JP2004205975A - Transmissive type electromechanical optical switch element and switch array of the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transmissive type electromechanical optical switch element which has a simple structure and is easily manufactured. <P>SOLUTION: The transmissive type electromechanical optical switch element is composed of a transparent substrate 10 provided with a transparent electrode 14, a tilted thin film transparent beam 12 having a hollow structure, which is at least supported at the both ends on the transparent substrate 10, and a movable electrode 16 provided with in a region near a light transmission region on the thin film transparent beam 12, and the thin film transparent beam 12 is tilted and moved with an electrostatic force when a voltage is applied between the transparent electrode 14 and the movable electrode 16. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a transmissive electromechanical light modulation (MEM) element that transmits and blocks light by moving a movable thin film by electrostatic force, and a switch array thereof.
[0002]
[Prior art]
In this field, a diffraction grating light valve in which a beam moves vertically on a silicon substrate has been known for a long time (see, for example, Patent Document 1).
[0003]
[Patent Document 1]
Japanese National Patent Publication No. 10-510374 [Patent Document 2]
Japanese Patent Laid-Open No. 11-258558 [0004]
The light beam modulator described in Patent Document 1 includes the following a to d.
a. A plurality of elongate elements, each element having a first edge and a second edge and a light reflecting plane; and the elements are arranged in such a way that the first group of elements are interdigitated with the second group of elements. And the second group, and the elements are arranged in parallel to each other.
b. Means for suspending the elements of the first group and the second group at their edges;
c. Means for applying a first bias voltage to the first group and the second group such that the reflective surface is substantially coplanar and in a first plane that reflects the incident light beam; Means for applying a second bias voltage;
d. Means for selectively deflecting the elements of the first group that are parallel to a first plane and perpendicular to the plane toward a second plane that diffracts the incident light beam;
[0005]
On the other hand, the light modulator described in Patent Document 2 has a one-dimensional or two-dimensional matrix-shaped light modulation unit that modulates light from a planar light source by an electromechanical operation on an ultraviolet planar light source. A fluorescent material excited by light emitted from the modulation section is disposed opposite to the light modulation section, and the light modulation section is a transparent signal electrode which is one electrode provided on the light guide plate, and the signal electrode A transparent flexible thin film facing each other with a gap in between, and a scanning electrode which is provided on the flexible thin film and is opposed to the signal electrode, and applying an electric field to the signal electrode and the scanning electrode. The flexible thin film is bent by the generated electrostatic force, and light emitted through the flexible thin film is modulated.
[0006]
[Problems to be solved by the invention]
However, the device described in Patent Document 1 is a reflection type in structure, and therefore cannot transmit / block light.
Moreover, since the thing of patent document 2 uses optical interference, control in manufacturing an element was difficult. In particular, since the shape of the thin film beam affects on / off of the optical modulator, it is necessary to manufacture the thin film beam accurately, which is difficult. In addition, the multilayer structure is a drawback.
The present invention solves these problems, and an object of the present invention is to provide a transmissive electromechanical optical switch element having a simple configuration and easy to manufacture. There is.
[0007]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, according to the transmission type electromechanical optical switch element according to claim 1, a transparent substrate provided with a transparent electrode, and an inclined thin film transparent having a hollow structure supported at least both on the transparent substrate And a movable electrode provided in a region in the vicinity of the light transmission region on the thin film transparent beam, and the thin film transparent beam by an electrostatic force when a voltage is applied between the transparent electrode and the movable electrode. Therefore, a transmission type electromechanical optical switch element having a simple configuration and easy to manufacture can be obtained.
Note that the inclined thin-film transparent beam supported at least both on the transparent substrate has a structure in which the beam of the inclined portion and the beam of the inclined portion are composed of a plurality of columnar portions having different materials and different heights. Is of course good.
[0008]
According to the transmissive electromechanical optical switch element according to claim 2, a transparent substrate provided with a transparent electrode, a double pillar material which is provided on the transparent substrate and forms a parallelogram with the transparent substrate, and the double pillar material And a movable electrode provided in a region in the vicinity of the light transmission region on at least one of the two pillar members or on the thin film transparent beam, and a voltage between the transparent electrode and the movable electrode. The column member is tilted by the electrostatic force when a sapphire is applied, so that a transmissive electromechanical optical switch element having a simple configuration and simple to manufacture can be obtained. Further, two optical paths can be taken for one thin film transparent beam.
[0009]
According to a third aspect of the present invention, in the transmissive electromechanical optical switch element according to the first or second aspect, since the movable electrode is formed of a film that reflects or absorbs light, a member that blocks the optical path is provided separately. This eliminates the need for a transmissive electromechanical optical switch element having a simple configuration and is simple to manufacture.
[0010]
According to a fourth aspect of the present invention, in the transmissive electromechanical optical switch element according to the third aspect, the film that reflects or absorbs the light is a metal, metal and dielectric multilayer reflective film, or a transparent electrode and a dielectric. Thus, a transmissive electromechanical optical switch element which is strong and simple in construction and easy to manufacture can be obtained.
[0011]
According to the invention described in claim 5, in the transmissive electromechanical optical switch element according to any one of claims 1 to 4, the thin film transparent beam is made of polyimide, photoresist, polycarbonate, polyethylene, polystyrene, or others. Since it is made of resin or other organic material, a transmissive electromechanical optical switch element having a simple structure and strong and easy to manufacture can be obtained.
[0012]
The invention of the transmissive electromechanical optical switch element according to claim 6 includes: a transparent substrate provided with a transparent electrode; a double column member formed on the transparent substrate and forming a parallelogram with the transparent substrate; and the both column members A transparent thin film beam supported by the thin film transparent member, at least one of the two column members, or a light shielding member or a reflection member provided in the vicinity of the light transmission region on the thin film transparent beam, and the transparent electrode from one of the two column members An arm extending toward the arm and a non-transparent electrode provided at the tip of the arm, and the column member is formed by an electrostatic force when a voltage is applied between the transparent electrode and the non-transparent electrode. Since the tilting is performed, a transmissive electromechanical optical switch element having a simple configuration and a large displacement is obtained, and the transmissive electromechanical optical switch element can be easily manufactured.
[0013]
In the invention of the optical switch array according to claim 7, the transmission type electromechanical optical switch element according to any one of claims 1 to 6 is arranged one-dimensionally or two-dimensionally. A simple optical switch array can be obtained.
[0014]
According to an eighth aspect of the present invention, in the optical switch array according to the seventh aspect, since the microlens array for condensing the light is provided on the light incident or emission side of the optical switch array, the light is condensed by the microlens array. Therefore, the light use efficiency is increased, and even with a small opening area, high-efficiency and bright modulated light can be obtained.
Further, since the amount of displacement of the thin film transparent beam can be reduced as compared with the case where no microlens array is provided, the driving energy of the thin film transparent beam can be reduced.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, each embodiment of the present invention will be described with reference to the drawings.
<First Embodiment>
First, a first embodiment will be described with reference to FIG.
1A and 1B are longitudinal sectional views of a transmissive electromechanical optical switch element according to a first embodiment of the present invention. FIG. 1A is a non-operating state (when no voltage is applied), and FIG. When voltage is applied).
[0016]
1 (a) and 1 (b), 100 is a transmissive electromechanical optical switch element according to the first embodiment, 10 is a transparent substrate, 12 is both supported on a transparent substrate by pillars having different heights. An inclined thin-film transparent beam having a hollow structure, 14 is a transparent electrode provided on the transparent substrate 10, and 16 is a reflection or light-shielding provided in the vicinity of the optical path L (light transmission region) above the thin-film transparent beam 12. It is an electrode (movable electrode). One of the column members formed by the thin film transparent beam 12 is not perpendicular to the transparent substrate 10 but is inclined at an acute angle (displacement amount) θ1.
[0017]
As shown in FIG. 1A, when no voltage is applied between the transparent electrode 14 and the reflective / light-shielding electrode 16, the transparent beam 12 normally does not move, so that light coming from below the transparent substrate 10 does not move. And passes upward (see optical path L).
On the other hand, as shown in FIG. 1B, when a voltage is applied between the transparent electrode 14 and the reflective / light-shielding electrode 16, the reflective / light-shielding electrode 16 is attracted to the transparent electrode 14 by electrostatic force, and the transparent is accompanied accordingly. The beam 12 operates and moves obliquely downward, and the reflection / shield electrode 16 covers the optical path (see the optical path L). In this case, if the electrode is a reflective electrode, the light is reflected and the optical path is turned back.
When the voltage between the transparent electrode 14 and the reflective / light-shielding electrode 16 is removed again, the electrostatic force disappears and the state of FIG. Since the return in this case is performed with both pillar materials, the restoring force is larger than that of a conventional cantilever-supported MEM mechanical shutter, and it is suitable for high-speed movement.
[0018]
In manufacturing the oblique beam, for example, when forming a sacrificial layer (a layer that is removed after the process in order to finally form a void), exposure is performed using a photomask having a different surface density. As a result, the sacrificial layer is inclined, so that an oblique beam can be manufactured. According to the present invention, the film configuration is simple and the manufacture is facilitated.
Here, the oblique beam is shown as an example of both supports, but it can also be supported near the center of the beam.
In addition, the inclined thin film transparent beam supported at least both on the transparent substrate has a structure in which the beam of the inclined portion and the beam of the inclined portion are made of a plurality of columnar portions having different materials and different heights. Is of course good.
[0019]
The film that reflects or absorbs light is composed of a metal thin film (gold, silver, palladium, zinc, aluminum, nickel, metal oxide, etc.), a metal and dielectric multilayer reflective film, or a transparent electrode and a dielectric multilayer film. be able to.
The thin film transparent beam 12 can be composed of polyimide, photoresist, polycarbonate, polyethylene, polystyrene, other resins, or other organic materials.
[0020]
By arranging a large number of transmissive electromechanical optical switch elements 100 one-dimensionally or two-dimensionally, it is possible to obtain an optical switch array that can be easily manufactured with a simple configuration.
[0021]
<Modification 1 of the first embodiment>
Next, Modification 1 of the first embodiment will be described with reference to FIG.
FIG. 2 is a longitudinal sectional view of a transmissive electromechanical optical switch element according to Modification 1 of the first embodiment of the present invention, where (a) is non-operating (when no voltage is applied), and (b) is During operation (when voltage is applied).
2A and 2B, reference numeral 120 denotes a transmission type electromechanical optical switch element according to the first modification of the first embodiment, 10 denotes a transparent substrate, and 12 denotes a pillar material having a different height on the transparent substrate. The thin-film transparent beam having a hollow structure supported on both sides, 14 is a transparent electrode provided on the transparent substrate 10, and 16 ′ is an optical path L (light transmission region) of the lower part (back part) of the thin-film transparent beam 12. It is a reflection or light shielding electrode (movable electrode) provided in the vicinity.
FIG. 2 differs from FIG. 1 in that the mounting position of the movable electrode 16 ′ is the lower part (back part) of the thin film transparent beam 12.
[0022]
As shown in FIG. 2A, when no voltage is applied between the transparent electrode 14 and the reflective / light-shielding electrode 16, the transparent beam 12 normally does not move, so that light coming from below the transparent substrate 10 does not move. And passes upward (see optical path L).
On the other hand, as shown in FIG. 2B, when a voltage is applied between the transparent electrode 14 and the reflective / light-shielding electrode 16, the reflective / light-shielding electrode 16 is attracted to the transparent electrode 14 by electrostatic force, and accordingly the transparent electrode 14 is transparent. The beam 12 operates and moves obliquely downward, and the reflection / shield electrode 16 covers the optical path (see the optical path L). In this case, if the electrode is a reflective electrode, the light is reflected and the optical path is turned back.
When the voltage between the transparent electrode 14 and the reflection / light-shielding electrode 16 is removed again, the electrostatic force disappears, and the state returns to the state of FIG.
In the first modification, since the movable electrode 16 ′ is at the lower part (back part) of the thin film transparent beam 12, the distance from the fixed electrode 14 is shortened. Suitable for
[0023]
<Modification 2 of the first embodiment>
Next, Modification 2 of the first embodiment will be described with reference to FIG.
FIG. 3 is a longitudinal sectional view of a transmissive electromechanical optical switch element according to Modification 2 of the first embodiment of the present invention, where (a) is non-operating (when no voltage is applied), and (b) is During operation (when voltage is applied).
In FIGS. 3A and 3B, 130 is a transmission type electromechanical optical switch element according to the second modification of the first embodiment, 10 is a transparent substrate, and 12 ′ is a column having a different height on the transparent substrate. An inclined thin-film transparent beam supported by both materials with a material, 14 is a transparent electrode provided on the transparent substrate 10, and 16 ′ is an optical path L (light transmission region) at the lower part (back) of the thin-film transparent beam 12. Is a reflection or light shielding electrode (movable electrode) provided in the vicinity of.
2 differs from FIG. 1 in that an area (reflection / light-shielding electrode) 16 ′ covering the optical path L is narrowly formed, and the column material formed by the thin-film transparent beam 12 is further inclined than in FIG. This is a point where an acute angle (displacement amount) θ3 with respect to 10 is inclined by 1 (θ3 <θ1).
[0024]
As shown in FIG. 3A, when no voltage is applied between the transparent electrode 14 and the reflective / light-shielding electrode 16 ′, the transparent beam 12 normally does not move, so that light coming from below the transparent substrate 10 does not move. It passes through 12 'and exits upward (see optical path L).
On the other hand, as shown in FIG. 3B, when a voltage is applied between the transparent electrode 14 and the reflection / light-shielding electrode 16 ′, the reflection / light-shielding electrode 16 ′ is attracted to the transparent electrode 14 by electrostatic force, and accordingly, Then, the transparent beam 12 operates and moves obliquely downward, and the reflection / shield electrode 16 'covers the optical path (see the optical path L). In this case, if the electrode is a reflection electrode, the light is reflected to return the optical path, and if the electrode is a light shielding electrode 16 ′, the light is shielded.
When the voltage between the transparent electrode 14 and the reflection / light-shielding electrode 16 ′ is removed again, the electrostatic force disappears, and the state returns to the state of FIG. 3A by the elastic return force of the transparent beam 12 ′.
In the second modification, since the inclination of the column formed by the thin film transparent beam 12 ′ is inclined from FIG. 1, the displacement θ3 of the movement of the thin film transparent beam 12 ′ is the displacement θ1 of the movement of the transparent beam 12 of FIG. Therefore, the degree of freedom in design is increased, and a combination with a microlens array becomes possible.
[0025]
Further, when the present invention is applied to the flat display device described in Patent Document 2, the configuration and manufacture are further simplified. That is, a light modulation unit according to the present invention in the form of a one-dimensional or two-dimensional matrix that modulates light from a planar light source by electromechanical operation is disposed on the ultraviolet planar light source. A phosphor excited by the light emitted from the light modulation unit is disposed to face the light modulation unit. The light modulation unit includes a transparent signal electrode, which is one electrode provided on the light guide plate, a transparent flexible thin film facing the signal electrode with a gap, and a signal electrode provided on the flexible thin film. A scanning electrode which is the other electrode facing each other, deflects the flexible thin film by electrostatic force generated by applying an electric field to the signal electrode and the scanning electrode, and transmits light emitted through the flexible thin film. Can be modulated.
Thereby, the same thing can be easily manufactured with a transmission type, without using an interference type and a total reflection type. Moreover, the light utilization efficiency is high, high vacuum is not required, the area can be increased at a low cost, and a high-quality flat display device is obtained.
[0026]
<Second Embodiment>
Next, a second embodiment will be described with reference to FIG.
FIG. 4 is a longitudinal sectional view of a transmissive electromechanical optical switch device according to a second embodiment of the present invention, where (a) is non-operating (when no voltage is applied), and (b) is operating ( When voltage is applied).
[0027]
4A and 4B, reference numeral 200 denotes a transmission type electromechanical optical switch element according to the second embodiment, reference numeral 40 denotes a transparent substrate, and reference numeral 42 denotes a parallelogram formed on the transparent substrate. And the thin film transparent beam supported by the both column materials, 44 is a transparent electrode provided on the transparent substrate 40, 46 is the optical path L1, L2 (light transmission region of the surface of the thin film transparent beam 42) ) Is a reflection or light shielding electrode (movable electrode) provided in the vicinity.
[0028]
As shown in FIG. 4A, when no voltage is applied between the transparent electrode 44 and the reflection / light-shielding electrode 46, the transparent beam 42 normally does not move, so that light coming from below the transparent substrate 40 does not move. And passes upward (see optical paths L1 and L2).
On the other hand, as shown in FIG. 4B, when a voltage is applied between the transparent electrode 44 and the reflection / light-shielding electrode 46, the reflection / light-shielding electrode 46 is attracted to the transparent electrode 44 by electrostatic force, and the transparent is accompanied accordingly. The beam 42 operates and moves obliquely downward so that the reflection / shield electrode 46 covers the optical path (see the optical paths L1 and L2). In this case, if the electrode is a reflective electrode, the light is reflected and the optical path is turned back.
When the voltage between the transparent electrode 44 and the reflection / light-shielding electrode 46 is removed again, the electrostatic force disappears, and the state shown in FIG. Since the return in this case is performed with both pillar materials, the restoring force is larger than that of a conventional cantilever-supported MEM mechanical shutter, and it is suitable for high-speed movement.
[0029]
<Third Embodiment>
Next, a third embodiment will be described with reference to FIG.
FIG. 5 is a longitudinal sectional view of a transmissive electromechanical optical switch device according to a third embodiment of the present invention, where (a) is non-operating (when no voltage is applied), and (b) is operating ( When voltage is applied).
5 (a) and 5 (b), 300 is a transmission type electromechanical optical switch element according to the third embodiment, 50 is a transparent substrate, 52 is a parallelogram formed on the transparent substrate. And a thin film transparent beam supported by the two column members, 53 is an arm extending from one half of the column member toward the transparent electrode 56, and 54 is provided on the transparent substrate 50. A transparent electrode 56 is a movable electrode provided at the tip of the arm 53. Reference numeral 58 denotes a reflection or light shielding member provided on the upper stage of the thin film transparent beam 52. The feature of the third embodiment is that by providing the movable electrode 56 on the arm extending from one half of the column member, the suction force can be increased and the displacement amount of the movable electrode 56 can be amplified. .
[0030]
As shown in FIG. 5A, when no voltage is applied between the transparent electrode 54 and the movable electrode 56, the transparent beam 52 normally does not move, so light coming from below the transparent substrate 50 passes through the transparent beam 52. And exits upward (see optical path L).
On the other hand, as shown in FIG. 5B, when a voltage is applied between the transparent electrode 54 and the movable electrode 56, the movable electrode 56 is attracted to the transparent electrode 54 by electrostatic force, and the arm 53 is moved downward accordingly. The reflection / shading electrode 58 located on the upper stage of the transparent beam 52 moves obliquely downward and covers the optical path by the movement amount amplified by the movement amount (see the optical path L). In this case, if the electrode is a reflective electrode, the light is reflected and the optical path is turned back.
Then, when the voltage between the transparent electrode 55 and the movable electrode 56 is removed again, the electrostatic force disappears, and the state of FIG. Since the return in this case is performed with both pillar materials, the restoring force is larger than that of a conventional cantilever-supported MEM mechanical shutter, and it is suitable for high-speed movement.
[0031]
【The invention's effect】
As described above, according to the transmissive electromechanical optical switch element of claim 1, the transparent substrate provided with the transparent electrode, and the inclined thin-film transparent beam having a hollow structure supported at least both on the transparent substrate, And a movable electrode provided in the vicinity of the light transmission region on the thin film transparent beam, and the thin film transparent beam is tilted by an electrostatic force when a voltage is applied between the transparent electrode and the movable electrode. Since they are moved, a transmission type electromechanical optical switch element having a simple configuration and easy to manufacture can be obtained.
[0032]
According to the transmissive electromechanical optical switch element according to claim 2, a transparent substrate provided with a transparent electrode, a double pillar material which is provided on the transparent substrate and forms a parallelogram with the transparent substrate, and the double pillar material And a movable electrode provided in a region in the vicinity of the light transmission region on at least one of the two pillar members or on the thin film transparent beam, and a voltage between the transparent electrode and the movable electrode. Since the column member is tilted by the electrostatic force when a sapphire is applied, a transmissive electromechanical optical switch element having a simple configuration and a simple manufacture is provided. Further, two optical paths can be taken for one thin film transparent beam.
[0033]
According to a third aspect of the present invention, in the transmissive electromechanical optical switch element according to the first or second aspect, since the movable electrode is formed of a film that reflects or absorbs light, a member that blocks the optical path is provided separately. This eliminates the need for a transmissive electromechanical optical switch element having a simple configuration and is simple to manufacture.
[0034]
According to a fourth aspect of the present invention, in the transmissive electromechanical optical switch element according to the third aspect, the film that reflects or absorbs the light is a metal, metal and dielectric multilayer reflective film, or a transparent electrode and a dielectric. Thus, a transmissive electromechanical optical switch element which is strong and simple in construction and easy to manufacture can be obtained.
[0035]
According to a fifth aspect of the present invention, in the transmissive electromechanical optical switch element according to any one of the first to fourth aspects, the thin film transparent beam is made of polyimide, photoresist, polycarbonate, polyethylene, polystyrene, or other resin. In addition, since it is made of an organic material, a transmissive electromechanical optical switch element having a simple structure and strong can be obtained.
[0036]
The invention of the transmissive electromechanical optical switch element according to claim 6 includes: a transparent substrate provided with a transparent electrode; a double column member formed on the transparent substrate and forming a parallelogram with the transparent substrate; and the both column members A transparent thin film beam supported by the thin film transparent member, at least one of the two column members, or a light shielding member or a reflection member provided in the vicinity of the light transmission region on the thin film transparent beam, and the transparent electrode from one of the two column members An arm extending toward the arm and a non-transparent electrode provided at the tip of the arm, and the column member is formed by an electrostatic force when a voltage is applied between the transparent electrode and the non-transparent electrode. Since the tilting is performed, a transmission type electromechanical optical switch element having a simple configuration and a large displacement is obtained, and the transmission type electromechanical optical switch element can be easily manufactured.
[0037]
In the invention of the optical switch array according to claim 7, the transmission type electromechanical optical switch element according to any one of claims 1 to 6 is arranged one-dimensionally or two-dimensionally. A simple optical switch array can be obtained.
[0038]
According to the eighth aspect of the present invention, in the optical switch array according to the seventh aspect, since the microlens array for condensing the light is provided on the light incident or emission side of the optical switch array, the light is collected by the microlens array. Since the light is emitted, the light utilization efficiency is increased, and high-efficiency and bright modulated light can be obtained even with a small opening area.
Further, since the amount of displacement of the thin film transparent beam can be reduced as compared with the case where no microlens array is provided, the driving energy of the thin film transparent beam can be reduced.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of a transmissive electromechanical optical switch element according to a first embodiment of the present invention, where (a) is non-operating (no voltage is applied), and (b) is operating ( When voltage is applied).
FIGS. 2A and 2B are longitudinal sectional views of a transmissive electromechanical optical switch element according to Modification 1 of the first embodiment of the present invention, in which FIG. 2A is a non-operating state (when no voltage is applied), and FIG. During operation (when voltage is applied).
FIGS. 3A and 3B are longitudinal sectional views of a transmissive electromechanical optical switch element according to Modification 2 of the first embodiment of the present invention, where FIG. 3A is a non-operating state (when no voltage is applied), and FIG. It is during operation (when voltage is applied).
4A and 4B are longitudinal sectional views of a transmissive electromechanical optical switch element according to a second embodiment of the present invention, in which FIG. 4A is a non-operating state (when no voltage is applied), and FIG. When voltage is applied).
FIGS. 5A and 5B are longitudinal sectional views of a transmissive electromechanical optical switch element according to a third embodiment of the present invention. FIG. 5A is a non-operating state (when no voltage is applied), and FIG. When voltage is applied).
[Explanation of symbols]
10, 40, 50 Transparent substrate 12, 12 ', 42, 52 Thin film transparent beam 14, 44, 54 Transparent electrode 16, 16' Reflection or shading electrode (movable electrode)
56 movable electrode 58 reflective or light shielding member 100 transmissive electromechanical optical switch element 200 according to the first embodiment transmissive electromechanical optical switch element 300 according to the second embodiment in the third embodiment Transmission type electromechanical optical switch element

Claims (8)

A transparent substrate provided with a transparent electrode, an inclined thin-film transparent beam having at least a hollow structure supported on the transparent substrate, and a movable electrode provided in a region near the light transmission region on the thin-film transparent beam. A transmissive electromechanical optical switch element comprising: the thin-film transparent beam tiltingly moved by an electrostatic force when a voltage is applied between the transparent electrode and the movable electrode. A transparent substrate provided with a transparent electrode; both pillars formed on the transparent substrate and forming a parallelogram with the transparent substrate; and a thin-film transparent beam supported by the both pillars; and at least one of the both pillars or A movable electrode provided in a region in the vicinity of the light transmission region on the thin film transparent beam, and the column member is tilted by an electrostatic force when a voltage is applied between the transparent electrode and the movable electrode. A transmissive electromechanical optical switch element. 3. The transmission type electromechanical optical switch element according to claim 1, wherein the movable electrode is made of a film that reflects or absorbs light. 4. The transmission type electromechanical optical switch element according to claim 3, wherein the light reflecting or absorbing film is composed of a metal, a metal and dielectric multilayer reflective film, or a transparent electrode and a dielectric multilayer film. The transmission type electromechanical optical switch according to any one of claims 1 to 4, wherein the thin film transparent beam is made of polyimide, photoresist, polycarbonate, polyethylene, polystyrene, other resin, or other organic material. element. A transparent substrate provided with a transparent electrode; both pillars formed on the transparent substrate and forming a parallelogram with the transparent substrate; and a thin-film transparent beam supported by the both pillars; and at least one of the both pillars or A light shielding member or a reflecting member provided in a region near the light transmitting region on the thin film transparent beam, an arm extending from one of the both column members toward the transparent electrode, and provided at a tip of the arm. And a non-transparent electrode, wherein the column member is tilted by an electrostatic force when a voltage is applied between the transparent electrode and the non-transparent electrode. 7. An optical switch array comprising the transmissive electromechanical optical switch elements according to claim 1 arranged one-dimensionally or two-dimensionally. 8. The optical switch array according to claim 7, wherein a microlens array for condensing the light is provided on the light incident or emission side of the optical switch array.

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