JP2005019131A - Flash discharge lamp, flash discharge lamp lighting device, and optical irradiation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flash discharge lamp in which optical output distribution in a pipe axial direction of the lamp is controlled desirably, the flash discharge lamp lighting device using this, and a light irradiation device. <P>SOLUTION: The flash discharge lamp XFL is provided with a first region 1 in which the interior cross-sectional area is S1 and a second region 2 in which the interior cross-sectional area is S2 in the pipe axial direction, and equipped with a translucent slender air-tight container SE which is formed mainly by quartz glass and satisfies a formula 1:0.3<S2/S1<0.9, a pair of electrodes E, E sealed in the inside of both ends of the air-tight container SE, a discharge medium to be sealed in the inside of the air-tight container SE and to irradiate an ultraviolet ray in discharging, and a trigger wire TW installed adjacent to the circumference of the air-tight container SE. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a flash discharge lamp suitable for instantaneously irradiating light of high intensity, a flash discharge lamp lighting device for lighting the lamp, and a light irradiation device.
[0002]
[Prior art]
When a flash discharge lamp in which a discharge medium such as xenon is sealed inside a light-transmitting elongated hermetic container is turned on and a pulse lamp current is passed through, a flash light with a large intensity is instantaneously emitted, for example, ultraviolet light having a wavelength of 400 nm or less. And radiation consisting of visible light etc. can be generated instantaneously. Irradiation with the light described above enables various uses in various fields such as semiconductors such as annealing of semiconductor materials, surface heating and surface treatment in the liquid crystal process field, and surface sterilization in the food field. Conventionally, a laser is mainly used for this type of light irradiation, but the above flash discharge lamp can be used in place of the laser, and the configuration of the irradiation processing apparatus is simplified accordingly.
[0003]
In addition, this type of flash discharge lamp is made of quartz glass, and generally has a structure in which a pair of electrodes are sealed inside both ends of a straight tubular hermetic container in which the cross-sectional area of the internal space is equal to the tube axis direction. is there.
[0004]
[Problems to be solved by the invention]
In the instantaneous light irradiation as described above by the flash discharge lamp, the preferable light output distribution in the tube axis direction varies depending on the mode of the light irradiation process. For example, in the case where light irradiation is simultaneously performed on an object to be irradiated having a relatively large area, it is preferable to make the effective light emission length of the flash discharge lamp as wide as possible. On the contrary, when strong light irradiation is performed in a narrow range, it is preferable that a strong ultraviolet output is intensively generated at the central portion of the effective light emission length of the flash discharge lamp.
[0005]
However, in the case of the flash discharge lamp having the general structure described above, the region where a high light irradiation effect can be obtained is limited to a relatively narrow range in the central portion in the axial direction of the lamp.
[0006]
An object of the present invention is to provide a flash discharge lamp whose light output distribution in the tube axis direction of the lamp is controlled as desired, and a flash discharge lamp lighting device and a light irradiation device using the flash discharge lamp.
[0007]
Another object of the present invention is to provide a flash discharge lamp capable of obtaining a high light irradiation effect in a relatively wide range in the tube axis direction of the lamp, a flash discharge lamp lighting device using the same, and a light irradiation device. To do.
[0008]
Furthermore, the present invention provides a flash discharge lamp capable of obtaining a particularly enhanced light output at a desired intermediate portion in the tube axis direction of the lamp, a flash discharge lamp lighting device using the same, and a light irradiation device. Objective.
[0009]
[Means for achieving the object]
A flash discharge lamp according to a first aspect of the present invention comprises a first region having an internal cross-sectional area S1 and a second region having an internal cross-sectional area S2 in the tube axis direction, and is formed mainly of quartz glass. A translucent elongated airtight container satisfying 1; a pair of electrodes sealed inside both ends of the airtight container; a discharge medium enclosed in the airtight container and emitting light during discharge; and an outer periphery of the airtight container And a trigger wire disposed in proximity to each other.
[0010]
[Expression 1]
0.3 <S2 / S1 <0.9
In the present invention and each of the following inventions, the definitions and technical meanings of terms are as follows unless otherwise specified.
[0011]
<Regarding the airtight container> The airtight container is a quartz in which at least light generated by discharge, for example, ultraviolet light or / and visible light, that is, a part to be used, that is, a main part is transparent to the above light. It is made of glass. Therefore, other parts other than the above parts may not be translucent. The “translucency” in the present invention is only required to substantially transmit light in a desired wavelength band that is derived and used outside, and is therefore preferably light-shielding against vacuum ultraviolet rays. However, if necessary, it may be transparent.
[0012]
Moreover, the airtight container has an elongated shape as a whole, and the inside is hollow. In the longitudinal direction of the hollow portion, a first region having an internal cross-sectional area S1 and a second region having an internal cross-sectional area S2 are provided in the tube axis direction, and the cross-sectional area ratio S2 / S1 satisfies Equation 1. have. The “internal cross-sectional area” refers to the area of the space surrounded by the inner surface of the airtight container in a plane perpendicular to the tube axis direction. The ratio of the length of the first region and the second region to the tube axis direction and the relative position are set so that a uniform light irradiation effect can be obtained over a relatively long distance along the tube axis direction. There are various combinations. In Formula 1, if the cross-sectional area ratio is 0.3 or less, the tube wall load at both end regions becomes too large, and the flash discharge lamp tends to have a short life, which is not possible. In addition, if the cross-sectional area ratio is 0.8 or more, the desired ultraviolet irradiation effect cannot be obtained, which is not possible. In addition, it is 0.6-0.8 suitably.
[0013]
Further, the first and second areas are defined as follows. That is, the maximum value and the minimum value of the internal cross-sectional area are determined for the internal space of the airtight container. Next, an average value is calculated from these values. The internal space is divided into two large and small areas with the average value as the boundary. A portion having a relatively large internal cross-sectional area is defined as a first region. Similarly, a portion having a relatively small internal cross-sectional area is defined as the second region.
[0014]
Furthermore, the shape of the cross section of the airtight container is not particularly limited as long as the internal cross-sectional areas of the first region and the second region satisfy Expression 1. For example, the cross-sectional shapes of the first region and the second region can both be a perfect circle. Moreover, you may make a 1st area | region into a flat shape.
[0015]
Furthermore, in the airtight container, a length between a pair of electrodes described later, that is, a distance between the electrodes is L, a light emission length of the first region is L1, a light emission length of the second region is L2, and When the electrode is sealed in the first region, the light emission length ratio L1 / L2 can be set so as to satisfy Formula 2. The light emission length L1 of the first region is the sum of the light emission lengths in the respective regions, although the regions are disposed at both ends of the hermetic container.
[0016]
[Expression 2]
L1 / L2 ≦ 1
Furthermore, in the hermetic container, regarding the effective light emission length between a pair of electrodes, which will be described later, the light emission length of the first region is L1, the light emission length of the second region is L2, and the pair of electrodes is a second electrode. Can be set so that the light emission length ratio L1 / L2 satisfies Equation (3). The light emission length L2 of the second region is the sum of the light emission lengths in the respective regions, although the regions are disposed at both ends of the hermetic container.
[0017]
[Equation 3]
L1 / L2 ≧ 1
By setting the light emission length ratio L1 / L2 so as to satisfy Equations 2 and 3, the light irradiation effective length in the lamp length can be relatively increased. The “light irradiation effective length” refers to the length in the tube axis direction of a portion that can be used effectively for light irradiation.
[0018]
<About a pair of electrode> A pair of electrode is sealed facing both ends inside of an airtight container. A cold cathode electrode having a structure generally used in a flash discharge lamp can be used. The electrode can be formed using one or more kinds of metals selected from the group of nickel Ni, tungsten W, molybdenum Mo, and tantalum Ta, or an alloy of a plurality of kinds of metals.
[0019]
Further, the pair of electrodes may be sealed in any of the first and second regions.
[0020]
<Regarding Discharge Medium> The discharge medium is a medium that emits light having a consumption wavelength by discharge. For example, one kind selected from the group of argon, krypton, and xenon can be used alone, or a plurality of kinds of rare gases can be used in combination. The sealed pressure of the discharge medium may be the same as that conventionally used for a flash discharge lamp.
[0021]
<Regarding the Trigger Wire> The trigger wire is a means for initiating discharge between a pair of electrodes by being arranged close to the outer surface of the airtight container and forming a strong electric field strength between at least one of the electrodes. . In order to form a strong electric field strength between one electrode and the trigger wire, for example, a trigger power source is connected between the trigger wire and the one electrode, or the trigger wire is connected to the other electrode. do it.
[0022]
In addition, the trigger wire is disposed close to the outer surface of the hermetic container, so that a rod-shaped, strip-shaped or linear conductor is wound around the outer surface of the hermetic container in a coil shape, or is almost straight along the tube axis direction. Can be arranged. In the latter case, the trigger wire can be fixed by an adhesive in order to maintain a state close to the outer surface of the hermetic container.
[0023]
Furthermore, the trigger wire is made of a conductive material, and can be disposed on the outer surface of the airtight container over a length in the tube axis direction so as to straddle between the pair of electrodes. However, if necessary, it can be disposed over an appropriate distance before reaching the other electrode from the position facing one electrode.
[0024]
<Regarding the Action of the Present Invention> In the present invention, a pair of electrodes is connected to a power source that supplies a pulse current, for example, a charging capacitor, and a trigger voltage is applied between the trigger wire and one electrode. The flash discharge lamp is triggered to generate a discharge instantaneously. Then, a pulsed current flows between the pair of electrodes due to the discharge, light is emitted from the discharge medium, and is transmitted from the airtight container to the outside.
[0025]
Thus, the light guided to the outside can be used according to each purpose. As modes of utilization of light derived to the outside, various modes are possible in various fields such as semiconductors such as annealing of semiconductor materials, surface heating and surface treatment in the liquid crystal process field, and surface sterilization in the food field.
[0026]
Further, in the present invention, the internal cross-sectional area ratio S2 / S1 in the central region and both end regions of the hermetic vessel of the flash discharge lamp satisfies Equation 1, so that the effect uniformity due to light irradiation in the tube axis direction is relatively wide. Is obtained over time. As a result, the efficiency of light irradiation is increased. Moreover, it is possible to avoid the flash discharge lamp from having a short life.
[0027]
A flash discharge lamp according to a second aspect of the present invention is the flash discharge lamp according to the first aspect, wherein the airtight container is characterized in that the inner surface of the first region is flat.
[0028]
In the present invention, that the shape of the inner surface in the first region is flat means, for example, that the cross section is an ellipse, an oval, a substantially rectangle, or the like. The first region is preferably located at the center.
[0029]
On the other hand, in the present invention, the inner shape of the second region is free. For example, the cross section is allowed to be a perfect circle shape or a non-circular shape.
[0030]
The pair of electrodes may be sealed in either the first region or the second region. However, in the case where the inner surface of the second region is a perfect circle and the pair of electrodes are sealed in the second region, it is easy to seal the electrodes, and the electrode sealing and the airtight container The reliability for sealing is increased.
[0031]
Thus, in the present invention, since the first region has a flat inner shape, the outer dimension is maintained to be equal to or less than that of the second region while the internal cross-sectional area ratio satisfies Equation 1. It becomes possible. That is, if the first region is flat, the width dimension when viewed from a direction perpendicular to the flat surface can be formed equal to or less than the width of the first region. Therefore, when a plurality of flash discharge lamps are arranged in parallel, they can be arranged close to each other.
[0032]
A flash discharge lamp according to a third aspect of the present invention is a light-transmitting elongated hermetic container formed mainly of quartz glass; and the inner surface of the hermetic container is made of metal and / or metal oxide and blocks vacuum ultraviolet rays and is at least long. A wavelength-selective permeable membrane that transmits ultraviolet light; a pair of electrodes sealed inside both ends of the hermetic container; a discharge medium enclosed in the hermetic container and emitting light during discharge; and on the outer periphery of the hermetic container And a trigger wire disposed in proximity to each other.
[0033]
The airtight container may have the configuration according to the first or second aspect of the present invention, or may have a straight tube configuration with substantially the same internal electric area over the entire length.
[0034]
A wavelength-selective transmission film made of a metal and / or a metal oxide that blocks vacuum ultraviolet rays and transmits at least long-wavelength ultraviolet rays, and further transmits visible light as desired. For example, titanium Ti, cerium Ce, indium It can be obtained by a film of one or more kinds of metals and metal oxides selected from the group of In and silicon Si.
[0035]
In addition, it is preferable that the wavelength selective transmission membrane has a film thickness of 0.5 μm or more because it can effectively block vacuum ultraviolet rays having a wavelength of 200 nm or less. In addition, by setting the film thickness of the wavelength selective transmission film further larger than the above, it is possible to set the wavelength selectivity as desired and obtain a highly reliable wavelength selective transmission film.
[0036]
Further, the wavelength selective transmission film can be formed by, for example, a sputtering method, a chemical deposition method, a CVD method, or a dipping method.
[0037]
Thus, in the present invention, since the wavelength selective transmission film blocks the vacuum ultraviolet rays and transmits at least the long wavelength ultraviolet light by having the above-described configuration, the ultraviolet light emitted by the discharge is transmitted. Among them, vacuum ultraviolet light having a wavelength of 200 nm or less and ultraviolet light having a wavelength of 240 nm or less are substantially blocked by the wavelength selective transmission film and are not incident on the quartz glass of the hermetic container. Therefore, distortion and deterioration due to short wavelength ultraviolet light of the quartz glass that is the main component of the hermetic container can be suppressed.
[0038]
On the other hand, long-wavelength ultraviolet light having a wavelength of 240 nm or more and, if desired, visible light substantially pass through the wavelength-selective transmission film, and can be led out of the hermetic container and used. .
[0039]
A flash discharge lamp according to a fourth aspect of the present invention is a light-transmitting elongated airtight container mainly composed of quartz glass having an OH group concentration of 100 to 1000 ppm; a pair of electrodes sealed inside both ends of the airtight container And a discharge medium enclosed in the inside of the hermetic container and emitting ultraviolet rays during discharge; and a trigger wire disposed in the vicinity of the outer periphery of the hermetic container.
[0040]
Quartz glass deteriorates when irradiated with vacuum ultraviolet rays. When quartz glass deteriorates, the ultraviolet transmittance decreases, so the ultraviolet output of the flash discharge lamp decreases. Quartz glass in which the OH group concentration is regulated to 100 to 1000 ppm can suppress deterioration of ultraviolet transmittance due to lattice defects and the like over time. In the present invention, since the hermetic container is configured using quartz glass in which the OH group concentration is regulated as described above, deterioration of quartz glass due to vacuum ultraviolet irradiation is reduced. It should be noted that, if desired, it is allowed to be additionally provided with the configuration of the invention of claim 3, thereby further suppressing the deterioration of quartz glass due to vacuum ultraviolet rays.
[0041]
The airtight container may have the configuration according to the first or second aspect of the present invention, or may have a straight tube configuration with substantially the same internal electric area over the entire length.
[0042]
Thus, in the present invention, the decrease in the ultraviolet output of the flash discharge lamp due to the deterioration of the quartz glass over a long period of time is suppressed.
[0043]
The flash discharge lamp according to claim 5 is the flash discharge lamp according to any one of claims 1 to 4, wherein the trigger wire has a length in the tube axis direction of 2/3 or less of the distance between the electrodes. It is a feature.
[0044]
The length of the trigger wire in the tube axis direction of the flash discharge lamp is a function of the startability of the flash discharge lamp, but if the length is 2/3 or less of the distance between the electrodes, the startability is not lost. The startability can be suppressed as desired. In other words, if the start-up property is too good and the charging pressure of the capacitor does not reach a predetermined value, the start-up property is appropriate by setting the length of the trigger wire in the tube axis direction to 2/3 or less of the distance between the electrodes. Therefore, the charging pressure of the capacitor can be reached to a predetermined value. As a result, the discharge energy can be set as desired.
[0045]
In addition, if a trigger wire consists of one electroconductive metal wire, since a contact resistance becomes small, it is preferable. In addition, since the trigger wire is wound around the outer surface of the hermetic vessel, a discharge arc is formed at the center of the hermetic vessel, so that a reflecting mirror is provided to collect the ultraviolet light emitted from the flash discharge lamp. In the configuration, the reflecting mirror can be easily designed and the light collecting action is stabilized.
[0046]
Thus, in the present invention, the startability is promoted with a simple configuration in which the length of the trigger wire in the tube axis direction of the flash discharge lamp is set to 2/3 or less of the distance between the electrodes, and the starter is accelerated. The charge energy can be set to a predetermined value, and the discharge energy can be set as desired.
[0047]
According to a sixth aspect of the present invention, there is provided a flash discharge lamp lighting device comprising: a series-connected lamp circuit formed by connecting a plurality of flash discharge lamps according to any one of the first to fifth aspects; And a high voltage power source for charging the capacitor.
[0048]
The flash discharge lamps need only be connected in series as long as a plurality of flash discharge lamps are connected in series to the capacitor that supplies the discharge energy. Therefore, there is no other connection between the flash discharge lamp and the adjacent flash discharge lamp. Other electrical components such as resistors may be interposed. Further, the number of flash discharge lamps connected in series is not particularly limited. Note that the trigger wires of a plurality of flash discharge lamps can be connected in series. Thereby, the circuit configuration of the trigger wire can be simplified.
[0049]
The capacitor for supplying discharge energy to the plurality of flash discharge lamps may be a single capacitor, or may be composed of a plurality of capacitors connected in parallel, for example.
[0050]
The high voltage power supply outputs a high voltage DC voltage to charge the capacitor.
[0051]
Thus, in the present invention, since the above-described configuration is provided, a plurality of flash discharge lamps can be turned on simultaneously with a single capacitor and high-voltage power supply. Therefore, the configuration of the flash discharge lamp lighting device is simplified and miniaturized, and the cost is reduced. Further, according to the present invention, when a plurality of flash discharge lamps are provided side by side, the discharge energy of the plurality of flash discharge lamps is made uniform, and it becomes easy to irradiate at the same time, and the ultraviolet irradiation process can be performed satisfactorily.
[0052]
According to a seventh aspect of the present invention, there is provided a light irradiation apparatus according to any one of the first to fifth aspects; a reflecting mirror for condensing the light emitted from the flash discharge lamp on a processing target; and a pulse current applied to the flash discharge lamp. And a flash discharge lamp lighting circuit for lighting.
[0053]
The specific configuration of the reflecting mirror is not particularly limited as long as the reflecting mirror is light-reflective and the light emitted from the flash discharge lamp can be condensed on the processing target.
[0054]
The flash discharge lamp lighting circuit may be provided with a plurality of capacitors and high-voltage power supplies in a one-to-one relationship with the flash discharge lamp, or may be configured as defined in claim 6.
[0055]
A wavelength-selective optical filter that transmits only light having a desired wavelength, for example, ultraviolet light having a desired wavelength, may be interposed between the flash discharge lamp and the reflecting mirror and the processing target portion.
[0056]
Next, as an example of an embodiment using the light irradiation apparatus of the present invention, a method for cleaving an object to be cut made of a disk-like material such as a semiconductor material will be described below. That is, light of instantaneous light energy generated from the flash discharge lamp is condensed along a predetermined breaking line and irradiated to the object to be cut. At this time, it is effective in the case of fine cleaving, preferably by removing the portion of the cleaving line in a slit shape and disposing a light blocking mask in other regions of the material to be cleaved. Further, it is possible to selectively extract a wavelength band effective for cleaving using an optical filter and irradiate along a cleaving line. Furthermore, by providing the mounting table of the material to be cut with the protruding strips along the cutting line, the cutting is further facilitated, and it is effective to cause accurate cutting.
[0057]
Then, when the instantaneous high energy light generated from the flash discharge lamp is condensed and irradiated to the planned breaking line of the object to be cut, large thermal energy is momentarily applied along the breaking line, Material destruction occurs. Therefore, the material to be cut is easily cut along the breaking line. The mask can be removed when desired by a conventional method.
[0058]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0059]
1 to 4 show a first embodiment of a flash discharge lamp according to the present invention. FIG. 1 is a front sectional view, FIG. 2 is an enlarged front sectional view of an essential part, and FIG. FIG. 4 is a graph showing the radiation effect in the tube axis direction together with that of the comparative example.
[0060]
In the present embodiment, the flash discharge lamp XFL includes an airtight container SE, a pair of electrodes E and E, a discharge medium, and a trigger wire TW.
[0061]
The hermetic vessel SE is made of quartz glass, and includes a second region 2, a first region 1, and a second region 2 from one end in the tube axis direction. In the first and second regions 1, the internal cross-sectional areas in the tube axis direction are S1 and S2, and the internal cross-sectional area ratio S2 / S1 satisfies Formula 1. That is, as shown in FIG. 3, the first and second regions are both substantially circular in cross section, the first region 1 has an inner diameter of 10 mm, the second region 2 has an inner diameter of 6 mm, It has a cylindrical shape extending in the tube axis direction. The middle of the first and second regions 1 and 2 is connected and integrated.
[0062]
The pair of electrodes E and E are made of tungsten W, are supported by the lead-in wire 3, and are sealed inside the end portions of the second regions 2 and 2. The lead-in wire 3 supports the electrode E and is air-tightly led out from both ends of the air-tight container SE, and also functions as a conductor when supplying a lamp current to the electrode E.
[0063]
The discharge medium is sealed with xenon.
[0064]
The trigger wire TW is made of, for example, a molybdenum wire, and extends along the tube axis direction in a state of being in contact with the outer surface of the airtight container SE.
[0065]
Thus, in the flash discharge lamp according to the present embodiment, when the effective light emission length in the first region 1 is L1, and the effective light emission lengths in the second regions 2 and 2 are combined to be L2, the effective light emission length. The ratio L2 / L1 is set so as to satisfy Equation 3.
[0066]
Also, a flash discharge lamp according to the present embodiment was connected to a pair of electrodes E and E via a 300 μH inductor and a capacitor having a capacity of 300 μF charged to 2000 V and turned on. The current density distribution inside the hermetic vessel SE when the peak value of the lamp current is 3000 A can be obtained by calculation and is as follows. That is, the current density in the first region 1 is 3836 A / cm. ² The current density in the second region 2 is 10600 A / cm ² It is.
[0067]
The amount of light radiation generated per unit length along the tube axis direction of the flash discharge lamp varies according to the current density along the tube axis direction. Therefore, in the present embodiment, the amount of light emission in the second region located at both ends is greater than that in the first region 1 located at the center. As a result, the region along the tube axis direction of the flash discharge lamp in which a high effect is obtained by light irradiation becomes long as shown in FIG. In FIG. 4, the horizontal axis represents the position in the tube axis direction in the effective light emission length of the flash discharge lamp, and the vertical axis represents the relative effect of irradiation with radiation light. In the figure, curve A shows the present embodiment, and curve B shows a comparative example.
[0068]
On the other hand, in the comparative example, the region along the tube axis direction of the flash discharge lamp in which a high effect is obtained by the radiation irradiation is significantly narrow. The comparative example has the same specifications as in the present embodiment and the lighting conditions are the same except that the airtight container is made of quartz glass having an inner diameter of 10 mm over the entire length of the effective light emission length.
[0069]
Hereinafter, other embodiments of the flash discharge lamp of the present invention will be described with reference to FIGS. In addition, in each figure, the same part as FIG. 1 thru | or FIG. 3 is attached | subjected, and description is abbreviate | omitted.
[0070]
FIG. 5 is a front sectional view showing a second embodiment of the flash discharge lamp of the present invention. In the present embodiment, the inner diameter in the tube axis direction of the hermetic container is successively increased from both ends toward the center. In the present embodiment, basically the same as the first embodiment, it is possible to lengthen the region where a high effect can be obtained by radiated light irradiation, but the uniformity of the radiated light irradiation effect is further improved. Become.
[0071]
FIG. 6 is a front sectional view showing a third embodiment of the flash discharge lamp of the present invention. In the present embodiment, the inner diameter of the airtight container in the tube axis direction increases in three stages from both ends toward the center. The present embodiment is basically the same as the first embodiment, and a region where a high effect can be obtained by radiated light irradiation can be lengthened, but the degree of uniformity of the radiated light irradiation effect is shown in FIG. It becomes the next best after the second embodiment.
[0072]
FIG. 7 is a front view showing a fourth embodiment of the flash discharge lamp of the present invention. In the present embodiment, the first region 1 is disposed at both ends of the hermetic container SE, and the second region 2 is disposed at the center. When the effective light emission lengths of the first regions 1 and 1 are added to L1 and the effective light emission length of the second region 2 is L2, L1 / L2 satisfies Equation 2.
[0073]
Thus, in the present embodiment, the second region where the output of the emitted light increases is formed in the central portion of the hermetic container and over a relatively long distance. Light irradiation treatment of an object to be irradiated with emitted light can be performed.
[0074]
FIG. 8 is a front sectional view showing a fifth embodiment of the flash discharge lamp of the present invention. In this embodiment, the wavelength selective transmission film 4 is formed on the inner surface of the hermetic container. The wavelength selective transmission film 3 is composed mainly of titanium oxide and has a film thickness of about 8 μm.
[0075]
9 to 11 show a sixth embodiment of the flash discharge lamp of the present invention. FIG. 9 is a front sectional view, FIG. 10 is an enlarged front sectional view of a main part, and FIG. It is. In the present embodiment, the first region 1 has an elliptical shape, but the second region 2 has a perfect circle shape. In the first region 1, the outer diameter of the short diameter portion is substantially the same as the outer diameter of the second region 2. Therefore, a plurality of flash discharge lamps can be arranged adjacent to each other with no gap by making the minor axis portion adjacent.
[0076]
FIG. 12 is a front view showing a seventh embodiment of the flash discharge lamp of the present invention. In the present embodiment, the length of the trigger wire TW in the tube axis direction is set to 2/3 or less of the interelectrode distance. The trigger wire TW is wound in a coil shape in contact with the outer surface of the airtight container SE. Further, the structure of the airtight container SE is allowed to be the structure in the first to sixth embodiments shown in FIGS. 1 to 3 and FIGS. 5 to 11 respectively.
[0077]
FIG. 13 is a graph showing the relationship between the OH group concentration of quartz glass and the light attenuation factor, illustrating the eighth embodiment of the flash discharge lamp of the present invention. In the figure, the horizontal axis represents the OH concentration (ppm) of quartz glass, and the vertical axis represents the light attenuation rate (%) after irradiation with vacuum ultraviolet light. The curve in the figure is created by investigating the decay rate of vacuum ultraviolet light after irradiating quartz glass with different OH group concentrations with vacuum ultraviolet light for 100 hours. The greater the light decay rate, the greater the degradation of quartz glass. Means.
[0078]
Therefore, in the present invention, the OH group concentration of quartz glass is defined in the range of 100 to 1000 ppm. This embodiment is airtight using quartz glass in which the OH group concentration is regulated within the range of 100 to 1000 ppm in the first to seventh embodiments shown in FIGS. 1 to 3 and 5 to 12 respectively. The container SE is configured. Thereby, the deterioration of the quartz glass due to the irradiation of the vacuum ultraviolet rays generated by the discharge is suppressed, so that the ultraviolet transmittance is hardly lowered with time.
[0079]
FIG. 14 is a circuit block diagram showing an embodiment of the flash discharge lamp lighting device of the present invention. In the present embodiment, there is one set of capacitors C for lighting the three flash discharge lamps XFL, and there is also a single high-voltage power supply HVS that charges the capacitors. Further, the plurality of flash discharge lamps XFL are connected in series and connected between both electrodes of the capacitor C.
[0080]
FIG. 15 is a schematic cross-sectional view showing the first embodiment of the light irradiation apparatus of the present invention. In the present embodiment, the light irradiation device includes a flash discharge lamp XFL, a reflecting mirror M, and a flash discharge lamp lighting device (not shown). Note that S is an object to be irradiated.
[0081]
The flash discharge lamp XFL uses the lamps in the first to eighth embodiments shown in FIGS. 1 to 3 and FIGS. 5 to 12, respectively.
[0082]
The reflecting mirror M has an elliptical reflecting surface having the light emission center of the flash discharge lamp XFL as the first focal point.
[0083]
Although not shown, the flash discharge lamp lighting device includes a capacitor connected to the flash discharge lamp XFL and a high-voltage power source for charging the capacitor.
[0084]
The irradiated object S is made of, for example, a semiconductor substrate, and is disposed below the reflecting mirror M so that the irradiated surface is positioned at the second focal point of the reflecting mirror M. Then, when the heat energy is concentrated and applied to the irradiated surface by the ultraviolet irradiation, the irradiated object S is cleaved along a desired scheduled breaking line.
[0085]
FIG. 16 is a schematic cross-sectional view showing a second embodiment of the light irradiation apparatus of the present invention. In the present embodiment, the irradiated object S is different in that the surface portion other than the planned breaking line is covered with the light shielding mask MS.
[0086]
FIG. 17 is a schematic cross-sectional view showing a third embodiment of the light irradiation apparatus of the present invention. The present embodiment is different in that a wavelength selective filter F is interposed between the reflecting mirror M and the flash discharge lamp XFL and the irradiated object S.
[0087]
18 and 19 show a fourth embodiment of the light irradiation apparatus of the present invention, FIG. 18 is a schematic cross-sectional view, and FIG. 19 is a function explanatory diagram of the placement surface. In this Embodiment, it differs in the point by which the protruding item | line part 11 along a scheduled cutting line is formed in the mounting surface ST of the to-be-irradiated processed material S. FIG.
[0088]
When the protruding strip portion 11 is formed on the mounting surface ST along the planned breaking line, the pressing force in the direction shown by the arrow in FIG. Breaking along is promoted.
[0089]
【The invention's effect】
According to the first aspect of the present invention, the first region having the internal cross-sectional area S1 and the second region having the internal cross-sectional area S2 are provided in the tube axis direction, and are formed mainly of quartz glass. A flash discharge lamp in which the light output distribution in the tube axis direction of the lamp is controlled as desired by including a satisfying light-transmitting elongated hermetic container, a pair of electrodes, a discharge medium, and a trigger wire. Can be provided.
[0090]
According to the invention of claim 2, the airtight container can provide a flash discharge lamp that can be arranged close to each other when a plurality of the hermetic containers are arranged in parallel because the inner surface of the first region is flat. .
[0091]
According to the invention of claim 3, a light-transmitting elongated airtight container formed mainly of quartz glass, and the inner surface of the airtight container is made of metal and / or metal oxide to block vacuum ultraviolet light and at least long wavelength ultraviolet light. Providing a flash discharge lamp that suppresses deterioration due to vacuum ultraviolet rays of quartz glass that constitutes an airtight container by including a wavelength-selective transmission film that transmits light, a pair of electrodes, a discharge medium, and a trigger wire can do.
[0092]
According to the invention of claim 4, it comprises a translucent elongated hermetic vessel mainly composed of quartz glass having an OH group concentration of 100 to 1000 ppm, a pair of electrodes, a discharge medium, and a trigger wire. Therefore, it is possible to provide a flash discharge lamp in which deterioration of quartz glass constituting the hermetic container due to vacuum ultraviolet rays is suppressed.
[0093]
According to the invention of claim 5, the trigger wire has a length in the tube axis direction of 2/3 or less of the distance between the electrodes, so that startability is promoted and the charging pressure of the capacitor reaches a predetermined value. Thus, a flash discharge lamp capable of setting the discharge energy as desired can be provided.
[0094]
According to the invention of claim 6, a series connection lamp circuit formed by connecting a plurality of flash discharge lamps according to any one of claims 1 to 5, and a capacitor for passing a pulse current through the series connection lamp circuit; And a high-voltage power supply for charging the capacitor, the structure of the flash discharge lamp lighting device is simplified, miniaturized, and thus inexpensive, and the discharge energy of a plurality of flash discharge lamps. In addition, it is possible to provide a flash discharge lamp lighting device that can be easily irradiated at the same time and can perform light irradiation processing satisfactorily.
[0095]
According to a seventh aspect of the present invention, since the flash discharge lamp according to any one of the first to fifth aspects, a reflecting mirror, and a flash discharge lamp lighting circuit are provided, the effects of the first to fifth aspects are provided. The light irradiation apparatus which has can be provided.
[Brief description of the drawings]
FIG. 1 is a front sectional view showing a first embodiment of a flash discharge lamp of the present invention.
FIG. 2 is an enlarged front sectional view of the same main part
FIG. 3 is an enlarged end view of the same main part in the same manner.
FIG. 4 is a graph showing the light irradiation effect in the tube axis direction together with that of the comparative example.
FIG. 5 is a front sectional view showing a second embodiment of the flash discharge lamp of the present invention.
FIG. 6 is a front sectional view showing a third embodiment of the flash discharge lamp of the present invention.
FIG. 7 is a front sectional view showing a fourth embodiment of the flash discharge lamp of the present invention.
FIG. 8 is a front sectional view showing a fifth embodiment of the flash discharge lamp of the present invention.
FIG. 9 is a front sectional view showing a sixth embodiment of the flash discharge lamp of the present invention.
FIG. 10 is an enlarged front sectional view of the main part
FIG. 11 is an enlarged end view of the same main part
FIG. 12 is a front view showing a seventh embodiment of the flash discharge lamp of the present invention.
FIG. 13 is a graph showing the relationship between the OH group concentration of quartz glass and the light attenuation factor, explaining the eighth embodiment of the flash discharge lamp of the present invention;
FIG. 14 is a circuit block diagram showing an embodiment of a flash discharge lamp lighting device of the present invention.
FIG. 15 is a schematic cross-sectional view showing the first embodiment of the light irradiation apparatus of the present invention.
FIG. 16 is a schematic cross-sectional view showing a second embodiment of the light irradiation apparatus of the present invention.
FIG. 17 is a schematic cross-sectional view showing a third embodiment of the light irradiation apparatus of the present invention.
FIG. 18 is a schematic cross-sectional view showing a fourth embodiment of the light irradiation apparatus of the present invention.
FIG. 19 is also a functional explanatory diagram of the mounting surface.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... 1st area | region, 2 ... 2nd area | region, 3 ... Introductory line, E ... Electrode, SE ... Airtight container, TW ... Trigger wire, XFL ... Flash discharge lamp

Claims (7)

A light-transmitting elongated airtight container that has a first region having an internal cross-sectional area S1 and a second region having an internal cross-sectional area S2 in the tube axis direction and is formed mainly of quartz glass and satisfies Formula 1. When;
A pair of electrodes sealed inside both ends of the hermetic container;
A discharge medium enclosed in an airtight container and emitting light during discharge;
A trigger wire disposed adjacent to the outer periphery of the hermetic container;
A flash discharge lamp characterized by comprising:

The flash discharge lamp according to claim 1, wherein the airtight container has a flat inner surface in the first region. A translucent elongated hermetic container mainly composed of quartz glass;
An ultraviolet-selective permeable membrane made of a metal and / or metal oxide on the inner surface of the hermetic container and blocking vacuum ultraviolet rays and transmitting at least long-wavelength ultraviolet rays;
A pair of electrodes sealed inside both ends of the hermetic container;
A discharge medium enclosed in an airtight container and emitting light during discharge;
A trigger wire disposed adjacent to the outer periphery of the hermetic container;
A flash discharge lamp characterized by comprising: A translucent elongated hermetic container mainly composed of quartz glass having an OH group concentration of 100 to 1000 ppm;
A pair of electrodes sealed inside both ends of the hermetic container;
A discharge medium enclosed in an airtight container and emitting light during discharge;
A trigger wire disposed adjacent to the outer periphery of the hermetic container;
A flash discharge lamp characterized by comprising: The flash discharge lamp according to any one of claims 1 to 4, wherein the trigger wire has a length in the tube axis direction of 2/3 or less of a distance between the electrodes. A series-connected lamp circuit comprising a plurality of flash discharge lamps according to claim 1 connected in series;
A capacitor for passing a pulse current through the series-connected lamp circuit;
A high voltage power supply for charging the capacitor;
A flash discharge lamp lighting device comprising: A flash discharge lamp according to any one of claims 1 to 5;
A reflecting mirror for condensing the light emitted from the flash discharge lamp on the target part;
A flash discharge lamp lighting circuit for lighting a flash discharge lamp by supplying a pulse current to the flash discharge lamp.

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