JP2004138419A - Particulate shape measurement device - Google Patents

Particulate shape measurement device Download PDF

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JP2004138419A
JP2004138419A JP2002301285A JP2002301285A JP2004138419A JP 2004138419 A JP2004138419 A JP 2004138419A JP 2002301285 A JP2002301285 A JP 2002301285A JP 2002301285 A JP2002301285 A JP 2002301285A JP 2004138419 A JP2004138419 A JP 2004138419A
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magnetic sensor
magnetic field
magnetic
fine particles
particle measurement
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Akihiko Umeda
梅田　彰彦
Yoshimi Kagimoto
鍵本　良実
Masaya Kouno
河野　将弥
Junichi Miyagawa
宮川　純一
Makihito Katayama
片山　牧人
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Mitsubishi Heavy Industries Ltd
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Mitsubishi Heavy Industries Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a particulate shape measurement device capable of surely performing the detailed shape measurement of a particulate by detecting a change of a magnetic field by the particulate. <P>SOLUTION: This device has a magnetic sensor 34 having a flat structure in which a coil 32 and coil source device 33 for forming the magnetic field 38 and a number of magnetic sensor elements 34a are arranged in matrix in a particulate measuring area part 36 and a sensor arrangement part 37, the sensor being arranged in the sensor arrangement part in opposition to the particulate measuring area part to detect the change of the magnetic field caused by the particulate 39 present in the particulate measuring area part by each magnetic sensor element; and a signal processor 35 for processing the detection signal of each magnetic sensor element of the magnetic sensor to determine the shape of the particulate. As the magnetic sensor, flat ones may be provided orthogonally, or the magnetic sensor may be constituted in a cylindrical, linear or annular shape. <P>COPYRIGHT: (C)2004,JPO

Description

【０００１】
【発明の属する技術分野】
本発明は微粒子形状計測装置に関し、軸受の潤滑油に混入した金属摩耗粉などの微粒子の形状を計測する場合に適用して有用なものであり、例えば潤滑油管理システムやメンテナンスシステムに装備される微粒子形状計測装置などに適用することができる。
【０００２】
【従来の技術】
例えば火力発電所には、ボイラに供給する空気を発電所で発生する余熱で予め加熱して熱効率を高めるために用いられるエアヒータ（図１参照）など、回転軸を軸受で回転自在に支持する構成の機器が多数備えられており、これらの機器では、運転中に軸受の金属摩耗粉などの微粒子が軸受の潤滑油に混入して軸受の焼きつき等の支障をきたすことがある。このため、エアヒータなどの重要な機器については、循環する潤滑油中に混入した微粒子の計測などを行って潤滑油の状態を管理する潤滑油管理システムが装備される。
【０００３】
そして、従来、潤滑油などの流体中の微粒子を計測する装置としては、微粒子による磁界の変化を検出するものが知られている（例えば、特許文献１参照）。
【０００４】
【特許文献１】
特開２０００−１７１３８２
【０００５】
図９には特許文献１に開示されている計測技術の概要を示す。図９（ａ）に示すようにフィールドコイル１ａ，１ｂで交流磁界を発生させ、このコイル中においてテフロン（商品名）製チューブ３の往路（傾斜部）３ａ及び復路（非傾斜部）３ｂに潤滑油とともに微粒子２を流すことにより、図９（ｂ）及び図９（ｃ）に示すように前記磁界に対する微粒子２の姿勢を変える。そして、このときの微粒子２による前記磁界の変化を、図９（ａ）に示すようにセンシンングコイル４により、起電力として検出する。その結果、図９（ｄ）に示すような起電力Ａ，Ｂが得られ、この起電力Ａ，Ｂの比から、図９（ｅ）に示すような微粒子２のアスペクト比（長軸径と短軸径の比）、即ち、長短度（円形度）を求めることができる。
【０００６】
図１０には別の従来の計測技術の概要を示す。図１０（ａ）に示すように、コイル１１により、潤滑油が流れる配管１２の途中（微粒子計測領域部）、及び、磁気センサ１３の配置部に磁界１４を形成し、潤滑油とともに配管１２を流れる微粒子１５によって生じる磁界１４の変化を、磁気センサ１３によって検出する。その結果、図１０（ｂ）に示すような磁気センサ１３の検出信号が得られるため、この検出信号と、既知の潤滑油（微粒子１５）の流速とに基づいて微粒子１５の長短度を検出することができる。
【０００７】
なお、上記のような微粒子による磁界の変化を検出する手法以外にも、小径の検査領域を微粒子が通過する際の電気抵抗の変化を検知し、この微粒子通過時の信号をトリガとして光学的に微粒子の形状を計測するベックマンコールター社のものや、光学センサによって微粒子の形状計測を行うスペクトロ社のものなどがある。
【０００８】
【発明が解決しようとする課題】
しかしながら、上記のような従来の形状計測装置では微粒子の大きさを検知することはできるが、詳細な微粒子の形状計測を行うことはできない。また、ベックマンコールター社やスペクトロ社のものは、光学的な計測であるため、実機に適用する際、計測する潤滑油ライン等の汚損に弱いため、適用性に劣ると考えられる。
【０００９】
従って本発明は上記の事情に鑑み、微粒子による磁界の変化を検出して微粒子の詳細な形状計測を確実に行うことができる微粒子形状計測装置を提供することを課題とする。
【００１０】
【課題を解決するための手段】
上記課題を解決する第１発明の微粒子形状計測装置は、微粒子計測領域部及びセンサ配置部に磁界を形成する磁界形成手段と、
多数の磁気センサ素子をマトリクス状に配列してなる平面状の構成であって、前記微粒子計測領域部に面して前記センサ配置部に配置され、前記微粒子計測領域部に存在する微粒子によって生じる前記磁界の変化を各磁気センサ素子によって検出する磁気センサと、
この磁気センサの各磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とする。
【００１１】
また、第２発明の微粒子形状計測装置は、微粒子計測領域部及びこの微粒子計測領域部の直交方向の一方側に位置する第１のセンサ配置部に第１の磁界を形成する第１の磁界形成手段と、
前記微粒子計測領域部及び前記直交方向の他方側に位置する第２のセンサ配置部に第２の磁界を形成する第２磁界形成手段と、
多数の第１の磁気センサ素子をマトリクス状に配列してなる平面状の構成であって、前記微粒子計測領域部に面して前記第１のセンサ配置部に配置され、前記微粒子計測領域部に存在する微粒子によって生じる前記第１の磁界の変化を各第１の磁気センサ素子によって検出する第１の磁気センサと、
多数の第２の磁気センサ素子をマトリクス状に配列してなる平面状の構成であって、前記微粒子計測領域部に面して前記第２のセンサ配置部に配置され、前記微粒子計測領域部に存在する微粒子によって生じる前記第２の磁界の変化を各第２の磁気センサ素子によって検出する第２の磁気センサと、
前記第１の磁気センサ及び第２の磁気センサの各第１及び第２の磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とする。
【００１２】
また、第３発明の微粒子形状計測装置は、微粒子計測領域部及びセンサ配置部の回りに回転磁界を形成する磁界形成手段と、
多数の磁気センサ素子をマトリクス状に配列してなる円筒状の構成であって、前記微粒子計測領域部の周囲を囲むようにして前記センサ配置部に配置され、前記微粒子計測領域部に存在する微粒子によって生じる前記回転磁界の変化を各磁気センサ素子によって検出する磁気センサと、
この磁気センサの各磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とする。
【００１３】
また、第４発明の微粒子形状計測装置は、微粒子計測領域部及びセンサ配置部に磁界を形成する磁界形成手段と、
多数の磁気センサ素子を一列に配列してなる直線状の構成であって、前記微粒子計測領域部に面して前記センサ配置部に配置され、前記微粒子計測領域部を流体とともに流れる微粒子によって生じる前記磁界の変化を各磁気センサ素子によって検出する磁気センサと、
前記微粒子の流速に基づき、前記磁気センサの各磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とする。
【００１４】
また、第５発明の微粒子形状計測装置は、微粒子計測領域部及びこの微粒子計測領域部の直交方向の一方側に位置する第１のセンサ配置部に第１の磁界を形成する第１の磁界形成手段と、
前記微粒子計測領域部及び前記直交方向の他方側に位置する第２のセンサ配置部に第２の磁界を形成する第２磁界形成手段と、
多数の第１の磁気センサ素子を一列に配列してなる直線状の構成であって、前記微粒子計測領域部に面して前記第１のセンサ配置部に配置され、前記微粒子計測領域部を流体とともに流れる微粒子によって生じる前記第１の磁界の変化を各第１の磁気センサ素子によって検出する第１の磁気センサと、
多数の第２の磁気センサ素子を一列に配列してなる直線状の構成であって、前記微粒子計測領域部に面して前記第２のセンサ配置部に配置され、前記微粒子によって生じる前記第２の磁界の変化を各第２の磁気センサ素子によって検出する第２の磁気センサと、
前記微粒子の流速に基づき、前記第１の磁気センサ及び第２の磁気センサの各第１及び第２の磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とする。
【００１５】
また、第６発明の微粒子形状計測装置は、微粒子計測領域部及びセンサ配置部の回りに回転磁界を形成する磁界形成手段と、
多数の磁気センサ素子を一列に配列してなる円環状の構成であって、前記微粒子計測領域部の周囲を囲むようにして前記センサ配置部に配置され、前記微粒子計測領域部を流体とともに流れる微粒子によって生じる前記回転磁界の変化を各磁気センサ素子によって検出する磁気センサと、
前記微粒子の流速に基づき、前記磁気センサの各磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とする。
【００１６】
また、第７発明の微粒子形状計測装置は、第１〜第６発明の何れかの微粒子形状計測装置において、
前記磁界形成手段は多数のコイル素子を前記平面状、円筒状、直線状又は円環状の磁気センサの各磁気センサ素子に各々に対応させてマトリクス状又は一列に配列してなる平面状、円筒状、直線状又は円環状の磁界形成部であり、この磁界形成部と、前記平面状、円筒状、直線状又は円環状の磁気センサとを一体的に構成し、
前記磁界形成部の各コイル素子に順次通電して前記磁界又は回転磁界を形成するように構成したことを特徴とする。
【００１７】
【発明の実施の形態】
以下、本発明の実施の形態を図面に基づき詳細に説明する。
【００１８】
＜実施の形態１＞
図１は本発明の実施の形態１に係る微粒子形状計測装置を備えた潤滑油循環ラインの構成図、図２は本発明の実施の形態１に係る微粒子形状計測装置の構成図である。
【００１９】
図１には一例として火力発電プラントのエアヒータの潤滑油循環ラインに本実施の形態１の微粒子形状計測装置を備えた場合の概略構成を示している。図１に示すように、エアヒータ２１は、駆動装置２２によってロータ２３を回転させることにより、下部主軸受２５によって回転自在に支持された回転軸２４を回転駆動する構成となっている。なお、図１中の２６はハウジング、２７は上部主軸受である。
【００２０】
そして、ドットで概略的に図示するように下部主軸受２５は潤滑油３０に浸されており、潤滑油３０は潤滑油循環ライン（配管）２８の途中に設けられたポンプ２９によって循環され、潤滑油３０中に混入した微粒子（下部主軸受２５の金属摩耗粉）は潤滑油循環ライン２８の途中に設けられた微粒子形状計測装置３１によって計測されるようになっている。
【００２１】
図２に示すように、本実施の形態１の微粒子形状計測装置３１は磁界形成手段としてのコイル３２及びコイル電源装置３３、磁気センサ３４、信号処理手段としての信号処理装置３５などを有している。
【００２２】
コイル３２は潤滑油循環ライン２８の途中の微粒子計測領域部３６の一方側に面して配置され、磁気センサ３４は微粒子計測領域部３６を間に挟んでコイル３２と対向するように微粒子計測領域部３６の他方側に面してセンサ配置部３７に配置されている。従って、コイル電源装置３３によってコイル３２に交流電流或いは直流電流を流すと、コイル３２は微粒子計測領域部３６及びセンサ配置部３７（磁気センサ３４）に交流又は直流の磁界３８を形成する。即ち、微粒子計測領域部３６及びセンサ配置部３７（磁気センサ３４）が、磁界３８の中に置かれる。このとき、微粒子計測領域部３６に微粒子（下部主軸受２５の金属摩耗粉）３９が存在すると（微粒子計測領域部３６の潤滑油３０中に微粒子３９が混入していると）、即ち、矢印Ｃのように潤滑油３０とともに微粒子３９が微粒子計測領域部３６を流れると、この微粒子３９によって磁界３８が変化する（乱れる）。微粒子３９の大きさは例えば数１００μｍ程度である。
【００２３】
なお、コイル３２の位置は図示の位置に限定するものではなく、磁気センサ３４の後方などでもよい。また、潤滑油循環ライン（配管）２８のうちの少なくとも微粒子計測領域部３６はテフロン製などの非磁性、非導電性のもので形成されていることが望ましい。
【００２４】
磁気センサ３４は、磁気抵抗（ＭＲ）素子、大規模磁気抵抗（ＧＭＲ）素子又は磁気インダクタンス（ＭＩ）素子などの磁気センサ素子３４ａを多数マトリクス状に配列してなる平面状の構成であり、微粒子計測領域部３６に存在する微粒子３９によって生じる磁界３８の変化を各磁気センサ素子３４ａによって検出する。即ち、図２中のハッチングが施された磁気センサ素子３４ａは微粒子３９の形状に対応する位置のセンサであり、これらの磁気センサ素子３４ａでは微粒子３９による当該部分の磁界３８の変化に応じて検出値が変化する。なお、このような平面状（マトリクス状）の磁気センサ３４は、例えば磁界によって抵抗値が変化する磁気抵抗（ＭＲ）の膜を基板上に成膜してエッチングなど行うことにより、多数の磁気センサ素子３４ａを同基板上にマトリクス状に集積することなどによって、構成することができる。
【００２５】
磁気センサ３４の各磁気センサ素子３４ａの検出信号は、信号処理装置３５に入力される。信号処理装置３５では、各磁気センサ素子３４ａの検出信号を処理することにより、例えば各磁気センサ素子３４ａの検出信号レベルと閾値とを比較し、検出信号レベルが閾値を超えた磁気センサ素子３４ａにおいて微粒子３９が検知されたと判断するような信号処理をすることにより、図２中にハッチングで示すような微粒子３９の形状を求める。即ち、各磁気センサ素子３４ａの検出信号の変化から微粒子３９の存在領域を推定する。信号処理装置３５で求められた微粒子３９の形状（データ）は、表示・記録装置４０において表示され、且つ、記録される。
【００２６】
従って、本実施の形態１の微粒子形状計測装置３１によれば、微粒子３９の詳細な形状、即ち、微粒子３９の幅（又は厚み）及び長さを計測を行うことができる。しかも、光学的な計測手法に比べて計測精度が潤滑油循環ライン２８の汚損に左右されにくい。また、磁気センサ素子３４ａの集積度を向上させれば、より詳細（高精度）な微粒子３９の形状計測が可能となる。
【００２７】
＜実施の形態２＞
図３は本発明の実施の形態２に係る微粒子形状計測装置の構成図である。なお、潤滑油循環ラインの構成については、上記実施の形態１（図１参照）と同様であるため、ここでの説明及び図示を省略する。
【００２８】
図３に示すように、本実施の形態２の微粒子形状計測装置５１は第１及び第２の磁界形成手段としての第１及び第２のコイル５２Ａ，５２Ｂ及びコイル電源装置５３、第１及び第２の磁気センサ５４Ａ，５４Ｂ、信号処理手段としての信号処理装置５５などを有している。
【００２９】
第１のコイル５２Ａは潤滑油循環ラインの途中の微粒子計測領域部５６の直交方向の一方側に面して配置され、第２のコイル５２Ｂは前記直交方向の他方側に面して配置されている。磁気センサ３４Ａは微粒子計測領域部５６の他の直交方向の一方側に位置する第１のセンサ配置部５７Ａに微粒子計測領域部５６に面して配置され、微粒子計測領域部５６を間に挟んで第１のコイル５２Ａと対向しており、磁気センサ３４Ｂは前記他の直交方向の他方側に位置する第２のセンサ配置部５７Ｂに微粒子計測領域部５６に面して配置され、微粒子計測領域部５６を間に挟んで第２のコイル５２Ｂと対向している。
【００３０】
従って、コイル電源装置５３によって第１のコイル５２Ａに交流電流或いは直流電流を流すと、第１のコイル５２Ａは微粒子計測領域部５６及び第１のセンサ配置部５７Ａ（第１の磁気センサ５４Ａ）に交流又は直流の第１の磁界５８Ａを形成し、また、コイル電源装置５３によって第２のコイル５２Ｂに交流電流或いは直流電流を流すと、第２のコイル５２Ｂは微粒子計測領域部５６及び第２のセンサ配置部５７Ｂ（第２の磁気センサ５４Ｂ）に交流又は直流の第２の磁界５８Ｂを形成する。即ち、微粒子計測領域部５６及び第１のセンサ配置部５７Ａ（第１の磁気センサ５４Ａ）が、第１の磁界５８Ａの中に置かれ、微粒子計測領域部５６及び第２のセンサ配置部５７Ｂ（第２の磁気センサ５４Ｂ）が、第１の磁界５８Ｂの中に置かれる。
【００３１】
但し、第１の磁界５８Ａと第２の磁界５８Ｂは、相互の磁界５８Ａ，５８Ｂの干渉を避けるため、コイル電源装置５３から第１及び第２のコイル５２Ａ，５２Ｂへの通電を交互に切り換えることにより、交互に形成する。この場合、通電の切り換え速度は微粒子５９の流速に応じた適宜の高速度とする。
【００３２】
そして、このとき、微粒子計測領域部５６に微粒子（軸受の金属摩耗粉）５９が存在すると（微粒子計測領域部５６の潤滑油中に微粒子５９が混入していると）、即ち、矢印Ｃのように潤滑油とともに微粒子５９が微粒子計測領域部５６を流れると、この微粒子５９によって第１の磁界５８Ａと第２の磁界５８Ｂとが変化する（乱れる）。微粒子５９の大きさは例えば数１００μｍ程度である。
【００３３】
なお、第１及び第２のコイル５２Ａ，５２Ｂの位置は図示の位置に限定するものではなく、第１及び第２の磁気センサ５４Ａ，５４Ｂの後方などでもよい。また、潤滑油循環ライン（配管）のうちの少なくとも微粒子計測領域部５６はテフロン製などの非磁性、非導電性のもので形成されていることが望ましい。
【００３４】
第１の磁気センサ５４Ａは、磁気抵抗（ＭＲ）素子、大規模磁気抵抗（ＧＭＲ）素子又は磁気インダクタンス（ＭＩ）素子などの第１の磁気センサ素子５４ａを多数マトリクス状に配列してなる平面状の構成であり、微粒子計測領域部５６に存在する微粒子５９によって生じる第１の磁界５８Ａの変化を各第１の磁気センサ素子５４ａによって検出する。即ち、図３中のハッチングが施された第１の磁気センサ素子５４ａは微粒子５９の形状に対応する位置のセンサであり、これらの５１の磁気センサ素子５４ａでは微粒子５９による当該部分の第１の磁界５８Ａの変化に応じて検出値が変化する。
【００３５】
第２の磁気センサ５４Ｂは、磁気抵抗（ＭＲ）素子、大規模磁気抵抗（ＧＭＲ）素子又は磁気インダクタンス（ＭＩ）素子などの第２の磁気センサ素子５４ｂを多数マトリクス状に配列してなる平面状の構成であり、微粒子計測領域部５６に存在する微粒子５９によって生じる第２の磁界５８Ｂの変化を各第２の磁気センサ素子５４ｂによって検出する。即ち、図３中のハッチングが施された第２の磁気センサ素子５４ｂは微粒子５９の形状に対応する位置のセンサであり、これらの第２の磁気センサ素子５４ｂでは微粒子５９による当該部分の第２の磁界５８Ｂの変化に応じて検出値が変化する。
【００３６】
このような平面状（マトリクス状）の第１及び第２の磁気センサ５４Ａ，５４Ｂは、例えば磁界によって抵抗値が変化する磁気抵抗（ＭＲ）の膜を基板上に成膜してエッチングなどを行うことにより、多数の第１及び第２の磁気センサ素子５４ａ，５４ｂを同基板上にマトリクス状に集積することなどによって、構成することができる。
【００３７】
第１及び第２の磁気センサ５４Ａ，５４Ｂの各第１及び第２の磁気センサ素子５４ａ，５４ｂの検出信号は、信号処理装置５５に入力される。信号処理装置５５では、各第１及び第２の磁気センサ素子５４ａ，５４ｂの検出信号を処理することにより、例えば各第１及び第２の磁気センサ素子５４ａ，５４ｂの検出信号レベルと閾値とを比較し、検出信号レベルが閾値を超えた第１及び第２の磁気センサ素子５４ａ，５４ｂにおいて微粒子５９が検知されたと判断するような信号処理をすることにより、図３中にハッチングで示すような微粒子５９の直交する２方向の形状を求める。即ち、各第１及び第２の磁気センサ素子５４ａ，５４ｂの検出信号の変化から微粒子５９の存在領域を推定する。信号処理装置５５で求められた微粒子５９の形状（データ）は、表示・記録装置５０において表示され、且つ、記録される。
【００３８】
従って、本実施の形態２の微粒子形状計測装置５１によれば、微粒子５９のより詳細な形状、即ち、微粒子５９の幅、長さ、厚みを同時に計測することができる。しかも、光学的な計測手法に比べて計測精度が潤滑油循環ラインの汚損に左右されにくい。また、第１及び第２の磁気センサ素子６４ａ，６４ｂの集積度を向上させれば、より詳細（高精度）な微粒子５９の形状計測が可能となる。
【００３９】
＜実施の形態３＞
図４は本発明の実施の形態３に係る微粒子形状計測装置の構成図である。なお、潤滑油循環ラインの構成については、上記実施の形態１（図１参照）と同様であるため、ここでの説明及び図示を省略する。
【００４０】
図４に示すように、本実施の形態３の微粒子形状計測装置７１は磁界形成手段としてのコイル７２及びコイル電源装置７３、磁気センサ７４、信号処理手段としての信号処理装置７５などを有している。
【００４１】
磁気センサ７４は磁気抵抗（ＭＲ）素子、大規模磁気抵抗（ＧＭＲ）素子又は磁気インダクタンス（ＭＩ）素子などの磁気センサ素子７４ａをマトリクス状に配列してなる円筒状の構成であって、潤滑油循環ラインの途中の微粒子計測領域部７６の周囲を囲むようにしてセンサ配置部７７に配置され、微粒子計測領域部７６に存在する例えば数１００μｍ程度の大きさの微粒子７９によって生じる回転磁界７８（詳細は後述するが、前記磁界形成手段によって形成される）の変化を各磁気センサ素子７４ａによって検出する。即ち、微粒子７９の形状に対応する位置の磁気センサ素子７４ａでは、微粒子７９による当該部分の回転磁界７８の変化に応じて検出値が変化する。なお、このような円筒状（マトリクス状）の磁気センサ７４は、例えば磁界によって抵抗値が変化する磁気抵抗（ＭＲ）の膜を基板上に成膜してエッチングなどを行うことにより、多数の磁気センサ素子３４ａを同基板上にマトリクス状に集積し、且つ、円筒状に成形することなどによって、構成することができる。
【００４２】
コイル７２は微粒子計測領域部７６に面し、且つ、円筒状の磁気センサ７４の外周面側に配置されている。そして、コイル７２は図示しないモータなどの適宜の回転駆動手段によって矢印Ｄのように微粒子計測領域部７６及びセンサ配置部７７（磁気センサ７４）の回りをまるようになっている。従って、コイル電源装置７３によってコイル７２に交流電流或いは直流電流を流し、且つ、前記回転駆動手段によってコイル７２を回転させると、微粒子計測領域部７６及びセンサ配置部７７（磁気センサ７４）に交流又は直流の回転磁界７８が形成される。即ち、微粒子計測領域部７６及びセンサ配置部７７（磁気センサ７４）が、回転磁界７８の中に置かれる。
【００４３】
このとき、微粒子計測領域部７６に微粒子（軸受の金属摩耗粉）７９が存在すると（微粒子計測領域部７６の潤滑油中に微粒子７９が混入していると）、即ち、矢印Ｃのように潤滑油とともに微粒子７９が微粒子計測領域部７６を流れると、この微粒子７９によって回転磁界７８が変化する（乱れる）。なお、磁気センサ７４の周囲に同時に磁界を形成せず、回転磁界７８とするのは、磁界相互の干渉を防止するためである。
【００４４】
また、回転磁界７８を形成する磁界形成手段としては、上記のものに限定されず、例えば、コイル７２を磁気センサ７４の周方向に連続的に多数配列して、磁気センサ７４の周囲を囲む円筒状のコイル群を構成し、このコイル群の各コイル７２へのコイル電源装置７３からの通電を順次切り換えていくことによって、回転磁界７８を形成してもよい。なお、回転磁界７８の回転速度（通電の切り換え速度或いはコイル回転速度）は、微粒子７９の流速に応じた適宜の高速度とする。また、潤滑油循環ライン（配管）のうちの少なくとも微粒子計測領域部７６はテフロン製などの非磁性、非導電性のもので形成されていることが望ましい。
【００４５】
磁気センサ７４の各磁気センサ素子７４ａの検出信号は、信号処理装置７５に入力される。信号処理装置７５では、各磁気センサ素子７４ａの検出信号を処理することにより、例えば各磁気センサ素子７４ａの検出信号レベルと閾値とを比較し、検出信号レベルが閾値を超えた磁気センサ素子７４ａにおいて微粒子７９が検知されたと判断するような信号処理をすることにより、微粒子７９の形状を求める。即ち、各磁気センサ素子７４ａの検出信号の変化から微粒子７９の存在領域を推定する。信号処理装置７５で求められた微粒子７９の形状（データ）は、表示・記録装置８０において表示され、且つ、記録される。
【００４６】
従って、本実施の形態３の微粒子形状計測装置７１によれば、微粒子７９のより詳細な形状、即ち、微粒子７９の全周にわたる形状計測を行うことができる。しかも、光学的な計測手法に比べて計測精度が潤滑油循環ラインの汚損に左右されにくい。また、磁気センサ素子７４ａの集積度を向上させれば、より詳細（高精度）な微粒子７９の形状計測が可能となる。
【００４７】
＜実施の形態４＞
図５は本発明の実施の形態４に係る微粒子形状計測装置の構成図である。なお、潤滑油循環ラインの構成については、上記実施の形態１（図１参照）と同様であるため、ここでの説明及び図示を省略する。
【００４８】
図５に示すように、本実施の形態４の微粒子形状計測装置９１は磁界形成手段としてのコイル９２及びコイル電源装置９３、磁気センサ９４、信号処理手段としての信号処理装置９５などを有している。
【００４９】
コイル９２は潤滑油循環ラインの途中の微粒子計測領域部９６に面し、且つ、磁気センサ９４の後方に配置されている。磁気センサ９４はコイル３２と微粒子計測領域部９６の間で微粒子計測領域部９６に面してセンサ配置部９７に配置されている。従って、コイル電源装置９３によってコイル９２に交流電流或いは直流電流を流すと、コイル９２は微粒子計測領域部９６及びセンサ配置部９７（磁気センサ９４）に交流又は直流の磁界９８を形成する。即ち、微粒子計測領域部９６及びセンサ配置部９７（磁気センサ９４）が、磁界９８の中に置かれる。このとき、微粒子計測領域部９６に微粒子（軸受の金属摩耗粉）９９が存在すると（微粒子計測領域部９６の潤滑油中に微粒子９９が混入していると）、即ち、矢印Ｃのように潤滑油とともに微粒子９９が微粒子計測領域部９６を流れると、この微粒子９９によって磁界９８が変化する（乱れる）。微粒子３９の大きさは例えば数１００μｍ程度である。
【００５０】
なお、コイル９２の位置は図示の位置に限定するものではなく、微粒子計測領域部９６を間に挟んで磁気センサ３４と対向する位置でもよい。また、潤滑油循環ライン（配管）のうちの少なくとも微粒子計測領域部９６はテフロン製などの非磁性、非導電性のもので形成されていることが望ましい。
【００５１】
磁気センサ９４は、磁気抵抗（ＭＲ）素子、大規模磁気抵抗（ＧＭＲ）素子又は磁気インダクタンス（ＭＩ）素子などの磁気センサ素子９４ａを多数一列に配列してなる直線状の構成であって、長手方向（配列方向）が微粒子９９の流れ方向（矢印Ｃ方向）と直交するように配置されており、微粒子計測領域部９６に存在する微粒子９９によって生じる磁界９８の変化を各磁気センサ素子９４ａによって検出する。即ち、微粒子９９の形状に対応する位置の磁気センサ素子９４ａでは、微粒子９９による当該部分の磁界９８の変化に応じて検出値が変化する。なお、このような直線状の磁気センサ９４は、例えば磁界によって抵抗値が変化する磁気抵抗（ＭＲ）の膜を基板上に成膜してエッチングなどを行うことにより、多数の磁気センサ素子９４ａを同基板上にマトリクス状に集積し、且つ、そのうちの１列分を切り出すことなどによって構成することができる。
【００５２】
磁気センサ９４の各磁気センサ素子９４ａの検出信号は、信号処理装置９５に入力される。信号処理装置９５では、既知の微粒子９９の流速（潤滑油の流速）、或いは、流速センサで計測した微粒子９９の流速（潤滑油の流速）に基づき、各磁気センサ素子９４ａの検出信号を処理することにより、例えば各磁気センサ素子９４ａの検出信号レベルと閾値とを比較し、検出信号レベルが閾値を超えた磁気センサ素子９４ａにおいて微粒子９９が検知されたと判断するような信号処理をすることにより、微粒子９９の形状を求める。即ち、各磁気センサ素子９４ａの検出信号の変化から微粒子９９の存在領域を推定する。また、信号処理装置９５で求められた微粒子９９の形状（データ）は、表示・記録装置１００において表示され、且つ、記録される。
【００５３】
従って、本実施の形態４の微粒子形状計測装置９１によれば、微粒子９９の詳細な形状、即ち、微粒子９９の幅（又は厚み）及び長さの計測を行うことができる。つまり、平面状（マトリクス状）ではなく直線状（一列）の磁気センサ９４であっても、微粒子９９の流速がわかれば、平面状の磁気センサと同程度の詳細な形状測定が可能である。しかも、光学的な計測手法に比べて計測精度が潤滑油循環ラインの汚損に左右されにくい。また、磁気センサ素子９４ａの集積度を向上させれば、より詳細（高精度）な微粒子９９の形状計測が可能となる。
【００５４】
＜実施の形態５＞
図６は本発明の実施の形態５に係る微粒子形状計測装置の構成図である。なお、潤滑油循環ラインの構成については、上記実施の形態１（図１参照）と同様であるため、ここでの説明及び図示を省略する。
【００５５】
図６に示すように、本実施の形態５の微粒子形状計測装置１０１は第１及び第２の磁界形成手段としての第１及び第２のコイル１０２Ａ，１０２Ｂ及びコイル電源装置１０３、第１及び第２の磁気センサ１０４Ａ，１０４Ｂ、信号処理手段としての信号処理装置１０５などを有している。
【００５６】
第１のコイル１０２Ａは潤滑油循環ラインの途中の微粒子計測領域部１０６の直交方向の一方側に面し、且つ、第１の磁気センサ１０４Ａの後方に配置されている。第２のコイル１０２Ｂは前記直交方向の他方側に面し、且つ、第２の磁気センサ１０４Ｂの後方に配置されている。磁気センサ１０４Ａは微粒子計測領域部１０６の他の直交方向の一方側に位置する第１のセンサ配置部１０７Ａに微粒子計測領域部１０６に面して配置され、第１のコイル１０２Ａと微粒子計測領域部１０６との間に位置している。磁気センサ１０４Ｂは前記他の直交方向の他方側に位置する第２のセンサ配置部１０７Ｂに微粒子計測領域部１０６に面して配置され、第２のコイル１０２Ｂと微粒子計測領域部１０６との間に位置している。
【００５７】
従って、コイル電源装置１０３によって第１のコイル１０２Ａに交流電流或いは直流電流を流すと、第１のコイル１０２Ａは微粒子計測領域部１０６及び第１のセンサ配置部１０７Ａ（第１の磁気センサ１０４Ａ）に交流又は直流の第１の磁界１０８Ａを形成し、また、コイル電源装置１０３によって第２のコイル１０２Ｂに交流電流或いは直流電流を流すと、第２のコイル１０２Ｂは微粒子計測領域部１０６及び第２のセンサ配置部１０７Ｂ（第２の磁気センサ１０４Ｂ）に交流又は直流の第２の磁界１０８Ｂを形成する。即ち、微粒子計測領域部１０６及び第１のセンサ配置部１０７Ａ（第１の磁気センサ１０４Ａ）が、第１の磁界１０８Ａの中に置かれ、微粒子計測領域部１０６及び第２のセンサ配置部１０７Ｂ（第２の磁気センサ１０４Ｂ）が、第１の磁界１０８Ｂの中に置かれる。
【００５８】
但し、第１の磁界１０８Ａと第２の磁界１０８Ｂは、相互の磁界５８Ａ，５８Ｂの干渉を避けるため、コイル電源装置１０３から第１及び第２のコイル１０２Ａ，１０２Ｂへの通電を交互に切り換えることにより、交互に形成する。この場合、通電の切り換え速度は微粒子１０９の流速に応じた適宜の高速度とする。
【００５９】
そして、このとき、微粒子計測領域部１０６に微粒子（軸受の金属摩耗粉）１０９が存在すると（微粒子計測領域部１０６の潤滑油中に微粒子１０９が混入していると）、即ち、矢印Ｃのように潤滑油とともに微粒子１０９が微粒子計測領域部１０６を流れると、この微粒子１０９によって第１の磁界１０８Ａと第２の磁界１０８Ｂとが変化する（乱れる）。微粒子１０９の大きさは例えば数１００μｍ程度である。
【００６０】
なお、第１及び第２のコイル１０２Ａ，１０２Ｂの位置は図示の位置に限定するものではなく、微粒子計測領域部１０６を間に挟んで第１及び第２の磁気センサ１０４Ａ，１０４Ｂとそれぞれ対向する位置でもよい。また、潤滑油循環ライン（配管）のうちの少なくとも微粒子計測領域部１０６はテフロン製などの非磁性、非導電性のもので形成されていることが望ましい。
【００６１】
第１の磁気センサ１０４Ａは、磁気抵抗（ＭＲ）素子、大規模磁気抵抗（ＧＭＲ）素子又は磁気インダクタンス（ＭＩ）素子などの第１の磁気センサ素子１０４ａを多数一列に配列してなる直線状の構成であって、長手方向（配列方向）が微粒子１０９の流れ方向（矢印Ｃ方向）と直交するように配置されており、微粒子計測領域部１０６に存在する微粒子１０９によって生じる第１の磁界１０８Ａの変化を各第１の磁気センサ素子１０４ａによって検出する。即ち、微粒子１０９の形状に対応する位置の第１の磁気センサ素子１０４ａでは、微粒子１０９による当該部分の第１の磁界１０８Ａの変化に応じて検出値が変化する。
【００６２】
第２の磁気センサ１０４Ｂは、磁気抵抗（ＭＲ）素子、大規模磁気抵抗（ＧＭＲ）素子又は磁気インダクタンス（ＭＩ）素子などの第２の磁気センサ素子１０４ｂを多数一列に配列してなる直線状の構成であって、長手方向（配列方向）が微粒子１０９の流れ方向（矢印Ｃ方向）と直交するように配置されており、微粒子計測領域部１０６に存在する微粒子１０９によって生じる第２の磁界１０８Ｂの変化を各第２の磁気センサ素子１０４ｂによって検出する。即ち、微粒子１０９の形状に対応する位置の第２の磁気センサ素子１０４ｂでは、微粒子１０９による当該部分の第２の磁界１０８Ｂの変化に応じて検出値が変化する。
【００６３】
このような直線状の第１及び第２の磁気センサ１０５４Ａ，１０４Ｂは、例えば磁界によって抵抗値が変化する磁気抵抗（ＭＲ）の膜を基板上に成膜してエッチングなどを行うことにより、多数の第１及び第２の磁気センサ素子１０４ａ，１０４ｂを同基板上にマトリクス状に集積し、且つ、そのうちの一列分を切り出すことなどによって、構成することができる。
【００６４】
第１及び第２の磁気センサ１０４Ａ，１０４Ｂの各第１及び第２の磁気センサ素子１０４ａ，１０４ｂの検出信号は、信号処理装置１０５に入力される。信号処理装置１０５では、既知の微粒子１０９の流速（潤滑油の流速）、或いは、流速センサで計測した微粒子１０９の流速（潤滑油の流速）に基づき、各第１及び第２の磁気センサ素子１０４ａ，１０４ｂの検出信号を処理することにより、例えば各第１及び第２の磁気センサ素子１０４ａ，１０４ｂの検出信号レベルと閾値とを比較し、検出信号レベルが閾値を超えた第１及び第２の磁気センサ素子１０４ａにおいて微粒子１０９が検知されたと判断するような信号処理をすることにより、微粒子１０９の直交する２方向の形状を求める。即ち、各磁気センサ素子１０４ａ，１０４ｂの検出信号の変化から微粒子１０９の存在領域を推定する。また、信号処理装置１０５で求められた微粒子１０９の形状（データ）は、表示・記録装置１１０において表示され、且つ、記録される。
【００６５】
従って、本実施の形態５の微粒子形状計測装置１０１によれば、微粒子１０９のより詳細な形状、即ち、微粒子１０９の幅、長さ、厚みを同時に計測することができる。つまり、平面状（マトリクス状）ではなく直線状（一列）の第１及び第２の磁気センサ１０４Ａ，１０４Ｂであっても、微粒子１０９の流速がわかれば、平面状の磁気センサと同程度の詳細な形状測定が可能である。しかも、光学的な計測手法に比べて計測精度が潤滑油循環ラインの汚損に左右されにくい。また、第１及び第２の磁気センサ素子１０４ａ，１０４ｂの集積度を向上させれば、より詳細（高精度）な微粒子１０９の形状計測が可能となる。
【００６６】
＜実施の形態６＞
図７は本発明の実施の形態６に係る微粒子形状計測装置の構成図である。なお、潤滑油循環ラインの構成については、上記実施の形態１（図１参照）と同様であるため、ここでの説明及び図示を省略する。
【００６７】
図７に示すように、本実施の形態６の微粒子形状計測装置１２１は磁界形成手段としてのコイル１２２及びコイル電源装置１２３、磁気センサ１２４、信号処理手段としての信号処理装置１２５などを有している。
【００６８】
磁気センサ１２４は磁気抵抗（ＭＲ）素子、大規模磁気抵抗（ＧＭＲ）素子又は磁気インダクタンス（ＭＩ）素子などの磁気センサ素子１２４ａを多数一列に配列してなる円環状の構成であって、この円環の接線方向が微粒子１２９の流れ方向（矢印Ｃ方向）と直交するように配置され、且つ、潤滑油循環ラインの途中の微粒子計測領域部１２６の周囲を囲むようにしてセンサ配置部１２７に配置されており、微粒子計測領域部１２６に存在する例えば数１００μｍ程度の大きさの微粒子１２９によって生じる回転磁界１２８（詳細は後述するが、前記磁界形成手段によって形成される）の変化を各磁気センサ素子１２４ａによって検出する。即ち、微粒子１２９の形状に対応する位置の磁気センサ素子１２４ａでは、微粒子１２９による当該部分の回転磁界１２８の変化に応じて検出値が変化する。
【００６９】
なお、このような円環状の磁気センサ１２４は、例えば磁界によって抵抗値が変化する磁気抵抗（ＭＲ）の膜を基板上に成膜してエッチングなどを行うことにより、多数の磁気センサ素子１２４ａを同基板上にマトリクス状に集積し、且つ、そのうちの一列を切り出して円環状に成形することなどによって、構成することができる。
【００７０】
コイル１２２は微粒子計測領域部１２６に面し、且つ、円環状の磁気センサ１２４の外周側に配置されている。そして、コイル１２２は図示しないモータなどの適宜の回転駆動手段によって矢印Ｄのように微粒子計測領域部１２６及びセンサ配置部１２７（磁気センサ１２４）の回りをまるようになっている。従って、コイル電源装置１２３によってコイル１２２に交流電流或いは直流電流を流し、且つ、前記回転駆動手段によってコイル１２２を回転させると、微粒子計測領域部１２６及びセンサ配置部１２７（磁気センサ１２４）に交流又は直流の回転磁界１２８が形成される。即ち、微粒子計測領域部１２６及びセンサ配置部１２７（磁気センサ１２４）が、回転磁界１２８の中に置かれる。
【００７１】
このとき、微粒子計測領域部１２６に微粒子（軸受の金属摩耗粉）１２９が存在すると（微粒子計測領域部１２６の潤滑油中に微粒子１２９が混入していると）、即ち、矢印Ｃのように潤滑油とともに微粒子１２９が微粒子計測領域部１２６を流れると、この微粒子１２９によって回転磁界１２８が変化する（乱れる）。なお、磁気センサ１２４の周囲に同時に磁界を形成せず、回転磁界１２８とするのは、磁界相互の干渉を防止するためである。
【００７２】
また、回転磁界１２８を形成する磁界形成手段としては、上記のものに限定されず、例えば、コイル１２２を磁気センサ１２４の周方向に連続的に多数配列して、磁気センサ１２４の周囲を囲む円環状のコイル群を構成し、このコイル群の各コイル１２２へのコイル電源装置１２３からの通電を順次切り換えていくことによって、回転磁界１２８を形成してもよい。なお、回転磁界１２８の回転速度（通電の切り換え速度或いはコイル回転速度）は、微粒子１２９の流速に応じた適宜の高速度とする。また、潤滑油循環ライン（配管）のうちの少なくとも微粒子計測領域部１２６はテフロン製などの非磁性、非導電性のもので形成されていることが望ましい。
【００７３】
磁気センサ１２４の各磁気センサ素子１２４ａの検出信号は、信号処理装置１２５に入力される。信号処理装置１２５では、各磁気センサ素子１２４ａの検出信号を処理することにより、例えば各磁気センサ素子１２４ａの検出信号レベルと閾値とを比較し、検出信号レベルが閾値を超えた磁気センサ素子１２４ａにおいて微粒子１２９が検知されたと判断するような信号処理をすることにより、微粒子１２９の形状を求める。即ち、各磁気センサ素子１２４ａの検出信号の変化から微粒子１２９の存在領域を推定する。また、信号処理装置１２５で求められた微粒子１２９の形状（データ）は、表示・記録装置１３０において表示され、且つ、記録される。
【００７４】
従って、本実施の形態６の微粒子形状計測装置１２１によれば、微粒子１２９のより詳細な形状、即ち、微粒子１２９の全周にわたる形状計測を行うことができる。つまり、円筒状（マトリクス状）ではなく円環状（一列）の磁気センサ１２４であっても、微粒子１２９の流速がわかれば、円筒状の磁気センサと同程度の詳細な形状測定が可能である。しかも、光学的な計測手法に比べて計測精度が潤滑油循環ラインの汚損に左右されにくい。また、磁気センサ素子１２４ａの集積度を向上させれば、より詳細（高精度）な微粒子１２９の形状計測が可能となる。
【００７５】
＜実施の形態７＞
図８は本発明の実施の形態７に係る微粒子形状計測装置の構成図である。なお、潤滑油循環ラインの構成については、上記実施の形態１（図１参照）と同様であるため、ここでの説明及び図示を省略する。
【００７６】
図８に示すように、本実施の形態７の微粒子形状計測装置１４１は磁界形成手段としての磁界形成部１４２及びコイル電源装置１４３、磁気センサ１４４、信号処理手段としての信号処理装置１４５などを有している。
【００７７】
磁気センサ１４４は上記実施の形態１の磁気センサ３４と同様の構成、即ち、磁気抵抗（ＭＲ）素子、大規模磁気抵抗（ＧＭＲ）素子又は磁気インダクタンス（ＭＩ）素子などの磁気センサ素子３４ａを多数マトリクス状に配列してなる平面状の構成である。一方、磁界形成部１４２は、多数のコイル素子１４２ａを磁気センサ１４４の各磁気センサ素子１４４ａに対応させてマトリクス状に配列してなる平面状の構成である。そして、この磁界形成部１４２と磁気センサ１４４とが一体的に構成され、潤滑油循環ラインの途中の微粒子計測領域部１４６に面してセンサ配置部１４７に配置されている。
【００７８】
なお、磁気センサ１４４は、例えば磁界によって抵抗値が変化する磁気抵抗（ＭＲ）の膜を基板上に成膜してエッチングなどを行うことにより、多数の磁気センサ素子１４４４ａを同基板上にマトリクス状に集積することなどによって、構成することができ、また、磁界形成部１４２は、例えば導電体の膜を基板上に成膜してエッチングなどを行うことにより、多数のコイル素子１４２ａをマトリクス状に集積することなどによって、構成することができる。
【００７９】
コイル電源装置１４３によって磁界形成部１４２の各コイル素子１４２ａに交流電流或いは直流電流を流すと、各コイル素子１４２ａは微粒子計測領域部１４６及びセンサ配置部１４７（磁気センサ１４４の各磁気センサ素子１４４ａ）に交流又は直流の磁界１４８を形成する。即ち、微粒子計測領域部１４６及びセンサ配置部１４７（磁気センサ１４４の各磁気センサ素子１４４ａ）が、磁界１４８の中に置かれる。
【００８０】
このとき、微粒子計測領域部１４６に微粒子（軸受の金属摩耗粉）１４９が存在すると（微粒子計測領域部１４６の潤滑油中に微粒子１４９が混入していると）、即ち、矢印Ｃのように潤滑油とともに微粒子１４９が微粒子計測領域部１４６を流れると、この微粒子１４９によって磁界１４８が変化する（乱れる）。微粒子１４９の大きさは例えば数１００μｍ程度である。
【００８１】
コイル電源装置１４３から磁界形成部１４２の各コイル素子１４２ａへの通電は順次行い、各コイル素子１４２ａが、順次、当該位置において順次磁界１４８を発生するため、磁界相互の干渉は防止される。なお、この場合、通電の切り換え速度は微粒子１４９の流速に応じた適宜の高速度とする。また、潤滑油循環ライン（配管）のうちの少なくとも微粒子計測領域部１４６はテフロン製などの非磁性、非導電性のもので形成されていることが望ましい。
【００８２】
そして、磁気センサ１４４では、微粒子計測領域部１４６に存在する微粒子１４９によって生じる磁界１４８の変化を各磁気センサ素子１４４ａによって検出する。即ち、微粒子１４９の形状に対応する位置の磁気センサ素子１４４ａでは、微粒子１４９による当該部分の磁界１４８の変化に応じて検出値が変化する。
【００８３】
磁気センサ１４４の各磁気センサ素子１４４ａの検出信号は、信号処理装置１４５に入力される。信号処理装置１４５では、各磁気センサ素子１４４ａの検出信号を処理することにより（例えば各磁気センサ素子１４４ａの検出信号レベルと閾値とを比較し、検出信号レベルが閾値を超えた磁気センサ素子１４４ａにおいて微粒子１４９が検知されたと判断するような信号処理をすることにより）、微粒子１４９の形状を求める。即ち、各磁気センサ素子１４４ａの検出信号の変化から微粒子１４９の存在領域を推定する。また、信号処理装置１４５で求められた微粒子１４９の形状（データ）は、表示・記録装置１５０において表示され、且つ、記録される。
【００８４】
従って、本実施の形態７の微粒子形状計測装置１４１によれば、微粒子３９の詳細な形状、即ち、微粒子３９の幅（又は厚み）及び長さを計測を行うことができる。しかも、磁界形成部１４２の各コイル素子１４２ａにより、磁気センサ１４４の各磁気センサ素子１４４ａに対して個別に磁界１４８を形成するため、より精度のよい形状計測が可能であり、装置全体の小型化を図ることもできる。また、光学的な計測手法に比べて計測精度が潤滑油循環ラインの汚損に左右されにくい。また、磁気センサ素子１４４ａ及びコイル素子１４２ａの集積度を向上させれば、より詳細（高精度）な微粒子１４９の形状計測が可能となる。
【００８５】
なお、上記実施の形態２〜６の磁気センサ素子５４Ａ，５４Ｂ，７４，９４，１０４Ａ，１０４Ｂ，１２４に対しても、多数のコイル素子を配列してなる磁界形成部を一体的に設けることができる。
【００８６】
即ち、図示は省略するが、多数のコイル素子を平面状、円筒状、直線状又は円環状の磁気センサ５４Ａ，５４Ｂ，７４，９４，１０４Ａ，１０４Ｂ，１２４の各磁気センサ素子５４ａ，５４ｂ，７４ａ，９４ａ，１０４ａ，１０４ｂ，１２４ａに各々に対応させてマトリクス状又は一列に配列してなる平面状、円筒状、直線状又は円環状の磁界形成部と、前記平面状、円筒状、直線状又は円環状の磁気センサ５４Ａ，５４Ｂ，７４，９４，１０４Ａ，１０４Ｂ，１２４とを一体的に構成し、前記磁界形成部の各コイル素子に順次通電して磁界又は回転磁界を形成するように構成してもよい。
【００８７】
また、微粒子が、軸受の摩耗粉などのような金属粉ではなく、例えばセラミックス粉などの非金属粉などであっても、この微粒子と潤滑油などの液体や気体との比誘電率の違いにより、磁界の変化を生じるため、本発明による形状計測が可能である。
【００８８】
また、磁界形成手段しては、コイルを用いた電磁石に限らず、用途に応じて永久磁石を用いてもよい。例えば、上記実施の形態１，４ではコイル３２，９２に代えて永久磁石を用いてもよい。
【００８９】
【発明の効果】
以上、実施の形態とともに具体的に説明したように、第１発明の微粒子形状計測装置によれば、微粒子計測領域部及びセンサ配置部に磁界を形成する磁界形成手段と、多数の磁気センサ素子をマトリクス状に配列してなる平面状の構成であって、前記微粒子計測領域部に面して前記センサ配置部に配置され、前記微粒子計測領域部に存在する微粒子によって生じる前記磁界の変化を各磁気センサ素子によって検出する磁気センサと、この磁気センサの各磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とするため、微粒子の詳細な形状計測を行うことができる。しかも、光学的な計測手法に比べて計測精度が潤滑油循環ライン等の汚損に左右されにくい。また、磁気センサ素子の集積度を向上させれば、より詳細（高精度）な微粒子の形状計測が可能となる。
【００９０】
また、第２発明の微粒子形状計測装置によれば、微粒子計測領域部及びこの微粒子計測領域部の直交方向の一方側に位置する第１のセンサ配置部に第１の磁界を形成する第１の磁界形成手段と、前記微粒子計測領域部及び前記直交方向の他方側に位置する第２のセンサ配置部に第２の磁界を形成する第２磁界形成手段と、多数の第１の磁気センサ素子をマトリクス状に配列してなる平面状の構成であって、前記微粒子計測領域部に面して前記第１のセンサ配置部に配置され、前記微粒子計測領域部に存在する微粒子によって生じる前記第１の磁界の変化を各第１の磁気センサ素子によって検出する第１の磁気センサと、多数の第２の磁気センサ素子をマトリクス状に配列してなる平面状の構成であって、前記微粒子計測領域部に面して前記第２のセンサ配置部に配置され、前記微粒子計測領域部に存在する微粒子によって生じる前記第２の磁界の変化を各第２の磁気センサ素子によって検出する第２の磁気センサと、前記第１の磁気センサ及び第２の磁気センサの各第１及び第２の磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とするため、微粒子のより詳細な形状計測が可能となる。しかも、光学的な計測手法に比べて計測精度が潤滑油循環ライン等の汚損に左右されにくい。また、第１及び第２の磁気センサ素子の集積度を向上させれば、より詳細（高精度）な微粒子の形状計測が可能となる。
【００９１】
また、第３発明の微粒子形状計測装置によれば、微粒子計測領域部及びセンサ配置部の回りに回転磁界を形成する磁界形成手段と、多数の磁気センサ素子をマトリクス状に配列してなる円筒状の構成であって、前記微粒子計測領域部の周囲を囲むようにして前記センサ配置部に配置され、前記微粒子計測領域部に存在する微粒子によって生じる前記回転磁界の変化を各磁気センサ素子によって検出する磁気センサと、この磁気センサの各磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とするため、微粒子の全周にわたる詳細な形状計測を行うことができる。しかも、光学的な計測手法に比べて計測精度が潤滑油循環ライン等の汚損に左右されにくい。また、磁気センサ素子の集積度を向上させれば、より詳細（高精度）な微粒子の形状計測が可能となる。
【００９２】
また、第４発明の微粒子形状計測装置は、微粒子計測領域部及びセンサ配置部に磁界を形成する磁界形成手段と、多数の磁気センサ素子を一列に配列してなる直線状の構成であって、前記微粒子計測領域部に面して前記センサ配置部に配置され、前記微粒子計測領域部を流体とともに流れる微粒子によって生じる前記磁界の変化を各磁気センサ素子によって検出する磁気センサと、前記微粒子の流速に基づき、前記磁気センサの各磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とするため、微粒子の詳細な形状計測を行うことができる。つまり、平面状（マトリクス状）ではなく直線状（一列）の磁気センサであっても、微粒子の流速がわかれば、平面状の磁気センサと同程度の詳細な形状測定が可能である。しかも、光学的な計測手法に比べて計測精度が潤滑油循環ライン等の汚損に左右されにくい。また、磁気センサ素子の集積度を向上させれば、より詳細（高精度）な微粒子の形状計測が可能となる。
【００９３】
また、第５発明の微粒子形状計測装置は、微粒子計測領域部及びこの微粒子計測領域部の直交方向の一方側に位置する第１のセンサ配置部に第１の磁界を形成する第１の磁界形成手段と、前記微粒子計測領域部及び前記直交方向の他方側に位置する第２のセンサ配置部に第２の磁界を形成する第２磁界形成手段と、多数の第１の磁気センサ素子を一列に配列してなる直線状の構成であって、前記微粒子計測領域部に面して前記第１のセンサ配置部に配置され、前記微粒子計測領域部を流体とともに流れる微粒子によって生じる前記第１の磁界の変化を各第１の磁気センサ素子によって検出する第１の磁気センサと、多数の第２の磁気センサ素子を一列に配列してなる直線状の構成であって、前記微粒子計測領域部に面して前記第２のセンサ配置部に配置され、前記微粒子によって生じる前記第２の磁界の変化を各第２の磁気センサ素子によって検出する第２の磁気センサと、前記微粒子の流速に基づき、前記第１の磁気センサ及び第２の磁気センサの各第１及び第２の磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とするため、微粒子のより詳細な形状計測が可能となる。つまり、平面状（マトリクス状）ではなく直線状（一列）の第１及び第２の磁気センサであっても、微粒子の流速がわかれば、平面状の磁気センサと同程度の詳細な形状測定が可能である。しかも、光学的な計測手法に比べて計測精度が潤滑油循環ライン等の汚損に左右されにくい。また、第１及び第２の磁気センサ素子の集積度を向上させれば、より詳細（高精度）な微粒子の形状計測が可能となる。
【００９４】
また、第６発明の微粒子形状計測装置は、微粒子計測領域部及びセンサ配置部の回りに回転磁界を形成する磁界形成手段と、多数の磁気センサ素子を一列に配列してなる円環状の構成であって、前記微粒子計測領域部の周囲を囲むようにして前記センサ配置部に配置され、前記微粒子計測領域部を流体とともに流れる微粒子によって生じる前記回転磁界の変化を各磁気センサ素子によって検出する磁気センサと、前記微粒子の流速に基づき、前記磁気センサの各磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とするため、微粒子のの全周にわたる詳細な形状計測を行うことができる。つまり、円筒状（マトリクス状）ではなく円環状（一列）の磁気センサであっても、微粒子の流速がわかれば、円筒状の磁気センサと同程度の詳細な形状測定が可能である。しかも、光学的な計測手法に比べて計測精度が潤滑油循環ライン等の汚損に左右されにくい。また、磁気センサ素子の集積度を向上させれば、より詳細（高精度）な微粒子の形状計測が可能となる。
【００９５】
また、第７発明の微粒子形状計測装置は、第１〜第６発明の何れかの微粒子形状計測装置において、前記磁界形成手段は多数のコイル素子を前記平面状、円筒状、直線状又は円環状の磁気センサの各磁気センサ素子に各々に対応させてマトリクス状又は一列に配列してなる平面状、円筒状、直線状又は円環状の磁界形成部であり、この磁界形成部と、前記平面状、円筒状、直線状又は円環状の磁気センサとを一体的に構成し、前記磁界形成部の各コイル素子に順次通電して前記磁界又は回転磁界を形成するように構成したことを特徴とするため、微粒子の詳細な形状計測を行うことができる。しかも、磁界形成部の各コイル素子により、磁気センサの各磁気センサ素子に対して個別に磁界を形成するため、より精度のよい形状計測が可能であり、装置全体の小型化を図ることもできる。また、光学的な計測手法に比べて計測精度が潤滑油循環ライン等の汚損に左右されにくい。また、磁気センサ素子及びコイル素子の集積度を向上させれば、より詳細（高精度）な微粒子の形状計測が可能となる。
【図面の簡単な説明】
【図１】本発明の実施の形態１に係る微粒子形状計測装置を備えた潤滑油循環ラインの構成図である。
【図２】本発明の実施の形態１に係る微粒子形状計測装置の構成図である。
【図３】本発明の実施の形態２に係る微粒子形状計測装置の構成図である。
【図４】本発明の実施の形態３に係る微粒子形状計測装置の構成図である。
【図５】本発明の実施の形態４に係る微粒子形状計測装置の構成図である。
【図６】本発明の実施の形態５に係る微粒子形状計測装置の構成図である。
【図７】本発明の実施の形態６に係る微粒子形状計測装置の構成図である。
【図８】本発明の実施の形態７に係る微粒子形状計測装置の構成図である。
【図９】従来の微粒子形状計測装置の構成図である。
【図１０】従来の他の微粒子形状計測装置の構成図である。
【符号の説明】
２１　エアヒータ
２２　駆動装置
２３　ロータ
２４　回転軸
２５　下部主軸受
２６　ハウジング
２７　上部主軸受
２８　潤滑油循環ライン
２９　ポンプ
３０　潤滑油
３１　微粒子形状計測装置
３２　コイル
３３　コイル電源装置
３４　磁気センサ
３４ａ　磁気センサ素子
３５　信号処理装置
３６　微粒子計測領域部
３７　センサ配置部
３８　磁界
３９　微粒子
４０　表示・記録装置
５１　微粒子形状計測装置
５２Ａ　第１のコイル
５２Ｂ　第２のコイル
５３　コイル電源装置
５４Ａ　第１の磁気センサ
５４Ｂ　第２の磁気センサ
５４ａ　第１の磁気センサ素子
５４ｂ　第２の磁気センサ素子
５５　信号処理装置
５６　微粒子計測領域部
５７Ａ　第１のセンサ配置部
５７Ｂ　第２のセンサ配置部
５８Ａ　第１の磁界
５８Ｂ　第２の磁界
５９　微粒子
６０　表示・記録装置
７１　微粒子形状計測装置
７２　コイル
７３　コイル電源装置
７４　磁気センサ
７４ａ　磁気センサ素子
７５　信号処理装置
７６　微粒子計測領域部
７７　センサ配置部
７８　回転磁界
７９　微粒子
８０　表示・記録装置
９１　微粒子形状計測装置
９２　コイル
９３　コイル電源装置
９４　磁気センサ
９４ａ　磁気センサ素子
９５　信号処理装置
９６　微粒子計測領域部
９７　センサ配置部
９８　磁界
９９　微粒子
１００　表示・記録装置
１０１　微粒子形状計測装置
１０２Ａ　第１のコイル
１０２Ｂ　第２のコイル
１０３　コイル電源装置
１０４Ａ　第１の磁気センサ
１０４Ｂ　第２の磁気センサ
１０４ａ　第１の磁気センサ素子
１０４ｂ　第２の磁気センサ素子
１０５　信号処理装置
１０６　微粒子計測領域部
１０７Ａ　第１のセンサ配置部
１０７Ｂ　第２のセンサ配置部
１０８Ａ　第１の磁界
１０８Ｂ　第２の磁界
１０９　微粒子
１１０　表示・記録装置
１２１　微粒子形状計測装置
１２２　コイル
１２３　コイル電源装置
１２４　磁気センサ
１２４ａ　磁気センサ素子
１２５　信号処理装置
１２６　微粒子計測領域部
１２７　センサ配置部
１２８　回転磁界
１２９　微粒子
１３０　表示・記録装置
１４１　微粒子形状計測装置
１４２　磁界形成部
１４２ａ　コイル素子
１４３　　コイル電源装置
１４４　磁気センサ
１４４ａ　磁気センサ素子
１４５　信号処理装置
１４６　微粒子計測領域部
１４７　センサ配置部
１４８　磁界
１４９　微粒子
１５０　表示・記録装置[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a fine particle shape measuring device, which is useful when applied to a case of measuring the shape of fine particles such as metal abrasion powder mixed in bearing lubricating oil, and is provided, for example, in a lubricating oil management system and a maintenance system. The present invention can be applied to a fine particle shape measuring device and the like.
[0002]
[Prior art]
For example, in a thermal power plant, a configuration in which a rotating shaft is rotatably supported by a bearing, such as an air heater (see FIG. 1) used to preheat air supplied to a boiler with residual heat generated in the power plant to increase thermal efficiency. Many of these devices are provided, and in these devices, during operation, fine particles such as metal abrasion powder of the bearing may be mixed into the lubricating oil of the bearing to cause problems such as seizure of the bearing. For this reason, an important device such as an air heater is equipped with a lubricating oil management system that manages the state of the lubricating oil by measuring fine particles mixed in the circulating lubricating oil.
[0003]
Conventionally, as a device for measuring fine particles in a fluid such as lubricating oil, a device that detects a change in a magnetic field due to the fine particles is known (for example, see Patent Document 1).
[0004]
[Patent Document 1]
JP-A-2000-171382
[0005]
FIG. 9 shows an outline of the measurement technique disclosed in Patent Document 1. As shown in FIG. 9 (a), an alternating magnetic field is generated by the field coils 1a and 1b, and lubrication is applied to the forward path (inclined portion) 3a and the return path (non-inclined portion) 3b of the Teflon (trade name) tube 3 in this coil. By flowing the fine particles 2 together with the oil, the posture of the fine particles 2 with respect to the magnetic field is changed as shown in FIGS. 9B and 9C. Then, the change in the magnetic field caused by the fine particles 2 is detected as an electromotive force by the sensing coil 4 as shown in FIG. As a result, electromotive forces A and B as shown in FIG. 9D are obtained. From the ratio of the electromotive forces A and B, the aspect ratio of the fine particles 2 as shown in FIG. Ratio of the short axis diameter), that is, the length (degree of circularity) can be obtained.
[0006]
FIG. 10 shows an outline of another conventional measurement technique. As shown in FIG. 10A, a magnetic field 14 is formed by a coil 11 in the middle of a pipe 12 through which the lubricating oil flows (particulate measurement area) and at the position where the magnetic sensor 13 is disposed. A change in the magnetic field 14 caused by the flowing fine particles 15 is detected by the magnetic sensor 13. As a result, a detection signal of the magnetic sensor 13 as shown in FIG. 10B is obtained, and the length of the fine particles 15 is detected based on this detection signal and the known flow rate of the lubricating oil (fine particles 15). be able to.
[0007]
In addition to the above-described method of detecting a change in magnetic field due to fine particles, a change in electrical resistance when fine particles pass through a small-diameter inspection region is detected, and a signal at the time of passing the fine particles is used as a trigger to optically detect the change. There are Beckman Coulter, which measures the shape of fine particles, and Spectro, which measures the shape of fine particles using an optical sensor.
[0008]
[Problems to be solved by the invention]
However, although the above-described conventional shape measuring device can detect the size of the fine particles, it cannot perform detailed shape measurement of the fine particles. In addition, Beckman Coulter's and Spectro's are considered to be inferior in applicability because they are optical measurements and are susceptible to contamination of a lubricating oil line to be measured when applied to an actual machine.
[0009]
Accordingly, it is an object of the present invention to provide a fine particle shape measuring apparatus capable of detecting a change in a magnetic field due to fine particles and reliably performing detailed shape measurement of the fine particles.
[0010]
[Means for Solving the Problems]
A fine particle shape measuring apparatus according to a first aspect of the present invention that solves the above-mentioned problems includes:
A planar configuration in which a large number of magnetic sensor elements are arranged in a matrix, wherein the magnetic sensor elements are arranged in the sensor arrangement portion facing the fine particle measurement region portion, and are generated by the fine particles present in the fine particle measurement region portion. A magnetic sensor that detects a change in a magnetic field with each magnetic sensor element;
Signal processing means for processing the detection signal of each magnetic sensor element of the magnetic sensor to determine the shape of the fine particles.
[0011]
Further, the fine particle shape measuring apparatus according to the second aspect of the present invention provides a first magnetic field forming device for forming a first magnetic field in a fine particle measuring region and a first sensor disposing portion located on one side in a direction orthogonal to the fine particle measuring region. Means,
Second magnetic field forming means for forming a second magnetic field in the fine particle measurement region and a second sensor arrangement portion located on the other side in the orthogonal direction;
A planar configuration in which a large number of first magnetic sensor elements are arranged in a matrix, the first magnetic sensor elements being arranged in the first sensor arrangement portion facing the fine particle measurement region portion, and being disposed in the fine particle measurement region portion. A first magnetic sensor for detecting a change in the first magnetic field caused by the existing fine particles by each first magnetic sensor element;
A planar configuration in which a large number of second magnetic sensor elements are arranged in a matrix, and are arranged in the second sensor disposition section so as to face the fine particle measurement area section, and are provided in the fine particle measurement area section. A second magnetic sensor for detecting a change in the second magnetic field caused by the existing fine particles by each second magnetic sensor element;
Signal processing means for processing detection signals of the first and second magnetic sensor elements of the first magnetic sensor and the second magnetic sensor to obtain the shape of the fine particles.
[0012]
Also, the fine particle shape measuring device of the third invention is a magnetic field forming means for forming a rotating magnetic field around the fine particle measuring region and the sensor arrangement portion,
A cylindrical configuration in which a large number of magnetic sensor elements are arranged in a matrix. A magnetic sensor for detecting a change in the rotating magnetic field by each magnetic sensor element;
Signal processing means for processing the detection signal of each magnetic sensor element of the magnetic sensor to determine the shape of the fine particles.
[0013]
In addition, the fine particle shape measuring device according to a fourth aspect of the present invention includes: a magnetic field forming unit that forms a magnetic field in the fine particle measurement area and the sensor placement unit;
A linear configuration in which a number of magnetic sensor elements are arranged in a line, and the magnetic sensor elements are arranged in the sensor disposition portion facing the fine particle measurement region portion, and are generated by the fine particles flowing together with the fluid in the fine particle measurement region portion. A magnetic sensor for detecting a change in the magnetic field by each magnetic sensor element,
Signal processing means for processing a detection signal of each magnetic sensor element of the magnetic sensor based on the flow velocity of the fine particles to obtain a shape of the fine particles.
[0014]
Further, the particle shape measuring apparatus according to a fifth aspect of the present invention provides a first magnetic field forming device that forms a first magnetic field in a particle measuring region and a first sensor disposing portion located on one side in a direction orthogonal to the particle measuring region. Means,
Second magnetic field forming means for forming a second magnetic field in the fine particle measurement region and a second sensor arrangement portion located on the other side in the orthogonal direction;
A linear configuration in which a number of first magnetic sensor elements are arranged in a line, the first magnetic sensor elements being arranged in the first sensor disposing portion facing the fine particle measurement region portion, and the fine particle measurement region portion being fluidized A first magnetic sensor for detecting, by each first magnetic sensor element, a change in the first magnetic field caused by fine particles flowing therewith;
A linear configuration in which a number of second magnetic sensor elements are arranged in a line, the second magnetic sensor elements being arranged in the second sensor arrangement portion facing the fine particle measurement region portion, wherein the second magnetic field generated by the fine particles is A second magnetic sensor for detecting a change in the magnetic field of each of the second magnetic sensor element,
Signal processing means for processing a detection signal of each of the first and second magnetic sensor elements of the first magnetic sensor and the second magnetic sensor based on the flow velocity of the fine particles to determine the shape of the fine particles. It is characterized by.
[0015]
Further, the fine particle shape measuring apparatus according to a sixth aspect of the present invention includes: a magnetic field forming unit that forms a rotating magnetic field around the fine particle measurement area and the sensor arrangement unit;
An annular configuration in which a number of magnetic sensor elements are arranged in a line. The magnetic sensor elements are arranged in the sensor placement section so as to surround the periphery of the particle measurement area, and are generated by particles flowing along with the fluid in the particle measurement area. A magnetic sensor for detecting a change in the rotating magnetic field by each magnetic sensor element;
Signal processing means for processing a detection signal of each magnetic sensor element of the magnetic sensor based on the flow velocity of the fine particles to obtain a shape of the fine particles.
[0016]
Further, the fine particle shape measuring device of the seventh invention is the fine particle shape measuring device of any of the first to sixth inventions,
The magnetic field forming means includes a plurality of coil elements arranged in a matrix or a line arranged in a matrix or in a row corresponding to the respective magnetic sensor elements of the planar, cylindrical, linear or annular magnetic sensors. A linear or annular magnetic field forming portion, and the magnetic field forming portion and the planar, cylindrical, linear or annular magnetic sensor are integrally configured,
It is characterized in that each coil element of the magnetic field forming section is sequentially energized to form the magnetic field or the rotating magnetic field.
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0018]
<Embodiment 1>
FIG. 1 is a configuration diagram of a lubricating oil circulation line provided with a particle shape measuring device according to Embodiment 1 of the present invention, and FIG. 2 is a configuration diagram of a particle shape measuring device according to Embodiment 1 of the present invention.
[0019]
FIG. 1 shows, as an example, a schematic configuration in a case where the particle shape measuring device of the first embodiment is provided in a lubricating oil circulation line of an air heater of a thermal power plant. As shown in FIG. 1, the air heater 21 is configured to rotate a rotor 23 by a driving device 22, thereby rotating a rotation shaft 24 rotatably supported by a lower main bearing 25. In FIG. 1, 26 is a housing, and 27 is an upper main bearing.
[0020]
The lower main bearing 25 is immersed in a lubricating oil 30 as schematically shown by dots. The fine particles (metal wear powder of the lower main bearing 25) mixed in the oil 30 are measured by a fine particle shape measuring device 31 provided in the middle of the lubricating oil circulation line 28.
[0021]
As shown in FIG. 2, the fine particle shape measuring device 31 of the first embodiment includes a coil 32 and a coil power supply device 33 as a magnetic field forming means, a magnetic sensor 34, a signal processing device 35 as a signal processing means, and the like. I have.
[0022]
The coil 32 is disposed so as to face one side of the fine particle measurement area 36 in the middle of the lubricating oil circulation line 28, and the magnetic sensor 34 is arranged so as to face the coil 32 with the fine particle measurement area 36 interposed therebetween. The sensor 36 is arranged on the sensor arrangement part 37 so as to face the other side of the part 36. Therefore, when an alternating current or a direct current is caused to flow through the coil 32 by the coil power supply device 33, the coil 32 forms an alternating or direct magnetic field 38 in the fine particle measurement area portion 36 and the sensor arrangement portion 37 (magnetic sensor 34). That is, the fine particle measurement area 36 and the sensor placement section 37 (magnetic sensor 34) are placed in the magnetic field 38. At this time, if the fine particles (metal abrasion powder of the lower main bearing 25) 39 exist in the fine particle measurement region 36 (the fine particles 39 are mixed in the lubricating oil 30 in the fine particle measurement region 36), that is, the arrow C When the fine particles 39 flow through the fine particle measurement region 36 together with the lubricating oil 30, the magnetic field 38 is changed (disturbed) by the fine particles 39. The size of the fine particles 39 is, for example, about several 100 μm.
[0023]
The position of the coil 32 is not limited to the illustrated position, but may be behind the magnetic sensor 34 or the like. Further, it is desirable that at least the particle measurement area 36 of the lubricating oil circulation line (pipe) 28 is formed of a non-magnetic or non-conductive material such as Teflon.
[0024]
The magnetic sensor 34 has a planar configuration in which a large number of magnetic sensor elements 34a such as a magnetoresistive (MR) element, a large-scale magnetoresistive (GMR) element, and a magnetic inductance (MI) element are arranged in a matrix. The change of the magnetic field 38 caused by the fine particles 39 present in the measurement area 36 is detected by each magnetic sensor element 34a. That is, the hatched magnetic sensor element 34a in FIG. 2 is a sensor at a position corresponding to the shape of the fine particles 39, and these magnetic sensor elements 34a detect in accordance with the change in the magnetic field 38 of the corresponding portion due to the fine particles 39. The value changes. Note that such a planar (matrix) magnetic sensor 34 has a large number of magnetic sensors by, for example, forming a film of a magnetic resistance (MR) whose resistance value changes by a magnetic field on a substrate and performing etching or the like. It can be configured by integrating the elements 34a in a matrix on the same substrate.
[0025]
The detection signal of each magnetic sensor element 34 a of the magnetic sensor 34 is input to the signal processing device 35. In the signal processing device 35, by processing the detection signal of each magnetic sensor element 34a, for example, the detection signal level of each magnetic sensor element 34a is compared with a threshold, and in the magnetic sensor element 34a whose detection signal level exceeds the threshold, By performing signal processing for determining that the fine particles 39 have been detected, the shape of the fine particles 39 as shown by hatching in FIG. 2 is obtained. That is, the existence area of the fine particles 39 is estimated from the change in the detection signal of each magnetic sensor element 34a. The shape (data) of the fine particles 39 obtained by the signal processing device 35 is displayed and recorded by the display / recording device 40.
[0026]
Therefore, according to the fine particle shape measuring device 31 of the first embodiment, the detailed shape of the fine particles 39, that is, the width (or thickness) and length of the fine particles 39 can be measured. In addition, the measurement accuracy is less affected by the contamination of the lubricating oil circulation line 28 as compared with the optical measurement method. Further, if the degree of integration of the magnetic sensor element 34a is improved, more detailed (high accuracy) shape measurement of the fine particles 39 can be performed.
[0027]
<Embodiment 2>
FIG. 3 is a configuration diagram of a particle shape measuring apparatus according to Embodiment 2 of the present invention. Note that the configuration of the lubricating oil circulation line is the same as that of the first embodiment (see FIG. 1), and thus description and illustration thereof are omitted here.
[0028]
As shown in FIG. 3, the fine particle shape measuring device 51 of the second embodiment includes first and second coils 52A and 52B and a coil power supply device 53 as first and second magnetic field forming means, and first and second magnetic field forming devices. It has two magnetic sensors 54A and 54B, a signal processing device 55 as signal processing means, and the like.
[0029]
The first coil 52A is arranged on one side in the orthogonal direction of the fine particle measurement area 56 in the middle of the lubricating oil circulation line, and the second coil 52B is arranged on the other side in the orthogonal direction. I have. The magnetic sensor 34A is disposed on the first sensor arrangement portion 57A located on one side in the other orthogonal direction of the fine particle measurement region 56 so as to face the fine particle measurement region 56, and sandwiches the fine particle measurement region 56 therebetween. The magnetic sensor 34B is opposed to the first coil 52A, and the magnetic sensor 34B is disposed on the second sensor arrangement portion 57B located on the other side in the other orthogonal direction so as to face the particle measurement region portion 56. The second coil 52B faces the second coil 52B with 56 interposed therebetween.
[0030]
Accordingly, when an alternating current or a direct current is applied to the first coil 52A by the coil power supply device 53, the first coil 52A is applied to the fine particle measurement area 56 and the first sensor arrangement section 57A (the first magnetic sensor 54A). When an AC or DC first magnetic field 58A is formed, and an AC current or a DC current is applied to the second coil 52B by the coil power supply device 53, the second coil 52B is moved to the fine particle measurement area 56 and the second coil 52B. An AC or DC second magnetic field 58B is formed in the sensor arrangement section 57B (second magnetic sensor 54B). That is, the particle measurement area 56 and the first sensor arrangement 57A (first magnetic sensor 54A) are placed in the first magnetic field 58A, and the particle measurement area 56 and the second sensor arrangement 57B ( A second magnetic sensor 54B) is placed in the first magnetic field 58B.
[0031]
However, the first magnetic field 58A and the second magnetic field 58B alternately switch energization from the coil power supply device 53 to the first and second coils 52A and 52B in order to avoid interference between the magnetic fields 58A and 58B. Are formed alternately. In this case, the switching speed of the energization is set to an appropriate high speed according to the flow rate of the fine particles 59.
[0032]
Then, at this time, if the fine particles (metal wear powder of the bearing) 59 exist in the fine particle measurement region 56 (the fine particles 59 are mixed in the lubricating oil in the fine particle measurement region 56), that is, as shown by the arrow C When the fine particles 59 flow through the fine particle measurement area 56 together with the lubricating oil, the first magnetic field 58A and the second magnetic field 58B are changed (disturbed) by the fine particles 59. The size of the fine particles 59 is, for example, about several 100 μm.
[0033]
Note that the positions of the first and second coils 52A and 52B are not limited to the illustrated positions, but may be behind the first and second magnetic sensors 54A and 54B. Further, it is desirable that at least the particle measurement area 56 of the lubricating oil circulation line (pipe) is formed of a non-magnetic or non-conductive material such as Teflon.
[0034]
The first magnetic sensor 54A has a planar shape in which a large number of first magnetic sensor elements 54a such as a magnetoresistive (MR) element, a large-scale magnetoresistive (GMR) element, or a magnetic inductance (MI) element are arranged in a matrix. The first magnetic sensor element 54a detects a change in the first magnetic field 58A caused by the fine particles 59 existing in the fine particle measurement area 56. That is, the hatched first magnetic sensor element 54 a in FIG. 3 is a sensor at a position corresponding to the shape of the fine particles 59, and the first magnetic sensor element 54 a of these 51 magnetic sensor elements 54 a The detected value changes according to the change in the magnetic field 58A.
[0035]
The second magnetic sensor 54B has a planar shape in which a large number of second magnetic sensor elements 54b such as a magnetoresistive (MR) element, a large-scale magnetoresistive (GMR) element, or a magnetic inductance (MI) element are arranged in a matrix. The change of the second magnetic field 58B caused by the fine particles 59 present in the fine particle measurement area 56 is detected by each of the second magnetic sensor elements 54b. That is, the hatched second magnetic sensor element 54b in FIG. 3 is a sensor at a position corresponding to the shape of the fine particles 59. In these second magnetic sensor elements 54b, the second magnetic sensor element 54b The detected value changes in accordance with the change in the magnetic field 58B.
[0036]
The first and second planar (matrix) magnetic sensors 54A and 54B have a magnetoresistive (MR) film whose resistance value changes by a magnetic field, formed on a substrate, and perform etching or the like. Thus, a large number of first and second magnetic sensor elements 54a and 54b can be integrated in a matrix on the same substrate.
[0037]
The detection signals of the first and second magnetic sensor elements 54a and 54b of the first and second magnetic sensors 54A and 54B are input to the signal processing device 55. The signal processing device 55 processes the detection signals of the first and second magnetic sensor elements 54a and 54b, for example, to determine the detection signal level and the threshold value of the first and second magnetic sensor elements 54a and 54b. By performing signal processing such that it is determined that the fine particles 59 have been detected in the first and second magnetic sensor elements 54a and 54b whose detection signal levels have exceeded the threshold value, as indicated by hatching in FIG. The shapes of the fine particles 59 in two orthogonal directions are obtained. That is, the existence area of the fine particles 59 is estimated from the change in the detection signals of the first and second magnetic sensor elements 54a and 54b. The shape (data) of the fine particles 59 obtained by the signal processing device 55 is displayed and recorded on the display / recording device 50.
[0038]
Therefore, according to the fine particle shape measuring apparatus 51 of the second embodiment, it is possible to simultaneously measure the more detailed shape of the fine particles 59, that is, the width, length, and thickness of the fine particles 59. Moreover, the measurement accuracy is less affected by the contamination of the lubricating oil circulation line as compared with the optical measurement method. Further, if the degree of integration of the first and second magnetic sensor elements 64a and 64b is improved, more detailed (high accuracy) shape measurement of the fine particles 59 can be performed.
[0039]
<Embodiment 3>
FIG. 4 is a configuration diagram of a particle shape measuring apparatus according to Embodiment 3 of the present invention. Note that the configuration of the lubricating oil circulation line is the same as that of the first embodiment (see FIG. 1), and thus description and illustration thereof are omitted here.
[0040]
As shown in FIG. 4, the fine particle shape measuring apparatus 71 according to the third embodiment includes a coil 72 and a coil power supply 73 as a magnetic field forming unit, a magnetic sensor 74, a signal processing unit 75 as a signal processing unit, and the like. I have.
[0041]
The magnetic sensor 74 has a cylindrical configuration in which magnetic sensor elements 74a such as a magnetoresistive (MR) element, a large-scale magnetoresistive (GMR) element, and a magnetic inductance (MI) element are arranged in a matrix. A rotating magnetic field 78 (details will be described later) that is arranged in the sensor disposition portion 77 so as to surround the periphery of the particle measurement region portion 76 in the middle of the circulation line and is generated by the particles 79 having a size of, for example, about several hundred μm existing in the particle measurement region portion 76. However, the change of the magnetic field forming means) is detected by each magnetic sensor element 74a. That is, in the magnetic sensor element 74 a at a position corresponding to the shape of the fine particles 79, the detection value changes in accordance with a change in the rotating magnetic field 78 of the portion due to the fine particles 79. Note that such a cylindrical (matrix) magnetic sensor 74 has a large number of magnetic sensors formed by, for example, forming a magnetoresistive (MR) film whose resistance value changes with a magnetic field on a substrate and performing etching or the like. The sensor elements 34a can be configured by integrating them in a matrix on the same substrate and molding them into a cylindrical shape.
[0042]
The coil 72 faces the particle measurement area 76 and is arranged on the outer peripheral surface side of the cylindrical magnetic sensor 74. Then, the coil 72 is adapted to move around the particle measuring area 76 and the sensor arrangement section 77 (magnetic sensor 74) as shown by an arrow D by an appropriate rotation driving means such as a motor (not shown). Therefore, when an alternating current or a direct current is supplied to the coil 72 by the coil power supply device 73 and the coil 72 is rotated by the rotation driving means, the alternating current or the direct current is applied to the particle measurement region 76 and the sensor arrangement portion 77 (magnetic sensor 74). A rotating DC magnetic field 78 is formed. That is, the particle measurement area 76 and the sensor arrangement section 77 (magnetic sensor 74) are placed in the rotating magnetic field 78.
[0043]
At this time, if the fine particles (metal wear powder of the bearing) 79 exist in the fine particle measurement area 76 (the fine particles 79 are mixed in the lubricating oil in the fine particle measurement area 76), When the fine particles 79 flow along with the oil in the fine particle measurement area 76, the rotating magnetic field 78 is changed (disturbed) by the fine particles 79. The reason why the magnetic field is not formed around the magnetic sensor 74 at the same time and the rotating magnetic field 78 is used is to prevent interference between the magnetic fields.
[0044]
The magnetic field forming means for forming the rotating magnetic field 78 is not limited to the above-described one. For example, a cylinder surrounding the magnetic sensor 74 by arranging a large number of coils 72 continuously in the circumferential direction of the magnetic sensor 74. A rotating magnetic field 78 may be formed by forming a coil group having a shape of a circle, and sequentially switching the energization from the coil power supply 73 to each coil 72 of the coil group. Note that the rotation speed of the rotating magnetic field 78 (the switching speed of energization or the coil rotation speed) is set to an appropriate high speed in accordance with the flow velocity of the fine particles 79. Further, it is desirable that at least the particle measurement area portion 76 of the lubricating oil circulation line (pipe) is formed of a non-magnetic or non-conductive material such as Teflon.
[0045]
The detection signal of each magnetic sensor element 74 a of the magnetic sensor 74 is input to the signal processing device 75. The signal processing device 75 processes the detection signal of each of the magnetic sensor elements 74a, for example, compares the detection signal level of each of the magnetic sensor elements 74a with a threshold, and in the magnetic sensor element 74a in which the detection signal level exceeds the threshold, By performing signal processing for determining that the fine particles 79 have been detected, the shape of the fine particles 79 is determined. That is, the existence area of the fine particles 79 is estimated from the change in the detection signal of each magnetic sensor element 74a. The shape (data) of the fine particles 79 obtained by the signal processing device 75 is displayed and recorded on the display / recording device 80.
[0046]
Therefore, according to the fine particle shape measuring apparatus 71 of the third embodiment, a more detailed shape of the fine particle 79, that is, a shape measurement over the entire circumference of the fine particle 79 can be measured. Moreover, the measurement accuracy is less affected by the contamination of the lubricating oil circulation line as compared with the optical measurement method. If the degree of integration of the magnetic sensor element 74a is improved, more detailed (high accuracy) shape measurement of the fine particles 79 can be performed.
[0047]
<Embodiment 4>
FIG. 5 is a configuration diagram of a particle shape measuring apparatus according to Embodiment 4 of the present invention. Note that the configuration of the lubricating oil circulation line is the same as that of the first embodiment (see FIG. 1), and thus description and illustration thereof are omitted here.
[0048]
As shown in FIG. 5, the fine particle shape measuring apparatus 91 of the fourth embodiment includes a coil 92 and a coil power supply 93 as a magnetic field forming unit, a magnetic sensor 94, a signal processing unit 95 as a signal processing unit, and the like. I have.
[0049]
The coil 92 faces the particle measurement area 96 in the middle of the lubricating oil circulation line and is disposed behind the magnetic sensor 94. The magnetic sensor 94 is arranged in the sensor arrangement section 97 between the coil 32 and the particle measurement area 96 so as to face the particle measurement area 96. Therefore, when an alternating current or a direct current is caused to flow through the coil 92 by the coil power supply 93, the coil 92 forms an alternating or direct magnetic field 98 in the particle measurement area 96 and the sensor arrangement section 97 (magnetic sensor 94). That is, the particle measurement area 96 and the sensor arrangement section 97 (the magnetic sensor 94) are placed in the magnetic field 98. At this time, if the fine particles (metal wear powder of the bearing) 99 exist in the fine particle measurement area 96 (the fine particles 99 are mixed in the lubricating oil of the fine particle measurement area 96), When the fine particles 99 flow through the fine particle measurement area 96 together with the oil, the magnetic field 98 is changed (disturbed) by the fine particles 99. The size of the fine particles 39 is, for example, about several 100 μm.
[0050]
The position of the coil 92 is not limited to the illustrated position, but may be a position facing the magnetic sensor 34 with the fine particle measurement area 96 interposed therebetween. In addition, it is desirable that at least the particle measuring area 96 of the lubricating oil circulation line (pipe) is formed of a non-magnetic or non-conductive material such as Teflon.
[0051]
The magnetic sensor 94 has a linear configuration in which many magnetic sensor elements 94a such as a magnetoresistive (MR) element, a large-scale magnetoresistive (GMR) element, and a magnetic inductance (MI) element are arranged in a line. The direction (arrangement direction) is arranged so as to be orthogonal to the flow direction (arrow C direction) of the fine particles 99, and each magnetic sensor element 94 a detects a change in a magnetic field 98 caused by the fine particles 99 existing in the fine particle measurement area 96. I do. That is, in the magnetic sensor element 94 a at a position corresponding to the shape of the fine particles 99, the detection value changes in accordance with a change in the magnetic field 98 in the portion due to the fine particles 99. It should be noted that such a linear magnetic sensor 94 has a large number of magnetic sensor elements 94a formed by forming, for example, a magnetoresistive (MR) film having a resistance value changed by a magnetic field on a substrate and performing etching or the like. They can be formed by integrating them in a matrix on the same substrate, and cutting out one row of them.
[0052]
The detection signal of each magnetic sensor element 94 a of the magnetic sensor 94 is input to the signal processing device 95. The signal processing device 95 processes the detection signal of each magnetic sensor element 94a based on the known flow rate of the fine particles 99 (the flow rate of the lubricating oil) or the flow rate of the fine particles 99 measured by the flow rate sensor (the flow rate of the lubricating oil). Thereby, for example, by comparing the detection signal level of each magnetic sensor element 94a with a threshold value, and performing signal processing to determine that the fine particles 99 have been detected in the magnetic sensor element 94a whose detection signal level has exceeded the threshold value, The shape of the fine particles 99 is determined. That is, the existence area of the fine particles 99 is estimated from the change in the detection signal of each magnetic sensor element 94a. The shape (data) of the fine particles 99 obtained by the signal processing device 95 is displayed and recorded by the display / recording device 100.
[0053]
Therefore, according to the fine particle shape measuring device 91 of the fourth embodiment, the detailed shape of the fine particles 99, that is, the width (or thickness) and length of the fine particles 99 can be measured. In other words, even if the magnetic sensor 94 is not linear (matrix) but linear (one line), if the flow rate of the fine particles 99 is known, it is possible to measure the shape as detailed as a planar magnetic sensor. Moreover, the measurement accuracy is less affected by the contamination of the lubricating oil circulation line as compared with the optical measurement method. In addition, if the degree of integration of the magnetic sensor element 94a is improved, more detailed (high accuracy) shape measurement of the fine particles 99 can be performed.
[0054]
<Embodiment 5>
FIG. 6 is a configuration diagram of a particle shape measuring apparatus according to Embodiment 5 of the present invention. Note that the configuration of the lubricating oil circulation line is the same as that of the first embodiment (see FIG. 1), and thus description and illustration thereof are omitted here.
[0055]
As shown in FIG. 6, a fine particle shape measuring apparatus 101 according to the fifth embodiment includes first and second coils 102A and 102B and a coil power supply device 103 as first and second magnetic field forming means, and first and second magnetic fields. It has two magnetic sensors 104A and 104B, a signal processing device 105 as signal processing means, and the like.
[0056]
The first coil 102A faces one side in the orthogonal direction of the particle measurement area 106 in the middle of the lubricating oil circulation line, and is arranged behind the first magnetic sensor 104A. The second coil 102B faces the other side in the orthogonal direction and is disposed behind the second magnetic sensor 104B. The magnetic sensor 104A is disposed on the first sensor disposition portion 107A located on one side in the other orthogonal direction of the fine particle measurement region 106 so as to face the fine particle measurement region 106, and the first coil 102A and the fine particle measurement region 106. The magnetic sensor 104B is disposed on the second sensor disposition portion 107B located on the other side in the other orthogonal direction, facing the particle measurement region portion 106, and between the second coil 102B and the particle measurement region portion 106. positioned.
[0057]
Therefore, when an alternating current or a direct current is applied to the first coil 102A by the coil power supply device 103, the first coil 102A is applied to the fine particle measurement area 106 and the first sensor placement section 107A (the first magnetic sensor 104A). When an AC or DC first magnetic field 108A is formed and an AC or DC current is applied to the second coil 102B by the coil power supply device 103, the second coil 102B is moved to the fine particle measurement area 106 and the second coil 102B. An AC or DC second magnetic field 108B is formed in the sensor arrangement section 107B (second magnetic sensor 104B). That is, the particle measurement region 106 and the first sensor placement portion 107A (the first magnetic sensor 104A) are placed in the first magnetic field 108A, and the particle measurement region 106 and the second sensor placement portion 107B ( A second magnetic sensor 104B) is placed in the first magnetic field 108B.
[0058]
However, the first magnetic field 108A and the second magnetic field 108B alternately switch energization from the coil power supply 103 to the first and second coils 102A and 102B in order to avoid interference between the magnetic fields 58A and 58B. Are formed alternately. In this case, the switching speed of energization is set to an appropriate high speed according to the flow rate of the fine particles 109.
[0059]
At this time, if the fine particles (metal wear powder of the bearing) 109 exist in the fine particle measurement region 106 (the fine particles 109 are mixed in the lubricating oil in the fine particle measurement region 106), that is, as shown by the arrow C When the fine particles 109 flow through the fine particle measurement area 106 together with the lubricating oil, the first magnetic field 108A and the second magnetic field 108B are changed (disturbed) by the fine particles 109. The size of the fine particles 109 is, for example, about several 100 μm.
[0060]
Note that the positions of the first and second coils 102A and 102B are not limited to the positions shown in the drawing, and are opposed to the first and second magnetic sensors 104A and 104B, respectively, with the fine particle measurement area 106 interposed therebetween. It may be a position. Further, it is desirable that at least the particle measurement region 106 of the lubricating oil circulation line (pipe) is formed of a non-magnetic or non-conductive material such as Teflon.
[0061]
The first magnetic sensor 104A has a linear shape in which a large number of first magnetic sensor elements 104a such as a magnetoresistive (MR) element, a large-scale magnetoresistive (GMR) element, or a magnetic inductance (MI) element are arranged in a line. The first magnetic field 108 </ b> A generated by the fine particles 109 existing in the fine particle measurement area 106 is disposed so that the longitudinal direction (arrangement direction) is orthogonal to the flow direction (the direction of arrow C) of the fine particles 109. The change is detected by each first magnetic sensor element 104a. That is, in the first magnetic sensor element 104a at a position corresponding to the shape of the fine particles 109, the detection value changes in accordance with a change in the first magnetic field 108A of the portion due to the fine particles 109.
[0062]
The second magnetic sensor 104B has a linear shape in which a large number of second magnetic sensor elements 104b such as a magnetoresistive (MR) element, a large-scale magnetoresistive (GMR) element, or a magnetic inductance (MI) element are arranged in a line. The second magnetic field 108 </ b> B generated by the fine particles 109 existing in the fine particle measurement area 106 is disposed so that the longitudinal direction (arrangement direction) is orthogonal to the flow direction (the direction of arrow C) of the fine particles 109. The change is detected by each second magnetic sensor element 104b. That is, in the second magnetic sensor element 104b at a position corresponding to the shape of the fine particles 109, the detection value changes in accordance with a change in the second magnetic field 108B of the portion due to the fine particles 109.
[0063]
Such linear first and second magnetic sensors 1054A and 104B are formed by, for example, forming a magnetoresistive (MR) film having a resistance value changed by a magnetic field on a substrate and performing etching and the like. The first and second magnetic sensor elements 104a and 104b can be integrated in a matrix on the same substrate, and one row can be cut out.
[0064]
The detection signals of the first and second magnetic sensor elements 104a and 104b of the first and second magnetic sensors 104A and 104B are input to the signal processing device 105. In the signal processing device 105, each of the first and second magnetic sensor elements 104a is based on the known flow rate of the fine particles 109 (the flow rate of the lubricating oil) or the flow rate of the fine particles 109 measured by the flow rate sensor (the flow rate of the lubricating oil). , 104b, for example, by comparing the detection signal level of each of the first and second magnetic sensor elements 104a, 104b with the threshold value, and comparing the first and second detection signal levels exceeding the threshold value. By performing signal processing for determining that the fine particles 109 have been detected in the magnetic sensor element 104a, the shapes of the fine particles 109 in two orthogonal directions are obtained. That is, the existence area of the fine particles 109 is estimated from the change in the detection signal of each of the magnetic sensor elements 104a and 104b. Further, the shape (data) of the fine particles 109 obtained by the signal processing device 105 is displayed and recorded by the display / recording device 110.
[0065]
Therefore, according to the fine particle shape measuring apparatus 101 of the fifth embodiment, it is possible to simultaneously measure the more detailed shape of the fine particles 109, that is, the width, length, and thickness of the fine particles 109. In other words, even if the first and second magnetic sensors 104A and 104B are not linear (matrix) but linear (one row), as long as the flow rate of the fine particles 109 is known, the details are almost the same as those of the planar magnetic sensor. Shape measurement is possible. Moreover, the measurement accuracy is less affected by the contamination of the lubricating oil circulation line as compared with the optical measurement method. Further, if the degree of integration of the first and second magnetic sensor elements 104a and 104b is improved, more detailed (high accuracy) shape measurement of the fine particles 109 can be performed.
[0066]
<Embodiment 6>
FIG. 7 is a configuration diagram of a particle shape measuring apparatus according to Embodiment 6 of the present invention. Note that the configuration of the lubricating oil circulation line is the same as that of the first embodiment (see FIG. 1), and thus description and illustration thereof are omitted here.
[0067]
As shown in FIG. 7, the particle shape measuring apparatus 121 of the sixth embodiment has a coil 122 and a coil power supply device 123 as a magnetic field forming means, a magnetic sensor 124, a signal processing device 125 as a signal processing means, and the like. I have.
[0068]
The magnetic sensor 124 has an annular configuration in which a large number of magnetic sensor elements 124a such as a magnetoresistive (MR) element, a large-scale magnetoresistive (GMR) element, and a magnetic inductance (MI) element are arranged in a line. The ring is arranged in the sensor arrangement section 127 so that the tangential direction of the ring is orthogonal to the flow direction of the particles 129 (the direction of arrow C) and surrounds the periphery of the particle measurement area 126 in the middle of the lubricating oil circulation line. The change in the rotating magnetic field 128 (which will be described in detail later, but is formed by the magnetic field forming means) caused by the fine particles 129 having a size of, for example, about several hundreds of micrometers existing in the fine particle measurement area 126 is changed by each magnetic sensor element 124a. To detect. That is, in the magnetic sensor element 124 a at a position corresponding to the shape of the fine particles 129, the detection value changes in accordance with a change in the rotating magnetic field 128 in the portion due to the fine particles 129.
[0069]
It should be noted that such an annular magnetic sensor 124 has a large number of magnetic sensor elements 124a formed by, for example, forming a magnetoresistive (MR) film whose resistance value changes by a magnetic field on a substrate and performing etching or the like. It can be constructed by, for example, stacking in a matrix on the same substrate, and cutting out one of the rows and molding it into an annular shape.
[0070]
The coil 122 faces the particle measurement area 126 and is disposed on the outer peripheral side of the annular magnetic sensor 124. Then, the coil 122 is adapted to move around the particle measurement area 126 and the sensor arrangement section 127 (magnetic sensor 124) as shown by an arrow D by an appropriate rotation driving means such as a motor (not shown). Therefore, when an alternating current or a direct current is applied to the coil 122 by the coil power supply device 123 and the coil 122 is rotated by the rotation driving means, the alternating current or the alternating current is applied to the particle measurement area 126 and the sensor placement section 127 (magnetic sensor 124). A DC rotating magnetic field 128 is formed. That is, the particle measurement area 126 and the sensor placement section 127 (magnetic sensor 124) are placed in the rotating magnetic field 128.
[0071]
At this time, if the fine particles (metal wear powder of the bearing) 129 exist in the fine particle measurement region 126 (the fine particles 129 are mixed in the lubricating oil of the fine particle measurement region 126), that is, the lubrication is performed as shown by the arrow C. When the fine particles 129 flow along with the oil through the fine particle measurement region 126, the rotating magnetic field 128 is changed (disturbed) by the fine particles 129. The reason why the magnetic field is not formed around the magnetic sensor 124 at the same time and the rotating magnetic field 128 is used is to prevent interference between the magnetic fields.
[0072]
The magnetic field forming means for forming the rotating magnetic field 128 is not limited to the above-described one. For example, a large number of coils 122 are continuously arranged in the circumferential direction of the magnetic sensor 124 to form a circle surrounding the magnetic sensor 124. The rotating magnetic field 128 may be formed by forming an annular coil group and sequentially switching the energization from the coil power supply device 123 to each coil 122 of the coil group. The rotation speed of the rotating magnetic field 128 (the switching speed of the energization or the coil rotation speed) is set to an appropriate high speed according to the flow velocity of the fine particles 129. Further, it is desirable that at least the fine particle measurement area portion 126 of the lubricating oil circulation line (pipe) is formed of a non-magnetic or non-conductive material such as Teflon.
[0073]
The detection signal of each magnetic sensor element 124 a of the magnetic sensor 124 is input to the signal processing device 125. In the signal processing device 125, the detection signal level of each magnetic sensor element 124a is processed, for example, the detection signal level of each magnetic sensor element 124a is compared with a threshold, and in the magnetic sensor element 124a whose detection signal level exceeds the threshold, By performing signal processing for determining that the fine particles 129 have been detected, the shape of the fine particles 129 is obtained. That is, the existence area of the fine particles 129 is estimated from the change in the detection signal of each magnetic sensor element 124a. Further, the shape (data) of the fine particles 129 obtained by the signal processing device 125 is displayed and recorded on the display / recording device 130.
[0074]
Therefore, according to the fine particle shape measuring apparatus 121 of the sixth embodiment, a more detailed shape of the fine particles 129, that is, a shape measurement over the entire circumference of the fine particles 129 can be measured. That is, even if the magnetic sensor 124 is not cylindrical (matrix) but annular (single row), if the flow rate of the fine particles 129 is known, it is possible to measure the shape as detailed as the cylindrical magnetic sensor. Moreover, the measurement accuracy is less affected by the contamination of the lubricating oil circulation line as compared with the optical measurement method. In addition, if the degree of integration of the magnetic sensor element 124a is improved, more detailed (high accuracy) shape measurement of the fine particles 129 can be performed.
[0075]
<Embodiment 7>
FIG. 8 is a configuration diagram of a fine particle shape measuring apparatus according to Embodiment 7 of the present invention. Note that the configuration of the lubricating oil circulation line is the same as that of the first embodiment (see FIG. 1), and thus description and illustration thereof are omitted here.
[0076]
As shown in FIG. 8, the fine particle shape measuring apparatus 141 of the seventh embodiment includes a magnetic field forming unit 142 as a magnetic field forming unit, a coil power supply 143, a magnetic sensor 144, a signal processing unit 145 as a signal processing unit, and the like. are doing.
[0077]
The magnetic sensor 144 has the same configuration as the magnetic sensor 34 of the first embodiment, that is, a large number of magnetic sensor elements 34a such as a magnetoresistive (MR) element, a large-scale magnetoresistive (GMR) element, and a magnetic inductance (MI) element. It is a planar configuration arranged in a matrix. On the other hand, the magnetic field forming section 142 has a planar configuration in which a large number of coil elements 142a are arranged in a matrix so as to correspond to each magnetic sensor element 144a of the magnetic sensor 144. The magnetic field forming section 142 and the magnetic sensor 144 are integrally formed, and are arranged in the sensor arrangement section 147 so as to face the fine particle measurement area section 146 in the middle of the lubricating oil circulation line.
[0078]
Note that the magnetic sensor 144 has a large number of magnetic sensor elements 1444a formed in a matrix on the same substrate by, for example, forming a film of a magnetic resistance (MR) whose resistance value changes with a magnetic field on the substrate and performing etching or the like. The magnetic field forming part 142 is formed by, for example, depositing a conductive film on a substrate and performing etching or the like to thereby form a large number of coil elements 142a in a matrix. It can be configured by integration.
[0079]
When an alternating current or a direct current is applied to each coil element 142a of the magnetic field forming unit 142 by the coil power supply device 143, each coil element 142a becomes a fine particle measurement area section 146 and a sensor arrangement section 147 (each magnetic sensor element 144a of the magnetic sensor 144). An AC or DC magnetic field 148 is formed. That is, the particle measurement area 146 and the sensor arrangement part 147 (each magnetic sensor element 144a of the magnetic sensor 144) are placed in the magnetic field 148.
[0080]
At this time, if the fine particles (metal wear powder of the bearing) 149 exist in the fine particle measurement region 146 (if the fine particles 149 are mixed in the lubricating oil in the fine particle measurement region 146), the lubrication is performed as shown by the arrow C. When the fine particles 149 flow along with the oil in the fine particle measurement area 146, the magnetic field 148 is changed (disturbed) by the fine particles 149. The size of the fine particles 149 is, for example, about several 100 μm.
[0081]
The energization from the coil power supply device 143 to the respective coil elements 142a of the magnetic field forming unit 142 is sequentially performed, and the respective coil elements 142a sequentially generate the magnetic field 148 sequentially at the corresponding positions. Therefore, mutual interference of the magnetic fields is prevented. In this case, the switching speed of energization is set to an appropriate high speed in accordance with the flow velocity of the fine particles 149. It is desirable that at least the particle measurement area 146 of the lubricating oil circulation line (pipe) is formed of a non-magnetic or non-conductive material such as Teflon.
[0082]
Then, in the magnetic sensor 144, a change in the magnetic field 148 caused by the fine particles 149 existing in the fine particle measurement area 146 is detected by each magnetic sensor element 144a. That is, in the magnetic sensor element 144 a at a position corresponding to the shape of the fine particles 149, the detection value changes in accordance with a change in the magnetic field 148 of the portion due to the fine particles 149.
[0083]
The detection signal of each magnetic sensor element 144a of the magnetic sensor 144 is input to the signal processing device 145. The signal processing device 145 processes the detection signal of each of the magnetic sensor elements 144a (for example, by comparing the detection signal level of each of the magnetic sensor elements 144a with a threshold value, and in the magnetic sensor element 144a whose detection signal level exceeds the threshold value). By performing signal processing to determine that the fine particles 149 have been detected, the shape of the fine particles 149 is determined. That is, the existence area of the fine particles 149 is estimated from the change of the detection signal of each magnetic sensor element 144a. Further, the shape (data) of the fine particles 149 obtained by the signal processing device 145 is displayed and recorded by the display / recording device 150.
[0084]
Therefore, according to the fine particle shape measuring device 141 of the seventh embodiment, the detailed shape of the fine particles 39, that is, the width (or thickness) and the length of the fine particles 39 can be measured. In addition, since the magnetic field 148 is individually formed for each magnetic sensor element 144a of the magnetic sensor 144 by each coil element 142a of the magnetic field forming unit 142, more accurate shape measurement can be performed, and the size of the entire apparatus can be reduced. Can also be planned. Further, the measurement accuracy is less affected by the contamination of the lubricating oil circulation line as compared with the optical measurement method. Further, if the degree of integration of the magnetic sensor element 144a and the coil element 142a is improved, more detailed (high accuracy) shape measurement of the fine particles 149 can be performed.
[0085]
It should be noted that the magnetic sensor elements 54A, 54B, 74, 94, 104A, 104B, and 124 of Embodiments 2 to 6 may be integrally provided with a magnetic field forming section in which a large number of coil elements are arranged. it can.
[0086]
That is, although not shown, a large number of coil elements are formed by planar, cylindrical, linear or annular magnetic sensors 54a, 54b, 74a of magnetic sensors 54A, 54B, 74, 94, 104A, 104B, 124. , 94a, 104a, 104b, 124a, respectively, in a matrix or in a line, a planar, cylindrical, linear or annular magnetic field forming portion; The annular magnetic sensors 54A, 54B, 74, 94, 104A, 104B, and 124 are integrally formed, and each coil element of the magnetic field forming unit is sequentially energized to form a magnetic field or a rotating magnetic field. You may.
[0087]
Also, even if the fine particles are not metal powders such as bearing wear powders, for example, non-metallic powders such as ceramic powders, etc., due to a difference in relative dielectric constant between the fine particles and a liquid or gas such as lubricating oil. Since the magnetic field changes, the shape measurement according to the present invention is possible.
[0088]
Further, the magnetic field forming means is not limited to an electromagnet using a coil, and a permanent magnet may be used depending on the application. For example, in the first and fourth embodiments, a permanent magnet may be used instead of the coils 32 and 92.
[0089]
【The invention's effect】
As described above in detail with the embodiments, according to the fine particle shape measuring apparatus of the first invention, a magnetic field forming means for forming a magnetic field in the fine particle measurement region and the sensor arrangement portion, and a large number of magnetic sensor elements It is a planar configuration arranged in a matrix, and is arranged in the sensor disposition section facing the fine particle measurement area, and the magnetic field generated by the fine particles present in the fine particle measurement area is changed by each magnetic field. A magnetic sensor for detecting by the sensor element; and a signal processing means for processing a detection signal of each magnetic sensor element of the magnetic sensor to obtain a shape of the fine particle. It can be carried out. In addition, the measurement accuracy is less affected by contamination of the lubricating oil circulation line and the like as compared with the optical measurement method. If the degree of integration of the magnetic sensor element is improved, more detailed (highly accurate) shape measurement of fine particles can be performed.
[0090]
Further, according to the fine particle shape measuring device of the second invention, the first magnetic field is formed in the fine particle measuring region and the first sensor arrangement portion located on one side in the orthogonal direction of the fine particle measuring region. Magnetic field forming means, second magnetic field forming means for forming a second magnetic field in the fine particle measurement area section and a second sensor arrangement section located on the other side in the orthogonal direction, and a number of first magnetic sensor elements. A planar configuration arranged in a matrix, wherein the first sensor is disposed in the first sensor disposing portion facing the fine particle measurement region, and the first particle generated by the fine particles present in the fine particle measurement region is provided. A first magnetic sensor for detecting a change in a magnetic field by each first magnetic sensor element, and a planar configuration in which a large number of second magnetic sensor elements are arranged in a matrix; Facing the said A second magnetic sensor, which is disposed in the sensor arrangement section, and detects a change in the second magnetic field caused by the fine particles present in the fine particle measurement area by each of the second magnetic sensor elements, and the first magnetic sensor And signal processing means for processing the detection signal of each of the first and second magnetic sensor elements of the second magnetic sensor to determine the shape of the fine particles, so that more detailed shape measurement of the fine particles can be performed. Becomes possible. In addition, the measurement accuracy is less affected by contamination of the lubricating oil circulation line and the like as compared with the optical measurement method. Further, if the degree of integration of the first and second magnetic sensor elements is improved, more detailed (high accuracy) shape measurement of fine particles can be performed.
[0091]
Further, according to the fine particle shape measuring apparatus of the third invention, a magnetic field forming means for forming a rotating magnetic field around the fine particle measuring area and the sensor disposing portion, and a cylindrical shape formed by arranging a large number of magnetic sensor elements in a matrix. A magnetic sensor arranged in the sensor arrangement portion so as to surround the periphery of the particle measurement region portion, wherein each magnetic sensor element detects a change in the rotating magnetic field caused by particles present in the particle measurement region portion. And signal processing means for processing the detection signal of each magnetic sensor element of the magnetic sensor to determine the shape of the fine particles, so that detailed shape measurement over the entire circumference of the fine particles can be performed. . In addition, the measurement accuracy is less affected by contamination of the lubricating oil circulation line and the like as compared with the optical measurement method. If the degree of integration of the magnetic sensor element is improved, more detailed (highly accurate) shape measurement of fine particles can be performed.
[0092]
Further, the fine particle shape measuring apparatus of the fourth invention is a linear configuration in which a magnetic field forming means for forming a magnetic field in the fine particle measuring region and the sensor arrangement portion and a number of magnetic sensor elements are arranged in a line, A magnetic sensor that is arranged in the sensor arrangement portion facing the fine particle measurement region, detects a change in the magnetic field caused by the fine particles flowing with the fluid through the fine particle measurement region by each magnetic sensor element, and a flow rate of the fine particles. And a signal processing means for processing the detection signal of each magnetic sensor element of the magnetic sensor to determine the shape of the fine particles, so that detailed shape measurement of the fine particles can be performed. That is, even if the magnetic sensor is not a flat (matrix) but a linear (one row) magnetic sensor, if the flow rate of the fine particles is known, the same detailed shape measurement as the flat magnetic sensor can be performed. In addition, the measurement accuracy is less affected by contamination of the lubricating oil circulation line and the like as compared with the optical measurement method. If the degree of integration of the magnetic sensor element is improved, more detailed (highly accurate) shape measurement of fine particles can be performed.
[0093]
Further, the particle shape measuring apparatus according to a fifth aspect of the present invention provides a first magnetic field forming device that forms a first magnetic field in a particle measuring region and a first sensor disposing portion located on one side in a direction orthogonal to the particle measuring region. Means, a second magnetic field forming means for forming a second magnetic field in the fine particle measurement area portion and a second sensor arrangement portion located on the other side in the orthogonal direction, and a large number of first magnetic sensor elements arranged in a line. A linear configuration formed by arranging the first magnetic field generated by particles flowing along with the fluid in the particle measurement region portion, the first magnetic field being arranged in the first sensor arrangement portion facing the particle measurement region portion; A linear configuration in which a first magnetic sensor for detecting a change is detected by each first magnetic sensor element and a number of second magnetic sensor elements are arranged in a line, and the first magnetic sensor faces the fine particle measurement area. The second sensor arrangement A second magnetic sensor, which is disposed in a portion and detects a change in the second magnetic field caused by the fine particles by each of the second magnetic sensor elements; and a first magnetic sensor and a second magnetic sensor based on the flow rate of the fine particles. Signal processing means for processing the detection signal of each of the first and second magnetic sensor elements of the magnetic sensor to obtain the shape of the fine particles, thereby enabling more detailed shape measurement of the fine particles. Become. That is, even if the first and second magnetic sensors are not linear (matrix) but linear (one row), as long as the flow rate of the fine particles is known, the same detailed shape measurement as the planar magnetic sensor can be performed. It is possible. In addition, the measurement accuracy is less affected by contamination of the lubricating oil circulation line and the like as compared with the optical measurement method. Further, if the degree of integration of the first and second magnetic sensor elements is improved, more detailed (high accuracy) shape measurement of fine particles can be performed.
[0094]
Further, the fine particle shape measuring apparatus according to the sixth invention has an annular configuration in which a magnetic field forming means for forming a rotating magnetic field around the fine particle measuring region and the sensor arrangement portion and a number of magnetic sensor elements are arranged in a line. A magnetic sensor that is arranged in the sensor arrangement portion so as to surround the periphery of the particle measurement region portion, and that detects a change in the rotating magnetic field caused by particles flowing along with the fluid in the particle measurement region portion by each magnetic sensor element, Signal processing means for processing the detection signal of each magnetic sensor element of the magnetic sensor based on the flow velocity of the fine particles to obtain the shape of the fine particles, so that the detailed shape of the fine particles over the entire circumference of the fine particles is obtained. Measurement can be performed. In other words, even if the magnetic sensor is not a cylinder (matrix) but an annular (one row), as long as the flow rate of the fine particles is known, it is possible to measure the same detailed shape as the cylindrical magnetic sensor. In addition, the measurement accuracy is less affected by contamination of the lubricating oil circulation line and the like as compared with the optical measurement method. If the degree of integration of the magnetic sensor element is improved, more detailed (highly accurate) shape measurement of fine particles can be performed.
[0095]
A seventh aspect of the present invention is the fine particle shape measuring apparatus according to any one of the first to sixth aspects, wherein the magnetic field forming means includes a plurality of coil elements each of which is formed of the planar, cylindrical, linear, or annular shape. A planar, cylindrical, linear or annular magnetic field forming portion arranged in a matrix or in a row corresponding to each magnetic sensor element of the magnetic sensor of the present invention. , A cylindrical, linear or annular magnetic sensor is integrally formed, and the coil element of the magnetic field forming section is sequentially energized to form the magnetic field or the rotating magnetic field. Therefore, detailed shape measurement of the fine particles can be performed. Moreover, since the magnetic field is formed individually for each magnetic sensor element of the magnetic sensor by each coil element of the magnetic field forming unit, more accurate shape measurement can be performed, and the size of the entire apparatus can be reduced. . Further, the measurement accuracy is less affected by contamination of the lubricating oil circulation line and the like as compared with the optical measurement method. Further, if the degree of integration of the magnetic sensor element and the coil element is improved, more detailed (high accuracy) fine particle shape measurement can be performed.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of a lubricating oil circulation line including a fine particle shape measuring device according to a first embodiment of the present invention.
FIG. 2 is a configuration diagram of a particle shape measuring apparatus according to Embodiment 1 of the present invention.
FIG. 3 is a configuration diagram of a fine particle shape measuring device according to a second embodiment of the present invention.
FIG. 4 is a configuration diagram of a fine particle shape measuring device according to a third embodiment of the present invention.
FIG. 5 is a configuration diagram of a particle shape measuring apparatus according to Embodiment 4 of the present invention.
FIG. 6 is a configuration diagram of a particle shape measuring apparatus according to Embodiment 5 of the present invention.
FIG. 7 is a configuration diagram of a particle shape measuring apparatus according to Embodiment 6 of the present invention.
FIG. 8 is a configuration diagram of a particle shape measuring apparatus according to Embodiment 7 of the present invention.
FIG. 9 is a configuration diagram of a conventional particle shape measuring device.
FIG. 10 is a configuration diagram of another conventional fine particle shape measuring device.
[Explanation of symbols]
21 Air heater
22 Drive
23 rotor
24 rotating shaft
25 Lower main bearing
26 Housing
27 Upper main bearing
28 Lubricating oil circulation line
29 pump
30 Lubricating oil
31 Particle shape measuring device
32 coils
33 Coil power supply
34 Magnetic Sensor
34a Magnetic sensor element
35 signal processor
36 Particle measurement area
37 Sensor placement part
38 Magnetic field
39 fine particles
40 Display and recording device
51 Particle shape measuring device
52A first coil
52B second coil
53 coil power supply
54A First Magnetic Sensor
54B Second Magnetic Sensor
54a First magnetic sensor element
54b Second Magnetic Sensor Element
55 signal processing equipment
56 Particle measurement area
57A First Sensor Arrangement Section
57B 2nd sensor arrangement part
58A first magnetic field
58B Second magnetic field
59 fine particles
60 Display and recording device
71 Particle Shape Measurement System
72 coils
73 Coil power supply
74 magnetic sensor
74a Magnetic sensor element
75 Signal Processor
76 Particle Measurement Area
77 Sensor arrangement part
78 Rotating magnetic field
79 fine particles
80 Display and recording device
91 Particle Shape Measurement System
92 coil
93 Coil power supply
94 Magnetic Sensor
94a Magnetic sensor element
95 signal processor
96 Particle measurement area
97 Sensor placement section
98 magnetic field
99 fine particles
100 Display and recording device
101 Particle shape measuring device
102A first coil
102B second coil
103 Coil power supply
104A first magnetic sensor
104B second magnetic sensor
104a first magnetic sensor element
104b Second magnetic sensor element
105 signal processing device
106 Particle measurement area
107A first sensor arrangement unit
107B 2nd sensor arrangement part
108A First magnetic field
108B Second magnetic field
109 fine particles
110 Display and recording device
121 Particle shape measurement device
122 coil
123 Coil power supply
124 magnetic sensor
124a Magnetic sensor element
125 signal processor
126 Particle measurement area
127 Sensor arrangement part
128 rotating magnetic field
129 fine particles
130 Display and recording device
141 Particle Shape Measurement System
142 magnetic field generator
142a coil element
143 Coil power supply
144 magnetic sensor
144a Magnetic sensor element
145 signal processing device
146 Particle Measurement Area
147 Sensor arrangement part
148 magnetic field
149 fine particles
150 Display and recording device

Claims (7)

微粒子計測領域部及びセンサ配置部に磁界を形成する磁界形成手段と、
多数の磁気センサ素子をマトリクス状に配列してなる平面状の構成であって、前記微粒子計測領域部に面して前記センサ配置部に配置され、前記微粒子計測領域部に存在する微粒子によって生じる前記磁界の変化を各磁気センサ素子によって検出する磁気センサと、
この磁気センサの各磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とする微粒子形状計測装置。A magnetic field forming means for forming a magnetic field in the particle measurement region and the sensor arrangement portion,
A planar configuration in which a large number of magnetic sensor elements are arranged in a matrix, wherein the magnetic sensor elements are arranged in the sensor arrangement portion facing the fine particle measurement region portion, and are generated by the fine particles present in the fine particle measurement region portion. A magnetic sensor that detects a change in a magnetic field with each magnetic sensor element;
Signal processing means for processing a detection signal of each magnetic sensor element of the magnetic sensor to obtain the shape of the fine particles. 微粒子計測領域部及びこの微粒子計測領域部の直交方向の一方側に位置する第１のセンサ配置部に第１の磁界を形成する第１の磁界形成手段と、
前記微粒子計測領域部及び前記直交方向の他方側に位置する第２のセンサ配置部に第２の磁界を形成する第２磁界形成手段と、
多数の第１の磁気センサ素子をマトリクス状に配列してなる平面状の構成であって、前記微粒子計測領域部に面して前記第１のセンサ配置部に配置され、前記微粒子計測領域部に存在する微粒子によって生じる前記第１の磁界の変化を各第１の磁気センサ素子によって検出する第１の磁気センサと、
多数の第２の磁気センサ素子をマトリクス状に配列してなる平面状の構成であって、前記微粒子計測領域部に面して前記第２のセンサ配置部に配置され、前記微粒子計測領域部に存在する微粒子によって生じる前記第２の磁界の変化を各第２の磁気センサ素子によって検出する第２の磁気センサと、
前記第１の磁気センサ及び第２の磁気センサの各第１及び第２の磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とする微粒子形状計測装置。First magnetic field forming means for forming a first magnetic field in the fine particle measurement region and a first sensor arrangement portion located on one side in the orthogonal direction of the fine particle measurement region;
Second magnetic field forming means for forming a second magnetic field in the fine particle measurement region and a second sensor arrangement portion located on the other side in the orthogonal direction;
A planar configuration in which a large number of first magnetic sensor elements are arranged in a matrix, the first magnetic sensor elements being arranged in the first sensor arrangement portion facing the fine particle measurement region portion, and being disposed in the fine particle measurement region portion. A first magnetic sensor for detecting a change in the first magnetic field caused by the existing fine particles by each first magnetic sensor element;
A planar configuration in which a large number of second magnetic sensor elements are arranged in a matrix, and are arranged in the second sensor disposition section so as to face the fine particle measurement area section, and are provided in the fine particle measurement area section. A second magnetic sensor for detecting a change in the second magnetic field caused by the existing fine particles by each second magnetic sensor element;
Signal processing means for processing a detection signal of each of the first and second magnetic sensor elements of the first magnetic sensor and the second magnetic sensor to obtain a shape of the fine particles; apparatus. 微粒子計測領域部及びセンサ配置部の回りに回転磁界を形成する磁界形成手段と、
多数の磁気センサ素子をマトリクス状に配列してなる円筒状の構成であって、前記微粒子計測領域部の周囲を囲むようにして前記センサ配置部に配置され、前記微粒子計測領域部に存在する微粒子によって生じる前記回転磁界の変化を各磁気センサ素子によって検出する磁気センサと、
この磁気センサの各磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とする微粒子形状計測装置。Magnetic field forming means for forming a rotating magnetic field around the particle measurement area and the sensor arrangement part,
A cylindrical configuration in which a large number of magnetic sensor elements are arranged in a matrix. A magnetic sensor for detecting a change in the rotating magnetic field by each magnetic sensor element;
Signal processing means for processing a detection signal of each magnetic sensor element of the magnetic sensor to obtain the shape of the fine particles. 微粒子計測領域部及びセンサ配置部に磁界を形成する磁界形成手段と、
多数の磁気センサ素子を一列に配列してなる直線状の構成であって、前記微粒子計測領域部に面して前記センサ配置部に配置され、前記微粒子計測領域部を流体とともに流れる微粒子によって生じる前記磁界の変化を各磁気センサ素子によって検出する磁気センサと、
前記微粒子の流速に基づき、前記磁気センサの各磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とする微粒子形状計測装置。A magnetic field forming means for forming a magnetic field in the particle measurement region and the sensor arrangement portion,
A linear configuration in which a number of magnetic sensor elements are arranged in a line, and the magnetic sensor elements are arranged in the sensor disposition portion facing the fine particle measurement region portion, and are generated by the fine particles flowing together with the fluid in the fine particle measurement region portion. A magnetic sensor for detecting a change in the magnetic field by each magnetic sensor element,
Signal processing means for processing a detection signal of each magnetic sensor element of the magnetic sensor based on the flow rate of the fine particles to obtain a shape of the fine particles. 微粒子計測領域部及びこの微粒子計測領域部の直交方向の一方側に位置する第１のセンサ配置部に第１の磁界を形成する第１の磁界形成手段と、
前記微粒子計測領域部及び前記直交方向の他方側に位置する第２のセンサ配置部に第２の磁界を形成する第２磁界形成手段と、
多数の第１の磁気センサ素子を一列に配列してなる直線状の構成であって、前記微粒子計測領域部に面して前記第１のセンサ配置部に配置され、前記微粒子計測領域部を流体とともに流れる微粒子によって生じる前記第１の磁界の変化を各第１の磁気センサ素子によって検出する第１の磁気センサと、
多数の第２の磁気センサ素子を一列に配列してなる直線状の構成であって、前記微粒子計測領域部に面して前記第２のセンサ配置部に配置され、前記微粒子によって生じる前記第２の磁界の変化を各第２の磁気センサ素子によって検出する第２の磁気センサと、
前記微粒子の流速に基づき、前記第１の磁気センサ及び第２の磁気センサの各第１及び第２の磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とする微粒子形状計測装置。First magnetic field forming means for forming a first magnetic field in the fine particle measurement region and a first sensor arrangement portion located on one side in the orthogonal direction of the fine particle measurement region;
Second magnetic field forming means for forming a second magnetic field in the fine particle measurement region and a second sensor arrangement portion located on the other side in the orthogonal direction;
A linear configuration in which a number of first magnetic sensor elements are arranged in a line, the first magnetic sensor elements being arranged in the first sensor disposing portion facing the fine particle measurement region portion, and the fine particle measurement region portion being fluidized A first magnetic sensor for detecting, by each first magnetic sensor element, a change in the first magnetic field caused by fine particles flowing therewith;
A linear configuration in which a number of second magnetic sensor elements are arranged in a line, the second magnetic sensor elements being arranged in the second sensor arrangement portion facing the fine particle measurement region portion, wherein the second magnetic field generated by the fine particles is A second magnetic sensor for detecting a change in the magnetic field of each of the second magnetic sensor element,
Signal processing means for processing a detection signal of each of the first and second magnetic sensor elements of the first magnetic sensor and the second magnetic sensor based on the flow velocity of the fine particles to determine the shape of the fine particles. A particle shape measuring device characterized by the following. 微粒子計測領域部及びセンサ配置部の回りに回転磁界を形成する磁界形成手段と、
多数の磁気センサ素子を一列に配列してなる円環状の構成であって、前記微粒子計測領域部の周囲を囲むようにして前記センサ配置部に配置され、前記微粒子計測領域部を流体とともに流れる微粒子によって生じる前記回転磁界の変化を各磁気センサ素子によって検出する磁気センサと、
前記微粒子の流速に基づき、前記磁気センサの各磁気センサ素子の検出信号を処理して前記微粒子の形状を求める信号処理手段とを有することを特徴とする微粒子形状計測装置。Magnetic field forming means for forming a rotating magnetic field around the particle measurement area and the sensor arrangement part,
An annular configuration in which a number of magnetic sensor elements are arranged in a line. The magnetic sensor elements are arranged in the sensor placement section so as to surround the periphery of the particle measurement area, and are generated by particles flowing along with the fluid in the particle measurement area. A magnetic sensor for detecting a change in the rotating magnetic field by each magnetic sensor element;
Signal processing means for processing a detection signal of each magnetic sensor element of the magnetic sensor based on the flow rate of the fine particles to obtain a shape of the fine particles. 請求項１〜６の何れか１項に記載の微粒子形状計測装置において、
前記磁界形成手段は多数のコイル素子を前記平面状、円筒状、直線状又は円環状の磁気センサの各磁気センサ素子に各々に対応させてマトリクス状又は一列に配列してなる平面状、円筒状、直線状又は円環状の磁界形成部であり、この磁界形成部と、前記平面状、円筒状、直線状又は円環状の磁気センサとを一体的に構成し、
前記磁界形成部の各コイル素子に順次通電して前記磁界又は回転磁界を形成するように構成したことを特徴とする微粒子形状計測装置。In the fine particle shape measuring apparatus according to any one of claims 1 to 6,
The magnetic field forming means includes a plurality of coil elements arranged in a matrix or a line arranged in a matrix or in a row corresponding to the respective magnetic sensor elements of the planar, cylindrical, linear or annular magnetic sensors. A linear or annular magnetic field forming portion, and the magnetic field forming portion and the planar, cylindrical, linear or annular magnetic sensor are integrally configured,
The fine particle shape measuring device is configured to sequentially energize each coil element of the magnetic field forming unit to form the magnetic field or the rotating magnetic field.
JP2002301285A 2002-10-16 2002-10-16 Particulate shape measurement device Withdrawn JP2004138419A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014112034A1 (en) * 2013-01-15 2014-07-24 三菱重工業株式会社 Abnormality diagnostic method and system
CN109100270A (en) * 2018-08-29 2018-12-28 大连海事大学 A kind of annular fluid channel oil liquid detection device and preparation method thereof
CN112781482A (en) * 2020-08-21 2021-05-11 哈尔滨工业大学（威海） Method for measuring space curvature of deformable curved surface and method for manufacturing inductive space curvature measurement sensitive element
CN115963038A (en) * 2022-12-14 2023-04-14 中国科学院空间应用工程与技术中心 Magnetic particle motion track measuring system and method based on space microgravity condition

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014112034A1 (en) * 2013-01-15 2014-07-24 三菱重工業株式会社 Abnormality diagnostic method and system
CN109100270A (en) * 2018-08-29 2018-12-28 大连海事大学 A kind of annular fluid channel oil liquid detection device and preparation method thereof
CN109100270B (en) * 2018-08-29 2020-10-02 大连海事大学 Annular micro-channel oil liquid detection device and manufacturing method thereof
CN112781482A (en) * 2020-08-21 2021-05-11 哈尔滨工业大学（威海） Method for measuring space curvature of deformable curved surface and method for manufacturing inductive space curvature measurement sensitive element
CN112781482B (en) * 2020-08-21 2022-10-14 哈尔滨工业大学（威海） Method for measuring space curvature of deformable curved surface and method for manufacturing inductive space curvature measurement sensitive element
CN115963038A (en) * 2022-12-14 2023-04-14 中国科学院空间应用工程与技术中心 Magnetic particle motion track measuring system and method based on space microgravity condition
CN115963038B (en) * 2022-12-14 2023-07-28 中国科学院空间应用工程与技术中心 Magnetic particle motion trail measurement system and method based on space microgravity condition

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