JP2004306098A - Method of producing hard-soft layered material and method of producing part obtained by using the hard soft layered material - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of producing a hard-soft layered material obtained by layering a hard layer and a soft layer, and to provide a method of producing parts obtained by using the hard-soft layered material. <P>SOLUTION: In the method of producing the hard-soft layered material 20 obtained by layering a hard layer 23 and a soft layer 24 evaluated in indexes such as Vickers hardness, at least one face to be joined in the hard-soft layered material 20, each of the faces to be joined being subjected to activation treatment, are abutted and superimposed, and are layered and joined to produce the hard-soft layered material 20. Further, parts such as a suspension applied to a disk head or the like are produced by using the hard-soft layered material 20. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for manufacturing a hard / soft laminated material formed by laminating a hard layer and a soft layer, and a method for manufacturing a component using the hard / soft laminated material.
[0002]
[Prior art]
In recent years, the density of hard disk drives and the speed of data transfer have been rapidly increasing. Along with this, components used in hard disk devices, especially magnetic heads, have been remarkably reduced in size and access speed has been remarkably increased. For this reason, it is required that the suspension constituting the magnetic head section be sophisticated. As a conventional technique, a method is disclosed in which a metal thin film is formed on a metal plate, or a metal thin film is formed and a metal foil is laminated (for example, see Patent Document 1). Further, a method of joining metal plates without applying excessive heat or pressure is disclosed (for example, see Patent Document 2).
[0003]
Prior art document information on the present application includes the following.
[Patent Document 1]
JP 2002-127298 A [Patent Document 2]
JP-A-1-224184
[Problems to be solved by the invention]
An object of the present invention is to provide a method for manufacturing a hard / soft laminated material formed by laminating a hard layer and a soft layer, and a method for manufacturing a component using the hard / soft laminated material.
[0005]
[Means for Solving the Problems]
As a first solution to the above problem, a method for manufacturing a hard / soft laminated material of the present invention is a method for manufacturing a hard / soft laminated material obtained by laminating a hard layer and a soft layer, wherein at least one bonding surface of the hard / soft laminated material is The respective surfaces to be joined are activated and brought into contact with each other, and then stacked and joined. Alternatively, a method in which a structure in which both sides of a soft layer are sandwiched between hard layers is provided in at least a part of a hard / soft laminated material.
[0006]
As a second solution to the above-mentioned problem, a method for manufacturing a component according to the present invention employs a method using a hard / soft laminated material obtained by laminating a hard layer and a soft layer.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the production method of the present invention will be described. FIG. 1 is a schematic cross-sectional view showing one embodiment of a hard / soft laminated material using the manufacturing method of the present invention, and shows an example in which a hard layer 23 and a soft layer 24 are stacked. FIG. 2 is a schematic cross-sectional view showing another embodiment of the hard / soft laminated material using the manufacturing method of the present invention, and shows an example of a structure in which both sides of a soft layer 24 are sandwiched between hard layers 23.
[0008]
The material of the hard layer 23 is not particularly limited as long as it is harder than the soft layer, and can be appropriately selected depending on the use of the hard / soft laminated material. For example, a metal that is solid at room temperature, an alloy containing at least one of these metals, and a laminate having at least one layer of these metals and alloys are harder than the soft layer. If the application of the hard / soft laminated material is a disk head application component such as a suspension, the hard layer 23 may be a stainless steel layer such as SUS304 or SUS316 specified by JIS.
[0009]
The thickness of the hard layer 23 is not particularly limited as long as a hard / soft laminated material can be manufactured, and can be appropriately selected and used depending on the use of the hard / soft laminated material. For example, the thickness is preferably 5 to 500 μm. If it is less than 5 μm, it becomes difficult to maintain sufficient mechanical strength, and if it exceeds 500 μm, it becomes difficult to produce a hard / soft laminated material. More preferably, it is 10 to 50 μm. The hard layer 23 may be a plate material such as an electrolytic foil or a rolled foil, may be a plate material in which a film material is previously laminated by plating or vapor deposition, or may be a laminate such as a clad material. Alternatively, the laminate may be subjected to a diffusion process or the like.
[0010]
The material of the soft layer 24 is not particularly limited as long as it is a material from which a hard / soft laminated material can be manufactured and is softer than the hard layer, and can be appropriately selected and used depending on the use of the hard / soft laminated material. For example, a metal that is solid at room temperature, an alloy containing at least one of these metals, and a laminate having at least one layer of these metals and alloys are softer than the hard layer. Aluminum or an aluminum alloy can be used as the soft layer. As the aluminum alloy, 1000 series, 3000 series, etc. specified in JIS can be applied. If the application of the hard / soft laminated material is a disk head application component such as a suspension, the soft layer 24 may be an aluminum alloy such as 1050 aluminum specified in JIS as an aluminum layer.
[0011]
The thickness of the soft layer 24 is not particularly limited as long as a hard / soft laminated material can be manufactured, and can be appropriately selected and used depending on the use of the hard / soft laminated material. The soft layer 24 preferably has a thickness of, for example, 5 to 500 μm. If it is less than 5 μm, it becomes difficult to produce a plate material, and if it exceeds 500 μm, it becomes too heavy. More preferably, it is 50 to 300 μm. Note that the soft layer 24 may be a plate material such as an electrolytic foil or a rolled foil, a layer material in which a film material such as plating or vapor deposition is previously laminated on the plate material, or a laminate such as a clad material. Alternatively, the laminate may be subjected to a diffusion process or the like.
[0012]
The hard layer is harder than the soft layer, and the soft layer is softer than the hard layer. Hardness or softness can be determined by an index appropriately selected from indexes such as Vickers hardness, Brinell hardness, Shore hardness, and Rockwell hardness depending on the use of the hard / soft laminated material. The hard layer is made of a material harder than the soft layer in Vickers hardness. A desirable range of hardness of the hard layer is Hv 150 to 600, and more preferably Hv 200 to 300. The desirable range of the hardness of the soft layer is Hv10 to 149, and more desirably Hv30 to 80. For example, the combination of the hard layer is SUS304 and the soft layer is 1050 aluminum. Depending on the application of the hard / soft laminated material, a material sandwiching the soft layer can be expected to have an effect of absorbing and attenuating mechanical vibrations and the like. Furthermore, since a lightweight material can be selected for the soft layer, the hard / soft laminated material can reduce the specific gravity and reduce the moment of inertia as compared with a single material having only the hard layer.
[0013]
Examples of the metal that is solid at room temperature include Al, Mg, Fe, Ni, Co, Cu, Zn, Pb, Ti, Nb, W, Ag, Pt, and Au. The alloy containing at least one of these metals can also include, for example, alloys specified in JIS. In addition to alloy steel and stainless steel, Cu-based alloys include oxygen-free copper, tough pitch copper, 1000 series, 2000 series, 3000 series, 5000 series, 6000 series for Al alloys such as phosphorous deoxidized copper, copper bronze, brass, free-cutting brass, tin brass, Admiralty brass, Naval brass, aluminum bronze, and bronze And 7000 series nickel alloys, such as nickel-carbon, low-carbon nickel, nickel-copper alloy, nickel-copper-aluminum-titanium alloy, nickel-molybdenum alloy, nickel-molybdenum-chromium alloy, nickel-chromium-iron- There are a molybdenum-copper alloy, a nickel-chromium-molybdenum-iron alloy, and the like. The laminate having at least one layer of these metals and alloys is, for example, a clad material, a plating material, a deposited film material, and the like, and may also include an alloy layer of an intermetallic compound or the like.
[0014]
A method of manufacturing the hard / soft laminated material 20 shown in FIG. 1 using the activation joining method will be described. As shown in FIG. 3, in the vacuum chamber 52, an activation treatment device 70 activates the surface to be joined of the hard layer 23 installed on the rewind reel 62. Similarly, the activation treatment device 80 activates the bonding surface side of the soft layer 24 installed on the rewind reel 64.
[0015]
The activation process is performed as follows. That is, the hard layer 23 and the soft layer 24 loaded in the vacuum chamber 52 are each brought into contact with one of the electrodes A grounded, and 10-1 × 10 ^{− A} glow discharge is performed by applying an alternating current of 1 to 50 MHz in an extremely low-pressure inert gas atmosphere of ³ Pa, and the hard layer 23 and the soft layer in contact with the electrode A exposed in the plasma generated by the glow discharge The sputter-etching process is performed so that the area of each of the 24 to be joined is effectively １ ／ or less of the area of the electrode B. As the inert gas, argon, neon, xenon, krypton, or the like or a mixture containing these can be used. Preferably it is argon. If the inert gas pressure is less than 1 × 10 ⁻³ Pa, stable glow discharge is difficult to perform, and high-speed etching is difficult. If the inert gas pressure exceeds 10 Pa, the activation treatment efficiency decreases. If the applied alternating current is less than 1 MHz, it is difficult to maintain a stable glow discharge, and it is difficult to perform continuous etching. If the applied alternating current exceeds 50 MHz, oscillation tends to occur and the power supply system becomes complicated, which is not preferable. Further, in order to perform the etching efficiently, it is necessary to make each area of the hard layer 23 and the soft layer 24 in contact with the electrode A smaller than the area of the electrode B effectively. Etching can be performed with sufficient efficiency.
[0016]
After that, the activated hard layer 23 and soft layer 24 are laminated and joined. The lamination bonding is achieved by abutting the hard layer 23 and the soft layer 24 such that the surfaces to be bonded face each other, and performing cold pressure welding by the overlap pressure welding unit 60. At this time, the lamination bonding can be performed at a low temperature, and it is possible to reduce or eliminate adverse effects such as a structural change and formation of an alloy layer in the hard layer 23, the soft layer 24, and the bonding portion. When T is the temperature (° C.) of the hard layer 23 and the soft layer 24, a good pressure contact state is obtained at 0 ° C. <T <300 ° C. A temperature of 0 ° C. or lower requires a special cooling device, and a temperature of 300 ° C. or higher is not preferable because adverse effects such as structural changes occur. Further, the rolling reduction R (%) is preferably 0.01% ≦ R ≦ 30%. If it is less than 0.01%, sufficient bonding strength cannot be obtained, and if it exceeds 30%, deformation becomes large, which is not preferable in terms of processing. More preferably, 0.1% ≦ R ≦ 3%. More preferably, 1% <R ≦ 3%.
[0017]
By laminating and joining in this manner, the hard / soft laminated material 20 having a two-layer structure having a required layer thickness can be formed, and is taken up by the take-up roll 66. Further, if necessary, the hard and soft laminated material 20 as shown in FIG. 1 can be manufactured by cutting out to a predetermined size. The hard / soft laminated material 20 manufactured as described above may be subjected to a heat treatment within a range that does not cause a problem for removing or reducing residual stress, if necessary, or a film material such as solder plating may be laminated. May be.
[0018]
The three-layer hard / soft laminated material 22 shown in FIG. 2 can be manufactured by using the hard / soft laminated material 20 instead of the soft layer 24 in the above description. In addition to the three layers of the hard / soft laminated material, a configuration of a soft layer 24 -a hard layer 23 -a soft layer 24 is also possible. Further, a multilayered soft / soft laminated material can be manufactured by using one or both of the hard layer 23 and / or the soft layer 24 as the hard / soft laminated material in the above description.
[0019]
Batch processing can be used for the production of the hard / soft laminated material. That is, a state in which a plurality of hard layers and soft layers cut into a predetermined size in advance in a vacuum chamber are loaded, conveyed to an activation treatment device, and surfaces to be processed at an appropriate position such as vertical or horizontal are opposed or juxtaposed. If the device that holds and holds the hard layer and soft layer also serves as a pressure contact device, it is placed or held after the activation process and then pressed into contact with the hard layer and soft layer. When the device for holding the layer does not double as the press-contact device, it is achieved by carrying the press-contact device such as a press device to perform press-contact. The activation treatment is preferably performed between the hard layer and the soft layer as one electrode A which is insulated and supported, and between the other electrode B which is grounded.
[0020]
The method for manufacturing a part according to the present invention is a method using a hard / soft laminated material obtained by laminating a hard layer and a soft layer, and a part using the manufacturing method according to the present invention is used for etching or pressing on a hard / soft laminated material. It is made of polymer, metal, alloy, etc. using a processed material, a material obtained by removing a part of the hard / soft laminated material, a material covered or fixed with a resin, etc., or a hard / soft laminated material using an adhesive or the like. Such materials include those laminated on a base material or a substrate.
[0021]
In the hard / soft laminated material or component using the manufacturing method of the present invention, since it is possible to suppress the formation of an undesired layer such as an alloy layer at the joint, machining workability such as bending and pressing, and etching work In this case, there is no problem of lowering the etching property. For this reason, the hard and soft laminated materials and parts of the present invention are useful for disk head parts such as suspensions. Compared to a suspension consisting of a stainless steel layer alone, a suspension consisting of a stainless steel layer and an aluminum layer can reduce the weight and reduce the moment of inertia, so it has excellent disk head positioning performance and shortens seek time. Is effective. In particular, when the stainless steel layer is set to 40% or less of the conventional one, those effects are remarkable. It is also an advantage that the outer layer is made of a stainless steel layer so that the conventionally used disk head welding technique can be used.
[0022]
【Example】
Hereinafter, embodiments will be described with reference to the drawings. Using a 50 μm-thick rolled SUS304 foil as the hard layer 23 and a 200 μm-thick aluminum foil as the soft layer 24, they are set in the hard-soft laminate manufacturing apparatus 50. An activation treatment was performed by a sputter etching method, and a hard and soft laminated material 20 was manufactured by press-contacting and laminating and joining in a rolling unit 60. Another 50 μm thick SUS304 rolled foil was further laminated and joined to the soft surface side of the hard / soft laminated material 20 to produce a hard / soft laminated material 22. Next, parts were manufactured by press working.
[0023]
【The invention's effect】
As described above, the method of manufacturing a hard / soft laminated material of the present invention is a method of laminating a hard layer and a soft layer, and the method of manufacturing a component of the present invention is a method of using a hard / soft laminated material. For this reason, it is suitable for disk head parts and the like.
[Brief description of the drawings]
FIG. 1 is a schematic cross-sectional view showing one embodiment of a hard / soft laminated material using a manufacturing method of the present invention.
FIG. 2 is a schematic cross-sectional view showing another embodiment of the hard / soft laminated material using the manufacturing method of the present invention.
FIG. 3 is a schematic cross-sectional view showing one embodiment of an apparatus used for the manufacturing method of the present invention.
[Explanation of symbols]
Reference Signs List 20 hard / soft laminated material 22 hard / soft laminated material 23 hard layer 24 soft layer 50 hard / soft laminated material manufacturing device 52 vacuum tank 54 vacuum pump 60 pressure contact unit 62 rewind reel 64 rewind reel 66 take-up roll 70 activation processing device 72 electrode roll 74 Electrode 80 Activation device 82 Electrode roll 84 Electrode A Electrode A
B electrode B

Claims (3)

In a method of manufacturing a hard / soft laminated material obtained by laminating a hard layer and a soft layer, at least one joining surface of the hard / soft laminated material is activated by treating each surface to be joined, and is brought into contact with each other. A method for producing a hard / soft laminated material, comprising: The method for producing a hard / soft laminated material according to claim 1, wherein a structure in which both sides of the soft layer are sandwiched by hard layers is provided in at least a part of the hard / soft laminated material. A method for manufacturing a component, comprising using a hard / soft laminated material obtained by laminating a hard layer and a soft layer.

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