JP2004214382A - Film layer display method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a film layer display method which can display legible indication according to various estimation measures and enables intuitive display. <P>SOLUTION: In the film layer display method, boundary surfaces 401, 402, 403 of films formed in a layer type are three-dimensionally lamination displayed in a state that vertical positional relation is maintained. When the boundary surface 403 is selected out of the boundary surfaces 401, 402, 403 which are lamination displayed three-dimensionally, an interval in a Z axis direction between the boundary surface 403 and the boundary surface 402 positioned above the boundary surface 403 is adjusted and lamination display is updated. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for displaying a film layer of a sample in which a light-transmitting film or the like is formed in a layer on the surface of a substrate such as a semiconductor wafer, a tempered glass having a plurality of types of glass bonded thereto, or a lens. is there.
[0002]
[Prior art]
In the case of a substrate surface such as a semiconductor wafer, a tempered glass laminated with multiple types of glass, or a lens such as a lens, a film that transmits light is formed on the surface in layers, and the thickness dimensions of these films vary. In some cases, desired characteristics as a product may not be obtained.
[0003]
For this reason, conventionally, for such products, the thickness is measured at each position on the film surface to evaluate the film thickness, and various measures have been made to display the measurement results in an easy-to-read manner. ing.
[0004]
FIG. 9 shows various display examples of the measurement results of the film thickness. FIG. 9A shows the coordinates of the upper boundary surface 901 and the lower boundary surface 902 of one film in the height direction by one. It is a dimensional display. FIG. 3B shows a one-dimensional display of the coordinate difference 903 in the height direction between the upper boundary surface and the lower boundary surface of one film, so that the change in the film thickness is easy to see. . Further, FIG. 4C shows the film thickness of one film in two-dimensional contour lines, so that the distribution of the film thickness in the plane direction is easy to see. FIG. 11D shows the contour lines shown in FIG. 10C in which a threshold value is set and the display of a portion deviating from the threshold value is changed. Is easy to identify.
[0005]
Thus, the method of displaying the measurement result of a sample having a three-dimensional shape in one or two dimensions is originally used as a very effective means when the evaluation scale of the sample is specified. . In addition, by adopting such a display method, when the film thickness is actually measured, the measurement location can be limited, so that there is an advantage that the measurement time can be reduced.
[0006]
On the other hand, Patent Document 1 also discloses, as a method of displaying a film thickness, a method of displaying a three-dimensional image, a method of displaying a contour line display image, displaying a change amount in different colors, and displaying a two-dimensional or three-dimensional image, and setting a threshold value. In addition, a method of changing the color of a portion exceeding the threshold and displaying the same is disclosed.
[0007]
[Patent Document 1]
JP 2002-39718 A
[0008]
[Problems to be solved by the invention]
However, the method of displaying the previous three-dimensional shape of the sample in a two-dimensional or one-dimensional manner with a reduced order is a loss of the amount of information, and is difficult to understand in the sense of intuitive display. Has become. This is not suitable for applications where it is desired to intuitively acquire information on a sample, such as when it is desired to obtain an overview of the characteristics of a sample manufactured experimentally.
[0009]
Further, a method of expressing by a three-dimensional image disclosed in Patent Document 1 described later is a method in which the difference between the height of the thin film surface and the height of the substrate surface is three-dimensionally displayed, and each of the boundary surfaces of the thin film can be three-dimensionally displayed. Not.
[0010]
By the way, recently, with the development of computers and the improvement of image processing technology, there has been a method that can display three-dimensionally each of the thin film boundaries as a result of film thickness measurement, and an approach for making the display more intuitive has been proposed. I have.
[0011]
For example, FIG. 9E shows a display example in which the conventional display is extended three-dimensionally. The upper boundary surface 901 and the lower boundary surface 901 of the one-dimensionally displayed thin film shown in FIG. Each of the side boundary surfaces 902 is three-dimensionally displayed.
[0012]
However, simply expanding the conventional one-dimensional display to three-dimensional display may make it difficult to view the display because of the three-dimensional display. That is, as shown in FIG. 9E, when the display shown in FIG. 9A is simply extended to a three-dimensional display, a part of the lower boundary surface 902 is hidden under the upper boundary surface 901. In some cases, the state of the entire lower boundary surface 902 cannot be observed.
[0013]
In such a case, by changing the viewpoint, the entire lower boundary surface 902 can be observed. However, the angle may be formed, which may make it difficult to see. In addition, when the film thickness is small, the entire lower boundary surface 902 may not be observed even when the viewpoint is changed.
[0014]
The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a film layer display method that makes it easy to view a display according to various evaluation scales and that can display the display in an intuitive manner.
[0015]
[Means for Solving the Problems]
According to the first aspect of the present invention, there is provided a film layer which detects information on each boundary surface of a film formed in a layered manner and three-dimensionally displays the detected boundary surfaces in a three-dimensional manner while maintaining a vertical positional relationship. In the display method, by selecting an arbitrary boundary surface from the three-dimensionally stacked boundary surfaces, an interval between the selected boundary surface and a boundary surface displayed adjacently is adjusted, It is characterized in that the stack display can be updated.
[0016]
According to a second aspect of the present invention, in the first aspect of the present invention, by selecting two of the three-dimensionally stacked boundary surfaces, a space sandwiched between the selected boundary surfaces is selected. Can be additionally displayed three-dimensionally.
[0017]
According to a third aspect of the present invention, in the first or second aspect, a boundary surface to be processed is selected from the three-dimensionally stacked boundary surfaces, and then the selected boundary surface is selected. By specifying display data that can be generated from information and a display method applied to the display data, a texture based on the display data is pasted and displayed on the surface of the boundary surface to be processed by the specified display method. It is characterized by:
[0018]
According to a fourth aspect of the present invention, in the invention according to any one of the first to third aspects, a boundary surface to be processed is selected from the three-dimensionally stacked boundary surfaces, and the selected boundary surface is selected. By designating a surface deformation method, the selected boundary surface is deformed into the specified shape, and a deformation amount associated with the deformation is stored, and the boundary surfaces other than the processing target boundary surface are subjected to the processing. It is characterized in that it is deformed based on the stored deformation amount and is displayed together with the selected boundary surface.
[0019]
According to a fifth aspect of the present invention, in the invention according to any one of the first to fourth aspects, a part that has been normally detected and a part that has not been detected among the three-dimensionally displayed boundary surfaces are determined. A feature is provided that a portion that has not been detected normally has a display effect different from that of the portion that has been normally detected.
[0020]
As a result, according to the present invention, it is possible to prevent the display of the selected boundary surface from being hidden by the display of other boundary surfaces, and to maintain the visibility of the display of each boundary surface while maintaining the visibility of the entire film. Can be observed.
[0021]
Further, according to the present invention, the shape of the film itself can be intuitively grasped from the space sandwiched by the selected boundary surfaces.
[0022]
Further, according to the present invention, various textures created based on the shape and information of the boundary surface can be pasted and displayed on the surface of the boundary surface selected as a processing target.
[0023]
Further, according to the present invention, the shape of each boundary surface can be displayed in a state where the influence of the deformation of the film is removed, so that the change in the thickness of each film can be easily seen.
[0024]
Further, according to the present invention, it is possible to determine, at a glance, a portion where the boundary surface can be normally measured and a portion where the boundary surface has not been measured from the displayed contents, so that the reliability of the acquired information on the boundary surface of the film can be accurately determined.
[0025]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0026]
(First Embodiment)
FIG. 1 shows a schematic configuration of a measuring microscope to which the film layer display method of the present invention is applied. In FIG. 1, reference numeral 1 denotes a microscope main body. The microscope main body 1 has a base 1a and a body 1b provided upright on the base 1a.
[0027]
An electric XY table 2 is provided on the base 1a. The sample 11 is placed on the XY table 2. In this case, a sample 11 in which a film is formed in a layer on a substrate is used.
[0028]
The XY table 2 has a built-in linear scale (not shown) along each moving axis in the XY axis direction, and counts the amount of movement in the XY axis direction by using these linear scales. XY axis coordinates can be obtained.
[0029]
An epi-illumination arm 3 is provided on the body 1b of the microscope body 1 so as to be movable in the vertical direction, that is, in the Z-axis direction. A revolver 4 is provided on a lower side of the epi-illumination arm 3 facing the XY table 2. The revolver 4 is provided with a plurality of objective lenses 5, and these objective lenses 5 can be selectively switched on the optical axis. On the upper side of the epi-illumination arm 3, an optical system including an autofocus unit 6, a lens barrel 7, and an eyepiece 8 is mounted.
[0030]
Inside the microscope main body 1, a motor 12 for driving the Z-axis, which will be described later, is incorporated. The motor 12 moves the epi-illumination arm 3 in the vertical direction in response to an instruction from the autofocus unit 6, that is, moves the entire optical system including the objective lens 5 with respect to the sample 11 on the XY table 2 in the Z-axis direction (optical axis direction). ).
[0031]
A linear scale (not shown) is built in the body 1b of the microscope main body 1 along the movement axis in the Z-axis direction of the epi-illumination arm 3, and the movement amount in the Z-axis direction is counted by the linear scale. Thus, the Z-axis coordinates of the position where the objective lens 5 is in focus can be obtained.
[0032]
A personal computer (hereinafter, referred to as a PC) 10 is connected to the microscope main body 1 via a communication cable 9. The PC 10 can acquire three-dimensional coordinates from the Z-axis coordinates of the position focused by the autofocus unit 6 and the XY-axis coordinates of the XY table 2 by, for example, communication using RS232C.
[0033]
FIG. 2 shows a schematic configuration of the autofocus unit 6.
[0034]
In this case, the autofocus unit 6 indicated by a portion surrounded by a dotted line in the drawing has a laser light source 601, and light emitted from the laser light source 601 is reflected by a mirror 602 and transmitted through a half mirror 603. Then, the light passes through the objective lens 5 and irradiates the sample 11 on the table 2. The light reflected by the sample 11 passes through the objective lens 5 again, is reflected by the half mirror 603, and forms an image by the imaging lens 604. A pinhole 605 is arranged at the focal position of the imaging lens 604. Thereby, when the focal position of the objective lens 5 is located on the surface of the sample 11, the light reflected by the sample 11 is selectively transmitted through the pinhole 605 and input to the photodetector 606. The output intensity of the photodetector 606 changes according to the intensity of the input light, and the output from the photodetector 606 is input to the CPU 607.
[0035]
In this case, for example, as shown in FIG. 3A, when the focal position of the objective lens 5 is scanned along the locus 304 in the drawing with respect to the film 301 of the sample 11, the output intensity of the photodetector 606 becomes It changes as indicated by 307 in FIG. In other words, the output intensity from the photodetector 606 shows the peak positions 308 and 309 at the positions 305 and 306 where the focal position of the objective lens 5 crosses the upper boundary surface 302 and the lower boundary surface 303 of the film 301, respectively. Will be formed.
[0036]
Thereby, the epi-illumination arm 3 is moved in the Z-axis direction by the Z-axis driving motor 12, and the entire optical system including the objective lens 5 is focused on the locus 304 shown in FIG. By moving from 310 to focusing 311, the peak position 309 and the peak position 308 of the output intensity of the photodetector 606 can be sequentially detected.
[0037]
Now, when the focal position of the objective lens 5 is at the focusing start position 310, the PC 10 uses the communication cable 9 to move the objective lens 5 in the direction indicated by the arrow, and as the search distance to the focusing end position 311. Are designated, and the focusing operation is started.
[0038]
Then, the CPU 607 starts sampling the output intensity of the photodetector 606 and instructs the motor 12 for driving the Z-axis to move the entire optical system including the objective lens 5 above the Z-axis.
[0039]
While moving the entire optical system above the Z axis, the CPU 607 monitors whether the output intensity of the sampled photodetector 606 has changed from positive to negative, and when the output intensity changes from positive to negative. 3B, the sampling of the output intensity of the photodetector 606 and the Z-axis driving are temporarily stopped. Then, in order to detect the peak position 309 with higher accuracy, more precise sampling of the output intensity of the photodetector 606 is restarted, and the motor 12 for driving the Z-axis is driven at a lower speed in the opposite direction to the above. Instruct to move with.
[0040]
Thereafter, when the CPU 607 detects that the sampled output intensity of the photodetector 606 has changed from positive to negative again, at this time, sampling of the output intensity of the photodetector 606 and Z-axis driving are stopped, and the PC 10 On the other hand, the end of the first focusing is notified via the communication cable 9 to terminate the focusing. The PC 10 notified of the end of focusing acquires the XY-axis coordinates of the XY table 2 of the microscope main body 1 and the Z-axis coordinates of the entire optical system including the objective lens 5 via the communication cable 9, and acquires the acquired XYZ coordinates. Is stored as the three-dimensional coordinates of the position 30 where the focal position of the objective lens 5 crosses the lower boundary surface 303 of the film 301.
[0041]
Next, from the state in which the focal position is at the position 306 of the lower boundary surface 303, the PC 10 again uses the communication cable 9 to move through the communication cable 9 in the direction of the arrow shown in FIG. The distance to the position 311 is specified, and the focusing operation is started.
[0042]
Then, the PC 10 acquires the XYZ coordinates of the position 305 of the upper boundary surface 302 of the film 301 where the focal position of the objective lens 5 crosses by the same operation as described above, and stores it as three-dimensional coordinates.
[0043]
Next, from the state where the focus position is at the position 305 of the upper boundary surface 302, the PC 10 further moves the communication direction through the communication cable 9 in the direction of the arrow shown in FIG. The distance to 311 is specified, and the focusing operation is started.
[0044]
In this case as well, the CPU 607 monitors the change in the output intensity of the sampled photodetector 606 from positive to negative in the same manner as described above, but this time the focusing is completed without detecting the change from positive to negative. The position 311 is reached.
[0045]
Accordingly, the CPU 607 notifies the PC 10 of the arrival at the focus end position via the communication cable 9 and ends the focus. In this case, the PC 10 recognizes that there is no boundary surface other than the boundary surfaces 302 and 303 in the range between the focus start position 310 and the focus end position 311, and sends the XY table 2 to the XY table 2 via the communication cable 9. An instruction is issued to move to the focus start position of the next measurement point.
[0046]
By repeatedly performing such an operation for all measurement points in the measurement area set on the surface of the sample 11, position information of the boundary surface of the film 301 in the measurement area can be obtained.
[0047]
Next, a method for displaying the position information of the boundary surface of the film obtained in this manner will be described.
[0048]
In this case, the boundary surface of the film is obtained as described above. Here, as shown in FIG. 4, assuming that the acquired boundary surfaces of the films are 401, 402, and 403, a three-dimensional object is defined based on the information of these boundary surfaces 401, 402, and 403. Then, as shown in FIG. 4A, these defined three-dimensional objects are three-dimensionally stacked and displayed while maintaining the vertical positional relationship. Here, a part of the display part of the boundary surface 402 is hidden by the display of the boundary surface 401, and a part of the display part of the boundary surface 403 is hidden by the display of the boundary surface 402.
[0049]
From this state, when it is desired to display the entire boundary surface 403, the boundary surface 403 is selected by means not shown. Then, as shown in FIG. 4B, a boundary surface positioned adjacent to the boundary surface 403 so that the entire display of the selected boundary surface 403 is not hidden by the displays of the other boundary surfaces 401 and 402. The distance between the layer 402 and the layer 402 is adjusted, and the stack display is updated. Here, even when the viewpoint of the three-dimensional display is changed while the boundary surface 403 is selected, the display is automatically updated so that the entire boundary surface 403 can be observed. Also, when the display of the boundary surface 403 is rotated while continuously changing the viewpoint of the three-dimensional display, the display is updated so that the entire boundary surface 403 can be observed.
[0050]
In the above description, the case where the boundary surface 403 is selected by means (not shown) in order to display the entire boundary surface 403 is described. The distance in the Z-axis direction between 401 and boundary surface 402 is adjusted, and the display is updated so that the entire boundary surface 402 can be observed. Also, in FIG. 4B, the display is updated so that the entire boundary surface 403 can be observed by adjusting the distance between the boundary surface 402 and the boundary surface 403 in the Z-axis direction. As shown in c), the display can be updated so that the selected boundary surface 403 is apparently at the top. Further, the display may be updated so that the entire boundary surface 403 can be observed by making the boundary surface where the display overlaps with the selected boundary surface transparent or translucent.
[0051]
Therefore, in this way, since the three-dimensional display can be performed while maintaining the positional relationship between the boundary surfaces 401, 402, and 403 of the film, the shape of the film formed by these boundary surfaces 401, 402, and 403 can be intuitively determined. I can figure it out. In addition, since the display of the selected boundary surface can be prevented from being hidden by the display of the other boundary surfaces, the boundary surfaces 401, 402, and 403 can be easily displayed while maintaining the visibility of the respective boundary surfaces 401, 402, and 403. , 402, and 403, the state of the entire film can be observed in detail.
[0052]
In the above-described embodiment, the entire optical system including the objective lens 5 is moved in the Z-axis direction (optical axis direction) together with the epi-illumination arm 3 by the motor 12 for driving the Z-axis. Alternatively, the XY table 2 may be moved in the Z-axis direction. In short, it is only necessary that the sample placed on the XY table 2 and the objective lens 5 can be relatively moved in the Z-axis direction (optical axis direction). In the above description, focusing is performed on the entire range from the focusing start position to the focusing end position for each measurement point inside the measurement area to detect all the boundary surfaces of the film. Only the lower boundary surface may be detected, and then all the upper boundary surfaces may be detected. Further, the motorized XY table 2 is used as a means for moving the measurement point on the sample. A two-dimensional scanning mechanism is provided between the half mirror 603 and the objective lens 5 shown in FIG. The measurement point may be moved by moving the laser beam two-dimensionally on the sample 11 by a mechanism. In this case, all the measurement points in the measurement area are scanned by the two-dimensional scanning mechanism at each step while moving stepwise in the Z-axis direction, and all the output intensities of the photodetector 606 at each measurement point are taken into the PC 10. After the step movement of the Z-axis is completed, the change in output intensity from the focusing start position 310 to the focusing end position 311 is stored in the PC 10 for each measurement point as described with reference to FIG. The position information of the boundary surface of the film at each measurement point may be obtained by calculation.
[0053]
(Second embodiment)
Next, a second embodiment of the present invention will be described.
[0054]
In this case, since the measuring microscope and the autofocus unit used in the second embodiment are the same as those in FIGS. 1 and 2 described above, these drawings are used. Until the position information of the boundary surface of the film is obtained using the measuring microscope and the autofocus unit, it is the same as that described in the first embodiment, and the description is omitted here.
[0055]
Next, a method for displaying the position information of the boundary surface of the film obtained in this manner will be described.
[0056]
Also in this case, when the boundary surfaces 401, 402, and 403 of the film are acquired in the manner described above, a three-dimensional object is defined for these boundary surfaces 401, 402, and 403, and as shown in FIG. These defined three-dimensional objects are three-dimensionally stacked and displayed while maintaining the vertical positional relationship.
[0057]
In this state, when the boundary surfaces 401 and 402 are selected, a space sandwiched between the selected two boundary surfaces 401 and 402 is defined as a three-dimensional object. Then, the defined three-dimensional object is additionally displayed as a space 501 between the boundary surface 401 and the boundary surface 402 as shown in FIG. Needless to say, the space 501 sandwiched between the two boundary surfaces 401 and 402 is the film itself. By displaying the film itself three-dimensionally, the shape of the film can be intuitively grasped.
[0058]
In this case, by adjusting the distance between the boundary surface 401 and the space 501 in the Z-axis direction, the stacked display can be updated as shown in FIG. 5B. By doing so, the space 501 itself can be displayed independently.
[0059]
(Third embodiment)
Next, a third embodiment of the present invention will be described.
[0060]
In this case, since the measuring microscope and the autofocus unit used in the third embodiment are the same as those in FIGS. 1 and 2 described above, these drawings are used. Until the position information of the boundary surface of the film is obtained using the measuring microscope and the autofocus unit, it is the same as that described in the first embodiment, and the description is omitted here.
[0061]
Next, a method for displaying the position information of the boundary surface of the film obtained in this manner will be described.
[0062]
Also in this case, a plurality of boundary surfaces 401, 402, and 403 of the film are obtained in the manner described above. Next, a boundary surface to be processed, for example, the boundary surface 401 is selected, and display data that can be generated from the information on the selected boundary surface 401 is specified from a plurality.
[0063]
Here, as the display data that can be specified, (a) the Z coordinate of each position constituting the boundary surface to be processed, and (b) each position between the reference boundary surface and the boundary surface to be processed which are specified in advance. (C) the distance in the normal direction obtained for each position of the predetermined reference boundary surface and the processing target boundary surface, and (d) the predetermined reference reference surface and the processing target boundary. This is the shortest distance obtained for each position on the surface.
[0064]
Next, a display method to be applied to the display data is specified. The display methods that can be specified here are (a) a display method using a look-up table that changes the display color according to the value size, and (b) a contour line display method according to the value size.
[0065]
Then, the texture based on the display data is pasted and displayed on the surface of the boundary surface 401 to be processed by the display method specified in advance.
[0066]
FIG. 6 shows a display example of the texture pasted in this manner. FIG. 6A shows a texture 404 in which the boundary surface 401 shown in FIG. 4A is colored according to the Z coordinate. FIG. 4B shows an example in which a texture 405 in which contour lines are drawn on the surface of the boundary surface 401 according to the Z coordinate is pasted on the boundary surface 401 shown in FIG. FIG. 4C shows an example in which the boundary surface 402 shown in FIG. 4A is designated as a reference, and a Z coordinate difference between the boundary surface 401 and the reference boundary surface 402 is calculated. An example is shown in which a texture 406 colored with color is pasted.
[0067]
In this way, various textures created based on the shape and information of the boundary surface can be pasted and displayed on the surface of the boundary surface specified as a processing target. The evaluation of the overall characteristics can be compared and evaluated on various evaluation scales.
[0068]
An imaging device (not shown) is connected to the lens barrel 7 of the microscope main body 1 described with reference to FIG. 1, and the imaging device and the PC 10 are connected by a cable (not shown), and an image captured by the imaging device is taken into the PC 10. In this way, luminance information may be acquired as information on the boundary surface of the film from the image information captured by the imaging device, and the luminance information may be pasted as a texture on the surface of the boundary surface designated as a processing target.
[0069]
(Fourth embodiment)
Next, a fourth embodiment of the present invention will be described.
[0070]
In this case, since the measuring microscope and the autofocus unit used in the fourth embodiment are the same as those in FIGS. 1 and 2 described above, these drawings are used. Until the position information of the boundary surface of the film is obtained using the measuring microscope and the autofocus unit, it is the same as that described in the first embodiment, and the description is omitted here.
[0071]
Next, a method for displaying the position information of the boundary surface of the film obtained in this manner will be described.
[0072]
Also in this case, the boundary surface of the film is obtained in the manner described in the first embodiment. Here, as shown in FIG. 7 (a), a display in which the cross-sectional directions of these boundary surfaces 701, 702, 703 can be observed based on the position information of the three boundary surfaces 701, 702, 703 of the two-layer film. Has been done.
[0073]
From this state, first, the boundary surface 702 is selected, and an instruction is given to transform the boundary surface 702 into, for example, a plane. Then, the average value Zave of the Z coordinate is calculated from all the position information forming the boundary surface 702, the Z coordinate of each position is set to the average value Zave, and the movement value of the Z coordinate at that time is stored as the deformation amount. .
[0074]
Thereafter, the position information of each of the other boundary surfaces 701 and 703 looking into the boundary surface 702 is also deformed into a plane based on the deformation amount of the boundary surface 702. Then, after finishing the deformation processing of all the boundary surfaces 701, 702, 703, the display is updated as shown in FIG.
[0075]
With this configuration, the shape of each of the boundary surfaces 701, 702, and 703 can be displayed in a state in which the influence of the film deformation has been removed, so that the change in each film thickness can be displayed easily.
[0076]
In the above description, as the deformation method, the boundary surface 702 is deformed into a plane whose Z coordinate is Zave. For example, the shape to be deformed is not a plane, but an arbitrary shape such as a convex surface or a concave surface can be designated. Is also good. Alternatively, a plurality of shapes to be deformed may be prepared in advance and selected, or the shape type and its parameters may be input.
[0077]
(Fifth embodiment)
Next, a fifth embodiment of the present invention will be described.
[0078]
In this case, since the measuring microscope and the autofocus unit used in the fifth embodiment are the same as those in FIGS. 1 and 2 described above, these drawings are used. Until the position information of the boundary surface of the film is obtained using the measuring microscope and the autofocus unit, it is the same as that described in the first embodiment, and the description is omitted here.
[0079]
Next, a method for displaying the position information of the boundary surface of the film obtained in this manner will be described.
[0080]
Also in this case, the boundary surface of the film is obtained in the manner described in the first embodiment. Here, as shown in FIG. 8A, a display is made such that the cross-sectional direction of the boundary surfaces 801 and 802 can be observed based on the position information of the boundary surfaces 801 and 802. This display also shows that the measurement point 803 on the boundary surface 801 and the measurement point 804 on the boundary surface 802 are extremely close to each other.
[0081]
When the measurement points 803 and 804 of the two boundary surfaces 801 and 802 are very close in this way, the change in the output intensity of the photodetector 606 described in FIG. 2 also becomes as shown in FIG. 8B. Therefore, since it cannot be separated into two peaks, it may be detected as one boundary surface.
[0082]
Therefore, in this embodiment, a histogram is created for the number of boundary surfaces detected for all measurement points, and the number of boundary surfaces that appeared most frequently is regarded as the number of boundary surfaces when normally detected. For measurement points at which a boundary surface other than the above is detected, a different display effect is provided by blinking the display or the like, so that measurement points that have been normally detected and display are distinguished.
[0083]
On the other hand, when the boundary surfaces of the film are acquired in the manner described in the first embodiment, it is assumed that the same number of boundary surfaces exist for all the measurement points. It is also conceivable that a boundary surface 807 exists partially between the boundary surface 805 and the boundary surface 806 as shown in FIG.
[0084]
In such a case, the number or area in which the number of measurement points where the number of boundary surfaces detected is the same as the number of boundary surfaces detected by the measurement point of interest continuously exists around the periphery is calculated as an evaluation value, and the calculated evaluation value is calculated. When the value is equal to or larger than the threshold value, it may be considered that the detection is normally performed.
[0085]
In addition, as a display effect for distinguishing a portion where the boundary surface can be normally detected from a portion other than the portion, not only blinking but also transparency or changing the color can be considered.
[0086]
With this configuration, it is possible to determine at a glance, from the displayed contents, a portion where the boundary surface can be normally measured and a portion where the boundary surface has not been measured. Therefore, it is possible to accurately determine the reliability of the acquired information of the membrane boundary surface. be able to.
[0087]
In addition, the present invention is not limited to the above-described embodiment, and can be variously modified in an implementation stage without departing from the spirit of the invention.
[0088]
Furthermore, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent features. For example, even if some components are deleted from all the components shown in the embodiments, the problem described in the column of the problem to be solved by the invention can be solved, and the problem described in the column of the effect of the invention can be solved. In the case where the effect described above is obtained, a configuration from which this configuration requirement is deleted can be extracted as an invention.
[0089]
【The invention's effect】
As described above, according to the present invention, it is possible to provide a film layer display method in which display according to various evaluation scales can be easily viewed and intuitively displayed.
[Brief description of the drawings]
FIG. 1 is a diagram showing a schematic configuration of a measurement microscope to which a film layer display method of the present invention is applied.
FIG. 2 is a diagram showing a schematic configuration of an autofocus unit to which the film layer display method of the present invention is applied.
FIG. 3 is a view for explaining a method of acquiring a boundary surface of a film used in the method of displaying a film layer according to the present invention.
FIG. 4 is a view showing a display example of a film thickness measurement result according to the first embodiment of the present invention.
FIG. 5 is a diagram illustrating a display example of a film thickness measurement result according to the second embodiment of the present invention.
FIG. 6 is a diagram illustrating a display example of a film thickness measurement result according to the third embodiment of the present invention.
FIG. 7 is a diagram illustrating a display example of a film thickness measurement result according to a fourth embodiment of the present invention.
FIG. 8 is a diagram showing a display example of a film thickness measurement result according to a fifth embodiment of the present invention.
FIG. 9 is a view showing a display example of a conventional film thickness measurement result.
[Explanation of symbols]
1. The microscope body
1a: Base part
1b ... trunk
2. XY table
3. Epi-illumination arm
4. Revolver
5. Objective lens
6 ... Auto focus unit
601 laser light source
602… Mirror
603: Half mirror
604: imaging lens
605: Pinhole
606 photodetector
607 ... CPU
7 ... Barrel
8. Eyepiece
9 Communication cable
10 PC
11 ... sample
12 ... Motor
301 ... film
302, 303 ... boundary surface
304: locus
305, 306 ... position
308, 309 ... peak position
310: Focusing start position
311 ... Focusing end position
401 to 403 ... Boundary surface
501 ... space
701, 702 ... boundary surface
801, 802, 805 to 807 ... boundary surface
802 ... Boundary surface
803, 804 ... measurement points

Claims (5)

A film layer display method for detecting information of each boundary surface of a film formed in a layered form and three-dimensionally stacking and displaying these detected boundary surfaces while maintaining a vertical positional relationship,
By selecting an arbitrary boundary surface among the three-dimensionally displayed boundary surfaces, an interval between the selected boundary surface and a boundary surface displayed adjacently is adjusted, and the stacked display is updated. A method for displaying a film layer, wherein the method is enabled. The space between the selected boundary surfaces can be additionally displayed three-dimensionally by selecting two of the three-dimensionally stacked boundary surfaces. Item 6. The method for displaying a film layer according to Item 1. A boundary surface to be processed is selected from among the three-dimensionally displayed boundary surfaces, and then display data that can be generated from information of the selected boundary surface and a display method that is applied to the display data are respectively described. By specifying
3. The film layer display method according to claim 1, wherein a texture based on the display data is pasted and displayed on the surface of the boundary surface to be processed by the specified display method. By selecting a boundary surface to be processed from among the three-dimensionally stacked boundary surfaces, and specifying a deformation method of the selected boundary surface,
The selected boundary surface is deformed into the specified shape, and a deformation amount associated with the deformation is stored,
The film according to any one of claims 1 to 3, wherein a boundary surface other than the boundary surface to be processed is deformed based on the stored deformation amount, and is displayed together with the selected boundary surface. Layer display method. In the three-dimensionally displayed boundary surface, a portion that has been normally detected and a portion that has not been detected are determined, and a display effect that differs from the normally detected portion is provided in the portion that has not been detected normally. The method according to any one of claims 1 to 4, further comprising:

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