JP2004178372A - Automatic tuning device and automatic setup device for operation parameter - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily find optimum combination of a plurality of complicatedly related operation parameters to operate equipment always in an optimum state. <P>SOLUTION: This automatic tuning device or automatic setup device for the parameter related to the operation of the equipment has: a parameter change means changing a value of the setup parameter; a storage means storing the setup parameter; a function setting means for setting an evaluation function of the value of the setup parameter; and a function processing means for executing an evaluation process for the value of the setup parameter by the evaluation function to find an optimum setup parameter. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to automatic adjustment of equipment having a large number of operation parameters and requiring a large amount of adjustment to perform a desired operation, and particularly to automatic adjustment of operation parameters of analysis equipment, evaluation equipment, inspection equipment, and the like. is there.
[0002]
[Prior art]
Conventionally, as various types of equipment have become more sophisticated, their structures have become more complicated, and along with that, there are a wide variety of parameters that need to be adjusted in order for the equipment to perform desired operations, making it difficult to properly adjust each of them. Is coming.
[0003]
For example, an analysis device, an evaluation device, an inspection device, and the like, which has a data processing system and an imaging system and performs comparison and collation of original data and imaging data, are used when generating simulated imaging data from basic original data. It is necessary to adjust a large number of parameters both in the generation parameters and in the operation of the imaging device when capturing a real image.
[0004]
In a data processing system, image data obtained by imaging deteriorates due to color rendering properties of a light source, illuminance unevenness, lens aberration, moiré, and the like, and nonlinearity of photoelectric conversion, quantization error, and the like also cause image deterioration. Further, mechanical fluctuation factors such as the inclination and positional deviation of the work also affect the image data.
[0005]
In the imaging system, the operation parameters that are controlled in order to correctly obtain imaging data of the object include the aperture and focus of the lens, the amount of XYZ displacement of the stage, the declination such as θ, the light amount balance of the projector, and the diffused light. The position of the diffuser that changes the amount of diffusion, the amount of primary color light source for color balance adjustment, and the like.
[0006]
In the adjustment of such parameters, there is a method of controlling manufacturing conditions and inspection conditions of a product through a control device that controls each parameter by using parameter sets corresponding to some situations assumed in advance (for example, See Patent Document 1.).
[0007]
[Patent Document 1]
JP-A-8-202410
However, conventionally, there are the following problems. That is, adjustment of the parameter set prepared in advance to an appropriate value is performed by manual trial and error, so that it is difficult to achieve an optimal state, and there is a problem that it takes time and effort.
[0009]
In general, all parameters in the parameter set can be set and changed independently, but since each parameter is complicatedly entangled, the optimal value of one parameter changes the appropriate value of another parameter. However, there is also a problem that parameter settings are not as desired.
[0010]
In addition, in a situation other than the situation assumed in advance, it is necessary to prepare the operation parameters from 1, and it is difficult to obtain the optimal parameters as in the above-described parameters prepared in advance, and it takes time and effort. There is also a problem that must be stopped for a long time.
[0011]
In addition, in the operation based on the parameter set prepared in advance, it is not always possible to completely match the current operation state of the device, and there is a problem that the device cannot always be used in an optimal state.
[0012]
[Problems to be solved by the invention]
The present invention has been made in view of the above-described problems, and simplifies preparation for operating equipment in an optimal state, and automatically operates an operation parameter in an optimal state. It is an object of the present invention to provide an automatic set-up device having the same.
[0013]
[Means for Solving the Problems]
In order to achieve the above object, a first aspect of the present invention is a device for adjusting and setting a parameter related to an operation of a device, a parameter changing unit for changing a value of a setup parameter, and a storage for storing the setup parameter. Means, function setting means for setting an evaluation function for the value of the setup parameter, and function processing means for evaluating the value of the setup parameter by the evaluation function to obtain an optimal setup parameter.
[0014]
According to a second aspect of the present invention, in the operation parameter automatic tuning apparatus according to the first aspect described above, the function processing means evaluates an optimal setup parameter by repeatedly increasing and decreasing each parameter. It is configured to perform it by iterative asymptotic processing of the evaluation function for finding the minimum value.
[0015]
According to a third aspect of the present invention, in the operation parameter automatic tuning apparatus according to the first or second aspect, the parameter changing means displays each of the determined optimum setup parameters, Editing means for editing each of the optimum setup parameters.
[0016]
According to a fourth aspect of the present invention, there is provided a program for causing a computer to operate as the operation parameter automatic tuning apparatus according to the first to third aspects.
[0017]
According to a fifth aspect of the present invention, there is provided a computer-readable storage medium storing a program for causing a computer to operate as the operation parameter automatic tuning apparatus according to the first to third aspects. .
[0018]
According to a sixth aspect of the present invention, there is provided an apparatus for automatically setting up operation parameters of a device, comprising: an operation parameter automatic tuning apparatus according to the first to third aspects; and an optimal setup determined by the function processing means. Operation changing means for changing the operation state of the device based on the parameters.
[0019]
According to a seventh aspect of the present invention, in the automatic setup device according to the above-described sixth aspect, a sensing means for sensing an evaluation analysis target and an operation state of a device is provided.
[0020]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, in an apparatus for comparing and comparing original data and imaging data having a data processing system and an imaging system illustrating the present invention, an operation parameter automatic tuning apparatus of the present invention, an automatic setting of operation parameters of imaging equipment, and A description will be given by taking as an example the generation parameters of the simulated imaging data when the simulated imaging data is generated from the original data and compared with the captured imaging data.
[0021]
As described above, in the imaging system, a number of parameters related to the stage, the light projector, the image sensor, the lens, and the like that hold the subject (work) are tuned so that optimal imaging can be performed.
[0022]
As described above, there are various deterioration factors in the captured image data, and the simulated imaging data (reference) generated without consideration of the deterioration factors and the imaging data (target) are compared, that is, the image data is deteriorated. Even if they are compared with each other, it is not possible to perform strict comparison and collation with many differences.
[0023]
Therefore, for the original data to be compared, which is included in the data processing unit of the comparison and collation apparatus, the deterioration process and the control items of the equipment are modeled, and the parameters associated therewith are set. A tuning device is used to simulate factors such as deterioration of imaging data, and to generate simulated imaging data that enables optimal comparison and comparison. Here, the parameters given to the model can also be derived by applying the optimization processing as the tuning target of the present invention.
[0024]
FIG. 1 is a configuration diagram of an operation parameter automatic tuning apparatus 1 of the present invention and an automatic setup apparatus 2 including the same.
[0025]
The operation parameter automatic tuning apparatus 1 includes a parameter changing unit 3 for an operator to change a value of a setup parameter for setting an operation of a device or a process in advance, a storage unit 4 for storing a setup parameter, and an evaluation function of a setup parameter value. There are provided a function setting means 5 for setting, and a function processing means 6 for finding an optimal setup parameter using an evaluation function.
[0026]
The parameter changing means 3 includes a display means 7 for displaying the obtained optimum setup parameters, and an editing means 8 for giving an initial value of the setup parameters and editing the obtained optimum setup parameters.
[0027]
The automatic setup device 2 includes an operation change unit 9 that changes the operation state of the device based on the optimal setup parameter obtained by the operation parameter automatic tuning device 1, and a sensing unit 10 that senses the state of the operating device.
[0028]
FIG. 2 shows a case where the operation parameter automatic tuning apparatus 1 of the present invention and the automatic setup apparatus 2 including the same are applied to an apparatus having the above-described data processing system and imaging system for comparing and collating original data and imaging data. FIG.
[0029]
The image input system 11 includes a stage 12 for holding a subject, a light projector 13, an image sensor 14, a lens system 15, and control devices 16 (electrical and mechanical systems) thereof, and an interface unit 17 (for image sensor and control device). Operation mechanism.
[0030]
The data processing system 18 includes a processing unit 19, a display unit 20, a terminal operation unit 21, a storage device 22, and an interface unit 17, and corresponds to the automatic operation parameter tuning apparatus 1 of the present invention. It is also possible to substitute a general-purpose personal computer.
[0031]
The processing unit 19 evaluates the operation parameters of the image input system 11 to obtain optimum parameters, and controls the device setup engine 23 that drives each mechanism of the image input system 1 via the control device 16, and performs processing for image data collation. Simulated data generating means 24 for evaluating parameters for generating simulated imaging data as a reference to obtain optimal parameters are implemented as software for optimization processing.
[0032]
The device setup engine 23 and the simulation data generation unit 24 may be installed in separate computer devices connected externally to operate in cooperation with each other, or may share only some functions, All may be implemented as software of one computer device. Whichever form is adopted, the essential effects of the present invention are completely the same.
[0033]
The display unit 20 is a display or the like in a computer system for displaying the input values and displaying the obtained optimal parameters.
[0034]
The terminal operation unit 21 is an input device such as a keyboard in a computer system for performing input and change of parameter values, instructions for processing execution, setting of an evaluation function, and the like for the data processing system 18.
[0035]
In the comparison and collation apparatus shown in FIG. 2, as shown in the flowchart of FIG. 3, first, the equipment set-up engine 23 combines a plurality of optimal operation parameter values of the stage 12, the light projector 13, the image sensor 14, and the lens system 15 ( Hereinafter, a parameter set is obtained, and each mechanism of the image input system 11 is automatically adjusted based on each value of the parameter set by using the control device 16 corresponding to the operation changing means 9 (steps S1 and S2).
[0036]
Next, the simulation data generation unit 24 generates simulation imaging data serving as a reference. At this time, a parameter set relating to the deterioration of the imaging data is obtained, and the imaging data is corrected and the simulated imaging data is generated according to the parameter set. (Steps S3 and S4).
[0037]
The equipment setup engine 23 and the simulation data generating means 24 optimize the entire parameters by repeating the individual optimization of the individual parameters in a predetermined order.
[0038]
FIG. 4 shows a procedure of the process in a case where the simulation data generation unit 24 optimizes a parameter set relating to device adjustment and generation of simulation imaging data. First, the power of the apparatus is turned on, and a work exclusively for adjustment or a work with an adjustment pattern is appropriately arranged (step S11).
[0039]
Next, the above-mentioned work adjusted as a fixed form is imaged, and image data serving as a reference is generated from original data for the work using parameters in a default state. First, in a state where each of the parameter sets is not tuned, that is, in a preset state, imaging and generation of reference image data are performed (step S12).
[0040]
For example, the total number N of repetitions is set to 10, and the initial number n of repetitions is set to 1 (steps S13 and S14).
[0041]
A number is assigned to a parameter for device adjustment in imaging and a model parameter in reference image generation, and the number (i) is initialized to 1 (step S15).
[0042]
A typical value and an upper limit are set for each parameter. It is not necessary to set a different value each time the computer is started up, but it is sufficient to read a value stored in the storage device 22 or the like as a system variable.
[0043]
In the simulation data generating means 24, examples of the evaluation function include the sum of absolute values of the difference between the generated reference image and the captured image, the sum of squares of the error, minimization of the maximum absolute error, and maximization of the normalized correlation. Used.
[0044]
It is appropriate that the evaluation function is set in advance by the terminal operation unit 21 or the like so that the evaluation function that matches the criteria of the comparison and collation device is executed by the processing unit 19.
[0045]
The simulation data generation unit 24 calculates a set or specified evaluation function in a predetermined parameter set.
[0046]
Next, the simulation data generation unit 24 increases or decreases one of the parameters (parameter number (i)) and obtains a parameter value that gives the minimum value of the evaluation function (step S16).
[0047]
This is repeated for all parameters up to a predetermined number of repetitions, and after the predetermined repetition is completed, the obtained parameter set is stored in a storage device 22 such as a hard disk (step S17).
[0048]
An image is captured using the obtained parameter set, simulated imaging data is generated in the same manner, the real image is corrected, and the simulated imaging data and the data obtained by imaging the real object are compared and collated (step S18).
[0049]
When collation is continued under different conditions, the process is repeated again from the installation of the adjustment-dedicated work, and finally the comparison / collation work is finished and the device is stopped.
[0050]
Since the device setup engine 23 also optimizes the parameter set in the same manner, the basic operation is the same as that of the simulation data generation unit 24, but the target parameter set is different, and the evaluation function is the simulation data generation unit 24. May be different or the same one may be used.
[0051]
In the apparatus setup engine 23, for example, the aperture, focus, light amount balance, diffusion amount of diffused light, RGB primary color light source light amount, and the like are used as a parameter set.
[0052]
In addition, the evaluation function may be used alone to optimize focus, luminance unevenness, color balance, light amount balance, etc. by using the maximum value among the normalized allowable values, or the like, The difference between the simulated imaging data to be finally compared and the real image (maximum error, sum of absolute values, sum of squares, etc.) may be used in common with the simulated data generation unit 24.
[0053]
As described above, the present invention has been described in detail based on the embodiment. However, the operation parameter automatic tuning apparatus according to the present invention and the setup apparatus including the same are not limited to the above-described embodiment at all. Naturally, various changes can be made without departing from the spirit of the invention.
[0054]
The basic concept of the present invention lies in a method of asymptotically finding an optimal solution by performing a finite number of calculations for adaptation, learning, optimization, etc. for finding an optimal parameter set, and iteratively optimizing interdependent parameters. By doing so, an optimum value is obtained successively. For optimization of individual parameters, an acceleration algorithm using the gradient of the evaluation function can be applied.
[0055]
As in the case of the apparatus setup engine 23 and the simulation data generating means 24, optimizing the parameters relating to the apparatus and the parameters relating to the software processing in series can be sufficiently effective. Then, by performing mutual optimization, finer adjustment can be performed.
[0056]
Furthermore, when data indicating the operating state of the device is collected using the sensing means 10 and temporarily stored in the storage means 4 or directly input from the sensing means 10 to the function processing means 6, the operation of the device is Depending on the situation, it is also possible to dynamically recalculate the optimal parameters and feed it back to the device.
[0057]
【The invention's effect】
As described above, according to the operation parameter automatic tuning apparatus of the present invention, it is possible to prevent inconvenience of setting specific values of individual parameters by artificial trial and error, and to prevent performance degradation due to mismatch of parameter sets.
[0058]
In addition, by collecting data indicating the operation state of the device using the sensing means, and inputting the operation state data to the function processing means, dynamically recalculating the optimal parameters according to the operation state of the device. It is also possible to perform feedback and feed back to the device.
[0059]
Therefore, the operator of the equipment equipped with the operating parameter auto-tuning device according to the present invention can automatically set appropriate parameters by giving only a criterion according to the purpose of use without detailed knowledge of each operating parameter set. Since the setting can be performed, the preparation time can be reduced and the device performance can be maximized.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of an automatic operation parameter tuning apparatus and an automatic setup apparatus including the same according to the present invention.
FIG. 2 is a structural diagram of a comparison / collation device including the automatic operation parameter tuning device of the present invention.
FIG. 3 is a flowchart showing the operation of a comparison / collation device provided with the automatic operation parameter tuning device of the present invention.
FIG. 4 is a flowchart showing an operation when the automatic operation parameter tuning apparatus of the present invention performs optimization by automatic repetition of each parameter adjustment.
[Explanation of symbols]
REFERENCE SIGNS LIST 1 operation parameter automatic tuning device 2 automatic setup device 3 parameter changing means 4 storage means 5 function setting means 6 function processing means 7 display means 8 changing means 9 operation changing means 10 sensing means 11 image input system 12 stage 13 light projector 14 imaging element 15 Lens system 16 Control device 17 Interface unit 18 Data processing system 19 Processing unit 20 Display unit 21 Terminal operation unit 22 Storage device 23 Equipment setup engine 24 Simulated data generation means

Claims (7)

An apparatus for adjusting and setting parameters related to operation of a device,
Parameter changing means for changing the value of the setup parameter;
Storage means for storing the setup parameters,
Function setting means for setting an evaluation function for determining whether the value of the setup parameter is good or bad,
Function processing means for performing an evaluation process of the value of the setup parameter by the evaluation function, to determine an optimal setup parameter,
An automatic operation parameter tuning apparatus comprising: The operation parameter automatic tuning apparatus according to claim 1,
The function processing means includes:
The evaluation of the optimal setup parameter is an iterative asymptotic process of an evaluation function that obtains the minimum value of the parameter by repeatedly increasing and decreasing each parameter.
An operation parameter automatic tuning apparatus characterized in that: The operation parameter automatic tuning apparatus according to claim 1 or 2,
The parameter changing means,
Display means for displaying each of the determined optimal setup parameters,
Editing means for editing each of the determined optimal setup parameters,
An automatic operation parameter tuning apparatus comprising: A program for causing a computer to operate as the operation parameter automatic tuning apparatus according to claim 1. A computer-readable storage medium storing a program for causing a computer to operate as the operation parameter automatic tuning apparatus according to claim 1. A device that automatically sets up operating parameters of equipment,
An operation parameter automatic tuning apparatus according to claim 1,
Based on the optimal setup parameters determined by the function processing means, operation change means for changing the operation state of the device,
An automatic setup device for operating parameters, comprising: The automatic setup device according to claim 6, wherein
Sensing means for sensing the evaluation analysis target and the operation status of the device,
An automatic setup device, comprising:

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