JP2004229401A5 - - Google Patents
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- Publication number
- JP2004229401A5 JP2004229401A5 JP2003013936A JP2003013936A JP2004229401A5 JP 2004229401 A5 JP2004229401 A5 JP 2004229401A5 JP 2003013936 A JP2003013936 A JP 2003013936A JP 2003013936 A JP2003013936 A JP 2003013936A JP 2004229401 A5 JP2004229401 A5 JP 2004229401A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003013936A JP2004229401A (ja) | 2003-01-22 | 2003-01-22 | 電源、スパッタ用電源及びスパッタ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003013936A JP2004229401A (ja) | 2003-01-22 | 2003-01-22 | 電源、スパッタ用電源及びスパッタ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004229401A JP2004229401A (ja) | 2004-08-12 |
| JP2004229401A5 true JP2004229401A5 (ja) | 2005-12-22 |
Family
ID=32902135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003013936A Pending JP2004229401A (ja) | 2003-01-22 | 2003-01-22 | 電源、スパッタ用電源及びスパッタ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004229401A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7586099B2 (en) | 2005-03-30 | 2009-09-08 | Huettinger Elektronik Gmbh + Co. Kg | Vacuum plasma generator |
| ATE500604T1 (de) * | 2005-03-30 | 2011-03-15 | Huettinger Elektronik Gmbh | Vakuumplasmagenerator |
| CN108306279A (zh) * | 2017-01-12 | 2018-07-20 | 中兴通讯股份有限公司 | 电源输出控制电路及方法 |
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2003
- 2003-01-22 JP JP2003013936A patent/JP2004229401A/ja active Pending