JP2004151343A - Apparatus for manufacturing electro-optical device, pressure head used for the same, and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing an electro-optical device which improves the yield in manufacturing a liquid crystal panel used for the electro-optical device and prevents product defects, and a pressure head used for the same and its manufacturing method. <P>SOLUTION: In the pressure head 4 used for the apparatus 50 for manufacturing the electro-optical device in which internal surfaces of both substrates 1 and 2 are oppositely arranged to each other across a sealing material 3 and both substrates 1 and 2 are adhered by pressing to have internal space (cell gap), a plurality of uneven parts or projection parts are formed on a substrate abutting surface 4a of the pressure head 4 which presses the external surface of at least one substrate. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a manufacturing apparatus for an electro-optical device, a pressure head used for the same, and a method for manufacturing the same, and more particularly, to a pressure head for manufacturing an electro-optical device and a method for manufacturing the same.
[0002]
[Prior art]
As is well known, a liquid crystal panel in an electro-optical device is configured by sealing liquid crystal between two substrates such as a glass substrate and a quartz substrate, and a thin film transistor (hereinafter, referred to as a thin film transistor) is provided on one of the substrates. , TFTs) are arranged in a matrix, and opposing electrodes are arranged on the other substrate, and the optical characteristics of the liquid crystal layer sealed between the two substrates are changed according to image signals, thereby enabling image display. And
[0003]
Further, the TFT substrate on which the TFT is disposed and the other substrate (hereinafter, referred to as an opposing substrate) disposed opposite to the TFT substrate are manufactured separately. (For example, within 1 μm of alignment error), the liquid crystal is sealed.
[0004]
In the panel assembling step, first, an alignment film for aligning liquid crystal molecules along the substrate surface is formed on the surface of the TFT substrate and the counter substrate, which are manufactured in the respective substrate manufacturing steps, in contact with the liquid crystal layer. . This alignment film is formed, for example, by printing polyimide with a thickness of about several tens of nanometers. After that, baking is performed, and further, a rubbing treatment is performed to determine the arrangement of the liquid crystal molecules when no voltage is applied. Next, a sealing material made of a resin combined with UV heat, which serves as an adhesive, is disposed on the periphery of one of the substrates, and the TFT substrate and the opposing substrate are opposed to each other via the sealing material. Thereafter, the opposing substrate is vacuum-adsorbed to the pressure head, and the sealing material is pressed by pressing the opposing substrate with a load of, for example, 6 kgf to 8 kgf while performing alignment in this state. Further, the sealing material is preliminarily cured by irradiating ultraviolet rays, and then is baked to be fully cured. Then, an internal space formed between the two substrates through a notch provided in a part of the sealing material ( A method of enclosing a liquid crystal in a cell gap is used.
[0005]
By the way, in a panel assembling process in which the opposing substrate is pressed and pressed by a pressing head, a substrate contacting surface of the pressing head and an abutting surface of the substrate are formed between the two substrates. In order to improve the accuracy of the internal space, that is, the so-called cell gap, a highly accurate flat (mirror surface) finish is provided.
[0006]
However, after the counter substrate is pressurized with this pressure head to temporarily cure the sealant, even if the vacuum suction is stopped, the gap between the substrate contact surface of the pressure head and the contact surface of the counter substrate is maintained. Vacuum state remains, and a state in which both are in close contact with each other is maintained (hereinafter, referred to as "ringing"). Therefore, when the pressure head is separated from the opposing substrate, the opposing substrate is peeled off from the pre-cured panel, or the sealing material is peeled off from the substrate, or the alignment of the opposing substrate with respect to the TFT substrate becomes poor. There was a problem that it shifted.
[0007]
In view of the above problem, for example, in Patent Document 1, a concave portion is formed in a substrate contact surface of a pressure head that contacts a counter substrate, and after pressing the counter substrate, the substrate contact surface of the pressure head and the counter substrate are pressed. There is disclosed a pressure head used in an electro-optical device manufacturing apparatus configured to prevent the contacted surface from binding.
[0008]
[Patent Document 1]
JP 2001-142085 A
[Problems to be solved by the invention]
However, in the pressurizing head used in the manufacturing apparatus for an electro-optical device disclosed in Patent Document 1, since only a concave portion is formed on the contact surface of the pressurizing head that contacts the opposing substrate, the above-mentioned pressing head is used. In some cases, the vacuum state of the contact surface cannot be eliminated, and it is not possible to completely prevent the pressing head contact surface after the opposing substrate pressurization and the contact surface of the opposing substrate from being joined.
[0010]
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has an improved manufacturing yield for a liquid crystal panel used for an electro-optical device, a manufacturing device for an electro-optical device which prevents product defects, and a pressure head used for the same. And a method for manufacturing the same.
[0011]
Means and Action for Solving the Problems
The manufacturing apparatus for an electro-optical device according to the present invention is characterized in that a pressure head abuts against the outer surface of at least one of the substrates of the electro-optical device in which the respective inner surfaces of the two substrates are opposed to each other via a sealing material, and pressurizes both substrates. In a manufacturing apparatus for an electro-optical device, which has an internal space, a plurality of concave and convex portions or convex portions are formed on a substrate contact surface of the pressure head.
[0012]
According to the manufacturing apparatus for an electro-optical device of the present invention, since a plurality of concave and convex portions or convex portions are formed on the substrate contact surface of the pressure head, the substrate contact surface of the pressure head is formed on at least one outer surface of the substrate. When the contact surfaces are brought into contact, there is an effect that the substrate and the pressure head do not completely adhere.
[0013]
Further, as one aspect of the electro-optical device manufacturing apparatus of the present invention, an electro-optical device manufacturing apparatus in which respective inner surfaces of both substrates are opposed to each other via a sealing material and the two substrates are pressure-bonded so as to have an internal space. A pressure head formed of a transparent member and having a plurality of uneven portions or protrusions formed thereon by laser or dry etching on a substrate contact surface that presses against an outer surface of at least one of the substrates when the two substrates are bonded to each other; Pressure head control means for controlling the operation of the pressure head, a camera for detecting the alignment marks of the two substrates through the pressure head from above the pressure head, and from above the pressure head Through the pressure head, an ultraviolet irradiation unit that irradiates the sealing material with ultraviolet light for curing the sealing material, and a light emitting source that supplies ultraviolet light to the ultraviolet irradiation unit, Characterized by comprising.
[0014]
According to this configuration, there is an effect that the two substrates can be temporarily cured with high accuracy.
[0015]
Further, as one aspect of the manufacturing apparatus for an electro-optical device according to the present invention, the pressure head control unit detects the alignment mark of the both substrates by the camera, so that when the two substrates are bonded, the position is determined. The operation of the pressurizing head is controlled so that the displacement does not occur.
[0016]
According to this configuration, since the alignment mark of both substrates is detected by the camera and the operation of the pressure head is controlled by the pressure head control means, the two substrates can be temporarily cured with high accuracy. Having.
[0017]
In one embodiment of the manufacturing apparatus for an electro-optical device according to the present invention, the ultraviolet irradiation unit irradiates the sealing material with ultraviolet light supplied from the light emitting source, thereby forming a sealing material for bonding the two substrates. It is characterized by temporary curing.
[0018]
According to this configuration, the ultraviolet irradiation unit irradiates the sealing material with the ultraviolet light supplied from the light emitting source, so that the sealing material that bonds the two substrates can be temporarily hardened reliably. Have.
[0019]
Further, in one aspect of the manufacturing apparatus for an electro-optical device according to the present invention, the concave and convex portions or the convex portions formed on the pressure head may be configured such that, after the two substrates are bonded, the pressure head is brought into contact with the substrate. When separated from the surface, it is characterized in that close contact with the contact surface is avoided.
[0020]
According to this configuration, the plurality of irregularities or protrusions formed on the substrate contact surface of the pressure head make the substrate contact surface of the pressure head closely contact with the surface to be pressed of the substrate to be pressed. Therefore, when the pressure head is separated from the substrate after the two substrates are bonded to each other, it is possible to prevent the displacement of the bonded two substrates due to the close contact between the two substrates. .
[0021]
In one aspect of the manufacturing apparatus for an electro-optical device according to the present invention, the camera is configured by a CCD camera, and a plurality of the cameras are arranged on the substrate contact surface of the pressure head from above the pressure head. The alignment marks of the two substrates are detected through a portion where no uneven portion or convex portion is formed.
[0022]
According to this configuration, since the detection by the CCD camera is performed through a plurality of uneven portions or portions where the convex portions are not formed on the substrate contact surface of the pressure head, the alignment marks of both substrates can be reliably detected. It has the effect that it can be done.
[0023]
The pressure head used in the manufacturing apparatus for an electro-optical device according to the present invention is configured such that the inner surfaces of both substrates abut on the outer surface of at least one of the substrates of the electro-optical device in which the inner surfaces of the two substrates are opposed to each other with a sealant interposed therebetween. In a pressure head used in an electro-optical device manufacturing apparatus that presses a substrate with an internal space, a plurality of concave / convex portions or convex portions are formed on a substrate contact surface of the pressure head. .
[0024]
According to the pressure head of the present invention, the substrate contact surface of the pressure head is formed with a plurality of uneven portions or protrusions, so that the substrate contact surface of the pressure head is formed on the outer surface of at least one of the substrates. When brought into contact, there is an effect that the substrate and the pressure head do not completely adhere to each other.
[0025]
In one aspect of the pressure head of the present invention, a substrate contact surface of the pressure head is provided with a vacuum suction hole for holding the at least one substrate.
[0026]
According to this configuration, since the pressure head holds the at least one substrate by vacuum suction, there is an effect that the two substrates can be accurately bonded when they are bonded to each other.
[0027]
Further, as one mode of the pressure head of the present invention, the plurality of concave / convex portions or convex portions formed on the substrate contact surface of the pressure head are formed by carbon dioxide laser or dry etching. .
[0028]
According to this configuration, since the plurality of uneven portions or convex portions formed on the substrate contact surface of the pressure head are formed by carbon dioxide laser or dry etching, the uneven portions or convex portions are formed accurately and efficiently. It has the effect that it can be done.
[0029]
Further, as one mode of the pressure head of the present invention, a plurality of uneven portions or protrusions formed on the contact surface of the pressure head are pressed against the contact surface of the pressure head. The method is characterized in that close contact with the outer surface of at least one of the substrates is avoided.
[0030]
According to this configuration, the plurality of uneven portions or protrusions formed on the substrate contact surface of the pressure head avoids close contact between the substrate contact surface of the pressure head and the outer surface of the substrate to be pressed. Therefore, when the pressure head is separated from the substrate after the two substrates are bonded to each other, it is possible to prevent the displacement of the bonded two substrates due to the close contact between the two substrates, the separation of the substrates, the lifting of the seal, and the like. It has the effect of being able to.
[0031]
In one aspect of the pressure head of the present invention, the plurality of protrusions formed on the substrate contact surface of the pressure head are at the same height with respect to the substrate outer surface with which the pressure head contacts. It is characterized by being formed so as to abut.
[0032]
According to this configuration, since the plurality of protrusions formed on the substrate contact surface of the pressure head abut the outer surface of the substrate with which the pressure head abuts, the pressure head abuts at the same height. This has the effect that the outer surface of the substrate can be uniformly pressed.
[0033]
A method of manufacturing a pressure head used in a manufacturing apparatus for an electro-optical device according to the present invention includes an electro-optical device in which respective inner surfaces of both substrates are opposed to each other via a sealing material, and the two substrates are pressure-bonded to have an internal space. In a method of manufacturing a pressure head used in a device manufacturing apparatus, a plurality of concave / convex portions or convex portions are formed by carbon dioxide laser or dry etching on a substrate contact surface of the pressure head for pressing an outer surface of at least one substrate. It is characterized by comprising a step.
[0034]
According to the method for manufacturing a pressure head used in the manufacturing apparatus for an electro-optical device of the present invention, at least one of the substrates is formed by forming a plurality of concave and convex portions or convex portions on the substrate contact surface of the pressure head. When the pressure head is brought into contact with the outer surface of the substrate, the substrate and the pressure head do not come into close contact with each other, so that when the substrate and the pressure head are separated from each other, they are easily separated from each other.
[0035]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to illustrated examples. In the present embodiment, a liquid crystal display device in an electro-optical device will be described as an example.
[0036]
FIG. 1 is a longitudinal sectional view schematically showing the configuration of a manufacturing apparatus for a liquid crystal display device according to an embodiment of the present invention. FIG. 2 is a bottom view of a pressure head in the manufacturing apparatus for a liquid crystal display device shown in FIG. FIG. 3 is an enlarged bottom view of a main part showing a substrate contact surface of the pressure head of FIG. 2, and FIG. 4 is an unevenness formed on the substrate contact surface of the pressure head along the line IV-IV ′ of FIG. It is the principal part enlarged longitudinal cross-sectional view which showed the part.
[0037]
As shown in FIG. 1, a manufacturing apparatus 100 for a liquid crystal display device includes a TFT substrate 1 having an alignment mark 1a on a substrate, and a counter substrate 2 disposed at a position facing the TFT substrate 1 and having an alignment mark 2a on the substrate. A sealing material 3 which is provided on the periphery of the TFT substrate 1 and the counter substrate 2 and is made of a resin combined with UV heat for joining the two substrates, and a liquid crystal which is an electro-optical material sealed between the two substrates 10 is a device for manufacturing a liquid crystal display device 50 configured to include the liquid crystal display device 10.
[0038]
The manufacturing apparatus 100 includes a base plate 5 on which the TFT substrate 1 is mounted on a surface on which a buffer material (not shown) is provided, a pressing head 4, and a pressing head control unit for controlling the operation of the pressing head 4. 9, a CCD camera 6 for detecting the alignment marks 1a and 2a of the TFT substrate 1 and the counter substrate 2 through the pressure head 4 from above the pressure head 4, and moving above the pressure head 4 when irradiating ultraviolet rays; An ultraviolet irradiator 7 for irradiating the sealing member 3 with ultraviolet light from above the pressure head 4 through the pressure head 4, and a light emitting source 8, which is disposed inside the ultraviolet irradiator 7 and emits ultraviolet light, A movable mirror 7a formed by a total reflection mirror that reflects ultraviolet light from the mirror toward the sealing material 3 and a light emitting source 8 that supplies ultraviolet light to the ultraviolet irradiation unit 7 constitute a main part thereof.
[0039]
The pressure head 4 is substantially entirely formed of a transparent member such as glass. The pressure head 4 has an opposing substrate contact surface 4a formed on the lower surface, and the contact surface 4a has a plurality of islands 24 and vacuum suction holes 20 (see FIGS. 2 and 3) described later. Is formed. When the liquid crystal display device 50 is manufactured, the pressurizing head 4 thus formed abuts on the outer surface 2b of the opposing substrate 2 opposite to the inner surface facing the TFT substrate 1, and is evacuated by a vacuum pump (not shown). The substrate 2 is vacuum-sucked through the suction holes 20, and in this state, the opposing substrate 2 is pressurized by pressing the opposing substrate 2 via the sealing material 3.
[0040]
Next, a method of manufacturing the liquid crystal display device 50 manufactured using the manufacturing apparatus 100 for a liquid crystal display device configured as described above will be described.
[0041]
First, as shown in FIG. 1, a TFT substrate 1 made of a large plate of, for example, quartz of 8 inches or more, which is manufactured in a manufacturing process of both substrates, is placed on a base plate 5, and On the other hand, a plurality of opposing substrates 2 cut out to a prescribed size are made to oppose each other, and the peripheral surface of one of the opposing surfaces, that is, the opposing substrate 2 and the surface of the TFT substrate 1 in contact with the liquid crystal 10. Is provided with a sealing material 3 made of an ultraviolet curable resin or a resin combined with UV heat, which serves as an adhesive, and the TFT substrate and the opposing substrate are bonded using the sealing material.
[0042]
Next, the substrate contact surface 4a of the pressure head 4 is brought into contact with the outer surface 2b of one of the plurality of counter substrates 2, and then the vacuum suction holes 20 of the substrate contact surface 4a are closed. Through vacuum.
[0043]
Further, the CCD camera 6 disposed above the pressing head 4 performs image processing by detecting the alignment marks 1a and 2a of the TFT substrate 1 and the counter substrate 2 through the pressing head 4 made of glass. Information is transmitted to the pressure head control means 9 so that the misalignment when the opposing substrate 2 and the TFT substrate 1 are bonded to each other is, for example, within 1 μm.
[0044]
Thereafter, under the operation control of the pressure head control means 9, the pressure head 4 presses the opposing substrate 2 with a load of, for example, 6 kgf to 8 kgf while aligning the alignment marks 1a and 2a so that the alignment marks 1a and 2a do not shift. The sealing material 3 is pressed.
[0045]
Next, the sealing material 3 is irradiated with ultraviolet rays. That is, the ultraviolet irradiation unit 7 is moved above the pressure head 4, and the ultraviolet light emitted from the light emitting source 8 is reflected by the movable mirror 7 a disposed inside the ultraviolet irradiation unit 7, and passes through the pressure head 4. The sealing material 3 is irradiated with ultraviolet rays. As a result, the sealing material 3 made of the resin combined with UV heat is temporarily cured.
[0046]
Thereafter, the vacuum suction of the pressure head 4 to the opposing substrate 2 is stopped, and the pressure head 4 is separated from the outer surface 2 b of the opposing substrate 2 by operation control of the pressure head control means 9. Then, after baking is performed, the sealing material 3 is fully cured, and through an unillustrated notch provided in a part of the sealing material, an internal space (cell gap) formed between the two substrates is filled with an electro-optical material. One liquid crystal display device 50 is manufactured by enclosing a certain liquid crystal 10 and finally cutting the TFT substrate 1 facing the opposite substrate 2.
[0047]
Here, as described above, when the substrate contact surface 4a of the pressing head 4 is finished with a high-precision flat (mirror surface) finish, the opposing substrate 2 is pressed using the pressing head 4 and temporarily cured. After that, even if the vacuum suction is stopped, a vacuum state remains between the substrate contact surface 4a of the pressurizing head 4 and the outer surface 2b of the counter substrate, and both are bonded.
[0048]
Therefore, in one embodiment of the present invention, as shown in FIGS. 2 and 3, an uneven portion 30 including a concave portion 21 and a convex portion 22 is formed on the substrate contact surface 4 a of the pressure head 4.
[0049]
A vacuum suction hole 20 and an island portion 24 are formed on the substrate contact surface 4 a of the pressure head 4. Since the island portion 24 has a step with respect to a convex portion 22 to be described later, when the pressure head 4 is separated from the opposing substrate 2, it is prevented from binding with the opposing substrate contact surface 2 b.
[0050]
The concave / convex portion 30 is first lowered to a position avoiding the vacuum suction hole 20 and the island portion 24 on the peripheral edge of the substrate contact surface 4a of the pressure head 4 by, for example, a carbon dioxide laser (not shown). As shown in FIG. 4, while being melted at a temperature, concave portions 21 having a depth of 1 to 3 μ and a concave width of 3 to 5 μ are formed at an interval of 1 to 2 mm from the inside to the outside of the peripheral portion. A plurality of lines are formed linearly so that they do not cross each other. In addition, when the concave portion 21 is linearly formed by the carbon dioxide laser in this manner, at the same time, both sides of the concave portion 21 always have a constant height (4) 0.1 to 0.1 due to thermal deformation of the glass by the carbon dioxide laser. A projecting ridge of 0.5 μ is formed, which becomes the projecting portion 22, and thus a plurality of uneven portions 30 are formed. Since the height of the convex portion 22 is very small (4) 0.1 to 0.5 μ, even if a plurality of the convex portions 22 are formed, an error with respect to each height can be ignored. 4 can maintain the flatness of the substrate contact surface 4a.
[0051]
The plurality of uneven portions 30 are formed linearly so that they do not cross each other from the inside to the outside of the peripheral edge portion, so that the uneven portions 30 are formed at the four corners of the substrate contact surface 4a. An unobserved camera view area 23 (see FIG. 3) is formed. The camera field-of-view area 23 is formed on the same plane as the island part 24, and the CCD camera 6 (see FIG. 1) disposed above the pressure head 4 aligns the TFT substrate 1 and the counter substrate 2 with each other. This is a field of view when detecting the marks 1a and 2a. Further, since the visual field region 23 is formed on the same plane as the island portion 24, the convex portion 22 has a height difference of 0.1 to 0.5 μm. Can be prevented.
[0052]
As described above, in the manufacturing apparatus for a liquid crystal display device and the pressing head used in the embodiment according to the present invention, the uneven portion 30 is formed on the substrate contact surface 4 a of the pressing head 4 for pressing the opposing substrate 2. Therefore, when the pressure head 4 is separated from the opposing substrate 2, the convex / concave portions 30 or the convex portions 22 forming the concave / convex portions 30 and the island portions 24 formed on the substrate contact surface 4 a of the pressure head 4. Between the pressure head 4 and the opposing substrate 2 due to a step between the pressure head 4 and the opposing substrate 2, or due to a step between the convex portion 22 forming the uneven portion 30 and the camera view area 23 formed on the substrate contact surface 4 a of the pressure head 4. It is possible to prevent the ringing occurring between them.
[0053]
In the present embodiment, the concavo-convex portion 30 is formed on the peripheral portion of the substrate contact surface 4a of the pressure head 4 at a position avoiding the vacuum suction holes 20 and the island portions 24 from the inside to the outside of the peripheral portion by the carbon dioxide laser. Are formed in a straight line so that they do not cross each other. However, the present invention is not limited to this. The CCD camera 6 (see FIG. 1) is located at a position where the vacuum suction hole 20 is to be avoided. If the position of the camera visual field 23 for detecting the alignment marks 1a and 2a of the counter substrate 2 can be ensured and the position of the ultraviolet light irradiation from the ultraviolet irradiation unit 7 is not adversely affected, It goes without saying that it may be formed linearly at any position on the contact surface 4a.
[0054]
Further, the uneven portion 30 is formed by a carbon dioxide laser. However, as long as the unevenness having a constant height and depth can be formed without damaging the substrate contact surface of the pressing head 4, Such a laser may be used.
[0055]
Further, the concave and convex portion 30 is formed by a carbon dioxide laser. However, as long as the concave and convex portions having a constant height and depth can be formed without damaging the substrate contact surface of the pressing head 4, a known method is used. May be formed by dry etching.
[0056]
Further, although it has been described that the sealing material 3 is made of a resin combined with UV heat, it is not limited to this, and may be made of an ultraviolet curable resin.
[0057]
Further, although the camera for detecting the alignment marks 1a and 2a of the TFT substrate 1 and the counter substrate 2 through the pressure head 4 from above the pressure head 4 is described as the CCD camera 6, the camera is not limited to this. It goes without saying that any camera can be used.
[0058]
FIG. 5 shows a modification of the present embodiment, in which only the protrusion 220 is formed on the substrate contact surface 40a of the pressure head at the same position as in the above-described embodiment of the present invention. It was done. It is needless to say that the same effect as that of the embodiment of the present invention can be obtained by forming only the protrusion 220 in this way.
[0059]
Further, when the liquid crystal display device 50 is manufactured, the opposing substrate 2 is pressurized and cured by the pressurizing head 4, but is not limited thereto, and the TFT substrate 1 may be pressurized.
[0060]
Further, the above description is an example of a TFT substrate, but the present invention may be applied to a liquid crystal display device including a TFD substrate.
[0061]
The above description is an example of a liquid crystal display device. However, the present invention can be applied to an organic EL (electroluminescence) display device, an electrophoretic display device, and the like having a matrix configuration that is an electro-optical device. it can.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view schematically showing a configuration of a manufacturing apparatus for a liquid crystal display device according to an embodiment of the present invention;
FIG. 2 is a bottom view of a pressure head in the manufacturing apparatus for a liquid crystal display device of FIG. 1;
FIG. 3 is an enlarged bottom view of an essential part showing only a substrate contact surface of the pressure head of FIG. 2;
FIG. 4 is an enlarged longitudinal sectional view of an essential part showing an uneven portion formed on a substrate contact surface of the pressure head, taken along a line IV-IV ′ in FIG. 3;
FIG. 5 is an enlarged vertical sectional view of a main part showing a modification of the pressure head according to the embodiment of the present invention.
[Explanation of symbols]
1 ... Substrate (TFT substrate)
1a: Alignment mark (TFT substrate)
2 ... Substrate (counter substrate)
2a: Alignment mark (counter substrate)
2b: Opposite substrate outer surface 3: Sealing material 4: Pressurizing head 4a, 40a: Substrate contact surface 6: CCD camera 7: Ultraviolet irradiation unit 8: Light emitting source 9: Pressurizing head control means 20: Vacuum suction hole 21: Recess 22, 220 ... convex part 30 ... concave and convex part 50 ... liquid crystal display device (liquid crystal display device)
100: Manufacturing equipment for liquid crystal display

Claims (12)

An electro-optical device in which a pressure head abuts against the outer surface of at least one of the substrates of an electro-optical device in which the respective inner surfaces of both substrates are opposed to each other via a sealing material, and presses the two substrates together with an internal space by applying pressure. Manufacturing equipment
A manufacturing apparatus for an electro-optical device, wherein a plurality of uneven portions or convex portions are formed on a substrate contact surface of the pressure head. In the apparatus for manufacturing an electro-optical device, both inner surfaces of both substrates are arranged to face each other via a sealing material, and the two substrates are pressure-bonded to have an internal space.
A pressure head, which is formed of a transparent member and has a plurality of concave and convex portions or convex portions formed by laser or dry etching on a substrate contact surface that presses against the outer surface of at least one of the substrates when the two substrates are bonded to each other,
Pressure head control means for controlling the operation of the pressure head,
A camera for detecting the alignment marks of the two substrates through the pressure head from above the pressure head,
Through the pressure head from above the pressure head, an ultraviolet irradiation unit that irradiates the seal material with ultraviolet light for curing the seal material,
A light-emitting source that supplies ultraviolet light to the ultraviolet irradiation unit,
A manufacturing apparatus for an electro-optical device, comprising: The pressure head control means controls the operation of the pressure head by detecting the alignment marks of the two substrates by the camera so that no displacement occurs when the two substrates are bonded. The manufacturing apparatus for an electro-optical device according to claim 1. 2. The electro-optical device according to claim 1, wherein the ultraviolet irradiation unit irradiates the sealing material with ultraviolet light supplied from the light emitting source to temporarily cure the sealing material that bonds the two substrates. 3. manufacturing device. The concave and convex portions or convex portions formed on the pressure head are to avoid close contact with the contact surface when the pressure head is separated from the contact surface of the substrate after bonding the two substrates. The manufacturing apparatus for an electro-optical device according to claim 1, wherein: The camera is constituted by a CCD camera, and the alignment of the two substrates is performed from above the pressure head through a place where a plurality of uneven portions or protrusions are not formed on the substrate contact surface of the pressure head. The apparatus for manufacturing an electro-optical device according to claim 1, wherein the mark is detected. An electro-optical device manufacturing apparatus in which each inner surface of both substrates is in contact with the outer surface of at least one of the substrates of the electro-optical device in which the inner surfaces of the two substrates are opposed to each other via a sealing material, and the two substrates are pressurized with an internal space by being pressed. In the pressure head used,
A pressure head, wherein a plurality of uneven portions or protrusions are formed on a substrate contact surface of the pressure head. 7. The pressure head according to claim 6, wherein a substrate contact surface of the pressure head is provided with a vacuum suction hole for holding the at least one substrate. 7. The pressure head according to claim 6, wherein the plurality of irregularities or protrusions formed on the substrate contact surface of the pressure head are formed by carbon dioxide laser or dry etching. The plurality of uneven portions or protrusions formed on the substrate contact surface of the pressure head avoids close contact between the substrate contact surface of the pressure head and the outer surface of the substrate to be pressed. The pressure head according to claim 6. 7. A method according to claim 6, wherein the plurality of projections formed on the substrate contact surface of the pressure head are formed so as to contact at the same height with respect to the outer surface of the substrate with which the pressure head contacts. 2. The pressure head according to 1. In a method of manufacturing a pressure head used in a manufacturing apparatus for an electro-optical device in which the respective inner surfaces of both substrates are arranged to face each other via a sealing material, and the two substrates are pressure-bonded to have an internal space,
Manufacturing a pressure head comprising a step of forming a plurality of uneven portions or protrusions by carbon dioxide laser or dry etching on a substrate contact surface of the pressure head for pressing an outer surface of at least one substrate. Method.

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