JP2004226399A5 - - Google Patents

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Publication number
JP2004226399A5
JP2004226399A5 JP2004005179A JP2004005179A JP2004226399A5 JP 2004226399 A5 JP2004226399 A5 JP 2004226399A5 JP 2004005179 A JP2004005179 A JP 2004005179A JP 2004005179 A JP2004005179 A JP 2004005179A JP 2004226399 A5 JP2004226399 A5 JP 2004226399A5
Authority
JP
Japan
Prior art keywords
light beam
optical path
monochromator
optical component
wavefront
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004005179A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004226399A (ja
Filing date
Publication date
Priority claimed from US10/349,898 external-priority patent/US20040145739A1/en
Priority claimed from US10/361,304 external-priority patent/US6989898B2/en
Application filed filed Critical
Publication of JP2004226399A publication Critical patent/JP2004226399A/ja
Publication of JP2004226399A5 publication Critical patent/JP2004226399A5/ja
Pending legal-status Critical Current

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JP2004005179A 2003-01-23 2004-01-13 加算及び減算モードの間で多重経路モノクロメータの動作を変更するための動的な方法 Pending JP2004226399A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/349,898 US20040145739A1 (en) 2003-01-23 2003-01-23 Dynamic method for changing the operation of a multiple-pass monochromator between additive and subtractive modes
US10/361,304 US6989898B2 (en) 2003-01-23 2003-02-10 Dynamic method for changing the operation of a multiple-pass monochromator between additive and subtractive modes

Publications (2)

Publication Number Publication Date
JP2004226399A JP2004226399A (ja) 2004-08-12
JP2004226399A5 true JP2004226399A5 (cg-RX-API-DMAC10.html) 2007-02-15

Family

ID=32911906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004005179A Pending JP2004226399A (ja) 2003-01-23 2004-01-13 加算及び減算モードの間で多重経路モノクロメータの動作を変更するための動的な方法

Country Status (2)

Country Link
US (1) US6989898B2 (cg-RX-API-DMAC10.html)
JP (1) JP2004226399A (cg-RX-API-DMAC10.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090040614A1 (en) * 2007-08-07 2009-02-12 Hammond Michael J Dispersive Filter
US7812949B2 (en) * 2007-10-17 2010-10-12 Horiba Jobin Yvon Inc. Spectrometer with cylindrical lens for astigmatism correction and demagnification
US10371626B2 (en) * 2016-08-17 2019-08-06 Kla-Tencor Corporation System and method for generating multi-channel tunable illumination from a broadband source

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6646740B2 (en) * 2001-09-19 2003-11-11 Agilent Technologies, Inc. Optical monochromators having time dispersion correction

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