JP2004233189A - Luminaire and inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a luminaire constituted so as to illuminate an illumination region uniformly and efficiently, to achieve simplification and to illuminate an imaging region uniformly and efficiently to enhance a resolving power. <P>SOLUTION: This inspection device is constituted using the luminaire for irradiating a linear illumination region (122) with light (106). The luminaire is equipped with first and second light guide means (fiber groups 112 and 114). The first light guide means is constituted so that a plurality of first light emitting ports (116) are arranged in opposed relation to the illumination region (122) and a first light emitting angle (θ<SB>1</SB>) is set to the lights emitted from the first light emitting ports. The second light guide means approaches the first light emitting ports and is constituted so that a plurality of second light emitting ports (118) are arranged in opposed relation to the illumination region and a second light emitting angle (θ<SB>2</SB>) is set to the lights emitted from the second light emitting ports in the direction of crossing the first light emitting angle. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an illumination device and an inspection device used for imaging a sample to be inspected having a variety of surface properties, such as an uneven surface or an inclined surface, such as a semiconductor device, and relates to light emitted from a linear imaging region (illumination region). The present invention relates to a lighting device and an inspection device used for irradiation and imaging thereof.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, a line sensor (line camera) is used for surface inspection of a semiconductor device or the like, and this line sensor is one in which imaging elements are arranged in a line, and a field of view is constituted by imaging elements arranged in a line. ing. For imaging by such a line sensor, an illumination device that uses a linear imaging area as an illumination area is required. This illuminating device is known as, for example, an optical fiber illuminating device, and guides light from a light source through an optical fiber to irradiate an illumination area of an imaging target.
[0003]
In such a line-shaped imaging, the light emitted from the illumination device, that is, the illumination state of the illumination area greatly affects the resolution. The uneven surface portion or the inclined surface portion in the illumination area causes a shadow or a variation in illuminance (illuminance unevenness) in the illumination area, and it is difficult to image the shadowed portion, and the illuminance unevenness lowers the resolution.
[0004]
Therefore, for example, as shown in FIG. 1, light 6 is irradiated from two directions to an illumination area 4 corresponding to the imaging area of the imaging object 2. In this case, two line-type optical fibers 14 are installed obliquely above the illumination area 4 of the imaging target 2 around the optical axis 12 of the line sensor 8 and the lens 10, and are illustrated using each line-type optical fiber 14. Light 6 from a light source that does not emit light is applied to the illumination area 4 from two directions. In this case, the illumination area 4 is set to have the same area as the imaging area of the line sensor 8 or an area having a width and a length that can include the same.
[0005]
Each line type optical fiber 14 has a configuration in which a plurality of optical fibers 16 are arranged as shown in FIG. 2A, for example, and light 6 is emitted from each optical fiber 16 to the imaging target 2 at right angles. For example, as shown in FIG. 2B and FIG. 3, each optical fiber 16 has an exit port 18 formed by a vertical end face. Therefore, perpendicular light 6 in the same direction is obtained at the exit 18 of each optical fiber 16.
[0006]
In addition, when the line-type optical fiber 14 illuminates from two directions, it is expected that a shadow or uneven illuminance will occur in the illumination area 4 of the imaging target 2. In such a case, for example, as shown in FIG. 4, two spot-type optical fibers 20 are installed as complementary illumination of the two line-type optical fibers 14 and light 22 is irradiated. That is, the illumination area 4 is irradiated with the light 6 and 22 from four directions. By irradiating the lights 6 and 22 from such a plurality of directions, it is possible to prevent shadows and uneven illuminance.
[0007]
In addition, for example, as shown in FIG. 5, if the ring-shaped optical fiber 24 is provided for the irradiation of the lights 6 and 22, the light 25 can be irradiated from all directions around the illumination area 4. it can. This is a lighting method used for imaging by the area sensor camera.
[0008]
The following prior art documents exist for illumination of this linear illumination area and inspection techniques using such illumination.
[0009]
[Patent Document 1]
JP 2001-275042 A, "Imaging device"
[0010]
[Patent Document 2]
JP-A-11-295235, "Optical Surface Inspection Device"
[0011]
[Patent Document 3]
Japanese Patent Application Laid-Open No. 2000-266681, “Line illumination device”
[0012]
[Patent Document 4]
Japanese Patent Application Laid-Open No. H11-258173, "Illumination device"
[0013]
Patent Literature 1 discloses an imaging device using a line camera, and discloses that the imaging device irradiates a sample from a plurality of directions with light from a plurality of light sources using an optical fiber illuminator ( 2, 5, 5 and their descriptions). Patent Literature 2 discloses a surface inspection apparatus that irradiates light from a light source onto an object surface in a linear manner at an arbitrarily set tilt angle, and captures an image of an illumination area using an area CCD color camera. Further, Patent Document 3 discloses a line illuminating device in which light from a light source is arranged in a semi-cylindrical shape on a light emitting surface of a plurality of irradiation units, and irradiates a linear irradiation region of an inspection object with light in a plurality of directions. It is disclosed (FIGS. 1, 2 and its description). In Patent Literature 4, in order to perform high-resolution illumination when inspecting a surface to be inspected having an uneven surface, a plurality of light emitting units are installed so that optical axes intersect with each other. There is disclosed a lighting device in which an optical axis crosses in front of an irradiation area.
[0014]
[Problems to be solved by the invention]
By the way, in the illumination device shown in FIG. 1, the light 6 emitted from each line-type optical fiber 14 is in a single direction, so that the two line-type optical fibers 14 are combined and the light 6 is applied to the illumination area 4 from two directions. Irradiation. In such illumination, for example, as shown in FIG. 6, if the pattern 26 and the pattern 28 of the imaging target 2 exist, and the pattern 26 has the inclined side surface 30 and the pattern 28 has the inclined side surface 32, Reflected light 34 reaches the line sensor 8 through the lens 10, so that it is possible to image the inclined side surface 30, but the reflected light 36 of the inclined side surface 32 diverges out of the imaging range of the line sensor 8 and 8, it is difficult to capture the surface properties of the inclined side surface 32 by imaging. In this case, the inclined side surface 32 appears on the line sensor 8 as a shadow.
[0015]
In addition, in the illumination device shown in FIG. 4, a spot-type optical fiber 20 is provided to complement the illumination in two directions by each line-type optical fiber 14. Since the illumination area 4 is irradiated with the lights 6 and 22 from four directions by the combination of the line type optical fiber 14 and the spot type optical fiber 20, for example, as shown in FIG. The light 22 irradiates the inclined side surfaces 30 and 32 of the patterns 26 and 28, and the imaging of the inclined side surfaces 32 becomes possible. The illumination of the inclined side surface 32 and the imaging thereof cannot be performed by the illumination of the line type optical fiber 14, but the imaging can be performed by the light 22 from the spot type optical fiber 20. However, when an image is taken of a portion of the spot type optical fiber 20 that is not at the center of the illumination area 38, the difference in the optical path length between the light 22A and the light 22B causes a light quantity difference, and uniform illumination cannot be performed. That is, the light quantity difference causes an illuminance difference in the illumination area 4, which changes the resolution.
[0016]
In addition, in the illumination device shown in FIG. 5, it is possible to easily realize full-circumferential illumination. Since the light is a part of the light amount and most of the light is out of the illumination area 4, the irradiation efficiency is low.
[0017]
As described above, in the conventional illuminating device, in order to realize uniform illumination in response to complication of the surface properties of the inspection object or the like set in the illumination area 4, illumination is performed from a plurality of locations. Therefore, there is a problem that the configuration of the lighting device is complicated and inefficient. Regarding such a problem, even if the technologies disclosed in Patent Documents 1 to 4 are referred to, it is not possible to simplify the lighting device and to improve shadows, uneven illuminance, irradiation efficiency, and the like.
[0018]
Therefore, a first object of the present invention is to provide a lighting device that irradiates a linear lighting region with light, and to provide a lighting device that uniformly and efficiently illuminates the lighting region.
[0019]
A second object of the present invention is to provide a simplified lighting device, which relates to a lighting device that irradiates a linear lighting area with light.
[0020]
In addition, a third object of the present invention is to provide an inspection apparatus for imaging a linear imaging area, and to provide an inspection apparatus having an improved resolution using an illumination device that uniformly and efficiently illuminates the imaging area.
[0021]
[Means for Solving the Problems]
The configurations of the lighting device and the inspection device according to the present invention that have solved the above problems are as follows.
[0022]
The illumination device of the present invention is a lighting device for irradiating a linear illumination area (122) with light (106) in order to achieve the first or second object, and comprises a first light guide means (fiber group). 112) and second light guiding means (fiber group 114). The first light guide means arranges a plurality of first exit ports (116) in opposition to the illumination area, and applies a first exit angle (θ) to the light (106A) emitted from the first exit ports. ₁ ) Is set. In addition, the second light guide means is arranged close to the first light outlet of the first light guide means, and a plurality of second light outlets (118) are arranged facing the illumination area. The light (106B) exiting from the second exit port has a second exit angle (θ, which intersects with the first exit angle). ₂ ) Is set.
[0023]
In this lighting device, the first and second light guide means are light guide members for guiding light from the light source to the illumination area side. For example, the first and second light guide means can be constituted by optical fibers, but are limited to optical fibers. Not something. The light guided to the illumination area by the first and second light guides may be either a common light source (light source devices 166 and 168) or another light source.
[0024]
In short, the first light guide means arranges the first exit port, the light emitted from the first exit port has the first exit angle, and the second light guide means arranges the second exit port, A second emission angle is set for light emitted from the second emission port, and each emission angle is a cross direction. This is completely different from, for example, the case where vertical light is applied to the illumination area from the exit port as shown in FIG. 2, as in a conventional illumination apparatus, and corresponds to the surface properties of the illumination area having an uneven surface or an inclined surface. Light irradiation becomes possible.
[0025]
Therefore, according to this illumination device, the linear illumination area is irradiated with light from different emission angles, and as a result, a uniform irradiation light amount is obtained on the uneven surface or the inclined surface of the illumination area. Uniform illumination can be efficiently performed without causing shadows or uneven illuminance. In addition, since a single lighting device is provided with the first and second light guide means that can emit light having different emission angles, a simplified lighting device can be realized.
[0026]
Further, in order to achieve the first or second object, the lighting device of the present invention includes a plurality of lighting units (line-type optical fiber devices 102, 1021) for irradiating a linear lighting area (122) with light (106). , 1022), wherein the lighting unit includes the first and second light guide means described above. As described above, the first light guide means arranges the plurality of first exit ports (116) in opposition to the illumination area, and converts the light exiting from the first exit ports into the first exit angle ( θ ₁ ) Is set. In addition, the second light guide means is arranged close to the first light outlet of the first light guide means, and a plurality of second light outlets (118) are arranged facing the illumination area. The light exiting from the second exit port has a second exit angle (θ) directed in a direction intersecting with the first exit angle. ₂ ) Is set.
[0027]
When a plurality of illuminations are performed from different directions using a plurality of illumination units, uniform illumination of the illumination area is achieved in combination with the illumination of the first and second light guides by the respective illumination units at different emission angles. Lighting can be performed efficiently. Since the lighting device is configured with a plurality of lighting units including the first and second light guide means capable of irradiating light having different emission angles, a simplified lighting device can be realized and the irradiation light amount can be reduced. Can be increased.
[0028]
In this illumination device, the emission angle is set by an inclination angle (θs) of the emission port. Due to the difference in the refractive index between the light guiding means such as an optical fiber and the medium on the side of the illumination area, it is possible to set a desired emission angle by the angle formed between the optical axis of the light guiding means and the emission port.
[0029]
In this illuminating device, the light guiding means is constituted by an optical fiber. Various light-guiding materials capable of transmitting light can be used for the light-guiding means. For example, by using an optical fiber, it is possible to set a desired emission angle and perform efficient illumination. It is.
[0030]
In order to achieve the third object, the inspection device of the present invention includes an illumination device that irradiates a linear illumination area (122) of a sample to be inspected (an imaging target 120) with light (106). , Characterized by comprising the lighting device described above. The lighting device includes first and second light guide means. As described above, the first light guide means arranges the plurality of first exit ports (116) in opposition to the illumination area, and converts the light exiting from the first exit ports into the first exit angle ( θ ₁ ) Is set. In addition, the second light guide means is arranged close to the first light outlet of the first light guide means, and a plurality of second light outlets (118) are arranged facing the illumination area. The light exiting from the second exit port has a second exit angle (θ) directed in a direction crossing the first exit angle. ₂ ) Is set.
[0031]
According to such an inspection device, since an illumination device capable of efficiently performing uniform illumination is used, high-resolution imaging can be obtained, and the configuration of the illumination device is complicated as in the related art. In addition, the device can be simplified and the lighting device area can be made compact.
[0032]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 8 shows a lighting device according to the first embodiment of the present invention.
[0033]
This lighting device is provided with a line-type optical fiber device (hereinafter, referred to as an “optical fiber device”) 102 that constitutes a lighting unit. The optical fiber device 102 is connected to a light source ( For example, light 106 from a light source device 166) shown in FIG. 16 is guided. The fiber cable 104 is composed of a plurality of fibers 108 as light guide members.
[0034]
Therefore, the optical fiber device 102 is provided with a housing 110 as holding means for holding the respective fibers 108, and the respective fibers 108 of the fiber cable 104 housed in the housing 110 are divided. In the embodiment, the fiber 108 is divided into a fiber group 112 as a first light guiding unit and a fiber group 114 as a second light guiding unit by the two divided fibers 108.
[0035]
The respective fiber groups 112 and 114 are curved in the direction away from each other in the housing 110, and the end faces of the respective fiber groups 112 and 114 are arranged on the lower surface side of the housing 110. Of the curved body. For example, as shown in FIGS. 9 and 10, a plurality of first emission ports 116 are formed on the fiber group 112 side, and a plurality of second emission ports 118 are formed on the fiber group 114 side. Are arranged corresponding to the linear illumination area 122 set on the imaging target 120. The arrangement form is a linear arrangement corresponding to the linear illumination region 122, and an exit surface 124 of the light 106A, 106B is formed on the lower surface side of the housing 110 by the arrangement of the exit openings 116, 118. ing. In this embodiment, the output ports 116 and 118 of the arranged fiber groups 112 and 114 are independently provided by making each of the fiber groups 112 and 114 overlap each other on the central axis O side of the fiber cable 104. Outgoing ports 116 and 118 generally form a single line segment while forming a line segment.
[0036]
The light 106A exiting from the exit port 116 of the fiber group 112 has a first exit angle θ. ₁ The light 106B exiting from the exit port 118 of the fiber group 114 has an exit angle θ ₁ Second emission angle θ intersecting (opposing direction) with ₂ Is set. That is, with reference to the exit surface 124, the exit angle θ ₁ Is, for example, 45 °, the emission angle θ ₂ Is set to 135 °, for example, and with respect to the central axis O (FIG. 8), the respective light beams 106A and 106B have a left-right symmetrical inclination angle of 45 °. These angles are examples, and the output angle θ ₁ , Θ ₂ Can be set.
[0037]
In this embodiment, a flat exit surface 124 is formed on the lower surface side of the housing 110, and the exit ports 116 and 118 of each of the fiber groups 112 and 114 coincide with the flat exit surface 124. Therefore, as shown in FIG. 11, each of the emission ports 116 and 118 of each of the fiber groups 112 and 114 forms an inclined surface at an angle θs with respect to the central axis P of the fiber 108, and the light 106A and 106B Exit angle θ ₁ , Θ ₂ Is set.
[0038]
Therefore, if each of the fibers 108 constituting each of the fiber groups 112 and 114 is a cylindrical body, each of the exit ports 116 and 118 having an inclined surface forms an ellipse. In this case, the fiber 108 has a constant refractive index n, and the lights 106A and 106B emitted from the exit ports 116 and 118 are bent by the refractive index n and exit into the air. For this reason, the emission angles θ of the lights 106A and 106B ₁ , Θ ₂ Does not coincide with the inclination angle θs on the fiber 108 side due to the refractive index n. Therefore, the emission angle θ ₁ , Θ ₂ When the refractive index n is taken into consideration, the inclination angles θ of the exit ports 116 and 118 on the fiber 108 side are considered. _S It is necessary to set.
[0039]
Therefore, for example, as shown in FIGS. 8 and 9, if the length of the illumination area 122, that is, the area length is M, and the distance between the emission surface 124 of the housing 110 and the illumination area 122 is D, this distance In order to irradiate the lights 106A and 106B to the illumination area 122 having an area length M separated by D, the respective emission lengths of the emission ports 116 and 118 of the respective fiber groups 112 and 114 are set to L. ₁ , L ₂ Assuming that the length of the overlapping portion is Ld and the emission length formed by the emission ports 116 and 118 of the fiber groups 112 and 114 is Lm, the emission length Lm is
Lm = L ₁ + L ₂ -Ld (1)
It becomes. Here, each emission length L of the fiber group 112, 114 ₁ , L ₂ To L ₁ = L ₂ = L, the emission length Lm is
Lm = 2L-Ld (2)
It becomes. Also, the output width of each output port 116, 118 of each fiber group 112, 114 is set to w ₁ , W ₂ Assuming that the total emission width of the overlapping portion Ld of the fiber groups 112 and 114 is Wm, the emission width Wm is
Wm = w ₁ + W ₂ ... (3)
It becomes. In this case, each emission width w ₁ , W ₂ To w ₁ = W ₂ = W, the emission width Wm = 2w.
[0040]
If this optical fiber device 102 is used, for example, as shown in FIG. ₁ , Θ ₂ The light 106A and 106B composed of the light can be applied to the illumination area 122 of the imaging target 120. In this case, the patterns 128 and 130 exist in the illumination region 122 of the imaging target 120, and the pattern 128 has inclined side surfaces 132 and 134, and the pattern 130 has inclined side surfaces 136 and 138. As shown in (1), the light 106A emitted from the exit 116 of the fiber group 112 hits the inclined side surfaces 132 and 136, and the reflected light 106AR is obtained. The light 106B emitted from the exit 118 of the fiber group 114 hits the inclined side surface 134, and the reflected light 106BR is obtained. In addition, both the light 106A emitted from the emission port 116 of the fiber group 112 and the light 106B emitted from the emission port 118 of the fiber group 114 hit the inclined side surface 138, and the respective reflected lights 106AR and 106BR are obtained. become.
[0041]
Therefore, according to such an optical fiber device 102, it is possible to irradiate the single illumination region 122 with the lights 106A and 106B, and furthermore, the emission angle θ ₁ , Θ ₂ Is set, the light 106A and 106B are radiated in the cross direction. Therefore, the portion where the shadow is generated by the light 106B is irradiated with the light 106A, and the portion where the shadow is generated by the light 106A is irradiated with the light 106B. Therefore, the light beams 106A and 106B having different emission angles complement each other, and can prevent the occurrence of a shadow. In addition, the amount of irradiation of the illumination area 122 can be made uniform by the superposition of the lights 106A and 106B, so that uniform illumination can be efficiently performed. In addition, the fiber groups 112 and 114 separate the light 106 from the single or common light source into the lights 106A and 106B and combine the lights 106A and 106B on the illumination area 122 side, thereby enabling efficient illumination.
[0042]
In this embodiment, the output angle θ is determined by using a single illumination unit. ₁ At 45 °, emission angle θ ₂ Is set to 135 ° to irradiate the illumination area 122 with the lights 106A and 106B from two directions, so that even if there are inclined surfaces or uneven surfaces having different directions, no shadow is generated and uniform illumination is performed. Can be performed efficiently.
[0043]
Further, in the optical fiber device 102, for example, as shown in FIG. 14A, the emission ports 116 and 118 of the fibers 108 constituting the fiber groups 112 and 114 have the light 106A, Output angle θ to 106B ₁ , Θ ₂ Is an inclined surface having an angle θs. As a result, as shown in FIG. 14B, the exit ports 116 and 118 have a short diameter R (diameter of a vertical cross section of the fiber 108) and a long diameter R _L And an elliptical surface is formed. Therefore, the area of the vertical section of the fiber 108 is defined as S ₁ , The area of the emission ports 116 and 118 forming an ellipsoid ₂ Then the area S ₁ , S ₂ Is
S ₂ = S ₁ / Cos θs (4)
, The area S of the exit ports 116 and 118 ₂ Is the major axis R _L (= R / cos θs), the area S of the vertical section of the fiber 108 ₁ More expanded.
[0044]
Therefore, according to such an optical fiber device 102, the output area is smaller than the area S ₂ And can be expanded.
[0045]
An emission length L formed by using the emission ports 116 and 118 having such elliptical surfaces. ₁ , L ₂ (FIG. 9) shows the major axis R of the exit ports 116 and 118. _L Given by the addition value (proportional value) of
L ₁ = NR _L = N · R / cos θs> N · R (5)
L ₂ = NR _L = N · R / cos θs> N · R (6)
It becomes.
[0046]
Therefore, since the exit ports 116 and 118 are inclined surfaces, that is, elliptical surfaces, the exit lengths Lm and Lm are smaller with a smaller number than the case where the fiber 108 has a vertical section, that is, a perfect circular surface. ₁ , L ₂ Can be extended, and the illumination area 122 can be expanded.
[0047]
Next, FIG. 15 shows a lighting device according to a second embodiment of the present invention.
[0048]
In this illuminating device, an optical fiber device 1021 as a first illuminating unit and an optical fiber device 1022 as a second illuminating unit are installed at a predetermined angle with respect to an optical axis Q of a lens 140 on the imaging side. Each of the optical fiber devices 1021 and 1022 includes the fiber groups 112 and 114 as described above with reference to FIGS. That is, the fiber group 112 serving as the first light guide means includes a plurality of emission ports 116 arranged so as to face the illumination region 122, and the light 106A emitted from each of the emission ports 116 has an emission angle θ. ₁ In addition, the fiber group 114 serving as the second light guide means has an output port 118 arranged close to the output port 116 on the fiber group 112 side, and the light 106B emitted from each output port 118 is provided. Output angle θ of light 106A ₁ And emission angle θ in the direction of intersection ₂ Is set.
[0049]
As described above, when the two optical fiber devices 1021 and 1022 are installed at a predetermined angle with respect to the optical axis Q of the lens 140 on the imaging side, the lights 106A and 106B are illuminated from the optical fiber devices 1021 and 1022, respectively. Since the light is irradiated to the area 122, the light irradiation with different angles from four directions can be obtained in the illumination area 122 by the two optical fiber devices 1021 and 1022. In other words, the illumination device can be made more compact and uniform illumination can be performed efficiently.
[0050]
In this embodiment, the emission angles θ in two directions from the two optical fiber devices 1021 and 1022 are shown. ₁ , Θ ₂ The lights 106A and 106B having the following are illuminated on the illumination area 122, and the lights having the illumination directions that intersect with the two illumination units are emitted from four directions. Therefore, the optical system using the line sensor can be used without changing the organization of the illumination device. Uniform illumination can be efficiently performed on the system. It is not necessary to use a spot-type optical fiber as complementary illumination as in the past, and it is possible to achieve efficient illumination without illuminating unnecessary areas unlike a ring-type optical fiber, and to simplify the illumination device. Can be planned.
[0051]
Next, FIG. 16 shows an inspection apparatus according to a third embodiment of the present invention.
[0052]
This inspection apparatus is a printed board appearance inspection apparatus, and a stage 152 is installed on the upper surface of the apparatus main body 150 so as to be movable in the directions of arrows a and b. (FIG. 8) is installed. A loader 154 and an unloader 156 are provided in the direction of movement of the stage 152 as means for transmitting and receiving the imaging target 120. A line sensor 160 serving as an image pickup means is provided on the frame 158 erected on the back side of the stage 152 with the frame 158 as a support member, and an optical system 162 is installed on the optical axis of the line sensor 160. 140 (FIG. 15) is installed, and can receive reflected light from the imaging target 120. Also, as shown in FIG. 17, first and second optical fiber devices 1021 and 1022 are set on the frame 158 so as to sandwich the optical system 162, and the light source device 166 is provided on the table 164 of the device main body 150. 168 are installed. Light 106 (FIG. 8) from the light source devices 166 and 168 is guided to the optical fiber devices 1021 and 1022 through fiber cables 104A and 104B provided individually for each of the light source devices 166 and 168.
[0053]
The printed board appearance inspection apparatus is equipped with, for example, an illumination / inspection system shown in FIG. 18, and the illumination / inspection system executes illumination, imaging, inspection, and determination.
[0054]
The stage 152 is provided with a stage control device 170 as a means for executing movement control and the like. Further, an image memory 172 is provided as a storage unit of the imaging information of the line sensor 160. As control means for performing various controls such as lighting and light amount control of the light source devices 166 and 168, imaging control by the line sensor 160, control of taking image information into the image memory 172, control of the stage control device 170, and the like. The determination system control device 174 is installed, and a continuous automatic inspection system for the imaging target 120 such as a printed circuit board is configured.
[0055]
According to such a printed board appearance inspection apparatus, the imaging target 120 such as a printed circuit board can be continuously supplied to the stage 152 using the loader 154 and the unloader 156, and the imaging target 120 installed on the stage 152 is a line. It moves each time the sensor 160 captures an image, so that the surface to be inspected can be discontinuously captured. In imaging by the line sensor 160, the imaging target 120 is continuously irradiated with light 106 from the optical fiber devices 1021 and 1022. This light irradiation is as described above with reference to FIGS. For example, as shown in FIG. 12, the optical fiber devices 1021 and 1022 as illumination devices are provided with emission ports 116 and 118 outside the illumination area 122, so that the optical fiber devices Light that is inclined toward the center of 1021 and 1022 is emitted, and as a result, reflected light can also be obtained from the inclined side surfaces 132, 134, 136, and 138 (FIG. 13) existing in the patterns 128 and 130 on the illumination area 122. it can. As a result, uniform illumination can be efficiently performed on the illumination area 122 of the imaging target 120 irrespective of its surface properties, and high-resolution imaging can be obtained by the line sensor 160. This imaging is taken into the image memory 172 and used for defect inspection. In this inspection apparatus, since uniform illumination does not cause shadows or uneven illuminance, high-resolution imaging information can be obtained, and the imaging target 120 can be obtained. Inspection of a flaw or the like existing on the surface of the device can be performed with high accuracy.
[0056]
Next, FIG. 19 shows a lighting device according to a fourth embodiment of the present invention. In the first embodiment shown in FIG. ₁ , The output length L ₂ And shorter than the total emission length Lm (Lm> L ₁ , Lm> L ₂ ). However, as shown in FIG. 19, the fiber groups 112 and 114 have the same emission length (L ₁ = L ₂ = Lm), and the fiber groups 112 and 114 may be superposed and installed in the width direction. With such a configuration, the amount of emitted light can be increased, and the lights 106A and 106B emitted from the respective emission ports 116 and 118 can be mixed in the length direction.
[0057]
Next, FIG. 20 shows a lighting device according to a fifth embodiment of the present invention. In the second embodiment shown in FIG. 15, the optical fiber devices 1021 and 1022 having the fiber groups 112 and 114 are installed. However, as shown in FIG. In addition to installing the fiber devices 1021A and 1021B, the same two optical fiber devices 1022A and 1022B as the optical fiber device 1022 may be installed. With such a configuration, it is possible to cope with the illumination region 122 having a large width, and it is possible to expand the illumination region.
[0058]
Note that, in each embodiment, the case where the imaging target 120 is irradiated with the lights 106A and 106B and the reflected light is imaged by the line sensor 160 has been described. The present invention can also be used for illumination and inspection of a translucent imaging object, and is not limited to an object for reflected light.
[0059]
In each embodiment, an optical fiber has been described as an example of the light guide means. However, an optical transmission material other than the optical fiber may be used as the light guide means in the lighting device and the inspection device of the present invention. .
[0060]
Next, technical ideas extracted from the above-described embodiments of the lighting device and the inspection device are listed as supplementary notes according to the description form of the claims. The technical idea according to the present invention can be grasped at various levels and variations from a high-level concept to a low-level concept, and the present invention is not limited to the following supplementary notes.
[0061]
(Supplementary Note 1) An illumination device that irradiates light to a linear illumination area,
A first light guide unit in which a plurality of first emission ports are arranged to face the illumination area, and a first emission angle is set for light emitted from the first emission ports;
A plurality of second exit ports are arranged in proximity to the first exit port of the first light guide means and opposed to the illumination area, and the first exit port is provided with light exiting from the second exit port. A second light guide means that sets a second emission angle in the direction of intersection with the emission angle of
A lighting device comprising:
[0062]
(Supplementary Note 2) A lighting device including a plurality of lighting units that irradiate light to a linear lighting region, wherein the lighting unit includes:
A first light guide unit in which a plurality of first emission ports are arranged to face the illumination area, and a first emission angle is set for light emitted from the first emission ports;
A plurality of second exit ports are arranged in proximity to the first exit port of the first light guide means and opposed to the illumination area, and the first exit port is provided with light exiting from the second exit port. A second light guide means that sets a second emission angle in the direction of intersection with the emission angle of
A lighting device comprising:
[0063]
(Supplementary Note 3) The illumination device according to Supplementary Note 1 or 2, wherein the emission angle is set by an inclination angle of the emission port.
[0064]
(Supplementary Note 4) The illumination device according to Supplementary Note 1 or 2, wherein the light guide unit is configured by an optical fiber.
[0065]
(Supplementary Note 5) An inspection device including an illumination device that irradiates light to a linear illumination region of a sample to be inspected, wherein the illumination device includes:
A first light guide unit in which a plurality of first emission ports are arranged to face the illumination area, and a first emission angle is set for light emitted from the first emission ports;
A plurality of second exit ports are arranged in proximity to the first exit port of the first light guide means and opposed to the illumination area, and the first exit port is provided with light exiting from the second exit port. A second light guide means that sets a second emission angle in the direction of intersection with the emission angle of
An inspection apparatus comprising:
[0066]
(Supplementary Note 6) The first light-emitting means of the first light-guiding means and the second light-emitting means of the second light-guiding means are linearly arranged and arranged in parallel. 9. The lighting device according to claim 1, wherein
[0067]
(Supplementary Note 7) The illumination device according to Supplementary Note 1, wherein the first exit port and the second exit port have elliptical surfaces, and the exit ports are arranged in the major axis direction.
[0068]
(Supplementary Note 8) The lighting device according to Supplementary Note 2, wherein the lighting device includes a plurality of lighting units that irradiate light to a linear illumination region, wherein the lighting units are arranged in tandem.
[0069]
(Supplementary Note 9) The illumination device includes at least the first emission port and the second emission port outside a region of the illumination device facing a linear illumination region of the sample to be inspected. 5. The inspection device according to claim 5, wherein For example, as shown in FIG. 12, if an illumination device having an emission port outside the illumination area is used, light inclined toward the center of the illumination device is emitted from the emission port, and The reflected light can also be obtained from the inclined side surface existing in the pattern.
[0070]
As described above, the most preferred embodiment of the present invention has been described, but the present invention is not limited to the above description, but is described in the claims or disclosed in the detailed description of the invention. Of course, various modifications and changes can be made by those skilled in the art based on the gist of the invention made, and such modifications and changes are included in the scope of the present invention.
[0071]
【The invention's effect】
As described above, according to the present invention, the following effects can be obtained.
(1) According to the illuminating device of the present invention, the first and second light exits are arranged by the first and second light guides, and the light exiting from the first exit and the light exiting from the second exit are provided. Since the linear illumination area is illuminated by setting the emission angle so that the light is directed in the cross direction, the illumination area can be uniformly and efficiently illuminated by the lights having different emission angles.
(2) According to the illuminating device of the present invention, the first and second light exits are arranged by the first and second light guides, and the light exiting from the first exit and the light exiting from the second exit are provided. The illumination area can be illuminated by setting the emission angle so as to be directed in the cross direction with the light, so that each light can uniformly and efficiently illuminate the illumination area, the illumination device can be simplified, and the illuminance of the illumination area can be reduced. If they are the same, the lighting device can be made compact.
(3) According to the inspection apparatus of the present invention, the illumination area according to the present invention can uniformly and efficiently illuminate the imaging region, so that the resolution can be increased, and high-resolution imaging can be obtained.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an outline of a conventional optical fiber lighting device.
2A and 2B schematically show another conventional optical fiber illuminating device, in which FIG. 2A is a side view thereof, and FIG. 2B is a bottom view showing an emission surface thereof.
FIG. 3 is a perspective view showing an outline of a conventional emission surface and emission light.
FIG. 4 is a perspective view showing an outline of a conventional optical fiber lighting device using a spot type optical fiber together.
FIG. 5 is a perspective view showing an outline of a conventional optical fiber lighting device using a ring-type optical fiber.
FIG. 6 is a perspective view showing an illumination state using a conventional optical fiber illumination device.
FIG. 7 is a perspective view showing an illumination state using a conventional spot-type optical fiber.
FIG. 8 is a diagram showing an outline of a lighting device according to the first embodiment of the present invention.
FIG. 9 is a diagram illustrating an outline of an emission surface of the illumination device.
FIG. 10 is a perspective view showing an emission surface and emission light.
FIG. 11 is a diagram showing a fiber and an emission angle thereof.
FIG. 12 is a diagram showing light irradiation of a fiber group to an illumination area.
FIG. 13 is an enlarged view showing light irradiation on an illumination area.
14A and 14B are diagrams illustrating an arrangement form of each fiber group, FIG. 14A is a diagram illustrating an arrangement and appearance of fibers, and FIG. 14B is a view illustrating an emission port of the fiber.
FIG. 15 is a perspective view showing an outline of a lighting device according to a second embodiment of the present invention.
FIG. 16 is a perspective view showing an outline of an inspection device according to a third embodiment of the present invention.
FIG. 17 is a perspective view showing a lighting device mounted on the inspection device.
FIG. 18 is a block diagram showing an inspection system.
FIG. 19 is a diagram showing an outline of a lighting device according to a fourth embodiment of the present invention.
FIG. 20 is a perspective view showing an outline of a lighting device according to a fifth embodiment of the present invention.
[Explanation of symbols]
102, 1021, 1022 Line type optical fiber device (illumination unit)
106, 106A, 106B light
112 fiber group (first light guide means)
114 fiber group (second light guide means)
116 1st exit
118 second exit
120 Imaging object (sample to be inspected)
122 Illumination area

Claims (5)

An illumination device that irradiates light to a linear illumination area,
A first light guide unit in which a plurality of first emission ports are arranged to face the illumination area, and a first emission angle is set for light emitted from the first emission ports;
A plurality of second exit ports are arranged in proximity to the first exit port of the first light guide means and opposed to the illumination area, and the first exit port is provided with light exiting from the second exit port. A second light guide means that sets a second emission angle in the direction of intersection with the emission angle of
A lighting device comprising: An illumination device including a plurality of illumination units that irradiate light to a linear illumination region, wherein the illumination unit includes:
A first light guide unit in which a plurality of first emission ports are arranged to face the illumination area, and a first emission angle is set for light emitted from the first emission ports;
A plurality of second exit ports are arranged in proximity to the first exit port of the first light guide means and opposed to the illumination area, and the first exit port is provided with light exiting from the second exit port. A second light guide means that sets a second emission angle in the direction of intersection with the emission angle of
A lighting device comprising: The lighting device according to claim 1, wherein the emission angle is set by an inclination angle of the emission port. The lighting device according to claim 1, wherein the light guide unit includes an optical fiber. An inspection device including an illumination device that irradiates light to a linear illumination region of a sample to be inspected, wherein the illumination device includes:
A first light guide unit in which a plurality of first emission ports are arranged to face the illumination area, and a first emission angle is set for light emitted from the first emission ports;
A plurality of second exit ports are arranged in proximity to the first exit port of the first light guide means and opposed to the illumination area, and the first exit port is provided with light exiting from the second exit port. A second light guide means that sets a second emission angle in the direction of intersection with the emission angle of
An inspection apparatus comprising:

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