JP2004261854A - Fine metallic parts and their manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide fine metallic parts which are manufactured by a plating treatment using an aqueous solution and has mechanical properties of a level not lower than a designated level. <P>SOLUTION: Fine metallic parts 10 are used as metallic dies for microforging. The parts comprise a composite of iron and iron carbide contained in the iron and has a Vickers hardness of ≥ HV 400. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a fine metal part and a method of manufacturing the same, and more specifically, to a fine metal part which is a mold for manufacturing micro devices such as a microreactor and a micro analysis system by micro forging and a method of manufacturing the same. is there.
[0002]
[Prior art]
The LIGA (Lithographie Galvanoformung Abformung) process is useful when a large amount of fine metal structures with high precision are manufactured. The LIGA process using synchrotron radiation (SR) light, which has high directivity among X-rays, can perform deep lithography, and can process a structure having a height of several 100 μm with a precision in the micron range. is there. That is, it has features such as easy production of a fine metal structure having a high aspect ratio, and is expected to be applied in a wide range of fields.
[0003]
The LIGA process is a processing technique that combines plating and mold such as lithography and electroforming. According to the LIGA process, for example, a resist film is formed on a conductive substrate, and the resist film is irradiated with SR light via an absorber mask (reticle) having a pattern of a predetermined shape. By such lithography, a resist structure (resin type) corresponding to the shape pattern of the absorber mask is formed. In this description, this resist structure is hereinafter referred to as a mask pattern.
By depositing a metal in the opening of the mask pattern by electroforming, a fine metal structure can be obtained. Using this high-precision metal fine structure as a mold, the above-described micro device, which is a resin-made fine molded product by injection molding or the like, can be obtained (for example, see Non-Patent Document 1).
[0004]
[Non-patent document 1]
Manabu Yasui, Yasuo Hirai, Hiroyuki Fujita: Surface Technology, 2001, Vol. 52, no. 11 pp. 734-735
[0005]
[Problems to be solved by the invention]
However, in the above-mentioned LIGA process, when an aqueous solution is used for the electroforming treatment, a fine component having a predetermined shape can be obtained without increasing the temperature, but the metal that can be deposited is limited to a specific metal such as nickel. Since fine metal parts manufactured by aqueous plating of nickel or the like have low hardness and softness, it is not possible to obtain a mold having a mechanical strength such as a metal mold for micro forging. For this reason, nickel formed by plating of an aqueous solution has not been used as a member requiring mechanical strength. For example, there is a case where a nickel plating film is used as a coating material of a die body as an application similar to the above-mentioned die for forging. However, the nickel film in this case functions as a lubricant while being worn, and is used as a consumable to prevent abrasion of the mold body for a certain period of time, and has not been used for the mold body.
[0006]
On the other hand, metals such as tungsten and titanium have a high melting point and a high mechanical strength (Young's modulus and hardness) and are therefore suitable for mechanical structures. However, when the mechanical structure made of tungsten, titanium, or the like is manufactured using the LIGA process, a normal metal film cannot be obtained using an aqueous solution. Instead of the aqueous solution, it is necessary to use electroforming of a molten salt that is heated and melted at a high temperature. Therefore, it is necessary to use a material having heat resistance, dimensional change durability, non-reactivity with a molten salt, and the like for a mask pattern for depositing a metal. In addition, when manufacturing a mold for micro forging by making full use of molten salt electroforming, as described above, in order to maintain the molten salt at a high temperature, compared to the aqueous plating process, a heating device or a high-temperature processing tank is used. All require extensive equipment.
[0007]
For this reason, there has been a demand for the development of a fine metal part having a mechanical strength that can be used as a mold for micro forging and that can be manufactured by an aqueous solution plating process.
[0008]
An object of the present invention is to provide a fine metal part which can be manufactured by an aqueous solution plating process and has mechanical properties of a predetermined level or more, and a method of manufacturing the same.
[0009]
[Means for Solving the Problems]
The fine metal part of the present invention is a part used as a metal mold for micro forging, and is made of a composite of iron and iron carbide contained in the iron, and has a Vickers hardness of HV400 or more. .
[0010]
According to this configuration, since a fine mold can be manufactured using an aqueous solution, it has dimensional accuracy that can be used as a mold for micro forging, and is further strengthened by dispersing iron carbide in iron. , The above hardness can be obtained. For this reason, it becomes possible to provide a micro forging die at low cost.
[0011]
In addition, the above-mentioned micro forging means, for example, forging for forming a groove having a width of the order of 0.1 μm to several hundred μm. The width w or the thickness of the indentation die portion in which the groove is formed by indentation has a dimension corresponding thereto.
[0012]
Another fine metal part of the present invention is a part used as a micro forging die. The component includes a nickel portion formed of nickel and an alloy coating layer that covers the nickel portion and forms an alloy with nickel. The hardness of the alloy coating layer is Vickers hardness HV400 or more.
[0013]
Since the micro forging die has a small size, when the surface treatment is performed, the thickness of the surface layer occupies a large proportion of the micro forging die. Therefore, as described above, by mechanically alloying the surface layer portion of the nickel fine component formed by the plating process, it is possible to obtain the mechanical strength necessary for the micro forging die. The above-mentioned alloying is not limited to surface treatment, but is not limited to the surface of a fine component, and may be referred to as alloying of the main body.
[0014]
In the fine metal part according to the present invention and another invention described above, the width w of the indentation die portion can be set to 1 μm or more.
[0015]
If the width w of the above-mentioned indentation processing portion is less than 1 μm, it becomes impossible to deposit a metal film of good quality to the bottom of the groove having the width in aqueous solution plating. For this reason, the width is set to 1 μm or more. However, when the height of the indentation mold portion is high, that is, when the groove of the mask pattern is deep, the width is preferably set to 2 μm or more. The width w is referred to as the width because it corresponds to the width of the indented groove formed in the workpiece, but may be referred to as the thickness in view of the shape of the indentation die.
[0016]
Further, in the above-mentioned fine metal component, the height h of the indentation die portion may be 10 μm or more.
[0017]
With this configuration, a groove deeper than a predetermined level can be formed in the workpiece by indentation forging. Since the grooves are formed by pressing the above-mentioned indentation die portion, the depth of the groove cannot be larger than the height of the indentation die portion.
[0018]
The fine metal part of the present invention and another invention described above includes a stamping die portion for stamping a forged object, and the ratio (aspect ratio) between the height and width of the stamping die portion is 10 or less. Is also good.
[0019]
When the above aspect ratio exceeds 10, it becomes difficult to deposit a metal that does not include a defect that poses a practical problem in a narrow deep groove during plating. The above aspect ratio can produce a good quality fine metal part at 10 or less, but more preferably 7.5 or less, and more preferably 5 or less when the width is narrower.
[0020]
In a cross section intersecting a ridge line formed by a face and a side face of the tip of the above-mentioned indentation processing part meeting, a ridge line portion is adapted to a radius of (１ ／) or less of a width. Can have.
[0021]
With this configuration, a steeply rising side wall can be obtained at the bottom of the workpiece. This is a very good steepness as compared with the groove processing on the workpiece by etching, and the quality of the workpiece, that is, the quality of the product can be improved. The degree of the above-mentioned wholly may be more desirably adapted to a radius of (１ ／) or less of the above-mentioned width. It is preferable to fit a radius of (1/16) or less. Here, that the ridge portion in the cross section conforms to the predetermined radius means that the rounded ridge portion is rounded along the predetermined radius.
[0022]
The method for producing a fine metal part of the present invention is a method for producing a part used as a metal mold for micro forging. This manufacturing method includes a step of forming a mask patterning of a micro forging die, and a step of manufacturing a die by electroforming using an aqueous solution using the mask pattern.
[0023]
According to this method, a micro forging die can be easily and accurately manufactured.
Further, the method may include a step of coating the surface of the mold manufactured by the above-described electroforming with a metal different from the electroformed part, and a step of subsequently heating to form an alloy layer on the surface part. .
[0024]
With this method, an alloy layer can be formed by thermal diffusion. This alloy layer has high hardness that cannot be obtained only by electroforming with an aqueous solution. For this reason, the mechanical strength that is difficult to secure in the electroformed state using the aqueous solution can be increased to a level having a sufficient durability including abrasion resistance.
[0025]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0026]
1 to 6 are schematic cross-sectional views showing a method for manufacturing a fine metal component in one embodiment of the present invention in the order of steps. In FIG. 1, a photoresist 2 is applied to a thickness of about 50 μm on a metal plate (metal layer) 1 made of, for example, stainless steel, copper, iron, nickel, or the like. Next, a metal photomask 3 is arranged on the photoresist film. The metal photomask 3 may be manufactured by any existing method.
[0027]
Next, UV (Ultraviolet) light or X-rays are irradiated to develop the photoresist 2. When the photoresist 2 is developed by developing the photoresist 2, only the portion irradiated with the UV light or the X-ray is removed, and the opening 2a reaching the bonding surface between the metal plate 1 and the photoresist 2 is removed. Is formed in the photoresist 2, and the surface of the metal plate 1 is exposed at the bottom of the opening 2a (see FIG. 2). The developed photoresist forms a mask pattern in electroforming. For the photoresist 2, for example, a UV resist is used in the case of UV lithography, and, for example, PMMA is used in the case of X-ray lithography.
[0028]
Referring to FIG. 3, electroforming with an aqueous solution is performed using mask pattern 2 as a mold. Thereby, iron layer 10 containing, for example, iron carbide is deposited on the surface of metal plate 1 exposed from opening 2a, and fine metal component 10 made of the iron layer is formed in opening 2a. Thereafter, the mask pattern 2 is removed (see FIG. 4).
[0029]
Further, the fine metal component 10 is peeled off from the metal plate 1 to manufacture the fine metal component 10 as shown in FIG. Each of the fine metal parts shown in FIG. 5 is separated.
[0030]
In the electroforming with the aqueous solution, a metal may be deposited within the opening depth of the mask pattern as shown in FIG. 3, or, as shown in FIG. The metal may be deposited to a higher position. When the metal is deposited as shown in FIG. 6, unlike the fine metal part of FIG. 5, a fine metal part in which the respective parts are integrally connected is formed as shown in FIG.
[0031]
Electroforming using the above aqueous solution is performed using, for example, an apparatus shown in FIG.
Referring to FIG. 8, this electroforming apparatus uses an aqueous solution 35 collected in a plating tank 39 as a plating solution, and a bubbling mechanism for a positive electrode 31, a negative electrode 32, a thermocouple 34, and N ₂ gas or the like. 37 and a heater 36. A nickel plate 31 a is electrically connected to the positive electrode 31 to elute nickel ions and the like into the aqueous solution 35. The negative electrode 32 (for example, made of copper) is arranged in the aqueous solution 35, and the tip thereof is electrically connected to the pattern base material 40 including the mask pattern for performing the aqueous solution plating. The bubbling mechanism 37 may be a simple stirring rod for stirring the plating solution, or may be a bubbling mechanism for bubbling an inert gas such as N ₂ gas as described above.
[0032]
The heater 36 is used for heating the electrolytic solution 35, and the thermocouple 34 is for monitoring the temperature. The bubbling mechanism 37 for N ₂ gas or the like is for stirring the plating solution 38. Although not shown, a standard electrode may be placed in the electrolyte to monitor the potential.
[0033]
In electroforming using an aqueous solution of nickel using this apparatus, for example, a mixed aqueous solution of nickel sulfate, nickel chloride, and boric acid is used. The temperature of the electrolytic solution is heated by the heater 36 to maintain the 40 ° C., performing electroforming in the range of current density ^{0.1A / dm 2 ~10A / dm 2} . Desirable current density is 3 A / dm ² for both nickel plating and iron plating containing iron carbide.
[0034]
After the electroforming is completed, the pattern base material 40 is taken out, and the fine metal parts 10 such as nickel fine metal parts or iron fine parts containing iron carbide are peeled off from the metal plate 1 and taken out. In the case of producing an iron fine metal part containing iron carbide, the iron fine metal part is produced through the same apparatus and procedure as the above nickel fine metal part. However, the iron fine metal parts containing iron carbide, sometimes bubbling N ₂ gas in order to expel the dissolved oxygen for oxidation prevention of iron.
[0035]
Note that the process in the above embodiment is an example, and the present invention is not limited to this process.
[0036]
In the case of nickel, since the hardness is low and the mechanical strength is insufficient, for example, an aluminum layer 21 is deposited on the surface of the nickel member 10 as shown in FIG. Thereafter, the alloy layer 22 is heated to a temperature at which nickel and aluminum are alloyed, for example, 200 ° C. to 660 ° C., and the alloy layer 22 is formed by thermal diffusion (see FIG. 10). Since the above-mentioned nickel member is a fine member, a considerable proportion of the member is alloyed by the above-described alloying treatment, and a micro-forging die excellent in durability can be obtained.
[0037]
FIG. 11 is a perspective view showing a stamping die portion 10 a included in the fine metal component 10. The indented die portion 10a rises vertically from the base portion 10f and has a height h and a width w. The ridge portion 10d is formed at a portion where the tip surface 10b and the side surface 10c of the above-mentioned indentation die portion meet.
[0038]
FIG. 12 is a sectional view taken along line XI-XI in FIG. FIG. 12A is a cross-sectional view of the vicinity of the tip of the indentation die portion, and FIG. 12B is an enlarged cross-sectional view of a ridge line portion. In the present embodiment, since a fine metal component is produced by electrodeposition with an aqueous solution, a significant feature is that the degree of drooping at the ridge is small. As shown in FIGS. 12A and 12B, an approximation is made such that the ridge portion can be adapted to an arc having a radius R. The adaptation of the arc to the ridge does not have to be strict. For example, a perpendicular line is set up at the end of the linear portion of the side surface 10c, and a perpendicular line is set up at the end of the linear portion of the tip surface 10b, and the intersection O of both the perpendiculars is determined. The average (R1 + R2) / 2 with the perpendicular length R2 can be used as the radius R. The point of the end of the straight portion of the side surface 10c and the end of the straight portion of the tip end surface 10b are, for example, a straight line ruler applied to the side surface or the tip end surface, and a point deviating from the straight line rule is defined as the above-mentioned end point. I do. The measurement is performed at several places to dozens of places, and the average is taken.
[0039]
In the present embodiment, the radius R is equal to or less than (１ ／) w. For this reason, when the above-mentioned press-working mold portion is pressed into the workpiece to form a groove, a groove whose side surface rises steeply from the bottom surface can be obtained. Such a groove whose side surface rises steeply from the bottom surface provides good characteristics such as enhancing analysis accuracy in an analysis system or the like.
[0040]
Next, examples will be described.
(Example 1)
In Example 1 of the present invention, a composite composed of iron and iron carbide (described as carbide dispersed Fe) was prepared and compared with a comparative example. The manufacturing conditions for the fine metal parts made of carbide-dispersed Fe are as follows.
(Substrate): Stainless steel (SR lithography): Working mold part width w = 2 μm, aspect ratio (depth h / width w) = 5, using PMMA as a photoresist material, and using X-rays for exposure Was. FIG. 13 shows the mask pattern 2 after exposure and development, and the stainless steel substrate 1 supporting the mask pattern 2. The width w of the opening is 2 μm, the opening depth h is 10 μm, and therefore the aspect ratio (h / w) is 5.
(Plating solution): (ferrous sulfate 40 g / l) + (citric acid 1.2 g / l) + (1-ascorbic acid 3.0 g / l)
(Electroforming conditions): temperature: 50 ° C., current density: 3 A / dm ² , plating thickness: deposited up to a height of 10 mm above the mask pattern upper surface.
[0041]
FIG. 14 shows a state in which carbide dispersion Fe10 is deposited over the upper surface of mask pattern 2. FIG. 15 shows carbide dispersed Fe10, which is a fine metal part separated from the metal plate. The press-working mold portion (the portion specified by the height h and the width w in FIG. 15) of the fine metal component has a shape in which the shape of the mask pattern is transferred. That is, although there is a dimensional difference between the mask pattern dimension and the fine metal component dimension due to the difference in the thermal expansion coefficients of the photoresist and the carbide dispersed Fe, the dimensional difference is small, and if the dimensional difference is ignored, The width w of the opening is 2 μm, the opening depth h is 10 μm, and therefore the aspect ratio (h / w) is 5. In addition, the degree R of the cross section of the ridge portion at the tip was (1/4) w or less, and further satisfied (1/16) or less.
[0042]
As a comparative example, a nickel plating film was manufactured under the following conditions.
(Substrate): stainless steel (plating solution): (nickel sulfate 100 g / l) + (nickel chloride 40 g / l) + (boric acid 45 g / l)
(Electroforming conditions): Temperature 40 ° C., current density 5 A / dm ² , plating thickness deposited to a height of 2 mm above the mask pattern upper surface.
[0043]
In the nickel plating film of the comparative example, Vickers hardness HV180, Young's modulus 2.1 × 10 ¹¹ Pa, linear expansion coefficient 13.3 × 10 ⁻⁶ / ° C, and tensile strength 50 kgf / mm ² were obtained.
[0044]
On the other hand, the above-mentioned carbide-dispersed Fe was able to obtain Vickers hardness HV800. The hardness of HV800 indicates that the mold for micro forging has sufficient durability. Further, the die steel for forging can be easily produced by aqueous solution plating as described above.
[0045]
(Example 2)
Next, a second embodiment of the present invention in which a nickel electroformed film is coated with a metal and alloyed by a thermal diffusion process will be described. The width w and aspect ratio of SR lithography and the electroforming conditions are the same as those in the first embodiment.
[0046]
(Plating solution): (nickel sulfate 100 g / l) + (nickel chloride 40 g / l) + (boric acid 45 g / l)
As shown in FIG. 16, nickel is deposited on a mask pattern by electroforming using an aqueous solution. At this time, deposition is performed to a height of 10 mm from the upper surface of the mask pattern. Thereafter, the edge of the fine metal portion made of nickel is separated from the mask pattern, and then the surface of the above-mentioned indentation mold portion is covered with an aluminum layer 21 by a sputtering process (FIG. 17). Next, as shown in FIG. 18, the substrate is heated to a temperature range of 200 ° C. to 660 ° C. in a vacuum to perform a thermal diffusion process.
[0047]
In the sample of Example 2 in which the surface layer was alloyed to form an alloy layer, Vickers hardness HV460 and tensile strength 63 kgf / mm ² were obtained. In other words, by forming a nickel fine metal part by an aqueous solution plating process, and then performing an aluminum coating and a heat diffusion process to form an alloy layer, a fine metal component that can be easily used for micro forging is formed. Can be. Regarding the degree of drooping of the indentation die portion, the radius at the cross section of the ridge portion at the tip was (１ ／) w or less, and further satisfied (1/16) or less.
[0048]
A product can be manufactured by performing the following micro forging processing using the fine metal parts obtained in the first and second embodiments.
[0049]
(Glass processing)
Glass processing is performed by the following steps G1 to G3.
G1 (glass melting): borosilicate glass is melted at 1500 ° C.
G2 (punching): Punching is performed at a glass viscosity of 1 × 10 ⁷ poise. For example, when the glass temperature is 950 ° C. or higher, the viscosity becomes small, and molding cannot be performed accurately. On the other hand, if the temperature is lower than 850 ° C., the viscosity is too large and molding becomes difficult.
G3 (Cooling): The punched glass is left at 600 ° C. for 1 hour, and then cooled naturally. Continuous cooling from the molding temperature leaves permanent strain, which causes cracks and deformation in the product.
[0050]
By the above-mentioned forming process, a groove having a width of 50 μm and a depth of 50 μm can be accurately and simply formed in a glass plate by a primitive method of forging.
[0051]
(Fine processing of steel by cold forging)
Using the micro-forged dies obtained in Examples 1 and 2, steel was finely processed under the following conditions.
F1 (micro forging die): The hardness is HRC20 or more, more preferably HRC58 or more. The Young's modulus is 1 × 10 ¹¹ Pa or more, more preferably 2.1 × 10 ¹¹ Pa or more. Tensile yield strength, 100 kgf / mm ² or more, more preferably 170kgf / mm ² or more.
F2 (micro forging): The target metal is SCr420 steel (C: 0.18 wt%, Si: 0.15 wt%, Mn: 0.60 wt%, Cr: 0.9 wt%), and a load of 1 to 100 kgf / mm ² And If the load is less than 1 kgf / mm ² , molding cannot be performed due to the deformation resistance of the material. If the load exceeds 100 kgf / mm ² , the micro forging die itself may be damaged. The processing temperature was room temperature, and the processing speed was 100 mm / min or less. When the processing speed exceeds 100 mm / min, there is a possibility that a crack is formed in the workpiece.
F3 (annealing): Annealing is performed by holding the cold-forged workpiece in a temperature range of 650 ° C. to 726 ° C. for one hour in a nitrogen gas atmosphere. If the temperature is lower than 650 ° C., the progress of annealing is slow, and the removal of residual stress is insufficient.
On the other hand, if the temperature exceeds 726 ° C., austenite transformation occurs, and the fibrous structure and the like introduced by the cold forging may disappear, and the mechanical properties may decrease.
[0052]
A groove having a width of 50 μm and a depth of 50 μm can be formed by the cold forging described above.
[0053]
The embodiments disclosed this time are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.
[0054]
【The invention's effect】
ADVANTAGE OF THE INVENTION By using the fine metal component of this invention and its manufacturing method, the metal mold | die for micro forging excellent in mechanical strength can be easily manufactured using an aqueous solution for a plating solution.
[Brief description of the drawings]
FIG. 1 is a diagram showing a state in which a metal photomask is arranged on a photoresist film in a method for manufacturing a fine metal component according to one embodiment of the present invention.
FIG. 2 is a view showing a state in which a photoresist is patterned from FIG. 1 and a metal photomask is removed.
FIG. 3 is a diagram showing a state in which electroforming using an aqueous solution is performed.
FIG. 4 is a diagram showing a state where a mask pattern is removed.
FIG. 5 is a view showing a state where a fine metal part is separated from a metal plate.
FIG. 6 is a view showing a modification of a state where electroforming using an aqueous solution is performed.
FIG. 7 is a view showing a modification of a state in which a fine metal part is separated from a metal plate.
FIG. 8 is a diagram schematically showing a configuration of an apparatus for performing electroforming using an aqueous solution.
FIG. 9 is a view showing a state in which a metal layer is formed on the surface of a fine metal member.
10 is a view showing a state in which a heat diffusion process is performed on the state of FIG. 9 to form an alloy layer.
FIG. 11 is a diagram showing a press-working die portion of the fine metal component of the present embodiment.
12 is a cross-sectional view taken along the line XII-XII of FIG. 11, (a) is a cross-sectional view of the tip of the indentation die, and (b) is an enlarged cross-sectional view of a ridge portion.
FIG. 13 is a diagram illustrating a mask pattern according to the first embodiment.
FIG. 14 is a diagram showing a state in which carbide-dispersed Fe is deposited by electroforming using an aqueous solution.
FIG. 15 is a diagram showing a state in which carbide dispersed Fe is separated from a metal plate.
FIG. 16 is a diagram showing a state in which electroforming is performed on a mask pattern in Example 2.
FIG. 17 is a view showing a state in which a nickel fine part separated from a metal plate is coated with aluminum.
FIG. 18 is a diagram showing a state in which an alloy layer is formed by a thermal diffusion process.
[Explanation of symbols]
REFERENCE SIGNS LIST 1 metal plate, 2 photoresist film (mask pattern), 2a opening (groove), 3 metal photomask, 10 deposited layer by electroforming (fine metal parts), 10a indentation processing portion, 10b tip surface, 10c side surface, 10d Ridge portion, base portion of 10f fine metal part, 21 metal film, 22 alloy layer, 31 counter electrode, 31a nickel plate, 32 working electrode, 34 thermocouple, 35 aqueous solution (plating solution), 36 heater, 37 stirring rod, 39 Plating tank, 40 pattern substrate.

Claims (8)

A part used as a micro forging die,
A fine metal part comprising a composite of iron and iron carbide contained in the iron, and having a hardness of Vickers hardness HV400 or more. A part used as a micro forging die,
A fine metal component comprising a nickel portion formed of nickel and an alloy coating layer covering the nickel portion and forming an alloy with nickel, wherein the hardness of the alloy coating layer is Vickers hardness HV400 or more. 3. The fine metal part according to claim 1, wherein the component includes a pressing die portion for pressing the forged object, and the width w of the pressing die portion is 1 μm or more. 4. The fine metal part according to any one of claims 1 to 3, wherein the part includes a stamping die portion for stamping a forged object, and the height h of the stamping die portion is 10 µm or more. 5. The part according to claim 1, wherein the part includes a stamping die portion for stamping a forged object, and a ratio (h / w) of a height h to a width w of the stamping die portion is 10 or less. Fine metal parts according to any of the above. In a cross section that intersects a ridgeline formed by a face and a side face of a tip of the indentation processing portion meeting each other, the extent of the ridgeline portion conforms to a radius of (以下) or less of the width. The fine metal part according to any one of claims 1 to 5, comprising: A method of manufacturing a component used as a micro forging die,
Forming a mask patterning of the micro-forged mold,
Using the mask pattern to manufacture the metal mold by electroforming using an aqueous solution. The method according to claim 7, further comprising a step of coating the surface of the mold manufactured by the electroforming with a metal different from the electroformed part, and a step of subsequently heating to form an alloy layer on the surface part. The method for producing a fine metal part as described above.

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