JP2004257849A - Scanning mechanism for scanning probe microscope, and scanning probe microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To heighten stiffness of a scanning mechanism, and to lower the height, in a scanning probe microscope. <P>SOLUTION: This scanning probe microscope is equipped with a stage 2 for placing thereon a measurement object S, a probe P to be brought close to or into contact with the measurement object, and a scanning mechanism 8 for moving relatively the probe in the three-dimensional direction relative to the measurement object. The scanning mechanism is equipped with a horizontal micro-motion mechanism 9 capable of moving relatively the probe and the stage on a two-dimensional plane, and a vertical micro-motion mechanism 10 capable of moving relatively the probe and the stage in the vertical direction to the two-dimensional plane, and the horizontal micro-motion mechanism and the vertical micro-motion mechanism are installed divisionally, and the vertical micro-motion mechanism directly supports the stage. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a scanning mechanism and a scanning probe microscope for a scanning probe microscope such as a scanning near-field microscope.
[0002]
[Prior art]
In a conventional scanning probe microscope (SPM), for example, taking a scanning near-field microscope as an example, a sample S is mounted on a stage 2 on a three-axis fine movement mechanism 1 as shown in FIG. Is irradiated on the surface of the sample S, local optical characteristics of the sample S are collected by the objective lens L1 disposed on the transmission side, and the collected optical signal is introduced into the photodetector 3. It is configured to measure optical characteristics on the sample S (for example, see Patent Document 1). That is, in this conventional example, the objective lens L1 is of a type in which an inverted microscope supported below the stage 2 is combined.
[0003]
During the measurement, evanescent light is emitted as excitation light from the tip of the probe P. The evanescent light exists only in the vicinity of the probe P, and its intensity attenuates exponentially with the distance from the tip of the probe. The sample S is irradiated with the evanescent light at the position. In this state, the measurement is performed by relatively moving the tip of the probe and the sample S and scanning the surface of the sample S.
[0004]
The most typical positioning method between the probe tip and the sample S is a method in which the sharpness of the probe tip is used to control the distance between the probe tip and the sample surface by an atomic force acting between the sample surface and the probe tip. is there. In this case, since the interatomic force depends on the distance between the tip of the probe and the sample surface, the vertical fine movement mechanism 4 of the three-axis fine movement mechanism 1 is controlled so that the distance between them is constant. Further, by scanning the sample S in a two-dimensional plane by the horizontal fine movement mechanism 5 of the three-axis fine movement mechanism 1 while performing the distance control as described above, the optical characteristics in the two-dimensional plane are measured. In addition, the unevenness image on the sample surface can be simultaneously measured by the voltage applied to the vertical fine movement mechanism 4.
In the three-axis fine movement mechanism 1, which is a scanning mechanism, three are provided around the objective lens L1 and the vertical fine movement mechanism 4 is provided directly on the horizontal fine movement mechanism 5, so that the three-axis fine movement mechanism 1 is integrated. Stage 2 is supported. Note that the horizontal fine movement mechanism 5 and the vertical fine movement mechanism 4 are formed of cylindrical piezoelectric elements (piezo elements).
[0005]
In a scanning probe microscope combined with an inverted microscope as described above, a lever scan is performed. For example, when scanning is performed with a scanning near-field microscope, when the lever scan method is used, a focus shift occurs between the objective lens L1 and the tip of the probe, and thus it is necessary to scan the sample surface. When performing this sample scan, a space is required in the middle of the scanning mechanism.
[0006]
Further, as another conventional example of the three-axis fine movement mechanism used for the scanning probe microscope as described above, a type in which four piezoelectric elements are installed horizontally horizontally is known (for example, see Patent Document 2). ).
Further, as another conventional example of the three-axis fine movement mechanism, a commercially available so-called flat scanner or the like is known. This flat scanner has a structure in which a plurality of stacked piezoelectric elements and a mechanism for enlarging a fine stroke are combined (for example, see Non-Patent Document 3).
[0007]
[Patent Document 1]
JP-A-2000-304755 (paragraphs 0002 to 0003 and FIG. 7)
[Patent Document 2]
US Patent No. 5,705,878 [Non-Patent Document 3]
Physik Instrumente's products P-517, P-527, [online], [searched February 24, 2002], Internet <URL: http: // www. physikinstrumente. de / products / prdetail. php? second = 2-32>
[0008]
[Problems to be solved by the invention]
However, the following problems remain in the scanning technique in the conventional scanning probe microscope. That is, when combined with an inverted microscope, the space in the height direction is narrow, so the scanning mechanism needs to be as thin as possible. Further, in the scanning probe microscope, it is necessary to increase the rigidity of the scanning mechanism itself as much as possible in order to increase the scanning accuracy. Furthermore, the target sample in the inverted microscope may be a living cell or the like, and in such a case, it is particularly necessary to set a wide scan area.
In the above-described conventional example, in the case of a mechanism in which the vertical fine movement mechanism is directly and integrally connected to the horizontal fine movement mechanism, there is a disadvantage that the height of the entire scanning mechanism increases and it is difficult to set a wide scan area. . Further, in the type in which the horizontal fine movement mechanisms in the horizontal direction (X and Y directions) and the vertical direction (Z direction) are horizontally arranged on a horizontal plane or in the flat scanner type, the entire scanning mechanism can be thinned and the scanner area can be widened. However, there is a disadvantage that the rigidity of the entire scanning mechanism is low. In particular, in these cases, it was difficult to increase the rigidity in the vertical direction.
[0009]
The present invention has been made in view of the above-described problems, and provides a scanning mechanism and a scanning probe microscope for a scanning probe microscope that can increase the rigidity of the mechanism itself and reduce the height. Aim.
[0010]
[Means for Solving the Problems]
The present invention has the following features to attain the object mentioned above. That is, the scanning mechanism for a scanning probe microscope of the present invention is mounted on a scanning probe microscope including a stage on which an object to be measured is mounted, and a probe that comes close to or comes into contact with the object to be measured. A scanning mechanism for moving the probe and the stage relatively in a two-dimensional plane; a scanning mechanism for moving the probe and the stage relatively in a two-dimensional plane; A vertical fine movement mechanism capable of relatively moving the horizontal fine movement mechanism in a direction perpendicular to the two-dimensional plane, wherein the horizontal fine movement mechanism and the vertical fine movement mechanism are separately installed, and the vertical fine movement mechanism is mounted on the stage. Is directly supported.
[0011]
In the scanning mechanism for the scanning probe microscope, the horizontal fine movement mechanism and the vertical fine movement mechanism are divided and installed, and the vertical fine movement mechanism directly supports the stage. Therefore, the horizontal fine movement mechanism and the vertical fine movement mechanism are integrated. The rigidity of the vertical fine movement mechanism can be increased as compared with the conventional mechanism provided in. In particular, since the vertical fine movement mechanism alone directly supports the stage, the fine movement stroke can be made relatively long, and high rigidity can be obtained in the vertical direction. In addition, since the horizontal fine movement mechanism and the vertical fine movement mechanism are divided, they are arranged so that the height of the entire scanning mechanism is reduced as compared with the conventional example in which the vertical fine movement mechanism is provided directly and integrally on the horizontal fine movement mechanism. It is also possible.
[0012]
In the scanning mechanism for a scanning probe microscope of the present invention, it is preferable that the vertical fine movement mechanism is a laminated piezoelectric element.
That is, in the scanning mechanism for the scanning probe microscope, the vertical fine movement mechanism is a stacked piezoelectric element, so that the fine movement stroke can be set large and the size can be easily reduced.
[0013]
Further, the scanning mechanism for a scanning probe microscope of the present invention includes a vertical fine movement mechanism base supporting the vertical fine movement mechanism, and the horizontal fine movement mechanism suspends the vertical fine movement mechanism base so as to be movable in a horizontal direction. It is characterized by being supported in a state.
In other words, in the scanning mechanism for this scanning probe microscope, the horizontal fine movement mechanism directly supports the horizontal and vertical fine movement mechanisms because the horizontal fine movement mechanism supports the vertical fine movement mechanism base so as to be movable in the horizontal direction and in a suspended state. The height of the entire scanning mechanism can be made lower than in the case.
[0014]
A scanning probe microscope according to the present invention includes a stage on which an object to be measured is mounted, a probe that approaches or contacts the object to be measured, and a probe that is relatively moved in a three-dimensional direction with respect to the object to be measured. A scanning probe microscope including a scanning mechanism, wherein the scanning mechanism is the above-described scanning mechanism of the present invention.
That is, since this scanning probe microscope is provided with the above-described scanning mechanism of the present invention, it has the function of the above-described scanning mechanism, and the position of the probe, the sample and the stage and the high accuracy of the scanning are achieved by the highly rigid fine movement mechanism. Control becomes possible.
[0015]
Further, in the scanning probe microscope of the present invention, the stage is supported by a ball bearing provided on an upper part of the vertical fine movement mechanism, and a magnet is attached to one of the stage and the vertical fine movement mechanism and the other is provided to the other. A metal portion is provided and is attracted to each other by magnetic force.
That is, in this scanning probe microscope, since the stage is supported by the ball bearing provided on the upper part of the vertical fine movement mechanism, the stage is easy to move and rattling hardly occurs. Further, since the magnet is attached to one of the stage and the vertical fine movement mechanism and the other is provided with a metal part and is attracted to each other by magnetic force, the stage is not completely fixed, and the stage moves and the objective moves. Even if it comes into contact with a lens or the like, it can be easily removed to prevent damage.
[0016]
Further, the scanning probe microscope of the present invention includes an objective lens arranged below the stage and directly below the probe and condensing light from the object to be measured, and the vertical fine movement mechanism is provided around the objective lens. It is characterized by being arranged in.
That is, this scanning probe microscope is a combination of an inverted microscope in which the objective lens is arranged below the stage, and the vertical fine movement mechanism is arranged around the objective lens, so that the installation space for the objective lens is secured. Can be.
[0017]
Further, in the scanning probe microscope of the present invention, it is preferable that the vertical fine movement mechanism is a cylindrical laminated piezoelectric element having the objective lens arranged on a central axis.
That is, in this scanning probe microscope, when combined with an inverted microscope, the objective lens is arranged inside the cylindrical laminated piezoelectric element, so that higher rigidity and fine movement stroke in the vertical direction can be obtained. it can.
[0018]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a first embodiment of a scanning mechanism for a scanning probe microscope according to the present invention and a scanning probe microscope including the scanning mechanism will be described with reference to FIGS.
[0019]
As shown in FIG. 1, the scanning probe microscope according to the present embodiment irradiates a sample (measurement object) S of, for example, a fluorescently-stained living cell with evanescent light (near-field light) as excitation light. Is a scanning near-field microscope combined with an inverted microscope that collects and measures the local optical characteristics of the optical system with a lower objective lens L1. The scanning probe microscope includes a stage 2 on which a sample S is placed, a probe P whose tip is close to the sample S, and a movement of the probe P relative to the sample S within a two-dimensional plane to move the sample S. A coarse movement mechanism 27 such as a stepping motor which is brought close to the probe tip; and a scanning mechanism 8 which moves the probe P relative to the sample S in a three-dimensional direction so as to be finely movable with a higher resolution than the coarse movement mechanism 27. Have.
[0020]
The scanning mechanism 8 includes a horizontal fine movement mechanism 9 that can relatively move the probe P and the stage 2 within a two-dimensional plane (XY plane) and a direction perpendicular to the two-dimensional plane ( (A Z direction). That is, the horizontal fine movement mechanism 9 functions as an XY scanner which is an actuator capable of performing two-axis fine movement for performing scanning in a two-dimensional plane, and the vertical fine movement mechanism 10 controls the distance between the probe P and the sample S. It functions as a Z scanner which is an actuator for performing the operation.
[0021]
The horizontal fine movement mechanism 9 is fixed to a column of the inverted microscope 7 via an XY stage XY1 for positioning, and supports a vertical fine movement mechanism base 11 that supports a vertical fine movement mechanism 10 so as to be movable in the horizontal direction and in a suspended state. are doing. The vertical fine movement mechanism base 11 is provided with a central base part 11a to which the vertical fine movement mechanism 10 is fixed, and is provided around the central base part 11a and is erected upward, and the upper part protrudes outward in the radial direction to be horizontal. And a support portion 11b having an L-shaped cross section supported on the upper portion of the fine movement mechanism 9. A hole 11c through which the objective lens L1 can be inserted is formed in the center base portion 11a, and three vertical fine movement mechanisms 10 are erected around the objective lens L1. Therefore, in the present embodiment, the horizontal fine movement mechanism 9 and the vertical fine movement mechanism 10 are separately installed via the vertical fine movement mechanism base 11.
[0022]
The horizontal fine movement mechanism 9 is a scanner including a plurality of piezoelectric elements capable of scanning the stage 2 on a horizontal plane (two axes in the X direction and the Y direction) which is a two-dimensional plane. With flat scanner. The vertical fine movement mechanism 10 is a laminated piezoelectric element (piezo element) in which piezoelectric materials and electrodes are alternately laminated.
[0023]
As shown in FIG. 2, the vertical fine movement mechanism 10 directly supports the stage 2 by a ball bearing 12 provided on the upper part thereof. That is, an insulating seat 10b is fixed above the piezoelectric element main body 10a in the vertical fine movement mechanism 10, and an iron yoke 10c and a cylindrical magnet 10d are fixed inside the insulating seat 10b. On the upper surface of the yoke 10c, a groove 10e having a V-shaped cross section in which the ball bearing 12 is positioned and arranged is formed. An annular iron plate (metal portion) 2a is embedded on the lower surface of the stage 2 facing the yoke 10c and the magnet 10d. The iron plate 2a is also formed with a V-shaped groove 2b in which the ball bearing 12 is positioned and arranged. Therefore, the stage 2 and the vertical fine movement mechanism 10 are attracted to each other by magnetic force.
[0024]
In the probe P, the vicinity of the tip of the optical fiber is bent, the tip is sharpened, and a minute opening (not shown) on the order of nanometers is provided at the tip, and the other portion is made of a metal film (not shown). It has a coated structure. Further, a mirror surface for reflecting the laser beam for amplitude detection is formed on the back surface of the probe P.
The probe P has a base end fixed to the probe holder 13, and a minute vibration is applied by a vibrator 14 of a piezoelectric element provided on the probe holder 13. At this time, the amplitude of the probe P is detected by the optical head 15 having an amplitude detecting light emitting unit LD and an amplitude detecting light receiving unit PD and using an optical lever system.
The optical head 15 and the probe holder 13 are fixed to the coarse movement mechanism 27 via an XY stage XY2 for positioning the probe tip and the objective lens L1 at the center of the optical axis.
Further, the proximal end of the probe P is optically coupled to the laser light source 16 so that an evanescent field is formed near the distal opening of the probe P.
[0025]
The objective lens L <b> 1 is disposed on the side facing the probe P with the sample S interposed therebetween as described above, and is provided on the objective lens driving mechanism 17 installed on the inverted microscope 7. The objective lens driving mechanism 17 is composed of a coarse movement feed screw mechanism 18 having a hollow portion at the center to secure an optical path, and a fine movement multilayer piezoelectric element 19 formed in a cylindrical shape.
[0026]
A dichroic mirror M and an absorption filter F are provided below the objective lens L1 and in the cavity 7a in the inverted microscope 7, and cut out the excitation light from the light collected by the objective lens L1. The fluorescent component is disposed so as to be reflected to an imaging lens L2 provided outside. This detection light is formed into an image by the imaging lens L2, and is further introduced to the photodetector 3. The photodetector 3 is set so that the optical axis is aligned with the objective lens L1 in focus. The photodetector 3 uses an avalanche photodiode whose light receiving surface is as small as several hundred μm. In this photodetector 3, a slight defocus causes a decrease in measurement efficiency because the light receiving surface is small. As the photodetector 3, a photomultiplier, a spectroscope, or the like is also used.
[0027]
The coarse movement mechanism 27, the scanning mechanism (the horizontal fine movement mechanism 9 and the vertical fine movement mechanism 10) 8, and the objective lens driving mechanism 17 are all electrically connected to a control unit C such as a CPU. Is controlled to be moved to the position.
[0028]
Next, a measurement method using the scanning probe device of the present embodiment will be described.
[0029]
First, the objective lens L1 is focused on the surface of the sample S by the coarse movement feed screw mechanism 18 of the objective lens driving mechanism 17. Next, the probe tip is positioned at the center of the optical axis of the objective lens L1 by the XY stage XY2 on the probe side. Next, distance control between the tip of the probe and the sample S is performed. That is, while the probe P is vibrated near the resonance frequency by the vibrator 14, the amount of attenuation of the amplitude when the probe P is brought close to the sample S is monitored, and the vertical fine movement mechanism 10 is operated so that the amplitude becomes constant. Then, after the sample S is brought close to the probe tip to an area where an atomic force acts between or contacts the sample S and the probe tip by the coarse movement mechanism 27, the vertical fine movement mechanism 10 causes the sample S to move between the sample S and the probe. Is controlled so that is the optimum operating point. At this time, the focus position adjusted before the measurement is shifted by an amount corresponding to the operation of the vertical fine movement mechanism 10. In order to correct this shift amount, the fine-movement laminated piezoelectric element 19 of the objective lens drive mechanism 17 is changed by the movement amount of the vertical fine movement mechanism 10, and when the approach is completed, the focus of the objective lens L1 is shifted to the light emitting point at the tip of the probe. Set to match.
[0030]
After correcting the amount of displacement at the time of approaching by the above operation, the positional relationship between the tip of the probe and the objective lens L1 is kept constant, so that the voltage applied to the fine-movement laminated piezoelectric element 19 is kept constant. A scan is performed while keeping it. In this state, the sample is scanned in a two-dimensional plane using the horizontal fine movement mechanism 9 and the transmitted light at that time is collected, whereby the two-dimensional intensity distribution of the optical signal is measured. Further, if the voltage applied to the vertical fine movement mechanism 10 is monitored, an uneven image of the sample S can be measured at the same time.
[0031]
In addition, as a method of correcting the defocus, the displacement of the vertical fine movement mechanism 10 is measured by, for example, a capacitance type displacement sensor 20 attached to the vertical fine movement mechanism 10, and the control unit C outputs a displacement signal obtained from the displacement sensor 20. A closed-loop system is used in which the amount of deviation is recognized based on the amount of movement, and the amount of movement of the vertical fine movement mechanism 10 is corrected by feedback. By attaching this displacement sensor 20, hysteresis and creep of the piezoelectric element can be prevented, and the measurement accuracy can be improved. Note that the displacement sensor is not limited to the capacitance type, and another type such as an optical interference method can be used.
[0032]
In the scanning probe microscope of the present embodiment, the horizontal fine movement mechanism 9 and the vertical fine movement mechanism 10 are divided and installed, and the vertical fine movement mechanism 10 directly supports the stage 2. The rigidity of the vertical fine movement mechanism 10 can be increased as compared with a conventional mechanism in which the vertical movement mechanism 10 is integrally provided. In particular, since the vertical fine movement mechanism 10 directly supports the stage 2 alone, the fine movement stroke can be relatively long, and high rigidity can be obtained in the vertical direction.
[0033]
Further, since the vertical fine movement mechanism 10 is a stacked piezoelectric element, the fine movement stroke can be set large, and the size can be easily reduced. Furthermore, the horizontal fine movement mechanism 9 and the vertical fine movement mechanism 10 are divided, and in particular, the horizontal fine movement mechanism 9 supports the vertical fine movement mechanism base 11 so as to be movable in the horizontal direction and in a suspended state. As compared with the conventional example in which the vertical fine movement mechanism 10 is provided directly and integrally on the scanning mechanism 9, the entire height of the scanning mechanism 8 can be reduced.
[0034]
Further, since the stage 2 is supported by the ball bearing 12 provided on the upper part of the vertical fine movement mechanism 10, the stage 2 is easy to move, and the backlash hardly occurs. Further, since the magnet 10d is attached to the vertical fine movement mechanism 10 and the iron plate 2a is provided on the stage 2 and are attracted to each other by magnetic force, the stage 2 is not completely fixed and the stage 2 moves. Therefore, even if it comes into contact with the objective lens L1 or the like, it can be easily detached to prevent damage.
[0035]
Next, second and third embodiments of the scanning probe microscope according to the present invention will be described with reference to FIGS. In the following description, the same components as those described in the above embodiment are denoted by the same reference numerals, and description thereof will be omitted.
[0036]
The difference between the second embodiment and the first embodiment is that in the first embodiment, the stage 2 is supported by a vertical fine movement mechanism 10 composed of three laminated piezoelectric elements arranged around the objective lens L1. On the other hand, in the scanning mechanism 28 of the second embodiment, as shown in FIG. 3, the stage 2 is supported by the vertical fine movement mechanism 30 which is a cylindrical laminated piezoelectric element having the objective lens L1 arranged on the central axis. That is the point.
[0037]
That is, in the present embodiment, the stage 2 is supported and finely moved by one vertical fine movement mechanism 30, and the objective lens L1 is arranged inside the cylindrical laminated piezoelectric element. Rigidity and fine movement stroke can be obtained.
[0038]
The difference between the third embodiment and the first embodiment is that, in the first embodiment, the horizontal fine movement mechanism 9 is located below the stage 2 and the stage 2 is moved together with the vertical fine movement mechanism 10 via the vertical fine movement mechanism base 11. On the other hand, in the scanning mechanism 38 of the third embodiment, as shown in FIG. 4, the vertical fine movement mechanism 10 is set up on the inverted microscope 7 via the positioning XY stage XY1, and the horizontal fine movement is performed. The mechanism 49 is arranged above the stage 2 and connected to the probe P so that the probe P can move with respect to the stage 2. That is, in this embodiment, the horizontal fine movement mechanism 49 is of a lever scan type in which the probe P is directly moved. The horizontal fine movement mechanism 49 is connected to the coarse movement mechanism 27 via an XY stage XY2 for positioning the tip of the probe with respect to the optical axis of the objective lens L1.
Also in the present embodiment, since the stage 2 is directly supported by the vertical fine movement mechanism 10, high rigidity can be obtained in the vertical direction.
[0039]
The technical scope of the present invention is not limited to the above-described embodiment, and various changes can be made without departing from the spirit of the present invention.
[0040]
For example, in the first embodiment, the vertical fine movement mechanism 10 is a laminated piezoelectric element, but may be a simple cylindrical piezoelectric element. In this case, as described above, the fine movement stroke in the vertical direction is disadvantageous as compared with the stacked piezoelectric element.
Also in the third embodiment, the vertical fine movement mechanism 10 may be a cylindrical laminated piezoelectric element as in the second embodiment.
[0041]
Further, as another means of controlling the distance between the tip of the probe and the sample S, a method of controlling the deflection so as to be constant without vibrating the probe, vibrating the probe in the horizontal direction with respect to the sample, A method in which the attenuation of the probe due to shear force is controlled to be zero, a metal coating is applied to the probe, a tunnel current is generated between the probe and the conductive sample, and control is performed using the distance dependence of the tunnel current. A method in which evanescent light generated at the tip of the probe is scattered on the sample surface, the intensity of the scattered light is measured, and control is performed using the distance dependence of the evanescent field can be considered.
[0042]
Further, the shape of the probe is not limited to the bent type shown in each of the above embodiments, but may be a straight type probe or a cantilever type probe having an optical waveguide formed thereon. Further, as a method of detecting the amplitude of the probe, in addition to the optical lever method, a method of fixing the probe to a quartz oscillator or a piezoelectric body and detecting the amplitude by utilizing a change in the amount of charge can be used. .
In each of the above embodiments, the scanning probe microscope is applied to the scanning near-field microscope. However, the scanning probe microscope may be applied to other scanning probe microscopes. For example, the present invention may be applied to an AFM (atomic force microscope) or the like.
[0043]
【The invention's effect】
According to the present invention, the following effects can be obtained.
That is, according to the scanning probe microscope of the present invention, the horizontal fine movement mechanism and the vertical fine movement mechanism are separately installed, and the vertical fine movement mechanism directly supports the stage, thereby obtaining high rigidity in the vertical direction. And the vertical fine movement stroke can be lengthened. Further, as compared with the conventional example in which the vertical fine movement mechanism is directly and integrally provided on the horizontal fine movement mechanism, it is possible to arrange the scanning mechanism so that the height of the whole scanning mechanism is reduced, and the combination with the inverted microscope becomes easy. Therefore, in the present invention, the position and scanning of the probe, sample, and stage can be controlled with high precision by the highly rigid fine movement mechanism. When applied to a scanning near-field microscope, light collection efficiency, resolution, and light detection It is possible to further improve the light receiving efficiency and the S / N ratio of the device, and to realize more accurate and accurate measurement.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing an overall configuration of a scanning probe microscope according to a first embodiment of the present invention.
FIG. 2 is an enlarged sectional view showing an upper part of a vertical fine movement mechanism in the scanning probe microscope according to the first embodiment of the present invention.
FIG. 3 is a schematic diagram showing a configuration of a main part in a scanning probe microscope according to a second embodiment of the present invention.
FIG. 4 is a schematic diagram showing a configuration of a main part in a scanning probe microscope according to a third embodiment of the present invention.
FIG. 5 is a schematic diagram showing the overall configuration of a conventional scanning probe microscope according to the present invention.
[Explanation of symbols]
2 Stage 2a Iron plate (metal part)
7 Inverted microscope 8, 28, 38 Scanning mechanism 9, 49 Horizontal fine movement mechanism 10, 30 Vertical fine movement mechanism 10d Magnet 11 Vertical fine movement mechanism base 12 Ball bearing 17 Objective lens drive mechanism 27 Coarse movement mechanism C Control unit L1 Objective lens S Sample ( DUT)
P probe

Claims (7)

The probe is attached to a scanning probe microscope having a stage on which an object to be measured is mounted and a probe that comes close to or comes into contact with the object to be measured, and moves the probe relative to the object to be measured in a three-dimensional direction. Scanning mechanism,
A horizontal fine movement mechanism capable of relatively moving the probe and the stage in a two-dimensional plane,
A vertical fine movement mechanism capable of relatively moving the probe and the stage in a direction perpendicular to the two-dimensional plane,
The horizontal fine movement mechanism and the vertical fine movement mechanism are divided and installed,
A scanning mechanism for a scanning probe microscope, wherein the vertical fine movement mechanism directly supports the stage. The scanning mechanism for a scanning probe microscope according to claim 1,
A scanning mechanism for a scanning probe microscope, wherein the vertical fine movement mechanism is a laminated piezoelectric element. A scanning mechanism for a scanning probe microscope according to claim 1,
A vertical fine movement mechanism supporting the vertical fine movement mechanism,
A scanning mechanism for a scanning probe microscope, wherein the horizontal fine movement mechanism supports the vertical fine movement mechanism base so as to be movable in a horizontal direction and in a suspended state. A scanning probe including a stage for mounting an object to be measured, a probe for approaching or contacting the object to be measured, and a scanning mechanism for moving the probe relative to the object to be measured in a three-dimensional direction. A microscope,
The scanning probe microscope according to claim 1, wherein the scanning mechanism is the scanning mechanism according to claim 1. The scanning probe microscope according to claim 4,
The stage is supported by a ball bearing provided above the vertical fine movement mechanism,
A scanning probe device, wherein a magnet is attached to one of the stage and the vertical fine movement mechanism, and a metal part is provided on the other, and are attracted to each other by magnetic force. The scanning probe microscope according to claim 4 or 5,
An objective lens is provided below the stage and directly below the probe to collect light from the object to be measured,
The scanning probe microscope, wherein the vertical fine movement mechanism is arranged around the objective lens. The scanning probe microscope according to claim 6,
A scanning probe microscope, wherein the vertical fine movement mechanism is a cylindrical laminated piezoelectric element in which the objective lens is arranged on a central axis.

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