JP2004219501A5 - - Google Patents
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- JP2004219501A5 JP2004219501A5 JP2003003867A JP2003003867A JP2004219501A5 JP 2004219501 A5 JP2004219501 A5 JP 2004219501A5 JP 2003003867 A JP2003003867 A JP 2003003867A JP 2003003867 A JP2003003867 A JP 2003003867A JP 2004219501 A5 JP2004219501 A5 JP 2004219501A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003003867A JP4300509B2 (ja) | 2003-01-10 | 2003-01-10 | 投影光学系、露光装置、および露光方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003003867A JP4300509B2 (ja) | 2003-01-10 | 2003-01-10 | 投影光学系、露光装置、および露光方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004219501A JP2004219501A (ja) | 2004-08-05 |
| JP2004219501A5 true JP2004219501A5 (ja) | 2008-02-28 |
| JP4300509B2 JP4300509B2 (ja) | 2009-07-22 |
Family
ID=32895006
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003003867A Expired - Fee Related JP4300509B2 (ja) | 2003-01-10 | 2003-01-10 | 投影光学系、露光装置、および露光方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4300509B2 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7869122B2 (en) | 2004-01-14 | 2011-01-11 | Carl Zeiss Smt Ag | Catadioptric projection objective |
| US8199400B2 (en) | 2004-01-14 | 2012-06-12 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
| US8913316B2 (en) | 2004-05-17 | 2014-12-16 | Carl Zeiss Smt Gmbh | Catadioptric projection objective with intermediate images |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102662307B (zh) * | 2012-05-02 | 2014-03-12 | 中国科学院光电技术研究所 | 一种高分辨率投影光学系统 |
| CN103278912B (zh) * | 2013-06-19 | 2015-07-08 | 中国科学院光电技术研究所 | 一种折反式紫外光刻物镜 |
-
2003
- 2003-01-10 JP JP2003003867A patent/JP4300509B2/ja not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7869122B2 (en) | 2004-01-14 | 2011-01-11 | Carl Zeiss Smt Ag | Catadioptric projection objective |
| US8199400B2 (en) | 2004-01-14 | 2012-06-12 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
| US8208199B2 (en) | 2004-01-14 | 2012-06-26 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
| US8208198B2 (en) | 2004-01-14 | 2012-06-26 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
| US8289619B2 (en) | 2004-01-14 | 2012-10-16 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
| US8339701B2 (en) | 2004-01-14 | 2012-12-25 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
| US8355201B2 (en) | 2004-01-14 | 2013-01-15 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
| US8416490B2 (en) | 2004-01-14 | 2013-04-09 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
| US8730572B2 (en) | 2004-01-14 | 2014-05-20 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
| US8804234B2 (en) | 2004-01-14 | 2014-08-12 | Carl Zeiss Smt Gmbh | Catadioptric projection objective including an aspherized plate |
| US8908269B2 (en) | 2004-01-14 | 2014-12-09 | Carl Zeiss Smt Gmbh | Immersion catadioptric projection objective having two intermediate images |
| US8913316B2 (en) | 2004-05-17 | 2014-12-16 | Carl Zeiss Smt Gmbh | Catadioptric projection objective with intermediate images |
| US9019596B2 (en) | 2004-05-17 | 2015-04-28 | Carl Zeiss Smt Gmbh | Catadioptric projection objective with intermediate images |
| US9134618B2 (en) | 2004-05-17 | 2015-09-15 | Carl Zeiss Smt Gmbh | Catadioptric projection objective with intermediate images |