JP2004344792A - Honeycomb rotor type gas adsorption concentration apparatus - Google Patents

Honeycomb rotor type gas adsorption concentration apparatus Download PDF

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Publication number
JP2004344792A
JP2004344792A JP2003145415A JP2003145415A JP2004344792A JP 2004344792 A JP2004344792 A JP 2004344792A JP 2003145415 A JP2003145415 A JP 2003145415A JP 2003145415 A JP2003145415 A JP 2003145415A JP 2004344792 A JP2004344792 A JP 2004344792A
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JP
Japan
Prior art keywords
gas adsorption
honeycomb rotor
heat
rotor
elastic portion
Prior art date
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Pending
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JP2003145415A
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Japanese (ja)
Inventor
Hiroshi Okano
浩志 岡野
Kenichiro Yamada
健一郎 山田
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Seibu Giken Co Ltd
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Seibu Giken Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Priority to JP2003145415A priority Critical patent/JP2004344792A/en
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Pending legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a honeycomb rotor type gas adsorption concentration apparatus with a simple and economical structure. <P>SOLUTION: The gas adsorption concentration apparatus comprises a gas adsorption rotor 9 and seal members 10, 11 brought into contact with both end faces of the gas adsorption rotor 9 and three zones; an adsorption zone 6, a purge zone 7, and a desorption zone 8; are formed in each seal member. Each of the seal members 10, 11 is provided with an elastic part 2 having elasticity and tightly attached to the end face of the gas adsorption rotor 9 and a heat resistant part 5 having higher heat resistance than that of the elastic part 2 and the desorption zone 8 is surrounded with the heat resistant part 5 and the outside of them is surrounded with the elastic part 2. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【0001】
【発明の属する技術分野】
本発明は、たとえばゼオライトや活性炭などの有機ガスの吸着剤を用いた有害ガスなどの吸着濃縮に用いられるハニカムロータ式ガス吸着濃縮装置に関するものである。
【0002】
【従来の技術】
ハニカムロータ式ガス吸着濃縮装置は多量の有機ガスを安価な装置で濃縮できるため、近年の環境保全意識の高まりもあって、急速に普及しつつある。このようなハニカムロータ式ガス吸着濃縮装置は吸着ゾーンと脱着ゾーンとを分離するシール部材を設けなければならず、このシール部材は耐磨耗性を有し、シール効果を維持するために弾性を有する必要があり、さらに耐熱性も要求される。
【0003】
このためハニカムロータ式ガス吸着濃縮装置のシール材としてシリコンゴムなどが用いられて来た。しかしながら、ハニカムロータ式ガス吸着濃縮装置の普及とともに、処理すべき有機ガスの種類も増加し、中には極めて重合し易い有機ガスや沸点が100℃を越える有機ガスもある。
【0004】
このような有機ガスをハニカムロータに吸着した場合、場合によっては200〜300℃程度の高温の空気で脱着を行わないとハニカムロータから脱着できないということがある。
【0005】
このため例えば特許文献1に開示されたように、ハニカムロータ式ガス吸着濃縮装置の吸着ゾーンと脱着ゾーンとを分離するシール部材として上記のような高い温度に耐えるグラファイトなどの材料を用いたものが開発された。
【0006】
つまり、このような耐熱性の高い材料は一般に弾性に乏しく、気密効果を発揮させるのが困難であるが、特許文献1に開示した技術ではシール部材をハニカムロータに弾圧することによって、その問題点を解決している。
【0007】
この装置によって脱着ゾーンに送られる脱着空気の温度を200℃程度まで上げることができ、殆どの有機ガスの重合物や高沸点の有機物の脱着を行うことが可能になった。
【0008】
【特許文献1】
特開2001−276551号公報
【0009】
【発明が解決しようとする課題】
以上のように上記特許文献1に開示された技術によって耐熱性の高い材料をシール部材として使用可能になったのであるが、シール部材をスプリングでハニカムロータの端面に弾圧するための手段が複雑になり、小型の装置には適しないという問題がある。
【0010】
本発明は構造が簡単で安価なハニカムロータ式ガス吸着濃縮装置を提供しようとするものである。
【0011】
【課題を解決するための手段】
本件発明は以上のような課題を解決するため、シール部材として弾性部と耐熱部とを組み合わせ、脱着ゾーンを耐熱部で囲み、その外側を弾性部で囲むことによって高温の脱着空気が直接弾性部に当たらないようにした。
【0012】
【発明の実施の形態】
本発明の請求項1に記載の発明は、ガス吸着ロータと、前記ガス吸着ロータの両端面に接しガス吸着ロータを少なくとも吸着ゾーンと脱着ゾーンの2つのゾーンを形成するシール部材とを有し、前記シール部材は弾性を有し前記ガス吸着ロータの端面に密着する弾性部と、弾性部より耐熱性の高く弾性部より低い耐熱部とを有するとともに耐熱部によって脱着ゾーンを囲み、その外側を弾性部で囲むようにしたものであり、耐熱部によって高温の脱着空気が弾性部と触れるのを防止し、弾性部によって完全にゾーン間の気密を図るという作用を有する。
【0013】
【実施例】
以下本発明のハニカムロータ式ガス吸着濃縮装置の実施例について図に沿って詳細に説明する。図1はシール部材の斜視図、図2は同A−A‘断面図、図3はシール部材とハニカムロータとが組み合わされた状態を示す断面図である。
【0014】
1はシール基板であり、例えば5mmの厚さの鉄板である。このシール基板1の上に弾性部2が接着されている。弾性部2はシリコンスポンジ3とガラスクロス入りのフッ素樹脂シート4との積層物である。
【0015】
5は耐熱部であり、集成マイカ板より構成されている。ここで集成マイカとは天然鉱物のマイカの鱗片を積層し、シリコンなどのバインダーで固めて板状にしたものである。集成マイカ以外には天然あるいは人工グラファイト又は蝋石を使うこともできる。
【0016】
図1に示すようにシール部材は被処理空気の通る処理ゾーン6、パージ空気の通るパージゾーン7、脱着空気の通る脱着ゾーン8とが設けられている。そしてパージゾーン7と脱着ゾーン8は耐熱部5に形成されている。
【0017】
さらに弾性部2の厚さつまりシリコンスポンジ3とフッ素樹脂シート4とを合わせた厚さh1は耐熱部5の厚さh2よりも厚く形成されている。このため、図3に示すようにハニカムロータ9の両端をシール部材10,11で挟んだ場合、弾性部2は少し圧縮され耐熱部5はハニカムロータ9の端部と軽く接するかあるいは近接した状態となる。
【0018】
ここでハニカムロータ9はセラミックシートなどをハニカム状に形成し、そのセラミックシートに疎水性ゼオライト等の有機ガス吸着剤を担持させたり、活性炭シートをハニカム状に形成させたりしたものである。
【0019】
このようにハニカムロータ9の両端をシール部材10,11で挟んだ状態で図4に示すようにシール部材10,11にチャンバー12,13を取り付け、ハニカムロータ9をギヤドモータ(図示せず)によって数分間に1回程度の回転数で回転させながら、処理ゾーン6に有機ガスを含む被処理ガスを流す。またパージゾーン7にパージ空気を流し、脱着ゾーン8に高温の脱着空気を流す。
【0020】
これによって処理ゾーン6に流される被処理ガスに含まれる有機ガスはハニカムロータ9に吸着され、吸着された有機ガスは脱着ゾーン8で高温の空気によって脱着される。そして処理ゾーン6に流すガスの量と脱着ゾーン8に流す空気の量との比に相当する比率で被処理ガスは濃縮される。
【0021】
このようにして本発明のハニカムロータ式ガス吸着濃縮装置は動作するのであるが、脱着ゾーン8に着目して説明する。図3のように高温の脱着空気がシール部材10の下から送られる。
【0022】
この高温の脱着空気は耐熱部5と接触する。耐熱部5とハニカムロータ9の端面との間に隙間がある場合高温の空気はその隙間を通過するが、弾性部2がハニカムロータ9の端面と密着しているために高温の空気が通り抜けることはない。つまり耐熱部5とハニカムロータ9との間に隙間があっても、弾性部2の部分に高温の空気が通り抜けることはなく、弾性部2の温度は脱着空気より低く保たれる。このために脱着空気として弾性部2の耐熱温度より高い温度の空気を使うことができる。
【0023】
弾性部2の最上部にフッ素樹脂シート4を貼り付けているため、弾性部2とハニカムロータ9との間の摩擦が小さい。一方、耐熱部は鉱物を使うと硬くてもろいためハニカムロータ9との間の摩擦によって次第に磨耗してくるが、ある程度磨耗するとハニカムロータ9と弾性部2が主に接触するようになり、耐熱部5の接触圧が低下するため磨耗は減少してくる。
【0024】
また初期磨耗によって生じたフッ素樹脂シート4の微粉末がハニカムロータ9の回転によって耐熱部5の上面に運ばれ、集成マイカの鱗片の間に入り、耐熱部5の摩擦を減少させる。耐熱部がグラファイトの場合にも表面に微小なクラックなどが存在する場合には、そのクラックにフッ素樹脂シート4の微粉末が入り摩擦係数を減少させる。
【0025】
さらにハニカムロータ9の端面の平面度が高くなく、例えば僅かに円錐状になっていたとすると、シール部材10,11のシール効果が低くなり、ハニカムロータ9の端面からガスが漏れる可能性があるが、本案では耐熱部5がハニカムロータ9の端面に沿って磨耗し、弾性部2が弾性によってそれに追従することによって、ハニカムロータ9の端面とシール部材10,11との密着性が向上する。
【0026】
また上記の実施例では、弾性部2の高さを耐熱部5の高さより高くする例を示したが、これに限らず弾性部2の高さと耐熱部5の高さを同一にすることもできる。この場合は弾性部2の磨耗量より耐熱部5の磨耗量が多いと、弾性部2がハニカムロータ9の端面と密着するようになる。
【0027】
【発明の効果】
本発明のハニカムロータ式ガス吸着濃縮装置は上記の如くシール部材を弾性部と耐熱部で構成したので、耐熱部をハニカムロータに摺動弾圧させるような手段が必要でなく、簡単な構造とすることができ、安価に提供できるものである。
【0028】
また耐熱部とハニカムロータ端部との間に隙間があっても弾性部とハニカムロータ端部とが密着しているために、耐熱部とハニカムロータ端部との間の隙間をガスが通り抜けることがなく、弾性部に高温の空気が触れることがない。
【0029】
さらに本発明のハニカムロータ式ガス吸着濃縮装置は弾性部をシリコンスポンジとし、耐熱部を集成マイカとすることによって、どちらも容易に入手可能な材料であり量産が容易である。
【0030】
そして弾性部の最上部にフッ素樹脂層を設けているため、フッ素樹脂層の磨耗によってハニカムロータと弾性部との密着性が高くなり、シール効果を高くすることができる。しかもフッ素樹脂層の磨耗粉がハニカムロータの回転に伴って耐熱部に移動するため、耐熱部の摩擦係数が低くなる。
【図面の簡単な説明】
【図1】本発明のハニカムロータ式ガス吸着濃縮装置の実施例1を示す斜視図である。
【図2】図1のA−A‘断面図である。
【図3】本発明のハニカムロータ式ガス吸着濃縮装置の実施例1を示す断面図である。
【図4】本発明のハニカムロータ式ガス吸着濃縮装置の実施例1を示す斜視図である。
【符号の説明】
1 シール基板
2 弾性部
4 フッ素樹脂シート
5 耐熱部
6 処理ゾーン
7 パージゾーン
8 脱着ゾーン
9 ハニカムロータ
10,11 シール部材
12,13 チャンバー
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a honeycomb rotor type gas adsorption / concentration apparatus used for adsorption / concentration of harmful gas or the like using an organic gas adsorbent such as zeolite or activated carbon.
[0002]
[Prior art]
Since the honeycomb rotor type gas adsorption / concentration apparatus can concentrate a large amount of organic gas with an inexpensive apparatus, the apparatus is rapidly becoming popular due to an increase in environmental conservation consciousness in recent years. Such a honeycomb rotor type gas adsorption / concentration apparatus must be provided with a seal member for separating the adsorption zone and the desorption zone, and this seal member has abrasion resistance and has elasticity in order to maintain the sealing effect. And heat resistance is also required.
[0003]
For this reason, silicon rubber or the like has been used as a sealing material for a honeycomb rotor type gas adsorption / concentration apparatus. However, with the spread of the honeycomb rotor type gas adsorption / concentration apparatus, the types of organic gases to be treated have also increased, and some of them are very easily polymerized and those having a boiling point exceeding 100 ° C.
[0004]
When such an organic gas is adsorbed on the honeycomb rotor, it may not be possible to desorb the organic gas from the honeycomb rotor without desorption with high-temperature air of about 200 to 300 ° C in some cases.
[0005]
For this reason, for example, as disclosed in Patent Document 1, as a sealing member for separating an adsorption zone and a desorption zone of a honeycomb rotor type gas adsorption / concentration device, a material using graphite or the like that withstands the above high temperature is used. It has been developed.
[0006]
In other words, such a material having high heat resistance generally has poor elasticity, and it is difficult to exhibit an airtight effect. However, the technique disclosed in Patent Document 1 has a problem in that the seal member is elastically pressed against the honeycomb rotor. Has been resolved.
[0007]
With this apparatus, the temperature of the desorption air sent to the desorption zone can be raised to about 200 ° C., and it has become possible to desorb most organic polymerized polymers and high-boiling organic substances.
[0008]
[Patent Document 1]
JP 2001-276551 A
[Problems to be solved by the invention]
As described above, the technology disclosed in Patent Document 1 enables a material having high heat resistance to be used as a seal member. However, means for resiliently pressing the seal member against the end face of the honeycomb rotor with a spring is complicated. Therefore, there is a problem that it is not suitable for a small device.
[0010]
SUMMARY OF THE INVENTION An object of the present invention is to provide a honeycomb rotor type gas adsorption / concentration apparatus which is simple and inexpensive.
[0011]
[Means for Solving the Problems]
In order to solve the above problems, the present invention combines an elastic portion and a heat-resistant portion as a seal member, surrounds the desorption zone with a heat-resistant portion, and surrounds the outside of the desorption zone with the elastic portion, so that high-temperature desorption air is directly applied to the elastic portion. Was not hit.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
The invention according to claim 1 of the present invention has a gas adsorption rotor, and a seal member that is in contact with both end faces of the gas adsorption rotor and forms at least two zones of the gas adsorption rotor and an adsorption zone and a desorption zone, The seal member has elasticity and has an elastic portion that is in close contact with the end surface of the gas adsorption rotor, a heat-resistant portion that has higher heat resistance than the elastic portion and lower than the elastic portion, surrounds the desorption zone with the heat-resistant portion, and has an elastic outside. The heat-resistant portion prevents high-temperature desorbed air from contacting the elastic portion, and the elastic portion has a function of completely airtight between zones.
[0013]
【Example】
Hereinafter, an embodiment of a honeycomb rotor type gas adsorption / concentration apparatus of the present invention will be described in detail with reference to the drawings. FIG. 1 is a perspective view of the seal member, FIG. 2 is a cross-sectional view along the line AA ′, and FIG. 3 is a cross-sectional view showing a state where the seal member and the honeycomb rotor are combined.
[0014]
Reference numeral 1 denotes a seal substrate, which is, for example, an iron plate having a thickness of 5 mm. An elastic part 2 is adhered on the seal substrate 1. The elastic part 2 is a laminate of a silicon sponge 3 and a fluororesin sheet 4 containing a glass cloth.
[0015]
Reference numeral 5 denotes a heat-resistant portion, which is composed of a mica plate. Here, the aggregated mica is obtained by laminating scales of mica, a natural mineral, and solidifying them with a binder such as silicon to form a plate. Besides natural mica, natural or artificial graphite or rubble can also be used.
[0016]
As shown in FIG. 1, the seal member is provided with a processing zone 6 through which air to be processed passes, a purge zone 7 through which purge air passes, and a desorption zone 8 through which desorption air passes. The purge zone 7 and the desorption zone 8 are formed in the heat-resistant part 5.
[0017]
Further, the thickness of the elastic portion 2, that is, the thickness h1 of the combination of the silicon sponge 3 and the fluororesin sheet 4 is formed larger than the thickness h2 of the heat-resistant portion 5. Therefore, when the both ends of the honeycomb rotor 9 are sandwiched between the sealing members 10 and 11 as shown in FIG. 3, the elastic portion 2 is slightly compressed, and the heat-resistant portion 5 is in light contact with or close to the end of the honeycomb rotor 9. It becomes.
[0018]
Here, the honeycomb rotor 9 is formed by forming a ceramic sheet or the like into a honeycomb shape, carrying an organic gas adsorbent such as hydrophobic zeolite on the ceramic sheet, or forming an activated carbon sheet into a honeycomb shape.
[0019]
As shown in FIG. 4, the chambers 12 and 13 are attached to the seal members 10 and 11 with both ends of the honeycomb rotor 9 sandwiched between the seal members 10 and 11, and the honeycomb rotor 9 is numbered by a geared motor (not shown). A gas to be processed containing an organic gas is flowed into the processing zone 6 while rotating at a rotation speed of about once per minute. In addition, purge air is supplied to the purge zone 7, and high-temperature desorption air is supplied to the desorption zone 8.
[0020]
As a result, the organic gas contained in the gas to be processed flowing into the processing zone 6 is adsorbed by the honeycomb rotor 9, and the adsorbed organic gas is desorbed in the desorption zone 8 by high-temperature air. Then, the gas to be treated is concentrated at a ratio corresponding to the ratio of the amount of gas flowing into the processing zone 6 and the amount of air flowing into the desorption zone 8.
[0021]
The operation of the honeycomb rotor type gas adsorption / concentration apparatus of the present invention in this manner will be described focusing on the desorption zone 8. As shown in FIG. 3, high-temperature desorption air is sent from below the seal member 10.
[0022]
This high-temperature desorbed air comes into contact with the heat-resistant portion 5. When there is a gap between the heat-resistant portion 5 and the end face of the honeycomb rotor 9, high-temperature air passes through the gap, but the high-temperature air passes through because the elastic portion 2 is in close contact with the end face of the honeycomb rotor 9. There is no. That is, even if there is a gap between the heat-resistant portion 5 and the honeycomb rotor 9, high-temperature air does not pass through the elastic portion 2 and the temperature of the elastic portion 2 is kept lower than the desorbed air. For this reason, air having a temperature higher than the heat resistant temperature of the elastic portion 2 can be used as the desorbed air.
[0023]
Since the fluororesin sheet 4 is attached to the uppermost part of the elastic part 2, the friction between the elastic part 2 and the honeycomb rotor 9 is small. On the other hand, since the heat-resistant portion is hard and brittle when using minerals, it gradually wears due to friction between the honeycomb rotor 9 and the heat-resistant portion. As the contact pressure of No. 5 decreases, wear decreases.
[0024]
Further, the fine powder of the fluororesin sheet 4 generated by the initial abrasion is carried to the upper surface of the heat-resistant portion 5 by the rotation of the honeycomb rotor 9 and enters between the scales of the mica aggregate, thereby reducing the friction of the heat-resistant portion 5. Even if the heat-resistant portion is graphite, if fine cracks or the like are present on the surface, the fine powder of the fluororesin sheet 4 enters the cracks and reduces the friction coefficient.
[0025]
Furthermore, if the flatness of the end face of the honeycomb rotor 9 is not high, for example, if it is slightly conical, the sealing effect of the sealing members 10 and 11 is reduced, and gas may leak from the end face of the honeycomb rotor 9. According to the present invention, the heat-resistant portion 5 is worn along the end face of the honeycomb rotor 9 and the elastic portion 2 follows the wear by elasticity, so that the adhesion between the end face of the honeycomb rotor 9 and the seal members 10 and 11 is improved.
[0026]
Further, in the above-described embodiment, an example in which the height of the elastic portion 2 is higher than the height of the heat-resistant portion 5 has been described. However, the height is not limited to this, and the height of the elastic portion 2 and the height of the heat-resistant portion 5 may be the same. it can. In this case, if the wear amount of the heat resistant portion 5 is larger than the wear amount of the elastic portion 2, the elastic portion 2 comes into close contact with the end face of the honeycomb rotor 9.
[0027]
【The invention's effect】
Since the honeycomb rotor gas adsorption / concentration device of the present invention has the sealing member composed of the elastic portion and the heat-resistant portion as described above, there is no need to provide a means for slidingly pressing the heat-resistant portion to the honeycomb rotor, and has a simple structure. It can be provided at low cost.
[0028]
Also, even if there is a gap between the heat-resistant portion and the honeycomb rotor end portion, the gas passes through the gap between the heat-resistant portion and the honeycomb rotor end portion because the elastic portion and the honeycomb rotor end portion are in close contact. And no hot air touches the elastic part.
[0029]
Further, in the honeycomb rotor type gas adsorption / concentration apparatus of the present invention, since the elastic part is made of silicon sponge and the heat resistant part is made of mica, both are easily available materials and mass production is easy.
[0030]
Since the fluororesin layer is provided on the uppermost portion of the elastic portion, the adhesion between the honeycomb rotor and the elastic portion is increased due to the wear of the fluororesin layer, and the sealing effect can be enhanced. In addition, since the abrasion powder of the fluororesin layer moves to the heat-resistant portion as the honeycomb rotor rotates, the friction coefficient of the heat-resistant portion decreases.
[Brief description of the drawings]
FIG. 1 is a perspective view showing Embodiment 1 of a honeycomb rotor type gas adsorption / concentration apparatus of the present invention.
FIG. 2 is a sectional view taken along line AA ′ of FIG.
FIG. 3 is a sectional view showing Embodiment 1 of a honeycomb rotor type gas adsorption / concentration apparatus of the present invention.
FIG. 4 is a perspective view showing Embodiment 1 of a honeycomb rotor type gas adsorption / concentration device of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Seal board 2 Elastic part 4 Fluororesin sheet 5 Heat resistant part 6 Processing zone 7 Purge zone 8 Desorption zone 9 Honeycomb rotors 10, 11 Seal members 12, 13 Chamber

Claims (4)

ガス吸着ロータと、前記ガス吸着ロータの両端面に接しガス吸着ロータを少なくとも吸着ゾーンと脱着ゾーンの2つのゾーンを形成するシール部材とを有し、前記シール部材は弾性を有し前記ガス吸着ロータの端面に密着する弾性部と、弾性部より耐熱性の高い耐熱部とを有するとともに耐熱部によって脱着ゾーンを囲み、その外側を弾性部で囲むようにしたハニカムロータ式ガス吸着濃縮装置。A gas adsorption rotor, and a seal member in contact with both end surfaces of the gas adsorption rotor and forming at least two zones of the gas adsorption rotor, an adsorption zone and a desorption zone, wherein the seal member has elasticity and the gas adsorption rotor A honeycomb rotor-type gas adsorption / concentration device having an elastic portion that is in close contact with an end surface of the honeycomb rotor, a heat-resistant portion having higher heat resistance than the elastic portion, a desorption zone surrounded by the heat-resistant portion, and the outside thereof is surrounded by the elastic portion. 弾性部はシリコンスポンジで構成され、耐熱部は天然あるいは人工の無機物を含む材料で構成された請求項1記載のハニカムロータ式ガス吸着濃縮装置。The honeycomb rotor type gas adsorption / concentration apparatus according to claim 1, wherein the elastic portion is formed of a silicone sponge, and the heat-resistant portion is formed of a material containing a natural or artificial inorganic substance. 弾性部には最上面にフッ素樹脂層が設けられている請求項1記載のハニカムロータ式ガス吸着濃縮装置。The honeycomb rotor type gas adsorption / concentration apparatus according to claim 1, wherein a fluorine resin layer is provided on an uppermost surface of the elastic portion. 弾性部の高さが耐熱部の高さより高い請求項1記載のハニカムロータ式ガス吸着濃縮装置。The honeycomb rotor type gas adsorption / concentration apparatus according to claim 1, wherein the height of the elastic portion is higher than the height of the heat resistant portion.
JP2003145415A 2003-05-22 2003-05-22 Honeycomb rotor type gas adsorption concentration apparatus Pending JP2004344792A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120100763A (en) * 2011-03-03 2012-09-12 가부시키가이샤 세이부 기켄 Gas adsorption concentration device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20120100763A (en) * 2011-03-03 2012-09-12 가부시키가이샤 세이부 기켄 Gas adsorption concentration device
KR101643264B1 (en) 2011-03-03 2016-07-27 가부시키가이샤 세이부 기켄 Gas adsorption concentration device

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