JP2005024615A - Reflecting member with curvature, and optical system using the same - Google Patents

Reflecting member with curvature, and optical system using the same Download PDF

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Publication number
JP2005024615A
JP2005024615A JP2003186889A JP2003186889A JP2005024615A JP 2005024615 A JP2005024615 A JP 2005024615A JP 2003186889 A JP2003186889 A JP 2003186889A JP 2003186889 A JP2003186889 A JP 2003186889A JP 2005024615 A JP2005024615 A JP 2005024615A
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JP
Japan
Prior art keywords
reflecting member
holding base
optical system
back surface
fitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2003186889A
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Japanese (ja)
Inventor
Jiro Funakura
治朗 船倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2003186889A priority Critical patent/JP2005024615A/en
Publication of JP2005024615A publication Critical patent/JP2005024615A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To solve the problems that when holding a reflecting member with curvature on a holding base, if the coefficient of expansion of the base is different from that of the reflecting member, the thermal expansion of the base differs from that of the reflecting member, and then, a stress is generated between both when the whole reflecting member is joined to the holding base, and the reflecting member is distorted, consequently, an image forming performance is deteriorated, and an image of high quality cannot be obtained. <P>SOLUTION: In the case of arranging the reflecting member with curvature on the holding base, a columnar or polygonal pillar type projecting part coming in contact with the effective area of the reflecting member by a satisfactorily small area is arranged on the surface apex position or the centroid position, and by adhering and fixing the projection part to the holding base, the reflecting member is arranged and held on the holding base. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【0001】
【発明の属する技術分野】
本発明は、プロジェクタや複写機等に用いられる曲率を有する反射部材とそれを用いた光学系に関する。
【0002】
【従来の技術】
曲率を有する反射部材を保持基台に配置する際、反射部材全体を保持基台に接着することにより配置および保持を行い、保持基台と反射部材の膨張係数の差を小さくすることにより反射部材の歪みを抑制するという技術が用いられている。
【0003】
【特許文献1】
特開2001−255462号公報
【0004】
【発明が解決しようとする課題】
保持基台により曲率を有する反射部材を保持する際、その膨張係数に差がある場合、反射部材全体を保持基台に接着すると、両者の熱膨張量が異なるため、両者間に応力が発生し、反射部材が歪んでしまう。その結果、結像性能が劣化し、高品質な画像を得ることができないという課題があった。
【0005】
例えば、特許文献1のような反射部材を用いた軸外し光学系において、反射部材形状は非対称なため、保持基台と反射部材の両者間に熱膨張に起因する応力が発生すると、反射部材は非対称に変形してしまう。この変形は像面上で、主に非点隔差を発生させ、結像性能を劣化させる。この非点隔差は、ピント調整等により簡便に補正することは不可能である。
【0006】
本発明は、上述の問題点に着目して成されたものであって、低コスト化に対して効果があり、また、精細な配置決定が可能となり、結像性能を向上させることが可能になるため、品質向上に対して効果がある、曲率を有する反射部材とそれを用いた光学系の提供を目的としている。
【0007】
【課題を解決するための手段】
本発明では、上記課題を解決するために、保持基台に曲率を有する反射部材を配置する際、図1に示すように、反射部材1の有効領域に対して十分に小さい面積で接触する円柱あるいは多角形柱型突起部2(図1においては正六角形柱)を設け、これを保持基台に接着固定することにより配置および保持を行うという手段を持っている。
【0008】
突起部2の位置は、熱膨張による変形の影響を最小にするために、面形状を表現する式の原点と一致する面頂点位置にあることが望ましく、また、保持のバランスを保つために、重心位置にあることが望ましい。通常、面頂点位置と重心位置は、ほぼ同位置にある。
【0009】
また、多角形柱型突起部2の長さは、熱膨張量を小さくするため、できるだけ短いことが望ましい。従って、反射部材1が凸の場合は、突起部の長さを短くするため、図3のように、保持基台3も同形状であることが望ましくなる。
【0010】
以上の構成を、改めて下記(1)〜(12)に整理して示す。
【0011】
(1)曲率を有する反射部材の裏面に該反射部材の有効径に対して十分に小さい面積により保持基台表面と接触する柱型突起部を有することを特徴とする反射部材。
【0012】
(2)上記(1)において、反射部材の裏面と該柱型突起部の位置は、反射部材の有効径中心付近にあることを特徴とする反射部材。
【0013】
(3)上記(1)において、反射部材の裏面と該柱型突起部の位置は、反射部材の面頂点付近にあることを特徴とする反射部材。
【0014】
(4)上記(1)乃至(3)において、反射部材はプラスチック製またはガラス製であることを特徴とする反射部材。
【0015】
(5)上記(1)乃至(4)において、反射部材と柱型突起部は一体化成形されていることを特徴とする反射部材。
【0016】
(6)上記(1)乃至(4)において、柱型突起部は反射部材に接着固定さされていることを特徴とする反射部材。
【0017】
(7)上記(1)乃至(6)の反射部材を有し、該柱型突起部と保持基台表面を接着固定し、配置位置を決定することを特徴とする光学系。
【0018】
(8)上記(1)乃至(6)の反射部材を有し、該柱型突起部を嵌合凸部とし、保持基台表面に設けられた前記と同型の柱型嵌合凹部に嵌合することにより配置位置を決定することを特徴とする光学系。
【0019】
(9)上記(1)乃至(6)の反射部材を有し、反射部材裏面に設けた多角形柱型突起部を基台表面に設けた前記と同型の貫通穴から貫通させ、保持基台裏面からナットで固定することにより配置位置を決定することを特徴とする光学系。
【0020】
(10)上記(1)乃至(6)の反射部材を有し、反射部材に設けられた嵌合凸部の形状は多角柱型であることを特徴とする光学系。
【0021】
(11)上記(7)乃至(10)において、基台表面から突出した調整ネジを任意の位置に複数設け、調整ネジの高さを調整することにより、反射部材の傾きを決定することを特徴とする光学系。
【0022】
(12)上記(7)乃至(10)において、接触および嵌合部分を接着することを特徴とする光学系。
【0023】
【発明の実施の形態】
以下に本発明を実施するための最良の形態を、実施例に基づいて図面を参照しながら説明する。
【0024】
(発明の実施例1)
以下に図2を参照して本発明の実施例1を説明する。
【0025】
図2は、本発明の第1の実施形態を示す、保持基台3と該保持基台3に保持される反射部材1を示す図である。
【0026】
本実施例1において、反射部材1は裏面の面頂点位置あるいは重心位置に円柱あるいは多角形柱型突起部2を有している。
【0027】
本実施例1において、保持基台3と突起部2を所定の位置および方向に配置し、面接触状態に接着し、位置および方向を固定する。
【0028】
本実施例により、保持基台と反射部材の両者に熱膨張が起こっても、応力は発生せず、反射部材の変形を防ぐことが可能となり、熱に強くかつ高品質な光学系が達成される。
【0029】
(発明の実施例2)
以下に図3を参照して本発明の実施例2を説明する。
【0030】
図3は、本発明の第2の実施形態を示す、保持基台3と該保持基台3に保持される反射部材1を示す図である。
【0031】
本実施例2において、反射部材1は裏面の面頂点位置あるいは重心位置に多角形柱型突起部2(嵌合凸部)を有している。また、保持基台3は前記多角形柱型突起部2と同型の柱型嵌合凹部を有している。
【0032】
本実施例2において、嵌合凸部と嵌合凹部を嵌合させ接着することにより位置を固定する。なお、嵌合部分が多角形であるため、回転方向についても固定される。
【0033】
本実施例により、保持基台と反射部材の両者に熱膨張が起こっても、応力は発生せず、反射部材の変形を防ぐことが可能となり、熱に強くかつ高品質な光学系が達成される。
【0034】
(発明の実施例3)
以下に図4を参照して本発明の実施例3を説明する。
【0035】
図4は、本発明の第3の実施形態を示す、保持基台3と該保持基台3に保持される反射部材1を示す図である。
【0036】
本実施例3において、反射部材1は裏面の面頂点位置あるいは重心位置に多角形柱型突起部2(嵌合凸部)とボルト4が一体化したものを有している。また、保持基台3は前記多角形柱型突起部2と同型の柱型嵌合凹部を有しており、この部分は保持基台3の裏面まで貫通している。
【0037】
本実施例3において、嵌合凸部と嵌合凹部を嵌合させ、保持基台3の裏面からナット5により固定することにより配置を決定する。なお、嵌合部分が多角形であるため、回転方向についても固定される。
【0038】
本実施例により、保持基台と反射部材の両者に熱膨張が起こっても、応力は発生せず、反射部材の変形を防ぐことが可能となり、熱に強くかつ高品質な光学系が達成される。
【0039】
(発明の実施例4)
以下に図5を参照して本発明の実施例4を説明する。
【0040】
図5は、本発明の第4の実施形態を示す、保持基台1と該保持基台1に保持される反射部材2を示す図である。
【0041】
本実施例4において、反射部材1は裏面の面頂点位置あるいは重心位置に図6に示すような特殊形状ボルト6を有している。また、保持基台3は図6に示すような前記特殊形状ボルト6と同型の貫通穴を有している。
【0042】
本実施例4において、特殊形状ボルト6を有する反射部材1を保持基台3の裏面からナット5により固定することにより配置を決定する。なお、図6のように、回転方向についても固定される。
【0043】
本実施例により、保持基台と反射部材の両者に熱膨張が起こっても、応力は発生せず、反射部材の変形を防ぐことが可能となり、熱に強くかつ高品質な光学系が達成される。
【0044】
(発明の実施例5)
以下に図7を参照して本発明の実施例5を説明する。
【0045】
図7は、本発明の第5の実施形態を示す、保持基台3と該保持基台3に保持される反射部材1を示す図である。
【0046】
本実施例5において、反射部材1は、実施例1〜4のいずれかの方法を用い、保持基台3により保持されている。
【0047】
本実施例5において、保持基台3に保持された反射部材1に対して、保持基台3の裏面から反射部材1の裏面に傾き調整ネジ7を複数配置し、それらを上下させることにより反射部材1の傾きを調整する。
【0048】
本実施例により、反射部材の位置および回転方向だけではなく、傾き方向も調整することが可能となり、熱に強くかつより高品質な光学系が達成される。
【0049】
【発明の効果】
以上、詳述したように、本発明によれば、反射部材を基台により保持する際、熱膨張に起因する応力の発生を抑制し、反射部材の歪みを小さくすることができるため、必ずしも同程度の熱膨張係数を持つ物質を用いる必要がなくなり、低コスト化に対して効果があると考えられる。また、位置および傾き調整機能を設けることにより、精細な配置決定が可能となり、結像性能を向上させることが可能になるため、品質向上に対して効果があると考えられる。
【図面の簡単な説明】
【図1】本発明における反射部材と柱型突起部を示す概略構成図
【図2】本発明における第1実施形態を示す概略構成図
【図3】本発明における第2実施形態を示す概略構成図
【図4】本発明における第3実施形態を示す概略構成図
【図5】本発明における第4実施形態を示す概略構成図
【図6】本発明における第4実施形態の嵌合部分を示す概略構成図
【図7】本発明における第5実施形態を示す概略構成図
【符号の説明】
1 反射部材
2 円柱あるいは多角形柱型突起部
3 保持基台
4 ボルト
5 ナット
6 特殊形状ボルト
7 傾き調整ネジ
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a reflecting member having a curvature used for a projector, a copying machine, and the like, and an optical system using the reflecting member.
[0002]
[Prior art]
When a reflective member having a curvature is disposed on the holding base, the reflective member is disposed and held by adhering the entire reflecting member to the holding base, and the difference in expansion coefficient between the holding base and the reflective member is reduced. The technique of suppressing the distortion of the is used.
[0003]
[Patent Document 1]
Japanese Patent Laid-Open No. 2001-255462
[Problems to be solved by the invention]
When holding a reflecting member having a curvature with a holding base, if there is a difference in the expansion coefficient, if the entire reflecting member is bonded to the holding base, the amount of thermal expansion of the two will be different, and stress will be generated between them. The reflection member is distorted. As a result, the imaging performance deteriorates, and there is a problem that a high-quality image cannot be obtained.
[0005]
For example, in an off-axis optical system using a reflecting member as in Patent Document 1, the shape of the reflecting member is asymmetric, so that when stress due to thermal expansion occurs between both the holding base and the reflecting member, the reflecting member is Deforms asymmetrically. This deformation mainly causes an astigmatism difference on the image plane and degrades the imaging performance. This astigmatic difference cannot be easily corrected by focus adjustment or the like.
[0006]
The present invention has been made paying attention to the above-mentioned problems, and is effective in reducing the cost. Further, it becomes possible to determine a fine arrangement and improve the imaging performance. Therefore, an object of the present invention is to provide a reflective member having a curvature and an optical system using the same, which are effective in improving quality.
[0007]
[Means for Solving the Problems]
In the present invention, in order to solve the above-described problem, when a reflecting member having a curvature is arranged on the holding base, as shown in FIG. 1, a cylinder that is in contact with an effective area of the reflecting member 1 with a sufficiently small area. Alternatively, a polygonal columnar projection 2 (a regular hexagonal column in FIG. 1) is provided, and this is arranged and held by adhering and fixing it to a holding base.
[0008]
In order to minimize the influence of deformation due to thermal expansion, the position of the protrusion 2 is preferably at the surface vertex position that coincides with the origin of the expression expressing the surface shape, and in order to maintain the balance of holding, It is desirable to be at the center of gravity. Usually, the surface vertex position and the gravity center position are substantially the same position.
[0009]
The length of the polygonal columnar protrusion 2 is preferably as short as possible in order to reduce the amount of thermal expansion. Therefore, when the reflecting member 1 is convex, it is desirable that the holding base 3 has the same shape as shown in FIG. 3 in order to shorten the length of the protrusion.
[0010]
The above configuration is shown again in the following (1) to (12).
[0011]
(1) A reflecting member having a columnar protrusion on the back surface of a reflecting member having a curvature that comes into contact with the holding base surface with an area sufficiently small with respect to the effective diameter of the reflecting member.
[0012]
(2) In the above (1), the reflecting member is characterized in that the back surface of the reflecting member and the position of the columnar protrusion are in the vicinity of the center of the effective diameter of the reflecting member.
[0013]
(3) In the above (1), the reflecting member is characterized in that the back surface of the reflecting member and the positions of the columnar protrusions are in the vicinity of the surface vertex of the reflecting member.
[0014]
(4) In the above (1) to (3), the reflecting member is made of plastic or glass.
[0015]
(5) The reflecting member according to (1) to (4), wherein the reflecting member and the columnar protrusion are integrally formed.
[0016]
(6) The reflecting member according to (1) to (4), wherein the columnar protrusion is bonded and fixed to the reflecting member.
[0017]
(7) An optical system comprising the reflecting member according to the above (1) to (6), wherein the columnar projection and the holding base surface are bonded and fixed to determine the arrangement position.
[0018]
(8) Having the reflecting member of the above (1) to (6), the column-shaped projection is used as a fitting projection, and is fitted into the column-type fitting recess of the same type provided on the holding base surface. An optical system characterized by determining an arrangement position.
[0019]
(9) A holding base that has the reflecting member of (1) to (6) described above, and has a polygonal columnar protrusion provided on the back surface of the reflecting member penetrating from a through hole of the same type as that provided on the base surface. An optical system characterized in that an arrangement position is determined by fixing with a nut from the back surface.
[0020]
(10) An optical system having the reflecting member described in (1) to (6) above, wherein the shape of the fitting convex portion provided on the reflecting member is a polygonal column type.
[0021]
(11) In the above (7) to (10), a plurality of adjustment screws protruding from the base surface are provided at arbitrary positions, and the inclination of the reflecting member is determined by adjusting the height of the adjustment screws. An optical system.
[0022]
(12) The optical system according to (7) to (10), wherein the contact and fitting portions are bonded.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF THE PREFERRED EMBODIMENTS The best mode for carrying out the present invention will be described below based on an embodiment with reference to the drawings.
[0024]
(Example 1 of the invention)
Embodiment 1 of the present invention will be described below with reference to FIG.
[0025]
FIG. 2 is a view showing the holding base 3 and the reflecting member 1 held on the holding base 3 according to the first embodiment of the present invention.
[0026]
In the first embodiment, the reflecting member 1 has a cylindrical or polygonal columnar protrusion 2 at the surface vertex position or the center of gravity position on the back surface.
[0027]
In the first embodiment, the holding base 3 and the protruding portion 2 are arranged in a predetermined position and direction, adhered in a surface contact state, and the position and direction are fixed.
[0028]
According to this embodiment, even if thermal expansion occurs in both the holding base and the reflecting member, no stress is generated, and it is possible to prevent the reflecting member from being deformed, and a heat-resistant and high-quality optical system is achieved. The
[0029]
(Embodiment 2 of the invention)
A second embodiment of the present invention will be described below with reference to FIG.
[0030]
FIG. 3 is a view showing the holding base 3 and the reflecting member 1 held on the holding base 3 according to the second embodiment of the present invention.
[0031]
In the second embodiment, the reflecting member 1 has a polygonal columnar protrusion 2 (fitting protrusion) at the surface vertex position or the gravity center position on the back surface. Further, the holding base 3 has a columnar fitting recess of the same type as the polygonal columnar protrusion 2.
[0032]
In Example 2, the position is fixed by fitting and bonding the fitting convex part and the fitting concave part. In addition, since a fitting part is a polygon, it is fixed also about a rotation direction.
[0033]
According to this embodiment, even if thermal expansion occurs in both the holding base and the reflecting member, no stress is generated, and it is possible to prevent the reflecting member from being deformed, and a heat-resistant and high-quality optical system is achieved. The
[0034]
(Example 3 of the invention)
A third embodiment of the present invention will be described below with reference to FIG.
[0035]
FIG. 4 is a view showing the holding base 3 and the reflecting member 1 held on the holding base 3 according to the third embodiment of the present invention.
[0036]
In the third embodiment, the reflecting member 1 has a polygonal columnar protrusion 2 (fitting protrusion) and a bolt 4 integrated at the surface vertex position or the gravity center position of the back surface. In addition, the holding base 3 has a columnar fitting recess having the same shape as the polygonal columnar protrusion 2, and this portion penetrates to the back surface of the holding base 3.
[0037]
In the third embodiment, the fitting convex portion and the fitting concave portion are fitted, and the arrangement is determined by fixing from the back surface of the holding base 3 with the nut 5. In addition, since a fitting part is a polygon, it is fixed also about a rotation direction.
[0038]
According to this embodiment, even if thermal expansion occurs in both the holding base and the reflecting member, no stress is generated, and it is possible to prevent the reflecting member from being deformed, and a heat-resistant and high-quality optical system is achieved. The
[0039]
(Embodiment 4 of the invention)
Embodiment 4 of the present invention will be described below with reference to FIG.
[0040]
FIG. 5 is a view showing the holding base 1 and the reflecting member 2 held by the holding base 1 according to the fourth embodiment of the present invention.
[0041]
In the fourth embodiment, the reflecting member 1 has a specially shaped bolt 6 as shown in FIG. Further, the holding base 3 has a through hole of the same type as the specially shaped bolt 6 as shown in FIG.
[0042]
In the fourth embodiment, the arrangement is determined by fixing the reflecting member 1 having the specially shaped bolt 6 from the back surface of the holding base 3 with the nut 5. As shown in FIG. 6, the rotation direction is also fixed.
[0043]
According to this embodiment, even if thermal expansion occurs in both the holding base and the reflecting member, no stress is generated, and it is possible to prevent the reflecting member from being deformed, and a heat-resistant and high-quality optical system is achieved. The
[0044]
(Embodiment 5 of the invention)
Embodiment 5 of the present invention will be described below with reference to FIG.
[0045]
FIG. 7 is a view showing the holding base 3 and the reflecting member 1 held on the holding base 3 according to the fifth embodiment of the present invention.
[0046]
In the fifth embodiment, the reflecting member 1 is held by the holding base 3 using any of the methods of the first to fourth embodiments.
[0047]
In Example 5, with respect to the reflecting member 1 held on the holding base 3, a plurality of inclination adjusting screws 7 are arranged from the back surface of the holding base 3 to the back surface of the reflecting member 1 and are reflected by moving them up and down. The inclination of the member 1 is adjusted.
[0048]
According to the present embodiment, not only the position and rotation direction of the reflecting member but also the tilt direction can be adjusted, and an optical system that is resistant to heat and of higher quality is achieved.
[0049]
【The invention's effect】
As described above in detail, according to the present invention, when the reflecting member is held by the base, the occurrence of stress due to thermal expansion can be suppressed and the distortion of the reflecting member can be reduced. It is not necessary to use a substance having a coefficient of thermal expansion, which is considered effective for cost reduction. Further, by providing the position and inclination adjustment function, it becomes possible to determine the fine arrangement and improve the imaging performance, which is considered to be effective for improving the quality.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram showing a reflecting member and a columnar projection in the present invention. FIG. 2 is a schematic configuration diagram showing a first embodiment of the invention. FIG. 3 is a schematic configuration showing a second embodiment of the invention. FIG. 4 is a schematic configuration diagram showing a third embodiment of the present invention. FIG. 5 is a schematic configuration diagram showing a fourth embodiment of the present invention. FIG. 6 shows a fitting portion of the fourth embodiment of the present invention. Schematic configuration diagram [FIG. 7] Schematic configuration diagram showing a fifth embodiment of the present invention [Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Reflecting member 2 Cylinder or polygonal column-shaped projection part 3 Holding base 4 Bolt 5 Nut 6 Special shape bolt 7 Tilt adjustment screw

Claims (12)

曲率を有する反射部材の裏面に該反射部材の有効径に対して十分に小さい面積により保持基台表面と接触する柱型突起部を有することを特徴とする反射部材。A reflecting member having a columnar protrusion on a back surface of a reflecting member having a curvature, which contacts a holding base surface with an area sufficiently small with respect to an effective diameter of the reflecting member. 請求項1において、反射部材の裏面と該柱型突起部の位置は、反射部材の有効径中心付近にあることを特徴とする反射部材。2. The reflecting member according to claim 1, wherein the position of the back surface of the reflecting member and the columnar protrusion is in the vicinity of the center of the effective diameter of the reflecting member. 請求項1において、反射部材の裏面と該柱型突起部の位置は、反射部材の面頂点付近にあることを特徴とする反射部材。2. The reflecting member according to claim 1, wherein the back surface of the reflecting member and the positions of the columnar protrusions are in the vicinity of the surface vertex of the reflecting member. 請求項1乃至3において、反射部材はプラスチック製またはガラス製であることを特徴とする反射部材。4. The reflecting member according to claim 1, wherein the reflecting member is made of plastic or glass. 請求項1乃至4において、反射部材と柱型突起部は一体化成形されていることを特徴とする反射部材。5. The reflecting member according to claim 1, wherein the reflecting member and the columnar protrusion are integrally formed. 請求項1乃至4において、柱型突起部は反射部材に接着固定さされていることを特徴とする反射部材。5. The reflecting member according to claim 1, wherein the columnar protrusion is bonded and fixed to the reflecting member. 請求項1乃至6の反射部材を有し、該柱型突起部と保持基台表面を接着固定し、配置位置を決定することを特徴とする光学系。An optical system comprising the reflecting member according to claim 1, wherein the columnar protrusion and the holding base surface are bonded and fixed to determine an arrangement position. 請求項1乃至6の反射部材を有し、該柱型突起部を嵌合凸部とし、保持基台表面に設けられた前記と同型の柱型嵌合凹部に嵌合することにより配置位置を決定することを特徴とする光学系。The reflecting member according to any one of claims 1 to 6, wherein the columnar protrusion is used as a fitting protrusion, and the arrangement position is determined by fitting into the same type of columnar fitting recess provided on the holding base surface. An optical system characterized by determining. 請求項1乃至6の反射部材を有し、反射部材裏面に設けた多角形柱型突起部を基台表面に設けた前記と同型の貫通穴から貫通させ、保持基台裏面からナットで固定することにより配置位置を決定することを特徴とする光学系。The reflecting member according to claim 1, wherein the polygonal columnar protrusion provided on the back surface of the reflecting member is passed through the through hole of the same type as that provided on the base surface, and is fixed with a nut from the back surface of the holding base. An optical system characterized by determining an arrangement position. 請求項1乃至6の反射部材を有し、反射部材に設けられた嵌合凸部の形状は多角柱型であることを特徴とする光学系。An optical system comprising the reflecting member according to claim 1, wherein the fitting convex portion provided on the reflecting member has a polygonal column shape. 請求項7乃至10において、基台表面から突出した調整ネジを任意の位置に複数設け、調整ネジの高さを調整することにより、反射部材の傾きを決定することを特徴とする光学系。11. The optical system according to claim 7, wherein a plurality of adjusting screws protruding from the base surface are provided at arbitrary positions, and the inclination of the reflecting member is determined by adjusting the height of the adjusting screws. 請求項7乃至10において、接触および嵌合部分を接着することを特徴とする光学系。11. The optical system according to claim 7, wherein the contact portion and the fitting portion are bonded.
JP2003186889A 2003-06-30 2003-06-30 Reflecting member with curvature, and optical system using the same Withdrawn JP2005024615A (en)

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Publication number Priority date Publication date Assignee Title
CN104749764A (en) * 2013-12-25 2015-07-01 佳能株式会社 Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article
JP2015533229A (en) * 2012-10-15 2015-11-19 トルンプフ レーザー ゲゼルシャフト ミット ベシュレンクテル ハフツングTRUMPF Laser GmbH Optical unit
JPWO2020122196A1 (en) * 2018-12-13 2021-02-15 三菱電機株式会社 Optical device
KR20220142632A (en) * 2021-04-15 2022-10-24 주식회사 글랙스 Wearable display system for improving use convenience to eyeglass wearer

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015533229A (en) * 2012-10-15 2015-11-19 トルンプフ レーザー ゲゼルシャフト ミット ベシュレンクテル ハフツングTRUMPF Laser GmbH Optical unit
CN104749764A (en) * 2013-12-25 2015-07-01 佳能株式会社 Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article
JPWO2020122196A1 (en) * 2018-12-13 2021-02-15 三菱電機株式会社 Optical device
US11391913B2 (en) 2018-12-13 2022-07-19 Mitsubishi Electric Corporation Optical device
KR20220142632A (en) * 2021-04-15 2022-10-24 주식회사 글랙스 Wearable display system for improving use convenience to eyeglass wearer
KR102539026B1 (en) 2021-04-15 2023-06-01 주식회사 글랙스 Wearable display system for improving use convenience to eyeglass wearer

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