JP2004257310A - Pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small pump capable of being used for fuel supply of a fuel cell, air blowing, medical purpose or the like. <P>SOLUTION: This pump has a pump chamber 18 communicating with the outside through valve mechanisms 14 and 16, part of the pump chamber 18 is formed in a movable body section 12a, and the pump performs a pump action by reciprocating the movable body section 12a in the direction of changing volume of the pump chamber. A thermally deforming material 20 for generating a thermal deformation force in response to temperature change is provided so that the movable body section 12a can be pushed and moved by the thermal deformation force by the thermally deforming material 20. The pump has a thermal control means 24 for heating and/or cooling the thermally deforming material 20, making the thermally deforming material 20 generate the thermal deformation force, and moving the movable body section 12a with the thermal deformation force. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a pump that can be used for transporting a fluid, and more particularly, to a small pump that can be used for an air blower of a portable fuel cell, a medical liquid pump, a cooling device of a notebook computer, and the like.
[0002]
[Prior art]
Among pumps used for transporting gas or liquid, a method of providing a pump function by repeatedly providing expansion or contraction of a pump chamber by movably providing a device wall or a partition wall constituting a pump chamber such as a diaphragm pump. This is effective as a method for forming a small pump. Conventionally, a motor or a solenoid is used as a drive source for changing the volume of the pump chamber to perform a pumping operation. For example, the pump chamber is displaced by driving a partition wall using magnetic attraction and repulsive force. It has been considered that the pump action is changed to change the pressure (for example, see Patent Document 1).
[0003]
[Patent Document 1]
JP 2001-50165 A
[Problems to be solved by the invention]
As described above, in a conventional apparatus using a motor or a solenoid as a method of expanding and contracting the pump chamber itself and changing the volume of the pump chamber, the size of the motor or solenoid used as a drive source hinders miniaturization of the pump. are doing. In fuel cells or medical devices, very small pumps are required for pumping air and liquids. For such applications, depending on the configuration of conventional motors and pumps using a solenoid as a drive source. Is not satisfied with the situation.
[0005]
As a method of reducing the size of the pump, a piezoelectric element may be used as a drive source instead of a motor or a solenoid. However, the piezoelectric element has a problem that the driving power supply is complicated and expensive, and the amount of deformation of the piezoelectric element is extremely small, so that a constant flow rate can be obtained in a short time. Therefore, there is a problem that it is not suitable for downsizing of the pump.
[0006]
The present invention can effectively reduce the size and thickness of a pump that performs a pumping operation by changing the volume of the pump chamber, and can be suitably used for air supply of a fuel cell, medical use, and the like. It is intended to provide a pump.
[0007]
[Means for Solving the Problems]
The present invention has the following configuration to achieve the above object.
That is, a pump chamber that communicates with the outside via a valve mechanism is provided, a part of the pump chamber is formed in the movable body, and the pump action is performed by reciprocating the movable body in a direction that changes the volume of the pump chamber. In the pump to be performed, a heat-deformable material that generates a heat-deformation force with a temperature change is provided so that the movable body part can be pushed by the heat-deformation force of the heat-deformation material, and the heat-deformation material is heated and / or cooled. Then, a heat control means for causing the heat deformable material to generate a heat deformable force and moving the movable portion by the heat deformable force is provided.
Further, the pump chamber is enclosed by a main body case having a predetermined rigidity, and a diaphragm which is a movable body part whose peripheral edge is attached to the main body case so as to be bent and which can move toward and away from the main body case. Since it is configured as a space and the heat-deformable material is attached across the body case and the outer surface of the diaphragm, it can be provided as an extremely thin and small pump.
[0008]
Further, the heat deformable material is made of a bimetal, and the heat deformable material is made of a shape memory material such as a shape memory alloy and a shape memory resin.
When a shape memory material is used as the heat-deformable material, a bias spring for applying an elastic bias force in a direction of reciprocating the movable body portion has an elastic force when the shape memory material is elastically deformed. When the shape memory material is plastically deformed, it is preferable that the shape memory material is adjusted so as to have an elastic force capable of plastically deforming the shape memory material.
[0009]
Further, the heat control means is composed of a resistor which generates heat by passing a current, and a power supply for supplying a current to the resistor and a control means for controlling the supply of the current are provided. In this case, the heating / cooling direction is changed by a Peltier element, and a power supply for supplying a current to the Peltier element and a control unit for controlling the supply of the power are provided.
Further, the heat control means is attached to a fixed portion other than the movable body portion of the pump chamber, and conducts heat conduction from the heat deformable material to the movable body portion between the heat deformable material and the movable body portion. By providing the heat insulating material to suppress, the thermal deformation of the heat deformable material can be effectively developed.
Further, the valve mechanism is provided with a suction valve that opens only in a direction in which fluid flows into the pump chamber, and a discharge valve that opens only in a direction in which fluid flows out of the pump chamber.
[0010]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. (First Embodiment)
FIG. 1 is an explanatory diagram showing a configuration of a first embodiment of a pump according to the present invention, and shows a configuration of a pump and an operation state thereof.
In the pump of the present embodiment, a diaphragm 12 as a movable portion is attached to an opening of a main body case 10 having a predetermined rigidity and formed in a box shape having a circular bottom surface and an open top surface so as to cover the opening. Things. The diaphragm 12 is formed on a movable body 12a having a circular flat shape at a portion opposed to the bottom surface of the main body case 10, and has elasticity and flexibility in which a peripheral edge of the movable body 12a is attached to the main body case 10. It is formed on the bent body portion 12b. The bent portion 12b is clamped at the periphery by a flange 10a provided at the periphery of the main body case 10, and is attached in an airtightly sealed manner.
[0011]
In the pump of the present embodiment, a region surrounded by the main body case 10 and the diaphragm 12 is a pump chamber 18 through which gas or liquid flows. A suction hole 14a communicating with the pump chamber 18 is provided at one end of the main body case 10 so as to penetrate through the flange 10a so that the pump chamber 18 communicates with the outside to perform a fluid suction / discharge operation. At an end of the suction hole 14a in the pump chamber 18, a suction valve 14 that allows only fluid flow from the suction hole 14a toward the inside of the pump chamber 18 is provided. On the other end side of the main body case 10, a discharge hole 16a communicating with the pump chamber 18 is provided through the flange 10a. On the outer surface side of the main body case 10 of the discharge hole 16a, a discharge valve 16 that allows only the flow of the fluid in the direction in which the fluid is discharged from the pump chamber 18 is provided.
[0012]
Each of the suction valve 14 and the discharge valve 16 is provided as a valve mechanism having a check function, and performs a pump suction / discharge function with a change in the volume of the pump chamber 18. In the present embodiment, the suction valve 14 and the discharge valve 16 are provided as a check valve structure that performs a check using the pressure of the fluid, but the valve mechanism is not necessarily limited to these configurations.
[0013]
In FIG. 1, reference numeral 20 denotes a thermally deformable member that pushes the diaphragm 12 toward the bottom surface of the main body case 10. The heat-deformable material is such that when the temperature of the heat-deformable material changes, deformation occurs due to the change in the temperature, and the heat-deformable material is provided so as to push the diaphragm 12 using the deforming force. In this embodiment, a bimetal is used as the thermally deformable material 20. The bimetal is formed by laminating two types of metal plates having different coefficients of thermal expansion. In the present embodiment, the bimetal is formed in a thin plate shape of about 2 mm, and the base of the heat deformable material 20 is connected to the flange of the main body case 10 as shown in the figure. 10a is fixed to the upper end, and the tip is fixed to the outer surface at the center of the diaphragm 12.
[0014]
Reference numeral 22 denotes a heat insulating material provided to insulate between the thermally deformable material 20 and the diaphragm 12. In the present embodiment, substantially the entire outer surface of the diaphragm 12 is covered with the heat insulating material 22, and the other end of the heat deformable material 20 is fixed to a projection provided at the center of the thick heat insulating material 22. Since the thermally deformable material 20 undergoes thermal deformation by heating or cooling, in order to efficiently thermally deform the thermally deformable material 20, it is necessary to prevent heat from being transmitted from the thermally deformable material 20 to the diaphragm 12 or the like. Is good. Further, if the diaphragm 12 is repeatedly heated or the like, there is a possibility that the diaphragm 12 is deteriorated or the like. Therefore, the heat insulating material 22 is provided to avoid these problems. As the thermal conductivity of the heat insulating material 22, a material having a thermal conductivity of about 1/10 or less of the thermal conductivity of the thermally deformable material 20 may be used.
[0015]
Reference numeral 24 denotes a resistor as a heat control unit for heating the heat deformable material 20. The resistor 24 is for heating the thermally deformable material 20 and is formed as a heating element that generates heat by passing an electric current. In the present embodiment, the resistor 24 is attached on the base portion of the thermally deformable material 20 fixed to the flange 10a of the main body case 10 so as to be attached. Thus, when the resistor 24 generates heat, the heat is transmitted to the thermally deformable material 20. Reference numeral 26 denotes a power supply electrically connected to the resistor 24, and reference numeral 28 denotes a switch for ON-OFF control of current flow to the resistor 24.
[0016]
The pump according to the present embodiment performs a pumping operation by controlling ON / OFF of energization of the resistor 24 by the control unit. That is, FIG. 1A shows a state in which no current flows through the resistor 24 when the switch 28 is OFF, and the resistor 24 does not generate heat. In this state, the heat-deformable material 20 is set so that the diaphragm 12 is separated from the bottom of the main body case 10.
On the other hand, FIG. 1B shows a state in which the switch 28 is turned on and a current flows through the resistor 24. When a current flows through the resistor 24, the resistor 24 generates heat, and the thermally deformable material 20 is heated and thermally deformed to press the diaphragm 12 against the bottom of the main body case 10. Since the bimetal bends toward a metal having a small coefficient of thermal expansion when heated, the heat-deformable material 20 is attached in such a direction as to push the diaphragm 12 during heating. Thus, the diaphragm 12 can be pushed using the heat deformation force of the heat deformation material 20. When the heating of the heat-deformable material 20 is started by the resistor 24, the temperature gradually rises, and together with this, the diaphragm 12 starts to be pushed toward the main body case 10 until the diaphragm 12 comes into contact with the bottom of the main body case 10. Deform.
[0017]
FIG. 1A shows a state in which the volume of the pump chamber 18 has increased, and FIG. 1B shows a state in which the volume of the pump chamber 18 has decreased. When the heating by the resistor 24 is turned off, the temperature of the heat-deformable material 20 decreases and returns to the state shown in FIG. That is, by performing ON-OFF control of the current to the resistor 24, the state in FIG. 1A and the state in FIG. 1B, that is, the state in which the volume of the pump chamber 18 is increased and the state in which the pump chamber 18 is reduced are alternately performed. Will repeat.
In the pump of the present embodiment, the fluid is sucked from the suction valve 14 into the pump chamber 18 by the action of the suction valve 14 and the discharge valve 16 when shifting from the state of FIG. 1B to the state of FIG. The fluid in the pump chamber 18 is discharged from the discharge valve 16 when shifting from the state of FIG. 1A to the state of FIG. Thus, the pumping action is performed by changing the volume of the pump chamber 18.
[0018]
In the pump of the present embodiment, the thermally deformable material 20 made of bimetal returns to the state shown in FIG. 1A from the state in which the diaphragm 12 is pressed by natural cooling. Therefore, a certain period of time is required before returning to the state shown in FIG. Also, when heating the resistor 24 and pushing the diaphragm 12, the diaphragm 12 can be moved slowly by gradually heating the heat-deformable material 20. As described above, the pump according to the present embodiment is effective when used as a pump having a very low fluid flow rate and a small pressure change.
[0019]
(Second embodiment)
FIG. 2 is an explanatory diagram showing the configuration of the second embodiment of the pump according to the present invention. In the first embodiment, the thermally deformable member 20 is slowly deformed. The pump according to the present embodiment is characterized in that the Peltier element is used as the heat control means so as to enhance the deformation response of the thermally deformable material 20.
Also in the present embodiment, the configuration of the main body case 10, the diaphragm 12, the suction valve 14, the discharge valve 16, the heat deformable member 20, and the like, which are the components of the pump, is the same as that of the first embodiment. Note that, in the present embodiment, the heat deformable material 20 made of bimetal is disposed so as to cross the main body case 10, and both ends of the heat deformable material 20 are fixed to the flanges 10 a at positions facing the main body case 10, respectively. . As a method of attaching the heat-deformable material 20 to the main body case 10, the heat-deformable material 20 may be attached in a double-supported manner across the main body case 10, or one end of the heat-deformable material 20 may be attached as in the first embodiment. It may be of a cantilever type attached to the main body case 10.
[0020]
In FIG. 2, reference numeral 30 denotes a Peltier element used for heating and cooling the thermally deformable material 20. As shown in the figure, the Peltier element 30 is mounted on the base of the thermally deformable material 20 fixed to the flange 10a of the main body case 10 so as to make surface contact with the thermally deformable material 20. Since the heat-deformable material 20 is arranged across the main body case 10, the Peltier elements 30, 30 are respectively attached to the base positions of the heat-deformable material 20 fixed to the flange 10a.
The Peltier element 30 is such that one end face of the element becomes a heating surface or a cooling surface by switching a current flowing direction to the opposite direction. Therefore, the Peltier device 30 is attached to the thermally deformable material 20 so as to make surface contact, and the direction of the current flowing through the Peltier device 30 is reversed, whereby the thermally deformable material 20 is forcibly heated or cooled.
[0021]
Reference numeral 26 denotes a power supply which is electrically connected to the two Peltier devices 30 and 30, respectively. The power supply 26 is provided with control means for reversing the direction of current flow. Reference numeral 28 denotes a switch for turning ON / OFF the power supply from the power supply 26.
FIG. 2A shows a state in which a current is flowing through the Peltier elements 30, 30 so that the surfaces of the Peltier elements 30, 30 that are in contact with the thermally deformable material 20 become cooling surfaces. In the present embodiment, the heat deformation direction of the heat deformation material 20 is set so that the diaphragm 12 moves in a direction away from the bottom surface of the main body case 10 when the heat deformation material 20 is being cooled.
On the other hand, FIG. 2B shows a state in which a current is flowing such that the surfaces of the Peltier elements 30 and 30 that are in contact with the thermally deformable material 20 become the heating surfaces. When the heat-deformable material 20 is heated, the heat-deformable material 20 is deformed in the opposite direction to the state shown in FIG. 2A, and the diaphragm 12 is pressed against the bottom surface of the main body case 10.
[0022]
As in the first embodiment, the pump according to the present embodiment uses the heat deformation force of the heat deformation material 20 to alternately repeat the expansion and contraction of the volume of the pump chamber 18. Thereby, a pump action can be performed. 2A shows a state in which fluid is sucked from the suction valve 14 into the pump chamber 18, and FIG. 2B shows a state in which fluid in the pump chamber 18 is discharged from the discharge valve 16.
In the pump of the present embodiment, the use of the Peltier element 30 makes it possible to forcibly heat and cool the thermally deformable material 20, so that the diaphragm 12 is formed by the thermally deformable material 20 as shown in FIG. After the pressing, the heat deformable material 20 is cooled, so that the state shown in FIG. 2A can be converted in a short time. This allows high speed operation of the pump.
[0023]
In the above example, when the heat deformable material 20 is cooled, the pump chamber 18 is in an expanded state (the state of FIG. 2A), and when the heat deformable material 20 is heated, the pump chamber 18 is contracted (FIG. 2). (State (b)), the heat-deformable material 20 is set. However, the heat-deformation direction of the heat-deformable material 20 can be appropriately selected. Contrary to the above example, when the heat-deformable material 20 is heated, It is also possible to set the pump chamber 18 to expand so that the pump chamber 18 contracts when the thermally deformable material 20 is cooled.
[0024]
(Third embodiment)
FIG. 3 is an explanatory diagram showing the configuration of the third embodiment of the pump according to the present invention. The pump of the present embodiment is characterized in that a shape memory alloy is used as the heat deformable material 20. That is, in the pump shown in FIG. 3, the main body case 10, the diaphragm 12, the suction valve 14, the discharge valve 16 and the like are the same as those of the respective components in the second embodiment, and a shape memory alloy is used as the heat deformable material 20. Is different. The heat deformable material 20 made of a shape memory alloy is disposed so as to cross the main body case 10, and at the base position of the heat deformable material 20 attaching the heat deformable material 20 to the flange 10 a of the main body case 10, Similarly, a Peltier element 30 is attached by surface contact. Reference numeral 26 denotes a power supply provided with a control means for controlling the direction of current flow to the Peltier elements 30, 30, and reference numeral 28 denotes a switch for turning on and off the power supply.
[0025]
Reference numeral 10b is a lid attached to the opening side of the main body case 10 so as to include the diaphragm 12 and the thermally deformable material 20. Reference numeral 32 denotes a biasing spring provided between the inner surface of the lid 10b and the thermally deformable material 20 so as to bias the thermally deformable material 20 toward the lid 10b. The spring 32 is arranged so that an urging force acts on the central portion of the thermally deformable material 20.
Shape memory alloys have the property of being elastically deformed when heated above a predetermined temperature and plastically deformed below a predetermined temperature. In the pump of this embodiment, when the heat-deformable material 20 becomes higher than a predetermined temperature, it is elastically deformed to the state shown in FIG. 3A, and when the heat-deformed material 20 becomes lower than the predetermined temperature, it becomes plastically deformed as shown in FIG. ) Is set.
[0026]
That is, the state of FIG. 3A is a state in which the thermally deformable material 20 is elastically deformed, and the elastic force of the thermally deformable material 20 is compressed so as to compress the spring 32 against the elastic force of the spring 32. Acts, the diaphragm 12 is separated from the bottom surface of the main body case 10. On the other hand, the state of FIG. 3B is a state in which the thermally deformable material 20 is plastically deformed, and the thermally deformable material 20 does not exhibit an elastic force. It is in a state of being pressed against the bottom surface.
Since the Peltier element 30 is attached to the heat-deformable material 20 in surface contact, the direction of the current flowing from the power supply 26 to the Peltier element 30 is reversed by the control means, thereby heating the heat-deformable material 20 (FIG. 3). 3A) or the heat-deformable material 20 can be cooled (the state of FIG. 3B). By switching between heating and cooling of the heat-deformable material 20, the heat-deformable material 20 is brought into an elastically deformed state and plastically deformed. It can be alternately switched to the deformed state.
[0027]
The pump of the present embodiment can also switch between a state in which the diaphragm 12 is separated from the bottom surface of the main body case 10 and a state in which the diaphragm 12 is pressed against the bottom surface of the main body case 10 by utilizing the heat deformation force of the heat deformation material 20. As a result, a change in the volume of the pump chamber 18 can be caused to perform the pump action.
In this embodiment, the Peltier element 30 is used to forcibly heat or cool the heat-deformable material 20 to switch the heat-deformable material 20 between the elastic deformation state and the plastic deformation state. As in the embodiment, a method in which the heat deformable material 20 is heated by a resistor may be used. In the case of the method using the Peltier element 30, the responsiveness of the thermally deformable material 20 can be improved as compared with the method of heating with a resistor.
[0028]
In the above example, the state is set so that the state shown in FIG. 3A is obtained when the thermally deformable material 20 is elastically deformed. However, when the thermally deformable material 20 is elastically deformed, the state shown in FIG. As shown in the figure, the diaphragm 12 is pressed against the bottom surface of the main body case 10 by its elastic force, and when the thermally deformable material 20 is plastically deformed, the diaphragm 12 is separated from the main body case 10 as shown in FIG. It is also possible to set it to do. In this case, for example, the bias spring 32 is set as a contraction spring, and when the thermally deformable material 20 is plastically deformed, the diaphragm 12 is lifted by the spring 32 so that the thermally deformable material 20 is elastically deformed. In this case, the diaphragm 12 may be pressed against the bottom surface of the main body case 10 by the elastic force of the thermally deformable material 20 against the contraction force of the spring 32.
In any case, in the pump of the present embodiment, the diaphragm 12 performs a predetermined operation by adjusting the elastic force when the heat-deformable material 20 is elastically deformed and the elastic force of the spring 32 used for bias. It may be set as follows.
[0029]
The pump shown in each of the above-described embodiments is characterized in that the volume of the pump chamber 18 is changed by using the heat deformation force of the heat deformation material 20 so that the pump action is achieved. The heat-deformable material 20 is arranged so that its base is fixed to a flange 10 a provided on the peripheral edge of the main body case 10, so that the heat-deformable material 20 is efficiently deformed on the deformed end side. Further, a shape memory material such as a bimetal, a shape memory alloy, and a shape memory resin used as the heat deformable material 20 can be formed as a thin member having a thickness of about 2 mm, thereby reducing the thickness and size of the pump. Can be suitably achieved. In addition, when the heat deformable material 20 is set to deform from a flat state to a curved state when thermally deformed, the deformation of the heat deformable material 20 can efficiently act on the volume change of the pump chamber 18. At the same time, it becomes possible to efficiently reduce the thickness and size of the pump as compared with conventional pumps using a motor or a solenoid as a drive source.
[0030]
Further, since the resistor 24 and the Peltier element 30 as heat control means for thermally deforming the heat deformable material 20 can be formed thin, the pump can be effectively made thin and small in this respect as well. Can be.
Further, the control means for controlling the energization of the resistor 24 and the Peltier element 30 and the electric circuit such as the power supply 26 have a simple configuration, and the number of components of the pump is small, so that assembly is easy and inexpensive. And the number of device failures can be reduced. Because it can be manufactured at low cost, it can be used as a single-use pump for injecting a drug solution with a medical device, for example. This is a usage mode in which a shape memory resin that cannot be re-deformed is used, and an operation of pushing a movable body portion such as a diaphragm only once is performed to dispose it.
[0031]
In the above-described embodiment, a flat shape is used as the heat-deformable material 20 in order to form the heat-deformable material 20 in a thin and compact form. However, the present invention is not limited to this. For example, it is also possible to make the heat-deformable material 20 into a three-dimensional shape, and to manufacture the heat-deformable material 20 so that the thermal deformation caused by the heat-deformable material 20 becomes larger due to a temperature change. In some applications, the thermal deformation of the thermally deformable material 20 can be made large and the thermal deformation can be used, and the present invention can of course be used in such applications. Further, thermal deformation can be generated very slowly, and a pump for transporting a fluid by such thermal deformation can be effectively used for a purpose of transporting a fluid slowly.
[0032]
【The invention's effect】
As described above, the pump according to the present invention is configured to change the volume of the pump chamber by utilizing the heat deformation force of the heat deformation material and thereby perform the pump action, thereby making the pump extremely small and thin. It is possible to obtain a remarkable effect that it can be suitably used for fuel supply of fuel cells, air blowing, and the like.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram showing a configuration of a first embodiment of a pump according to the present invention.
FIG. 2 is an explanatory diagram showing a configuration of a pump according to a second embodiment of the present invention.
FIG. 3 is an explanatory diagram showing a configuration of a third embodiment of the pump according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Main body case 10a Flange 10b Lid 12 Diaphragm 12a Movable body part 12b Bent body part 14 Suction valve 14a Suction hole 16 Drain valve 16a Drain hole 18 Pump room 20 Thermal deformation material 22 Insulation material 24 Resistor 26 Power supply 28 Switch 30 Peltier element 32 Spring

Claims (10)

A pump that includes a pump chamber that communicates with the outside via a valve mechanism, a part of the pump chamber is formed in the movable body, and the pump performs a pump action by reciprocating the movable body in a direction that changes the volume of the pump chamber. At
A heat-deformable material that generates a heat-deformation force with a temperature change is provided so that the movable body part can be pushed by the heat-deformation force of the heat-deformable material,
A pump provided with heat control means for heating and / or cooling the heat-deformable material, causing the heat-deformable material to exhibit a heat-deformation force, and moving the movable body part by the heat-deformation force. The pump chamber is configured as a space enclosed by a main body case having a predetermined rigidity, and a diaphragm that is a movable body part whose peripheral portion is attached to the main body case so as to be bent and is movable toward and away from the main body case. And
The pump according to claim 1, wherein the heat-deformable material is attached between the body case and the outer surface of the diaphragm. 3. The pump according to claim 1, wherein the heat deformable material is made of a bimetal. 3. The pump according to claim 1, wherein the heat deformable material is made of a shape memory material. A bias spring for applying an elastic bias force in a direction in which the movable body reciprocates,
The shape memory material is weaker than the elastic force at the time of elastic deformation, and when the shape memory material is plastically deformed, it is adjusted and provided so as to have an elastic force capable of plastically deforming the shape memory material. The pump according to claim 4, characterized in that: 3. The heat control device according to claim 1, wherein the heat control device includes a resistor that generates heat by passing a current, and a power supply that supplies a current to the resistor and a control device that controls the supply of the current are provided. The pump according to 3 or 4. The heat control means includes a Peltier element that changes a heating / cooling direction by changing a direction in which a current flows, and a power supply for supplying a current to the Peltier element and a control means for controlling the power supply are provided. The pump according to claim 1, 2, 3, or 4. 8. The pump according to claim 6, wherein the heat control means is attached to a fixed portion other than the movable body of the pump chamber. A heat insulating material for suppressing heat conduction from the heat deformable member to the movable member is provided between the heat deformable member and the movable member. The pump according to 6, 7, or 8. 3. The valve mechanism according to claim 1, further comprising a suction valve that opens only in a direction in which the fluid flows into the pump chamber, and a discharge valve that opens only in a direction in which the fluid flows out of the pump chamber. The pump according to 3, 4, 5, 6, 7, 8, or 9.

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