JP2004165300A - Thermoelectric generator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thermoelectric generator in which a fuel with comparatively high burning initiating temperature can be used. <P>SOLUTION: The generator is provided with a burner 2 in which a catalyst for burning the fuel passing through a fuel channel 2a is arranged in the fuel channel 2a, and a power generation unit 1 formed of a thermoelectric module generating power with the burner 2 as a heating source. The burner 2 is composed of a first thermally conductive substrate 11 constituting a part of the power generation unit 1, and of a thermally insulating substrate 21 laminated on the first thermally conductive substrate 11. The fuel channel 2a is formed by forming a groove 5 on a confronted face with the thermally insulating substrate 21 in the first thermally conductive substrate 11. In the burner 2, a micro heater 8 constituting an energy source that can give heat energy to the fuel in the fuel channel 2a is disposed in a part corresponding to the groove 5 of the first thermally conductive substrate 11. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention provides a thermoelectric device including a combustor in which a catalyst for burning fuel passing through a fuel flow path is provided in the fuel flow path, and a power generation unit that generates power by thermoelectric conversion using the combustor as a heat source. It relates to a power generator.
[0002]
[Prior art]
In recent years, thermoelectric generators that convert thermal energy into electrical energy by using thermoelectromotive force generated when a temperature difference is applied to thermoelectric materials have been developed as emergency power supplies, portable power supplies, remote power supplies, waste heat recovery devices, and the like. Has attracted attention in the field. As this type of thermoelectric generator, there has been proposed a thermoelectric generator having a heat source utilizing combustion heat, catalytic combustion heat, exhaust heat, etc. It has the advantage that the heat generation temperature of the heat source can be easily adjusted by adjusting the flow rate, and that the combustion heat can be efficiently input to the power generation unit by making the fuel flow path planar.
[0003]
Conventionally, as shown in FIG. 11, a thermoelectric generator having a heat source for generating heat of catalytic combustion is provided in a tubular body 52 made of a heat conductive material and a combustion chamber formed in the tubular body 52. A combustor 2 ′ having a catalyst holding cylinder 53 holding a catalyst for burning the fuel, and a plurality of thermoelectric elements 13 in which a pair of two semiconductor elements 13 a and 13 b of different conductivity types are connected by a metal film 13 c. Are connected in series via a conductive pattern 14 ′ made of a metal material, and the two power generating units 1 ′ and 1 ′ generate power using the combustor 2 ′ as a heat source. There has been proposed one having two heat radiating plates 55, 55 fixed to heat conductive substrates 12 ', 12' as substrates, each of which has a large number of fins 56 protruding therefrom (for example, Patent Document 1). In each of the power generation units 1 ', 1', the heat conductive substrates 11 ', 11', which are heat exchange substrates on the high temperature side, are fixed to the cylindrical body 52 of the combustor 2 '.
[0004]
[Patent Document 1]
Japanese Patent Application Laid-Open No. 4-85873 (page 3, FIG. 1)
[0005]
[Problems to be solved by the invention]
By the way, the thermoelectric generator having the configuration shown in FIG. 11 has the catalyst holding cylinder 53 holding the catalyst for burning the fuel. However, if the combustor 2 ′ is reduced in size, depending on the fuel, combustion may occur depending on the fuel. Therefore, it is necessary to use a fuel or a mixed gas at which combustion is started at a relatively low temperature, and to use a dangerous fuel such as hydrogen or methanol.
[0006]
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a thermoelectric generator capable of using a fuel whose combustion starting temperature is relatively high.
[0007]
[Means for Solving the Problems]
In order to achieve the above object, the invention of claim 1 provides a combustor in which a catalyst for burning fuel passing through the fuel flow path is provided in the fuel flow path, and a catalyst of a different conductivity type that forms a pair. A power generation unit having a thermoelectric element connected between two semiconductor elements via a metal film and generating heat by transmitting heat generated in the combustor to the metal film; An energy source capable of providing heat energy to the fuel. According to the configuration of the first aspect of the present invention, by providing the energy source which is attached to the combustor and can apply heat energy to the fuel in the fuel flow path, the size of the combustor can be reduced. Also, it is possible to use a fuel whose temperature for starting combustion is relatively high.
[0008]
According to a second aspect of the present invention, in the first aspect of the present invention, in the combustor, the fuel flow path is formed between a pair of substrates that are fixedly overlapped in a thickness direction, and the energy source is the combustor. A micro-heater is provided on one surface side in the thickness direction and heats the fuel in the fuel flow channel by Joule heat. According to the configuration of the second aspect of the present invention, since the combustor is formed by stacking and fixing a pair of substrates in the thickness direction, the combustor is formed using conventional machining. It is possible to reduce the size of the combustor as compared with the conventional one, and furthermore, since the energy source comprises a micro heater, it is possible to prevent the combustor from being enlarged, and to drive the energy source. It is possible to reduce an increase in power consumption due to the above.
[0009]
According to a third aspect of the present invention, in the second aspect of the present invention, in the combustor, the fuel flow path is formed by providing a groove in a surface of one of the pair of substrates facing the other substrate. The micro heater is characterized in that the micro heater is made of a metal thin film laminated on an insulating thin film also serving as a bottom wall of the groove on the one substrate. According to the configuration of the third aspect of the invention, it is possible to efficiently heat the fuel in the fuel flow path.
[0010]
According to a fourth aspect of the present invention, in the first to third aspects of the invention, the energy source is provided at a plurality of locations along the fuel flow path. According to the configuration of the fourth aspect of the invention, it is possible to reduce the amount of fuel passing through the fuel flow path without burning.
[0011]
According to a fifth aspect of the present invention, in the first to third aspects of the present invention, the energy source is formed over the entire length of the fuel flow path. According to the configuration of the fifth aspect of the present invention, it is possible to reduce the amount of fuel passing through the fuel flow path without burning.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
(Embodiment 1)
Hereinafter, the thermoelectric generator of the present embodiment will be described with reference to FIGS.
[0013]
The thermoelectric generator of the present embodiment includes a combustor 2 in which a catalyst (for example, platinum or the like) for burning fuel passing through the fuel passage 2a is provided in the fuel passage 2a. A power generation unit 1 including a thermoelectric module that generates power as a heat source. Here, for example, a mixed gas obtained by mixing a fuel such as a hydrocarbon (for example, methane, butane, or the like) or hydrogen supplied from the outside and air with the air is supplied to the fuel passage 2a. .
[0014]
The power generation unit 1 includes a first heat conductive substrate 11 formed of a flat silicon substrate, and a second heat conductive substrate 11 formed of a flat silicon substrate or an aluminum nitride substrate disposed to face the first heat conductive substrate 11. A heat conductive substrate 12 and a plurality of (32 in the present embodiment) thermoelectric elements 13 disposed between the heat conductive substrates 11 and 12 are provided. Here, the outer shape of each of the heat conductive substrates 11 and 12 is formed in a rectangular shape. In the power generation unit 1, the first heat conductive substrate 11 forms a high-temperature side heat exchange substrate, the second heat conductive substrate 12 forms a low temperature side heat exchange substrate, A large number of radiating fins 15 are fixed to the surface of the heat conductive substrate 12 opposite to the surface facing the first heat conductive substrate 11. In the present embodiment, the first heat conductive substrate 11 and the second heat conductive substrate 12 form a pair of substrates forming the body of the combustor 2, and the first heat conductive substrate 11 The substrate 11 constitutes one substrate, and the second heat conductive substrate 12 constitutes the other substrate.
[0015]
Each thermoelectric element 13 is a metal material in which two semiconductor elements 13 a and 13 b of a different conductivity type to be a pair are formed in a pattern on the side of the first heat conductive substrate 11 facing the second heat conductive substrate 12. 3 and 5 (see FIGS. 3 and 5). Here, a first insulating film 16 (see FIG. 1B) made of a silicon oxide film or a silicon nitride film is provided on a surface of the first heat conductive substrate 11 facing the second heat conductive substrate 12. The metal film 13c is composed of a Ti film laminated on the first insulating film 16, a Pt film laminated on the Ti film, and a Cu film laminated on the Pt film. The first insulating film 16 is formed to a thickness of about 10 μm by, for example, a CVD method, and the Ti film and the Pt film are formed to a thickness of about 0.05 μm, 0.1 μm by a sputtering method, respectively, for each metal film 13c. The Cu film is formed to a thickness of about 10 μm by, for example, a plating method.
[0016]
The power generation unit 1 includes a plurality of conductive patterns made of a metal material in which the plurality of thermoelectric elements 13 are patterned on the surface of the second heat conductive substrate 12 facing the first heat conductive substrate 11. 14 (see FIGS. 2 and 4), the power is generated by transmitting the heat generated in the combustor 2 to the metal film 13c. Here, a second insulating film (not shown) is formed on a surface of the second heat conductive substrate 11 facing the first heat conductive substrate 11, and each conductive pattern 14 , A Pt film laminated on the Ti film, and a Cu film laminated on the Pt film. The second insulating film is formed to a thickness of about 10 μm by, for example, a CVD method. For each conductive pattern 14, the Ti film and the Pt film are formed to a thickness of about 0.05 μm and 0.1 μm by, for example, a sputtering method. The Cu film is formed to a thickness of about 10 μm by, for example, a plating method.
[0017]
Each of the semiconductor elements 13a and 13b is formed in a prismatic shape. Each of the semiconductor elements 13a and 13b has a first surface plating layer made of solder on one end surface in the longitudinal direction via a first base plating layer made of nickel, and is heated to about 300 ° C. to form a metal film. 13c. Similarly, each of the semiconductor elements 13a and 13b has a second surface plating layer made of solder formed on the other end face in the longitudinal direction via a second base plating layer made of nickel. To the conductive pattern 14.
[0018]
Here, a semiconductor element having a p-type conductivity (hereinafter, referred to as a p-type semiconductor element) 13a is a BiTe-based p-type thermoelectric semiconductor material (for example, Bi-type). ₂ Te ₃ -Sb ₂ Te ₃ The semiconductor element 13b having an n-type conductivity (hereinafter, referred to as an n-type semiconductor element) 13b is made of a BiTe-based n-type thermoelectric semiconductor material (for example, Bi). ₂ Te ₃ -Sb ₂ Se ₃ Etc.). In the power generation unit 1, p-type semiconductor elements 13a and n-semiconductor elements 13b are alternately arranged in directions orthogonal to each other in a plane orthogonal to the thickness direction of the first heat conductive substrate 11. Each of the semiconductor elements 13a and 13b has a square cross section orthogonal to the longitudinal direction, and the length of each side in the cross section is set to 0.65 mm and the length in the longitudinal direction is set to 2 mm. Each dimension is not particularly limited. The semiconductor elements 13a and 13b are formed by forming a block made of a p-type thermoelectric semiconductor material and an n-type thermoelectric semiconductor material and having a size sufficiently larger than the semiconductor elements 13a and 13b, and then dicing.
[0019]
By the way, the power generation unit 1 includes a pair of output electrodes 18a and 18b made of a metal material patterned at two corners of the second heat conductive substrate 12 facing the first heat conductive substrate 11. The output can be taken out to the outside via the display (see FIG. 4). That is, the power generation unit 1 is configured such that the p-type semiconductor element 13a serving as one end of the series circuit of the plurality of thermoelectric elements 13 is connected to one output electrode 18a, and the n-type semiconductor element serving as the other end of the series circuit. 13b is connected to the other output electrode 18b, and a voltage across the series circuit of the thermoelectric elements 13 is applied to an external circuit connected between the output electrodes 18a and 18b. The output electrodes 18a and 18b adopt the same metal material as the conductive pattern 14 as a constituent material, and are formed simultaneously with the conductive pattern 14.
[0020]
In addition, the combustor 2 has an opposite surface to the first heat conductive substrate 11 made of the above-mentioned flat silicon substrate, and the surface of the first heat conductive substrate 11 facing the second heat conductive substrate 12. And a heat insulating substrate 21 made of a flat glass substrate fixedly stacked on the side surface of the first heat conductive substrate 11, and a surface of the first heat conductive substrate 11 facing the heat insulating substrate 21. A groove 5 having a V-shaped cross section (see FIGS. 1 and 4) for forming the fuel flow path 2a is formed in the heat insulating substrate 21 and the first heat conductive substrate 11. The fuel flow path 2a is formed by overlapping (fixing) in the thickness direction. Further, the combustor 2 carries a titanium-based sol-shaped platinum catalyst on the inner surface of the groove 5. Here, in the combustor 2, the planar shape of the concave portion 5 in a plane orthogonal to the thickness direction of the first heat conductive substrate 11 is formed in a serpentine shape, and the thickness of the first heat conductive substrate 11 is The planar shape of the fuel flow path 2a in a plane orthogonal to the direction (that is, the thickness direction of the combustor 2) has a zigzag shape. The outer shape of the heat-insulating substrate 21 is formed in the same rectangular shape as the heat-conductive substrates 11 and 12.
[0021]
Here, in the present embodiment, a silicon substrate is employed as the first thermally conductive substrate 11, so that the opening width is reduced by a micromachining technique using a lithography technique or an etching technique used for semiconductor fine processing. A simple groove 5 can be formed. In order to form the groove 5 having a V-shaped cross section as described above, for example, a silicon substrate whose main surface is a (100) plane is used as the silicon substrate as the first heat conductive substrate 11, and tetrahydroxide is used. Anisotropic wet etching using an alkaline solution such as methyl ammonium (TMAH) or potassium hydroxide (KOH) may be performed.
[0022]
Further, since the combustor 2 uses a silicon substrate as the first heat conductive substrate 11 and uses a glass substrate as the heat insulating substrate 21, the combustor 2 is in contact with the first heat conductive substrate 11 in which the grooves 5 are formed. The insulating substrate 21 can be overlapped with the insulating substrate 21 so that the thickness directions thereof coincide with each other and fixed by anodic bonding. Compared with the case where the two substrates 11 and 12 are fixed by an adhesive, a stronger and more airtight joint is realized. it can. Further, since a heat-resistant glass substrate such as Pyrex (registered trademark) and having a thermal expansion coefficient substantially equal to that of silicon is used as the heat-insulating substrate 21, the heat-insulating substrate 21 and the first heat conduction The thermal expansion coefficient difference with the conductive substrate 11 can be reduced, and the warpage of the heat insulating substrate 21 and the first heat conductive substrate 11 can be suppressed (that is, the warpage of the flat combustor 2 can be reduced). Can be suppressed).
[0023]
In the present embodiment, the groove 5 is formed on the surface of the first heat conductive substrate 11 facing the heat insulating substrate 21, but the groove 5 is formed on the first heat conductive substrate 11 in the heat insulating substrate 21. The groove 5 may be formed on the opposite surface of the substrate. When a glass substrate is used as the heat insulating substrate 21 as in the present embodiment, the groove 5 can be formed by a sandblast method.
[0024]
In the combustor 2, through holes 21a and 21b communicating with the fuel flow path 2a are provided in the thickness direction in the vicinity of both ends of the fuel flow path 2a in the heat insulating substrate 21. The opening shape of each of the through holes 21a and 21b is circular.
[0025]
Further, on the surface of the heat insulating substrate 21 opposite to the surface facing the first heat conductive substrate 11, a cylindrical fuel introduction pipe 6 communicating with one of the through holes 21a is provided. The cylindrical exhaust pipe 7 communicating with the other through-hole 21b is arranged so that the axial direction coincides with the thickness direction of the heat insulating substrate 21 while the axial direction is arranged so as to coincide with the thickness direction. ing. The fuel introduction pipe 6 is made of glass, and one end in the axial direction is fixed to the periphery of the one through-hole 21a in the heat insulating substrate 21 using low melting point glass. Similarly, the exhaust pipe 7 is also made of glass, and one end in the axial direction is fixed to the periphery of the other through hole 21b in the heat insulating substrate 21 using low melting point glass.
[0026]
Therefore, in the thermoelectric generator of this embodiment, a flow path of the fuel introduction pipe 6-the one through hole 21 a-the fuel flow path 2 a-the other through hole 21 b-the exhaust pipe 7 is formed. Fuel supplied from a fuel tank (not shown) or the like to the fuel introduction pipe 6 is introduced into the fuel flow path 2a, and exhaust gas (carbon dioxide) generated by combustion of the fuel is discharged from the exhaust pipe 7. In short, the one through hole 21a constitutes a fuel introduction hole, and the other through hole 21b constitutes an exhaust hole.
[0027]
On the other hand, in the thermoelectric generator of the present embodiment, when a mixed gas of fuel and air is supplied to the fuel flow path 2a, the mixed gas burns, and the heat generated by this combustion is transferred to the first heat conductive substrate. 11 is diffused and transmitted to the metal film 13c formed on the first heat conductive substrate 11, so that the power generation unit 1 generates power.
[0028]
By the way, the combustor 2 has a deep groove portion having a larger opening width and a larger depth dimension than other portions in the extension direction of the groove 5 of the first heat conductive substrate 11 (that is, the direction in which fuel flows). By forming 5a, a diaphragm portion 17 composed of a part of the first insulating film 16 is formed, and is patterned in a strip shape on a surface of the diaphragm portion 17 facing the second heat conductive substrate 12. A micro heater 8 (see FIGS. 1, 5, and 6) made of a metal thin film (Ti thin film in the present embodiment) is disposed. Here, both ends of the micro heater 8 in the longitudinal direction are connected to input electrodes 19a and 19b via metal wires 9a and 9b, respectively. The micro heater 8 in the present embodiment has a length dimension of 90 μm, a width dimension of 10 μm, and a thickness dimension of 50 nm, and is formed simultaneously with the Ti film constituting a part of the metal film 13c. However, these dimensions are merely examples and are not particularly limited. The metal wires 9a and 9b and the input electrodes 19a and 19b employ the same metal material as the metal film 13c as a constituent material, and are formed simultaneously with the metal film 13c. In the present embodiment, the microheater 8 constitutes an energy source (ignition source for starting combustion of fuel) which is attached to the combustor 2 and can apply heat energy to the fuel in the fuel flow path 2a. are doing.
[0029]
Here, in forming the microheater 8, the first insulating film 16 made of a silicon oxide film is formed on one surface of the first heat conductive substrate 11 made of the silicon substrate, and the first heat conductive substrate 11 is formed. By forming a silicon oxide film 36 on the other surface of the substrate 11, the structure shown in FIG. 7A is obtained, and thereafter, lithography and etching are used to form the groove 5 and the deep groove 5a. After patterning the silicon oxide film 36 on the other side of the first heat conductive substrate 11 using the silicon oxide film 36 as a mask, an alkaline aqueous solution containing potassium hydroxide, tetraammonium hydroxide, or the like is used. The structure shown in FIG. 7B is obtained by anisotropically etching the first heat conductive substrate 11. Here, by appropriately setting the opening widths of the groove 5 and the deep groove 5a, the groove 5 and the deep groove 5a can be formed by one anisotropic etching step.
[0030]
Next, a metal thin film 38 made of a constituent material of the microheater 8 is formed on the first insulating film 16 (the metal thin film 38 includes a Ti film on the first insulating film 16 and a Pt film on the Ti film). (C) is obtained by laminating the resist layer 39, and then a patterned resist layer 39 is formed on a portion of the metal thin film 38 corresponding to the microheater 8 using a lithography technique. Thereby, the structure shown in FIG. 7D is obtained. Thereafter, unnecessary portions of the metal thin film 38 are etched using a fast atom beam (FAB) using the resist layer 39 as a mask, thereby forming the micro heater 8 formed of a part of the metal thin film 38. The structure shown in FIG. 7E is obtained. Thereafter, the structure shown in FIG. 7F is obtained by removing the resist layer 39.
[0031]
Thus, in the thermoelectric generator of the present embodiment, the combustor 2 has the plate-shaped heat-insulating substrate 21 that is fixed to the first heat-conductive substrate 11 of the power-generating unit 1 so as to overlap the first heat-conductive substrate 11. Since the fuel flow path 2a is formed by providing the groove 5 on the surface of the conductive substrate 11 facing the heat insulating substrate 21, the heat insulating substrate 21 having the groove 5 and the first thermal conductivity are formed. By fixing the combustor 2 to the substrate 11, a flat combustor 2 can be formed, and the first heat conductive substrate 11 can be formed as compared with the case where the combustor 2 'is formed using conventional machining. It is possible to reduce the thickness dimension of the combustor 2 in the thickness direction of the device, and it is possible to reduce the size of the entire device. Further, in the combustor 2, since the heat insulating substrate 21 fixed to the first heat conductive substrate 11 is formed of a heat insulating material, the heat generated by the combustion of the mixed gas is mainly the first heat. As a result, the heat generated by the combustion of the mixed gas is efficiently transmitted to the metal film 13c in the power generation unit 1.
[0032]
Further, in the thermoelectric generator of the present embodiment, the planar shape of the fuel flow path 2a in a plane orthogonal to the thickness direction of the first heat conductive substrate 11 is a broken shape, and the fuel flow path 2a is routed in the plane. As a result, the length of the fuel flow path 2a can be increased while the size of the first heat conductive substrate 11 is reduced, so that the combustion efficiency in the combustor 2 can be improved (fuel The amount of unburned fuel supplied to the use flow path 2a can be reduced).
[0033]
Moreover, in the thermoelectric generator of the present embodiment, since the above-described micro heater 8 is provided in the combustor 2, energy can be supplied between the input electrodes 19 a and 19 b while reducing the size of the combustor 2. By appropriately heating the fuel by generating heat from the micro heater 8 serving as a source, it is possible to use a fuel such as butane, which has a relatively high combustion start temperature (ignition temperature) as compared with hydrogen or methanol. . When a fuel having a relatively low ignition temperature is used, the micro heater 8 may not be energized as a matter of course.
[0034]
Further, in the present embodiment, the above-mentioned energy source is constituted by the micro heater 8 provided on one surface side in the thickness direction in the combustor 2 and heating the fuel in the fuel flow path 2a by Joule heat. It is possible to prevent power consumption and increase in power consumption. Further, the microheater 8 is made of a metal thin film laminated on the diaphragm portion 17 also serving as the bottom wall of the groove 5 in the first heat conductive substrate 11, so that the fuel in the fuel flow path 2a is efficiently heated. It becomes possible. In the present embodiment, the diaphragm portion 17 forms an insulating thin film that also serves as the bottom wall of the groove 5 in the one substrate.
[0035]
(Embodiment 2)
The basic configuration of the thermoelectric generator of the present embodiment is substantially the same as that of the first embodiment. As shown in FIGS. 8 to 10, deep grooves 5a are provided at a plurality of locations along the fuel flow path 2a. The difference is that a micro heater 8 is provided corresponding to each of the deep groove portions 5a. That is, in the example shown in FIGS. 8 and 9, since five deep grooves 5 a are formed, five micro heaters 8 are provided. The same components as those in the first embodiment are denoted by the same reference numerals, and the description will be appropriately omitted.
[0036]
However, in the thermoelectric generator of the present embodiment, the micro heaters 8 serving as energy sources are provided at a plurality of locations along the fuel flow path 2a, so that the fuel passing through the fuel flow path 2a without burning is supplied. It is possible to reduce the number compared to the first embodiment.
[0037]
In the present embodiment, the micro heaters 8 are provided at a plurality of locations along the fuel flow path 2a. It is possible to do. In addition, if the micro heater 8 is formed over the entire length of the fuel flow path 2a, it is possible to further reduce the amount of fuel passing through the fuel flow path 2a without burning.
[0038]
【The invention's effect】
According to the first aspect of the present invention, a metal film is formed between a combustor in which a catalyst for burning fuel passing through a fuel flow path is provided in the fuel flow path and two semiconductor elements of a pair of different conductivity types. A power generation unit that has a thermoelectric element connected through a heat generator and generates heat by transmitting heat generated in the combustor to the metal film; and provides heat energy to the fuel in the fuel flow passage attached to the combustor. And an energy source that is attached to the combustor and can apply heat energy to the fuel in the fuel flow path, thereby reducing the size of the combustor. However, there is an effect that it is possible to use a fuel whose combustion start temperature is relatively high.
[0039]
According to a second aspect of the present invention, in the first aspect of the present invention, in the combustor, the fuel flow path is formed between a pair of substrates that are fixedly overlapped in a thickness direction, and the energy source is the combustor. Since the micro combustor is provided on one surface side in the thickness direction and heats the fuel in the fuel flow path by Joule heat, the combustor is formed by stacking and fixing a pair of substrates in the thickness direction. Thereby, there is an effect that it is possible to reduce the size of the combustor as compared with the case where the combustor is formed using conventional machining, and the energy source is formed of a micro heater. This makes it possible to prevent the combustor from being enlarged, and to reduce an increase in power consumption due to driving of the energy source.
[0040]
According to a third aspect of the present invention, in the second aspect of the present invention, in the combustor, the fuel flow path is formed by providing a groove in a surface of one of the pair of substrates facing the other substrate. Since the micro heater is made of a metal thin film laminated on the insulating thin film also serving as the bottom wall of the groove on the one substrate, it is possible to efficiently heat the fuel in the fuel flow channel. effective.
[0041]
According to a fourth aspect of the present invention, in the first to third aspects of the present invention, the energy source is provided at a plurality of locations along the fuel flow path. There is an effect that it is possible to reduce the amount of passing fuel.
[0042]
According to a fifth aspect of the present invention, in the first to third aspects of the present invention, since the energy source is formed over the entire length of the fuel flow path, it passes through the fuel flow path without burning. There is an effect that it is possible to reduce the amount of fuel to be generated.
[Brief description of the drawings]
FIGS. 1A and 1B show a first embodiment, in which FIG. 1A is a schematic sectional view, and FIG.
FIG. 2 is a schematic perspective view showing the same.
FIG. 3 is a schematic perspective view showing the same.
FIG. 4 is a schematic exploded perspective view showing the same.
FIG. 5 is a schematic exploded perspective view showing the same.
FIGS. 6A and 6B show essential parts of the above, wherein FIG. 6A is a schematic bottom view and FIG. 6B is an enlarged view of the essential parts of FIG.
FIG. 7 is a cross-sectional view of a main process for describing a method of forming the micro heater in the above.
FIG. 8 is a schematic sectional view showing Embodiment 2.
FIG. 9 is a schematic exploded perspective view showing the same.
FIG. 10 is an enlarged sectional view of a main part of the above.
FIG. 11 is a schematic configuration diagram showing a conventional example.
[Explanation of symbols]
1 power generation unit
2 Combustor
2a Fuel flow path
5 grooves
5a Deep groove
6 Fuel introduction pipe
7 Exhaust pipe
8 Micro heater
16 First insulating film
11 First thermal conductive substrate
12. Second thermal conductive substrate
13 Thermoelectric elements
13a p-type semiconductor element
13b n-type semiconductor element
21 Thermally insulating substrate
21a Through hole
21b Through hole

Claims (5)

A thermoelectric element in which a catalyst for burning fuel passing through the fuel flow path is provided in the fuel flow path, and a pair of two different conductive type semiconductor elements are connected via a metal film. A power generation unit that generates power by transmitting heat generated in the combustor to the metal film, and an energy source that is attached to the combustor and that can apply heat energy to the fuel in the fuel passage. A thermoelectric generator, comprising: In the combustor, the fuel flow path is formed between a pair of substrates that are stacked and fixed in a thickness direction, and the energy source is provided on one surface side of the combustor in the thickness direction and the fuel flow is provided by Joule heat. 2. The thermoelectric generator according to claim 1, comprising a micro-heater for heating the fuel in the use flow path. In the combustor, the fuel flow path is formed by providing a groove on a surface of one of the pair of substrates facing the other substrate, and the microheater includes a groove for the groove on the one substrate. 3. The thermoelectric generator according to claim 2, comprising a metal thin film laminated on an insulating thin film also serving as a bottom wall. The thermoelectric generator according to any one of claims 1 to 3, wherein the energy source is provided at a plurality of locations along the fuel flow path. The thermoelectric generator according to any one of claims 1 to 3, wherein the energy source is formed over the entire length of the fuel flow path.

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