center axis CR. The flying head slider 22 rotates counterclockwise around the rotation center axis CR. As long as the drive voltage exceeds the polarization voltage, the first and second piezoelectric elements 103a and 103b contract even if the drive voltage is supplied from any of the first and second extraction electrode layers 108 and 109.

  As shown in FIG. 12, the microactuator 101 incorporates a second actuator 110 that is fixed to the flat plate member 25 while being separated from the flying head slider 22. The second actuator 110 includes, for example, a pair of auxiliary piezoelectric elements, that is, first and second auxiliary piezoelectric elements 111a and 111b that are arranged point-symmetrically around the central rotation axis CR. The first and second auxiliary piezoelectric elements 111a and 111b are composed of a laminated body of piezoelectric ceramic thin plates. The piezoelectric ceramic thin plates may be stacked in order on the surface of the flat plate member 25 in an upright posture. The piezoelectric ceramic thin plate may be made of a piezoelectric material such as PNN-PT-PZ. The first and second auxiliary piezoelectric elements 111a and 111b are fixed to the flat plate member 25 based on an adhesive layer (not shown) sandwiched over the entire area between the flat plate member 25 and the first and second auxiliary piezoelectric elements 111a and 111b. Is done. However, the first and second auxiliary piezoelectric elements 111a and 111b may be fixed to the flat plate member 25 at least at the front end and the rear end.

  In the first and second auxiliary piezoelectric elements 111a and 111b, as described above, the first electrode layer 112 and the second electrode layer 113 are alternately sandwiched between the piezoelectric ceramic thin plates. The first electrode layer 112 is connected to one extraction electrode layer 114. The second electrode layer 113 is connected to the other extraction electrode layer 115. The first and second electrode layers 112 and 113 and the extraction electrode layers 114 and 115 may be made of a conductive metal material such as Pt.

  For example, when a drive voltage is generated between the first and second extraction electrode layers 114 and 115, the first and second auxiliary piezoelectric elements 111 a and 111 b are interposed between the first electrode layer 112 and the second electrode layer 113. A potential difference is created. In an individual piezoelectric ceramic thin plate, polarization is caused according to the direction of the voltage established between the first and second electrode layers 112 and 113. At the same time, a voltage is applied in this polarization direction. As a result, both the first and second auxiliary piezoelectric elements 111a and 111b contract in the front-rear direction. The flat plate member 25 bends in response to such contraction. As long as the drive voltage exceeds the polarization voltage, the first and second auxiliary piezoelectric elements 111a and 111b contract even if the drive voltage is supplied from any of the first and second extraction electrode layers 114 and 115.

  Assume that the read / write head 28 on the flying head slider 22 is positioned with respect to the recording track on the magnetic disk 13. Here, it is assumed that the controller chip in the HDD 11 can supply an electrical signal to the microactuator 101 in the range of 0V to 30V, for example. When a maximum voltage of 30 V is applied to the first and second piezoelectric elements 103a and 103b, the first and second piezoelectric elements 103a and 103b contract to the maximum extent. At this time, the read / write head 28 can ensure a maximum linear movement amount, that is, a maximum stroke of, for example, about 1.0 μm on the flat plate member 25 in a direction substantially orthogonal to the recording track.

  At the start of positioning, an electric signal of 15 V is supplied to the microactuator 101. Therefore, the read / write head 28 is positioned on the flat plate member 25 with a stroke that is one half of the maximum stroke (= 0.5 μm). Subsequently, the read / write head 28 is positioned with respect to the recording track based on the swing of the actuator arm 18.

  When the read / write head 28 follows the recording track, the controller chip supplies an electrical signal to the microactuator 101 based on so-called servo control. When the voltage of the electric signal supplied to the piezoelectric elements 103a and 103b decreases from 15V, the piezoelectric elements 103a and 103b expand. The flying head slider 22 rotates clockwise around the rotation center axis CR. In accordance with this rotation, the read / write head 28 can move in the radial direction of the magnetic disk 13. On the contrary, when the voltage of the electric signal supplied to the microactuator 101 increases from 15V, the piezoelectric elements 103a and 103b contract. The flying head slider 22 rotates counterclockwise around the rotation center axis CR. In accordance with this rotation, the read / write head 28 can move in the radial direction of the magnetic disk 13 in the opposite direction. Thus, the read / write head 28 can keep following the recording track with high accuracy.

  At this time, a driving voltage is supplied to the first and second auxiliary piezoelectric elements 111a and 111b in the same manner as the piezoelectric elements 103a and 103b. The flat plate member 25 bends in response to the contraction of the first and second auxiliary piezoelectric elements 111a and 111b. As shown in FIG. 13, the corner of the flat plate member 25 is pulled up. As described above, when the first actuator 102 acts on the flying head slider 22, stress acts on the flat plate member 25. This stress brings the adhesive layers 104 closer together. The corner of the flat plate member 25 is pulled up according to the stress. If the four corners are evenly lifted in this way, the flying head slider 22 can be prevented from changing its posture. The flying posture of the flying head slider 22 is stable. As apparent from FIG. 13, if the second actuator 110 does not act, only the two corners of the flat plate member 25 are pulled up. As a result, the flying head slider 22 is exposed to an unexpected posture change.

  As shown in FIG. 14, the first and second extraction electrode layers 108 and 109 of the first piezoelectric element 103 a are electrically connected to the conductive pads 117 and 118 on the flat plate member 25. For connection, for example, conductive ball terminals 119 and 121 can be used. Similarly, the first and second extraction electrode layers 108 and 109 of the second piezoelectric element 103 b are electrically connected to the conductive pads 122 and 123 on the flat plate member 25. For connection, for example, conductive ball terminals 124 and 125 can be used. The first and second extraction electrode layers 114 and 115 of the first auxiliary piezoelectric element 111 a are electrically connected to the conductive pads 127 and 128 on the flat plate member 25. For the connection, for example, conductive ball terminals 129 and 131 can be used. The first and second extraction electrode layers 114 and 115 of the second auxiliary piezoelectric element 111 b are electrically connected to the conductive pads 132 and 133 on the flat plate member 25. For connection, for example, conductive ball terminals 134 and 135 can be used. As is clear from FIG. 14, the conductive pads 117, 123, 128, 132 are connected to a common wiring pattern 136. The conductive pads 118, 122, 127 and 133 are connected to the common wiring pattern 137. Thus, a driving voltage can be supplied to the first and second piezoelectric elements 103a and 103b and the first and second auxiliary piezoelectric elements 111a and 111b by a pair of wiring patterns 136 and 137 from the controller chip. In addition, the drive voltage can be used in common by the first and second piezoelectric elements 103a and 103b and the first and second auxiliary piezoelectric elements 111a and 111b. The complexity of the wiring structure can be reliably prevented.

  In the head suspension assembly 19 according to the second embodiment as described above, for example, as shown in FIG. 15, the second actuator 110 a may be mounted on the back surface of the flat plate member 25. At this time, the first actuator 102 receives the flying head slider 22 on the surface of the flat plate member 25. Similarly to the above, the second actuator 110a may include a pair of auxiliary piezoelectric elements 141a and 141b that are arranged point-symmetrically around the rotation center axis CR. Here, the individual auxiliary piezoelectric elements 141a and 141b are arranged biased toward the first adhesive layer 104 side. That is, the auxiliary piezoelectric element 141a is disposed on the front end side of the first piezoelectric element 103a, while the auxiliary piezoelectric element 141b is disposed on the rear end side of the second piezoelectric element 103b. According to such an arrangement, the contraction of the auxiliary piezoelectric elements 141a and 141b can counter the aforementioned stress. The deflection can be eliminated. As a result, raising of the corners is avoided. The flying posture of the flying head slider 22 is stable.

  In the microactuators 41 and 101 as described above, the structure and arrangement of the piezoelectric elements may be set as appropriate.

  (Supplementary Note 1) A first fixing member that extends in a predetermined longitudinal direction and receives a driven member at a reference position in the center in the longitudinal direction, and extends in at least a first direction from one end of the first fixing member, and is driven at least at the tip. A second fixing member that receives the member, a third fixing member that extends at least in the second direction opposite to the first direction from the other end of the first fixing member, and that receives the driven member at least at the tip. A fine actuator comprising: a first piezoelectric element fixed to the outer surface; and a second piezoelectric element fixed to the outer surface of the third fixing member.

  (Additional remark 2) The fine movement actuator of Additional remark 1 WHEREIN: The said 1st, 2nd and 3rd fixing member are integrally formed, The fine movement actuator characterized by the above-mentioned.

  (Additional remark 3) The fine movement actuator of Additional remark 1 or 2 WHEREIN: The said to-be-driven member is a head slider which faces a recording medium, The fine movement actuator characterized by the above-mentioned.

  (Additional remark 4) The fine movement actuator in any one of Additional remarks 1-3 WHEREIN: The 1st fixing member is integrally formed with the attachment member which spreads in the horizontal width direction orthogonal to the said longitudinal direction. Actuator.

  (Additional remark 5) The fine movement actuator in any one of Additional remarks 1-4 WHEREIN: A conductive wiring pattern is formed on a said 1st fixing member, The fine movement actuator characterized by the above-mentioned.

  (Additional remark 6) The fine movement actuator of Additional remark 1 WHEREIN: A said 1st fixing member is comprised from an electroconductive material, The fine movement actuator characterized by the above-mentioned.

  (Supplementary Note 7) A first fixing member that extends in a predetermined longitudinal direction and receives a driven member at a reference position in the center in the longitudinal direction, and extends in two opposite directions from one end of the first fixing member. A second fixing member that receives the driving member, a third fixing member that extends in two opposite directions from the other end of the first fixing member, and that receives the driven member at at least two points, and is fixed to the outer surface of the second fixing member. The first piezoelectric element that is aligned with the first fixing member in an inactive region that separates the pair of expansion bodies from each other, and the pair of expansion bodies are fixed to the outer surface of the third fixing member. And a second piezoelectric element aligned with the first fixing member in an inactive region separated from each other.

  (Additional remark 8) The fine movement actuator of Additional remark 7 WHEREIN: In said 1st piezoelectric element, an expansion-contraction body, an inactive area, and an expansion-contraction body are comprised from 1 continuous ceramic body, The fine movement actuator characterized by the above-mentioned.

  (Additional remark 9) The fine movement actuator of Additional remark 7 or 8 WHEREIN: In said 2nd piezoelectric element, an expansion-contraction body, an inactive area, and an expansion-contraction body are comprised from 1 continuous ceramic body, The fine-movement actuator characterized by the above-mentioned.

  (Additional remark 10) The fine movement actuator in any one of additional remarks 7-9 WHEREIN: The said to-be-driven member is a head slider which faces a recording medium, The fine movement actuator characterized by the above-mentioned.

  (Additional remark 11) The fine movement actuator in any one of Additional remarks 7-10, The said 1st, 2nd and 3rd fixing member are integrally formed, The fine movement actuator characterized by the above-mentioned.

  (Additional remark 12) The fine movement actuator in any one of additional remarks 7-11 WHEREIN: The attachment member which spreads in the width direction orthogonal to the said longitudinal direction is integrally formed in the said 1st fixing member, The fine movement characterized by the above-mentioned. Actuator.

  (Additional remark 13) The fine movement actuator in any one of Additional remarks 7-12 WHEREIN: A conductive wiring pattern is formed on a said 1st fixing member, The fine movement actuator characterized by the above-mentioned.

  (Additional remark 14) The fine movement actuator of Additional remark 7 WHEREIN: A said 1st fixing member is comprised from an electroconductive material, The fine movement actuator characterized by the above-mentioned.

  (Supplementary Note 15) A swing arm, a head suspension that extends forward from the tip of the swing arm, a head slider, and a head slider that is fixed to the head suspension and extends in a predetermined longitudinal direction. A first fixing member to be received, a second fixing member extending at least in the first direction from one end of the first fixing member, and receiving a head slider at least at the tip, and a second opposite to the first direction from the other end of the first fixing member. A third fixing member that extends at least in the direction and receives the head slider at least at the tip, a first piezoelectric element that is fixed to the outer surface of the second fixing member, and a second piezoelectric element that is fixed to the outer surface of the third fixing member. A recording medium driving device comprising:

  (Supplementary Note 16) In the recording medium driving device according to Supplementary Note 15, the conductive terminal pad disposed on the head slider, the flexible printed wiring board separated from the head suspension in the floating area, and the floating area of the flexible printed wiring board And a bonding member sandwiched between the terminal pad on the head slider and the conductive pad.

  (Supplementary note 17) In the recording medium driving device according to supplementary note 15, the conductive terminal pad disposed on the head slider, the conductive pad disposed on the surface of the head suspension, the terminal pad on the head slider, and the conductive member. And a wire bonding member interposed between the conductive pads.

  (Supplementary Note 18) A swing arm, a head suspension that extends forward from the tip of the swing arm, a head slider, and a head slider that is fixed to the head suspension and extends in a predetermined longitudinal direction. A first fixing member to be received, extending in two opposite directions from one end of the first fixing member, a second fixing member receiving the head slider at at least two points, and extending in two opposite directions from the other end of the first fixing member, A third fixing member that receives the head slider at at least two points, and a third fixing member that is fixed to the outer surface of the second fixing member and that is aligned with the first fixing member in an inactive region that separates the pair of elastic members from each other. One piezoelectric element and a second piezoelectric element that is fixed to the outer surface of the third fixing member and is aligned with the first fixing member in an inactive region that separates the pair of elastic bodies from each other Recording medium drive, characterized in that it comprises a.

  (Supplementary note 19) In the recording medium driving device according to supplementary note 18, a conductive terminal pad disposed on the head slider, a flexible printed wiring board separated from the head suspension in the floating area, and a floating area of the flexible printed wiring board And a bonding member sandwiched between the terminal pad on the head slider and the conductive pad.

  (Supplementary note 20) In the recording medium driving device according to supplementary note 18, the conductive terminal pad disposed on the head slider, the conductive pad disposed on the surface of the head suspension, the terminal pad on the head slider, and the conductive member. And a wire bonding member interposed between the conductive pads.

  (Supplementary Note 21) A support member that receives the driven member, a first actuator that is coupled to the driven member and the support member, and causes a change in the attitude of the driven member with respect to the support member, and is supported while being separated from the driven member A microdrive device comprising: a second actuator fixed to the member and causing the support member to bend.

  (Supplementary note 22) The microdrive device according to supplementary note 21, wherein the first actuator includes one or more piezoelectric elements arranged symmetrically about a central axis that penetrates the driven member. apparatus.

  (Supplementary note 23) The microdrive device according to supplementary note 22, wherein the second actuator includes one or more piezoelectric elements arranged point-symmetrically around the central axis.

  (Supplementary Note 24) A support member that is continuous with the gimbal spring, a head slider that is received on the surface of the support member, and an actuator that is fixed to the support member while being separated from the head slider and causes the support member to bend. Head suspension assembly.

  (Supplementary note 25) The head suspension assembly according to supplementary note 24, further comprising: a piezoelectric element coupled to the head slider and the support member to cause a change in posture of the head slider with respect to the support member. .

  (Supplementary note 26) The head suspension assembly according to supplementary note 25, wherein the piezoelectric elements are arranged symmetrically about a central axis passing through the head slider.

  (Supplementary note 27) The head suspension assembly according to supplementary note 26, wherein the actuator includes one or more piezoelectric elements arranged point-symmetrically around the central axis.

1 is a plan view schematically showing a structure of a hard disk drive (HDD) according to a specific example of a recording medium drive. FIG. 3 is an enlarged perspective view schematically showing a structure of a main part of the head suspension assembly according to the first embodiment of the present invention. It is a disassembled perspective view of a flying head slider and a microactuator. It is an expansion perspective view which shows the structure of a 1st piezoelectric element roughly. It is an enlarged partial plan view of the head suspension assembly for explaining the operation of the microactuator. It is an enlarged partial plan view of the head suspension assembly for explaining the operation of the microactuator. It is a perspective view which shows roughly the structure of the microactuator which concerns on another specific example. It is a perspective view which shows roughly the structure of the microactuator which concerns on another specific example. It is a perspective view which shows roughly the structure of the microactuator which concerns on another specific example. FIG. 10 is an enlarged perspective view schematically showing a structure of a main part of a head suspension assembly according to another specific example corresponding to FIG. 2. FIG. 4 is an exploded perspective view of a flying head slider and a microactuator that correspond to FIG. 3 and are incorporated in a head suspension assembly according to a second embodiment of the present invention. It is an enlarged plan view of a micro drive device, that is, a microactuator. It is a general view of the flat plate member which shows the bending of a flat plate member. It is an enlarged plan view of a flat plate member schematically showing a wiring structure of a microactuator. It is a disassembled perspective view which shows schematically the structure of the microactuator which concerns on the other specific example with the head suspension assembly which concerns on 2nd Embodiment of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 11 Hard disk drive device (HDD) as a recording medium drive device, 13 Magnetic disk as a recording medium, 18 Swing arm (actuator arm), 19 Head suspension assembly, 21 Head suspension, 22 Head slider as a driven member, 25 Support member (flat plate member), 26 Gimbal spring, 31, 32 Terminal pad (electrode terminal), 41 Fine actuator (microactuator), 45 Wire bonding member (conductive wire), 51 First fixing member, 54 Second fixing member, 56 1st piezoelectric element, 57 3rd fixing member, 59 2nd piezoelectric element, 62a 1st expansion / contraction body, 62b 2nd expansion / contraction body, 63 inert region, 79 wiring pattern, 81 attachment member, 82 attachment member, 83 flexible print Wiring board, 8 4 conductive pads, 101 micro-drive device (microactuator), 102 first actuator, 103a first piezoelectric element, 103b second piezoelectric element, 110 second actuator, 111a piezoelectric element (first auxiliary piezoelectric element), 111b piezoelectric element (Second auxiliary piezoelectric element).

Claims (5)

  A first fixing member extending in a predetermined longitudinal direction and receiving a driven member at a reference position in the center in the longitudinal direction; and a first fixing member extending in at least a first direction from one end of the first fixing member and receiving the driven member at least at a tip. Two fixing members, a third fixing member extending at least in a second direction opposite to the first direction from the other end of the first fixing member, and receiving the driven member at least at the tip, and fixed to the outer surface of the second fixing member And a second piezoelectric element fixed to the outer surface of the third fixing member.   A first fixing member that extends in a predetermined longitudinal direction and receives the driven member at a reference position in the center in the longitudinal direction, and extends in two opposite directions from one end of the first fixing member, and receives the driven member at at least two points. A second fixing member, a third fixing member extending in two opposite directions from the other end of the first fixing member, and receiving the driven member at at least two points, and fixed to the outer surface of the second fixing member, The first piezoelectric element that is aligned with the first fixing member in an inactive region that separates the elastic members from each other, and the inert material that is fixed to the outer surface of the third fixing member and separates the pair of elastic members from each other And a second piezoelectric element aligned with the first fixing member in the region.   A swing arm, a head suspension extending forward from the tip of the swing arm, a head slider, and a first fixed receiving the head slider at a reference position at the center in the longitudinal direction while being fixed to the head suspension and extending in a predetermined longitudinal direction. A member, a second fixing member extending at least in the first direction from one end of the first fixing member, and receiving the head slider at least at the tip; and at least extending in a second direction opposite to the first direction from the other end of the first fixing member. A third fixing member that receives at least the tip of the head slider, a first piezoelectric element that is fixed to the outer surface of the second fixing member, and a second piezoelectric element that is fixed to the outer surface of the third fixing member. A recording medium driving apparatus.   A support member that receives the driven member, a first actuator that is coupled to the driven member and the support member, and causes a change in the attitude of the driven member relative to the support member, and is fixed to the support member while being separated from the driven member. And a second actuator that causes the support member to bend.   A head suspension assembly comprising: a support member that is continuous with a gimbal spring; a head slider that is received on a surface of the support member; and an actuator that is fixed to the support member while being separated from the head slider and causes the support member to bend. .

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