JP2004211693A - Pump - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a miniaturizable pump for efficiently discharging fluid to the outside by vibrating a diaphragm with less power consumption. <P>SOLUTION: The pump P comprises an electromagnet 6 stored in a cylindrical body 3a and arranged outside a pump chamber 12 in opposition to the diaphragm 9. To the diaphragm 9, a first vibrator 3b is fixed which is attached to one end of the cylindrical body 3a. The cylindrical body 3a is vibrated in synchronization with the change-over of a magnetic pole of the electromagnet 6 and the diaphragm 9 is vibrated via the first vibrator 3b, whereby a suction valve 17 can open/close a suction hole 15 and a discharge valve 18 can open/close a discharge hole 16. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

  The present invention relates to a pump, and more particularly, to a pump suitable for performing suction of a fluid into a pump chamber and discharge of a fluid to the outside of a pump chamber using vibration of a diaphragm.

  An example of a conventionally proposed fuel supply pump will be described with reference to FIG. 9. In the conventional pump K, a plurality of electromagnets 101 around which a coil 101 a is wound are buried and disposed in a case 102. .

  Further, a pair of permanent magnets 103 are attached to a rod-shaped vibrator 104 with a predetermined gap between the electromagnets 101 facing each other.

  At both ends of the vibrator 104, a thin diaphragm 105 is attached, and the diaphragm 105 is sandwiched between a pump casing 106 and a case 102 disposed outside the diaphragm 105. Fixed.

  A lid 107 is fixed to the pump casing 106 with a packing 107a interposed therebetween, and a suction chamber 108 and a discharge chamber 109 which are independently sealed are formed.

  In the suction chamber 108, a suction port 111 for communicating with the pump chamber 110 is formed, and a suction valve 112 capable of opening and closing the suction port 111 is provided.

  The discharge chamber 109 is provided with a discharge port 113 for communicating with the pump chamber 110 and a discharge valve 114 that can open and close the discharge port 113.

  As a result, based on the magnetic interaction between the electromagnet 101 and the permanent magnet 103, the diaphragm 105 connected to the vibrator 104 vibrates, and a fluid is sucked into the pump chamber 110 from the outside via the suction chamber. At the same time, the fluid can be supplied by sucking into the pump chamber 110 and discharging the fluid to the outside from the discharge port 45 via the discharge chamber 109.

  In such a conventional pump K, since two pump chambers 110 are disposed on the left and right sides of the case 102, the two diaphragms 105 are vibrated to discharge a large amount of fluid from the left and right discharge ports 45. It is possible.

JP-A-2002-106472

  Since such a conventionally proposed pump K uses a plurality of electromagnets 101, there is a problem that power consumption is increased.

  Further, since the pump K has the suction chamber 108, the discharge chamber 109, and the pump chamber 110 on the left and right sides of the case 102, respectively, it is difficult to reduce the size of the pump K. Therefore, it is not suitable, for example, for a small pump for supplying fuel to a portable electronic device fuel cell.

  The present invention has been made in view of the above points, and has as its object to provide a pump that can efficiently discharge a fluid to the outside by vibrating a diaphragm with small power consumption and that can be downsized.

  As a first means for solving the above problems, a pump according to the present invention includes a pump chamber, a suction valve capable of restricting suction of a fluid into the pump chamber, and an outside of the pump chamber of the fluid sucked into the pump chamber. A discharge valve capable of restricting discharge to the pump chamber, the pump chamber is formed with a suction hole capable of sucking the fluid and a discharge hole capable of discharging the fluid sucked from the suction hole, An electromagnet housed in a cylinder is disposed on a side outside the pump chamber facing the vibration plate, the electromagnet being disposed on the side facing the vibration plate, wherein the vibration plate includes: A first vibrator attached to one end of the cylindrical body is fixed, the cylindrical body vibrates in synchronization with switching of the magnetic pole of the electromagnet, and the vibrating plate vibrates via the first vibrator. This allows the suction valve to open and close the suction hole. Together are I, the discharge valve be opened and closed the discharge hole.

  Further, as a second means for solving the above-mentioned problem, a second vibrator is fixed to the other end of the cylindrical body on the side facing the first vibrator, and the first and second vibrators are fixed. The vibrator is attracted or repelled to the electromagnet in synchronization with the switching of the magnetic poles of the electromagnet, whereby the cylinder moves with the piston, and the diaphragm vibrates.

  Further, as a third means for solving the above problems, a pump chamber, a suction valve capable of restricting suction of fluid into the pump chamber, and discharge of the fluid sucked into the pump chamber to outside the pump chamber A discharge valve capable of controlling the pressure, and a pump hole formed with a suction hole capable of sucking the fluid and a discharge hole capable of discharging the fluid sucked through the suction hole. An electromagnet having a diaphragm capable of providing an input and a discharge force, and formed by disposing a cylindrical coil outside a cylindrical iron core on a side facing the diaphragm outside the pump chamber. A movable shaft having both ends mounted in the inner hole of the cylindrical iron core so as to protrude from the inner hole and having the diaphragm connected to one end thereof can reciprocate in the axial direction. Disposed on both sides of the movable shaft in the axial direction, A first vibrator disposed on one end side facing the moving plate and a second vibrator disposed on the other end side are disposed with the cylindrical iron core interposed therebetween, and the first and second vibrators are arranged. In each of the vibrators, a permanent magnet which is formed in an annular shape and is magnetized in the axial direction and arranged so that the same pole is opposed to both sides in the axial direction of the coil is sandwiched, and the electromagnet, the magnet holder and An operating force increasing means for increasing the operating force of the movable shaft is formed by a permanent magnet, a first vibrator attached to one end of the movable shaft is fixed to the diaphragm, and switching of magnetic poles of the electromagnet is performed. The movable shaft vibrates in synchronization with the first vibrator, and the diaphragm vibrates via the first vibrator, so that the suction valve can open and close the suction hole, and the discharge valve is The discharge hole can be opened and closed.

  Further, as a fourth means for solving the above problem, the operating force increasing means has a flange formed on both end faces of the cylindrical iron core so as to face radially outward, The permanent magnet is disposed on the outer side in the direction, and the first and second vibrators are formed of a magnetic material, and the permanent magnet coil of one of the first and second vibrators is provided. It is characterized in that it is formed by disposing an abutting surface that abuts on an opposing inner end surface axially inward from an inner end surface of the flange disposed on one of the vibrators.

  Further, as a fifth means for solving the above-mentioned problem, a cylindrical outer iron core surrounding the coil and the permanent magnet in a radial direction is provided.

  Further, as a sixth means for solving the above-mentioned problem, when the diaphragm vibrates in a direction to be attracted to the electromagnet via the first vibrator, the air pressure in the pump chamber decreases and the suction The fluid is sucked from the hole, and the discharge valve closes the discharge hole.

  Further, as a seventh means for solving the above problem, when the diaphragm vibrates in a direction to repel the electromagnet via the first vibrator, the air pressure in the pump chamber increases and the suction valve is increased. Is configured to close the suction hole and discharge the fluid sucked from the suction hole through the discharge hole.

  Further, as an eighth means for solving the above-mentioned problem, when the suction valve and the discharge valve close the suction hole and the discharge hole, the fluid does not flow backward. And

  ADVANTAGE OF THE INVENTION According to the pump which concerns on this invention, the outstanding effect that a diaphragm can be discharged efficiently by vibrating a diaphragm with small electric power consumption, and miniaturization is attained is produced.

  Hereinafter, the present invention will be described with reference to embodiments shown in the drawings.

  A first embodiment of a pump according to the present invention will be described with reference to FIGS. FIG. 1 is a sectional view of a main part of a first embodiment of a pump according to the present invention, FIG. 2 is a sectional view taken along line 2-2 of FIG. 1, FIG. 3 is a plan view, and FIGS. FIG. 4 is a cross-sectional view of a main part for explaining the operation of the first embodiment of the pump.

  First, as shown in FIG. 2, the pump P according to the first embodiment of the present invention includes a pump main body 1 having a substantially cylindrical outer shape. The pump body 1 is provided with a first case 2 having a hollow interior and made of a resin material or the like. As shown in FIG. And the left side in the figure is open. The side wall 2a is provided with a vent 2b through which outside air can enter.

  Further, a piston member 3 is disposed inside the cavity of the first case 2, and the piston member 3 is guided inside the cavity of the first case 2, and is disposed so as to be capable of vibrating in the left-right direction in the figure. ing.

  In the pump P of this embodiment, the right side in FIG. 1 is the drive side DS, and the left side in FIG. 1 is the fluid side FS that performs suction and discharge of the fluid.

  The piston member 3 has a cylindrical body 3a, a first vibrator 3b is fixed to one end on the left side in the drawing of the cylindrical body 3a, and a second vibrator 3c is mounted on the other end on the right side in the drawing. Is fixed, and a vent 3d is formed in the second vibrator 3c. The first and second vibrators 3b and 3c are each made of a resin material and formed by molding.

  An annular permanent magnet 4 is fixed to each of the first and second vibrators 3b and 3c so as to face each other.

  As shown in FIG. 2, two protrusions 2c, 2c are formed at a predetermined height inside the cavity of the first case 2, and the protrusions 2c, 2c are screwed on the first case 2 side. 5, the electromagnet 6 is fixed by screwing. That is, the electromagnet 6 is fixed inside the cavity of the first case 2.

  A cylindrical body 3a of the piston member 3 is disposed so as to cover the outer peripheral part of the electromagnet 6, and the cylindrical body 3a is guided by the outer peripheral part of the electromagnet 6 so as to freely vibrate in the left-right direction shown in FIG. Has become.

  The electromagnet 6 has an iron core 6a and a first magnetic pole 6b and a second magnetic pole 6c formed above and below the iron core 6a. A coil 7 indicated by a two-dot chain line is wound around the iron core 6 a, and a voltage having a predetermined frequency is applied to the coil 7 from an external magnet terminal 8, so that the first magnetic pole 6 b and the second magnetic pole 6 A periodic electromagnetic force is generated between the magnetic pole 6c and the magnetic pole 6c.

  That is, by applying a voltage of a predetermined frequency to the coil 7, the first and second magnetic poles 6b and 6c are periodically switched to an N pole and an S pole.

  A diaphragm 9 made of an elastic material such as stainless steel or the like is disposed at an open end on the left side of the first case 2 in the drawing, and the diaphragm 9 is formed by a rivet 10 at the center. It is fixed to one vibrator 3b.

  A second case 11 is attached to the outer peripheral portion on the left side of the first case 2 to which the diaphragm 9 is attached by press-fitting or bonding. The diaphragm 9 is sandwiched between the second case 11 and the first case 2, and the pump chamber 12 inside the second case 11 is shielded on the right side in the figure.

  Further, in the second case 11, a suction chamber 13 and a discharge chamber 14 are formed independently of each other on the left side of the pump chamber 12 in the drawing via a partition wall 11a.

  The pump chamber 12 and the suction chamber 13 are connected by a suction hole 15 formed in the partition wall 11a, and the pump chamber 12 and the discharge chamber 14 are connected by a discharge hole 16 formed in the partition wall 11a.

  The suction hole 15 holds an umbrella-shaped suction valve 17 made of rubber or the like having elasticity. The base of the center axis of the suction valve 17 is prevented from falling off by the partition wall 11a, and the pump is An umbrella portion located on the side of the chamber 12 can shield the suction hole 15.

  The discharge hole 16 holds a discharge valve 18 of the same material and shape as the suction valve 17. The base of the central axis of the discharge valve 18 is prevented from falling off by the partition wall 11 a, and An umbrella portion located on the chamber 14 side can shield the discharge hole 16. A shielding plate 19 for shielding the suction chamber 13 and the discharge chamber 14 is fixed to the left end of the second case 11 in the drawing, and a suction port 19 a connected to the suction chamber 13 is formed in the shielding plate 19. A suction-side joint 19b and a discharge-side joint 19d having a discharge port 19c connected to the discharge chamber 14 are formed so as to protrude, respectively.

  The permanent magnet 4 fixed to the first vibrator 3b has, for example, an S pole on the side of the electromagnet 6 facing the first magnetic pole 6b and an N pole on the side facing the second magnetic pole 6c. The permanent magnet 4 fixed to the second vibrator 3c has an N pole on the side facing the first magnetic pole 6b and an S pole on the side facing the second magnetic pole 6c.

  In the pump P of this embodiment, the right side in FIG. 1 is the drive side DS, and the left side in FIG. 1 is the fluid side FS that performs suction and discharge of the fluid.

  The operation of the pump P according to the first embodiment of the present invention having such a configuration will be described with reference to FIGS. 4 and 5. First, in order to suck a liquid to be a liquid fuel such as methyl alcohol into the pump chamber 12, a magnet When a voltage having a predetermined frequency is applied to the coil 7 from the terminal 8, the first magnetic pole 6b becomes the N pole and the second magnetic pole 6c becomes the S pole as shown in FIG.

  Then, the permanent magnet 4 on the first vibrator 3b side is attracted to the first magnetic pole 6b and the second magnetic pole 6c, and the permanent magnet 4 on the second vibrator 3c repels.

  As a result, the piston member 3 vibrates rightward in the figure, and the diaphragm 9 is pulled rightward and deformed.

  When the diaphragm 9 is deformed to the right, the volume inside the pump chamber 12 increases, the air pressure inside the pump chamber 12 becomes lower than the outside air pressure, and the outer peripheral portion of the umbrella portion of the suction valve 17 moves from the partition wall 11a. Separate slightly.

  As a result, a suction force is applied to the external fluid, and the fluid is sucked into the suction chamber 13 via the suction port 19a, and enters the suction chamber 13 from the suction chamber 13 through the suction hole 15 in the direction indicated by the arrow. Flows into.

  Since the air pressure in the discharge chamber 14 during the suction operation is higher than that in the pump chamber 12, the discharge valve 18 shields the discharge hole 16 and the fluid in the discharge chamber 14 flows back to the pump chamber 12 side. Is prevented.

  When a predetermined amount of fluid flows into the pump chamber 12 whose volume has increased through the suction hole 15, the magnetic pole of the electromagnet 6 is switched from an external control unit (not shown) via the magnet terminal 8. As a result, as shown in FIG. 5, the first magnetic pole 6b becomes the S pole and the second magnetic pole 6c becomes the N pole.

  Then, the permanent magnet 4 on the first vibrator 3b side repels and the permanent magnet 4 on the second vibrator 3c side is attracted to the first magnetic pole 6b and the second magnetic pole 6c.

  As a result, the piston member 3 vibrates leftward in the figure, and the diaphragm 9 is pressed leftward and deformed.

  When the diaphragm 9 is deformed to the left, the volume inside the pump chamber 12 is reduced, and the air pressure inside the pump chamber 12 rises higher than the external air pressure, so that the outer peripheral portion of the umbrella portion of the discharge valve 18 moves from the partition wall 11a. Separate slightly.

  As a result, a discharge force is applied to the fluid in the pump chamber 12, and the fluid is discharged from the discharge hole 16 in the direction of the arrow, and discharged from the discharge port 19c to the outside.

  Since the pressure of the pump chamber during the discharge operation is higher than that of the suction chamber 13, the suction valve 17 shields the suction hole 15 to prevent the fluid in the pump chamber 12 from flowing back to the suction chamber 13. It is preventing.

  In the pump P according to the first embodiment of the present invention, the piston member 3 and the diaphragm 9 vibrate in synchronization with the switching of the magnetic pole of the electromagnet 6. Due to the vibration of the diaphragm 9, the pressure in the pump chamber 12 rises and falls below that of the outside air, so that the suction valve 17 and the discharge valve 18 can be reliably operated. For example, a liquid fuel such as methyl alcohol is supplied to an external fuel cell. Can be efficiently supplied.

  Further, since the permanent magnet 4 fixed to both the first vibrator 3b and the second vibrator 3c is attracted / repelled by the electromagnet 6, even if the power applied to the coil 7 is small, the piston The member 3 can be reliably vibrated at high speed.

  Therefore, one pump chamber can discharge a large amount of fluid. In addition, since there is one pump chamber 12, the structure is simple and small.

  Although the present invention has been described using the first and second two vibrators 3b and 3c, the first and second vibrators 3b and 3c alone may be used.

  That is, the diaphragm 9 is fixed to the first vibrator 3b, and the first vibrator 3b is attached to one end of the cylindrical body 3a, and the electric power of a predetermined frequency is applied to the electromagnet 6 housed in the vibrable cylindrical body 3a. Is supplied, the cylinder 3a vibrates independently of the electromagnet 6, and the diaphragm 9 vibrates.

  In such a pump P of the first embodiment of the present invention, the piston member 3 can be vibrated only by the first vibrator 3b, so that the number of parts can be reduced and the size can be reduced.

  According to the pump P of the present embodiment, the cylinder 3a vibrates in synchronization with the switching of the magnetic poles 6b and 6c of the electromagnet 6, and the diaphragm 9 vibrates via the first vibrator 3b. 17 is capable of opening and closing the suction hole 15 and the discharge valve 18 is capable of opening and closing the discharge hole 16, so that the vibration plate 9 can be reliably vibrated by the vibration of the cylindrical body 3a. Therefore, the suction valve 17 and the discharge valve 18 operate reliably, and the fluid can be efficiently supplied to the outside.

  In addition, the first and second vibrators 3b and 3c attract or repel the electromagnet 9 in synchronization with the switching of the magnetic poles 6b and 6c of the electromagnet 6, whereby the cylinder 3a moves with a piston and the diaphragm 9 vibrates. As a result, the cylindrical body 3a can be moved by the piston by the permanent magnet 4 fixed to both the first and second vibrators 3b and 3c, and a pump with low power consumption can be provided.

  When the diaphragm 9 vibrates in the direction in which it is attracted to the electromagnet 9 via the first vibrator 3b, the air pressure in the pump chamber 12 becomes lower than the external air pressure, and the fluid is sucked from the suction hole 15, and Since the discharge valve 18 closes the discharge hole 16, the fluid can be reliably sucked through the suction hole 15. Further, at this time, since the discharge hole 16 is closed by the discharge valve 18, the fluid discharged to the outside does not flow back to the pump chamber 12.

  When the diaphragm 9 vibrates in a direction to repel the electromagnet 9 via the first vibrator 3b, the air pressure in the pump chamber 12 rises, the suction valve 17 closes the suction hole 15, and the suction hole 17 Since the sucked fluid is discharged from the discharge hole 16, the fluid sucked into the pump chamber 12 can be reliably discharged from the discharge hole 16 to the outside.

  Further, when the suction valve 17 and the discharge valve 18 close the suction hole 15 and the discharge hole 16, the fluid does not flow backward, so that an efficient pump with no fluid suction loss and discharge loss is provided. it can.

  A second embodiment of the pump of the present invention will be described with reference to FIGS. FIG. 6 is a sectional view of a main part of a pump according to a second embodiment of the present invention in a fluid suction state, FIG. 7 is an enlarged sectional view of the vicinity of the first vibrator in FIG. 6, and FIG. It is explanatory drawing which shows a magnetic circuit typically.

  As shown in FIG. 6, the pump PA of the present embodiment includes a reciprocating drive mechanism 22, a vibrating plate 23 that operates with the driving force of the reciprocal driving mechanism 22, and the vibration of the vibrating plate 23 causes suction and discharge of fluid. And a pump main body 24 capable of performing alternately. The right side of the pump PA in FIG. 6 is a drive side DS, and the left side of FIG. 6 is a fluid side FS that performs suction and discharge of a fluid.

  The reciprocating drive mechanism 22 has a cylindrical iron core 25 formed in a cylindrical shape. Annular flanges 26 are formed at both ends in the axial direction of the cylindrical iron core 25 in the left-right direction in FIG. A coil holding member 28 for arranging a cylindrical coil 27 outside the cylindrical core 25 is fixed to the outer periphery of the cylindrical core 25, and an inner hole of the cylindrical core 25 is The movable shaft 29 is supported so as to be slidable and reciprocally movable in the axial direction. The length of the movable shaft 29 in the axial direction shown in the left-right direction in FIG. 6 is longer than the length of the cylindrical iron core 25.

  The coil holding member 28 is formed of a non-magnetic material, for example, a resin. The coil holding member 28 has a cylindrical holding body 30 fixed to the outer periphery of the cylindrical iron core 25. The outer diameter of the holding body 30 is smaller than the outer diameter of the flanges 26 formed at both ends of the cylindrical iron core 25.

  Further, ring-shaped connecting walls 31 are formed in the vicinity of both ends of the outer periphery of the holding main body 30 so as to extend radially outward. The outer diameter of these connection walls 31 is formed larger than the outer diameter of the coil 27.

  The interval between the inner end faces of the connection walls 31 facing each other is formed slightly larger than the axial length of the coil 27. The coil 27 indicated by the two-dot chain line in FIG. 6 is formed as a whole in a concave space formed by the inner end faces of the connection walls 31 and the outer peripheral face of the holding main body 30 located between the inner end faces. It is wound so as to form a substantially cylindrical shape.

  The cylindrical iron core 25, the coil holding member 28, and the coil 27 constitute an electromagnet 32 formed by disposing the cylindrical coil 27 outside the cylindrical iron core 25 of the present embodiment.

  The electromagnet 32 is disposed at the left end of the cylindrical iron core 25 by applying a voltage of a predetermined frequency from an external power supply to the coil 27 through a magnet terminal (not shown). The first magnetic pole 33 formed on the flange 26 of the fluid side FS and the second magnetic pole 34 formed on the flange 26 of the drive side DS disposed at the right end of the cylindrical iron core 25 are mutually reciprocal. Different polarities can be switched periodically.

  That is, by applying a voltage of a predetermined frequency to the coil 27, for example, the polarity of the first magnetic pole 33 can be periodically switched in the order of N pole, S pole, N pole, S pole,. The polarity of the magnetic pole 34 can be periodically switched in the order of S pole, N pole, S pole, N pole,... At the same timing as the switching of the polarity of the first magnetic pole 33.

  A large-diameter cylindrical portion 35 is formed along the axial direction on the outer periphery of the outer end face located outside the connection wall 31 of the coil holding member 28 in the axial direction. These large-diameter cylindrical portions 35 are formed so as to extend axially outward so as to be coaxial with the holding main body 30. At the outer periphery of each large-diameter cylindrical portion 35, both end portions of the inner hole of the cylindrical outer iron core 36 disposed outside the coil 27 are fixed. Further, the distal end of the large-diameter cylindrical portion 35 located on the driving side DS is fixed to a mounting groove 37a formed near the outer periphery of an inner end surface located on the fluid side FS of the holding case 37. The holding case 37 is made of a non-magnetic material such as resin and is formed in a substantially annular shape, and has an inner hole serving as a vent 37b through which outside air can enter.

  At the tip of the large-diameter tubular portion 35 located on the fluid side FS of the coil holding member 28, a connecting tubular portion 38 is formed. The connecting cylindrical portion 38 has an inner cylindrical portion 38a having an inner diameter substantially equal to the inner diameter of the large-diameter cylindrical portion 35, and a large inner cylindrical portion 38a arranged outside the inner cylindrical portion 38a with a space therebetween. The outer cylindrical portion 38b having a diameter forms a double annular shape. Further, the length of the outer cylindrical portion 38b is formed longer than the length of the inner cylindrical portion 38a.

  On the inner peripheral side of the outer cylindrical portion 38b, an opening end side of a substantially horizontal cup-shaped inner case 39 having a right end opened and constituting a part of the pump main body 24 is fixed. A substantially horizontal cup-shaped outer case 40 having an opening at a right end capable of storing the inner case 39 in the internal space is attached to the outer periphery. The outer case 40 forms another part of the pump body 24. The outer peripheral portion of the diaphragm 23 is sandwiched between the inner cylindrical portion 38a and the inner case 39, and the opening on the drive side DS of the pump chamber 41 formed by the inner space of the inner case 39 is closed by the diaphragm 23. Have been.

  The movable shaft 29 functions as a mover, and is made of a non-magnetic material such as resin or austenitic stainless steel. The movable shaft 29 is provided so as to be able to reciprocate (vibrate) with a predetermined stroke, for example, a stroke of about 0.6 mm in the axial direction. The movable shaft 29 has a substantially rod-shaped shaft main body 42 slidably supported by the inner hole of the cylindrical iron core 25. The length of the shaft main body 42 is formed longer than the length of the cylindrical iron core 25, and both ends are formed so as to always protrude from the inner hole of the cylindrical iron core 25. That is, the movable shaft 29 is mounted in the inner hole of the cylindrical iron core 25 so that both ends protrude from the inner hole.

  On the fluid side FS of the shaft main body 42, an inner hole of a first vibrator 44F, which also serves as a magnet holder of the fluid side FS formed in a substantially cylindrical shape as a whole, is fixed, and the first vibrator 44F The outer end face of the fluid side FS of the movable shaft 29 and the inner end face arranged on the drive side DF of the head 45 having a larger diameter than the shaft body 42 formed at the end of the fluid side FS of the movable shaft 29 form the diaphragm 23. The inner peripheral portion is pinched. Thus, the diaphragm 23 is attached and connected to one end of the movable shaft 29, in this embodiment, an end located on the fluid side FS of the movable shaft 29.

  A small-diameter portion 43 having a smaller diameter than the shaft main body 42 is formed on the driving side DS of the shaft main body 42. The small-diameter portion 43 is provided with a drive-side DS generally formed in a substantially cylindrical shape. The inner hole of the second vibrator 44D also serving as a magnet holder is fixed.

  Accordingly, on both sides of the movable shaft 29 in the axial direction, the first vibrator 44F disposed on one end side facing the diaphragm 23 and the second vibrator 44D disposed on the other end side are cylindrical irons. A vibrator 44 (reference numeral 44 generally refers to a first vibrator 44F and a second vibrator 44D) is connected to the diaphragm 23 while the core 25 is disposed therebetween.

  The vibration plate 23 is formed of a nonmagnetic material having elasticity, for example, a rubber-like elastic material, a resin, a nonmagnetic metal such as austenitic stainless steel, or the like, and is formed in a substantially annular thin film as a whole. The cross-sectional shape of the diaphragm 23 can be selected and used from various conventionally known shapes such as a wavy shape, as necessary, such as a design concept.

  Each of the vibrators 44 is formed in a substantially annular shape as a whole from a magnetic material, for example, a ferromagnetic material similar to the cylindrical iron core 25. These vibrators 44 are disposed in the respective internal spaces of the large-diameter cylindrical portions 35 of the coil holding member 28, and are disposed on both axial sides of the movable shaft 29 with the cylindrical iron core 25 therebetween. ing. On the outer peripheral side of the inner end face of these vibrators 44, both ends in the axial direction of the permanent magnet 46 formed in a substantially annular shape are sandwiched. The base of an annularly formed damper 47 is held. The tip of the damper 47 is arranged so as to face the end face of the flange 26 of the cylindrical iron core 25.

  The permanent magnets 46 disposed on each of the vibrators 44 are formed in a substantially annular shape as a whole, and are magnetized in the axial direction. Each of these permanent magnets 46 is disposed between the outer circumference of the flange 26 of the cylindrical iron core 25 and the inner circumference of the large-diameter cylindrical portion 35 of the coil holding member 28. Each permanent magnet 46 is fixed to each magnet holder 44 such that both sides of the coil 27, that is, the inside facing the end face of the coil 27 via the connection wall 31 of the coil holding member 28 have the same polarity, for example, the S pole. Have been. Further, each of the permanent magnets 46 is arranged such that its inner periphery faces the outer periphery of the flange 26 of the tubular iron core 25. The respective permanent magnets 46 are arranged so as to be reciprocally movable in the axial direction together with the movable shaft 29 and the respective oscillators 44 by being held by the respective oscillators 44.

  Each of the vibrators 44 has a cylindrical contact surface 48F which is in contact with an inner end surface of the first vibrator 44F of the first vibrator 44F facing the coil 27 in the suction state shown in FIG. The iron core 25 is disposed axially inward of the inner end surface 26a of the flange 26 on the fluid side FS of the iron core 25.

  In the fluid suction state, the contact surface 48 </ b> D that abuts on the inner end surface of the second vibrator 44 </ b> D facing the coil 27 of the permanent magnet 46 is formed on the flange 26 of the cylindrical iron core 25 on the drive side DS. The contact surface 48D is disposed outside the inner end surface 26a in the axial direction. The contact surface 48D moves the movable shaft 29 to the fluid side FS and discharges the fluid (hereinafter simply referred to as discharge state), as described later in detail. 6), the cylindrical iron core 25 is disposed axially inward of the inner end surface 26a of the flange 26 of the driving side DS of the cylindrical iron core 25, as indicated by the broken line.

  That is, each vibrator 44 of the present embodiment is in contact with the inner end surface of one of the vibrators 44 facing the coil 27 of the permanent magnet 46 regardless of the moving position of the movable shaft 29. The contact surface 48 (the reference numeral 48 is a generic name for the contact surface 48F of the fluid side FS and the contact surface 48D of the drive side DS) is the same as that of the cylindrical iron core 25 arranged on one vibrator 44 side. It is configured such that it can be disposed axially inward of the inner end surface 26 a of the flange 26.

  A flange 26 is formed on both end surfaces of the cylindrical iron core 25 so as to extend radially outward. A permanent magnet 46 is disposed radially outward of the flange 26, and the vibrator 44 is made of a magnetic material. A contact surface 48 that is formed and is in contact with the inner end surface of one of the vibrators 44 that faces the coil 27 of the permanent magnet 46 of one of the vibrators 44 is a cylinder disposed on the one of the vibrators 44. With the configuration in which the electromagnet 32, the vibrator 44, and the permanent magnet 46 of the present embodiment increase the operating force of the movable shaft 29, the operating force is increased by an arrangement that is arranged axially inside the inner end surface 26 a of the flange 26 of the iron core 25. Is configured.

  Further, the reciprocating drive mechanism 22 of the present embodiment is formed by disposing a cylindrical coil 27 outside the cylindrical iron core 25, which is disposed outside the pump chamber 41 and on the side facing the diaphragm 23. The electromagnet 32 and the two ends are mounted in the inner hole of the cylindrical iron core 25 so as to protrude from the inner hole, are disposed so as to be able to reciprocate in the axial direction, and the diaphragm 23 is connected to one end. A pair of vibrators 44 arranged on both sides of the movable shaft 29 in the axial direction with the movable shaft 29 and the cylindrical iron core 25 therebetween, and both ends in the axial direction are sandwiched by the respective vibrators 44, and are formed in a ring shape. A pair of permanent magnets 46 are formed and magnetized in the axial direction, and are disposed on both sides in the axial direction of the coil 27 so that the same poles face each other.

  The pump body 24 has the inner case 39 and the outer case 40, and these cases 39, 40 are each formed in a substantially horizontal cup shape having an open right end. A suction chamber 50 shown in the lower part of FIG. 6 and a discharge chamber 51 shown in the upper part of FIG. 6 are independently formed between the inner case 39 and the outer case 40 located on the left of the pump chamber 41. I have. The pump chamber 41 and the suction chamber 50 are connected to a side wall 39a disposed on the fluid side FS of the inner case 39 by a suction hole 52 formed so as to penetrate in a thickness direction thereof. Like the suction hole 52, the discharge chamber 41 and the discharge chamber 51 are connected by a discharge hole 53 formed in the side wall 39a so as to penetrate in the thickness direction.

  In the vicinity of the suction hole 52 in the side wall 39a of the inner case 39, a base shaft portion of a suction valve 54 formed substantially in an umbrella shape by a rubber-like elastic body is held. The suction valve 54 functions as a check valve, and an umbrella portion disposed on the pump chamber 41 side can shield the suction hole 52.

  In the vicinity of the discharge hole 53 on the side wall 39a of the inner case 39, a base shaft portion of a discharge valve 55 formed substantially in an umbrella shape by a rubber-like elastic body is held. The discharge valve 55 functions as a check valve, and an umbrella portion disposed on the discharge chamber 51 side can shield the discharge hole 53.

  A suction-side joint 56 having a suction port 56a communicating with the suction chamber 50 and a discharge-side joint 57 having a discharge port 57a communicating with the discharge chamber 51 are provided on the outer end surface of the side wall 40a of the outer case 40. Each is formed to protrude outward in the direction.

  Next, the operation of the present embodiment having the above-described configuration will be described.

  FIG. 6 shows a suction state of a fluid in the pump PA of the present embodiment (hereinafter, simply referred to as a suction state). In this suction state, the movable shaft 29 is moved (vibrated) to the driving side DS, and the inner periphery of the diaphragm 23 is pulled and deformed by the movement of the movable shaft 29 to the driving side DS. ing. Due to the deformation of the diaphragm 23, the volume of the pump chamber 41 increases and the pressure of the pump chamber 41 decreases, and the outer peripheral portion of the umbrella portion of the suction valve 54 is located on the driving side DS of the side wall 39a of the inner case 39. Away from As a result, external fluid is sucked into the suction chamber 50 from the suction side joint 56 and flows into the pump chamber 41 through the suction hole 52.

  Since the pressure drop in the pump chamber 41 during such suction operation makes the pressure in the discharge chamber 51 higher than the pressure in the pump chamber 41, the outer peripheral portion of the umbrella portion of the discharge valve 55 is The discharge hole 53 is shielded by contacting the outer end surface located on the fluid side FS to prevent the fluid existing inside the discharge chamber 51 from flowing backward and flowing into the pump chamber 41.

  In the suction state, the vibrators 44 and the movable shaft 29 are both moved to the driving side DS, and the maximum movement position of these vibrators 44 to the driving side DS is allocated to the first vibrator 44F. The end surface of the damper 47 provided is brought into contact with the end surface of the flange 26 located on the fluid side FS of the cylindrical iron core 25, so that the control can be performed reliably and easily. As shown in detail in FIG. 7, the contact surface 48F of the first vibrator 44F is located axially inside the inner end surface 26a located axially inside the flange 26 located on the fluid side FS. I have.

  Then, when a predetermined amount of fluid flows into the pump chamber 41 whose volume has increased through the suction hole 52, the polarities of the magnetic poles 33 and 34 of the electromagnet 32 are switched based on a control command from a control unit (not shown). That is, a current is supplied to the coil 27 so that the first magnetic pole 33 has an N pole and the second magnetic pole 34 has an S pole.

  Then, since the cylindrical core 25, the first vibrator 44F, the cylindrical outer core 36, and the second vibrator 44D are each formed of a magnetic material, the cylindrical core 25, the first vibrator An ideal magnetic circuit as schematically shown in FIG. 8 is formed in 44F, the cylindrical outer core 36, and the second vibrator 44D.

  By such a magnetic circuit, a repulsive force indicated by a white arrow in FIG. 8 is applied between the first magnetic pole 33 and the first vibrator 44F located on the fluid side FS facing the first magnetic pole 33. FR occurs, and an attractive force indicated by a white arrow in FIG. 8 is applied between the second magnetic pole 34 of the electromagnet 32 and the second vibrator 44D located on the driving side DS facing the second magnetic pole 34. FA occurs. The movable shaft 29 moves to the fluid side FS by the attractive force FA and the repulsive force FR.

  At this time, in the present embodiment, since the actuation force increasing means 49 is formed, as shown in FIG. 8, the first magnetic pole 33 and the inside support of the first vibrator 44F located on the fluid side FS are provided. An oblique magnetic field is generated between the portion 44Fa (a portion having a contact surface 48F that is in contact with an end surface of the permanent magnet 46 facing the end surface of the coil 27) 44Fa. This magnetic field generates an oblique second attractive force FB indicated by a white arrow in FIG. 8 between the first magnetic pole 33 and the inner support portion 44Fa of the first vibrator 44F. The horizontal component of the second attractive force FB along the axial direction acts as a force for moving the movable shaft 29 to the fluid side FS.

  That is, in the pump PA of the present embodiment, when the movable shaft 29 is moved to the fluid side FS, the first force is added to the attractive force FA and the repulsive force FR acting between the pair of permanent magnets 46 and the electromagnet 32. Since the horizontal component of the second attractive force FB acting between the magnetic pole 33 and the inner support portion 44Fa of the first vibrator 44F is added as a force for moving the movable shaft 29 to the fluid side FS, the movable shaft 29 Driving force can be improved.

  In a configuration in which each vibrator 44 is formed of a non-magnetic material and the electromagnet 32 is simply disposed between the pair of permanent magnets 46, the movable shaft 29 is disposed between the pair of permanent magnets 46 and the electromagnet 32. Can be formed, but a magnetic field that forms an ideal magnetic circuit and the second attractive force FB cannot be formed.

  When the movable shaft 29 moves to the fluid side FS, the inner periphery of the vibration plate 23 is pulled and deformed by the fluid side FS, and the deformation of the vibration plate 23 reduces the volume of the pump chamber 41 and reduces the volume of the pump chamber 41. Of the discharge valve 55 is separated from the end face of the side wall 39a of the inner case 39 located on the fluid side FS. As a result, pressure is applied to the fluid in the pump chamber 41, and the fluid in the pump chamber 41 is discharged to the discharge chamber 51 through the discharge hole 53 and discharged to the outside through the discharge-side joint 57. PA is in a discharge state for discharging a fluid.

  The pressure increase in the pump chamber 41 during such a discharge operation causes the pressure in the suction chamber 50 to be higher than the pressure in the pump chamber 41, so that the outer peripheral portion of the umbrella portion of the suction valve 54 faces the side wall 39 a of the inner case 39. The suction hole 52 is shielded by contacting the end face located on the drive side DS of the pump chamber 41 to prevent the fluid existing inside the pump chamber 41 from flowing backward and flowing into the suction chamber 50.

  Further, in the state of discharging the fluid, each of the vibrators 44 is moving to the fluid side FS, and the maximum movement position of these vibrators 44 to the fluid side FS is provided in the second vibrator 44D. The distal end surface of the damper 47 abuts on the end surface of the flange 26 located on the driving side DS of the cylindrical iron core 25, so that the control can be performed reliably and easily. At this time, the contact surface 48D of the second vibrator 44D is positioned axially inside the inner end surface 26a of the flange 26 of the driving side DS.

  Then, when a predetermined amount of the fluid in the pump chamber 41 whose volume has decreased through the discharge hole 53 flows out to the outside, the polarities of the magnetic poles 33 and 34 of the electromagnet 32 are switched based on a control command from a control unit (not shown). That is, a current flows through the coil 27 so that the first magnetic pole 33 is an S pole and the second magnetic pole 34 is an N pole. Then, each part operates in the reverse direction and returns to the ejection state shown in FIG.

  That is, when moving the movable shaft 29 to the driving side DS, the first magnetic pole 33 of the electromagnet 32 and the first vibrator 44F located on the fluid side FS facing the first magnetic pole 33 are moved. Generates a repulsive force FR between the second magnetic pole 34 and the vibrator 44D located on the driving side DS opposed to the second magnetic pole 34, and the second magnetic pole 34 and the driving side. A second attractive force FB including a horizontal component for moving the movable shaft 29 to the driving side DS is generated between the second vibrator 44D and the inner supporting portion 44Da of the second vibrator 44D located at DS. The directions of the attractive force FA, the second attractive force FB, and the repulsive force FR generated when the movable shaft 29 is moved to the driving side DS are the same as the directions of the outlined arrows of the attractive force FA, the second attractive force FB, and the repulsive force FR shown in FIG. Are in opposite directions.

  Hereinafter, by periodically switching the polarities of the magnetic poles 33 and 34 of the electromagnet 32, the movable shaft 29 is reciprocated in the axial direction to vibrate the diaphragm 23, thereby alternately repeating suction and discharge of the fluid. be able to.

  According to the pump PA of this embodiment having such a configuration, similarly to the pump P of the above-described first embodiment, the diaphragm 23 can be vibrated with a small amount of power consumption to efficiently discharge the fluid to the outside and to be downsized. It is possible to achieve extremely excellent effects such as that

  That is, according to the pump PA of the present embodiment, the pair of permanent magnets 46 that reciprocate in conjunction with the movable shaft 29 in synchronization with the switching of the magnetic poles 33 and 34 of one electromagnet 32 are combined with the fixedly disposed electromagnets. Since the vibrating plate 23 is vibrated by attracting one permanent magnet 46 and repelling the other permanent magnet 46 by using the attractive force FA and the repulsive force FR acting between the vibrating plate 32 and the repulsive force FR, the electric power applied to the coil 27 is reduced. At least, it is possible to reliably and easily vibrate the diaphragm 23 at high speed. Therefore, the suction valve 54 and the discharge valve 55 operate reliably, and the fluid can be efficiently supplied to the outside.

  Further, since each vibrator 44 attracts or repels the electromagnet 32 in synchronization with the switching of the magnetic poles 33 and 34 of the electromagnet 32, the movable shaft 29 performs a piston motion and the diaphragm 23 vibrates. The movable shaft 29 can be moved by the piston by the permanent magnet 46 fixed to both the first and second vibrators 44F and 44D, and a pump with low power consumption can be provided.

  Further, according to the pump PA of the present embodiment, in addition to the attractive force FA and the repulsive force FR acting between the pair of permanent magnets 46 and the one electromagnet 32, the horizontal component is reduced by the operating force increasing means 49. Since the second attractive force FB acting in the direction in which the movable shaft 29 is moved can be generated, the driving efficiency of the movable shaft 29 and the driving efficiency of the diaphragm 23 can be easily improved. As a result, it is possible to reliably meet the recent demand for higher performance.

  Further, according to the pump PA of the present embodiment, since there is one pump chamber 41, the structure is simple and the size can be easily reduced.

  Further, according to the operating force increasing means 49 of the pump PA of the present embodiment, it is possible to more easily and reliably generate the second attractive force FB in which the horizontal component acts in the direction in which the movable shaft 29 moves.

  Further, according to the cylindrical outer core 36 of the pump PA of the present embodiment, an ideal magnetic circuit can be clearly formed, so that the operation efficiency of the movable shaft 29 can be easily improved. As a result, power consumption can be reduced.

  Furthermore, according to the pump PA of the present embodiment, the range of movement of the movable shaft 29 can be reliably and easily controlled by the damper 47 disposed on the vibrator 44. As a result, the interval between the permanent magnet 46 and the end face of the coil 27 of the electromagnet 32 facing the permanent magnet 46 can be narrowed, and the variation in the interval can be easily and reliably made to be 1/10 or less of the conventional accuracy. . As a result, a stable operation of the diaphragm 23 can be easily obtained even if the electric power supplied to the coil 27 of the electromagnet 32 is reduced.

  Further, when the diaphragm 23 moves in the direction in which the electromagnet 32 is attracted to the electromagnet 32 via the first vibrator 44F, that is, when the diaphragm 23 moves to the driving side DS, the pressure in the pump chamber 41 becomes lower than the outside pressure, and the fluid flows from the suction hole 52. The fluid is sucked and the discharge valve 55 closes the discharge hole 52, so that the fluid can be reliably sucked from the suction hole 52. At this time, since the discharge hole 53 is closed by the discharge valve 55, the fluid discharged to the outside does not flow back into the pump chamber 41.

  Further, when the diaphragm 23 moves in the direction in which the diaphragm 23 repels the electromagnet 32 via the first vibrator 44F, that is, moves to the fluid side FS, the air pressure in the pump chamber 41 rises, and the suction valve 54 closes the suction hole 52 and Since the fluid sucked from the suction hole 52 is discharged from the discharge hole 53, the fluid sucked into the pump chamber 41 can be reliably discharged from the discharge hole 53 to the outside.

  When the suction valve 54 and the discharge valve 55 close the suction hole 52 and the discharge hole 53 (an intermediate state between the suction state and the discharge state), the fluid does not flow backward. In addition, an efficient pump without discharge loss can be provided.

  Since the pump of the present invention has small power consumption and is small, it is suitable as a fuel supply pump for a small fuel cell used as a battery of a portable electronic device. That is, since the pump of the present invention has a small power consumption and a small size, the reciprocating drive mechanism can be efficiently driven by the power of the fuel cell itself.

  As an example of the use of the pump of the present invention as described above, clean power supply means that does not cause environmental pollution has recently been demanded against the background of environmental problems such as air pollution. As one example, a fuel cell has been developed which can obtain desired electric power by subjecting methyl alcohol as a fuel to a decomposition chemical reaction.

  Such a fuel cell is expected to be useful in various fields such as a battery for an automobile. Furthermore, in recent years, a new concept of using a small fuel cell as a battery for a portable electronic device has been born. The fuel composed of a fluid such as methyl alcohol can be supplied to such a small-sized fuel cell for a portable electronic device in a short time by using the pump P of the present invention.

  Note that the present invention is not limited to the above-described embodiments, and various changes can be made as necessary.

Sectional view of a main part of a first embodiment of a pump of the present invention. 2-2 sectional view of FIG. FIG. 1 plan view FIG. 3 is a view similar to FIG. FIG. 2 is a view similar to FIG. 1 illustrating a state of discharge of fluid in the operation of the pump in FIG. 1. 2 is a sectional view of a main part of a pump according to a second embodiment of the present invention in a fluid suction state. FIG. 6 is an enlarged cross-sectional view near the first vibrator of FIG. 6. Explanatory drawing which shows typically the ideal magnetic circuit in the discharge state of the fluid of the pump of FIG. Schematic diagram illustrating a conventional pump

Explanation of reference numerals

1, 24 Pump body 2 First case 2a Side wall 2b Vent 3 Piston member 3b, 44F First vibrator 3c, 44D Second vibrator 4, 46 Permanent magnet 5 Screw 6, 32 Electromagnet 6a Iron core 6b 33 first magnetic pole 6c, 34 second magnetic pole 7, 27 coil 8 magnet terminal 9, 23 diaphragm 10 rivet 11 second case 11a partition plate 12, 41 pump chamber 13, 50 suction chamber 14, 51 discharge chamber 15, 52 suction hole 16, 53 discharge hole 17, 54 suction valve 18, 55 discharge valve 19 shielding plate 19a, 56a suction port 19b, 56 suction side joint 19c, 57a discharge port 19d, 57 discharge side joint 22 reciprocating drive mechanism 25 Cylindrical iron core 26 Flange 26a Inner end surface 28 Coil holding member 29 Movable shaft 39 Inner case 40 Outer case 44 Vibrator (first, second) Oscillators 44F, 44D)
47 Damper 48, 48D, 48F Contact surface 49 Actuation amount increasing means P, PA pump DS Drive side FS Fluid side FR Repulsive force FA Attraction FB Second attraction

Claims (8)

A pump chamber, a suction valve capable of regulating suction of fluid into the pump chamber, and a discharge valve capable of regulating discharge of the fluid sucked into the pump chamber to outside the pump chamber. A suction hole capable of sucking the fluid and a discharge hole capable of discharging the fluid sucked from the suction hole are formed, and a diaphragm capable of applying a suction force and a discharge force to the fluid is provided,
An electromagnet housed in a cylinder is provided on a side of the outside of the pump chamber facing the diaphragm, and a first vibrator attached to one end of the cylinder is fixed to the diaphragm. The cylinder vibrates in synchronization with the switching of the magnetic pole of the electromagnet, and the diaphragm vibrates via the first vibrator, so that the suction valve can open and close the suction hole. And the discharge valve is capable of opening and closing the discharge hole.   A second vibrator is fixed to the other end of the cylindrical body facing the first vibrator, and the first and second vibrators are synchronized with switching of magnetic poles of the electromagnet. The pump according to claim 1, wherein the cylindrical body is caused to perform a piston movement by being attracted to or repelled by an electromagnet, so that the diaphragm vibrates. A pump chamber, a suction valve capable of regulating suction of fluid into the pump chamber, and a discharge valve capable of regulating discharge of the fluid sucked into the pump chamber to outside the pump chamber. A suction hole capable of sucking the fluid and a discharge hole capable of discharging the fluid sucked from the suction hole are formed, and a diaphragm capable of applying a suction force and a discharge force to the fluid is provided,
An electromagnet formed by arranging a cylindrical coil outside the cylindrical iron core is disposed on a side of the outside of the pump chamber opposite to the vibration plate, and an electromagnet formed in an inner hole of the cylindrical iron core. A movable shaft having both ends mounted so as to protrude from the inner hole and having the diaphragm connected to one end is disposed so as to be able to reciprocate in the axial direction, and on both sides in the axial direction of the movable shaft. A first vibrator disposed on one end side facing the vibrating plate and a second vibrator disposed on the other end side are disposed with the cylindrical iron core interposed therebetween; In each of the two vibrators, a permanent magnet which is annularly formed and is magnetized in the axial direction and arranged so that the same pole is opposed to both sides in the axial direction of the coil is sandwiched, and the electromagnet and the magnet An operating force increasing means for increasing the operating force of the movable shaft by a holder and a permanent magnet is formed. A first vibrator attached to one end of the movable shaft is fixed to the vibrating plate, and the movable shaft vibrates in synchronization with the switching of the magnetic pole of the electromagnet, and the first vibrator is moved. A pump characterized in that the vibration plate vibrates via the suction valve so that the suction valve can open and close the suction hole, and the discharge valve can open and close the discharge hole.   The operating force increasing means has a flange formed on both end surfaces of the cylindrical iron core so as to face radially outward, and the permanent magnet is disposed radially outward of the flange, and , The second vibrator is formed of a magnetic material, and one of the first and second vibrators has a contact surface that is in contact with an inner end surface of the one vibrator that faces the coil of the permanent magnet. 4. The pump according to claim 3, wherein the pump is formed by being disposed axially inward of an inner end surface of the flange disposed on the vibrator side of the pump. 5.   The pump according to claim 4, wherein a cylindrical outer core surrounding the coil and the permanent magnet in a radial direction is provided.   When the vibrating plate vibrates in a direction in which the electromagnet is attracted to the electromagnet via the first vibrator, the pressure in the pump chamber is reduced, the fluid is sucked from the suction hole, and the discharge valve is set to the pressure. The pump according to any one of claims 1 to 5, wherein the discharge hole is closed.   When the diaphragm vibrates in a direction to repel the electromagnet via the first vibrator, the air pressure in the pump chamber rises, the suction valve closes the suction hole, and the suction is performed from the suction hole. The pump according to any one of claims 1 to 6, wherein the fluid is discharged from the discharge hole. 8. The device according to claim 1, wherein the fluid does not flow backward when the suction valve and the discharge valve close the suction hole and the discharge hole. 9. The described pump.