JP2004317224A - Sensor for detecting deposit, deposit detector using it and water treatment method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To simply and precisely identify the deposit on the piping of a water system. <P>SOLUTION: This deposit detector is equipped with an infrared transmission member having a metal film, which permits the deposition of a sample, on a part of the surface thereof. The infrared transmission member has a deposit detecting sensor having a light incident surface for receiving infrared rays and an emitting surface for emitting infrared rays reflected from the sample. Infrared interference waves are entered on the sensor and the emitted light from the sensor is subjected to Fourier transform to detect an infrared absorbing spectrum. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an attached matter detection sensor and an attached matter detection device using the same, and is mainly used for detecting an attached substance in an industrial water system and an industrial wastewater system.
[0002]
[Prior art]
Water resources are indispensable resources for our lives, and their uses are divided into tap water, industrial water and agricultural water. With the progress of science and technology, depending on the field of use of these waters, the form of use has become complicated and higher quality has been required.
In order to secure this high-quality water, various types of physical and chemical treatments are carried out based on the results of grasping the contamination status of the water.
[0003]
In industrial fields of industrial water, for example, in various factories such as steelmaking, petrochemicals, and papermaking that use a large amount of water as manufacturing process water or cooling water, the concentration or circulation of the water as much as possible for water saving is achieved by concentrating or circulating the water. We are trying to use it effectively.
[0004]
However, in the above-mentioned production process water system and cooling water system, adhesion failure due to slime caused by inorganic substances such as calcium, organic substances such as fats and oils, or microorganisms such as bacteria has frequently occurred. Here, the slime is a viscous massive muddy substance, and when this slime is generated in a heat exchanger or a pipe of a factory, it adheres to the pipe wall surface to increase the fluid resistance and decrease the cooling efficiency, and sometimes reduce the cooling efficiency. Block the piping.
[0005]
Further, when slime is generated during the manufacturing process of a paper and pulp mill, slime separated from the manufacturing equipment and the pipe wall is mixed into the stock, cutting the paper in the paper making and winding process and interrupting the operation. Furthermore, the contaminated slime forms spots on the paper, deteriorating the quality of the product.
[0006]
In the cooling water system, the water quality deteriorates due to concentration and circulation, and the occurrence of troubles caused by water is spurred. These obstacles include a reduction in the service life of equipment, blockage and breakage of equipment and piping, energy loss due to a decrease in thermal efficiency, an increase in maintenance costs, and the like.
Therefore, conventionally, various water treatment chemicals have been added to prevent such contaminants from adhering to the piping.
[0007]
Then, in order to confirm which kind of water treatment chemical exerts its effect sufficiently, check of management status such as water quality analysis, chemical concentration analysis and viable cell count, test coupon or electrochemical method ( Monitoring has been performed such as a check of the corrosion state by a polarization resistance method, an AC impedance method, etc.), a bypass test for knowing the scale attachment state of heat exchange, and a check of the slime state by a slime board or the like.
[0008]
However, checking the management status, such as water quality analysis, is an indirect method, and is only a guide for determining whether or not actual obstacles are prevented. The installation of the test coupon and the slime board and the bypass test are direct methods, but the monitoring period is as long as about 7 to 30 days.
[0009]
Therefore, as a countermeasure, a transparent plate immersed and disposed in an aqueous system, a light emitting unit disposed on one side of the transparent plate, a light receiving unit disposed on the other side, and light received through the transparent plate. A detector equipped with a means for measuring the amount of light in the water system is installed in the water tank in the water system, and the amount of substances in the water pipe is estimated from the amount of substances adhering to the transparent plate, and a slime inhibitor is added to the water system. A known method is known (for example, see Patent Document 1).
[0010]
[Patent Document 1]
JP-A-9-236546
[Problems to be solved by the invention]
However, the conventional techniques as described above have the following problems.
(1) When a suspended substance is present in the target system water (for example, when the pulp fiber concentration is high in the water system of the papermaking process), the suspended substance impedes the transmission of light, and the absorption of light by the attached matter or by the suspended substance. It is impossible to determine whether light is absorbed, and measurement becomes impossible. Therefore, in such a system, before measuring the light transmittance, it is necessary to switch the measurement site to fresh water flow and then measure the light transmittance, or to filter the test water to remove suspended substances. And does not faithfully reflect the actual pollution situation.
(2) Further, when the target system water is colored (for example, a cooling water system heat exchanger), the measurement is impossible because the light does not pass through, and the contamination state cannot be grasped.
(3) The details of the deposit composition cannot be specified.
(4) The measurement site needs to be a transparent member, and since the material of the member is different from the material of the piping in the system, the deposit on the member does not always match the deposit in the system.
(5) It is difficult to detect slime at an early (early) stage.
[0012]
The present invention has been made in view of such circumstances, and focuses on the fact that the type of deposits differs depending on the material of the water-based piping member, and provides a sensor having a metal film corresponding to the material of the water-based piping member. For detecting a substance adhering to a metal film by immersing it in a part in an initial stage in a short period of time and thereby appropriately performing water treatment, a substance detection device using the sensor, and a water treatment method using the sensor Is provided.
[0013]
[Means for Solving the Problems]
The invention includes an infrared light transmitting member having a metal film for attaching a sample on a part of the surface, the infrared light transmitting member including a light receiving surface that receives infrared light, and a red light that is received and reflected on the sample. An object detection sensor having an emission surface for emitting external light is provided. Note that a so-called IRE (Internal Reflection Element) is used for the infrared light transmitting member.
[0014]
Further, the present invention provides an attached substance detection apparatus comprising: the above-described sensor; and an analysis apparatus that detects an infrared absorption spectrum by Fourier-transforming the intensity of light emitted from the sensor by inputting an infrared light interference wave to the sensor. Is provided.
[0015]
Further, the present invention provides the above-described sensor, a measurement chamber for accommodating the sensor, and an analyzer for inputting an infrared interference wave to the sensor and performing a Fourier transform on light emitted from the sensor to detect an infrared absorption spectrum. The measurement chamber includes a water inlet for introducing water, a drain for draining, and a cleaning device for cleaning the sensor, so that the sensor can come into contact with the introduced water. The present invention provides an attached substance detection device provided.
According to the present invention, there is provided a water treatment method using the above-mentioned attached matter detection device, wherein at least one of selection of the type of the water treatment chemical and adjustment of the addition amount is performed based on the detection result of the attached matter detection device. Is provided.
[0016]
Further, from another viewpoint, the present invention provides an infrared light transmitting member having an adhering surface for adhering a sample, a light receiving surface for receiving infrared light, and an emission surface for receiving and emitting infrared light reflected on the sample. Is attached to the attached substance in the target water system, an infrared interference wave is incident from the light receiving surface, and the emission light from the emission surface is Fourier-transformed to detect the infrared absorption spectrum. A method for detecting a deposit in a target water system, thereby performing at least one of selection of a type of a water treatment chemical and adjustment of an addition amount based on the detection result. It is.
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
The metal film in the sensor of the present invention is a film in which infrared light can be transmitted by a film obtained by vapor-depositing a metal material that is the same as or equivalent to the material of an aqueous facility or pipe to be processed on the surface of the infrared light transmitting member, Or a metal mesh adhered to the surface of the infrared light transmitting member, or a thin metal plate having a large number of openings and slits, such as stainless steel, copper, brass, chromium, chromium alloy, nickel copper alloy, titanium , Titanium alloys and the like.
[0018]
The infrared light transmitting member in the sensor according to the present invention is, for example, an elongated flat plate or an elongated columnar member applicable to the ATR method as described later. In such a case, a metal film is formed on the circumferential surface.
[0019]
The thickness of the metal vapor-deposited film varies depending on the material, but is usually preferably 10 nm to 5000 nm. Various conventionally known methods can be used for metal deposition. It should be noted that a film in which the components are changed is usually formed in the vapor deposition of the alloy. However, by performing so-called flash vapor deposition in which the vapor deposition material is evaporated in a short time, a film having almost no change in the components of the alloy can be produced.
[0020]
In the sensor of the present invention, a so-called ATR (Attenuated Total Reflectance) method can be suitably used as a method for identifying a sample by reflecting infrared light to the sample.
[0021]
Hereinafter, the ATR method will be described.
When infrared light is incident at an incident angle θ from an interface between a substance 1 having a refractive index n1 and a substance 2 having a refractive index n2 (n1> n2), if the incident angle θ is larger than the critical angle θc, the incident light is At 100% reflection, that is, total reflection.
[0022]
However, when viewed microscopically, infrared light seeps into the substance 2 by about that wavelength. This seeping light is called an evanescent wave (E wave), and it is known that the wave number dependence of the absorption that occurs when the E wave passes through the sample surface layer can be detected as an absorption spectrum.
[0023]
FIG. 1 is an explanatory view showing the ATR method, in which a sample 2 adheres to both surfaces of an elongated plate-shaped infrared light transmitting member 1, and infrared light IR incident on one end surface (light emitting surface) of the member 1. Multiple total reflection is performed at the interface between the sample 2 and the member 1. Then, absorption can be obtained by measuring infrared light IR emitted from the other end surface (light receiving surface) of the member 2.
Therefore, the sample 2 can be identified by irradiating the infrared light interference wave to the infrared light transmitting member 1 and performing Fourier transform on the light emitted from the infrared light interference wave and detecting the infrared absorption spectrum. In FIG. 1, the infrared light IR is multiply reflected, but may be reflected at least once.
[0024]
As a material of the infrared light transmitting member can include _{AgCl, AgBr, ZnS, ZnSe,} BaF 2, CaF 2, CdTe, Si, Ge, SiO 2, sapphire, AMTIR, KRS-5, diamond and the like.
[0025]
Further, in the present invention, since the metal film is interposed between the infrared light transmitting member and the sample, both the absorption spectrum of the metal film and the absorption spectrum of the sample are obtained as an infrared absorption spectrum. However, since the metal film is known, an absorption spectrum of only the sample can be obtained by subtracting the subtraction.
[0026]
An adhering matter detection device comprising a sensor of the present invention and an analyzer for inputting an infrared light interference wave to the sensor and Fourier-transforming the light emitted from the sensor to detect an infrared spectrum. The analyzer may be connected by an optical fiber and housed in a portable housing.
As a result, the sensor can be immersed in any open part of the target water system, and the attached matter can be identified very easily.
An example of the sensor cleaning device of the present invention is an ultrasonic generator.
[0027]
Further, in the water treatment method according to the present invention, as a method of bringing the attached matter detection sensor into contact with the attached matter attached to the target water system, a method of directly contacting the sensor with the attached matter attached to facilities or pipes in the water system, There is a method in which a test piece made of a metal material of the same quality as the facilities and pipes in the water system is set in the water system for a certain period of time to cause the adhered substance to adhere, and then the test piece is brought into contact with the adhered substance detection sensor.
[0028]
Embodiments The present invention will be described below in detail based on embodiments shown in the drawings. This does not limit the present invention.
Example 1
FIG. 2 is an external perspective view of the attached matter detection device according to the first embodiment. This device includes an attached matter detection sensor 11 and an analyzer 12, and the attached matter detection sensor 11 is connected to the analyzer 12 by an optical fiber cable 13. Have been. The analyzer 12 is housed in a housing 14 that can be held, and a display unit 15 composed of an LCD and an input unit 16 composed of a keyboard are provided on the surface of the housing 14.
[0029]
3 is a front view of the sensor 11, and FIG. 4 is a sectional view taken along the line AA of FIG. As shown in these drawings, the sensor 11 includes a sensor housing 17, and the sensor housing 17 has a window 18 that passes through a central portion in a horizontal direction. An elongated plate-shaped infrared light transmitting member 19 is provided so as to cross the window 18 in the vertical direction, and both ends of the infrared light transmitting member are fixed to the sensor housing 17 by seal members 20 and 21 in a watertight manner.
[0030]
A light projecting unit 22 and a light receiving unit 23 are mounted on both end surfaces (light projecting surface and light receiving surface) of the infrared light transmitting member 19, and a light projecting optical fiber 24 and a light receiving optical fiber 25 are connected to each. I have. The fibers 24 and 25 are bundled by a bushing 26 fixed to the upper surface of the sensor housing 17 and connected to the analyzer 12 (FIG. 2) by the optical fiber cable 13.
[0031]
FIG. 5 is a sectional view of a main part of the infrared light transmitting member 19. As shown in the figure, the infrared light transmitting member 19 is provided with a metal vapor-deposited film 27 formed of a material corresponding to the metal material of the target water-based piping on both surfaces.
[0032]
In this embodiment, a fused quartz (SiO ₂ ) having a length of 50 mm, a width of 10 mm, and a thick plate of 2 mm is used as the infrared light transmitting member 19, and a stainless steel (SUS304) film having a thickness of 10 nm is used as the metal deposition film 27. Is formed. Therefore, on the surface of the metal deposition film 27, the same deposit (sample) 28 as that which adheres to the inner wall of the pipe is deposited as described later.
[0033]
FIG. 6 is an explanatory diagram illustrating a configuration of an optical system of the attached matter detection device according to the first embodiment. As shown in the figure, in this optical system, the infrared light IRa emitted from the infrared light source 29 enters the interferometer 31 via the concave mirror 30. The interferometer 31 includes a beam splitter 32, an interferometer scanning mirror 33, and interferometer plane mirrors 34 and 35, and converts incident infrared light IRa into an interference wave (interferogram) IRb.
[0034]
The interference wave IRb is projected to the attached matter detection sensor 11 via the concave mirror 36 and the light projecting optical fiber 24, and after being multiply reflected in the infrared light transmitting member 19, the light receiving optical fiber 25 and the concave mirror 37 are separated. The light is received by the detector 38 via the light source.
[0035]
FIG. 7 is a block diagram showing a control system of the attached matter detection device. As shown in the figure, the control system includes an information processing unit 39 including a CPU, a ROM, and a RAM. The information processing section 39 receives information from the input section 16 and the detector 38, performs information processing, and outputs the information to the display section 15 and the drive circuit section 40. The drive circuit unit 40 includes a driver (drive circuit) for driving the drive unit of the interferometer 31.
[0036]
The information processing section 39 includes an analysis section 41, a storage section 42, and a control section 43. The analysis unit 41 receives the output of the detector 38, performs a Fourier transform, creates an infrared absorption spectrum, identifies a component of the attached matter from the infrared absorption spectrum, and determines a corresponding appropriate water treatment chemical. Then, the infrared absorption spectrum, the attached substance component, and the name of the water treatment chemical are displayed on the display unit 15.
[0037]
The storage unit 42 temporarily stores various measurement conditions set from the input unit 16 and analysis results obtained by the analysis unit 41, and also stores known infrared absorption spectrum data of various metal deposition films and processing of the information processing unit. A program or the like is stored in advance. The control unit 43 controls the drive circuit unit 40 according to the processing program.
[0038]
The usage and operation of the first embodiment having such a configuration will be described below.
First, the user inserts the attached matter detection sensor 11 shown in FIG. 2 into the water of a desired open part of the target water system. In this embodiment, it is assumed that the material of the target water-based piping is stainless steel (SUS304). When the materials are different, the sensor 11 having the metal deposited film 27 formed of the different materials may be used.
[0039]
Therefore, the user inputs and sets the material name “stainless steel (SUS304)” of the metal deposition film 27 from the input unit 16 and then inputs “start measurement”. In the underwater sensor 11, water enters from both sides of the window 18 (FIG. 4) and contacts both surfaces of the infrared light transmitting member 19.
[0040]
Then, after a predetermined time (for example, 5 minutes) elapses and a required amount of the deposit 28 is deposited on the metal deposition film 27 of the infrared light transmitting member 19 as shown in FIG. The external light source 29 is turned on, and the interference wave IRb generated by the interferometer 31 is input to the attached matter detection sensor 11.
[0041]
The input interference wave IRb is multiple-reflected by the deposit 28 attached to the infrared light transmitting member 19 via the metal deposition film 27, and is emitted from the sensor 11. The emitted interference wave IRb is detected by the detector 38, and Fourier-transformed by the analysis unit 41 in the information processing unit 39 to create an infrared absorption spectrum.
[0042]
Since the material name of the metal deposition film is input from the input unit 16, a known spectrum corresponding to the material name is read from the storage unit 42. The known spectrum of the metal deposition film is subtracted from the spectrum created by the analyzer 41, and the spectrum of only the deposit 28 is displayed on the display 15.
[0043]
At the same time, the analyzing unit 41 specifies the components of the deposit and the corresponding water treatment chemical name from the spectrum of the deposit and displays them on the display unit 15. As described above, the attached matter can be identified in a short time by a simple operation using the apparatus of the first embodiment.
[0044]
FIG. 10 is a front view showing a metal film 27a to be used in place of the metal deposition film 27.
10A shows a metal mesh plate, FIG. 10B shows a metal plate having a plurality of slits in a direction orthogonal to the longitudinal direction of the infrared light transmitting member 19, and FIG. 5 shows a metal plate having a plurality of slits extending in a longitudinal direction of the infrared light transmitting member 19.
[0045]
These metal films 27 a are adhered to the surface of the infrared light transmitting member 19 instead of the metal deposition film 27. In this case, the deposit 28 is deposited on both the metal film 27a and the surface of the infrared light transmitting member 19 as shown in FIG. Therefore, the thickness of the metal film (metal plate) 27a is preferably 0.5 mm or less in order to smoothly adhere the attached matter 28 to the surface of the infrared light transmitting member 19.
[0046]
Next, FIGS. 12 and 13 are a cross-sectional view and a bottom view showing a sensor 11a as a modification of the attached matter detection sensor 11 (FIGS. 3 and 4). As shown in these figures, the sensor 11a includes a sensor housing 17a, and the sensor housing 17a has a window 18a on the bottom surface.
[0047]
An elongated plate-like infrared light transmitting member 19a is fitted into the window 18a, and the infrared light transmitting member 19a is watertightly fixed to the bottom surface of the sensor housing 17a by four screws 55 via a sealing member 20a. Other configurations are the same as those of the sensor 11 described above. However, in this modification, the metal vapor deposition film 27 is not formed on the surface of the infrared light transmitting member 19a. Therefore, its usage is different from that of the sensor 11.
[0048]
That is, the user brings the sensor 11a into direct contact with the attached matter on equipment, piping, or the like in the industrial water system or the industrial wastewater system. Alternatively, a test piece made of a metal material of the same material as the equipment or piping in the industrial water system or the industrial drainage system is set in the target water system for a certain period of time to allow the adhered substance to adhere, and then the test piece is used as the sensor 11a. Contact. Thereby, the attached matter (sample 28) is directly attached to the surface (one side) of the infrared transmitting member 19a as shown in FIG.
[0049]
Therefore, the user inputs “start measurement” from the input unit 16 (FIGS. 2 and 7).
The information processing section 39 turns on the infrared light source 29 and inputs the interference wave IRb generated by the interferometer 31 to the attached matter detection sensor 11a.
[0050]
The input interference wave IRb is multiple-reflected by the attached matter 28 attached to the infrared light transmitting member 19a, and is emitted from the sensor 11a. The emitted interference wave IRb is detected by the detector 38, Fourier-transformed by the analysis unit 41 in the information processing unit 39 to create an infrared absorption spectrum, and displayed on the display unit 15. At the same time, the analyzing unit 41 specifies the components of the deposit and the corresponding water treatment chemical name from the spectrum of the deposit and displays them on the display unit 15.
[0051]
Example 2
FIG. 8 is an explanatory diagram of a configuration of the attached matter detection device according to the second embodiment.
As shown in the figure, the attached matter detection device 52 is of an installation type, and includes a measurement chamber 53, an attached matter detection sensor 11 (FIGS. 3 and 4) housed therein, and an ultrasonic generator 44 for cleaning. And The measurement chamber 53 includes a sample water inlet 45, a fresh water inlet 46, and a discharge port 47 at the bottom.
[0052]
The sample water inlet 45 is connected to a target water channel 51 via a pump 48, the fresh water inlet 46 is connected to a fresh water source (not shown) via a valve 49, and the drain 47 is connected to the water channel 51 via a valve 50. It is connected.
The optical system of the second embodiment is equivalent to the optical system shown in FIG.
[0053]
FIG. 9 is a block diagram illustrating a control system according to the second embodiment, in which the drive circuit unit 40 of the control system illustrated in FIG. 7 is replaced with a drive circuit unit 40a. The drive circuit unit 40a includes a driver for driving the ultrasonic generator 44, the pump 48, and the valves 49 and 50, in addition to a driver for driving the drive unit of the interferometer 31. Other configurations are the same as those shown in FIG.
[0054]
The method of use and operation of the second embodiment having such a configuration will be described below.
First, the user inputs the material name of the metal deposition film 27 (FIG. 5) of the sensor 11 from the input unit 16 in FIG. However, in this case, it is assumed that the target aqueous piping material and the material of the metal deposition film 27 match.
[0055]
Next, "start measurement" is input. As a result, the valve 49 is opened for a predetermined time, and the measuring water 53 is filled with fresh water as cleaning water. Next, the ultrasonic generator 44 is driven for a predetermined time, whereby a cleaning step of cleaning the surface of the metal deposition film 27 of the sensor 11 is performed.
[0056]
Next, the valve 50 is opened, and the cleaning water is discharged. Next, when the pump 48 is driven and a predetermined amount of water (sample water) is introduced from the water channel 51 and stored in the measurement chamber 43, the valve 50 is opened. As a result, the water in the measurement chamber 53 circulates between the water channel 51 and the measurement chamber 53 while always storing a predetermined amount of water.
[0057]
Then, after a lapse of a predetermined time, for example, 5 minutes, the pump 48 stops and the valve 50 closes. During this circulation period, as shown in FIG. 5, a required amount of the deposit 28 is deposited on the metal deposition film 27 of the infrared light transmitting member 19.
[0058]
Then, the information processing section 39 turns on the infrared light source 29 and inputs the interference wave IRb generated by the interferometer 31 to the attached matter detection sensor 11. The input interference wave IRb is multiple-reflected by the deposit 28 attached to the infrared light transmitting member 19 via the metal deposition film 27, and is emitted from the sensor 11. The emitted interference wave IRb is detected by the detector 38, and Fourier-transformed by the analysis unit 41 in the information processing unit 39 to create an infrared absorption spectrum.
[0059]
The known spectrum of the metal deposition film is subtracted from the created spectrum, and the spectrum of only the deposit 28 is displayed on the display unit 15. At the same time, the analyzing unit 41 specifies the components of the deposit and the corresponding water treatment chemical name from the spectrum of the deposit and displays them on the display unit 15. As described above, the attached matter can be identified in a short time by a simple operation using the apparatus of the second embodiment.
[0060]
When the identification of the deposit is completed, the valve 50 is opened, and the water stored in the measurement chamber 53 is discharged to the water channel 51. Thereafter, the above-described cleaning step may be performed in preparation for the next identification operation.
[0061]
【The invention's effect】
According to the present invention, a metal film of the same material as that of the water-based pipe is formed on the surface of the infrared light transmitting member, and a substance attached to the film is detected by infrared spectroscopy. Since different kinds of deposits can be accurately detected in a short time, the identification of the deposits in the early (initial) state and the tendency of the deposits can be clarified, and accordingly, an appropriate treatment can be performed before a trouble due to the deposits occurs.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram of an ATR method according to the present invention.
FIG. 2 is an external perspective view of the first embodiment according to the present invention.
FIG. 3 is a front view of the sensor according to the present invention.
FIG. 4 is a sectional view taken along the line AA of FIG. 3;
FIG. 5 is a sectional view of a main part of the infrared transmitting member according to the present invention.
FIG. 6 is an explanatory diagram of a configuration of an optical system according to a first embodiment of the present invention.
FIG. 7 is a block diagram of a control system according to the first embodiment of the present invention.
FIG. 8 is an explanatory diagram of a configuration of a second embodiment according to the present invention.
FIG. 9 is a block diagram illustrating a control system according to a second embodiment of the present invention.
FIG. 10 is an explanatory view showing a modified example of the metal film of the present invention.
FIG. 11 is a sectional view showing a modification of the metal film of the present invention.
FIG. 12 is a sectional view showing a modified example of the sensor of the present invention.
FIG. 13 is a bottom view showing a modified example of the sensor of the present invention.
FIG. 14 is a cross-sectional view showing a state of attachment of an attached matter in a modified example of the sensor of the present invention.
[Explanation of symbols]
REFERENCE SIGNS LIST 1 infrared light transmitting member 2 sample 11 sensor for detecting adhering matter 11a sensor for detecting adhering matter 12 analyzer 13 optical fiber cable 14 housing 15 display unit 16 input unit 17 sensor housing 17a sensor housing 18 window 18a window 19 infrared light transmitting member 19a Infrared light transmitting member 20 Sealing member 20a Sealing member 21 Sealing member 22 Light emitting part 23 Light receiving part 24 Light emitting optical fiber 25 Light receiving optical fiber 26 Bushing 27 Metal vapor deposition film 27a Metal film 28 Attachment 29 Infrared light source 30 Concave mirror 31 Interferometer 32 Beam splitter 33 Interferometer scanning mirror 34 Interferometer plane mirror 35 Interferometer plane mirror 36 Concave mirror 37 Concave mirror 38 Detector 39 Information processing unit 40 Drive circuit unit 40a Drive circuit unit 41 Analysis unit 42 Deposit detection unit 43 Measurement room 44 Ultra Sound wave generator 45 Sample water inlet 4 Shimizu inlet 47 water outlet 48 pump 49 valve 50 valve 51 waterways 52 foreign substance detecting device 53 measuring chamber 55 bis IR infrared IRa infrared IRb interference

Claims (5)

An infrared light transmitting member having a metal film for attaching the sample on a part of the surface is provided. The infrared light transmitting member receives the infrared light and emits the infrared light reflected by the sample when received. An attachment detection sensor having an emission surface for causing the attachment to be detected. An adhering substance detection apparatus comprising: the sensor according to claim 1; and an analyzer that detects an infrared absorption spectrum by Fourier-transforming an infrared light interference wave to the sensor and emitting light from the sensor. The sensor according to claim 1, a measurement chamber for accommodating the sensor, and an analyzer for detecting an infrared absorption spectrum by Fourier-transforming the light emitted from the sensor by inputting an infrared light interference wave to the sensor, The measurement chamber includes a water inlet for introducing water, a drain for draining water, and a cleaning device for cleaning the sensor, and is provided so as to be able to contact the water into which the sensor has been introduced. Deposit detection device. Water treatment using the deposit detection device according to claim 2 or 3, based on the detection result of the deposit detection device, at least one of selection of the type of water treatment chemical and adjustment of the addition amount. Method. An attached matter detection sensor comprising an infrared light transmitting member having an attachment surface for attaching a sample, a light receiving surface for receiving infrared light, and an emission surface for receiving and emitting infrared light reflected on the sample is provided in the target water system. The infrared light interference wave is incident on the light receiving surface from the light receiving surface, and the light emitted from the light emitting surface is subjected to Fourier transform to detect the infrared absorption spectrum, thereby detecting the foreign material in the target water system. A water treatment method characterized by performing at least one of selection of a type of water treatment chemical and adjustment of the amount of addition based on the detection result.

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