JP2004191933A - Infinity system objective for microscope - Google Patents

Infinity system objective for microscope Download PDF

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JP2004191933A
JP2004191933A JP2003338495A JP2003338495A JP2004191933A JP 2004191933 A JP2004191933 A JP 2004191933A JP 2003338495 A JP2003338495 A JP 2003338495A JP 2003338495 A JP2003338495 A JP 2003338495A JP 2004191933 A JP2004191933 A JP 2004191933A
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lens
microscope objective
objective lens
infinity
object side
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Tomohiro Miyashita
智裕 宮下
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Nikon Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an infinity system objective for a microscope whose numerical aperture is large such as ≥0.6 and whose working distance is long. <P>SOLUTION: The objective for the microscope includes a 1st lens group G1 and a 2nd lens group G2 in order from an object side, and the 1st lens group G1 includes positive meniscus lenses L1 and L2 turning their concave surfaces to the object side and at least one doublet, and has positive refractive power as a whole. At least one of the doublets includes a biconvex positive lens L5 made of material whose Abbe number is ≥80, then the objective satisfies a specified condition. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

本発明は、無限遠系顕微鏡対物レンズに関する。   The present invention relates to an infinity microscope objective lens.

従来、顕微鏡対物レンズには、色々な倍率のものが準備され観察状況に応じて選択されて用いられている。例えば、癌細胞の検査などでは、患者の細胞や血液を採取して顕微鏡で観察する細胞診断が一般的に行われている。細胞診断では、倍率１０倍の顕微鏡対物レンズを用いて比較的広い視野をステージを動かしながら観察して、癌細胞と疑わしい細胞などを発見した場合、顕微鏡対物レンズの倍率を４０倍に切替えて高解像度の観察が行われている。細胞診断では、主に１０倍と４０倍の顕微鏡対物レンズを切替えて使われることが多い。また、細胞診断では疑わしい細胞の近辺にカバーガラスの上から印を付けるマーキングと呼ばれる作業が行われている。   2. Description of the Related Art Conventionally, microscope objective lenses of various magnifications are prepared and selected according to observation conditions. For example, in the examination of cancer cells and the like, cytodiagnosis is generally performed in which cells and blood of a patient are collected and observed with a microscope. In cytodiagnosis, a relatively wide field of view is observed while moving the stage using a microscope objective lens with a magnification of 10 ×, and when cancer cells and suspicious cells are found, the magnification of the microscope objective lens is switched to 40 × to increase the magnification. Observation of the resolution is being performed. In cytodiagnosis, a 10x and 40x microscope objective lens is often used by switching. In the cell diagnosis, a work called marking is performed for marking a vicinity of a suspicious cell from above a cover glass.

しかし、顕微鏡対物レンズを切替えて使用する場合、顕微鏡対物レンズの筒偏心や同焦点のずれが発生するため、観察位置がずれてしまいステージを移動して観察位置を探し出す必要がある。これを避けるため、顕微鏡対物レンズを切替えないで変倍装置によって倍率を切替えることも行われている。この場合、倍率２０倍程度の顕微鏡対物レンズを用いることが好ましいが、倍率が２０倍程度の顕微鏡対物レンズは、開口数が０．５以下のものが一般的となっている（例えば、特許文献１参照。）。
特開平９−３３８１８号公報（第４−５頁） However, when the microscope objective lens is used by switching, the eccentricity of the cylinder and the shift of the parfocal point of the microscope objective lens occur, so that the observation position is shifted and it is necessary to move the stage to find the observation position. In order to avoid this, the magnification is switched by a magnification changing device without switching the microscope objective lens. In this case, it is preferable to use a microscope objective lens having a magnification of about 20 times. However, a microscope objective lens having a magnification of about 20 times generally has a numerical aperture of 0.5 or less (for example, see Patent Document 1). 1).
JP-A-9-33818 (pages 4-5)

上述の変倍装置によって倍率を切替える際に、低倍対物レンズと拡大系を用いると、低倍対物レンズでは開口数ＮＡが小さいために高解像度の観察ができず、逆に高倍対物レンズと縮小系を用いると低倍側で視野周辺像が悪化してしまうと言う問題がある。また、高倍対物レンズでは作動距離が小さいためマーキング作業がしづらいという問題もある。   When the magnification is switched by the above-described magnification apparatus, if a low-magnification objective lens and a magnifying system are used, high-resolution observation cannot be performed because the numerical aperture NA is small, and conversely, a reduction with the high-magnification objective lens is performed. When the system is used, there is a problem that the peripheral image of the visual field deteriorates on the low magnification side. In addition, there is a problem that it is difficult to perform a marking operation due to a small working distance of a high-magnification objective lens.

このような状況から、高い解像度で標本を観察できると共に、顕微鏡対物レンズ下での作業空間を確保するために、開口数ＮＡが大きく、且つ作動距離ｗｄの長い顕微鏡対物レンズが求められている。   Under such circumstances, there is a demand for a microscope objective lens having a large numerical aperture NA and a long working distance wd so that a specimen can be observed with high resolution and a working space under the microscope objective lens is secured.

本発明は、上記問題に鑑みて行われたものであり、開口数が０．６以上と大きく、且つ作動距離も大きな無限遠系顕微鏡対物レンズを提供することを目的としている。   The present invention has been made in view of the above problems, and has as its object to provide an infinity microscope objective lens having a large numerical aperture of 0.6 or more and a large working distance.

上記目的を達成するために、本発明では、物体側から順に第１レンズ群と、第２レンズ群とを含み、
前記第１レンズ群は物体側に凹面を向けた正メニスカスレンズと少なくとも１つの接合レンズを含み、全体として正の屈折力を有し、
前記接合レンズの少なくとも１つはアッベ数が８０以上の材料からなるレンズを含み、
以下の条件を満たすことを特徴とする無限遠系顕微鏡対物レンズを提供する。 In order to achieve the above object, the present invention includes a first lens group and a second lens group in order from the object side,
The first lens group includes a positive meniscus lens having a concave surface facing the object side and at least one cemented lens, and has a positive refractive power as a whole,
At least one of the cemented lenses includes a lens made of a material having an Abbe number of 80 or more,
Provided is an infinity microscope objective lens characterized by satisfying the following conditions.

０．３≦ｗｄ／ｆ≦０．４５
０．６≦ＮＡ
但し、
ｆは前記無限遠系顕微鏡対物レンズ全系の焦点距離、
ｗｄは前記無限遠系顕微鏡対物レンズの作動距離、
ＮＡは前記無限遠系顕微鏡対物レンズの開口数である。 0.3 ≦ wd / f ≦ 0.45
0.6 ≦ NA
However,
f is the focal length of the entire infinity microscope objective lens system,
wd is the working distance of the infinity microscope objective lens,
NA is the numerical aperture of the infinity microscope objective lens.

また、本発明に係る無限遠系顕微鏡対物レンズは、倍率が２０倍であることが好ましい。   Further, the infinity microscope objective lens according to the present invention preferably has a magnification of 20 times.

また、本発明に係る無限遠系顕微鏡対物レンズは、前記接合レンズの少なくとも１つは３枚接合レンズからなることが好ましい。   In the infinity microscope objective lens according to the present invention, it is preferable that at least one of the cemented lenses is formed of a triple cemented lens.

また、本発明に係る無限遠系顕微鏡対物レンズでは、前記アッベ数が８０以上の材料からなるレンズは蛍石から形成されていることが好ましい。   In the infinity microscope objective lens according to the present invention, it is preferable that the lens made of a material having an Abbe number of 80 or more is formed of fluorite.

上述のように、本発明では、開口数が０．６以上と大きく、且つ作動距離も大きな無限遠系顕微鏡対物レンズを提供することができる。   As described above, the present invention can provide an infinity microscope objective lens having a large numerical aperture of 0.6 or more and a large working distance.

以下、本発明の実施の形態に係る無限遠系顕微鏡対物レンズに関し説明する。   Hereinafter, an infinity microscope objective lens according to an embodiment of the present invention will be described.

本発明の無限遠系顕微鏡対物レンズは、物体側から順に第１レンズ群Ｇ１と、第２レンズ群Ｇ２とを含み、第１レンズ群Ｇ１は物体側に凹面を向けた正メニスカスレンズＬ１と少なくとも１つの接合レンズを含み、全体として正の屈折力を有し、接合レンズの少なくとも１つはアッベ数が８０以上の材料からなる両凸形状の正レンズを含む構成であって、以下の条件式（１）、（２）を満たしている。   The infinity microscope objective lens of the present invention includes a first lens group G1 and a second lens group G2 in order from the object side, and the first lens group G1 includes at least a positive meniscus lens L1 having a concave surface facing the object side. It includes one cemented lens, has a positive refractive power as a whole, and at least one of the cemented lenses has a configuration including a biconvex positive lens made of a material having an Abbe number of 80 or more. (1) and (2) are satisfied.

（１） ０．３≦ｗｄ／ｆ≦０．４５
（２） ０．６≦ＮＡ
但し、ｆは無限遠系顕微鏡対物レンズ全系の焦点距離、ｗｄは無限遠系顕微鏡対物レンズの作動距離、ＮＡは無限遠系顕微鏡対物レンズの開口数である。 (1) 0.3 ≦ wd / f ≦ 0.45
(2) 0.6 ≦ NA
Here, f is the focal length of the entire infinity microscope objective lens system, wd is the working distance of the infinity microscope objective lens, and NA is the numerical aperture of the infinity microscope objective lens.

本発明の無限遠系顕微鏡対物レンズは、最も物体に近いレンズ面を凹面にすることで、ペッツバール和の値を小さくすることで、像の平坦性を確保している。   The infinity microscope objective lens of the present invention secures the flatness of the image by making the lens surface closest to the object concave, thereby reducing the Petzval sum.

条件式(１)は、本発明に係る無限遠系顕微鏡対物レンズの動作距離ｗｄを規定する条件式である。下限値より小さい値では、無限遠系顕微鏡対物レンズと標本間の距離が狭くなり過ぎ操作性が悪くなるので好ましくない。上限値より大きい値では、像の平坦度が悪化すると共に、色収差が悪化するので好ましくない。   Conditional expression (1) is a conditional expression that defines the operating distance wd of the infinity microscope objective lens according to the present invention. If the value is smaller than the lower limit, the distance between the infinity microscope objective lens and the specimen becomes too small, and the operability deteriorates. A value larger than the upper limit is not preferable because the flatness of the image is deteriorated and the chromatic aberration is deteriorated.

条件式（２）は、本発明に係る無限遠系顕微鏡対物レンズの開口数ＮＡを規定する条件式である。開口数ＮＡが０．６未満では所望の解像度が得られないので好ましくない。   Conditional expression (2) is a conditional expression that defines the numerical aperture NA of the infinity microscope objective lens according to the present invention. If the numerical aperture NA is less than 0.6, a desired resolution cannot be obtained, which is not preferable.

本実施の形態では、接合レンズの少なくとも１つにアッベ数が８０以上の材料を採用している。アッベ数が８０未満の材料では色収差が悪化するため好ましくない。アッベ数が８０以上の材料としては、蛍石などが挙げられる。   In the present embodiment, a material having an Abbe number of 80 or more is used for at least one of the cemented lenses. A material having an Abbe number of less than 80 is not preferable because chromatic aberration deteriorates. Examples of the material having an Abbe number of 80 or more include fluorite.

（実施例）
以下、添付図面に基づいて本発明に係る無限遠系顕微鏡対物レンズの実施例について説明する。全ての実施例は、無限遠系に設計されている。また、実際に顕微鏡の対物レンズとして使用する場合、例えば、図７にその構成を示すような結像レンズを像側に設けて使用する。この結像レンズの諸元については後述する。また、以下の実施例では、対物レンズの倍率が２０倍の場合について示す。無限遠系顕微鏡対物レンズの倍率はβは、実際の顕微鏡で用いられる結像レンズの焦点距離と顕微鏡対物レンズの焦点距離の比（β＝結像レンズの焦点距離／顕微鏡対物レンズの焦点距離）で表される。 (Example)
Hereinafter, embodiments of the infinity microscope objective lens according to the present invention will be described with reference to the accompanying drawings. All embodiments are designed for infinity. When actually used as an objective lens of a microscope, for example, an imaging lens having the configuration shown in FIG. 7 is provided on the image side and used. The specifications of the imaging lens will be described later. In the following embodiments, a case where the magnification of the objective lens is 20 times will be described. The magnification of the infinity microscope objective lens is β, the ratio of the focal length of the imaging lens used in the actual microscope to the focal length of the microscope objective lens (β = focal length of the imaging lens / focal length of the microscope objective lens). Is represented by

（第１実施例）
図１は、本発明の第１実施例に係る無限遠系顕微鏡対物レンズのレンズ構成を示す図である。物体側から順に正の屈折力を有する第１レンズ群Ｇ１と、負の屈折力を有する第２レンズ群Ｇ２とからなり、第１レンズ群Ｇ１は、物体側から順に、物体側に凹面を向け正の屈折力を有する正メニスカスレンズＬ１、Ｌ２と、両凸形状の正レンズＬ３と両凹形状の負レンズＬ４と蛍石で形成された両凸形状の正レンズＬ５との接合レンズと、物体側に凸面を向けた負メニスカスレンズＬ６と両凸形状の正レンズＬ７と両凹形状の負レンズＬ８との接合レンズとから構成され、第２レンズ群Ｇ２は、物体側から順に両凸形状の正レンズＬ９と両凹形状の負レンズＬ１０との接合レンズから構成されて無限遠系顕微鏡対物レンズが形成されている。 (First embodiment)
FIG. 1 is a diagram showing a lens configuration of an infinity microscope objective lens according to a first example of the present invention. The first lens group G1 includes a first lens group G1 having a positive refractive power and a second lens group G2 having a negative refractive power in order from the object side. The first lens group G1 has a concave surface facing the object side in order from the object side. A cemented lens of positive meniscus lenses L1 and L2 having a positive refractive power, a biconvex positive lens L3, a biconcave negative lens L4, and a biconvex positive lens L5 formed of fluorite; The second lens group G2 is composed of a negative meniscus lens L6 having a convex surface directed to the side, a cemented lens of a biconvex positive lens L7, and a biconcave negative lens L8. An infinity microscope objective lens is formed by a cemented lens of a positive lens L9 and a biconcave negative lens L10.

表１に本第１実施例の諸元値を掲げる。全体諸元において、ｆはｄ線（波長５８７．６ｎｍ）の光線に対する無限遠時の無限遠系顕微鏡対物レンズ全系の焦点距離であり、上記結像レンズを用いない諸元値そのものである。また、ＮＡは物体側の開口数、βは倍率、ｗｄは物体面と最前レンズ面頂点との距離で示される作動距離をそれぞれ表している。レンズデータにおいて、面番号は光線の入射順に沿った順序を、ｒはレンズ面の曲率半径を、ｄはレンズ面の間隔を、ｎｄはｄ線に対する屈折率を、νｄはｄ線に対するアッベ数をそれぞれ示している。空気の屈折率は１．００００００として記載を省略している。   Table 1 shows the specification values of the first embodiment. In the overall specifications, f is the focal length of the entire infinity microscope objective lens system at infinity with respect to the d-line (wavelength 587.6 nm), and is the actual value without using the above-mentioned imaging lens. NA is the numerical aperture on the object side, β is the magnification, and wd is the working distance indicated by the distance between the object surface and the vertex of the front lens surface. In the lens data, the surface number indicates the order along the incident order of the light rays, r indicates the radius of curvature of the lens surface, d indicates the distance between the lens surfaces, nd indicates the refractive index for the d-line, and νd indicates the Abbe number for the d-line. Each is shown. The description of the refractive index of air is omitted because it is 1.000000.

なお、以下の全ての諸元値において、掲載されている焦点距離ｆ、作動距離ｗｄ、曲率半径ｒ、面間隔ｄその他の長さ等は、特記の無い場合一般に「ｍｍ」が使われるが、光学系は比例拡大または比例縮小しても同等の光学性能が得られるので、これに限られるものではない。また、単位は「ｍｍ」に限定されること無く他の適当な単位を用いることもできる。さらに、これらの記号の説明は、以降の他の実施例においても同様とする。   In all the following specification values, the published focal length f, working distance wd, radius of curvature r, surface distance d, and other lengths are generally “mm” unless otherwise specified. The optical system is not limited to this, because the same optical performance can be obtained even if the optical system is proportionally enlarged or reduced. Further, the unit is not limited to “mm”, and another appropriate unit can be used. Further, the description of these symbols is the same in other embodiments described below.

（表１）
（全体諸元）
ｆ＝１０
ＮＡ＝０．６５
β＝２０
ｗｄ＝４

（レンズデータ）
面番号 ｒ ｄ nd νd
1 ∞ 0.17 カバーガラス
2 ∞ 5
3 -7.603 7.4 1.804 46.6
4 -9.816 0.1
5 -46.767 4.3 1.569 71.3
6 -17.85 0.2
7 41.984 4 1.569 71.3
8 -44.998 1.8 1.6126 44.4
9 20.543 8.5 1.43385 95.25 蛍石
10 -20.543 0.1
11 22.761 2 1.8052 25.4
12 13.612 9 1.4978 82.5
13 -18.458 1.8 1.6126 44.4
14 117.68 10.9
15 34.91 5.3 1.6889 31.1
16 -15.359 1.7 1.5688 56.3
17 12.863 ∞

（条件式対応値）
ｗｄ／ｆ＝０．４
図２は、本第１実施例に係る無限遠系顕微鏡対物レンズの諸収差図である。各収差図において、ＮＡは開口数を、Ｙは像高を示す。球面収差図において、ＣはＣ線（波長６５６．３ｎｍ）を、ｄはｄ線（波長５８７．６ｎｍ）を、ＦはＦ線（波長４８６．１ｎｍ）を、ｇはｇ線（波長４３５．６ｎｍ）をそれぞれ示している。非点収差図において、破線Ｓはｄ線におけるサジタル像面を、実線Ｍはｄ線におけるメリディオナル像面をそれぞれ示している。歪曲収差図はｄ線について示している。また、全ての実施例における収差図は、上述した結像レンズを使用して結像したものである。なお、以下全ての実施例の収差図において、本第１実施例と同様の符号を用いる。 (Table 1)
(Overall specifications)
f = 10
NA = 0.65
β = 20
wd = 4

(Lens data)
Surface number rd nd νd
1 ∞ 0.17 cover glass
2 ∞ 5
3 -7.603 7.4 1.804 46.6
4 -9.816 0.1
5 -46.767 4.3 1.569 71.3
6 -17.85 0.2
7 41.984 4 1.569 71.3
8 -44.998 1.8 1.6126 44.4
9 20.543 8.5 1.43385 95.25 Fluorite
10 -20.543 0.1
11 22.761 2 1.8052 25.4
12 13.612 9 1.4978 82.5
13 -18.458 1.8 1.6126 44.4
14 117.68 10.9
15 34.91 5.3 1.6889 31.1
16 -15.359 1.7 1.5688 56.3
17 12.863 ∞

(Values for conditional expressions)
wd / f = 0.4
FIG. 2 is a diagram illustrating various aberrations of the infinity microscope objective lens according to the first example. In each aberration diagram, NA indicates a numerical aperture, and Y indicates an image height. In the spherical aberration diagram, C denotes the C line (wavelength 656.3 nm), d denotes the d line (wavelength 587.6 nm), F denotes the F line (wavelength 486.1 nm), and g denotes the g line (wavelength 435.6 nm). ) Respectively. In the astigmatism diagram, a broken line S indicates a sagittal image plane at d-line, and a solid line M indicates a meridional image plane at d-line. The distortion diagram is for the d-line. The aberration diagrams in all the examples are obtained by forming an image using the above-described imaging lens. Note that the same reference numerals as in the first embodiment are used in the aberration diagrams of all the embodiments below.

各収差図から明らかなように、諸収差が良好に補正されていることがわかる。   As is clear from the aberration diagrams, it is understood that various aberrations are favorably corrected.

（第２実施例）
図３は、本発明の第２実施例に係る無限遠系顕微鏡対物レンズのレンズ構成を示す図である。物体側から順に正の屈折力を有する第１レンズ群Ｇ１と、負の屈折力を有する第２レンズ群Ｇ２とからなり、第１レンズ群Ｇ１は、物体側から順に、物体側に凹面を向け正の屈折力を有する正メニスカスレンズＬ１、Ｌ２と、平凹形状の正レンズＬ３と蛍石で形成された両凸形状の正レンズＬ４との接合レンズと、物体側に凸面を向けた負メニスカスレンズＬ５と両凸形状の正レンズＬ６と物体側に凹面を向けた負メニスカスレンズＬ７との接合レンズとから構成され、第２レンズ群Ｇ２は、物体側から順に、両凸形状の正レンズＬ８と両凹形状の負レンズＬ１０との接合レンズから構成されて無限遠系顕微鏡対物レンズが形成されている。 (Second embodiment)
FIG. 3 is a diagram showing a lens configuration of an infinity microscope objective lens according to a second example of the present invention. The first lens group G1 includes a first lens group G1 having a positive refractive power and a second lens group G2 having a negative refractive power in order from the object side. The first lens group G1 has a concave surface facing the object side in order from the object side. Positive meniscus lenses L1 and L2 having positive refractive power, a cemented lens composed of a plano-concave positive lens L3 and a biconvex positive lens L4 formed of fluorite, and a negative meniscus having a convex surface facing the object side The second lens group G2 is composed of a lens L5, a biconvex positive lens L6, and a cemented lens of a negative meniscus lens L7 having a concave surface facing the object side. An infinity microscope objective lens is formed of a cemented lens of a negative lens L10 and a biconcave negative lens L10.

表２に本第２実施例の諸元値を掲げる。   Table 2 shows the specification values of the second embodiment.

（表２）
（全体諸元）
ｆ＝１０
ＮＡ＝０．６
β＝２０
ｗｄ＝３．５

（レンズデータ）
面番号 ｒ ｄ nd νd
1 ∞ 0.17 カバーガラス
2 ∞ 4.1
3 -8.301 8.3 1.7727 49.5
4 -10.602 0.1
5 -56.82 4.3 1.4978 82.5
6 -14.983 0.2
7 ∞ 2 1.6126 44.4
8 23.57 7 1.43385 95.25 蛍石
9 -18.137 0.1
10 25.286 2 1.7552 27.6
11 13.67 7.5 1.4978 82.5
12 -20.894 2 1.6126 44.4
13 -174.644 16.9
14 42.654 5 1.7495 35.2
15 -16.113 2 1.5688 56.3
16 12.655 ∞

（条件式対応値）
ｗｄ／ｆ＝０．４
図４は、本第２実施例に係る無限遠系顕微鏡対物レンズの諸収差図である。各収差図から明らかなように、諸収差が良好に補正されていることがわかる。 (Table 2)
(Overall specifications)
f = 10
NA = 0.6
β = 20
wd = 3.5

(Lens data)
Surface number rd nd νd
1 ∞ 0.17 cover glass
2 ∞ 4.1
3 -8.301 8.3 1.7727 49.5
4 -10.602 0.1
5 -56.82 4.3 1.4978 82.5
6 -14.983 0.2
7 ∞ 2 1.6126 44.4
8 23.57 7 1.43385 95.25 Fluorite
9 -18.137 0.1
10 25.286 2 1.7552 27.6
11 13.67 7.5 1.4978 82.5
12 -20.894 2 1.6126 44.4
13 -174.644 16.9
14 42.654 5 1.7495 35.2
15 -16.113 2 1.5688 56.3
16 12.655 ∞

(Values for conditional expressions)
wd / f = 0.4
FIG. 4 is a diagram illustrating various aberrations of the infinity microscope objective lens according to the second example. As is clear from the aberration diagrams, it is understood that various aberrations are favorably corrected.

（第３実施例）
図５は、本発明の第３実施例に係る無限遠系顕微鏡対物レンズのレンズ構成を示す図である。物体側から順に正の屈折力を有する第１レンズ群Ｇ１と、負の屈折力を有する第２レンズ群Ｇ２とからなり、第１レンズ群Ｇ１は、物体側から順に、物体側に凹面を向け正の屈折力を有する正メニスカスレンズＬ１、Ｌ２と、両凸形状の正レンズＬ３と両凹形状の負レンズＬ４と蛍石で形成された両凸形状の正レンズＬ５との接合レンズと、物体側に凸面を向けた負メニスカスレンズＬ６と蛍石で形成された両凸形状の正レンズＬ７と物体側に凹面を向けた負メニスカスレンズＬ８との接合レンズとから構成され、第２レンズ群Ｇ２は、物体側から順に、両凸形状の正レンズＬ９と両凹形状の負レンズＬ１０との接合レンズから構成されて無限遠系顕微鏡対物レンズが形成されている。 (Third embodiment)
FIG. 5 is a diagram showing a lens configuration of an infinity microscope objective lens according to Example 3 of the present invention. The first lens group G1 includes a first lens group G1 having a positive refractive power and a second lens group G2 having a negative refractive power in order from the object side. The first lens group G1 has a concave surface facing the object side in order from the object side. A cemented lens of positive meniscus lenses L1 and L2 having a positive refractive power, a biconvex positive lens L3, a biconcave negative lens L4, and a biconvex positive lens L5 formed of fluorite; The second lens group G2 includes a negative meniscus lens L6 having a convex surface on the side, a biconvex positive lens L7 formed of fluorite, and a cemented lens formed by a negative meniscus lens L8 having a concave surface on the object side. Is composed of a cemented lens of a biconvex positive lens L9 and a biconcave negative lens L10 in order from the object side to form an infinity microscope objective lens.

表３に本第３実施例の諸元値を掲げる。   Table 3 shows the specification values of the third embodiment.

（表３）
（全体諸元）
ｆ＝１０
ＮＡ＝０．６５
β＝２０
ｗｄ＝３．４

（レンズデータ）
面番号 ｒ ｄ nd νd
1 ∞ 0.17 カバーガラス
2 ∞ 4.2
3 -7.603 7.4 1.804 46.6
4 -9.816 0.1
5 -26.52 4.3 1.569 71.3
6 -15.102 0.2
7 37 4 1.569 71.3
8 -45 1.8 1.6126 44.4
9 19.81 8.5 1.43385 95.25 蛍石
10 -19.81 0.1
11 23.666 2 1.8052 25.4
12 14.392 9 1.43385 95.25 蛍石
13 -18.5 1.8 1.6126 44.4
14 -68.199 10.9
15 42.995 5.3 1.6889 31.1
16 -15.375 1.7 1.5688 56.3
17 13.216 ∞

（条件式対応値）
ｗｄ／ｆ＝０．３４
図６は、本第３実施例に係る無限遠系顕微鏡対物レンズの諸収差図である。各収差図から明らかなように、諸収差が良好に補正されていることがわかる。 (Table 3)
(Overall specifications)
f = 10
NA = 0.65
β = 20
wd = 3.4

(Lens data)
Surface number rd nd νd
1 ∞ 0.17 cover glass
2 ∞ 4.2
3 -7.603 7.4 1.804 46.6
4 -9.816 0.1
5 -26.52 4.3 1.569 71.3
6 -15.102 0.2
7 37 4 1.569 71.3
8 -45 1.8 1.6126 44.4
9 19.81 8.5 1.43385 95.25 Fluorite
10 -19.81 0.1
11 23.666 2 1.8052 25.4
12 14.392 9 1.43385 95.25 Fluorite
13 -18.5 1.8 1.6 126 44.4
14 -68.199 10.9
15 42.995 5.3 1.6889 31.1
16 -15.375 1.7 1.5688 56.3
17 13.216 ∞

(Values for conditional expressions)
wd / f = 0.34
FIG. 6 is a diagram illustrating various aberrations of the infinity microscope objective lens according to the third example. As is clear from the aberration diagrams, it is understood that various aberrations are favorably corrected.

（第４実施例）
図７は、本発明の第４実施例に係る無限遠系顕微鏡対物レンズのレンズ構成を示す図である。物体側から順に正の屈折力を有する第１レンズ群Ｇ１と、負の屈折力を有する第２レンズ群Ｇ２とからなり、第１レンズ群Ｇ１は、物体側から順に、物体側に凹面を向け正の屈折力を有する正メニスカスレンズＬ１、Ｌ２と、両凸形状の正レンズＬ３と両凹形状の負レンズＬ４と両凸形状の正レンズＬ５との接合レンズと、物体側に凸面を向けた負メニスカスレンズＬ６と両凸形状の正レンズＬ７と物体側に凹面を向けた負メニスカスレンズＬ８との接合レンズとから構成され、第２レンズ群Ｇ２は、物体側から順に、両凸形状の正レンズＬ９と両凹形状の負レンズＬ１０との接合レンズから構成されて無限遠系顕微鏡対物レンズが形成されている。 (Fourth embodiment)
FIG. 7 is a diagram showing a lens configuration of an infinity microscope objective lens according to Example 4 of the present invention. The first lens group G1 includes a first lens group G1 having a positive refractive power and a second lens group G2 having a negative refractive power in order from the object side. The first lens group G1 has a concave surface facing the object side in order from the object side. A convex meniscus lens L1, L2 having a positive refractive power, a cemented lens of a biconvex positive lens L3, a biconcave negative lens L4, and a biconvex positive lens L5, with the convex surface facing the object side The second lens group G2 is composed of a cemented lens composed of a negative meniscus lens L6, a biconvex positive lens L7, and a negative meniscus lens L8 having a concave surface facing the object side. An infinity microscope objective lens is formed by a cemented lens of a lens L9 and a biconcave negative lens L10.

表４に本第４実施例の諸元値を掲げる。   Table 4 shows the specification values of the fourth embodiment.

（表４）
（全体諸元）
ｆ＝１０
ＮＡ＝０．６５
β＝２０
ｗｄ＝４

（レンズデータ）
面番号 ｒ ｄ nd νd
1 ∞ 0.17 カバーガラス
2 ∞ 5.1
3 -7.800 6.5 1.804 46.6
4 -9.4004 0.1
5 -22.997 4.2 1.6204 60.3
6 -14.498 0.2
7 37.996 4.3 1.569 71.3
8 -37.996 1.8 1.6133 44.3
9 19.29 8.4 1.4978 82.5
10 -23.34 0.1
11 24.04 2 1.8466 23.8
12 13.67 9 1.4978 82.5
13 -18.46 1.8 1.6133 44.3
14 218.7 11.05
15 42.003 5.5 1.8052 25.4
16 -18.48 1.7 1.6133 44.3
17 13.51 ∞

（条件式対応値）
ｗｄ／ｆ＝０．４
図８は、本第４実施例に係る無限遠系顕微鏡対物レンズの諸収差図である。各収差図から明らかなように、諸収差が良好に補正されていることがわかる。 (Table 4)
(Overall specifications)
f = 10
NA = 0.65
β = 20
wd = 4

(Lens data)
Surface number rd nd νd
1 ∞ 0.17 cover glass
2 ∞ 5.1
3 -7.800 6.5 1.804 46.6
4 -9.4004 0.1
5 -22.997 4.2 1.6204 60.3
6 -14.498 0.2
7 37.996 4.3 1.569 71.3
8 -37.996 1.8 1.6133 44.3
9 19.29 8.4 1.4978 82.5
10 -23.34 0.1
11 24.04 2 1.8466 23.8
12 13.67 9 1.4978 82.5
13 -18.46 1.8 1.6133 44.3
14 218.7 11.05
15 42.003 5.5 1.8052 25.4
16 -18.48 1.7 1.6133 44.3
17 13.51 ∞

(Values for conditional expressions)
wd / f = 0.4
FIG. 8 is a diagram illustrating various aberrations of the infinity microscope objective lens according to the fourth example. As is clear from the aberration diagrams, it is understood that various aberrations are favorably corrected.

図９は、各実施例において用いた結像レンズのレンズ構成を示す図である。この結像レンズの諸元値を表５に掲げる。   FIG. 9 is a diagram illustrating a lens configuration of the imaging lens used in each example. Table 5 shows the specification values of this imaging lens.

（表５）
（全体諸元）
ｆ＝２００

（レンズデータ）
面番号 ｒ ｄ nd νd
1 75.04 5.1 1.6228 57
2 -75.04 2 1.7495 35.2
3 1600.5 7.5
4 50.26 5.1 1.6675 42
5 -84.54 1.8 1.6126 44.4
6 39.91
なお、本発明に係る無限遠系顕微鏡対物レンズは上述の実施例に限らず本発明の範囲内において適宜修正、変更が可能である。 (Table 5)
(Overall specifications)
f = 200

(Lens data)
Surface number rd nd νd
1 75.04 5.1 1.6228 57
2 -75.04 2 1.7495 35.2
3 1600.5 7.5
4 50.26 5.1 1.6675 42
5 -84.54 1.8 1.6126 44.4
6 39.91
In addition, the infinity microscope objective lens according to the present invention is not limited to the above-described embodiment, but can be appropriately modified and changed within the scope of the present invention.

本発明の第１実施例に係る無限遠系顕微鏡対物レンズのレンズ構成を示す図。FIG. 2 is a diagram illustrating a lens configuration of an infinity microscope objective lens according to the first example of the present invention. 第１実施例における各収差図を示す。Each aberration diagram in the first example is shown. 本発明の第２実施例に係る無限遠系顕微鏡対物レンズのレンズ構成を示す図。FIG. 9 is a diagram illustrating a lens configuration of an infinity microscope objective lens according to a second example of the present invention. 第２実施例における各収差図を示す。FIG. 10 shows each aberration diagram in the second example. 本発明の第３実施例に係る無限遠系顕微鏡対物レンズのレンズ構成を示す図。FIG. 9 is a diagram illustrating a lens configuration of an infinity microscope objective lens according to a third example of the present invention. 第３実施例における各収差図を示す。FIG. 10 shows each aberration diagram in the third example. 本発明の第４実施例に係る無限遠系顕微鏡対物レンズのレンズ構成を示す図。FIG. 13 is a diagram illustrating a lens configuration of an infinity microscope objective lens according to a fourth example of the present invention. 第４実施例における各収差図を示す。FIG. 10 shows each aberration diagram in the fourth example. 各実施例における結像レンズのレンズ構成図を示す図である。FIG. 3 is a diagram illustrating a lens configuration diagram of an imaging lens in each embodiment.

符号の説明Explanation of reference numerals

Ｇ１ 第１レンズ群
Ｇ２ 第２レンズ群
Ｌｉ 各レンズ成分 G1 First lens group G2 Second lens group Li Each lens component

Claims (4)

物体側から順に第１レンズ群と、第２レンズ群とを含み、
前記第１レンズ群は物体側に凹面を向けた正メニスカスレンズと少なくとも１つの接合レンズを含み、全体として正の屈折力を有し、
前記接合レンズの少なくとも１つはアッベ数が８０以上の材料からなるレンズを含み、
以下の条件を満たすことを特徴とする無限遠系顕微鏡対物レンズ。
０．３≦ｗｄ／ｆ≦０．４５
０．６≦ＮＡ
但し、
ｆは前記無限遠系顕微鏡対物レンズ全系の焦点距離、
ｗｄは前記無限遠系顕微鏡対物レンズの作動距離、
ＮＡは前記無限遠系顕微鏡対物レンズの開口数。 A first lens group and a second lens group in order from the object side,
The first lens group includes a positive meniscus lens having a concave surface facing the object side and at least one cemented lens, and has a positive refractive power as a whole,
At least one of the cemented lenses includes a lens made of a material having an Abbe number of 80 or more,
An infinity microscope objective lens characterized by satisfying the following conditions.
0.3 ≦ wd / f ≦ 0.45
0.6 ≦ NA
However,
f is the focal length of the entire infinity microscope objective lens system,
wd is the working distance of the infinity microscope objective lens,
NA is the numerical aperture of the infinity microscope objective lens. 前記無限遠系顕微鏡対物レンズは、倍率が２０倍であることを特徴とする請求項１に記載の無限遠系顕微鏡対物レンズ。   The infinity microscope objective lens according to claim 1, wherein the infinity microscope objective lens has a magnification of 20 times. 前記接合レンズの少なくとも１つは３枚接合レンズからなることを特徴とする請求項１または２に記載の無限遠系顕微鏡対物レンズ。   The infinity microscope objective lens according to claim 1, wherein at least one of the cemented lenses comprises a triple cemented lens. 前記アッベ数が８０以上の材料からなるレンズは、蛍石から形成されていることを特徴とする請求項１または２または３に記載の無限遠系顕微鏡対物レンズ。   The infinity microscope objective lens according to claim 1, wherein the lens made of a material having an Abbe number of 80 or more is formed of fluorite.
JP2003338495A 2002-11-28 2003-09-29 Infinity system objective for microscope Withdrawn JP2004191933A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8206679B2 (en) 2007-12-13 2012-06-26 Nikon Corporation Method for producing Ca-La-F based transparent ceramic, Ca-La-F based transparent ceramic, optical element, optical system, and ceramic-forming composition
WO2015107881A1 (en) * 2014-01-15 2015-07-23 株式会社ニコン Objective lens and microscope
CN112305713A (en) * 2020-09-23 2021-02-02 嘉兴中润光学科技股份有限公司 Fixed-focus lens, image pickup device and inspection unmanned aerial vehicle

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8206679B2 (en) 2007-12-13 2012-06-26 Nikon Corporation Method for producing Ca-La-F based transparent ceramic, Ca-La-F based transparent ceramic, optical element, optical system, and ceramic-forming composition
US8618008B2 (en) 2007-12-13 2013-12-31 Nikon Corporation Ca—La—F based transparent ceramic, Ca—La—F based transparent ceramic, optical element, optical system, and ceramic-forming composition
WO2015107881A1 (en) * 2014-01-15 2015-07-23 株式会社ニコン Objective lens and microscope
JPWO2015107881A1 (en) * 2014-01-15 2017-03-23 株式会社ニコン Objective lens and microscope
CN112305713A (en) * 2020-09-23 2021-02-02 嘉兴中润光学科技股份有限公司 Fixed-focus lens, image pickup device and inspection unmanned aerial vehicle

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