JP2004265580A - Magnetic head and magnetic disk device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic head which is used for a magnetic disk device to record and reproduce information to and from a recording medium and floats lower with respect to the recording medium. <P>SOLUTION: A thin-film element 35a is formed at the air outflow end of a core slider 32 and a protective film 36 is formed on the thin-film element 35a. It is constituted so that a magnetoresistive element 84 is formed on the thin-film element 35a and a notched part 43a of a notched shape of a stepped surface is formed at the protective film 36 toward the air outflow end from the vicinity of the thin-film element 35 on the floating surface. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

  The present invention relates to a magnetic head used in a magnetic disk drive that records and reproduces information on a recording medium.

  In recent years, recording media have been increasing in density with the miniaturization and large capacity of magnetic disk devices, and low flying height of magnetic heads has been required. There is a limit to reducing Therefore, it is necessary to provide a structure that reduces the contact of the magnetic head with the recording medium.

  FIG. 20 shows a configuration diagram of a conventional magnetic head. In FIG. 20A, the magnetic head 11 has two rail surfaces 13a and 13b formed in the air flow direction on a floating surface of the core slider 12 which floats on a magnetic disk as a recording medium, and floats on the air inflow side. Are formed.

  A thin-film element 15 for recording / reproducing is formed on the end face of the rail surface 13a on the air outflow side. In the thin-film element 15, as shown in FIG. 20B, an insulating film (alumina) 16 is formed on the end surface of the core slider 12 (rail surface 13a), and a magnetic film 17 is formed on the insulating film 16. An insulating film 18 is formed on the magnetic film 17, and a coil 19 is formed in the insulating film 18 in a wound shape. Then, the magnetic film 20 is formed on the insulating film 18. Recording and reproduction are performed in the gap 22 formed by the magnetic films 17 and 20. Further, a protective film (insulating film) 21 is formed on the magnetic film 20 in the thin film element 15.

  On the other hand, the rail surfaces 13a and 13b are subjected to a chamfering process (lapping process) as shown by a broken line in FIG. The width and height of the chamfer are each about 0 to 10 μm. In this case, assuming that the distance from the end face of the core slider 12 to the end of the protective film 21 is L, L ≧ 0.025 mm is set, and the distance from the magnetic film 20 to the end of the protective film 21 (the film of the protective film) Assuming that S is (thickness), S is set to 0.015 to 0.02 mm.

Such a magnetic head 11 takes in an air flow generated by a rotating magnetic disk and floats on the magnetic disk. In this case, the rail surfaces 13a and 13b (including the tapered surfaces 14a and 14b) and the thin surface such as DLC (diamond-like carbon) are formed on the surface of the magnetic disk so that damage is reduced even if the magnetic head 11 comes into contact with the magnetic disk. Burrs are removed by forming a film and chamfering the rail surfaces 13a and 13b.
JP-A-4-366408

  Here, FIG. 21 is an explanatory diagram of thermal expansion of a protective film in a conventional magnetic head. In FIG. 21, when the magnetic head 11 is operated (recorded), the temperature of the thin-film element 15 rises because current flows through the coil 19, and the thin-film element 15 rises due to thermal expansion like an end 21 ′ of the protective film 21. For example, when the protective film 21 is formed of alumina, the amount of protrusion per 10 ° C. rise is 6 nm.

  For this reason, the minimum flying height of the magnetic head 11 above the magnetic disk depends on the height of the protective film 21 and the spacing, and the contact is likely to occur frequently. In addition, there is a problem that it is difficult to reduce the flying height because the disk is damaged.

  The chamfering of the rail surfaces 13a and 13b of the core slider 12 is performed after cutting the wafer on which the thin film element 15 is formed and forming the rail surfaces 13a and 13b. Processing the thin film element 15 by processing pressure or the like causes a problem that variations such as deterioration of electromagnetic conversion characteristics increase.

  SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and a first object is to provide a magnetic head for lowering the flying height of a recording medium, and a second object is to make elements uniform.

  In order to solve the above problem, a thin film element portion for recording and reproducing information is formed at an air outflow end of a slider that floats on a recording medium, and a protective film is formed on the thin film element portion. Wherein the thin film element portion has a magnetoresistive effect element, and the protective film has a notch formed in the air outflow direction from near the thin film element portion on the flying surface of the slider. Configuration.

  According to a second aspect of the present invention, the cutout portion is formed in a stepped, tapered, or curved cutout shape near the air outflow end side of the thin film element portion.

  A head support for mounting the magnetic head according to claim 1 or 2, wherein the magnetic head is mounted on the recording medium to perform recording and reproduction of information, an arm to which the head support is attached, and the arm And a drive unit for moving the disk drive on the recording medium to form a magnetic disk drive.

  As described above, in the first and second aspects of the present invention, the notch is formed in the protective film on the flying surface of the slider. As a result, the portion of the protective film that rises above the air bearing surface due to a rise in temperature is reduced, so that it is possible to lower the flying height of the magnetic head with respect to the recording medium.

  According to a third aspect of the present invention, the above-described magnetic head is mounted on a magnetic disk drive. As a result, head contact of the magnetic head with the recording medium is reduced, and low flying height can be achieved.

  As described above, according to the present invention, since the notch is formed in the protective film on the floating surface of the slider, even if the protective film protrudes in the direction of the floating surface due to a temperature rise, a portion protruding above the floating surface is formed. As a result, the flying height of the magnetic head with respect to the recording medium can be reduced.

  FIG. 1 shows a configuration diagram of a magnetic head according to a first embodiment of the present invention. In FIG. 1A, a magnetic head 31 has two rail surfaces 33a and 33b formed in the airflow direction on a floating surface of a core slider 32 which floats on a magnetic disk as a recording medium. , 33b are formed with tapered surfaces 34a, 34b for guiding the levitation to the air inflow side.

  A thin film element 35 and a protective film 36 for performing recording / reproduction are formed on the respective end faces on the air outflow side of the rail surfaces 33a and 33b. As shown in FIG. 1B, in the thin film element 35, an insulating film 37 is formed on an end surface of the core slider 32 (rail surfaces 33a, 33b), and a magnetic film 38 serving as a magnetic pole is formed on the insulating film 37. . An insulating film 39 is formed on the magnetic film 38, and a coil 40 is formed in the insulating film 39 in a predetermined layer winding shape.

  Then, a magnetic film 41 serving as a magnetic pole is formed on the insulating film 39. Recording and reproduction are performed in the gap 42 formed by the magnetic films 38 and 41. Further, a protective film (insulating film) 36 is formed on the magnetic film 41 in the thin film element 35.

  The protective film 36 has a notch 43a in the form of a notch on the step surface in the air outflow direction from the vicinity of the thin film element 35 on the rail surfaces 33a and 33b. In this case, the distance S (FIG. 1B) from the magnetic film 41 to the end of the protective film 36 is formed, for example, less than 0.015 mm from a value as close to zero as possible.

  Further, as shown by the broken lines in FIG. 1A, the rail surfaces 33a and 33b are chamfered (lapping) for smoothing the air flow and reducing the generation of abrasion powder at the time of contact with the magnetic disk. Is applied.

  Although the thin film element 35 is formed on both end faces of the rail faces 33a and 33b, one of them is driven during normal use. This is because the positions of the thin film elements 35 of the magnetic head 31 are opposed to each other on both surfaces of the magnetic disk. One element may be provided at the center of the tip of the core slider.

  As shown in FIG. 1A, the dimensions of each part of the magnetic head in the first embodiment are as follows: a ≧ 0.03 μm, b = 0.045 mm, c = 25 μm, d = 40 μm, e = 2 mm, f = 1 0.6 mm, g = 0.385 mm, h = 0.954 mm, and i = 0.255 mm. In addition, it may be formed as 0.01 mm ≦ c ≦ 0.25 mm and L ≧ 0.02 mm.

  Here, chamfering in the protective film provided with the notch will be discussed.

  FIG. 2A is a simplified diagram schematically showing the positional relationship between the magnetic head and the recording medium according to the first embodiment of the present invention. FIG. 2B is an enlarged view of the outflow end of the magnetic head. In FIG. 1A, the dimension indicated by a is indicated by RE in FIG. 2A. The value of RE is desirably 0.03 μm or more.

  In FIG. 2A, FHT indicates the distance between the recording medium and the magnetic head, and FHL indicates the distance between the inflow end of the flat portion of the core slider and the recording medium. Further, SL represents the length of the rail surfaces 33a and 33b in the longitudinal direction excluding the tapered portion formed at the inflow end of the core slider, and AH represents the thickness of the protective film.

Referring to FIGS. 2A and 2B, x represents the distance between the tip of the protective film and the recording medium, and θ represents the inclination of the magnetic head. The values of x and θ are given by the following equations, respectively.
θ = sin ^-1 {(FHL-FHT) / SL}
x = REcos θ−AH sin θ + FHT
(EJ = REcosθ, Ej = AHsinθ)
If the value of RE is less than 0.03 μm, it is better to chamfer the tip of the protective film. In other words, it is preferable to form a taper at the tip of the protective film.

Now, assuming that a magnetic disk device having a magnetic head of RE = 0.02 μm, FHT = 0.1 μm, FHL = 0.35 μm, SL = 1.85 × 10 ³ μm, and AH = 45 μm is the device 1. The values of x and θ are as follows.
θ = sin ^-1 {(FHL-FHT) / SL}
= Sin ^-1 {(0.35-0.1) / (1.85 × 10 ³ )}
= 0.00774 [deg]
x = REcos θ−AH sin θ + FHT
= 0.02 cos θ-45 sin θ + 0.1
= 0.11392 [μm]
Further, assuming that a magnetic disk device having a magnetic head of RE = 0.01 μm, FHT = 0.07 μm, FHL = 0.245 μm, SL = 1.85 × 10 ³ μm, and AH = 45 μm is the device 2, The values of x and θ are as follows.
θ = sin ^-1 {(FHL-FHT) / SL}
= Sin ^-1 {(0.245-0.07) / (1.85 × 10 ³ )}
= 0.00542 [deg]
x = REcos θ−AH sin θ + FHT
= 0.01 cos θ-45 sin θ + 0.07
= 0.07574 [μm]
When a current is applied to the element in such an apparatus, the temperature of the coil rises, and accordingly, the protective film rises in a direction approaching the medium. FIG. 3 shows a change in the difference between x and FHT (hereinafter referred to as a recess amount) with an increase in temperature. A negative value of the recess amount indicates that the tip of the protective film is closer to the medium than the FHT gap. I have. FIG. 3 shows that the recess amount decreases by about 6 nm for every 10 ° C. temperature rise. When the temperature rises by 50 ° C., it can be seen that the tip of the protective film is closer to the medium by 25 nm than the FHT gap. From this, if the length of the GD in FIG. It turns out that it is gone.

  In order to suppress the protrusion of the protective film, a taper may be formed at the tip of the protective film. FIGS. 4A and 4B are simplified diagrams schematically showing the configuration of the magnetic head and the positional relationship between the head and the recording medium in a modification of the first embodiment of the present invention. Indicates a taper. A point D 'in FIG. 4B indicates the protruding end of the protective film. When DE is set to 1, four types of tapered cases where the AE is 0.8, 0.6, 0.4, and 0.2 are considered.

  In theory, the degree of swelling of the protective film is inversely proportional to the ratio of A'E to DE from the similarity between triangles A'FD and A'D'D. That is, the shorter A'E is, the less the swelling of the protective film is.

  FIG. 5 is a diagram showing the relationship between the length (A'E) of the non-tapered portion and the recess amount under each temperature condition. The figure shows that the recess amount decreases by about 6 nm with every 10 ° C. temperature rise. The shaded area in FIG. 5 is a range where the flying height of the protective film is larger than the flying height of the FHT gap.

  Assuming that the temperature rise of the element portion due to energization is up to 30 ° C., A′E may be set to 25 μm. The positional relationship from the air bearing surface at this time is as shown in FIG.

  Here, FIG. 7 is an explanatory view of a wafer process for forming a thin film element, and FIG. 8 is a partial explanatory view of the thin film element. 7 and 8, an insulating film 37 is formed as a base film on the surface of the wafer 44 having a thickness in the longitudinal direction of the core slider 32 by alumina sputtering (step (ST) 1). The lower magnetic film 38 is formed by plating of chromium or the like and etching (ST2).

  The magnetic film 38 is formed in accordance with the number of the thin film elements 35 formed on the wafer 44, and the gap 42 formed by the magnetic film 38 is regularly arranged. That is, the gap 42 is formed so as to be linearly arranged.

  Subsequently, a gap film 39a is formed on the magnetic film 38 by alumina sputtering and milling (ST3), and a lower insulating film 39b is formed on the gap film 39a by photo-etching of alumina (ST4). A coil film 40a is formed on the lower insulating film 39b by chromium sputtering and photoetching (ST5). When the coil 40 has two layers, ST4 and ST5 are performed to form the upper coil film 40b with the insulating film 39c interposed therebetween, and the upper insulating film 39d is formed on the upper coil film 40b by photo-etching of alumina (ST6). ).

  An upper insulating film 41 is formed on the upper insulating film 39d by plating of chromium or the like and etching (ST7). The upper magnetic film 41 and the lower insulating film 38 form a gap 42 in which a gap film 39a is formed.

  On the other hand, the thin films 35 are formed by forming bumps as lead extraction portions of the magnetic films 38 and 41 and the coil films 40a and 40b by chromium sputtering or the like. A protective film 36 is formed on the entire thin film element 35 by alumina sputtering (ST9).

  Then, the protection film 36 is etched (or a blade such as a grindstone) to form a notch 43a (a broken line portion in FIG. 8A) (ST10, FIG. 8B).

  FIG. 9 is an explanatory view of the magnetic head processing process and assembly assembly, and FIG. 10 is a partial view of a wafer on which thin-film elements are formed.

  9, the wafer 44 on which the thin-film element 35 and the protective film 36 (the cutout 43) are formed is cut at a portion where the gap 42 of the thin-film element 35 is abutted to form a cut wafer piece 44a (FIG. 9). (A)). In this cut wafer piece 44a, the rail surfaces 33a and 33b are formed by grinding (FIG. 9B).

  This state is shown in FIG. FIG. 10A is a plan view from the rail surfaces 33a and 33b, and FIG. 10B is a plan view from the end surface on the air outflow side. As shown in FIGS. 10A and 10B, rail surfaces 33a and 33b are formed at a predetermined height in a state where a predetermined number of core sliders 32 having cutouts 43a in the length direction are arranged. Is done.

  Returning to FIG. 9, the cut wafer piece 44a on which the rail surfaces 33a and 33b are formed is cut for each magnetic head 31 (core slider 32), and the tapered surfaces 34a and 34a are formed on the air inflow sides of the rail surfaces 33a and 33b. 34b is formed, and the rail surfaces 33a and 33b are chamfered as described above (FIG. 9C).

  The magnetic head 31 thus formed is mounted on the tip of a gimbal 52 as a head support, and the head assembly 51 is assembled (FIG. 9D). The thin film element 35 of the magnetic head 31 is guided to the connection terminal 54 by the lead wire 53 from the bump. Reference numeral 55 denotes an attachment portion for attaching to a carriage arm described later.

  FIG. 11 is a plan view showing a magnetic disk drive using the magnetic head shown in FIG. In the magnetic disk device 61 shown in FIG. 11, a head assembly 51 is attached to an arm 63 of an actuator 62, and a base of the arm 63 is rotatably supported by a pivot 64.

  A turning support 65 is formed on the arm 63 on the side opposite to the pivot 64, and a coil 66 wound around the turning support 65 is provided. Two magnets 67a and 67b are fixedly arranged below the coil 66. The coil 66 and the magnets 67a and 67b constitute a VCM (voice coil motor) as a driving unit.

  Such an actuator 62 energizes a coil 66 via a flexible printed board 71 from a wiring board 70 to a magnetic disk 69 which is fixed and rotated on a spindle 68 of a sensorless type spindle motor (not shown). By doing so, the arm 63 is rotated so as to move the magnetic head 31 in the radial direction of the magnetic disk 69.

  In such a magnetic disk device 61, when recording (or reproduction) is performed by positioning the magnetic head 31 on a predetermined track of the magnetic disk 69 by the actuator 62, a current is applied to the coil 40 (40a, 40b) of the thin film element 35. Supplied. At this time, the temperature of the thin-film element 35 rises and the protective film 36 thermally expands to generate a bulge. However, as shown by the broken line in FIG. It becomes. Specifically, considering the width S in FIG. 1B as a reference, the amount of protrusion of the protective film 36 per 10 ° C. is 2 nm (6 nm in the related art).

  Therefore, the contact of the magnetic head 31 with the surface of the magnetic disk 69 can be reduced, whereby damage due to abrasion powder and the like attached to the magnetic head 31 (thin film element 35) can be reduced, and reliability can be improved. it can. Accordingly, the flying height of the magnetic head 31 with respect to the surface of the magnetic disk 69 can be reduced. Further, when the magnetic head 31 is manufactured, the notch 43a can be easily formed at the wafer stage, and the distance from the gap 42 to the end of the protective film 36 is reduced by the notch 43, so that the rail surfaces 33a, The influence on the thin-film element 35 is smaller than in the case of forming the notch by the conventional chamfering method of 33b, the variation is reduced, and uniformity can be achieved.

  In addition, the notch 43a can reduce the contact of the edge of the magnetic head 31 by the roll with the magnetic disk 69.

  Next, FIG. 12 shows a configuration diagram of a magnetic head according to a second embodiment of the present invention. In the magnetic head 31 shown in FIGS. 12A and 12B, the notch 43b is formed by cutting the tapered surface in the air outflow direction from the vicinity of the thin film element 35 on the rail surfaces 33a, 33b (floating surface) of the core slider 32. The other configuration is the same as that of the first embodiment of FIG. 1 and has the same function and effect. Then, it is mounted on the magnetic disk device 61 shown in FIG. In the drawing, it is desirable that the dimension of x is set to about 0.020 mm and the dimension of y is set to 0.045 mm.

  Here, FIG. 13 shows a manufacturing explanatory view of the second embodiment. 13A and 13B, similarly to FIG. 7, a predetermined number of thin film elements 35 are formed on a wafer 44, and a protective film 36 is formed on the thin film elements 35. Then, a V-shaped groove 73a is formed in the vicinity of the gap 42 for each thin-film element 35 by a blade (a grinding stone or the like) 72 having a V-shaped cross section. For example, a wafer is mounted and fixed on a stage, and the grindstone fixed by the robot hand is aligned with the element forming portion at each block position in the X direction by the discrimination of the mark by the sensor, and is driven in the Y direction to perform cutting. Things.

  When the V groove 73a is cut, a notch 43b having a tapered surface is formed in the protective film 36 from the vicinity of the thin film element 35 as shown in FIG.

  Thus, the notch 43b having a tapered surface shape is easily formed by the blade 72 at the wafer stage.

  Then, as described above, even when the coil current flows during driving of the magnetic head 31 and the temperature rises and the protective film 36 expands thermally, as shown by the broken lines in FIG. On the magnetic head 31 can be reduced, and the flying height of the magnetic head 31 can be reduced.

  Next, FIG. 14 shows a configuration diagram of a magnetic head according to a third embodiment of the present invention, and FIG. 15 shows an explanatory view of a groove shape of the third embodiment. In the magnetic head 31 shown in FIGS. 14A and 14B, the notch 43 c is formed by notching a curved surface in the air outflow direction from the vicinity of the thin film element 35 on the rail surfaces 33 a and 33 b (floating surface) of the core slider 32. The other configuration is the same as that of the first embodiment of FIG. 1 and has the same function and effect. Then, it is mounted on the magnetic disk device 61 shown in FIG.

  In this case, as shown in FIG. 15, an inverted R groove 73b is formed by a blade having a cross-sectional shape in the vicinity of the gap 42 for each thin film element 35. An R-shaped cutout 43c is formed.

  By forming the notch 43c having such a shape, it is also possible to reduce the protrusion from the rail surfaces 33a, 33b (floating surface) due to the thermal expansion of the protective film 36 as shown by the broken line in FIG. Thus, the flying height of the magnetic head 31 can be reduced.

  Next, FIG. 16 is an explanatory view of another groove shape of the first to third embodiments. FIG. 16A shows a case where an inverted trapezoidal groove 73c is formed by a blade having an inverted trapezoidal cross section in the vicinity of the gap 42 in the thin film element 35 at the wafer stage. Then, by cutting the central portion of the inverted trapezoidal groove 73c, a notch having a tapered surface is formed in the protective film 36.

  FIG. 16B shows a case where an inverted R groove 73d having a bottom surface is formed by a blade near the gap 42 at the wafer stage. Then, by cutting this central portion, an inverted R-shaped notch is formed in the protective film 36. Subsequently, FIG. 17 shows a configuration diagram in the case where the magnetic head is configured using a thin-film MR element. FIG. 17A is a partial configuration view, and FIG. 17B is a partial cross-sectional view. In the magnetic head 81 shown in FIGS. 17A and 17B, an insulating film 37 such as alumina is formed as a base layer on the core slider 32, and a shield film (magnetic material) such as FeMn (manganese iron) is formed on the insulating film 37. A film 82 is formed, and an insulating film 83a of alumina or the like is further formed.

  On the insulating film 83a, an MR element (magnetoresistive element) 84 and conductive members 85a, 85b (85b not shown in the drawing) connected to both ends thereof are formed, and the insulating film 83b is formed thereon.

  Then, a lower magnetic film 38 also serving as a shield film is formed on the insulating film 83b, and an insulating film 39, a coil 40, and an upper magnetic film 41 are formed on the magnetic film 38 as in FIG. Then, a protective film 36 is formed thereon. Similarly, a notch 43a having a stepped surface (which may be a tapered surface or a curved surface) is formed in the protective film 36.

  In such a magnetic head 81, the gap 42 in the thin film element 35a becomes a recording-only element, and the MR element 84 becomes a reproduction-only element.

  Even when the MR element 84 is used as described above, the contact between the magnetic head 81 and the magnetic disk 69 at the time of temperature rise is reduced by the notch 43a formed in the protective film 36, and the magnetic head 81 has a low flying height. Can be achieved.

  It should be noted that the MR element 84 can be similarly applied to a fourth embodiment described later.

  Next, FIG. 18 shows a partial configuration diagram of the fourth embodiment of the present invention. 18A is a plan view of a thin film portion, FIG. 18B is a rear view of an end face of a protective film, and FIG. 18C is a side view of a thin film element portion. The magnetic head 91a shown in FIGS. 18A to 18C has the same configuration as that shown in FIG. 20A, except that the protective film 36 is formed on the thin film element 35, and the thin film element on the air bearing surface is provided. The two V-grooves 92a and 92b are formed as concave and convex portions so as to gradually become deeper from the periphery of 35 to the air outflow end of the protective film 36. Further, as shown in FIG. 18C, V-grooves 93a and 93b (93b is not shown in the figure) are formed as concave and convex portions on both side surfaces in the air outflow direction so as to gradually become deeper. . The magnetic head 91a is mounted on the magnetic disk device 61 shown in FIG.

  By forming the V-grooves 92a, 92b, 93a, 93b formed on the air bearing surface and both side surfaces, the surface area around the thin film element 35 is increased, the cooling effect is improved, and the temperature is improved. The rise of the protective film 36 to the air bearing surface due to the rise is suppressed. Thus, the flying height of the magnetic head 91a with respect to the magnetic disk can be reduced.

  Subsequently, FIG. 19 shows a configuration diagram of another shape of the fourth embodiment. FIG. 19A is a plan view of the thin film element portion, FIG. 19B is a rear view of an end face of the protective film, and FIG. 19C is a side view of the thin film element portion.

  In the magnetic head 91b shown in FIGS. 19A to 19C, steps 94a and 94b are formed as recesses in the vicinity of the thin film element 35 from both sides in the air outflow direction, and steps 94a and 94b are formed by, for example, a mask ion mill. Also, as shown in FIG. 19 (C), V-grooves 95a and 95b (95b are not shown in the figure) are formed as notches on both sides in the air outflow direction, for example, by cutting so that the grooves gradually become deeper. is there.

  The steps 94a and 94b and the V-grooves 95a and 95b on both sides increase the surface area around the thin film element 35 to improve the cooling effect, and suppress the protrusion of the protective film 36 to the floating surface due to a rise in temperature, thereby reducing the magnetic field. The flying height of the head 92b with respect to the magnetic disk can be reduced.

  In the fourth embodiment, V grooves 92a, 92b, 93a, 93b, 95a, 95b and steps 94a, 94b are formed as concave and convex portions from the thin film element 35 to the protective film 36. If it is, any shape may be sufficient.

  Further, by appropriately combining the fourth embodiment shown in FIGS. 18 and 19 with the first to third embodiments, it is possible to further reduce the flying height of the magnetic head.

In addition, the following supplementary notes are disclosed with respect to the above description.
(Supplementary Note 1) In a magnetic head in which a thin film element portion for recording and reproducing information is formed at an air outflow end of a slider flying above a recording medium, and a protective film is formed on the thin film element portion,
The thin film element section has a magnetoresistive effect element,
The magnetic head according to claim 1, wherein the protective film has a notch formed from the vicinity of the thin film element portion on the flying surface of the slider to the air outflow direction.
(Supplementary Note 2) The magnetic head according to Supplementary Note 1, wherein the cutout portion is formed in a shape of a stepped surface, a tapered surface, or a curved surface cutout near the air outflow end side of the thin film element portion.
(Supplementary Note 3) a head support unit on which the magnetic head according to Supplementary Note 1 or 2 which floats on a recording medium to record and reproduce information, and
An arm to which the head support is attached;
A drive unit for moving the arm unit on the recording medium,
A magnetic disk drive comprising:
(Supplementary Note 4) In a method of manufacturing a magnetic head, a thin-film element portion for recording or reproducing information is formed at an air outflow end of a slider flying above a recording medium.
Forming a thin film element portion by forming a coil, a magnetic film and a gap portion for recording and reproduction on a surface of a wafer having a thickness in a longitudinal direction of the slider;
Forming a protective film on the magnetic pole;
Forming a groove of a predetermined shape to be a notch of the protective film in the gap portion;
Cutting and processing each thin film element portion in the thickness direction of the wafer,
A method for manufacturing a magnetic head, comprising:
(Supplementary note 5) The method for manufacturing a magnetic head according to supplementary note 4, wherein the thin film element portion is formed to include a magnetoresistive effect element having conductive members connected to both ends.
(Supplementary Note 6) The method of Supplementary Note 4 or 5, wherein the groove is formed by etching or a cutting member having a predetermined cut surface shape.
(Supplementary Note 7) In a magnetic head in which a thin film element portion for recording and reproducing information is formed at an air outflow end of a slider flying above a recording medium, and a protective film is formed on the thin film element portion,
A magnetic head, comprising: a notch formed from the vicinity of a side end of the thin film element portion on the flying surface of the slider to the air outflow direction of the protective film.
(Supplementary note 8) The magnetic head according to Supplementary note 7, wherein the notch is formed in a concave shape or a V-groove shape.
(Supplementary note 9) The magnetic head according to Supplementary note 7 or 8, wherein the thin film element portion is formed by a configuration of an electromagnetic induction type or a combination of a magnetoresistive effect type and an electromagnetic induction type.
(Supplementary Note 10) A head support unit for mounting the magnetic head according to any one of Supplementary Notes 7 to 9, which floats on a recording medium to record and reproduce information, and
An arm to which the head support is attached;
A drive unit for moving the arm unit on the recording medium,
A magnetic disk drive comprising:

  In the inventions of Supplementary Notes 4 to 6, the gap portion between the two magnetic poles of the thin film element is cut or processed by forming a groove serving as a cutout portion of the protective film using an etching or cutting member. Thereby, the notch of the protective film can be easily formed without performing high-level chamfering, and the distance from the gap or the end face of the magnetic pole to the end of the protective film can be sufficiently reduced, and the thin film element can be formed. And the electromagnetic conversion characteristics can be made uniform.

  In the inventions of the above-mentioned supplementary notes 7 and 8, the concave or V-groove-shaped notch is formed from the vicinity of both side ends of the thin film element on the flying surface of the slider to the air outflow direction of the protective film. As a result, the surface area around the thin-film element is increased, cooling is promoted, and the protection film is prevented from rising due to a rise in temperature, so that the magnetic head can be reduced in flying height with respect to the recording medium.

  According to the invention of the aforementioned supplementary note 9, the thin film element formed on the slider is formed by an electromagnetic induction type or a combination of a magnetoresistive effect type and an electromagnetic induction type. With this arrangement, it is possible to realize a low flying height for any type, and to improve the electromagnetic conversion characteristics for recording and reproduction.

  According to the invention of the above supplementary note 10, the above magnetic head is mounted on the magnetic disk drive. As a result, head contact of the magnetic head with the recording medium is reduced, and low flying height can be achieved.

FIG. 1 is a configuration diagram of a magnetic head according to a first embodiment of the present invention. FIG. 3 is a diagram illustrating a positional relationship between a magnetic head and a recording medium according to the first embodiment of the present invention. FIG. 4 is a diagram illustrating a relationship between a temperature rise and a decrease in a recess amount in the magnetic head according to the first embodiment of the present invention. FIG. 6 is a diagram illustrating a configuration of a magnetic head and a positional relationship between the head and a recording medium according to a modification of the first embodiment of the present invention. FIG. 4 is a diagram showing a relationship between the length of the non-tapered portion and the recess amount under each temperature condition. FIG. 4 is a diagram showing the periphery of the element as viewed from the air bearing surface. It is explanatory drawing of the wafer process of formation of a thin film element part. It is a partial explanatory view of a thin film element. FIG. 3 is a partial view of a wafer on which a thin film element is formed. FIG. 4 is an explanatory diagram of a magnetic head processing process and assembly assembly. FIG. 2 is a plan view of a magnetic disk drive using the magnetic head of FIG. 1. FIG. 6 is a configuration diagram of a magnetic head according to a second embodiment of the present invention. It is a manufacturing explanatory view of the second embodiment. FIG. 13 is a configuration diagram of a magnetic head according to a third embodiment of the present invention. It is explanatory drawing of the groove shape of 3rd Example. It is explanatory drawing of other groove shape of 1st-3rd Example. FIG. 3 is a configuration diagram when a magnetic head is configured using a thin-film MR element. FIG. 11 is a partial configuration diagram of a fourth embodiment of the present invention. It is a lineblock diagram of other shapes of a 4th example. FIG. 9 is a configuration diagram of a conventional magnetic head. FIG. 9 is an explanatory diagram showing thermal expansion of a protective film in a conventional magnetic head.

Explanation of reference numerals

31, 81, 91a, 91b Magnetic head 32 Core slider 33a, 33b Rail surface 34a, 34b Tapered surface 35, 35a Thin film element 36 Protective film 42 Gap 43a to 43c Notch 44 Wafer 51 Head assembly 61 Magnetic disk device 62 Actuator 63 Arm 69 Magnetic disk 72 Blade 73a V groove 84 MR element

Claims (3)

A magnetic head in which a thin film element portion for performing recording and reproduction of information is formed at an air outflow end of a slider floating on a recording medium, and a protective film is formed on the thin film element portion,
The thin film element section has a magnetoresistive effect element,
The magnetic head according to claim 1, wherein the protective film has a notch formed from the vicinity of the thin film element portion on the flying surface of the slider to the air outflow direction.   2. The magnetic head according to claim 1, wherein the notch is formed in a stepped, tapered, or curved notch shape near the air outflow end of the thin film element. 3. A head support for mounting the magnetic head according to claim 1 or 2, wherein the head is mounted on a recording medium to record and reproduce information.
An arm to which the head support is attached;
A drive unit for moving the arm unit on the recording medium,
A magnetic disk drive comprising:

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