JP2004148431A

JP2004148431A - Method for manufacturing workpiece machined with plurality of regularly arranged v-grooves and grinding device to be used for the same

Info

Publication number: JP2004148431A
Application number: JP2002315619A
Authority: JP
Inventors: Takashi Misawa; 喬三澤; Tomio Kubo; 富美夫久保
Original assignee: Okamoto Machine Tool Works Ltd
Current assignee: Okamoto Machine Tool Works Ltd
Priority date: 2002-10-30
Filing date: 2002-10-30
Publication date: 2004-05-27

Abstract

<P>PROBLEM TO BE SOLVED: To manufacture a workpiece with a plurality of regularly arranged regular quadrangular pyramidal projections by reducing wear of a grinding wheel. <P>SOLUTION: The workpiece with the plurality of regularly arranged regular quadrangular pyramidal projections is manufactured by forming m V-grooves on the surface of the workpiece by performing stroke grinding for a planar workpiece, while cutting the planar workpiece by lowering the grinding wheel 3 elevatable in a vertical direction to a horizontal surface on the surface of the planar workpiece fixed to a rotary table 6 in an inclined state by 45° to the horizontal surface, and forming n V-grooves again by performing stroke grinding for the planar workpiece, while cutting the planar workpiece by lowering the grinding wheel 3 on the surface of the planar workpiece formed with the V-grooves fixed to the rotary table 6 in an inclined state after rotating the rotary table 6 by 90°. As a result, wear of the grinding wheel is reduced and the service life is lengthened. <P>COPYRIGHT: (C)2004,JPO

Description

【０００１】
【発明の属する技術分野】
本発明は、液晶表示器（特開２０００−９８３８３号、特開平１０−２０１２４号）の導光板鋳型材のような複数の山稜錐突起を規則的に配列したワ−ク、および液晶表示器の拡散反射板用鋳型材のような複数の正四角錐突起を規則的に配列したワ−クを製造する方法、およびそれらの加工に用いる研削装置に関する。本発明の複数の正四角錐突起を規則的に配列したワ−クの製造方法は、壁紙やエンボスフィルム（特開平８−２５４９５６号、特開２００１−３０２９９９号）用のエンボスパタ−ン金型部材、液晶表示器の拡散反射用樹脂フィルム形成用金型部材（特開平８−２２７０７１号、同９−３０４７６７号、同９−３４４７６７号、特開２００２−１４２０８号、同２００２−２２９７１４号）、複数の半導体チップ積層構造体（特開２００１−２１７３７３号）、移動体の光通信に用いる導光体（特開２００２−４８９２０号）等の加工に利用できる。
【従来の技術】
【０００２】
液晶表示器の複数の山稜錐突起を規則的に配列した導光板鋳型材を製造する方法として、ニッケルメッキしたステンレス平板上に２種のダイヤモンドカッタ−を用い、先にダイヤモンドカッタ−１で段付け加工し、ついでダイヤモンドカッタ−２でＶ溝加工して複数の山稜錐突起を規則的に配列した導光板鋳型材を製造することは知られている（特開２００１−１５００６４号）。
【０００３】
また、図６に示す平面基板上に複数の四角錐突起を規則的に配列したワ−クを製造する方法としては、次の方法が知られている。
（ａ）平板状ワ−クにＶ溝ダイヤモンドバイトを用いて左右、前後方向に等ピッチで切削加工して複数の四角錐突起を規則的に配列したワ−クを製造する方法
（ｂ）ワ−クの四側面をアンギュラ−プランジ研削する方法（特開２００１−２１７３７３号）
（ｃ）ダイヤモンドバイトを用い、回転軸廻りに回転する円筒状ロ−ラ表面にバイトの先端を配置し、前記バイトをバイト軸線に沿って往復移動させてロ−ラ表面に凹部の列を形成し、ついで、前記ロ−ラを回転させながらバイトをロ−ラの回転軸線に平行な方向に移動させることによりロ−ラの周方向に対して所定の角度で傾斜する凹部の列を形成してエンボス型ロ−ラを製造し、シ−ト状物の表面に塗布された光硬化性アクリル系樹脂コ−ト剤膜を前記エンボス型ロ−ラで成形し、ついで光照射して硬化させ複数の正四角錐突起を規則的に配列したシ−ト状物を製造する方法（特開２００２−１４２０８号）
（ｄ）鋳型部材をピッチ研削する方法（特開２００２−２２９７１４号）
【０００４】
上記特開２００２−２２９７１４号公報には、具体的な研削方法および研削装置を示すものではないが、ダイヤモンドバイトを用いた切削研削加工か、あるいは、公知の平面研削装置と上記（ａ）のバイト加工方法の技術を組み合わせ推測すると、砥石軸に軸承された外周端面が山型の回転砥石３を備える図４と図５に開示される平面研削装置１を用い、次の工程を経て加工するものと推測される。
１）左右に移動可能なテ−ブル４上に固定された電磁チャック６の上に平板状ワ−ク２を載せ、前記回転砥石３を下降させてワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、回転砥石によるワ−クへの切込深さが所望の深さとなった時点で回転砥石を上昇することによりワ−ク表面より後退させ、
２）ついで回転砥石と前記Ｖ溝が加工された平板状ワ−クの距離がピッチ幅となる量だけ砥石軸を後退させ、
３）再び、平板状ワ−ク表面に回転している砥石車を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石によるワ−クへの切込深さが所望の深さとなった時点で回転砥石を上昇することによりワ−ク表面より後退（回転砥石を後方に移動）させ、
４）以下、前記２）と３）の工程を繰り返してｍ列の山稜をワ−クに形成した後、Ｖ溝が（ｍ＋１）本形成されたワ−クを９０度回転させて電磁チャック上に置き、さらに、回転砥石を前方向に移動させて回転砥石を加工開始点に位置させ、
５）磁気チャック上に固定されている前記Ｖ溝が形成された平板状ワ−ク表面に回転砥石３を下降させて平板状ワ−ク２に切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、回転砥石によるワ−クへの切込深さが所望の深さとなった時点で回転砥石を上昇することによりワ−ク表面より後退させ、
６）ついで回転砥石と回転砥石と前記Ｖ溝が加工された平板状ワ−クの距離がピッチ幅となる量だけ砥石軸を後退させ、
７）再び、平板状ワ−ク表面に回転砥石を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、回転砥石によるワ−クへの切込深さが所望の深さとなった時点で回転砥石を上昇することによりワ−ク表面より後退させ、
８）以下、前記６）と７）の工程を繰り返してｎ列の山稜をワ−クに形成することにより複数（縦ｍ列、横ｎ列）の正四角錐突起を規則的に配列したワ−クを製造する。
【０００５】
図４と図５に成形研削装置の一例を示す。これら図において、１は研削装置、２はワ−ク、３は砥石、４は水平方向（Ｘ軸方向）に往復移動可能な摺動テ−ブル、５は作業台部、６は電磁（マグネット）チャック、７は前後方向（Ｚ軸方向）に往復移動可能なサドル、８は操作盤、８ｂは砥石上下切り込み手動パルス発生器ボタン、９はコラム、１０は砥石軸頭、１１は砥石軸、１２は砥石３を垂直方向（Ｙ軸方向）に移動する昇降機構、１３はモ−タ−、１４は螺合体、１５はネジ軸、１６は軸受、１７は安全保護カバ−、１８は研削液供給ノズル、１９はベッド、２０はタンク、２１はフィルタ−、２２はポンプ、２４は制御ユニット部である。
【０００６】
図４と図５にはＸ軸、Ｙ軸およびＺ軸の位置測定器は示されていないが、ドイツのハイデンハイン（ＨｅｉｄｅｎｈａｉｎＧｍｂＨ）社製またはジ−メンス（ＳｉｅｍｅｎｓＡＧ）社製、あるいは日本のファナック株式会社製の位置測定器が左右移動テ−ブル４、サドル７およびコラム９に設けられており、制御ユニット部２４にパルス信号が送られ、図に示されていないが表示器にワ−クに対する砥石の位置が表示される。
【０００７】
【発明が解決しようとする課題】
前記（ａ）のバイト加工方法は、加工に長時間要する。（ｂ）のアンギュラ−プランジ研削方法は、四角錐のピッチがミクロンメ−トルオ−ダ−であると加工が困難である。（ｃ）のエンボス型ロ−ラ−によるフィルムへの転写方法は、ロ−ラのバイト加工方法を提案するが、直接ワ−クであるフィルムに機械加工を施すものではない。
推測される（ｄ）の研削方法は、回転砥石の磨耗が激しい。特に、四角錐のピッチが１〜４０μｍのミクロンメ−トルオ−ダ−であるとピッチ研削加工中、何度も回転砥石を取りかえる必要が生じる。
【０００８】
本発明は、ワ−ク研削中の砥石車の磨耗程度が小さく、かつ、市場より容易に入手できる砥石車を用いてミクロンメ−トル（μｍ）オ−ダ−からミリメ−トル（ｍｍ）オ−ダ−のピッチ幅で溝加工することにより平面基板上に断面が直角三角形形状の山稜複数を規則的に配列したワ−ク、および平面基板上に正四角錐突起物の複数を規則的に配列したワ−クを製造する方法、ならびにそれらの加工に用いる研削装置を提供するものである。
【０００９】
【課題を解決するための手段】
本発明の請求項１は、砥石軸に軸承され、かつ、水平面に対し垂直方向に昇降可能なプレ−ン砥石車と平板状ワ−クとの相対的な移動により平面基板上に底面に対する稜面角度がθ度と（９０−θ）度、頂稜角度が９０度、隣り合う頂稜のピッチ幅がＬ、高さがＨの断面直角三角形状の山稜複数を前後にｎ列規則的に配列したワ−クを製造する方法であって、
１）ロ−タリ−テ−ブル上に水平面に対しθ度に傾斜した状態で固定された平板状ワ−ク表面に回転している前記砥石車を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ・ｓｉｎ（９０−θ）となった時点で砥石車を上昇することによりワ−ク表面より後退させ、
２）ついで砥石車と水平面に対しθ度に傾斜した前記Ｖ溝が加工された平板状ワ−クの距離がピッチ幅Ｌ・ｃｏｓ θとなる量だけ横方向に移動させ、
３）再び、水平面に対しθ度に傾斜した状態で固定された平板状ワ−ク表面に回転している砥石車を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ・ｓｉｎ（９０−θ）となった時点で砥石車を上昇することによりワ−ク表面より後退させ、
４）以下、前記２）と３）の工程を繰り返してｎ列の山稜をワ−クに形成する、
ことを特徴とする複数の山稜が規則的に配列したワ−クを製造する方法を提供するものである。
【００１０】
ワ−クをθ度傾斜した状態でプレ−ン砥石を用いてＶ溝加工を施すことにより複数の山稜が規則的に配列したワ−クを製造するので、砥石の磨耗が少ない。また、山稜の傾斜が異なったものであっても１個の砥石で加工できる。
【００１１】
本発明の請求項２は、砥石軸に軸承され、かつ、水平面に対し垂直方向に昇降可能なプレ−ン砥石車と平板状ワ−クとの相対的な移動により平面基板上に底面に対する稜面の角度θが４５度、稜線長さがＬ、底辺長さがＬ、高さＨがＬ／２、隣り合う山頂のピッチ幅がＬの正四角錐突起物の複数を左右にｍ列、前後にｎ列規則的に配列したワ−クを製造する方法であって、
１）ロ−タリ−テ−ブル上に水平面に対し４５度に傾斜した状態で固定された平板状ワ−ク表面に回転している砥石車を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ／２^１／２となった時点で砥石車を上昇することによりワ−ク表面より後退させ、
２）ついで砥石車と水平面に対し４５度に傾斜した前記Ｖ溝が加工された平板状ワ−クの距離がピッチ幅Ｌ／２^１／２となる量だけ横方向に移動させ、
３）再び、水平面に対し４５度に傾斜した状態で固定された平板状ワ−ク表面に回転している砥石車を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ／２^１／２となった時点で砥石車を上昇することによりワ−ク表面より後退させ、
４）以下、前記２）と３）の工程を繰り返してｍ列の山稜をワ−クに形成した後、ロ−タリ−テ−ブルを９０度回転させ、さらに、砥石車と水平面に対し４５度に傾斜した前記Ｖ溝が加工された平板状ワ−クの位置を相対的に移動させて砥石車を加工開始点に位置させ、
５）ロ−タリ−テ−ブル上に水平面に対し４５度に傾斜した状態で固定されている前記Ｖ溝が形成された平板状ワ−ク表面に回転している砥石車を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ／２^１／２となった時点で砥石車を上昇することによりワ−ク表面より後退させ、
６）ついで砥石車と水平面に対し４５度に傾斜した前記Ｖ溝が加工された平板状ワ−クの距離がピッチ幅Ｌ／２^１／２となる量だけ横方向に移動させ、
７）再び、水平面に対し４５度に傾斜した状態で固定された平板状ワ−ク表面に回転している砥石車を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ／２^１／２となった時点で砥石車を上昇することによりワ−ク表面より後退させ、
８）以下、前記６）と７）の工程を繰り返してｎ列の山稜をワ−クに形成することを特徴とする、複数の正四角錐突起を規則的に配列したワ−クを製造する方法を提供するものである。
【００１２】
正四角錐突起のピッチ幅よりも広い幅の平坦な研削面を有する砥石車を用い、水平面に対して４５度傾斜されたワ−ク表面に溝を形成していくので、砥石車の磨耗程度が小さく、かつ、ミクロンメ−トル（μｍ）オ−ダ−からミリメ−トル（ｍｍ）オ−ダ−のピッチ幅の溝加工が可能となる。
【００１３】
本発明の請求項３は、ベッド上に水平に設けられた左右移動テ−ブル、ベッドに対し垂直方向に昇降可能な砥石軸に軸承された砥石車、前記砥石軸を前後方向に移動可能な移動機構、前記左右移動テ−ブル上に固定されたチルト機能付ロ−タリ−テ−ブル、ならびに、左右位置測定器、前後位置測定器、垂直方向位置測定器およびこれら位置制御機構を備える研削装置を提供するものである。
【００１４】
複数の山稜または正四角錐突起を規則的に配列したワ−クを製造する装置であり、チルト機能付ロ−タリ−テ−ブルを用いるので、ワ−クを傾斜して保持できる。また、横列にＶ溝を形成したのち、ロ−タリ−テ−ブルを９０度回転させ、前に形成されたＶ溝に対して直交するＶ溝を加工して正四角錐突起を複数形成することが可能である。
【００１５】
【発明の実施の形態】
以下、図面を用いて本発明を詳細に説明する。
図１は、本発明のワ−クの加工方法の一工程を示す部分正面図、図２は本発明の研削装置の斜視図、および図３は本発明のワ−クの加工に用いる市販のチルト式ロ−タリ−テ−ブルの斜視図である。
【００１６】
図２に示すＮＣ成形研削装置１において、２は平板状ワ−ク、３はプレ−ン型の砥石車で、研削作用面である外周縁断面は長方形状である。該砥石車の回転軸方向の外周縁幅は、四角錘突起のピッチ幅より広ければよく、４０μｍ〜１８０ｍｍ幅が好ましい。砥石車の両側面は垂直（９０度）な面を成している。
【００１７】
４は左右方向（Ｘ軸方向）に往復移動可能なテ−ブル、５は作業台、６０はチルト（Ｔｉｌｔ）式ロ−タリ−テ−ブル、６は磁気チャック、７はサ−ボモ−タ駆動により前後方向（Ｚ軸方向）に移動可能なサドル、８は操作盤、８ｂは砥石上下切り込み手動パルス発生器ボタン、９はコラム、１０は砥石軸頭、１１は砥石軸、１２は砥石軸頭をサ−ボモ−タ駆動により垂直方向（Ｙ軸方向）に移動する昇降機構、１３はモ−タ−、１４は螺合体、１５はボ−ルスクリュ−ネジ、１６は軸受、１７は安全保護カバ−、１８は研削液供給ノズル、１９はベッド、２０はタンク、２１はフィルタ−、２２はポンプ、２４は制御ユニット部である。
【００１８】
左右往復移動可能なテ−ブル４は、ベッド１９上に設けられた一対の案内面を滑べるサドル７に設けられたＶ字型軌道部により位置決めされ、左右移動テ−ブル４はその係合部（スライダ）により案内面（ガイドレ−ル）に摺動自在に支えられる。
【００１９】
チルト（Ｔｉｌｔ）式ロ−タリ−テ−ブルは、ドイツのＥｌｂ社、ファナック株式会社、津田駒株式会社、株式会社ミツトヨ、株式会社ダイアディックシステムズ等より入手できる。ロ−タリ−テ−ブルを傾斜させる方式は、回転軸にロ−タリ−テ−ブルを回転自在に支持固定した回転軸方式、クレ−ドル（揺り篭）方式、梃子方式いずれであってもよい。
図３に示すチルト（Ｔｉｌｔ）式ロ−タリ−テ−ブル６０において、６は磁気チャックでロ−タリ−テ−ブル６１上に固定される。６２はケ−シングで、中にはロ−タリ−テ−ブル６１を回転させるサ−ボモ−タが収納されている。６３はサ−ボモ−タで前記ロ−タリ−テ−ブル６１を支持する送り台を傾斜させる軸を回転させる。
【００２０】
ワ−ク２は、左右移動テ−ブル４上に固定して備えられたチルト式ロ−タリ−テ−ブルの磁気チャック６上に固定され、チルト（傾斜）機構によりロ−タリ−テ−ブルの磁気チャック６を傾斜できる。平板状ワ−ク２のチルト式ロ−タリ−テ−ブル６０への固定は、ワ−クが金属素材のときは磁気チャック６を用いて行い、ワ−クがガラス、樹脂、セラミック、シリコン基板等の非磁性素材であるときはロ−タリ−テ−ブル６１に固定具もしくは接着剤を用いて固定する。
【００２１】
平面基板上に底面に対する稜面角度がθ度と（９０−θ）度、頂稜角度が９０度、隣り合う頂稜のピッチ幅がＬ、高さがＨの断面直角三角形状の山稜複数を前後にｎ列規則的に配列したワ−クを製造する工程は、次の通りである。
【００２２】
１）ロ−タリ−テ−ブル６１の磁気チャック６上に平板状ワ−ク２を固定し、ついで、サ−ボモ−タ６３を駆動してロ−タリ−テ−ブル６１を水平面に対しθ度傾斜させる。この傾斜した状態で固定された平板状ワ−ク表面に回転しているプレ−ン型の砥石車３を下降させて平板状ワ−ク２に切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ・ｓｉｎ（９０−θ）となった時点で砥石車を上昇することによりワ−ク表面より後退させる。
【００２３】
２）ついで砥石車と水平面に対し４５度に傾斜した前記Ｖ溝が加工された平板状ワ−クの距離がピッチ幅Ｌ・ｃｏｓ θとなる量だけ横方向に移動させ、
３）再び、水平面に対し４５度に傾斜した状態で固定された平板状ワ−ク表面に回転している砥石車を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ・ｓｉｎ（９０−θ）となった時点で砥石車を上昇することによりワ−ク表面より後退させる。
４）以下、前記２）と３）の工程を繰り返して（ｎ＋１）本のＶ溝をワ−クに加工することによりｎ列の山稜がワ−クに形成される。
【００２４】
具体的には、前記ｎ列の山稜の断面積がθ＝４５度、４５度および９０度、隣り合う頂稜のピッチ幅がＬの直角二等辺三角形であるときは、ロ−タリ−テ−ブルの傾斜角を４５度と設定し、次の工程を経てワ−クを加工する。
【００２５】
１）チルト式ロ−タリ−テ−ブル６０の磁気チャック６上に平板状ワ−ク２を固定し、ついで、サ−ボモ−タ６３を駆動して磁気チャック６を水平面に対し４５度に傾斜した状態とするとワ−クの水平面に対する角度は４５度となる。
サドル７およびテ−ブル４を砥石軸に対し移動し、砥石車を加工または上昇させて研削開始点に位置させる。
左右移動テ−ブル４を左右に往復反転移動させるとともに、前記４５度に傾斜して固定された平板状ワ−ク２表面に回転している砥石車３を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行って谷の角度が９０度のＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ／２^１／２となった時点で砥石軸頭を上昇（砥石車を上昇）することにより砥石車をワ−ク表面より後退させる。
【００２６】
２）ついで砥石車３と水平面に対し４５度に傾斜した前記Ｖ溝が加工された平板状ワ−ク２の距離がピッチ幅Ｌ／２^１／２となる量だけサドル７を後方に退させることによりワ−クから砥石車の相対的位置をＬ／２^１／２となる量横方向に移動させる。
【００２７】
３）再び、水平面に対し４５度に傾斜した状態で固定された平板状ワ−ク２表面に回転している砥石車３を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ／２^１／２となった時点で砥石車を上昇することによりワ−ク表面より後退させる（図１は３本のＶ溝をワ−ク２に砥石車３で研削した状態を示す）。
【００２８】
４）以下、前記２）と３）の工程を繰り返してｎ列の山稜（Ｖ溝はｎ＋１本）をワ−クに形成する。
【００２９】
前記ｎ列の山稜の断面積がθ＝６０度、（９０−θ）＝３０度および９０度の直角三角形で、隣り合う頂稜のピッチ幅がＬであるときは、ロ−タリ−テ−ブルの傾斜角θを６０度と設定し、次の工程を経てワ−クを加工する。
【００３０】
１）チルト式ロ−タリ−テ−ブル６０の磁気チャック６上に平板状ワ−ク２を固定し、ついで、サ−ボモ−タ６３を駆動して磁気チャック６を水平面に対し６０度に傾斜した状態とするとワ−クの水平面に対する角度は６０度となる。
サドル７およびテ−ブル４を砥石軸に対し移動し、砥石車を加工または上昇させて研削開始点に位置させる。
左右移動テ−ブル４を左右に往復反転移動させるとともに、前記６０度に傾斜して固定された平板状ワ−ク２表面に回転している砥石車３を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行って谷の角度が９０度のＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さが３^１／２Ｌ／２となった時点で砥石軸頭を上昇（砥石車を上昇）することにより砥石車をワ−ク表面より後退させる。
【００３１】
２）ついで砥石車３と水平面に対し６０度に傾斜した前記Ｖ溝が加工された平板状ワ−ク２の距離がピッチ幅Ｌ／２となる量だけサドル７を後方に退させることによりワ−クから砥石車の相対的位置をＬ／２となる量横方向に移動させる。
【００３２】
３）再び、水平面に対し６０度に傾斜した状態で固定された平板状ワ−ク２表面に回転している砥石車３を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さが３^１／２Ｌ／２となった時点で砥石車を上昇することによりワ−ク表面より後退させる（図１は３本のＶ溝をワ−ク２に砥石車３で研削した状態を示す）。
【００３３】
４）以下、前記２）と３）の工程を繰り返してｎ列の山稜（Ｖ溝はｎ＋１本）をワ−クに形成する。
【００３４】
なお、ロ−タリ−テ−ブルの水平面に対する傾斜角度を（９０−θ）＝３０度と設定したときは、砥石車によるワ−クへの切込深さはＬ／２、砥石車３の横方向移動のピッチ幅は３^１／２Ｌ／２と変更される。
【００３５】
次に、平面基板上に一辺の長さがＬの正方形を底面に有する対する正四角錐突起物を加工する方法について述べる。
一辺の長さがＬの正方形を底面に有する対する正四角錐突起物は、稜面角度θが４５度、稜線長さがＬ、底辺長さがＬ、頂点から底面の中心点に到る高さがＬ／２、隣り合う頂点のピッチ幅はＬ、頂点から側面の正三角形底辺の中点までの距離はＬ／２^１／２と計算される。
この正四角錐突起物の複数を平面基板上に左右にｍ列、前後にｎ列規則的に配列したワ−クを製造するには、次の工程を経て行われる。
【００３６】
１）チルト式ロ−タリ−テ−ブル６０の磁気チャック６上に平板状ワ−ク２を固定し、ついで、サ−ボモ−タ３６を駆動して磁気チャック６を水平面に対し４５度に傾斜した状態とするとワ−クの水平面に対する角度は４５度となる。
サドル７およびテ−ブル４を砥石軸に対し移動し、砥石車を加工または上昇させて研削開始点に位置させる。
左右移動テ−ブル４を左右に往復反転移動させるとともに、前記４５度に傾斜して固定された平板状ワ−ク２表面に回転している砥石車３を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行って谷の角度が９０度のＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ／２^１／２となった時点で砥石軸頭を上昇（砥石車を上昇）することにより砥石車をワ−ク表面より後退させる。
【００３７】
２）ついで砥石車３と水平面に対し４５度に傾斜した前記Ｖ溝が加工された平板状ワ−ク２の距離がピッチ幅Ｌ／２^１／２となる量だけサドル７を後方に退させることによりワ−クから砥石車の相対的位置をＬ／２^１／２となる量横方向に移動させる。
【００３８】
３）再び、水平面に対し４５度に傾斜した状態で固定された平板状ワ−ク２表面に回転している砥石車３を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ／２^１／２となった時点で砥石車を上昇することによりワ−ク表面より後退させる。
【００３９】
４）以下、前記２）と３）の工程を繰り返してｍ列の山稜（Ｖ溝はｍ＋１本）をワ−クに形成した後、ロ−タリ−テ−ブルを９０度回転させ、さらに、砥石車と水平面に対し４５度に傾斜した前記Ｖ溝が加工された平板状ワ−クの位置を相対的に移動させて砥石車を加工開始点に位置させる。
【００４０】
５）チルト式ロ−タリ−テ−ブル６０の磁気チャック６上に水平面に対し４５度に傾斜した状態で固定されている前記Ｖ溝が（ｍ＋１）本形成された平板状ワ−ク表面に回転している砥石車３を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ／２^１／２となった時点で砥石車を上昇することによりワ−ク表面より後退させる。
【００４１】
６）ついで砥石車と水平面に対し４５度に傾斜した前記Ｖ溝が加工された平板状ワ−クの距離がピッチ幅Ｌ／２^１／２となる量だけ横方向に移動させ、
【００４２】
７）再び、水平面に対し４５度に傾斜した状態で固定された平板状ワ−ク表面に回転している砥石車を下降させて平板状ワ−クに切込をかけつつストロ−ク研削を行ってＶ溝を前記ワ−ク表面に形成し、砥石車によるワ−クへの切込深さがＬ／２^１／２となった時点で砥石車を上昇することによりワ−ク表面より後退させる。
【００４３】
８）以下、前記６）と７）の工程を繰り返してｎ列の山稜（Ｖ溝はｎ＋１本）をワ−クに形成することにより、縦ｍ列、横ｎ列の正四角錘突起物がワ−クに形造られる。縦（ｍ＋１）本のＶ溝と横（ｎ＋１）本のＶ溝が交差することにより縦ｍ列、横ｎ列の複数の正四角錐突起が平面基板上に規則的に配列したワ−クが製造される。
【００４４】
ワ−クの素材としては、タングステン・カ−ボン合金、タングステン・モリブテン合金、ステンレス、サ−メット、ハステロイ、ニッケルクロム鋼、銅、アルミニウム、洋白、ＡｌＴｉＣ、銅メッキステンレス板、ニッケルメッキアクリル樹脂板、ガラス板、セラミック、樹脂、シリコン基板、半導体基板等が挙げられる。砥石車はワ−ク素材に応じてダイヤモンドブレ−ド、ダイヤモンド砥石、ＣＢＮ砥石、グリ−ンカ−ボン砥石（ＧＣ）、炭化珪素砥石、アルミナ砥石等適宣選択される。
【００４５】
ワ−クの正四角錐突起のピッチ幅Ｌは加工ワ−クの用途により異なる。壁紙用プレス型鋳物部材であれば０．３〜２ｍｍ、積層半導体基板なら２〜１０ｍｍ、液晶表示器（ＬＣＤ）の光拡散反射板なら３０〜１００μｍ、移動体の光通信システムに用いる導光体なら６〜１０μｍが一般である。
【００４６】
ストロ−ク研削する際の左右テ−ブル４のストロ−ク幅は用途により異なるが２〜１５０ｍｍ、ストロ−ク回数は５０〜３００回／分、砥石車３のワ−ク２面切り込む速度は０．１〜１ｍｍ／分、砥石車３の回転数は３，０００〜８，０００ｍｉｎ^−１である。
【００４７】
砥石車３の外周縁の磨耗がひどくなったら砥石車の加工面（外周縁）をドレッシングする。このドレッシングの時期は、溝の深さ、溝幅、砥石種類に依存する。ドレッサには、ダイヤモンド砥石、ＣＢＮ砥石等を用いる。
【００４８】
【実施例】
実施例１
研削に用いるＣＮＣ成形研削装置として、株式会社岡本工作機械製作所のハイスピ−ドストロ−ク研削盤ＰＦＧ５００ＤＸＮＣＳ（商品名）を用い、この左右移動テ−ブル４上にチルト式ロ−タリ−テ−ブル６０を設置した。砥石車３として外径が１８０ｍｍ、外周縁幅が６ｍｍの両側面が垂直面（プレ−ンタイプ）のダイヤモンド砥石車を用い、このブレ−ドを前記成形研削装置の砥石軸に装着した。
【００４９】
また、ワ−クとして、縦４０ｍｍ、横４０ｍｍ、厚み２．０ｍｍの正方形状タングステンカ−ボンアロイ（ＷＣ）を用い、これを左右移動テ−ブル上に固定されたチルト式ロ−タリ−テ−ブル６０の磁気チャック６上に固定した。
【００５０】
このワ−クの表面に一辺の長さ（Ｌ）が１．０ｍｍの正四角錐突起物（平面基板底面に対する稜面角度θが４５度、稜線長さが１．０ｍｍ、底辺長さが１．０ｍｍ、頂点から底面中心点間の高さＨが０．５０ｍｍ、隣接する頂点間のピッチ距離が１．０ｍｍ）の複数を左右に３８列、前後に３８列規則的に配列したワ−クを製造するのに、ストロ−ク幅４２ｍｍ、ストロ−ク回数は５０回／分、砥石車のワ−ク面切り込む速度は０．１ｍｍ／分、切込深さは１／２^１／２ｍｍ、砥石車のワ−クに対する横移動（ピッチ）幅１／２^１／２ｍｍ、横砥石車の回転数５，０００ｍｉｎ^−１、スパ−クアウト回数５秒／溝、ドレスは２５溝加工毎の条件で、既述した（１）から（８）の工程を経て加工を行った。
【００５１】
１枚のワ−ク加工中、砥石車の破損はなく、また、Ｖ溝部の欠けもなかった。
【００５２】
実施例２
研削に用いるＣＮＣ成形研削装置として、株式会社岡本工作機械製作所のハイスピ−ドストロ−ク研削盤ＰＦＧ５００ＤＸＮＣＳ（商品名）を用い、この左右移動テ−ブル４上にチルト式ロ−タリ−テ−ブル６０を設置した。砥石車３として外径が１２０ｍｍ、外周縁幅が１ｍｍの両側面が垂直面（プレ−ンタイプ）の銅ニッケルメッキダイヤモンド砥石車を用い、このブレ−ドを前記成形研削装置の砥石軸に装着した。
【００５３】
また、ワ−クとして、縦３インチ（約７６．２ｍｍ）、横３インチ、厚み２．０ｍｍの正方形状ニッケル・銅メッキステンレス板を用い、これを左右移動テ−ブル上に固定されたチルト式ロ−タリ−テ−ブル６０の磁気チャック６上に固定した。
【００５４】
このワ−クの表面に、隣接する山稜間の距離（ピッチ幅）は７０．７０μｍ、断面形状が一辺の長さ（Ｌ）が５０μｍ、５０μｍ、７０．７０μｍの直角二等辺三角形の山稜を左右に６５３３列（前後の余白部は各１５ｍｍ幅）規則的に配列したワ−クを製造するのに、ストロ−ク幅７０．７０μｍ、ストロ−ク回数は１５０回／分、砥石車のワ−ク面切り込む速度は１０．０μｍ／分、切込深さは５０μｍｍ、砥石車のワ−クに対する横移動（ピッチ）幅５０μｍｍ、横砥石車の回転数５，０００ｍｉｎ^−１、スパ−クアウト回数５秒／溝、ロ−タリ−テ−ブル傾斜角度４５度、ドレスは２５溝加工毎の条件で、既述した（１）から（４）の工程を経て加工を行った。
【００５５】
１枚のワ−ク加工中、砥石車の破損はなく、また、Ｖ溝部の欠けもなかった。
【００５６】
【発明の効果】
本発明の複数の正四角錐突起を規則的に配列したワ−クを製造する方法は、ワ−クに形成される突起物のピッチ幅よりも広い研削面の幅を有する砥石車を用いてワ−クを傾斜した状態で加工するので、砥石車の寿命が長い。
【図面の簡単な説明】
【図１】本発明のワ−クの加工方法のうち、一工程を示す部分正面図である。
【図２】本発明のＮＣ研削装置の斜視図である。
【図３】市販のチルト式ロ−タリ−テ−ブルの斜視図である。（公知）
【図４】研削装置の斜視図である。（公知）
【図５】研削装置の側面図である。（公知）
【図６】液晶表示器の四角錐突起を有する反射板の部分斜視図である。（公知）
【符号の説明】
１ＮＣ研削装置
２ワ−ク
３砥石車
４左右移動テ−ブル
６磁気チャック
６０チルト式ロ−タリ−テ−ブル
７コラム[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a work in which a plurality of crest projections are regularly arranged such as a light guide plate mold material of a liquid crystal display (Japanese Patent Application Laid-Open No. 2000-98383 and Japanese Patent Application Laid-Open No. 10-201224). The present invention relates to a method of manufacturing a work in which a plurality of regular quadrangular pyramid projections such as a mold material for a diffuse reflection plate are regularly arranged, and a grinding apparatus used for processing the same. The method for producing a work in which a plurality of regular quadrangular pyramid projections are regularly arranged according to the present invention includes an embossed pattern mold member for a wallpaper or an embossed film (Japanese Patent Application Laid-Open Nos. 8-254996 and 2001-302999); Mold members for forming a diffuse reflection resin film of a liquid crystal display (JP-A-8-2270071, JP-A-9-304767, JP-A-9-344767, JP-A-2002-14208, and JP-A-2002-229714). It can be used for processing a semiconductor chip laminated structure (Japanese Patent Application Laid-Open No. 2001-217373) and a light guide (Japanese Patent Application Laid-Open No. 2002-48920) used for optical communication of a moving object.
[Prior art]
[0002]
As a method of manufacturing a light guide plate mold material in which a plurality of ridge pyramid projections of a liquid crystal display are regularly arranged, two types of diamond cutters are used on a nickel-plated stainless steel plate, and the diamond cutters are first stepped up. It is known to manufacture a light guide plate mold material in which a plurality of crest projections are regularly arranged by processing and then V-groove processing with a diamond cutter-2 (Japanese Patent Application Laid-Open No. 2001-150064).
[0003]
The following method is known as a method for manufacturing a work in which a plurality of quadrangular pyramid projections are regularly arranged on a flat substrate shown in FIG.
(A) A method of manufacturing a work in which a plurality of quadrangular pyramid projections are regularly arranged by cutting a flat work with a V-groove diamond tool at equal pitches in the left, right, front and rear directions.
(B) Method for angularly plunging four sides of a work (Japanese Patent Laid-Open No. 2001-217373)
(C) Using a diamond tool, place the tip of the tool on the surface of a cylindrical roller that rotates around the rotation axis, and reciprocate the tool along the tool axis to form a row of recesses on the roller surface. Then, while rotating the roller, the cutting tool is moved in a direction parallel to the axis of rotation of the roller to form a row of concave portions inclined at a predetermined angle with respect to the circumferential direction of the roller. Then, an embossed roller is manufactured, and a photocurable acrylic resin coating material film applied to the surface of the sheet-like material is formed by the embossed roller, and then cured by light irradiation. Method for producing a sheet-like material in which a plurality of regular quadrangular pyramid projections are regularly arranged (Japanese Patent Application Laid-Open No. 2002-14208)
(D) Method of pitch-grinding a mold member (JP-A-2002-229714)
[0004]
Although the above-mentioned Japanese Patent Application Laid-Open No. 2002-229714 does not show a specific grinding method and a grinding device, cutting grinding using a diamond tool or a known surface grinding device and the above-mentioned tool (a) are used. Assuming that the techniques of the processing methods are combined, the processing is performed through the following steps using the surface grinding device 1 disclosed in FIGS. 4 and 5 provided with the rotary grindstone 3 whose outer peripheral end surface supported on the grindstone shaft has a mountain shape. It is presumed.
1) A flat work 2 is placed on an electromagnetic chuck 6 fixed on a table 4 which can be moved to the left and right, and the rotating grindstone 3 is lowered to cut the work while cutting the work. V-grooves are formed on the surface of the work by grinding, and when the depth of cut into the work by the rotating grindstone reaches a desired depth, the rotating grindstone is lifted from the work surface. Retreat,
2) Then, the grindstone shaft is retracted by an amount such that the distance between the rotary grindstone and the plate-shaped work on which the V-groove is processed becomes a pitch width.
3) Again, the grinding wheel rotating on the surface of the plate-like work is lowered to perform a stroke grinding while cutting the plate-like work to form a V-groove on the surface of the work. When the depth of cut into the work by the grindstone reaches a desired depth, the grindstone is raised to retreat from the work surface (moving the grindstone backward),
4) Thereafter, the steps 2) and 3) are repeated to form m rows of mountain ridges on the work, and then the work on which the (m + 1) V-grooves are formed is rotated by 90 degrees to form the work on the electromagnetic chuck. And further move the rotary grindstone in the forward direction to position the rotary grindstone at the processing start point,
5) The rotary grindstone 3 is lowered on the surface of the plate-like work on which the V-groove is fixed, which is fixed on the magnetic chuck, to perform the stroke grinding while cutting the plate-like work 2. A V-groove is formed on the surface of the work, and when the depth of cut into the work by the rotary grindstone reaches a desired depth, the rotary grindstone is raised to retreat from the work surface,
6) Then, the grindstone shaft is retracted by an amount such that the distance between the rotary grindstone, the rotary grindstone and the plate-shaped work on which the V-groove is machined becomes the pitch width.
7) Again, the rotary grindstone is lowered onto the surface of the plate-like work, and the stroking is performed while cutting the plate-like work to form a V-groove on the surface of the work. When the depth of cut into the work reaches the desired depth, the rotating grindstone is raised to retreat from the work surface,
8) Hereinafter, the steps (6) and (7) are repeated to form n rows of mountain ridges in the work, whereby a plurality of (m rows vertically and n rows horizontally) regular quadrangular pyramid projections are regularly arranged. To manufacture
[0005]
4 and 5 show an example of a forming and grinding apparatus. In these figures, 1 is a grinding device, 2 is a work, 3 is a grindstone, 4 is a sliding table capable of reciprocating in a horizontal direction (X-axis direction), 5 is a worktable, and 6 is an electromagnetic (magnet). ) Chuck, 7 is a saddle that can reciprocate in the front-rear direction (Z-axis direction), 8 is an operation panel, 8b is a button for manually operating a pulse generator, and 9 is a column, 10 is a wheel head, 11 is a wheel shaft, Numeral 12 denotes an elevating mechanism for moving the grindstone 3 in the vertical direction (Y-axis direction), numeral 13 denotes a motor, numeral 14 denotes a screwed body, numeral 15 denotes a screw shaft, numeral 16 denotes a bearing, numeral 17 denotes a safety protection cover, and numeral 18 denotes a grinding fluid. A supply nozzle, 19 is a bed, 20 is a tank, 21 is a filter, 22 is a pump, and 24 is a control unit.
[0006]
4 and 5 do not show the position measuring devices for the X, Y and Z axes, but may be manufactured by Heidenhain GmbH or Siemens AG of Germany, or of Japan. A position measuring device manufactured by FANUC CORPORATION is provided on the left and right moving table 4, the saddle 7, and the column 9, and a pulse signal is sent to the control unit 24. The position of the grindstone with respect to the tool is displayed.
[0007]
[Problems to be solved by the invention]
The cutting method (a) requires a long time for processing. In the angular plunge grinding method (b), if the pitch of the pyramid is a micrometer order, it is difficult to perform the processing. As for the method (c) of transferring a film to a film by means of an embossed roller, a cutting method of a roller is proposed, but the film which is a work is not directly machined.
In the presumed grinding method (d), the rotating grindstone is severely worn. In particular, if the pitch of the quadrangular pyramid is a micrometer order of 1 to 40 μm, it becomes necessary to replace the rotating grindstone many times during the pitch grinding.
[0008]
The present invention uses a grinding wheel having a small degree of wear during the work grinding and is easily available from the market using a micrometer (μm) order to a millimeter (mm) order. A work in which a plurality of mountain ridges each having a right-angled triangular cross section are regularly arranged on a flat substrate by forming a groove with a pitch width of a Dar, and a plurality of regular quadrangular pyramid projections are regularly arranged on a flat substrate. It is an object of the present invention to provide a method for producing a work and a grinding device used for processing the work.
[0009]
[Means for Solving the Problems]
A first aspect of the present invention is a ridge to a bottom surface on a flat substrate by a relative movement between a plane grinding wheel and a flat work supported on a grinding wheel shaft and capable of ascending and descending in a direction perpendicular to a horizontal plane. The surface angles are θ degrees and (90−θ) degrees, the top ridge angle is 90 degrees, the pitch width of adjacent top ridges is L, and the height is H. A method for producing an arrayed work, comprising:
1) On the rotary table, the grinding wheel rotating on the surface of the plate-shaped work fixed at an angle of θ with respect to the horizontal plane is lowered and cut into the plate-shaped work. V-grooves are formed on the surface of the work by applying stroke grinding while grinding, and when the depth of cut into the work by the grinding wheel becomes L · sin (90-θ), the grinding wheel By retracting it from the work surface,
2) Next, the distance between the grinding wheel and the flat work formed with the V-groove inclined at an angle of θ with respect to the horizontal plane is moved in the lateral direction by an amount corresponding to the pitch width L · cos θ.
3) Again, the grinding wheel rotating on the surface of the fixed flat work inclined at an angle of θ with respect to the horizontal plane is lowered to perform the stroke grinding while cutting the flat work. Then, a V-groove is formed on the surface of the work, and when the depth of cut into the work by the grinding wheel becomes L · sin (90-θ), the grinding wheel is raised to increase the work. Retreat from the surface,
4) Hereinafter, steps 2) and 3) are repeated to form n rows of mountain ridges on the work.
It is another object of the present invention to provide a method for producing a work in which a plurality of mountain ridges are regularly arranged.
[0010]
By performing V-groove processing using a plane grindstone in a state where the work is inclined by θ degrees, a work in which a plurality of mountain ridges are regularly arranged is manufactured, so that abrasion of the grindstone is small. Moreover, even if the inclination of the mountain ridge is different, it can be processed with one grindstone.
[0011]
According to a second aspect of the present invention, a ridge with respect to a bottom surface on a flat substrate is formed by a relative movement between a plane grinding wheel and a plate-shaped work which are supported on a grinding wheel shaft and which can be raised and lowered in a direction perpendicular to a horizontal plane. The angle θ of the surface is 45 degrees, the ridge length is L, the base length is L, the height H is L / 2, and the pitch of adjacent peaks is L. A method for producing a work in which n columns are regularly arranged,
1) A grinding wheel rotating on the surface of a plate-shaped work fixed on a rotary table at an angle of 45 degrees with respect to the horizontal plane is lowered to cut the plate-shaped work. A V-groove is formed on the surface of the work by performing a stroke grinding while applying, and a depth of cut into the work by a grinding wheel is L / 2. ^1/2 When it becomes, the grinding wheel is raised to retreat from the work surface,
2) Then, the distance between the grinding wheel and the flat work having the V-groove inclined at 45 degrees with respect to the horizontal plane is the pitch width L / 2. ^1/2 And move it in the horizontal direction by the amount
3) Again, stroke grinding is performed while lowering the grinding wheel rotating on the surface of the fixed flat work inclined at 45 degrees with respect to the horizontal plane while cutting the flat work. To form a V-groove on the surface of the work, and the depth of cut into the work by the grinding wheel is L / 2. ^1/2 When it becomes, the grinding wheel is raised to retreat from the work surface,
4) Thereafter, the steps 2) and 3) are repeated to form m rows of mountain ridges on the work, and then the rotary table is rotated by 90 degrees, and further, 45 degrees with respect to the grinding wheel and the horizontal plane. The position of the flat work in which the V-groove inclined at an angle is machined is relatively moved to position the grinding wheel at the machining start point,
5) A rotating grinding wheel is lowered on the surface of the plate-shaped work having the V-groove formed thereon, which is fixed on the rotary table at an angle of 45 degrees with respect to the horizontal plane, and the plate is lowered. A V-groove is formed on the surface of the workpiece by performing stroke grinding while cutting the workpiece, and the cutting depth of the workpiece by the grinding wheel is L / 2. ^1/2 When it becomes, the grinding wheel is raised to retreat from the work surface,
6) Then, the distance between the grinding wheel and the plate-like work on which the V-groove inclined at 45 degrees with respect to the horizontal plane is formed is the pitch width L / 2. ^1/2 And move it in the horizontal direction by the amount
7) Again, stroke grinding is performed while lowering the grinding wheel rotating on the surface of the fixed flat work inclined at 45 degrees with respect to the horizontal plane while cutting the flat work. To form a V-groove on the surface of the work, and the depth of cut into the work by the grinding wheel is L / 2. ^1/2 When it becomes, the grinding wheel is raised to retreat from the work surface,
8) A method for manufacturing a work in which a plurality of regular tetragonal pyramid projections are regularly arranged, wherein the steps 6) and 7) are repeated to form n rows of mountain ridges on the work. Is provided.
[0012]
Using a grinding wheel with a flat grinding surface with a width wider than the pitch width of the regular pyramid projections, grooves are formed on the work surface inclined at 45 degrees to the horizontal plane, so the degree of wear of the grinding wheel is reduced. It is possible to form a groove having a small pitch width from a micrometer (μm) order to a millimeter (mm) order.
[0013]
According to a third aspect of the present invention, there is provided a left-right moving table horizontally provided on a bed, a grinding wheel supported on a grinding wheel shaft capable of moving up and down in a vertical direction with respect to the bed, and capable of moving the grinding wheel shaft in the front-rear direction. A moving mechanism, a rotary table with a tilt function fixed on the left-right moving table, a left-right position measuring device, a front-rear position measuring device, a vertical position measuring device, and a grinding provided with these position control mechanisms An apparatus is provided.
[0014]
This is an apparatus for manufacturing a work in which a plurality of mountain ridges or regular square pyramid projections are regularly arranged. Since a rotary table with a tilt function is used, the work can be held in an inclined state. After forming V-grooves in a row, the rotary table is rotated by 90 degrees, and a V-groove orthogonal to the previously formed V-groove is processed to form a plurality of regular square pyramid projections. Is possible.
[0015]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is a partial front view showing one step of a method for processing a work of the present invention, FIG. 2 is a perspective view of a grinding device of the present invention, and FIG. 3 is a commercially available product used for processing the work of the present invention. It is a perspective view of a tilt type rotary table.
[0016]
In the NC forming and grinding apparatus 1 shown in FIG. 2, reference numeral 2 denotes a plate-like work, 3 denotes a plane type grinding wheel, and the outer peripheral edge section, which is a grinding action surface, has a rectangular shape. The width of the outer peripheral edge in the rotation axis direction of the grinding wheel may be wider than the pitch width of the quadrangular pyramid protrusion, and is preferably 40 μm to 180 mm. Both side surfaces of the grinding wheel are vertical (90 degrees).
[0017]
4 is a table capable of reciprocating in the left-right direction (X-axis direction), 5 is a worktable, 60 is a tilt-type rotary table, 6 is a magnetic chuck, and 7 is a servo motor. Saddle that can be moved in the front-rear direction (Z-axis direction) by driving, 8 is an operation panel, 8b is a button for manually turning the grinding wheel up and down, 9 is a column, 10 is a grinding wheel shaft head, 11 is a grinding wheel shaft, and 12 is a grinding wheel shaft. An elevating mechanism for moving the head in the vertical direction (Y-axis direction) by driving a servo motor, 13 is a motor, 14 is a screw body, 15 is a ball screw screw, 16 is a bearing, and 17 is safety protection. A cover, 18 is a grinding fluid supply nozzle, 19 is a bed, 20 is a tank, 21 is a filter, 22 is a pump, and 24 is a control unit.
[0018]
The table 4 which can be reciprocated right and left is positioned by a V-shaped track provided on a saddle 7 which can slide on a pair of guide surfaces provided on a bed 19, and the table 4 which can be reciprocated right and left is The joint (slider) slidably supports the guide surface (guide rail).
[0019]
Tilt type rotary tables are available from Elb, FANUC, Tsudakoma, Mitutoyo, Dyadic Systems, etc. in Germany. The method of inclining the rotary table may be any of a rotating shaft method in which the rotary table is rotatably supported and fixed to the rotating shaft, a cradle (cradle) method, and a lever method. .
In a tilt type rotary table 60 shown in FIG. 3, reference numeral 6 is fixed on a rotary table 61 by a magnetic chuck. Reference numeral 62 denotes a casing in which a servomotor for rotating the rotary table 61 is housed. Reference numeral 63 denotes a servomotor for rotating an axis for tilting a feed table for supporting the rotary table 61.
[0020]
The work 2 is fixed on a magnetic chuck 6 of a tilt-type rotary table fixedly provided on a left-right moving table 4, and is rotated by a tilt (tilt) mechanism. The magnetic chuck 6 of the bull can be inclined. The flat work 2 is fixed to the tilt type rotary table 60 by using the magnetic chuck 6 when the work is made of a metal material, and the work is made of glass, resin, ceramic or silicon. When it is a non-magnetic material such as a substrate, it is fixed to the rotary table 61 using a fixing tool or an adhesive.
[0021]
A plurality of mountain ridges having a right-angled triangular cross section having a ridge surface angle of θ degrees and (90−θ) degrees with respect to a bottom surface, a top ridge angle of 90 degrees, a pitch width of adjacent top ridges of L, and a height of H on a flat substrate. The steps of manufacturing a work in which n rows are regularly arranged before and after are as follows.
[0022]
1) The flat work 2 is fixed on the magnetic chuck 6 of the rotary table 61, and then the servo motor 63 is driven to move the rotary table 61 to a horizontal plane. Incline by θ degrees. The plane grinding wheel 3, which is rotating on the surface of the flat plate-shaped work fixed in the inclined state, is lowered to perform the stroke grinding while cutting the flat work 2. A V-groove is formed on the surface of the work, and when the depth of cut into the work by the grinding wheel becomes L · sin (90-θ), the grinding wheel is lifted from the work surface. Retreat.
[0023]
2) Then, the distance between the grinding wheel and the flat work having the V-groove inclined at 45 degrees with respect to the horizontal plane is shifted laterally by an amount such that the pitch width is L · cos θ.
3) Again, stroke grinding is performed while lowering the grinding wheel rotating on the surface of the fixed flat work inclined at 45 degrees with respect to the horizontal plane while cutting the flat work. Then, a V-groove is formed on the surface of the work, and when the depth of cut into the work by the grinding wheel becomes L · sin (90-θ), the grinding wheel is raised to increase the work. Retract from the surface.
4) Thereafter, steps (2) and (3) are repeated to process (n + 1) V-grooves into a work, whereby n rows of mountain ridges are formed in the work.
[0024]
Specifically, when the cross-sectional areas of the n rows of mountain ridges are θ = 45 °, 45 ° and 90 °, and the pitch width of adjacent top ridges is a right-angled isosceles triangle with L, the rotary The angle of inclination of the bull is set at 45 degrees, and the work is processed through the following steps.
[0025]
1) The plate-shaped work 2 is fixed on the magnetic chuck 6 of the tilt type rotary table 60, and then the servo motor 63 is driven to move the magnetic chuck 6 to 45 degrees with respect to the horizontal plane. When it is inclined, the angle of the work with respect to the horizontal plane is 45 degrees.
The saddle 7 and the table 4 are moved with respect to the grinding wheel axis, and the grinding wheel is machined or raised to be positioned at the grinding start point.
The right and left moving table 4 is reciprocated to the left and right, and the grinding wheel 3 rotating on the surface of the fixed flat work 2 inclined at 45 degrees is lowered to form a flat work. Stroke grinding is performed while making a cut to form a V-groove having a valley angle of 90 degrees on the surface of the work, and the depth of cut into the work by the grinding wheel is L / 2. ^1/2 At this point, the grinding wheel shaft head is raised (the grinding wheel is raised) to move the grinding wheel backward from the work surface.
[0026]
2) Then, the distance between the grinding wheel 3 and the flat work 2 on which the V-groove inclined at 45 degrees with respect to the horizontal plane is formed is a pitch width L / 2. ^1/2 By retracting the saddle 7 backward by the following amount, the relative position of the grinding wheel from the work is L / 2. ^1/2 In the horizontal direction.
[0027]
3) Again, the grinding wheel 3, which is rotating on the surface of the plate-shaped work 2 fixed at a 45 degree angle to the horizontal plane, is lowered to make a stroke while cutting the plate-shaped work. Grinding is performed to form a V groove on the surface of the work, and the depth of cut into the work by the grinding wheel is L / 2. ^1/2 At this point, the grinding wheel is raised to retreat from the surface of the work (FIG. 1 shows a state in which three V-grooves are ground on the work 2 by the grinding wheel 3).
[0028]
4) Thereafter, the steps 2) and 3) are repeated to form n rows of mountain ridges (n + 1 V grooves) in the work.
[0029]
When the cross-sectional area of the n rows of mountain ridges is a right-angled triangle with θ = 60 degrees, (90−θ) = 30 degrees and 90 degrees, and the pitch width of adjacent top ridges is L, The angle of inclination of the bull is set to 60 degrees, and the work is processed through the following steps.
[0030]
1) The flat work 2 is fixed on the magnetic chuck 6 of the tilt type rotary table 60, and then the servo motor 63 is driven to move the magnetic chuck 6 at an angle of 60 degrees with respect to the horizontal plane. When inclined, the angle of the work with respect to the horizontal plane is 60 degrees.
The saddle 7 and the table 4 are moved with respect to the grinding wheel axis, and the grinding wheel is machined or raised to be positioned at the grinding start point.
The right and left moving table 4 is reciprocated to the left and right, and the grinding wheel 3 rotating on the surface of the flat workpiece 2 fixed at an angle of 60 degrees is lowered to form a flat workpiece. A V-groove having a valley angle of 90 degrees is formed on the surface of the work by performing stroke grinding while making a cut, and the depth of cut into the work by the grinding wheel is 3. ^1/2 When L / 2 is reached, the wheel head is raised (the wheel is raised) to retreat the wheel from the surface of the work.
[0031]
2) Then, the saddle 7 is retracted backward by an amount such that the distance between the grinding wheel 3 and the flat work 2 having the V groove inclined at 60 degrees with respect to the horizontal plane is equal to the pitch width L / 2. -Move the relative position of the grinding wheel from the horizontal direction by an amount of L / 2.
[0032]
3) Again, the grinding wheel 3 rotating on the surface of the fixed plate-shaped work 2 fixed to the horizontal plane at an angle of 60 degrees is lowered to make a stroke while cutting the plate-shaped work. A V-groove is formed on the surface of the work by grinding, and the depth of cut into the work by the grinding wheel is 3 ^1/2 At the time when L / 2 is reached, the grinding wheel is raised to retreat from the work surface (FIG. 1 shows a state in which three V-grooves are ground on the work 2 by the grinding wheel 3).
[0033]
4) Thereafter, the steps 2) and 3) are repeated to form n rows of mountain ridges (n + 1 V grooves) in the work.
[0034]
When the inclination angle of the rotary table with respect to the horizontal plane is set to (90-θ) = 30 degrees, the depth of cut into the work by the grinding wheel is L / 2, and Pitch width of lateral movement is 3 ^1/2 L / 2.
[0035]
Next, a method of processing a square quadrangular pyramid projection having a square with a side length L on the bottom surface on a flat substrate will be described.
A square pyramid projection having a square with a side length L on the bottom has a ridge surface angle θ of 45 degrees, a ridge line length of L, a base length of L, and a height from the vertex to the center of the base. Is L / 2, the pitch width of adjacent vertices is L, and the distance from the vertices to the midpoint of the base of the equilateral triangle on the side is L / 2. ^1/2 Is calculated.
In order to manufacture a work in which a plurality of the regular quadrangular pyramid projections are regularly arranged on the flat substrate in m rows and n rows in front and rear, the following steps are performed.
[0036]
1) The plate-shaped work 2 is fixed on the magnetic chuck 6 of the tilt type rotary table 60, and then the servo motor 36 is driven to move the magnetic chuck 6 to 45 degrees with respect to the horizontal plane. When it is inclined, the angle of the work with respect to the horizontal plane is 45 degrees.
The saddle 7 and the table 4 are moved with respect to the grinding wheel axis, and the grinding wheel is machined or raised to be positioned at the grinding start point.
The right and left moving table 4 is reciprocated to the left and right, and the grinding wheel 3 rotating on the surface of the fixed flat work 2 inclined at 45 degrees is lowered to form a flat work. Stroke grinding is performed while making a cut to form a V-groove having a valley angle of 90 degrees on the surface of the work, and the depth of cut into the work by the grinding wheel is L / 2. ^1/2 At this point, the grinding wheel shaft head is raised (the grinding wheel is raised) to move the grinding wheel backward from the work surface.
[0037]
2) Then, the distance between the grinding wheel 3 and the flat work 2 on which the V-groove inclined at 45 degrees with respect to the horizontal plane is formed is a pitch width L / 2. ^1/2 By retracting the saddle 7 backward by the following amount, the relative position of the grinding wheel from the work is L / 2. ^1/2 In the horizontal direction.
[0038]
3) Again, the grinding wheel 3, which is rotating on the surface of the plate-shaped work 2 fixed at a 45 degree angle to the horizontal plane, is lowered to make a stroke while cutting the plate-shaped work. Grinding is performed to form a V groove on the surface of the work, and the depth of cut into the work by the grinding wheel is L / 2. ^1/2 At this point, the grinding wheel is raised to retract from the surface of the work.
[0039]
4) Hereinafter, steps 2) and 3) are repeated to form m rows of ridges (m + 1 grooves) on the work, and then the rotary table is rotated 90 degrees. The position of the flat work in which the V-groove inclined at 45 degrees with respect to the grinding wheel and the horizontal plane is moved relatively to position the grinding wheel at the machining start point.
[0040]
5) On the surface of the plate-like work on which (m + 1) V grooves are formed, which are fixed on the magnetic chuck 6 of the tilt type rotary table 60 at an angle of 45 degrees with respect to the horizontal plane. The rotating grinding wheel 3 is lowered to perform stroking while cutting the plate-shaped work to form a V-groove on the surface of the work, and the workpiece is cut by the grinding wheel. L / 2 depth ^1/2 At this point, the grinding wheel is raised to retract from the surface of the work.
[0041]
6) Then, the distance between the grinding wheel and the plate-like work on which the V-groove inclined at 45 degrees with respect to the horizontal plane is formed is the pitch width L / 2. ^1/2 And move it in the horizontal direction by the amount
[0042]
7) Again, stroke grinding is performed while lowering the grinding wheel rotating on the surface of the fixed flat work inclined at 45 degrees with respect to the horizontal plane while cutting the flat work. To form a V-groove on the surface of the work, and the depth of cut into the work by the grinding wheel is L / 2. ^1/2 At this point, the grinding wheel is raised to retract from the surface of the work.
[0043]
8) Hereinafter, steps 6) and 7) are repeated to form n rows of mountain ridges (n + 1 V grooves) in the work, so that m rows and n rows of square pyramid projections are formed. Formed into a work. When the vertical (m + 1) V-grooves and the horizontal (n + 1) V-grooves intersect, a work in which a plurality of m-row and n-row regular square pyramid projections are regularly arranged on a flat substrate is manufactured. Is done.
[0044]
The material of the work includes tungsten carbon alloy, tungsten molybdenum alloy, stainless steel, cermet, hastelloy, nickel chrome steel, copper, aluminum, nickel silver, AlTiC, copper plated stainless steel plate, nickel plated acrylic resin Examples include a plate, a glass plate, a ceramic, a resin, a silicon substrate, and a semiconductor substrate. The grinding wheel is appropriately selected from diamond blades, diamond wheels, CBN wheels, green carbon wheels (GC), silicon carbide wheels, alumina wheels, etc., depending on the work material.
[0045]
The pitch L of the regular quadrangular pyramid projections of the work differs depending on the use of the processed work. 0.3 to 2 mm for a press-type cast member for wallpaper, 2 to 10 mm for a laminated semiconductor substrate, 30 to 100 μm for a light diffusion reflector of a liquid crystal display (LCD), a light guide used for an optical communication system of a mobile body If so, it is generally 6 to 10 μm.
[0046]
The stroke width of the left and right tables 4 during the stroke grinding varies depending on the application, but is 2 to 150 mm, the number of strokes is 50 to 300 times / minute, and the cutting speed of the wheel 2 of the grinding wheel 3 is 2 0.1-1 mm / min, the rotation speed of the grinding wheel 3 is 3,000-8,000 min ^-1 It is.
[0047]
When the outer peripheral edge of the grinding wheel 3 becomes severely worn, the processing surface (outer peripheral edge) of the grinding wheel is dressed. The timing of the dressing depends on the depth of the groove, the width of the groove, and the type of the grindstone. As a dresser, a diamond grindstone, a CBN grindstone, or the like is used.
[0048]
【Example】
Example 1
A high-speed stroke grinding machine PFG500DXNCS (trade name) manufactured by Okamoto Machine Tool Works, Ltd. is used as a CNC forming grinding device used for grinding, and a tilt-type rotary table 60 is mounted on the left-right moving table 4. Was installed. As a grinding wheel 3, a diamond grinding wheel having an outer diameter of 180 mm and an outer peripheral edge width of 6 mm and having a vertical surface on both sides (plane type) was used, and this blade was mounted on a grinding wheel shaft of the forming and grinding apparatus.
[0049]
As a work, a square-shaped tungsten carbon alloy (WC) having a length of 40 mm, a width of 40 mm, and a thickness of 2.0 mm is used, and this is a tilt-type rotary table fixed on a left-right moving table. Bull 60 was fixed on magnetic chuck 6.
[0050]
A square pyramid protrusion having a side length (L) of 1.0 mm (a ridge angle θ with respect to the flat substrate bottom surface of 45 °, a ridge line length of 1.0 mm, and a base length of 1.0 mm) is formed on the surface of the work. 0 mm, the height H between the vertex and the center of the bottom surface is 0.50 mm, and the pitch distance between adjacent vertices is 1.0 mm). For manufacturing, the stroke width is 42 mm, the number of strokes is 50 times / min, the cutting speed of the grinding wheel is 0.1 mm / min, and the cutting depth is 1/2. ^1/2 mm, width of width (pitch) lateral to work of grinding wheel 1/2 ^1/2 mm, rotation speed of the horizontal grinding wheel 5,000min ^-1 The number of spark-outs was 5 seconds / groove, and the dress was processed through the above-described steps (1) to (8) under the conditions of processing every 25 grooves.
[0051]
During the working of one piece, there was no breakage of the grinding wheel and no chipping of the V-groove.
[0052]
Example 2
A high-speed stroke grinding machine PFG500DXNCS (trade name) manufactured by Okamoto Machine Tool Works, Ltd. is used as a CNC forming and grinding apparatus used for grinding. Was installed. As the grinding wheel 3, a copper-nickel-plated diamond grinding wheel having an outer diameter of 120 mm and an outer peripheral edge width of 1 mm and having a vertical surface on both sides (plane type) was used, and this blade was mounted on a grinding wheel shaft of the forming and grinding apparatus. .
[0053]
As a work, a square nickel / copper-plated stainless steel plate having a length of 3 inches (approximately 76.2 mm), a width of 3 inches and a thickness of 2.0 mm was used, and this was fixed on a left-right moving table. The rotary table was fixed on the magnetic chuck 6 of the rotary table 60.
[0054]
On the surface of this work, the distance (pitch width) between adjacent mountain ridges is 70.70 μm, and the cross-sectional shape is 50 μm, 50 μm, 70.70 μm. In order to manufacture a regularly arranged work with 6533 rows (the front and rear margins are each 15 mm wide), the stroke width is 70.70 μm, the number of strokes is 150 times / minute, and the wheel of the grinding wheel is used. The cutting speed is 10.0 μm / min, the cutting depth is 50 μmm, the width of the lateral movement (pitch) of the grinding wheel relative to the work is 50 μmm, and the rotation speed of the horizontal grinding wheel is 5,000 min. ^-1 The number of spark-outs was 5 seconds / groove, the rotary table inclination angle was 45 degrees, and the dress was processed through the above-described steps (1) to (4) under the conditions of processing every 25 grooves. .
[0055]
During the working of one piece, there was no breakage of the grinding wheel and no chipping of the V-groove.
[0056]
【The invention's effect】
The method of manufacturing a work in which a plurality of regular quadrangular pyramid protrusions are regularly arranged according to the present invention uses a grinding wheel having a ground surface width larger than a pitch width of protrusions formed on the work. -The grinding wheel is machined in an inclined state, so the grinding wheel has a long life.
[Brief description of the drawings]
FIG. 1 is a partial front view showing one step in a work processing method of the present invention.
FIG. 2 is a perspective view of the NC grinding apparatus of the present invention.
FIG. 3 is a perspective view of a commercially available tilt type rotary table. (Known)
FIG. 4 is a perspective view of a grinding device. (Known)
FIG. 5 is a side view of the grinding device. (Known)
FIG. 6 is a partial perspective view of a reflector having a quadrangular pyramid projection of the liquid crystal display. (Known)
[Explanation of symbols]
1 NC grinding equipment
2 Work
3 grinding wheel
4 Left / right moving table
6 Magnetic chuck
60 Tilt type rotary table
7 columns

Claims

The relative movement between the plane wheel and the flat work supported on the grinding wheel shaft and capable of ascending and descending in the vertical direction with respect to the horizontal plane allows the ridge angle with respect to the bottom surface on the flat substrate to be θ degrees and (90 degrees). -Θ) degrees, a top ridge angle of 90 degrees, a pitch width of adjacent top ridges of L, and a height of H are produced. The method,
1) On the rotary table, the grinding wheel rotating on the surface of the plate-shaped work fixed at an angle of θ with respect to the horizontal plane is lowered and cut into the plate-shaped work. V-grooves are formed on the surface of the work by applying stroke grinding while grinding, and when the depth of cut into the work by the grinding wheel becomes L · sin (90-θ), the grinding wheel By retracting it from the work surface,
2) Next, the distance between the grinding wheel and the flat work formed with the V-groove inclined at an angle of θ with respect to the horizontal plane is moved in the lateral direction by an amount corresponding to the pitch width L · cos θ.
3) Again, the grinding wheel rotating on the surface of the fixed flat work inclined at an angle of θ with respect to the horizontal plane is lowered to perform the stroke grinding while cutting the flat work. Then, a V-groove is formed on the surface of the work, and when the depth of cut into the work by the grinding wheel becomes L · sin (90-θ), the grinding wheel is raised to increase the work. Retreat from the surface,
4) Hereinafter, steps 2) and 3) are repeated to form n rows of mountain ridges on the work.
A method for producing a work in which a plurality of mountain ridges are regularly arranged.

The angle θ of the ridge surface relative to the bottom surface is 45 degrees on the flat substrate by the relative movement between the plane wheel and the flat work supported on the grinding wheel shaft and capable of moving up and down in the vertical direction with respect to the horizontal plane. A plurality of square quadrangular pyramid projections having a ridge length of L, a base length of L, a height of L / 2, and a pitch width of adjacent peaks of L are arranged in m rows on the left and right and n rows in the front and back. A method for producing a work, comprising:
1) A grinding wheel rotating on the surface of a plate-shaped work fixed on a rotary table at an angle of 45 degrees with respect to the horizontal plane is lowered to cut the plate-shaped work. The V-groove is formed on the surface of the work by performing the stroke grinding while applying, and the grinding wheel is raised when the cutting depth of the work by the grinding wheel becomes L / ^21/2. To retract from the work surface,
2) Then, the distance between the grinding wheel and the flat work having the V-groove inclined at 45 degrees with respect to the horizontal plane is moved laterally by an amount such that the pitch width is L / ^21/2 .
3) Again, stroke grinding is performed while lowering the grinding wheel rotating on the surface of the fixed flat work inclined at 45 degrees with respect to the horizontal plane while cutting the flat work. Then, a V-groove is formed on the surface of the work, and when the depth of cut into the work by the grinding wheel becomes L / ^21/2 , the grinding wheel is lifted from the work surface. Retreat,
4) Thereafter, the steps 2) and 3) are repeated to form m rows of mountain ridges on the work, and then the rotary table is rotated by 90 degrees, and further, 45 degrees with respect to the grinding wheel and the horizontal plane. The position of the flat work in which the V-groove inclined at an angle is machined is relatively moved to position the grinding wheel at the machining start point,
5) A rotating grinding wheel is lowered on the surface of the plate-shaped work having the V-groove formed thereon, which is fixed on the rotary table at an angle of 45 degrees with respect to the horizontal plane, and the plate is lowered. The V-groove is formed on the surface of the work by performing stroke grinding while cutting the workpiece, and the cutting depth of the work by the grinding wheel becomes L / ^21/2. At that point, raise the grinding wheel to retreat from the work surface,
6) Then, the distance between the grinding wheel and the flat work having the V-groove inclined at 45 degrees with respect to the horizontal plane is shifted laterally by an amount such that the pitch width is L / ^21/2 .
7) Again, stroke grinding is performed while lowering the grinding wheel rotating on the surface of the fixed flat work inclined at 45 degrees with respect to the horizontal plane while cutting the flat work. Then, a V-groove is formed on the surface of the work, and when the depth of cut into the work by the grinding wheel becomes L / ^21/2 , the grinding wheel is lifted from the work surface. Retreat,
8) A method for manufacturing a work in which a plurality of regular tetragonal pyramid projections are regularly arranged, wherein the steps 6) and 7) are repeated to form n rows of mountain ridges on the work. .

A left-right moving table horizontally provided on the bed, a grinding wheel supported on a grindstone shaft vertically movable with respect to the bed, a moving mechanism capable of moving the grindstone shaft in the front-rear direction, the left-right moving table A rotary table with a tilt function fixed on a table, a left / right position measuring device, a front / rear position measuring device, a vertical position measuring device, and a grinding device provided with these position control mechanisms.