JP2005019726A - Piezo-electric actuator array and its manufacturing method, piezo-electric actuator assembly and positioning member for manufacturing piezo-electric actuator array - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezo-electric actuator array, simplified in wiring and facilitated in manufacturing. <P>SOLUTION: The piezo-electric actuator array, constituted of a plurality of piezo-actuators (100), is provided with a terminal block (200) equipped with a slender L-type substrate (201) having an L-type regulating surface (204) and a plurality of rod type electrodes (205) retained in the direction of major axis of the L-type substrate (201) with predetermined intervals on the L-type substrate (201) under a condition that whose one part (206) is exposed on the L-type regulating surface (204), under a state that one ends of respective piezo-electric actuators (100) are regulated by abutting them against the L-type regulating surface and the other external electrodes (103) are electrically connected to a part (206) of the rod type electrodes (205) exposed on the L-type regulating surface (204). <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a one-dimensional and two-dimensional piezoelectric actuator array, a manufacturing method thereof, a piezoelectric actuator assembly, and a positioning member for manufacturing the piezoelectric actuator array.
[0002]
[Prior art]
The piezoelectric actuator array is configured by arranging a plurality of thin rod-shaped piezoelectric actuators one-dimensionally or two-dimensionally as disclosed in, for example, Japanese Patent Application Laid-Open No. 61-160983 (Patent Document 1). Further, in order to prevent the piezoelectric actuators from being damaged, adjacent piezoelectric actuators are fixed by being filled with an epoxy resin or the like between them. Further, as disclosed in Japanese Patent Laid-Open No. 7-66463 (Patent Document 2), the height of the end faces of a plurality of piezoelectric actuators are aligned and fixed with a resin or the like in order to attach the deformable mirror thereto. The tip surface of the piezoelectric actuator array is polished.
[0003]
[Patent Document 1]
Japanese Patent Laid-Open No. 61-160983 [Patent Document 2]
Japanese Patent Laid-Open No. 7-66463
[Problems to be solved by the invention]
However, the conventional piezoelectric actuator array and the manufacturing method thereof have the following problems. First, since the piezoelectric actuator is a small component, wiring to the electrode formed on the surface of the piezoelectric actuator is not easy. Further, the elongated rod-shaped piezoelectric actuator may be broken by an impact such as machining. Furthermore, the resin that protects the piezoelectric actuator contracts during the curing process, so that a biased force acts on the piezoelectric actuator, which may tilt. And it is not easy to accurately assemble the elongated piezoelectric actuator to the two-dimensional array base. Therefore, it is difficult to produce a piezoelectric actuator array with high accuracy, and much time and labor are required for its manufacture.
[0005]
[Means for Solving the Problems]
In order to solve the above-described problem, the piezoelectric actuator array according to the present invention is:
An elongated L-shaped substrate having an L-shaped regulating surface, and a plurality of rod-like electrodes held at predetermined intervals in the major axis direction of the L-shaped substrate with a part thereof exposed to the L-shaped regulating surface. A terminal block,
A plurality of piezoelectric actuators each provided with an external electrode on a pair of opposed surfaces, each piezoelectric actuator having one end thereof restricted against the L-shaped restriction surface and one external electrode being the L-shaped restriction And a plurality of piezoelectric actuators fixed to the terminal block in a state of being electrically connected to a part of the bar-shaped electrodes exposed on the surface.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described with reference to the accompanying drawings. In addition, the same code | symbol is attached | subjected to the same member or component in several drawing.
[0007]
Embodiment 1 FIG.
FIG. 1 shows a piezoelectric actuator 100 used in the piezoelectric actuator array of the present invention. The piezoelectric actuator 100 has a rod-shaped main body 101 having a square cross section. The rod-shaped main body 101 supports an external electrode 103 (one surface and the corresponding external electrode 104 are not shown) on a pair of side surfaces 102 extending in the longitudinal direction, whereby the pair of external electrodes 103 and 104 are supported. It is designed to be deformed in the longitudinal direction when a voltage is applied between them.
[0008]
2 and 3 show a terminal block 200 used in constructing a one-dimensional piezoelectric actuator array according to the present invention. The terminal block 200 includes an elongated L-shaped substrate 201 having an L-shaped cross section made of an insulating material (for example, ceramic). As shown in the figure, the L-shaped substrate 201 is composed of a bottom plate portion 202 and a wall plate portion 203 extending perpendicularly from one end of the bottom plate portion 202, and an L-shaped restriction that restricts the piezoelectric actuator by the bottom plate portion 202 and the wall plate portion 203. A surface 204 is formed. In addition, the L-type substrate 201 is integrally held with a plurality of rod-like electrodes 205 that extend perpendicularly to the bottom plate portion 202 and that are arranged at regular intervals in the major axis direction of the L-type substrate. Yes. The pitch of the rod-shaped electrodes 205 is determined to be slightly larger than the width of the piezoelectric actuator 100 mounted on the terminal block 200. In the present embodiment, the rod-shaped electrode 205 is formed with a portion (contact surface 206) in which a part of the cylindrical electrode pin (upper end portion in the drawing) is cut out along a plane parallel to the central axis. The contact surface 206 is integrally formed and fixed to the L-shaped substrate 201 so as to coincide with the inner surface of the wall plate portion 203 constituting the L-shaped regulating surface 204. The contact surface 206 is formed at the same time when the L-type substrate 201 is processed into an L-shape. For example, cylindrical electrode pins are embedded at regular intervals in a rod-shaped substrate having a square cross section to be an L-shaped substrate, and when the rod-shaped substrate is cut into an L shape, one end side of the electrode pin is simultaneously cut and a contact surface 206 is formed there. Form. Therefore, in this embodiment, the electrode pin is made from a material having good machinability (for example, Kovar).
[0009]
With respect to the L-shaped substrate 201 formed in this way, the plurality of piezoelectric actuators 100 are positioned by placing one end of each piezoelectric actuator 100 against the L-shaped regulating surface 204 of the L-shaped substrate 201 as shown in FIG. At the same time, one of the external electrodes 104 (the external electrode not shown in FIG. 3) is disposed in contact with the contact surface 206 and is bonded by an adhesive (not shown). The arrangement method of the piezoelectric actuator 100 will be described in detail later. At this time, as shown in the drawing, the rod-shaped electrode 205 ′ disposed on at least one end of the L-shaped substrate 201 is left without being connected to the piezoelectric actuator 100 so that it can function as a common electrode later. Hereinafter, this rod-shaped electrode is referred to as a common electrode 205 ′. Next, as shown in FIG. 3B, an elongated plate-like common electrode plate 207 is fixed to the surface having the other external electrode 103 (external electrode shown) of the piezoelectric actuator 100 with an adhesive or the like, Thereby, the external electrodes 103 of the plurality of piezoelectric actuators 100 are connected to each other. Although omitted from the drawings, the common electrode plate 207 and the common contact surface 206 ′ of the common electrode 205 ′ are connected to each other using an appropriate conductive member (for example, the conductive adhesive 310 shown in FIGS. 7 to 9). Is done. As a result, the other external electrode 103 of the plurality of piezoelectric actuators is electrically connected to the ground by at least one electrode pin, thereby sharing the ground previously provided for each piezoelectric actuator, and the number of electrode pins. Can be reduced. Further, a common electrode 205 ′ may be provided at both ends as appropriate for the convenience of connection.
[0010]
FIG. 4 and FIG. 5 show positioning members (jigs) used as means for disposing a plurality of piezoelectric actuators 100 on the L-shaped substrate 201. The positioning member 300 is made of a rectangular plate and has an actuator positioning region (first plane) 301 and an L-type substrate positioning region (second plane) 302 for holding and aligning the plurality of piezoelectric actuators 100. In addition, a linear step portion 303 is formed at the boundary portion between the two regions 301 and 302, and the L-type substrate positioning region 302 is made lower than the actuator positioning region 301. In the actuator positioning region 301, a plurality of grooves 304 extending in a direction orthogonal to the step portion 303 are formed in parallel with a certain interval. The width of the groove 304 is determined to be substantially the same as the lateral width of the side surface 102 (see FIG. 1) supporting the external electrode 104 of the piezoelectric actuator 100, and the height (distance) from the L-type substrate positioning region 302 to the bottom surface of the groove 303 is set. It is determined to be approximately equal to the thickness of the wall plate portion 203 of the L-type substrate 201.
[0011]
When the positioning member 300 is used, the terminal block 200 is positioned with respect to the positioning member 300 as shown in FIG. At this time, the upper end surface of the wall plate portion 203 of the L-shaped substrate 201 is brought into contact with the step portion 303 of the positioning member 300. Further, the center of the rod-shaped electrode 205 is aligned with the center of the groove 304. For this purpose, an engaging portion (not shown) is provided in each of the positioning member 300 and the L-shaped substrate 201, and the engaging portion of the L-shaped substrate 201 is engaged with the engaging portion of the positioning member 300, thereby It is preferable that the center of is located at the center of the groove 304.
[0012]
Next, as shown in FIG. 7, an adhesive (not shown) is applied to the bottom plate portion 202 of the L-shaped substrate 201, and the plurality of piezoelectric actuators 100 are fitted in the grooves 304. At this time, the side surface 102 supporting one external electrode 104 of the piezoelectric actuator 100 is directed to the bottom surface of the groove 304, and the external electrode 104 is brought into contact with the contact surface 206 of the rod-shaped electrode. A piezoelectric actuator is not disposed in a groove on the same line as the common electrode 205 ′. Subsequently, as shown in FIG. 7, a conductive adhesive 310 is applied on the common contact surface 206 ′. Then, as shown in FIG. 8, the common electrode plate 207 is adhered to the other side surface 102 of the piezoelectric actuator 100 having the external electrode 103 with a conductive adhesive, and the common electrode plate 207 and the common contact surface 206 ′ are electrically conductive. Electrical connection is made with an adhesive 310. Finally, as shown in FIG. 9, after the adhesive is sufficiently cured, the positioning member 300 is removed from the piezoelectric actuator 100, whereby a one-dimensional array in which a plurality of piezoelectric actuators 100 are arranged one-dimensionally at a predetermined interval. The piezoelectric actuator array 210 is completed.
[0013]
Embodiment 2. FIG.
FIG. 10 shows a one-dimensional piezoelectric actuator array according to the second embodiment. The one-dimensional piezoelectric actuator array 400 according to the second embodiment includes a protective plate 401 that maintains the positions and postures of the plurality of piezoelectric actuators 100 arranged in parallel. As shown in FIG. 11, the protective plate 401 is a rectangular plate made of an insulating material (for example, ceramic), and a plurality of grooves 402 extending in the short side direction are formed at a predetermined pitch in the long side direction. The depth and width of the groove 402 may be any size as long as the piezoelectric actuator 100 can be stably held therein.
[0014]
By using the protection plate 401 having such a configuration, each piezoelectric actuator 100 of the one-dimensional array piezoelectric actuator array 210 formed by the method described in the first embodiment can be stably held. In addition, when a block is formed by filling a gap between a plurality of piezoelectric actuators arranged one-dimensionally or two-dimensionally to form a block, a biased force acts on the piezoelectric actuator due to contraction when the filled resin is cured. However, in the piezoelectric actuator array of the second embodiment protected by the protection plate 401, each piezoelectric actuator is firmly held by the protection plate. There is no deformation or misalignment. The resin used to block the piezoelectric actuator is not limited, but it is preferable to use a low-viscosity thermosetting resin that sufficiently penetrates the gap between the piezoelectric actuator and the groove bottom surface. Uses a silica resin having a viscosity of about 400 cp.
[0015]
In the above-described embodiment, both the protection plate 401 and the terminal block 200 are configured in the piezoelectric actuator array as individual components. However, it is also possible to construct both as a single piece (eg, as a single piece made from the same material), thereby performing both functions.
[0016]
Embodiment 3 FIG.
12 and 13 show the manufacturing process of the two-dimensional piezoelectric actuator array. As shown in this figure, a square array substrate 501 is used for manufacturing the two-dimensional piezoelectric actuator array 500. On the upper surface of the array substrate 501, a plurality of strip-shaped depressions 502 having a size and a shape capable of fitting the L-type substrate 201 of the one-dimensional piezoelectric actuator array 210 described in the first embodiment are provided at predetermined intervals. They are formed in parallel. In addition, a plurality of through holes 503 penetrating the array substrate 501 are formed at regular intervals at the bottom of the recess 502, and the rod-shaped electrode 205 penetrates with the one-dimensional piezoelectric actuator array 210 mounted in the recess 502. It can project downward from the array substrate 501 through the holes 503.
[0017]
When a two-dimensional piezoelectric actuator array is manufactured, a plurality of one-dimensional piezoelectric actuator arrays 210 described in the first embodiment are attached to the array substrate 501 as illustrated. At this time, the L-shaped substrate 201 of each one-dimensional piezoelectric actuator array 210 is fitted into the recess 502. At that time, the rod-shaped electrode 205 protrudes below the array substrate 501 through the through hole 503. The array substrate 501 and the L-shaped substrate 201 are preferably bonded with an adhesive. In this case, since the adhesive disposed between the two spreads thinly over the entire depression, high adhesive strength can be obtained.
[0018]
When the one-dimensional piezoelectric actuator array 210 includes the protection plate 401 as in the second embodiment, as shown in FIGS. 14 and 15, on the arrangement substrate 501, the longitudinal direction ends of the depressions 502 are respectively provided. Side plates 504 are provided. The side plate 504 is fixed using, for example, a fixing tool 505 made of a combination of bolts and nuts or an adhesive. Each side plate 504 is formed with an insertion groove 506 on the surface facing the other side plate to guide the end of the protective plate 401 fixed to the one-dimensional piezoelectric actuator array 210. Therefore, when the array substrate 501 having such a side plate 504 is used, the movement of the protection plate 401 is restricted by the insertion groove 506, so that the position of each piezoelectric actuator 100 held by the protection plate 401 is stabilized. Alternatively, an adhesive may be applied to the inner surface of the insertion groove 506 to bond the side plate 504 and the protection plate 401. As a result, the piezoelectric actuators of the two-dimensional piezoelectric actuator array are accurately arranged, and the strength of the entire array is increased as compared with the conventional configuration.
[0019]
In the embodiment of FIGS. 14 and 15, two side plates are arranged on the array substrate 501, but a square frame is formed by the four side plates, and a plurality of primary is in a space surrounded by the frames. An original piezoelectric actuator array may be arranged.
[0020]
Embodiment 4 FIG.
In the above-described two-dimensional piezoelectric actuator array, particularly when a strict control accuracy is required for the controlled object of the two-dimensional piezoelectric actuator array, for example, when a variable mirror is attached to create an optical switch, the height of each piezoelectric actuator is high. Need to be exactly the same.
[0021]
For this purpose, the two-dimensional piezoelectric actuator array and the manufacturing method thereof according to the fourth embodiment employ the following configuration. Specifically, in this embodiment, as shown in FIGS. 16 and 17, a base 508 is prepared in which a frame 507 composed of four side plates 504 is fixed on a square array substrate 501. 508 is supported by a support base 508 ′. Next, as in the third embodiment, the one-dimensional piezoelectric actuator 100 is arranged in a plurality of strip-shaped recesses 502 formed on the array substrate 501 and the through holes 503 formed in the bottom surface of the strip-shaped recess 502 are rod-shaped. The electrode 205 is penetrated. Further, the end of the protection plate 401 is inserted into the insertion groove 506 formed in the side plate 504, and the two-dimensional piezoelectric actuator array and each piezoelectric actuator are positioned with respect to the array substrate 501. The height of the side plate 504 is determined so that the upper end surface of each piezoelectric actuator 100 mounted in the frame 507 protrudes substantially the same height as the upper end surface of the side plate 504 or slightly above it. . Subsequently, hot melt adhesive 509 is filled inside the frame 507 to hold the piezoelectric actuator and the piezoelectric actuator array. By using a hot-melt adhesive, each piezoelectric actuator can be fixed and protected during polishing more firmly than a conventional epoxy resin or the like. This is because the hot-melt adhesive 509 usually does not contain water or solvent, is solid at room temperature, and is made of a 100% non-volatile thermoplastic material. Therefore, it does not shrink in the curing process as compared with conventional thermosetting resins such as epoxy resins. In this embodiment, a hot melt adhesive that is liquefied at 50 to 100 ° C. and is soluble in an alcohol solvent is used. Then, as shown in FIGS. 17 and 18, after the adhesive is cured, the cured adhesive and the upper end surface of the piezoelectric actuator are polished by an appropriate polishing means 510 and the heights thereof are made uniform. At this time, as shown in the drawing, it is preferable that the grinding direction (the left-right direction in the drawing) coincides with the arrangement direction of the piezoelectric actuators 100 in one piezoelectric actuator array. This is because the movement of the piezoelectric actuator arrays and the protection plate holding the piezoelectric actuator arrays in the same direction is restricted by the side plates. As the polishing means 510, a drum-shaped grinding machine (for example, a surface grinding machine) that rotates about a horizontal rotation axis is preferably used. Further, the upper end surface of the side plate 504 may be ground together when the upper end surface of the piezoelectric actuator 100 is ground. In this way, the polished frame 507 can be used as an attachment reference surface. Finally, the hot melt adhesive is removed using a solvent or the like, and the polished two-dimensional actuator array is cleaned. Further, a reinforcing resin may be filled between the piezoelectric actuators 100 after cleaning. Thus, according to the present embodiment, it is possible to align the upper end surfaces of the plurality of piezoelectric actuators included in the two-dimensional piezoelectric actuator array with extremely high accuracy (for example, accuracy of ± 1 μm).
[0022]
In the above description, the two-dimensional piezoelectric actuator array has been dealt with. However, the height of the piezoelectric actuator in the one-dimensional piezoelectric actuator array can be aligned with high accuracy by the same method.
[0023]
Embodiment 5 FIG.
19 and 20 show a piezoelectric actuator assembly in which one piezoelectric actuator is accommodated in one protective tube, and a manufacturing method thereof. As shown in the figure, when manufacturing the piezoelectric actuator assembly 600, a protective tube 601 and an electrode stem 602 made of an insulating material are prepared. The protective tube 601 is a hollow tube made of an insulating material and having an inner diameter larger than the outer diameter of the piezoelectric actuator 100. The electrode stem 602 includes a stem base 603 made of an insulating material and two parallel electrode pins 604 held on the stem base 603 in a state where both ends protrude, and the distance between the electrode pins 604 is the lateral width of the piezoelectric actuator 100. (In FIG. 1, it corresponds to the distance between the two side surfaces 102 supporting the two external electrodes 103). In the piezoelectric actuator 100, the protective tube 601, and the stem base 603, first, the piezoelectric actuator 100 is disposed between a pair of electrode pins 604 protruding from one surface of the stem base 603, and the electrode pins 604 and the piezoelectric elements facing the electrode pins 604 are arranged. The external electrode 103 of the actuator 100 is electrically connected. This electrical connection is performed using an appropriate means such as solder or a conductive adhesive. If necessary, the piezoelectric actuator 100 and the stem base 603 are bonded with an adhesive. Next, the protective tube 601 is externally mounted on the piezoelectric actuator 100, and if necessary, the protective tube 601 and the stem base 603 are bonded with an adhesive. Finally, the gap 605 between the protective tube 601 and the piezoelectric actuator 100 is filled with an insulating resin 606 such as silica resin. Since the piezoelectric actuator 100 is protected as a single unit, for example, when an array is configured using the piezoelectric actuator 100, the possibility of breakage (chips) is reduced, and the strength of the piezoelectric actuator array using the piezoelectric actuator 100 is also improved. .
[0024]
FIG. 21 shows a one-dimensional or two-dimensional piezoelectric actuator array using the piezoelectric actuator assembly 600 described above. As shown in the figure, the piezoelectric actuator array 700 has an assembly mounting base 701 made of an insulating material. The assembly mounting base 701 is formed with recesses 702 or grooves slightly larger than the stem base 603 of the piezoelectric actuator assembly 600 at a predetermined interval, and electrode pins that pass through the assembly mounting base 701 at the bottoms of the recesses 702 or grooves. A through hole 703 is formed. With respect to such an assembly mounting base 701, the piezoelectric actuator assembly 600 inserts its electrode pin 604 into the through hole 703, inserts the stem base 603 into the recess 702 or groove, and attaches the stem base 603 to the assembly with an appropriate adhesive. It is fixed to the table 701 by bonding.
[0025]
As shown in FIG. 22, a plurality of piezoelectric actuator assemblies 600 attached to the assembly mounting base 701 as described above are preferably held using a fixing plate 704. As the fixing plate 704, for example, a plate in which a plurality of protective tube insertion holes 705 having an inner diameter substantially the same as the outer diameter of the protective tube 601 is formed in accordance with the arrangement pitch of the piezoelectric actuator assemblies 600 can be used. The piezoelectric actuator assembly 600 is inserted into the protective tube insertion hole 705 and fixed with an adhesive.
[0026]
【The invention's effect】
As is clear from the above description, the piezoelectric actuator array according to the present invention is provided with the terminal block, so that wiring to each external electrode of each piezoelectric actuator constituting the piezoelectric actuator array becomes easy. Further, by using a one-dimensional piezoelectric actuator array having a terminal block, a two-dimensional piezoelectric actuator array can be easily created with high accuracy.
[Brief description of the drawings]
FIG. 1 is an enlarged perspective view of a piezoelectric actuator.
FIGS. 2A and 2B are diagrams showing a terminal block used when constructing a one-dimensional piezoelectric actuator array according to the present invention, FIG. 2A is a front view, FIG. 2B is a plan view, and FIG. It is a side view.
3A and 3B are diagrams for explaining a manufacturing process of the piezoelectric actuator array, in which FIG. 3A is a perspective view of a terminal block and a plurality of piezoelectric actuator arrays attached to the terminal block, and FIG. 3B is a diagram of the piezoelectric actuator array; It is a perspective view.
FIG. 4 is a perspective view of a positioning member for aligning a plurality of piezoelectric actuators with respect to a terminal block.
5A and 5B are views showing a positioning member, FIG. 5A is a front view, FIG. 5B is a plan view, and FIG. 5C is a side view.
6A and 6B are diagrams showing a state in which a terminal block is arranged with respect to a positioning member, in which FIG. 6A is a front view and FIG. 6B is a side view.
7A and 7B are views showing a state in which a plurality of piezoelectric actuators are arranged on a positioning member equipped with a terminal block, FIG. 7A is a front view, and FIG. 7B is a side view.
FIGS. 8A and 8B are views showing a state where a common electrode plate is arranged on a positioning member equipped with a piezoelectric actuator, FIG. 8A is a front view, and FIG. 8B is a side view.
9A and 9B are diagrams showing the piezoelectric actuator array removed from the positioning member, in which FIG. 9A is a front view and FIG. 9B is a side view.
10A and 10B are diagrams showing a piezoelectric actuator array provided with a protection plate, in which FIG. 10A is a front view, FIG. 10B is a plan view, and FIG. 10C is a side view.
FIG. 11 is a perspective view of a plurality of piezoelectric actuators and a protection plate.
12A and 12B are diagrams showing a piezoelectric actuator array substrate, in which FIG. 12A is a front view and FIG. 12B is a side view.
13 is a diagram showing a two-dimensional piezoelectric actuator array in which a plurality of piezoelectric actuators are arranged on the array substrate of FIG. 12, FIG. 13 (a) is a front view, and FIG. 13 (b) is a side view.
FIG. 14 is a front view of a two-dimensional piezoelectric actuator array in which a plurality of piezoelectric actuators are arranged between a pair of side plates.
15 is a cross-sectional view of the two-dimensional piezoelectric actuator array shown in FIG.
FIG. 16 is a cross-sectional view for explaining a method of manufacturing a two-dimensional piezoelectric actuator array according to another embodiment.
FIG. 17 is a cross-sectional view for explaining a manufacturing method of a two-dimensional piezoelectric actuator array of another form together with FIG. 16;
18 is a cross-sectional view of a two-dimensional piezoelectric actuator array manufactured by the method shown in FIGS. 16 and 17. FIG.
19A and 19B are diagrams showing a piezoelectric actuator assembly in which a protective tube is covered with a protective tube to protect the piezoelectric actuator. FIG. 19A is an exploded front view, and FIG. 19B is an exploded perspective view.
20A and 20B are diagrams showing a piezoelectric actuator assembly in which a protective tube is externally protected to protect the piezoelectric actuator. FIG. 20A is a front view, and FIG. 20B is a perspective view.
FIG. 21 is a side view of a part of a piezoelectric actuator array using the piezoelectric actuator assembly.
22A and 22B are diagrams showing a two-dimensional piezoelectric actuator array using a piezoelectric actuator assembly. FIG. 22A is a plan view and FIG. 22B is a side view.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 100 Piezoelectric actuator, 101 Main body, 102 Side surface, 103 External electrode, 104 External electrode, 200 Terminal block, 201 L-type board, 202 Bottom plate part, 203 Wall board part, 204 L-type regulation surface, 205 Bar-shaped electrode, 205 'Common electrode , 206 contact surface, 206 ′ common contact surface, 207 common electrode plate, 210 one-dimensional piezoelectric actuator array, 300 positioning member, 301 actuator positioning region (first plane), 302 L-type substrate positioning region (second plane) , 303 steps, 304 grooves, 310 conductive adhesive, 400 one-dimensional piezoelectric actuator array, 401 protective plate, 402 grooves, 500 two-dimensional piezoelectric actuator array, 501 array substrate, 502 recess, 503 through-hole, 504 side plate, 505 Fixing tool, 506 Groove, 507 frame, 508 base, 508 'support base, 509 hot melt adhesive, 510 polishing means, 600 piezoelectric actuator assembly 601 protective tube, 602 electrode stem, 603 stem base, 604 electrode pin, 605 gap, 606 insulation Resin, 700 Two-dimensional piezoelectric actuator array, 701 Assembly mounting base, 702 Depression, 703 Electrode pin through hole, 704 Fixing plate, 705 Protection tube insertion hole

Claims (9)

An elongated L-shaped substrate having an L-shaped regulating surface and a plurality of rod-shaped electrodes held at predetermined intervals in the major axis direction of the L-shaped substrate with a part thereof exposed to the L-shaped regulating surface A terminal block;
A plurality of piezoelectric actuators each provided with an external electrode on a pair of opposed surfaces, each piezoelectric actuator having one end thereof restricted against the L-shaped restriction surface and one external electrode being the L-shaped restriction A piezoelectric actuator array comprising a plurality of piezoelectric actuators fixed to the terminal block in a state of being electrically connected to a part of the bar-shaped electrodes exposed on the surface. 2. The piezoelectric actuator array according to claim 1, further comprising a common electrode plate that electrically connects the other external electrodes of the plurality of piezoelectric actuators fixed to the terminal block. The piezoelectric actuator array according to claim 2, wherein at least one of the plurality of rod-shaped electrodes and the common electrode plate are electrically connected via a conductive member. The plate according to claim 1, further comprising a plate having a plurality of grooves capable of holding the plurality of piezoelectric actuators, wherein the plurality of piezoelectric actuators are held in the grooves of the plate. Piezoelectric actuator array. An array substrate having a groove corresponding to the L-shaped substrate and a hole through which the rod-shaped electrode can pass is provided, the L-shaped substrate is disposed in the groove, and the rod-shaped electrode is passed through the hole and held on the array substrate. The piezoelectric actuator array according to any one of claims 1 to 4, wherein the piezoelectric actuator array is formed. Fixing a plurality of piezoelectric actuators each provided with an external electrode on a pair of opposed surfaces, an L-type regulating surface, a plurality of grooves capable of holding the plurality of piezoelectric actuators, and a part of the L-type regulating A terminal block including a plurality of rod-shaped electrodes held at predetermined intervals in the major axis direction of the L-shaped substrate in a state exposed on the surface;
Each of the piezoelectric actuators is regulated with one end thereof being in contact with the L-shaped regulating surface, the plurality of piezoelectric actuators are held in the groove, and one external electrode is exposed to the L-shaped regulating surface. A piezoelectric actuator array comprising a plurality of piezoelectric actuators fixed to the terminal block in a state of being electrically connected to a part of a rod-shaped electrode. Arranging a plurality of piezoelectric actuators with one end thereof fixed to an array substrate; and
Filling a gap between the plurality of piezoelectric actuators with resin;
Grinding the other end faces of the plurality of piezoelectric actuators to align the height,
A method of manufacturing a piezoelectric actuator array, comprising: removing the resin. A rod-shaped piezoelectric actuator provided with external electrodes on a pair of opposing side surfaces, and
A base that supports one end of the piezoelectric actuator;
A pair of electrode pins penetrating the base and having one end located on the piezoelectric actuator side electrically connected to the external electrode;
A cylinder sheathed on the piezoelectric actuator;
A piezoelectric actuator assembly comprising an insulating resin filled around the piezoelectric actuator inside the cylinder. A positioning member for manufacturing a piezoelectric actuator array in which a plurality of piezoelectric actuators are arranged in parallel,
A first plane and a second plane that are adjacent to each other through a step portion extending linearly, the first plane having a plane formed at a position higher than the second plane;
The positioning member for manufacturing a piezoelectric actuator array, wherein the first plane is formed with a plurality of grooves extending in a direction perpendicular to the stepped portion at a predetermined interval in a direction parallel to the stepped portion.

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