JP2004226198A - Method and apparatus for measuring surface area, and plating method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of processing an object to be treated as a measuring object which is subjected to a surface treatment that uses electrochemical reactions mainly and measuring the surface area of the object to be measured precisely, and to provide a method of forming an even plated layer on the surface of the object to be treated when subjecting the object to be treated to a plating process by using the electrochemical reactions. <P>SOLUTION: The method of measuring the surface area, in which the object to be measured and electrodes are immersed in an electrolytic solution and impressed with voltage in the electrolytic solution, and the surface area of the object to be measured is measured based on energized states during the period, is characterised in that the electrodes are arranged at two or more positions around the object to be measured, and furthermore, the energization is carried out in such a condition that the flow of the electrolytic solution is suppressed between the electrodes and the object to be measured. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method and an apparatus for measuring a surface area of an object to be measured in a process preceding a surface treatment mainly using an electrochemical reaction, and a plating method for an object to be processed using an electrochemical reaction.
[0002]
[Prior art]
Surface treatment using an electrochemical reaction such as plating, alumite, or electrolytic polishing needs to be performed while controlling the current density (A / dm ² ) on the surface of the object to be treated, but since this cannot be directly measured, The total current (A) is obtained by multiplying the current density (A / dm ² ) by the surface area (dm ² ) of the object. Therefore, accurately grasping the surface area of the object to be treated in such a surface treatment is a very important issue in improving the accuracy and quality of the surface treatment.
[0003]
Conventionally, as a method of measuring a surface area of an object to be processed (also referred to as an object to be measured in a surface area measurement), a method of measuring a three-dimensional shape using a sensor or a CCD camera and analyzing it by a computer, or a method of CAD drawing. A method of analyzing the data using a computer has been proposed.
However, such a method requires many expensive devices such as a sensor, a CCD camera, and a computer, and requires more advanced measurement techniques and mathematical knowledge. Therefore, the method is not necessarily suitable for a work site where plating is performed. Not.
In addition, since the quantity of processed objects having the same shape tends to be reduced due to recent demands for high-mix low-volume production, profitability is deteriorated in the measurement method that requires time for one processed object.
[0004]
Under such circumstances, when processing an object having a complicated shape, the worker often roughly estimates the surface area and adjusts the current by visually judging bubbles generated during the plating process. . However, such a method requires a high degree of skill, and the plating layer of the product is extremely uneven.
[0005]
In order to solve such a problem, a method of electrochemically measuring the surface area of a treatment object immersed in an electrolytic solution has been proposed as disclosed in Patent Document 1. That is, in the method, a plurality of metal test pieces having a known area and different areas from each other are immersed in an electrolyte solution, a constant voltage is applied under predetermined electrolysis conditions, and a current value is measured by measuring a current at that time. And after obtaining the relational expression between the test piece area and the area of the DUT by applying the current value when the same voltage is applied to the DUT having the unknown area under the same electrolytic conditions to the relational expression, Is what you want.
[0006]
[Patent Document 1]
JP-A-56-160608
[Problems to be solved by the invention]
However, when a rolled flat copper plate as described in Patent Document 1 is used as an object to be measured, a relatively accurate measurement result is easily obtained, but an accurate measurement result is always obtained for an object having a complicated three-dimensional shape. I can't do that. This is because if the distance between the object to be measured and the electrode is different, the resistance value of the electrolyte solution is also different, and the current density on the surface is not constant.
[0008]
In order to offset the influence of the distance between the electrode and the device under test, the present inventor has proposed a method of arranging the electrodes 51 on both sides of the device under test 52 as shown in FIG. The method of surrounding the whole object to be measured 52 with the electrode 51 as shown in FIG. However, in any case, it was confirmed that the resistance value greatly increased nonlinearly as the position of the object to be measured shifted from the center.
Therefore, in the case of an object to be processed having a complicated three-dimensional shape, the surface area cannot be measured accurately because the distance between each part of the object to be measured and the electrode is not constant. That is, even when such a device is used, only a thin plate having the same thickness as the test plate used as a reference or a thin plate having a thickness that does not affect the distance to the electrode is accurately measured. There is a problem that you can not.
[0009]
In addition, such a problem is caused by the fact that the current density is not uniform on the surface of the object to be measured. Therefore, the same phenomenon occurs in the plating method using the electrolysis reaction, and the same phenomenon occurs on the surface of the object to be measured. There is a problem that a plating layer is not formed.
[0010]
In view of such a problem, an object of the present invention is to set an object to be subjected to a surface treatment mainly using an electrochemical reaction as an object to be measured, and to accurately measure the surface area of the object to be measured.
Another object of the present invention is to form a uniform plating layer on the surface of an object when plating the object using an electrochemical reaction.
[0011]
[Means for Solving the Problems]
The present invention has been made in order to solve the above-mentioned problem, and immerses an object to be measured and an electrode in an electrolyte solution, applies a voltage to the object to be measured and the electrode in the electrolyte solution, and conducts electricity at that time. In the surface area measuring method for measuring the surface area of the object to be measured, the electrodes are arranged at two or more locations around the object to be measured, and the current is supplied while the flow of the electrolyte solution is suppressed between the electrode and the object to be measured. To provide a method for measuring a surface area.
[0012]
Preferably, two or more electrodes are arranged in the depth direction of the electrolyte solution, and preferably, the voltages of the electrodes arranged in the depth direction are separately adjusted.
Further, preferably, an auxiliary electrode is arranged below the object to be measured, and the voltages of the electrode and the auxiliary electrode are separately adjusted.
[0013]
Preferably, the flow of the electrolyte solution is suppressed so that the current distribution in the region where the object to be measured is immersed is within a range of ± 5%. Note that the current distribution in the present invention refers to the current value flowing when a flat electrode is placed in an area where an object to be measured is immersed and a constant voltage is applied between the flat electrode and an electrode arranged around the flat electrode. And is a measure of variation within the region. In addition, the range of ± 5% is a percentage obtained by dividing the difference between the maximum value and the minimum value of the measured current value by the current value measured when the plate electrode is installed at the center of the water tank. Shall be referred to.
[0014]
Further, the present invention is a surface area measuring device used to measure the surface area of the object to be measured from the state of electricity by applying a voltage to the object and the electrode immersed in the electrolyte solution, A water tank for accommodating the electrolyte solution, electrodes disposed at two or more surroundings in the water tank, and a flow suppressing means for suppressing flow of the electrolyte solution between the electrode and the object to be measured are provided. The present invention provides a surface area measuring device characterized in that:
[0015]
Preferably, two or more electrodes are arranged in the direction of the depth of the liquid in the water tank, and they are configured so that the voltage can be adjusted separately. Preferably, an auxiliary electrode is provided on the bottom surface of the water tank, and the electrode and the auxiliary electrode are configured so that the voltage can be adjusted separately.
[0016]
Preferably, the flow suppressing means is provided so that a current distribution in a region where the object to be measured is immersed is within a range of ± 5%.
[0017]
Further, the present invention provides a plating method in which a workpiece and an electrode are immersed in an electrolyte solution, a voltage is applied to the workpiece and the electrode in the electrolyte solution, and metal ions in the electrolyte solution are deposited on the surface of the workpiece. In a method, there is provided a plating method, wherein electrodes are arranged at two or more locations around an object to be processed, and the method is performed in a state where the flow of an electrolyte solution is suppressed between the electrode and the object to be measured.
[0018]
Preferably, two or more electrodes are arranged in the depth direction of the electrolyte solution, and the voltages of the electrodes arranged in the depth direction are separately adjusted. Preferably, an auxiliary electrode is further disposed below the object to be processed, and the voltages of the electrode and the auxiliary electrode are separately adjusted.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an embodiment of a surface area measuring device according to the present invention will be described with reference to the drawings, and an embodiment of a surface area measuring method using the device will be described.
[0020]
FIG. 1 is a perspective view showing an embodiment of a surface area measuring device according to the present invention, FIG. 2 is a plan view of the surface area measuring device, and FIG. 3 is a sectional view taken along line AA of FIG.
As shown in FIGS. 1 to 3, the surface area measuring device 1 includes a water tank 2 having a square cross section, and a total of eight electrodes 3, 3. At the four corners of the aquarium, there are provided four baffles 4, 4,. Further, a rack 5 for supporting an object to be measured (not shown) in the electrolyte solution and a power supply rod 6 for supporting the rack 5 and supplying electricity to the object to be measured via the rack 5 are provided. ing.
When the surface area is measured, the water tank 2 is filled with the electrolyte solution 10 set to a predetermined temperature and concentration as shown in FIGS.
[0021]
In the present embodiment, the baffle plate 4 is employed as the flow suppressing means. Specifically, the baffle plate 4 shields the electrode 3 from the object to be measured so that the electrode is not directly opposed to the object to be measured, and also allows the electrolyte solution 10 to pass through the region on the electrode side (also referred to as an electrode region). ) 20 and a region (also referred to as a region to be measured) 30 on the side of the device to be measured, and further provided so as to suppress the flow of the electrolyte solution 10 between these two regions.
[0022]
As shown in FIG. 2, the baffle plate 4 of the present embodiment has a substantially flat plate shape in which both edges are bent, and the flow of the electrolyte solution 10 flows between the edges of both ends and the water tank 2. An elongated flow channel 11 that can be suppressed is formed, and the electrode region 20 and the DUT region 30 can be circulated only through the flow channel 11.
[0023]
The shape of the electrode 3 is not particularly limited, but it is preferable to use an electrode having a small area so that the electric resistance does not become excessively large. It is considered that the so-called Wagner length effect can be reduced.
[0024]
The auxiliary electrode 7 is provided to further correct the Wagner length effect and the effect of Ohm's law caused by the position of the object to be measured with respect to the electrode 3, and the shape is not particularly limited.
[0025]
The electrode 3 and the auxiliary electrode 7 are connected to a power supply (not shown) so that a predetermined voltage is applied to the device under test. That is, a variable resistor (not shown) is interposed between the power supply device and each electrode or the auxiliary electrode, so that different voltages can be applied to the electrode 3 and the auxiliary electrode 7. Is also configured so that different voltages can be applied to the electrode 3a provided above and the electrode 3b provided below.
[0026]
The voltage applied to each electrode should be appropriately adjusted according to various conditions such as the shape and size of the water tank, the size and arrangement of the electrodes, and the shape of the rack, but is applied to the upper electrode 3a. Assuming that the voltage is V1, the voltage applied to the lower electrode 3b is V2, and the voltage applied to the auxiliary electrode 7 is V3, V1: V2 is 1: 0.1 to 1: 1, and V1: V3 is 1 : 0 to 1: 1 can be exemplified as a suitable voltage ratio.
[0027]
The power supply device is not particularly limited as long as it can apply a predetermined voltage to the device under test and the electrodes.
[0028]
Also, the electrolyte solution 10 is not particularly limited, and for example, a sodium hydroxide solution, a phosphate solution, or the like may be used. The electrolyte concentration of the electrolyte solution is kept constant by a water supply device (not shown) and an electrolyte solution supply device (not shown) linked with a monitor electrode (not shown), and a thermometer (not shown) ) Is maintained at a constant temperature by a heater (not shown) in conjunction with).
[0029]
According to such a surface area measuring device 1, since the flow of the electrolyte solution 10 is suppressed by the baffle plate 4, the current distribution in the water tank 2 is made uniform.
[0030]
Next, a method for measuring the surface area when the surface area measuring apparatus according to the embodiment is used will be described.
[0031]
First, a rack 5 on which an object to be measured is hung is suspended on a power supply rod 6 and immersed in an electrolyte solution 10, and the height of the object to be measured and the front, rear, left, and right positions are changed while a constant voltage is applied. The current value is measured, and the voltages of the upper electrode 3a, the lower electrode 3b, and the auxiliary electrode 7 are adjusted so that the fluctuation of the current value is small.
[0032]
Next, an arbitrary rack is set as a reference rack, the reference rack is hung on the power supply rod 6, immersed in an electrolyte solution, and a constant voltage is applied to measure a current value. Further, a plurality of racks having the same shape are measured in the same procedure, an average value is obtained, and this is set as a standard rack current value (Ls).
A plurality of reference measurement objects having a known surface area (for example, 0.5 dm ² / sheet × 20 sheets) are sequentially placed on a reference rack one by one, and a current value is measured in a state where the racks are immersed at the same water depth. , A relational expression (Fs) between the current and the surface area is obtained.
The relational expression (Fs) is expressed, for example, as As = f (x) + C (where As is the surface area, x is the current value, and C is the area of the standard rack alone).
[0033]
Then, the current value (Lv) is measured for the racks actually used (when there are a plurality of racks, all of them). Note that a rack in which an abnormal current value is detected is excluded as a defective rack. By multiplying the ratio (Lv / Ls) between the current value (Ls) of the reference rack and the current value (Lv) of the rack to be used by the constant term of the relational expression (Fs), a relational expression for the reference rack is obtained. (Fv) is corrected according to the size and shape difference of each rack actually used.
[0034]
In this way, since the relational expression (Fs) of the reference rack is corrected for each rack actually used, the current value is measured in a state where the DUT whose area is unknown is hung on the rack. By measuring (Lv), the surface area of the measured object can be accurately calculated based on the relational expression (Fs). It should be noted that if there are other factors to be corrected, such as the material of the rack, the settings or corrections shall be made as necessary.
[0035]
According to such a surface area measuring device and the measuring method, the current distribution in the water tank can be made uniform, and the current density in each part of the object is substantially constant, and the object having a complicated three-dimensional shape is measured. It is also possible to accurately measure the surface area.
This is because the flow of the electrolyte solution is suppressed by the baffle plate 4 so that the distance between the electrode and the device under test acts as an apparently long distance, or the resistance increases in inverse proportion to the distance from the electrode. It is presumed that components are generated. In addition, it is assumed that the uniform distribution of the current is achieved by arranging the electrodes 3 substantially uniformly in the water tank 2 in addition to the above-described operation.
[0036]
Further, since the current distribution in the water tank is made uniform, there is an effect that the surface area can be measured accurately even when the position of the object to be measured in the water tank changes.
[0037]
In the above embodiment, the case where the baffle plate 4 is used as the flow suppressing means has been described, but the present invention is not limited to this.
Therefore, as another flow suppressing means, for example, as shown in FIG. 4, a cylindrical body 41 capable of accommodating an electrode and lids 42 provided at both ends of the cylindrical body 41 are provided. It is also possible to use one that is configured so as to be separated from the lid 42 so as to form the flow path 11 having a predetermined width. According to the flow suppressing means having such a configuration, there is an advantage that it is not necessary to install a large baffle plate in the water tank, and the inside of the water tank can be widely used.
[0038]
Further, as another form of the flow suppressing means, a flow path having a shape in which the flow distance between the electrode region and the measured object region is increased in addition to slightly reducing the width may be used. When the flow distance is increased, the distance between the electrode and the object to be measured is increased, so that the influence of the Ohm's law can be reduced. In addition, the effect can be more remarkably exhibited by using a narrow flow path.
[0039]
Also, the shape of the electrode 3 is not particularly limited, and when the cylinder 41 and the lid 42 as shown in FIG. It is good also as cylindrical electrode 31 which is easy to do.
[0040]
Further, it is preferable that the position and the number of the electrodes to be provided are arranged at positions as uniform as possible in the water tank. In the above embodiment, a total of eight electrodes are evenly arranged in the water tank, but the number of electrodes may be smaller or more.
Also, the shape of the water tank is not particularly limited, and may be a cylindrical shape or any other polyhedral shape.
[0041]
In the embodiment of the surface area measuring method, the ratio (Lv / Ls) between the reference rack current value (Ls) and the rack current value (Lv) to be used is multiplied by the relational expression (Fs). , The relational expression (Fs) for the standard rack was corrected for each rack actually used, but the current value was measured by sequentially multiplying each rack used by a plurality of reference measurement objects, and directly measuring the current value. And a relational expression (Fv) between the surface area and the surface area may be obtained.
[0042]
Furthermore, in the above embodiment, the surface area was calculated by measuring the current value while keeping the voltage constant.However, the present invention is not limited to this, and by measuring the voltage while keeping the current constant, the object to be measured can be measured. The surface area may be calculated.
[0043]
Further, the above embodiment is suitable for a case where an object to be subjected to a plating process is to be measured, but the present invention is directed to a case where the object to be subjected to a surface treatment utilizing these electrochemical reactions is to be measured. The present invention is not limited to this, and any object for which surface area measurement is difficult can be used as a measurement target.
[0044]
The present invention can measure the surface area by measuring, for example, a current value of a conductive measurement target as in the above embodiment, but limits only such a conductive measurement target as a measurement target. Not something. That is, according to the present invention, an insulating substance can be used as a measurement target. Specifically, the capacitance is measured in a state where a voltage is applied by the same method, and the capacitance is measured as a dielectric. By dividing by the ratio, the surface area of the measurement object can be measured.
[0045]
Here, the current distribution in the water tank was measured using a test device as shown in FIG. 5 in order to verify that the current distribution in the water tank was made uniform when the baffle plate was installed as a flow suppressing means.
FIG. 5 is a perspective view schematically showing a test apparatus. The test apparatus includes a water tank 2, a plate electrode (cathode) 15 arranged at the center of the water tank 2, and a structure surrounding the plate electrode 15. It comprises a square frame type electrode (anode) 3 and a square frame type baffle plate 4 disposed between the cathode 15 and the anode 3. The upper end of the baffle plate 4 is above the liquid level, and the lower end of the baffle plate 4 is installed at a predetermined gap from the bottom of the water tank 2. The gap between the baffle plate 4 and the water tank 2 is It is configured to suppress the flow of the solution.
[0046]
As shown in FIG. 6, the center of the plate electrode (FIG. 6) was measured using such a test apparatus, when the gap between the baffle plate 4 and the water tank 2 was 20 mm and 1 mm, and when the baffle plate 4 was not installed. The current distribution when the cathode 15 was moved in one direction (rightward in FIG. 6) of the water tank 2 was measured.
The voltage applied between the electrodes of about 6V, the electrolyte solution was a 0.5% sodium hydroxide solution, the plate electrode 15, area using two kinds of 1 dm ² and 0.5 dm ^2. The moving distance of the plate electrode 15 was represented by a relative value obtained by dividing the distance actually moved by the distance between the electrodes before the movement.
FIG. 7 shows the measurement results of the current distribution.
[0047]
As shown in FIG. 7, when the baffle plate 4 is not installed, the flat plate is used in both cases where the area is 1 dm ² (indicated by (1) in the figure) and 0.5 dm ² (indicated by ( ² ) in the figure). It can be seen that the current value increases significantly as the electrode 15 is moved toward one end of the water tank 2.
On the other hand, when the baffle plate 4 is installed, the current value when the plate electrode 15 is moved is substantially constant regardless of whether the gap is 1 mm or 20 mm, and the current distribution in the water tank is uniform. It turns out that it becomes.
[0048]
As described above, it is not clear why the current distribution is constant contrary to Ohm's law, but the provision of a flow suppression means such as a baffle plate causes some resistance to the passage of ions, and the distance between the electrodes is reduced. It is presumed that when the passing amount of ions increases, the resistance becomes large when approaching, and when the passing amount of ions decreases due to the distance between the electrodes, the resistance becomes small. .
[0049]
Next, test pieces A to I having a three-dimensional shape and having the same surface area as shown in FIG. 8 were installed as cathodes in the center of the test apparatus, and the current values of the individual test pieces were measured. FIG. 9 shows the measurement result of the current value when the baffle plate 4 is not installed, and FIG. 10 shows the measurement result of the current value when the baffle plate 4 is installed so that the gap with the water tank is 20 mm.
[0050]
When no baffle is installed (graph in FIG. 9), the variation of the current value, that is, (maximum value−minimum value) / average value is about 23%, whereas when the baffle is installed (FIG. 9). Graph 10) shows that the variation of the current value is reduced to about 16%.
[0051]
In this way, by disposing a flow suppression means such as a baffle plate between the cathode and the anode, the current distribution in the water tank is made uniform, and as a result, the fluctuation of the current value due to the three-dimensional shape of the measured object is achieved. Is greatly reduced.
Therefore, when measuring the surface area of an object to be measured having a complex three-dimensional shape, the method and apparatus of the present invention can measure the surface area with extremely high precision as compared with the conventional method.
[0052]
Next, an embodiment of a plating method according to the present invention will be described.
The apparatus used in the plating method of the present invention is configured in substantially the same manner as the surface area measuring apparatus 1. However, a plating bath containing a predetermined metal ion is used as an electrolyte solution, the object to be treated is an anode, and the electrode is a cathode. It is also possible to use the same metal as the plating metal as the electrode.
[0053]
The specific procedure of the plating method is to immerse a workpiece whose surface area is measured in advance in a plating bath, adjust a current value so as to have a desired current density, and deposit a plating layer by energizing for a desired time. .
The surface area measurement method described above can be suitably employed for measuring the surface area of the object to be processed. The object to be processed whose surface area has been measured is immersed in a cleaning tank while being suspended on the rack 5, washed, and then suspended on the rack 5. What is necessary is just to immerse it in a plating bath as it is.
[0054]
According to such a plating method, the current distribution in the plating bath is made uniform and the current density on the surface of the object to be treated is substantially constant, so that the object to be treated has a complicated three-dimensional shape. There is an effect that a plating layer having a uniform thickness can be formed.
[0055]
【The invention's effect】
As described above, according to the surface area measuring method and the surface area measuring apparatus according to the present invention, it is possible to accurately measure the surface area of the object to be processed.
Further, according to the plating method of the present invention, a uniform plating layer can be formed on the surface of the workpiece.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an embodiment of a surface area measuring device according to the present invention.
FIG. 2 is a plan view showing an embodiment of a surface area measuring device according to the present invention.
FIG. 3 is a sectional view taken along line AA of FIG. 2;
FIG. 4 is a partially cutaway perspective view showing another embodiment of the flow suppressing means and the electrode.
FIG. 5 is a perspective view of a test apparatus used for confirming the effect of the baffle plate.
FIG. 6 is a sectional view taken along line BB of FIG. 5;
FIG. 7 is a graph showing a measurement result of a current distribution.
FIG. 8 is a diagram showing a shape of a test piece used as an object to be measured.
FIG. 9 is a graph showing a measurement result of a current value when no baffle plate is installed.
FIG. 10 is a graph showing measurement results when a baffle plate is installed.
FIG. 11 shows an example of electrode arrangement studied by the present inventors as an improvement of the conventional measurement method.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Surface area measuring device 2 Water tank 3 Electrode 4 Baffle plate 5 Rack 7 Auxiliary electrode 10 Electrolyte solution 15 Plate electrode

Claims (14)

In a surface area measurement method of immersing an object to be measured and an electrode in an electrolyte solution, applying a voltage to the object to be measured and the electrode in the electrolyte solution, and measuring a surface area of the object to be measured from an energized state at that time, A method for measuring a surface area, comprising: arranging the electrodes at two or more locations around an object, and applying a voltage while suppressing the flow of the electrolyte solution between the electrodes and the object to be measured. The surface area measuring method according to claim 1, wherein two or more electrodes are arranged in a liquid depth direction. The surface area measuring method according to claim 2, wherein the voltages of the electrodes arranged in the liquid depth direction are separately adjusted. 4. The surface area measuring method according to claim 1, further comprising: arranging an auxiliary electrode below the object to be measured, and separately adjusting voltages of the electrode and the auxiliary electrode. The surface area according to any one of claims 1 to 4, wherein the flow of the electrolyte solution is suppressed so that a current distribution in a region where the object to be measured is immersed is within a range of ± 5%. Measuring method. A surface area measuring device used to measure the surface area of the object to be measured from a current-carrying state by applying a voltage to the object and the electrode immersed in the electrolyte solution, and to accommodate the electrolyte solution. A water tank, electrodes disposed at two or more locations around the water tank, and a flow suppression means for suppressing flow of the electrolyte solution between the electrode and the object to be measured. measuring device. 7. The surface area measuring device according to claim 6, wherein two or more electrodes are arranged in a liquid depth direction of the water tank. 8. The surface area measuring device according to claim 7, wherein the electrodes arranged in the liquid depth direction are configured to be able to adjust a voltage separately. The surface area measuring device according to any one of claims 6 to 8, wherein an auxiliary electrode is provided on a bottom surface of the water tank, and the electrode and the auxiliary electrode are configured to separately adjust a voltage. . The surface area according to any one of claims 6 to 9, wherein the flow suppressing means is provided so that a current distribution in an area where the object to be measured is immersed is within a range of ± 5%. measuring device. In a plating method in which a workpiece and an electrode are immersed in an electrolyte solution, a voltage is applied to the workpiece and the electrode in the electrolyte solution, and metal ions in the electrolyte solution are precipitated on the surface of the workpiece. An electroplating method comprising: arranging electrodes at two or more locations around an object; and performing the plating while suppressing the flow of the electrolyte solution between the electrodes and the object to be measured. The plating method according to claim 11, wherein two or more electrodes are arranged in a liquid depth direction. 13. The plating method according to claim 12, wherein the voltages of the electrodes arranged in the liquid depth direction are separately adjusted. 14. The plating method according to claim 11, wherein an auxiliary electrode is disposed below the object to be processed, and voltages of the electrode and the auxiliary electrode are separately adjusted.

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