JP2004164922A - Method for positioning assembly to be positioned in vacuum chamber and positioning device that realizes the method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for positioning surely and exactly an assembly to be positioned which is set in a vacuum chamber while keeping the vacuum state, and to provide a positioning device which realizes the method. <P>SOLUTION: The positioning device 20 has the vacuum chamber 21 where a conveyance mechanism 22 which holds a front base plate 11 of a FED and a lifter 23 which holds a rear base plate 12 of the field emission display are disposed. The vacuum chamber 21 is supported with and fixed to the first frame 25. Supporting rods 31 which support the conveyance mechanism 22, supporting rods 36 which support the lifter 23 and a detector are attached from outside of the vacuum chamber 21 to the second frame 35 different from the first frame 25. The front base plate 11 is leveled horizontally by operating a jack bolt 33 outside the vacuum chamber 21, and the rear base plate 12 is leveled horizontally by operating an adjuster 39 outside the vacuum chamber 21. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for positioning a member to be positioned in a vacuum chamber and a positioning device for realizing the method.
[0002]
[Prior art]
2. Description of the Related Art In recent years, various flat-panel image display devices have attracted attention as next-generation lightweight and thin display devices that replace cathode ray tubes (hereinafter, referred to as CRTs). For example, a plasma display (PDP) using light emission of a phosphor due to a discharge phenomenon, and a field emission display (hereinafter, referred to as FED) mainly using electron emission by an electric field are known (for example, Patent Document 1). reference.).
[0003]
These image display devices have, as a basic configuration, a front substrate and a rear substrate which are opposed to each other at a predetermined interval, and these substrates are joined together by a rectangular frame-shaped side wall at a peripheral portion, thereby forming a vacuum envelope. Is composed. In the FED, a phosphor layer is formed on an inner surface of a front substrate, and electron-emitting devices, which are electron emission sources for exciting the phosphor, are arranged corresponding to each pixel on an inner surface of the rear substrate. Further, between the two plates, a large number of spacers, such as plate-like, columnar, or bead, are arranged in order to maintain a gap between the plates.
[0004]
In these image display devices, it is important that the space between the front substrate and the rear substrate, that is, the inside of the vacuum envelope is maintained at a high degree of vacuum. If the degree of vacuum is low, stable electron emission cannot be performed, and the life of the image display device will be shortened.
[0005]
For this reason, conventionally, when manufacturing an image display device, a rear substrate and a front substrate each having a side wall attached thereto are arranged in a vacuum chamber while facing each other in parallel and horizontally, and after evacuating the vacuum chamber, the front substrate and the rear The substrate is heated to a high temperature to perform a degassing process, a getter film is formed in a region covering the image display region of the front substrate, and then both substrates arranged opposite to each other are sealed in a vacuum to form a vacuum envelope. Had to be formed.
[0006]
At the time of sealing, the low-melting metal provided on the side wall attached to the rear substrate was melted, and the rear substrate was pressed against the front substrate.
[0007]
[Patent Document 1]
JP-A-2000-229825 (FIG. 1)
[0008]
[Problems to be solved by the invention]
However, after arranging the rear substrate and the front substrate parallel and horizontal to each other in the vacuum chamber, when heating both substrates for degassing, the vacuum chamber is also heated to a high temperature and thermally expanded at the same time, causing distortion in the vacuum chamber. As a result, there is a problem that the horizontality of the substrate positioned and arranged in the chamber is impaired.
[0009]
If the substrates are sealed while the horizontality of the substrates is impaired in this way, not only may the substrates be sealed in a distorted state, but also when the low-melting metal is heated and melted by energization, the viscosity is reduced. The low melting point metal is offset on the side wall, and the low melting point metal is unevenly distributed on the side wall. There is a problem that the vacuum state cannot be maintained.
[0010]
Therefore, it is necessary to increase the level of the substrate in the vacuum chamber in order to secure the ultra-high vacuum of the vacuum envelope. In addition, it is necessary to open the vacuum chamber to the atmosphere and measure the level of the substrate with a spirit level while re-adjusting the posture of the substrate. This requires much time for the operation and increases the manufacturing cost.
[0011]
The present invention has been made in view of the above points, and an object of the present invention is to realize a positioning method capable of reliably and accurately positioning a member to be positioned disposed in a vacuum chamber while maintaining a vacuum state, and to realize this method. To provide a positioning device.
[0012]
[Means for Solving the Problems]
In order to achieve the above object, according to the positioning method of the present invention, a member to be positioned arranged in a vacuum chamber is supported by a support mechanism provided through a communication member that communicates the vacuum chamber with the outside, and the vacuum chamber By operating the support mechanism outside the device, the positioning target member is positioned.
[0013]
According to the positioning method of the present invention, a step of arranging a member to be positioned in a vacuum chamber, a step of evacuating the vacuum chamber, and a supporting mechanism that supports the member to be positioned from outside the vacuum chamber are described above. Operating the outside of the vacuum chamber to position the member to be positioned.
[0014]
According to the positioning method of the present invention, a step of arranging a member to be positioned in a vacuum chamber, a step of evacuating the vacuum chamber, and a step of detecting the member to be positioned from outside the vacuum chamber, A step of operating a support mechanism that supports the member to be positioned from outside the vacuum chamber outside the vacuum chamber based on the detection result to position the member to be positioned.
[0015]
According to the invention, the member to be positioned disposed in the vacuum chamber can be positioned from outside the vacuum chamber. For this reason, even if the positioning target once positioned in the vacuum chamber is displaced for some reason, the positioning target can be repositioned without opening the vacuum chamber to the atmosphere. In other words, the member to be positioned can be positioned a plurality of times while maintaining the vacuum state of the vacuum chamber, there is no need to evacuate the vacuum chamber many times, and the number of working steps can be greatly reduced. Can be positioned reliably and accurately many times.
[0016]
Further, according to the positioning method of the present invention, a step of holding the first and second plate-shaped members respectively in the first and second holding mechanisms provided in the vacuum chamber, and a step of evacuating the vacuum chamber A detecting step of detecting the first and second plate-like bodies from outside the vacuum chamber; and a first step of supporting the first holding mechanism from outside the vacuum chamber based on the detection result. A first positioning step of operating the support mechanism outside the vacuum chamber to position the first plate-like body; and supporting the second holding mechanism from outside the vacuum chamber based on the detection result. A second positioning step of operating the second support mechanism outside the vacuum chamber to position the second plate-shaped body.
[0017]
Further, the positioning device of the present invention, a vacuum chamber containing the member to be positioned, a communication member that communicates the vacuum chamber with the outside, is provided to communicate the inside and outside of the vacuum chamber through the communication member, A support mechanism for supporting the member to be positioned; and a positioning mechanism for operating the support mechanism outside the vacuum chamber to position the member to be positioned.
[0018]
According to the invention, the member to be positioned arranged in the vacuum chamber can be positioned from outside the vacuum chamber by the support mechanism provided via the communication member. For this reason, even if the positioning target once positioned in the vacuum chamber is displaced for some reason, the positioning target can be repositioned without opening the vacuum chamber to the atmosphere. In other words, the member to be positioned can be positioned a plurality of times while maintaining the vacuum state of the vacuum chamber, there is no need to evacuate the vacuum chamber many times, and the number of working steps can be greatly reduced. Can be positioned reliably and accurately many times.
[0019]
Further, the positioning device of the present invention includes a first holding mechanism movably holding a substantially rectangular plate-like first plate-like member, and a substantially rectangular plate-like member having substantially the same size as the first plate-like member. A second holding mechanism that movably holds the second plate-shaped body, a vacuum chamber that houses the first and second holding mechanisms, and first and second communicating the vacuum chamber with the outside. A communication member, a first support mechanism that is provided so as to communicate between the inside and the outside of the vacuum chamber through the first communication member, and supports the first holding mechanism; and a second communication member. A second support mechanism provided to communicate the inside and outside of the vacuum chamber to support the second holding mechanism; and a first support mechanism operated outside the vacuum chamber to operate the first support mechanism. First positioning for operating the holding mechanism to position the first plate-like body A second positioning mechanism for operating the second support mechanism outside the vacuum chamber to operate the second holding mechanism to position the second plate-shaped body. .
[0020]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0021]
First, the configuration of an FED as an example of an image display device manufactured using the positioning method and the positioning device according to the present embodiment will be described.
[0022]
As shown in FIGS. 1 and 2, the FED includes a front substrate 11 (first plate-like member, a member to be positioned) and a rear substrate 12 (second plate-like member) each formed of a rectangular glass plate as an insulating substrate. Body, a member to be positioned), and these substrates are opposed to each other with a gap of 1 to 2 mm. The front substrate 11 and the rear substrate 12 are joined to each other via a rectangular frame-shaped side wall 13 to form a flat rectangular vacuum envelope 10 whose inside is maintained in a vacuum state. .
[0023]
The side wall 13 functioning as a joining member is sealed to the periphery of the back substrate 12 and the periphery of the front substrate 11 by, for example, frit glass 19a made of low-melting glass and low-melting metal 19b such as indium. The peripheral edges of the first substrate 11 and the flat substrate 12 are joined to each other.
[0024]
A plurality of spacers 14 are provided inside the vacuum envelope 10 to support an atmospheric pressure load applied to the front substrate 11 and the rear substrate 12. As the spacer 14, a plate-shaped or columnar spacer or the like can be used.
[0025]
In an image display area on the inner surface of the front substrate 11, a phosphor screen 15 having phosphor layers 16 of red, green, and blue and a black light-shielding layer 17 in a matrix form is formed as a phosphor screen. These phosphor layers 16 may be formed in a stripe shape or a dot shape. A metal back 20 made of an aluminum film or the like is formed on the phosphor screen 15, and a getter film 8 is further formed on the metal back.
[0026]
On the inner surface of the back substrate 12, a large number of surface conduction electron-emitting devices 18 each emitting an electron beam are provided as excitation means for exciting the phosphor layer 16 of the phosphor screen 15. These electron-emitting devices 18 are arranged in a plurality of columns and a plurality of rows corresponding to each pixel. Each of the electron-emitting devices 18 includes an electron-emitting portion (not shown), a pair of device electrodes for applying a voltage to the electron-emitting portion, and the like. On the inner surface of the rear substrate 12, a number of wirings 7 for supplying a potential to the electron-emitting devices 18 are provided in a matrix shape, and the ends of the wirings 7 are drawn out of the vacuum envelope 10.
[0027]
In such an FED, when displaying an image, an anode voltage is applied to the phosphor screen 15 and the metal back 20, and an electron beam emitted from the electron-emitting device 18 is accelerated by the anode voltage to collide with the phosphor screen 15. Let it. Thereby, the phosphor layer 16 of the phosphor screen 15 is excited to emit light, and a color image is displayed.
[0028]
In order to display a good image stably over a long period of time using the FED, the vacuum envelope 10 must be ^-7 It is necessary to be in an ultra-high vacuum state of about [Pa]. For this reason, when assembling the vacuum envelope 10, the rear substrate 12, the spacer 14, and the front substrate 11 each having a side wall are arranged in the vacuum chamber, and the vacuum chamber is evacuated. , 12 are baked to form a getter film 8 on the metal back 20 of the front substrate 11, and then the side wall 13 and the front substrate 11 are joined and sealed in a vacuum chamber.
[0029]
FIG. 3 shows a schematic structure of a positioning device 20 according to an embodiment of the present invention, which is used for manufacturing the vacuum envelope 10 described above.
[0030]
The positioning device 20 includes a rear substrate 12 (hereinafter, simply referred to as a rear substrate 12) to which a side wall 13 is attached via a frit glass 19a, a spacer 14, and a vacuum chamber 21 into which the front substrate 11 is placed. A low-melting-point metal material is uniformly provided in advance on a joint surface of the rear substrate 12 where the side wall 13 faces the front substrate 11. The description of the attachment of the spacer 14 is omitted here.
[0031]
In the vacuum chamber 21, a transport mechanism 22 (first holding mechanism) holding the front substrate 11 in a substantially horizontal state and movably holding the same in the direction of the paper surface, and mounting the rear substrate 12 in a substantially horizontal state on the paper surface A lifter 23 (second holding mechanism) held movably in the direction is provided. The lifter 23 moves the rear substrate 12 in the horizontal direction and drives the rear substrate 12 to move up and down so as to push up the rear substrate 12 toward the front substrate 11. The front substrate 11 is suction-held by the transport mechanism 22 with the phosphor layer facing downward. The back substrate 12 is held on the lifter 23 with the joint surface of the side wall 13 facing upward.
[0032]
The front substrate 11 is transported by the transport mechanism 22 from the retracted position on the back side of the drawing to the detection position on the near side. The rear substrate 12 is moved by the lifter 23 from the retracted position on the back side of the drawing to the detection position on the near side, and is pushed up toward the front substrate 11 arranged at the detection position. Around the detection position of the rear substrate 12, a heater (not shown) for melting the low melting point metal material provided on the joint surface of the side wall 13 is provided. FIG. 3 shows a state in which the front substrate 11 and the rear substrate 12 are respectively arranged at the detection positions.
[0033]
The vacuum chamber 21 is fixedly disposed on the first frame 25 via a plurality of legs 24 provided on the outer peripheral edge of the lower end. A plurality of vacuum bellows 26 and 27 (first and second communication members) for connecting the inside of the vacuum chamber 21 to the outside are attached to the lower surface of the vacuum chamber 21. Gaskets 26a, 27a are provided between the vacuum bellows 26, 27 and the vacuum chamber 21 to connect them in a sealed state. The inside of the vacuum bellows 26 and 27 is evacuated together with the vacuum chamber 21.
[0034]
Further, on the lower surface of the vacuum chamber 21, four viewing ports 28 (windows) for transmitting a laser beam emitted from a detection device described later are provided. The four viewing ports 28 are formed of a transparent material that can withstand an ultra-high vacuum, and are provided corresponding to the four corners of the front substrate 11 and the rear substrate 12 disposed at the detection positions, respectively (FIG. 4). reference).
[0035]
The transport mechanism 22 that movably holds the front substrate 11 in the vacuum chamber 21 is attached to the distal ends of four support rods 31 (first support mechanisms) that extend in a substantially vertical direction through the vacuum bellows 26, respectively. Has been. Near the lower end of each support rod 31 extending to the outside of the vacuum chamber 21 through the vacuum bellows 26, a gasket 32 (seal member) for sealing the end of the vacuum bellows 26, and the support rod 31 are attached in the axial direction. A jack bolt 33 (first positioning mechanism) for raising and lowering is provided.
[0036]
The base ends of the four support rods 31 supporting the front substrate 11 are in a non-contact state inside the first frame 25 in which the vacuum chamber 21 is fixed, that is, fixed to a second frame 35 provided separately. Have been. Therefore, by independently adjusting the four jack bolts 33, each support rod 31 can be moved in the axial direction, and the transport mechanism 22 can be moved up and down, and held by the transport mechanism 22. The four corners of the front substrate 11 can be moved separately, and the front substrate 11 can be positioned in a horizontal state.
[0037]
The lifters 23 which hold the rear substrate 12 so as to be movable and vertically movable within the vacuum chamber 21 are respectively provided with two support rods 36 (second support mechanisms) extending substantially vertically through the vacuum bellows 27. It is attached to the tip of. At the lower end of each support rod 36 extending outside the vacuum chamber 21 through the vacuum bellows 27, a substantially rectangular plate-shaped base plate 38 is provided via a gasket 37 (seal member) for sealing the lower end of the vacuum bellows 27. Installed.
[0038]
The base plate 38 is attached to the second frame 35 in a state where the base plate 38 can be finely adjusted in the vertical direction by adjusters 39 (second positioning mechanisms) provided at the four corners. Therefore, by adjusting the adjuster 39, the base plate 38 in a substantially horizontal state can be inclined to a desired state, the two support rods 36 can be moved in the axial direction, and the lifter 23 can be moved up and down. The rear substrate 12 held by the lifter 23 can be moved, and the rear substrate 12 can be positioned in a horizontal state.
[0039]
FIG. 4 is an external perspective view of the detection device 40 attached to the positioning device 20 of FIG.
[0040]
The detection device 40 has a rectangular frame-shaped sensor frame 43 in which two base frames 41 provided parallel to and separated from each other and two connection frames 42 connecting both ends of the base frame 41 are combined. As shown in FIG. 5, the sensor frame 43 is fixedly provided inside the second frame 35 via four support plates 44 each having a substantially L-shaped cross section and attached to the four corners.
[0041]
Between the four support plates 44 and the sensor frame 43, adjustment bolts 45 for finely adjusting the vertical positions of the four corners of the sensor frame 43 while being attached to the second frame 35 as shown in FIG. Is provided. In addition, a level 46 for measuring horizontality along the longitudinal direction of each of the frames 41 and 42 is provided on the two base frames 41 and the two connecting frames 42 of the sensor frame 43, respectively. . Thus, the posture of the sensor frame 43 can be adjusted to a horizontal state by adjusting the square adjustment bolts 45 while viewing the four levels 46.
[0042]
Further, laser displacement measuring devices 47 can be arranged at four corners of the sensor frame 43 having a substantially rectangular frame shape. The laser displacement measuring device 47 is moved to any one of the four corners of the sensor frame 43 by a moving mechanism (not shown), and is brought into contact with the positioning pin 48 at each corner to be positioned. In any case, as shown in FIG. 5, the laser displacement measuring device 47 is positioned and arranged so that its optical axis passes through the center of the four viewing ports 28 provided in the vacuum chamber 21 described above.
[0043]
The positioning pins 48 provided at the four corners of the sensor frame are mounted on the XY stage 49, respectively. The XY stage 49 is finely adjustable in the horizontal direction, and finely adjusts the position of the positioning pin 48 in the horizontal direction. That is, by adjusting the XY stage 49, the position of the laser displacement measuring device 47 can be finely adjusted.
[0044]
Next, an operation of positioning the front substrate 11 and the rear substrate 12 using the positioning device 20 will be described mainly with reference to FIG.
[0045]
With the inside of the vacuum chamber 21 open to the atmosphere, the rear substrate 12 to which the side wall 13 is attached, the spacer 14 (not described here), and the front substrate 11 are put into the vacuum chamber 21. A low-melting-point metal material is provided on the joint surface of the side wall 13 in advance. The front substrate 11 is held in a state of being attracted to the lower surface of the transport mechanism 22, and the rear substrate 12 is set on the distal ends of the plurality of support rods 23 a of the lifter 23. In this state, the front substrate 11 and the rear substrate 12 are arranged in a substantially parallel and substantially horizontal state.
[0046]
Thereafter, the front substrate 11 is moved to the detection position by the transfer mechanism 22 while the vacuum chamber 21 is sealed and evacuated to an ultra-high vacuum state or is kept open to the atmosphere, and the lifter is lifted. 23 moves the rear substrate 12 to a retracted position where it does not overlap the front substrate 11. Then, in this state, the reference marks 51 provided in advance at the four corners of the front substrate 11 arranged at the detection position are detected by the detection device 40, and the front substrate 11 is leveled.
[0047]
At this time, the laser displacement measuring device 47 is moved to one of the four corners of the sensor frame 43 by a moving mechanism (not shown), and is brought into contact with a positioning pin 48 protruding from the XY stage 49 to be positioned and arranged. Then, laser light is emitted from the laser displacement measuring device 47, and the laser light transmitted through the corresponding viewing port 28 is reflected by the corresponding reference mark 51 of the front substrate 11, and the reflected light is detected by the laser displacement measuring device 47. Is done.
[0048]
The laser displacement measuring device 47 measures the distance to the reference mark 51 on the front substrate 11 based on the displacement of the received laser light. Then, the laser displacement measuring devices 47 are sequentially arranged at the four corners of the sensor frame 43 and the same operation is performed to detect the reference marks 51 provided at the four corners of the front substrate 11 and measure the distance between them.
[0049]
At this time, the jack bolts 33 are adjusted so that the measurement results of the four corners match, and the front substrate 11 is leveled out. In this case, it is premised that the sensor frame 43 is leveled out with high precision in advance so that the laser displacement measuring device 47 is moved to the four corners and positioned at the same height with high precision.
[0050]
In this manner, after the front substrate 11 is leveled out, the front substrate 11 is not moved from the detection position, but the rear substrate 12 disposed at the retracted position is moved to the detection position facing the front substrate 11. Move (state shown in FIG. 5).
[0051]
Then, similarly to the leveling of the front substrate 11 described above, the laser displacement measuring device 47 is sequentially moved to the four corners of the sensor frame 43 to detect the reference marks 52 formed in advance at the four corners of the rear substrate 12, Measure the distance. At the same time, the adjusters 39 provided at the four corners of the base plate 38 are adjusted so that the four corners have the same distance, and the rear substrate 12 is leveled out.
[0052]
When the front substrate 11 and the rear substrate 12 are leveled out as described above, if the vacuum chamber 21 is not evacuated at this point, 10 ^-7 It is evacuated to an ultra-high vacuum of about [Pa]. As a matter of course, this step becomes unnecessary when the above-mentioned leveling of the substrate is performed in a state where the substrate is evacuated.
[0053]
Thereafter, a baking process for degassing the front substrate 11 and the back substrate 12, a gettering process for forming a getter film on the inner surface of the front substrate 11, an aging process, and the like are performed as necessary. 12 is sealed. At this time, the low-melting metal material provided in advance on the joint surface of the side wall 13 is energized and melted by a heater (not shown), the support rod 23a of the lifter 23 is operated, and the rear substrate 12 is raised toward the front substrate 11. Is pressed.
[0054]
Finally, the vacuum chamber 21 is opened to the atmosphere, and the vacuum envelope 10 in which the front substrate 11 and the rear substrate 12 are sealed via the side wall 13 is taken out.
[0055]
As described above, according to the present embodiment, the front substrate 11 and the rear substrate 12 are respectively attached to the transport mechanism 22 and the lifter 23 supported by the plurality of support rods 31 and 36 provided through the plurality of vacuum bellows 26 and 27, respectively. The holding rods 31 and 36 were operated outside the vacuum chamber 21. For this reason, the front substrate 11 and the rear substrate 12 disposed in the vacuum chamber 21 in the ultra-high vacuum state can be positioned reliably and accurately from outside the vacuum chamber 21 while maintaining the ultra-high vacuum state.
[0056]
For example, when the substrate is degassed by a baking process after the inside of the vacuum chamber 21 is evacuated, even if the vacuum chamber 21 is thermally expanded and distorted, the vacuum chamber 21 is not opened to the atmosphere without being opened. The substrates 11, 12 whose state has been damaged can be leveled out any number of times. For this reason, when distortion occurs in the substrate as in the related art, there is no need to once open the vacuum chamber 21 to the atmosphere to handle the substrate, thereby greatly improving work efficiency.
[0057]
The positioning device 20 according to the present embodiment includes a first frame 25 supporting and fixing the vacuum chamber 21 and a second frame 25 supporting and fixing the support rod 26, ie, the jack bolt 33, the support rod 36, ie, the adjuster 39, and the detection device 40. The frame 35 and the frame 35 are separately provided in a non-contact state. For this reason, the heat of the vacuum chamber 21 heated to a relatively high temperature can be prevented from being transmitted to the jack bolt 33, the adjuster 39, and the detection device 40 through the first and second frames 25 and 35, and Vibration undesirably applied to the vacuum chamber 21 can be prevented from being transmitted to the jack bolt 33, the adjuster 39, and the detection device 40, so that the substrates 11 and 12 can be positioned with high accuracy regardless of the state of the vacuum chamber 21. It becomes possible.
[0058]
The present invention is not limited to the above-described embodiment, but can be variously modified within the scope of the present invention.
[0059]
For example, in the above-described embodiment, a case has been described in which the present invention is applied to the manufacture of an FED as an example of an image display device. However, the present invention is not limited to this, and is applicable to other flat-type image display devices. can do. Further, in the above-described embodiment, a method of manufacturing an image display device in which a getter film is formed on a front substrate has been described. However, the present invention is also applicable to an image display device having no getter film.
[0060]
【The invention's effect】
As described above, according to the positioning method and the positioning device of the present invention, the member to be positioned arranged in the vacuum chamber can be reliably and accurately positioned while maintaining the vacuum state of the vacuum chamber.
[Brief description of the drawings]
FIG. 1 is a perspective view showing the appearance of an FED according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view of the FED of FIG. 1 cut along line AA.
FIG. 3 is a schematic diagram showing a positioning device according to an embodiment of the present invention for positioning a rear substrate and a front substrate of the FED of FIG. 1;
FIG. 4 is a perspective view showing an appearance of a detection device attached to the positioning device of FIG. 3;
FIG. 5 is a diagram for explaining an operation by a positioning device including the detection device of FIG. 4;
[Explanation of symbols]
10 ... vacuum envelope,
11 front substrate,
12 ... back substrate,
13 ... side wall,
20 ... Positioning device,
21 ... vacuum chamber,
22: transport mechanism,
23 ... lifter,
25 ... First frame,
26, 27 ... vacuum bellows,
28 ... Viewing port,
31, 36 ... support rod,
32, 37 ... gasket,
33 ... jack bolt,
35 ... second frame,
38 Base plate,
39 ... Adjuster,
40 ... detection device,
43 ... Sensor frame,
45 ... Adjustment bolt,
46… Level,
47 ... Laser displacement measuring device,
48 positioning pin,
49 ... XY stage,
51, 52 ... fiducial marks.

Claims (19)

The positioning member arranged in the vacuum chamber is supported by a support mechanism provided through a communication member that communicates the vacuum chamber with the outside, and the positioning mechanism is operated outside the vacuum chamber to operate the positioning member. How to position. Arranging the member to be positioned in the vacuum chamber;
Evacuating the vacuum chamber;
A step of operating a support mechanism that supports the member to be positioned from outside the vacuum chamber outside the vacuum chamber to position the member to be positioned,
A method for positioning a member to be positioned, comprising: Arranging the member to be positioned in the vacuum chamber;
Evacuation of the vacuum chamber;
A detection step of detecting the member to be positioned from outside the vacuum chamber,
Based on the detection result, operating a support mechanism that supports the member to be positioned from outside the vacuum chamber outside the vacuum chamber, and positioning the member to be positioned,
A method for positioning a member to be positioned, comprising: In the detecting step, the positioning member is irradiated with laser light from outside the vacuum chamber through at least one window provided in the vacuum chamber, and reflected light is received outside the vacuum chamber to receive the reflected light. 4. The positioning method according to claim 3, wherein the posture of the member to be positioned is detected. A step of holding the first and second plate-shaped members respectively on first and second holding mechanisms provided in the vacuum chamber;
Evacuation of the vacuum chamber;
A detecting step of detecting the first and second plate-like bodies from outside the vacuum chamber;
On the basis of this detection result, a first support mechanism that supports the first holding mechanism from outside the vacuum chamber is operated outside the vacuum chamber to position the first plate-shaped body. Positioning process;
On the basis of the detection result, a second support mechanism that supports the second holding mechanism from outside the vacuum chamber is operated outside the vacuum chamber to position the second plate-shaped body. Positioning process;
A method for positioning a member to be positioned, comprising: In the detection step, the first plate-shaped body is irradiated with laser light from outside the vacuum chamber through at least one window provided in the vacuum chamber, and reflected light is emitted outside the vacuum chamber. Detecting the attitude of the first plate-like body by receiving light, irradiating the second plate-like body with laser light through the window, and receiving the reflected light outside the vacuum chamber 6. The positioning method according to claim 5, wherein the posture of the second plate-like body is detected by the following. A vacuum chamber containing the member to be positioned;
A communication member for communicating the vacuum chamber with the outside;
A support mechanism provided to communicate the inside and outside of the vacuum chamber through the communication member, and supporting the member to be positioned;
A positioning mechanism that operates the support mechanism outside the vacuum chamber to position the member to be positioned,
A positioning device comprising: The positioning device according to claim 7, further comprising a detection device that detects a position of the member to be positioned from outside the vacuum chamber. A first frame supporting and fixing the vacuum chamber;
A second frame provided separately from and separate from the first frame and supporting and fixing the positioning mechanism;
The positioning device according to claim 7, further comprising: 10. The positioning device according to claim 9, wherein the second frame is fixedly provided with a detection device for detecting the position of the member to be positioned from outside the vacuum chamber. The detecting device irradiates the positioning member with laser light from outside the vacuum chamber through at least one window provided in the vacuum chamber, receives reflected light outside the vacuum chamber, and The positioning device according to claim 8, wherein the position of the member to be positioned is detected. The positioning device according to claim 7, wherein the communication member includes a seal member that seals the vacuum chamber. A first holding mechanism movably holding a substantially rectangular plate-shaped first plate-shaped body,
A second holding mechanism that movably holds a second plate-like member having a substantially rectangular plate shape having substantially the same size as the first plate-like member;
A vacuum chamber containing the first and second holding mechanisms;
First and second communication members for communicating the vacuum chamber with the outside;
A first support mechanism provided to communicate the inside and outside of the vacuum chamber through the first communication member, and supporting the first holding mechanism;
A second support mechanism provided to communicate the inside and outside of the vacuum chamber via the second communication member, and supporting the second holding mechanism;
A first positioning mechanism for operating the first support mechanism outside the vacuum chamber to operate the first holding mechanism to position the first plate-shaped body;
A second positioning mechanism that operates the second support mechanism outside the vacuum chamber to operate the second holding mechanism to position the second plate-shaped body;
A positioning device comprising: The first holding mechanism holds the first plate-shaped body movably between a detection position and a retracted position in the vacuum chamber,
14. The positioning device according to claim 13, wherein the second holding mechanism movably holds the second plate-like body between the detection position and the retracted position in the vacuum chamber. From the outside of the vacuum chamber, the posture of the first plate-like body moved to the detection position by the first holding mechanism is detected, and the position of the first plate-like body moved to the detection position by the second holding mechanism is detected. The positioning device according to claim 14, further comprising a detection device that detects a posture of the second plate-shaped body. A first frame supporting and fixing the vacuum chamber;
A second frame provided separately from and separate from the first frame and supporting and fixing the first and second positioning mechanisms;
The positioning device according to claim 13 or 15, further comprising: The second frame detects the attitude of the first plate-like body moved to the detection position by the first holding mechanism from outside the vacuum chamber, and detects the posture by the second holding mechanism. 17. The positioning device according to claim 16, wherein a detection device for detecting a posture of the second plate-like body moved to the position is fixed. The detection device irradiates the first plate-shaped body moved to the detection position with laser light from outside the vacuum chamber through at least one window provided in the vacuum chamber, and reflects the laser light. Receiving the light outside the vacuum chamber to detect the attitude of the first plate-like body, and irradiating the second plate-like body moved to the detection position with laser light through the window, 18. The positioning device according to claim 15, wherein the reflected light is received outside the vacuum chamber to detect a posture of the second plate-shaped body. 14. The positioning device according to claim 13, wherein the first and second communication members each include a seal member that seals the vacuum chamber.

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