JP2004361181A - Cantilever wet processing container, cantilever wet processing unit including the same, and cantilever wet processing method using cantilever wet processing container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cantilever wet processing container used for processing a cantilever by means of a fluid to reduce undesired deformation of the cantilever. <P>SOLUTION: This cantilever wet processing container 100 comprises a lower lid 110 and an upper lid 140, which can be joined by fitting with a cantilever chip 180 housed therein. The lower lid 110 comprises a recessed part 112 capable of housing the cantilever chip 180 and recessed parts 114 and 116 wideningly extending from the recessed part 112 in directions opposite to each other. The lower lid 110 further comprises three pairs of grooves symmetrically extending from the recessed part 112 and a pair of hollows 127 and 128. The upper lid 140 comprises protrusion parts fittable to grooves 121 and 122 of the lower lid 110, and to the hollows 127 and 128, respectively. The upper lid 140 has a mark 148 for showing the direction of the cantilever chip 180. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to the treatment of a cantilever tip with a fluid in a cantilever tip used in a scanning probe microscope.
[0002]
[Prior art]
Generally, an atomic force microscope uses a cantilever provided with a probe at the tip of a leaf spring-like lever supported on a cantilever, according to the interaction force acting between the probe and the sample surface. A change in the amount of deflection of the lever that occurs is detected, and while controlling the amount of cantilever pushed into the sample so that the amount of change is constant, the control signal is taken into a computer to reduce the unevenness of the sample to sub-nm resolution. Is used for imaging. Also, by detecting the amount of deflection of the lever part caused by the interaction force acting between the probe and the sample surface, the force acting between the probe and the sample is measured based on the spring constant of the lever part. I have. The detected force reflects characteristics in the vicinity of the sample surface, such as the viscoelastic characteristics of the sample, the adsorption force and the adhesive force.
[0003]
The cantilever used in the atomic force microscope usually has a probe with a small radius of curvature at the tip, that is, a sharpened probe, in order to be able to detect irregularities and physical quantities of the sample with high resolution. In the case of commercially available cantilevers, the radius of curvature of the tip of the probe is about 2 nm to about 50 nm. The minute cantilever extends from an end of a glass or silicon chip substrate having a size of about 3.5 mm × 1.5 mm × 0.5 mm.
[0004]
Atomic force microscopy was primarily used for measuring relatively hard samples at first, but recently it has been used for relatively soft samples such as biomolecules and polymers. It is also being used for measurement of in-plane viscoelastic distribution of molecular membranes, measurement of interaction force between biomolecules, measurement of cell hardness, and analysis of distribution of receptors on cell surfaces. Since the cantilever used in this application has a soft sample, it is softer than the cantilever used for the above-described imaging, and has a spring constant of about 0.05 to 0.5 N / m. Recently, very soft cantilevers of 0.006 N / m have become commercially available. Such a commercially available soft cantilever is manufactured by a film deposition process of a semiconductor process capable of controlling the film thickness with high accuracy. Specifically, a silicon nitride film is formed on a substrate by LP-CVD (chemical vapor deposition) and patterned by photolithography.
[0005]
In the measurement of the interaction between biomolecules, a surface-treated or surface-modified probe is used to realize a state where a biophysical or biochemical reaction occurs between the biomolecule sample and the cantilever probe. It is often done. For example, polystyrene beads are well known in the fields of biology and chemistry as members to be subjected to surface modification. Attempts have been made to bond polystyrene beads, which have been surface-modified in advance, to a cantilever, or to bond polystyrene beads to a cantilever to form a probe and then perform surface modification to the polystyrene beads. A cantilever used for such a purpose is disclosed in, for example, Japanese Patent Application Laid-Open No. 10-73608. For example, the surface of a polystyrene bead is modified with a functional molecule such as a protein to contact and react with a cell serving as a sample and the functional molecule, and the interaction force acting on both is used to raise the cantilever when the cantilever is pulled up. By detecting the change in the force, the force acting between the biomolecules can be estimated. Since most commercially available cantilevers are provided with a probe, surface modification of the probe of the cantilever is performed without attaching polystyrene beads. For example, if a probe is made of a cantilever coated with gold, and the gold is used as a reaction layer, and a thiol group (—SH group) is further modified on gold as a second reaction layer, biological functions such as proteins can be achieved. Molecules can be modified on the probe surface. When used for measurement, the reaction force when such a surface-modified molecule is brought into contact with a sample can be measured. In addition, even if the probe has exposed silicon nitride, it can be surface-modified with various substances by coating with a silane coupler.
[0006]
[Patent Document 1]
JP-A-10-73608
[0007]
[Problems to be solved by the invention]
When the surface modification of a very soft silicon nitride cantilever having a spring constant of less than 0.05 N / m is performed, the cantilever is wrapped or broken around the chip substrate during the surface treatment as compared with the case of using a harder cantilever. Or the rate at which it suddenly increases is a problem. The surface treatment as described above involves wet chemical treatment using water, an aqueous solution, and an organic solvent. The problem is that when the cantilever is put into or taken out of the processing solution, the soft cantilever is wound around the chip substrate, and in the worst case, it is damaged. In particular, the phenomenon often occurs when rinsing with water. This is because the surface tension of water is significantly higher than other solutions. Rinsing with water is indispensable in the process of chemical surface modification of the probe used for measuring biological samples, and the need to avoid such problems in the chemical surface modification treatment process using water has been renewed. Have been.
[0008]
FIG. 13 shows a state in which the cantilever chip placed on the slide glass is subjected to a cantilever treatment with a fluid. As shown in FIG. 13, a cantilever chip 500 is placed on a slide glass 504, and a solution is dropped near a cantilever 502 or a probe 503 formed at a free end thereof to form a droplet 505. Further, a solution is injected using a syringe or the like so that the droplet 505 becomes large. When the droplet 505 comes into contact with the tip of the cantilever 502, for example, when the solution is water, the water flowing under the cantilever 502 forms a meniscus 506 due to its large surface tension, and reduces the surface area of the droplet. Try to. As a result, the cantilever 502 is pulled toward the slide glass 504 and bends.
[0009]
FIG. 14 shows a state in which a cantilever chip is submerged in a fluid contained in a container and the cantilever is treated with the fluid. As shown in FIG. 14, when the cantilever tip 500 is tilted with respect to the water surface and the cantilever 502 is immersed downward in the water 508 contained in the container 507, when the cantilever 502 comes into contact with the water surface, In the vicinity, the tip of the cantilever 502 is bent in such a manner as to be sucked into the water.
[0010]
FIG. 15 shows a state in which the cantilever chip is taken out of the fluid contained in the container. As shown in FIG. 15, when the cantilever chip 500 in the water 508 contained in the container 507 is lifted with the cantilever 502 facing upward and is to be taken out from the water, the cantilever 502 is bent at the water surface and the chip substrate 501 is bent. Wraps around you.
[0011]
In addition, some solutions for surface modification are expensive, and there is a need to minimize the amount of use. In particular, when a measurer who has purchased a cantilever performs the treatment by himself, a large amount of the solution is wasted because the chip is treated one by one, and measures to improve this are required.
[0012]
Furthermore, in the past, when performing surface modification treatment on the cantilever, since the bare cantilever chip was handled with the chip substrate using tweezers, for example, when inserting or removing the cantilever in the processing solution, it was exposed due to mishandling etc. In some cases, the cantilever may break when it comes into contact with the bottom or side wall of a container such as a petri dish containing a solution. If a small container is used to reduce the amount of solution used, care must be taken in handling the cantilever tip in order to avoid contact with the cantilever, and there is also a problem that workability is extremely deteriorated. Therefore, in order to perform the surface modification treatment, a device is required to improve the ease of handling of the cantilever chip.
[0013]
The present invention has been made in view of such a situation, and a main object of the present invention is to provide a technique for suppressing undesired deformation of a cantilever when a cantilever of a cantilever chip is treated with a fluid. is there. Thus, a secondary object is, in part, to provide a cantilever wet processing container for use in treating cantilevers with fluid. Another object is to provide a cantilever wet processing unit including the cantilever wet processing container. Another object is to provide a cantilever wet treatment method using a cantilever wet treatment container.
[0014]
[Means for Solving the Problems]
The present invention is directed, in part, to a cantilever wet processing container used for treating a cantilever tip with a cantilever fluid used in a scanning probe microscope, and the cantilever wet processing container listed in the following sections. Contains.
[0015]
1. The cantilever wet processing container of the present invention has a housing space for housing a cantilever chip, a guide portion for regulating the movement of the cantilever chip housed in the housing space, an escape portion for preventing contact of the cantilever of the cantilever chip, and a housing. It has a plurality of flow passages connecting the storage space and the external space, which enable movement of fluid between the space and the external space.
[0016]
In this cantilever wet processing container, difficulty in handling when processing the cantilever is eliminated.
[0017]
2. Another cantilever wet processing container of the present invention is the cantilever wet processing container of the first item, wherein the cantilever wet processing container is viewed along a normal line on the cantilever surface of the cantilever chip accommodated therein. Sometimes, the guide portion has a substantially circular appearance, and the guide portion regulates the movement of the cantilever tip so that the cantilever is located substantially at the center of the substantially circular shape.
[0018]
In this cantilever wet processing container, the cantilever can be almost certainly brought into contact with the fluid by immersing the cantilever wet processing container with the fluid to a height of about 2/3.
[0019]
3. Another cantilever wet processing container of the present invention is the cantilever wet processing container of the first item, which is composed of two parts that are joined by fitting.
[0020]
In this cantilever wet processing container, cantilever chips can be easily accommodated.
[0021]
The present invention is directed, in part, to a cantilever wet processing unit used for processing a cantilever tip with a cantilever fluid used in a scanning probe microscope, and the cantilever wet processing unit listed in the following sections. Contains.
[0022]
4. The cantilever wet processing unit of the present invention includes the cantilever wet processing container described in the first item, and a container having a space capable of accommodating the cantilever wet processing container and a fluid.
[0023]
In this cantilever wet processing unit, the cantilever is processed by immersing the cantilever wet processing container in the fluid contained in the container.
[0024]
5. Another unit for wet treatment of a cantilever of the present invention is the unit for wet treatment of a cantilever according to item 4, wherein the container has a through hole for discharging a fluid, and further has a hole for appropriately closing the through hole of the container. Includes stopper.
[0025]
In this cantilever wet processing unit, since the fluid is removed from the cantilever by the natural discharge of the fluid, undesired deformation of the cantilever is stably suppressed.
[0026]
6. Another cantilever wet processing unit of the present invention is the cantilever wet processing unit according to item 4, wherein the container has a plurality of spaces capable of accommodating the cantilever wet processing container and the fluid, and the plurality of spaces are constant. Are arranged at intervals.
[0027]
In this cantilever wet processing unit, processing of a plurality of cantilevers can be performed simultaneously.
[0028]
The present invention is directed, in part, to a cantilever wet treatment method for treating a cantilever of a cantilever chip with a fluid by using the cantilever wet treatment container according to item 1, and is listed in the following items. Includes wet processing of cantilevers. The cantilever chip has a chip substrate and a cantilever extending from the chip substrate.
[0029]
7. In the wet treatment method of the present invention, the cantilever chip and the fluid are brought into contact from the opposite side of the cantilever, and finally, the fluid contacting step of bringing the entire cantilever into contact with the fluid, and the contact between the cantilever tip and the fluid. And a contact releasing step of releasing from the opposite side of the cantilever.
[0030]
In this wet processing method, the cantilever chip is brought into contact with the fluid from the opposite side of the cantilever, and the contact with the fluid is released from the opposite side of the cantilever. Can be suppressed.
[0031]
8. Another wet treatment method according to the present invention is the wet treatment method according to claim 7, wherein the fluid contacting step is performed by bringing the cantilever wet treatment container closer to the fluid.
[0032]
9. In another wet processing method of the present invention, in the wet processing method according to claim 7, the contact releasing step is performed by removing a cantilever wet processing container from the fluid.
[0033]
10. In another wet treatment method of the present invention, in the wet treatment method according to claim 7, the fluid contacting step is performed by supplying a fluid to a container containing a cantilever wet treatment container.
[0034]
11. In another wet processing method according to the present invention, in the wet processing method according to claim 7, the contact releasing step is performed by discharging a fluid from the container.
[0035]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0036]
First embodiment
FIG. 1 is an exploded perspective view of a cantilever wet processing container according to the first embodiment of the present invention. FIG. 2 is a perspective view of the upper lid shown in FIG. 1, and is drawn upside down from FIG. 1. FIG. 3 is a perspective view of the lower cover shown in FIG. FIG. 4 is a plan view of the upper lid shown in FIG. FIG. 5 is a plan view of the lower cover shown in FIG. FIG. 6 is a side view of the cantilever wet processing container shown in FIG.
[0037]
As shown in FIG. 1, the cantilever wet processing container 100 of the present embodiment includes a lower lid 110 and an upper lid 140. The lower lid 110 and the upper lid 140 receive the cantilever chip 180 and can be connected to each other by fitting.
[0038]
The cantilever chip 180 has a chip substrate 182 and a cantilever 184 extending from the chip substrate 182. The cantilever 184 has a probe at its free end. The probe protrudes upward from the triangular surface from the cantilever 184 in FIG.
[0039]
As shown in FIG. 3, the lower lid 110 includes a concave portion 112 that can accommodate the cantilever chip 180, a concave portion 114 extending from the concave portion 112 along the axis L to the side surface, and a concave portion 112 extending along the axis L from the concave portion 112. And a concave portion 116 extending to the side surface while spreading to the opposite side from the concave portion 114. The lower lid 110 has three pairs of grooves symmetrically extending from the recess 112 to the side surface along the axis T, that is, grooves 121 and 122, grooves 123 and 124, and grooves 125 and 126. . The lower lid 110 further has a pair of depressions 127 and 128 located symmetrically with respect to the axis L.
[0040]
The three recesses 112, 114, and 116 and the six grooves 121, 122, 123, 124, 125, and 126 all have a bottom surface located on the same plane. These define four pairs of walls positioned axisymmetrically with respect to the axis L, that is, walls 131 and 132, walls 133 and 134, walls 135 and 136, and walls 137 and 138. .
[0041]
These eight walls 131, 132, 133, 134, 135, 136, 137, and 138 are guides for restricting the lateral movement (movement along the bottom surface of the recess 112) of the cantilever tip 180 disposed in the recess 112. Acts as a part.
[0042]
As shown in FIG. 2, the upper lid 140 includes a concave portion 144 extending from the center to the side surface while spreading along the axis L, and a rectangular concave portion extending from the center to the opposite side along the axis L from the concave portion 144. 142, a concave portion 146 extending from the concave portion 142 to the side surface, and a pair of grooves 155 and 156 extending symmetrically to the side surface along the axis T from the center.
[0043]
The upper lid 140 further has three pairs of protrusions positioned axially symmetrically with respect to the axis L, that is, protrusions 151 and 152, protrusions 153 and 154, and protrusions 157 and 158. The protrusions 151 and 152 can fit into the grooves 121 and 122 of the lower lid 110, respectively. Also, the protrusions 157 and 158 can fit into the depressions 127 and 128 of the lower lid 110, respectively.
[0044]
The upper lid 140 has a mark 148 for indicating the direction of the cantilever tip 180, as shown in FIG. The mark 148 is formed at a position off the center of the upper lid 140. The upper lid 140 can fit into the lower lid 110 in one particular orientation relative to the lower lid 110. For this reason, the mark 148 can give information on the approximate direction of the cantilever chip 180 housed in the space between the lower lid 110 and the upper lid 140 as described later.
[0045]
The lower lid 110 and the upper lid 140 are assembled by housing the cantilever chip 180 as follows.
[0046]
First, the cantilever chip 180 is arranged in the concave portion 112 of the lower lid 110. Next, the lower lid 110 and the upper lid 140 are arranged so that the surface of the upper lid 140 seen in FIG. 2 and the surface of the lower lid 110 seen in FIG. Further, the projections 151 and 152 of the upper lid 140 are inserted into the grooves 121 and 122 of the lower lid 110, and the projections 157 and 158 of the upper lid 140 are inserted into the depressions 127 and 128 of the lower lid 110, respectively. Fit 140.
[0047]
When the lower lid 110 and the upper lid 140 are fitted together as shown in FIG. 6, the protrusions 153 and 154 of the upper lid 140 are located near the chip substrate 182 of the cantilever chip 180. The protrusions 153 and 154 of the upper cover 140 and the bottom surface of the concave portion 112 of the lower cover 110 regulate the vertical movement (movement along an axis perpendicular to the bottom surface of the concave portion 112) of the cantilever chip 180 accommodated in the concave portion 112. Act as a guide part.
[0048]
As can be seen from FIGS. 4 and 5, when the lower lid 110 and the upper lid 140 are fitted together, the cantilever wet processing container 100, in other words, the lower lid 110 and the upper lid 140 are housed in the cantilever wet processing container 100. The cantilever tip 180 has a substantially circular appearance when viewed along a normal line standing on the surface of the cantilever 184. Here, the term “substantially circular” refers to a circular shape and an arbitrary shape close to a circular shape. In addition, an arbitrary shape close to a circle includes an ellipse and a polygon having no interior angle larger than 180 degrees.
[0049]
Further, in a state where the lower lid 110 and the upper lid 140 are fitted, the guide portions (the wall portions 131, 132, 133, 134, 135, 136, 137, and 138 of the lower lid 110, the projections 153 and 154 of the upper lid 140, The bottom surface of the concave portion 112 of the lower lid 110) regulates the movement of the cantilever chip 180 such that the cantilever 184 is positioned substantially at the center of the above-described substantially circular shape which is the external shape of the cantilever wet processing container 100.
[0050]
In other words, the guide portion allows the cantilever tip 180 to slightly move in the front-rear, left-right, up-down directions, but does not allow the cantilever 184 to move so far from the cantilever 184 as to move away from the vicinity of the center of the cantilever wet processing container 100.
[0051]
Further, when the lower lid 110 and the upper lid 140 are fitted together, the concave portion 114 of the lower lid 110 and the central concave portion (the concave portion 144, the concave portion 155, and the concave portion 156) of the upper lid 140 are housed in the cantilever wet processing container 100. The cantilever 184, which is an extremely soft portion of the cantilever tip 180, and the probe at the free end thereof function as a relief portion that provides a space for preventing the cantilever 184 from coming into contact with the lower lid 110 or the upper lid 140.
[0052]
In a state where the lower lid 110 and the upper lid 140 are fitted together, the concave portion 114 of the lower lid 110 and the concave portion 144 of the upper lid 140 cooperate to form the concave portion 112, that is, the space accommodating the cantilever chip 180 and the cantilever wet processing. A flow path communicating with the external space of the container 100 is formed. This channel serves to allow the fluid used in the processing of the cantilever 184 to move between the space containing the cantilever tip 180 and the external space of the cantilever wet processing container 100.
[0053]
Similarly, the concave portion 116 of the lower lid 110 and the concave portion 146 of the upper lid 140 cooperate to form a similar flow path. Further, the grooves 125 and 126 of the lower lid 110 and the grooves 155 and 156 of the upper lid 140 cooperate to form similar channels. In addition, the grooves 123 and 124 of the lower lid 110 also form similar channels. Further, the grooves 121 and 122 of the lower lid 110 also form similar channels.
[0054]
The cantilever wet processing container 100 has a size of, for example, but not limited to, a diameter of 12 mm and a thickness of 5 mm when the lower lid 110 and the upper lid 140 are fitted together. Of course, the size may be smaller than this. For example, the diameter may be about 2.5 times the length of the cantilever tip (8.75 mm if the length of the cantilever tip is 3.5 mm). However, it is preferable that the size be such that the work of fitting the lower lid 110 and the upper lid 140 can be performed relatively easily.
[0055]
The material of the lower lid 110 and the upper lid 140 is preferably a material having high resistance to organic / inorganic acids / alkali or an organic solvent. For example, plastics, glass, high-purity metal, etc. often used in chemical treatment are preferable. Applicable. It is also possible to apply a material made of a metal and then coated with plastics or glass. Since plastics can be processed by a molding method, they are also excellent in terms of cost reduction. For example, polypropylene or the like is a typical material, and is suitable because it exhibits low wettability and high dimensional stability over a wide temperature range. In addition, depending on the solution to be used, polycarbonate, polyethylene terephthalate, polyethylene, or the like, or silicone rubber, resin, or of course, acrylic or other plastic material may be applied.
[0056]
Hereinafter, a unit for wet processing of a cantilever including such a container for wet processing of a cantilever and a method of wet processing of a cantilever using the container for wet processing of a cantilever will be described.
[0057]
FIG. 7 shows a unit for cantilever wet processing according to the first embodiment of the present invention, including the cantilever wet processing container shown in FIG. 1.
[0058]
As shown in FIG. 7, the cantilever wet processing unit 200 of the present embodiment accommodates the cantilever wet processing container 100 and the fluid 236 used in the processing of the cantilever 184, in addition to the cantilever wet processing container 100. It has a container 210 having a space that can be used. The fluid 236 is a solution for surface modification, water for rinsing, or the like. The container 210 is preferably optically transparent so that the level of the fluid 236 can be seen.
[0059]
The container 210 has a through hole (drain) 214 for discharging the contained fluid 236. Accordingly, the cantilever wet processing unit 200 further has a stopper (pin) 220 for appropriately closing the through hole 214 of the container 210.
[0060]
FIG. 7 shows one method of bringing a cantilever into contact with a fluid. In this approach, cantilever 184 is contacted with fluid 236 as follows. That is, the cantilever 184 is immersed in the fluid 236.
[0061]
In FIG. 7, the cantilever wet processing container 100 containing the cantilever chip 180 is placed in the container 210 with the cantilever 184 facing upward using the mark 148. Further, the through hole 214 of the container 210 is closed with a stopper (pin) 220.
[0062]
The fluid 236 is supplied to the container 210 from the syringe 230 via the tube 232. As the fluid 236 is supplied, the level of the fluid 236 gradually rises. During that time, the fluid 236 quickly flows through the flow path of the cantilever wet processing container 100 into the space in which the cantilever chip 180 is stored. For this reason, the level of the fluid 236 is maintained equally inside and outside the cantilever wet processing container 100. As a result, the cantilever tip 180 is immersed in the fluid 236.
[0063]
As the liquid level of the fluid 236 rises, the liquid level of the fluid 236 moves from the chip substrate 182 side of the cantilever chip 180 to the cantilever 184 side. That is, the cantilever chip 180 is immersed in the fluid 236 from the chip substrate 182 side. Therefore, when the cantilever 184 comes into contact with the fluid 236, undesired bending of the cantilever 184 is unlikely to occur.
[0064]
It is sufficient that the fluid 236 is ultimately poured to a level about two-thirds that of the cantilever wet processing container 100. At this liquid level, the cantilever 184 to be processed is located substantially at the center of the cantilever wet processing container 100, so that it is surely immersed in the fluid 236. This is useful for saving fluid 236 to be used.
[0065]
Here, an example is described in which the cantilever 184 and the fluid 236 are brought into contact with each other by raising the liquid level of the fluid 236 with respect to the cantilever wet processing container 100. The cantilever 184 is brought into contact with the fluid 236 by bringing the cantilever wet processing container 100 closer to the fluid 236 with the cantilever 184 facing upward with reference to the mark 148. You may let it.
[0066]
FIG. 8 shows one method of releasing the contact between the cantilever and the fluid in the unit for wet processing of the cantilever shown in FIG. In this approach, cantilever 184 is released from contact with fluid 236 as follows. That is, the fluid 236 is removed from the cantilever 184.
[0067]
Prior to releasing the contact between the cantilever 184 and the fluid 236, the cantilever wet processing container 100 is first rotated, and the cantilever 184 is turned downward using the mark 148 as shown in FIG.
[0068]
Subsequently, the plug (pin) 220 is removed, and the fluid 236 is discharged from the container 210 through the through hole 214. With the discharge of the fluid 236, the liquid level of the fluid 236 gradually decreases. During that time, the fluid 236 in the space in which the cantilever chip 180 is accommodated quickly flows out through the flow path of the cantilever wet processing container 100. For this reason, the level of the fluid 236 is maintained equally inside and outside the cantilever wet processing container 100.
[0069]
As the liquid level of the fluid 236 falls, the liquid level of the fluid 236 moves from the chip substrate 182 side of the cantilever chip 180 to the cantilever 184 side. That is, the fluid 236 is removed from the cantilever chip 180 from the chip substrate 182 side. For this reason, when the cantilever 184 separates from the fluid 236, it is difficult for the cantilever 184 to be undesirably wrapped around the chip substrate 182 or to be bent therewith.
[0070]
In this manner, undesired deformation of the cantilever 184 is stably suppressed because the fluid 236 is removed from the cantilever 184 by natural discharge of the fluid 236.
[0071]
FIG. 9 shows another method of releasing contact between the cantilever and the fluid in the unit for wet processing of the cantilever shown in FIG. In this approach, cantilever 184 is released from contact with fluid 236 as follows. That is, the cantilever 184 is removed from the fluid 236.
[0072]
Prior to releasing the contact between the cantilever 184 and the fluid 236, the cantilever 184 is first turned downward by rotating the cantilever wet processing container 100 using the mark 148 as shown in FIG.
[0073]
Subsequently, the cantilever wet processing container 100 is moved upward and taken out of the fluid 236. This causes the cantilever tip 180 to exit the fluid 236. During that time, the fluid 236 in the space in which the cantilever chip 180 is accommodated quickly flows out through the flow path of the cantilever wet processing container 100. For this reason, the level of the fluid 236 is maintained equally inside and outside the cantilever wet processing container 100.
[0074]
As the cantilever wet processing container 100 moves, the cantilever chip 180 exits the fluid 236 from the chip substrate 182 side. That is, the cantilever chip 180 is extracted from the fluid 236 from the chip substrate 182 side. For this reason, when the cantilever 184 separates from the fluid 236, it is difficult for the cantilever 184 to be undesirably wrapped around the chip substrate 182 or to be bent therewith.
[0075]
As can be understood from the above description, in the present embodiment, the handling of the cantilever wet processing container 100 accommodating the cantilever chip 180 is handled instead of the bare cantilever chip 180, so that the difficulty of handling is eliminated. . That is, it is possible to reduce the possibility that the cantilever 184 of the cantilever tip 180 is deformed or broken due to inadvertent contact due to difficulty in handling.
[0076]
Second embodiment
This embodiment is directed to another cantilever wet processing unit including the cantilever wet processing container of the first embodiment.
[0077]
FIG. 10 shows a unit for wet processing of a cantilever according to a second embodiment of the present invention, including the container for wet processing of a cantilever shown in FIG. FIG. 11 shows a state in which the container shown in FIG. 10 is viewed from above. FIG. 12 shows a longitudinal section of the container along the line XII-XII shown in FIG.
[0078]
As shown in FIGS. 10 to 12, in addition to the cantilever wet processing container 100, the cantilever wet processing container 300 of the present embodiment includes fluid used in the processing of the cantilever wet processing container 100 and the cantilever 184. (Multi-tab cassette) 310 having a plurality of spaces (tabs) 312 capable of accommodating therein. The container 310 is preferably optically transparent so that the level of the fluid 236 can be seen.
[0079]
The container 310 has a through hole (drain) 314 for discharging the fluid contained in each space (tab) 312. Accordingly, the cantilever wet processing unit 300 further has a stopper (pin) 320 for appropriately closing the through hole 314 of the container 310.
[0080]
A fluid (solution for surface modification or water for rinsing) used in the treatment is supplied to the space (tab) 312 by, for example, but not limited to, a pipetter 330. As the pipettor 330, a multiple pipetter in which a plurality of pipetters are integrated, for example, a triple pipetter is used.
[0081]
The plurality of spaces (tabs) 312 are arranged at regular intervals P (at a constant pitch P). The space P between the spaces (tabs) 312 is preferably substantially equal to the space between the pipettor tips for discharging the fluid of the multiple pipetter 330 used. Thereby, it is possible to supply the fluid to the plurality of spaces (tabs) 312 simultaneously by one operation of the multiple pipetter 330.
[0082]
As shown in FIG. 11, each of the spaces (tabs) 312 has a fluid introduction groove 316, and the fluid introduction groove 316 is used to prevent the supplied fluid from being violently mixed as shown in FIG. , Has a gentle slope.
[0083]
The space (tab) 312 is provided with a fluid discharge groove 318. The fluid discharge groove 318 has a height of about ／ of the cantilever wet processing container 100 accommodated in the space (tab) 312.
[0084]
In the cantilever wet processing unit 300 of the present embodiment, the processing of the cantilever 184 is performed according to the same method as described in the first embodiment.
[0085]
That is, the cantilever wet processing container 100 containing the cantilever chip 180 is disposed in the space (tab) 312 of the container 310 with the cantilever 184 facing upward, and the through-hole 314 of the space (tab) 312 is formed. Close with stopper (pin) 320. The fluid is supplied to the space (tab) 312 via the fluid introduction groove 316 by the pipetter 330.
[0086]
In the present embodiment, as shown in FIG. 12, excess fluid flows down from the container 310 via the fluid discharge groove 318 and is collected by the tray 340 in which the container 310 is placed. In other words, the supply of the fluid may be stopped after confirming that the fluid flows down from the fluid discharge groove 318 of the container 310.
[0087]
Subsequently, the cantilever wet processing container 100 is rotated to turn the cantilever 184 downward. The plug (pin) 320 is removed, and the fluid is discharged from the space (tab) 312 of the container 310 through the through hole 314. The discharged fluid is collected by the tray 340.
[0088]
The fluid collected in the pan 340 may be reused, if possible.
[0089]
Also in the processing method of the cantilever 184 using the cantilever wet processing unit 300 of the present embodiment, for the same reason as in the first embodiment, it is difficult for the cantilever 184 to be undesirably wrapped around the chip substrate 182 and to be bent therewith. . Further, since a plurality of cantilever chips 180 can be simultaneously processed at one time, the processing operation efficiency can be significantly improved.
[0090]
Although the embodiments of the present invention have been described with reference to the drawings, the present invention is not limited to these embodiments, and various modifications and changes may be made without departing from the spirit of the present invention. May be done.
[0091]
【The invention's effect】
ADVANTAGE OF THE INVENTION According to this invention, generation | occurrence | production of the undesired bending, winding, and bending of the cantilever at the time of the process by the fluid of a cantilever is reduced.
[Brief description of the drawings]
FIG. 1 is an exploded perspective view of a cantilever wet processing container according to a first embodiment of the present invention.
FIG. 2 is a perspective view of the upper lid shown in FIG. 1, which is drawn upside down from FIG.
FIG. 3 is a perspective view of a lower lid shown in FIG. 1;
FIG. 4 is a plan view of the upper lid shown in FIG.
FIG. 5 is a plan view of the lower cover shown in FIG. 1;
FIG. 6 is a side view of the cantilever wet processing container shown in FIG. 1;
FIG. 7 shows a unit for cantilever wet processing of the first embodiment of the present invention, including the container for wet processing of cantilevers shown in FIG. 1;
FIG. 8 shows one method of releasing the contact between the cantilever and the fluid in the unit for wet processing of the cantilever shown in FIG. 7;
FIG. 9 shows another method for releasing the contact between the cantilever and the fluid in the unit for wet processing of the cantilever shown in FIG. 7;
FIG. 10 shows a unit for wet processing of a cantilever according to a second embodiment of the present invention, including the container for wet processing of a cantilever shown in FIG.
FIG. 11 shows a state where the container shown in FIG. 10 is viewed from above.
FIG. 12 shows a longitudinal section of the container along the line XII-XII shown in FIG.
FIG. 13 shows how a cantilever is treated with a fluid on a cantilever chip placed on a slide glass.
FIG. 14 shows a state in which a cantilever chip is submerged in a fluid contained in a container and the cantilever is treated with the fluid.
FIG. 15 shows a state in which a cantilever chip is taken out of a fluid contained in a container.
[Explanation of symbols]
100: cantilever wet processing container, 110: lower lid, 112: concave, 114: concave, 116: concave, 121 and 122: groove, 123 and 124: groove, 125 and 126: groove, 131 and 132: wall, 133 and 134: wall, 135 and 136: wall, 137 and 138: wall, 140: upper lid, 142: concave, 144: concave, 146: concave, 148: mark, 151 and 152: projecting, 153 154: Projecting portion, 155 and 156: Groove, 157 and 158: Projecting portion, 200: Cantilever wet processing unit, 210: Container, 214: Through hole, 220: Plug, 300: Cantilever wet processing unit, 310: Container Reference numeral 312: space; 314: through hole; 316: fluid introduction groove; 318: fluid discharge groove;

Claims (11)

A cantilever wet processing container used for processing of cantilevers with a cantilever fluid used in a scanning probe microscope,
A storage space for storing a cantilever chip,
A guide portion for regulating the movement of the cantilever chip housed in the housing space,
An escape portion for preventing contact of the cantilever of the cantilever tip,
A cantilever wet processing container having a plurality of flow passages communicating between the storage space and the external space, the container being capable of moving fluid between the storage space and the external space. 2. The cantilever wet processing container according to claim 1, wherein the cantilever tip has a substantially circular appearance when viewed along a normal line on the cantilever surface of the cantilever chip accommodated therein. A cantilever wet processing container that regulates the movement of the cantilever tip so that is positioned approximately at the center of the substantially circular shape. 2. The container for cantilever wet processing according to claim 1, comprising two parts joined by fitting. A unit for wet processing of a cantilever used in a cantilever chip used in a scanning probe microscope for processing with a cantilever fluid,
A cantilever wet processing container according to claim 1,
A cantilever wet processing unit comprising a cantilever wet processing container and a container having a space capable of accommodating a fluid. 5. The unit for wet treatment of a cantilever according to claim 4, wherein the container has a through hole for discharging a fluid, and further includes a stopper for appropriately closing the through hole of the container. The cantilever wet processing unit according to claim 4, wherein the container has a plurality of spaces capable of accommodating the cantilever wet processing container and the fluid, and the plurality of spaces are arranged at regular intervals. A cantilever wet treatment method for treating a cantilever of a cantilever chip with a fluid using the container for wet treatment of a cantilever according to claim 1, wherein the cantilever chip has a chip substrate and a cantilever extending from the chip substrate. And
A fluid contacting step in which the cantilever chip and the fluid are brought into contact from the opposite side of the cantilever, and finally the entire cantilever is brought into contact with the fluid,
A contact releasing step of releasing contact between the cantilever chip and the fluid from the opposite side of the cantilever, the wet processing method of the cantilever. The method for wet-treating a cantilever according to claim 7, wherein the fluid contacting step is performed by bringing the cantilever wet-treating container closer to a fluid. The method for wet-treating cantilevers according to claim 7, wherein the contact releasing step is performed by removing the container for wet-processing cantilevers from a fluid. 8. The cantilever wet treatment method according to claim 7, wherein the fluid contacting step is performed by supplying a fluid to a container containing the cantilever wet treatment container. The method according to claim 7, wherein the contact releasing step is performed by discharging a fluid from the container.

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