JP2004136439A - Swing part holding mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small and highly reliable swing part holding mechanism. <P>SOLUTION: The swing part holding mechanism includes at least two holding arms 21 and 22 whose one end or center is pivoted for holding a swing part 20 from at least two opposite directions at the other end, and a cam plate 23 having through holes which the centers or the ends of the holding arms 21 and 22 pass through for driving the arms 21 and 22. The through hole is formed so that the distance from the rotation center gets larger or smaller in the sequence of one end, the other end and the center. When the holding arms 21 and 22 are located at one end of the through hole, the arms 21 and 22 are distant from the swing part 20, and when they are located at the other end, they hold the swing part 20, so that when they are located at the center, force for holding the swing part 20 becomes larger. <P>COPYRIGHT: (C)2004,JPO

Description

The present invention relates to a configuration of a vibration control mechanism used for a pointing control device installed on the ground or mounted on an artificial satellite, an aircraft, or the like, for example.

FIG. 24 is a configuration diagram showing an active vibration isolator which is an example of a conventional vibration control device disclosed in Patent Document 1, in which 101 is a floor, 102 is a gantry, 103 is an active vibration isolator, 104 Is a surface plate, 105 is a mounting device such as an electron beam exposure apparatus, 106 is a movable member such as a sample mounting table, 107 is an internal structural member such as an electron gun, 108a is a vertical actuator, and 109X and 109Y are detections. 110, a low-pass filter, 111, an A / D converter, 112, a digital signal processor (DSP), 113, a computer, 114, a D / A converter, 115, an amplifier, 130, a controller, and 131, a motor.

Next, the operation of the active vibration isolator shown in FIG. 24 will be described. A plurality of detectors 109X, 109Y, 109Z (not shown) for detecting respective vibrations are arranged on the device 105 and the base 104, and the controller 130 responds to signals from the respective detectors 109X, 109Y, 109Z. By controlling each of the vertical actuators 108a, the signal of each signal between the members of the device 105, that is, between the internal structural member 107 and the movable member 106, or between the members 106 and 107 of the device 105 and the surface plate 104 is controlled. Reduce the relative value. That is, the signals from the detectors 109X, 109Y, and 109Z are input to the low-pass filter 110 and the DSP 112 through the A / D converter 111. An execution program for controlling the vertical actuator 108a is written in the DSP 112, and a signal calculated at high speed by the DSP 112 controls the vertical actuator 108a via the amplifier 115.

FIG. 25 is a configuration diagram showing a conventional pointing control device disclosed in Patent Document 2, for example, in which 201 is a transmission / reception telescope which is a mounted device, 202 is a coarse capturing and tracking mechanism, and 202a is a coarse capturing and tracking mechanism control circuit. , 203 is a fine capturing and tracking mechanism, 203a is a fine capturing and tracking mechanism control circuit, 204 is a pointing sensor, 205 is a tracking sensor, 206 is a communication light receiver, 207 is an optical line difference correction mechanism, 208 is a laser light source, and 83 and 86. Is a beam splitter, 85 is a dichroic mirror, and 100 is a laser beam from the partner station.

Next, the operation of the pointing control device shown in FIG. 25 will be described. The laser beam 100 from the partner station is received by the pointing sensor 204 by the fine capturing and tracking mechanism 203, the dichroic mirror 85, and the beam splitter 83, the relative angle error is output by the pointing sensor 204, and the transmission and reception telescope 201 is transmitted by the coarse capturing and tracking mechanism 202. Capture the other station. Further, the laser beam 100 from the partner station is received by the tracking sensor 205 by the fine capturing and tracking mechanism 203, the dichroic mirror 85, and the beam splitters 83 and 86, and the tracking sensor 205 outputs a relative angle error. Track stations.

JP-A-7-310779 JP-A-7-307703

In optical space communication devices mounted on artificial satellites, etc., in order to withstand the impact load at launch, a fixing jig that regulates the movement of the movable mirror and gimbal driving device is necessary, and the fixing jig is There were problems such as an increase in size and a complicated structure.
For example, in the case of a fixing jig that restrains a binding force with a wire, it is necessary to apply a force proportional to the holding force to the wire, and the wire and its supporting structure are increased in size, and a large force is required for cutting the wire.
Explosive explosive force is often used for wire cutting, and if a large force is required to cut the wire, the impact force at the time of cutting will increase, which will inevitably affect peripheral equipment. there were.

The present invention has been made to solve the above problems, and has as its object to provide a small and highly reliable swinging part gripping mechanism.

A swinging part gripping mechanism according to the present invention includes at least two gripping arms that are pivotally supported at one end or a central part and grip the swinging part at least at opposite ends from two opposite directions, and a central part or one end of the gripping arm. A cam plate that has a through hole therethrough and rotates to drive the gripping arm, and the through hole is formed such that the distance from the center of rotation is larger or smaller in the order of one end, the other end, and the center. When the gripping arm is located at one end of the through hole, the gripping arm is separated from the swinging part, when it is located at the other end, the swinging part is gripped. The gripping force is configured to be large.

According to the present invention, the swinging portion can be fixed with high reliability in spite of its small size, and the influence on peripheral devices when the grip is released can be significantly reduced. The transition from the released state to the holding state, the transition from the holding state to the released state, and the repetition of these steps are also possible.

Reference Example 1.
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a configuration diagram showing an example of the overall configuration of a vibration control mechanism for a directional control device according to Embodiment 1 of the present invention, FIG. 2 is a configuration diagram illustrating the configuration of the directional control device, and FIG. FIG. 3 is a sectional view taken along line A. In the figure, 1 is a fixed portion, 2 is a vibration damping portion, 3 is an elastic member for passive control, that is, a coil spring. The vibration damping portion 2 is swingably coupled to the fixed portion 1 via the coil spring 3. Reference numeral 4 denotes a non-contact electromagnet type actuator for active control, and reference numeral 5 denotes a non-contact capacitance type displacement sensor for detecting a displacement of the vibration damping unit 2 with respect to the fixed unit 1. Reference numeral 6 denotes a displacement converter for coordinate-converting a signal from each sensor 5 into 6-axis displacement, 7 a compensator for calculating a 6-axis control amount from the coordinate-converted 6-axis displacement, and 8 a calculated 6-axis control amount. This is a distributor for distributing to each actuator 4, and these displacement converter 6, compensator 7, and distributor 8 are realized using a digital signal processor (DSP) or an analog circuit. Reference numeral 9 denotes on-board equipment such as an observation device and a communication antenna, 13 denotes a directivity control device, 13a denotes a first drive mechanism of the directivity control device, and 13b denotes a second drive mechanism of the directivity control device.
Driving mechanisms for directing the on-board device 9 in the observation direction and the direction of the communication partner station are a first driving mechanism 13a and a second driving mechanism 13b of the pointing control device 13. In this reference example, the driving mechanism around the Z axis is used. A coil spring 3 for passive control, a non-contact electromagnet type actuator 4 for active control, and a non-contact capacitance type displacement sensor 5 for detecting displacement are provided on the side surface of the second drive mechanism 13b of the directional control device for performing rotary driving. A part of the pointing control device also functions as the vibration damping unit 2.

FIGS. 4, 5, and 6 are a front view, a side view, and a bottom view showing an example of the arrangement of the non-contact electromagnet type actuator and the non-contact capacitance type displacement sensor. In the figure, 401 to 414 are non-contact electromagnet type actuators for active control, 4a is a magnetic pole plate for attracting by an electromagnet, and 501 to 506 are non-contact capacitance type displacement sensors for detecting displacement. Note that the actuators shown in parentheses as in (409) in FIGS. 4 and 5 are arranged at the same position on the opposite surface.

Next, the operation will be described.
The pointing control device is, for example, the same as the conventional example, and performs optical communication between its own station and the other station like an optical space communication apparatus. It has a capturing and tracking function with a degree of freedom of rotation of the shaft, and its pointing accuracy is very high, requiring an order of several μrad. When the pointing control device 13 captures and tracks the partner station and the vibration suppression unit 2 fluctuates due to disturbance, the non-contact capacitance type displacement sensors 501 to 506 detect the displacement at that point. The displacement amount is input to a displacement converter 6, the six sensor information is converted into six-axis displacement, the six-axis displacement amount is input to a compensator 7, and the displacement is calculated using a PID (Propotional Integral and Differential) control rule. The axis control amount is calculated, and the 6-axis control amount is input to the distributor 8, and the control amount is distributed to the 14 actuators 401 to 414. Each of the actuators 401 to 414 sucks the magnetic pole plate 4a attached to the damping unit 2 based on the calculated control amount, and controls the damping unit 2 to a predetermined position.
The displacement amounts for the six sensors 501 to 506 are S _{1 to} S ₆ , the distance between the sensors is 21 (shown in FIG. 5), the distance between the actuators is 2d (shown in FIG. 4), and the six-axis displacement is x, y, z. , Θ _x , θ _y , θ _z . At this time, the relational expression between the six displacement sensor amounts and the six-axis displacement amounts is

It is expressed as
If the six-axis control amounts are f _x , f _y , f _z , t _x , t _y , t _z , and the actuator output amounts for the respective actuators 401 to 414 are f _{1 to} f ₁₄ , the six-axis control amounts are fourteen. The relationship between the actuator output amounts

It is expressed as

As described above, according to this embodiment, the vibration can be completely separated into six degrees of freedom, the translational component and the rotational component can be made non-interfering, and all six degrees of freedom components of the vibration can be controlled. .
Further, a plurality of elastic members 3 connected to the fixed unit 1 are arranged on the side surface of the drive mechanism unit 13b of the directional control device, and a part of the directional control device 13 also serves as the vibration damping unit 2. Vibration control such as reduction or increase of vibration transmitted from the fixed portion 1 can be performed without increasing the size. Another advantage is that sensors 501 to 503 and actuators 401 to 412 for controlling multiple degrees of freedom can be arranged on the side surface of the drive mechanism 13b around the normal axis of the mounting surface of the tracking mechanism.

In the above reference example, the sensor 5 is a displacement sensor, but also includes a speed sensor and an acceleration sensor.
In the above reference example, 14 non-contact electromagnet type actuators 4 are used. However, in order to control the 6-axis displacement by the actuator, FIGS. 7, 8 and 9 show a front view, a side view and a bottom view, respectively. As shown in another example of the arrangement of the non-contact electromagnet type actuator, at least ten actuators 401 to 410 may be used.
Further, in the above reference example, the magnetic pole plate 4a is arranged so as to face the electromagnet type actuator 4, but it is also assumed that an electromagnet type actuator is arranged instead of the magnetic pole plate 4a.
Note that, in the above reference example, a case where all six degrees of freedom components are controlled has been described, but the degrees of freedom to be controlled can be selected as needed. This is the same in each of the following reference examples.

Reference example 2.
Next, a vibration control mechanism for a pointing control device according to a second embodiment of the present invention will be described. The overall configuration is the same as in the first embodiment. The damping part 2 and the coil spring 3 can be regarded as a spring-mass system, and a portion higher in frequency than the natural frequency of the damping part 2 is cut off by -40 [dB / dec] in the frequency domain due to the cutoff characteristics of the spring-mass system. Show performance. On the low frequency side from the vicinity of the natural frequency of the vibration damping unit 2, an active control including a non-contact electromagnet type actuator 4, a non-contact capacitance type displacement sensor 5, a displacement converter 6, a compensator 7, and a distributor 8 Thus, damping is added to the damping unit 2 so as to suppress the resonance of the damping unit 2.

As described above, since the non-contact type actuator 4 can be supported only by the elastic member 3, the high frequency side can be controlled without deteriorating the high frequency vibration blocking performance, and the low frequency side can be controlled by the active control. , The damping can be added, the resonance of the vibration damping unit 2 can be suppressed, and the displacement of the vibration damping unit 2 can be suppressed to a certain level by the active control. As described above, it is also possible to follow an external target value.

Reference example 3.
FIG. 10 is a configuration diagram showing an overall configuration example of a vibration control mechanism for a pointing control device according to Embodiment 3 of the present invention. In the figure, reference numeral 19 denotes a command signal generator, which generates a target value from the outside by the command signal generator 19, inputs the command signal to the compensator 7, and controls the vibration damping unit 2 from the outside by active control. Follow the target value of

In the first and second embodiments, the control law of the compensator 7 is set such that the vibration damping unit 2 is subjected to vibration isolation. However, if the command signal generator 19 generates an oscillating command value, the pointing control is performed. The vibration damping unit 2 can be vibrated, for example, for performing a vibration environment test or the like of the device 13.

Reference example 4.
FIG. 11 is a configuration diagram showing an overall configuration example of a vibration control mechanism for a pointing control device according to Embodiment 4 of the present invention. In the figure, reference numeral 10 denotes a feedforward compensator, which is realized using, for example, a digital signal processor (DSP) or an analog circuit.
Next, the operation will be described. The 6-axis displacement amount is input to the feedforward compensator 10, and a feedforward control amount to the pointing control device 13 such as multiplying the 6-axis displacement amount by a gain is calculated, and the calculated feedforward control amount is subjected to directivity control. Input to the device 13.

By such feed-forward control, the attitude of the damping unit 2 can be transmitted to the pointing control device 13 mounted on the damping unit 2, and the pointing control device 13 can be prevented from being affected by the damping unit 2. The absolute pointing accuracy of the pointing control device 13 can be increased.

Reference example 5.
FIG. 12 is a configuration diagram showing an overall configuration example of a vibration control mechanism for a directional control device according to Embodiment 5 of the present invention. In the figure, 11 is a mode switch for switching the mode of the compensator 7, and 11a is a personal computer. The mode switch 11 is realized using a digital signal processor (DSP) or an analog circuit.

Next, the operation will be described.
When the operation of the pointing control device 13 is relatively small and in a steady state, damping is added to the damping unit 2 so as to suppress resonance of the damping unit 2 by active control, or the damping unit 2 is set to an external target value. Mode is set by the mode switcher 11 in order to follow the low gain mode.
In addition, when the vibration of the damping unit 2 is excited or when a large disturbance is applied, such as during the capturing and tracking operation of the pointing control device 13, the pointing accuracy of the pointing control device 13 is deteriorated due to the vibration of the damping unit 2. Therefore, a mode called a high gain mode is switched by the mode switch 11 so as not to excite the vibration of the damping unit 2, the rigidity of the damping unit 2 is increased, and the fluctuation of the pointing control device 13 is suppressed.
The setting method of the high gain mode and the low gain mode in the compensator 7 includes, for example, a method of changing only the gain using the same control law, and a method of changing the control law depending on the mode. The mode switching signal is manually input through the personal computer 11a.

As described above, according to the present embodiment, the mode of the compensator 7 is switched according to the operation of the pointing control device 13 or the information of the sensor 5. Therefore, when the operation of the device mounted on the vibration suppression unit 2 is large, the high gain mode is used. By increasing the rigidity of the damping unit 2, fluctuations of the damping unit 2 can be suppressed, it is possible to cope with the application of a large disturbance, and the operation of the device 13 mounted on the damping unit 2 is relatively small. In the case of a small steady state, the damping of the vibration damping unit 2 can be added by the low gain mode.

Reference example 6.
FIG. 13 is a configuration diagram showing an overall configuration example of a vibration control mechanism for a pointing control device according to Embodiment 6 of the present invention. In the figure, reference numeral 12 denotes a mode determiner, which is realized using a digital signal processor (DSP) or an analog circuit.

Next, the operation will be described.
When the operation of the pointing control device 13 is relatively small and in a steady state, damping is added to the damping unit 2 so as to suppress resonance of the damping unit 2 by active control, or the damping unit 2 is set to an external target value. In order to follow the above, the operation of the pointing control device 13 is determined by the mode determiner 12, a low gain mode switching signal is generated, and the signal is input to the mode switch 11 to switch to a mode called a low gain mode.
When the vibration of the damping unit 2 is excited or when a large disturbance is applied, such as during the capturing and tracking operation of the pointing control device 13, the pointing accuracy of the pointing control device 13 is deteriorated due to the vibration of the damping unit 2. The mode determiner 12 determines the operation of the pointing control device 13, determines the relationship between the six-axis displacement information and the mode switching set value, generates a high gain mode switching signal, and sends the signal to the mode switching device 11. By inputting, the mode is switched to a mode called a high gain mode so as not to excite the vibration of the damping unit, and the rigidity of the damping unit is increased to suppress the fluctuation of the pointing control device 13.

As described above, according to the present embodiment, since the mode switching unit 11 is operated by the output of the mode determination unit 12, the configuration of the entire system becomes easy, and the entire system can be configured autonomously.

Reference example 7.
FIG. 14 is a configuration diagram showing an overall configuration example of a vibration control mechanism for a pointing control device according to Embodiment 7 of the present invention. In the figure, 2a is a damping unit of a first damping unit, 2b is a damping unit of a second damping unit, 2c is a damping unit of a third damping unit, and 3a is a first damping unit. 3b is a passive control coil spring of the second vibration damping unit, 3c is a passive control coil spring of the third vibration damping unit, and 4a is an active control coil of the first vibration damping unit. Non-contact electromagnet type actuator, 4b is a non-contact electromagnet type actuator for active control of the second vibration damping unit, 4c is a non-contact electromagnet type actuator for active control of the third vibration damping unit, and 5a is the first damping unit. A non-contact capacitance type displacement sensor for detecting the displacement of the vibration damping unit, 5b is a non-contact capacitance type displacement sensor for detecting the displacement of the second vibration damping unit, and 5c is a displacement for the third vibration damping unit. Non-contact capacitive displacement sensor output 15 is a table carrying the directivity control unit 13. FIG. 15 shows an example of the arrangement of the vibration damping unit as viewed from above the fixed part 1, and the arrows indicate the driving direction of the actuator.

Next, the operation will be described.
The pointing control device 13 is mounted on a table 15, and the table 15 is supported by three vibration suppression units. Each vibration suppression unit has an active control axis having two degrees of freedom, and is disposed at the position of the vertex of an equilateral triangle so that the three vibration suppression units can perform active control of the table 15 with six degrees of freedom. Active control is possible in the direction perpendicular to the paper surface of FIG. 15, and since each paper parallel active control direction vector is 120 degrees, active control with six degrees of freedom is possible.
The signals detected by the non-contact capacitance type displacement sensors 5a, 5b, 5c in the three vibration damping units are input to the displacement converter 6 and separated into three translational degrees of freedom and three degrees of rotational movement. , Are input to the compensator 7. The control amount for each axis is calculated by the compensator 7 and input to the distributor 8. The non-contact electromagnet type actuators 4a, 4b, 4c in the three vibration suppression units are driven by this signal, and the pointing control device 13 mounted on the table 15 is damped.

With such a configuration, even when the mounted directional control device 13 is large, the table 15 on which the directional control device 13 is mounted is supported by the plurality of vibration suppression units, so that vibration control can be performed with a desired degree of freedom. .

In the above-described reference example, the case where three vibration damping units are used is shown. However, the number of vibration damping units is not limited to three, and it is sufficient if the entire freedom of the table 15 can be controlled. That is, the degree of freedom of active control of each damping unit may be equal to or greater than the degree of freedom desired to be damped. If the degree of freedom of the table 15 to be controlled is less than six degrees of freedom, the number of vibration suppression units that can configure the degree of freedom may be set.
Further, in the above reference example, an example in which one directional control device 13 is mounted on the table 15 is shown, but a plurality of directional control devices 13 may be mounted.

Further, the passive control and the active control are switched according to the natural frequency of the vibration damping unit 2 and the directivity control device 13 as in the case of the reference example 2, the feedforward compensator 10 is used as in the case of the reference example 4, The gain mode of the compensator 7 may be switched as in the case of the reference examples 5 and 6, and it is needless to say that the same effects as those of the above-described reference examples can be obtained.

Reference Example 8.
FIG. 16 is a configuration diagram showing an overall configuration example of a vibration control mechanism for a pointing control device according to Embodiment 8 of the present invention. In the figure, reference numeral 16 denotes four columns erected on the fixed portion 1, 3 denotes four elastic members or coil springs suspended from the upper end of the support column 16, and 15 denotes a lower portion of the four coil springs 3 suspended from the lower end. 13, a pointing control device 13 mounted on the table 15, a box 17 mounted on the lower side of the table 15, and an auxiliary unit 18 disposed adjacent to the box 17 and attracted by the non-contact electromagnetic actuator 4. Mass. Note that in this reference example, the table 15 and the box 17 constitute a vibration damping unit. FIG. 17 shows a state in which the auxiliary mass 18 is removed and the box 17 is viewed from below.

Next, the operation will be described.
The four columns 16 erected on the fixed part 1 pass through holes formed in the base 15. Further, the table 15 on which the pointing control device 13 is mounted is suspended from the upper portions of the four columns 16 by four coil springs 3, respectively, and has three translational degrees and three rotational degrees of freedom. On the side and underside of the box 17 below the table 15, ten non-contact electromagnet type actuators 4 for active control and six non-contact capacitance type displacement sensors 5 are attached. The auxiliary mass 18 has such a shape as to enclose the box 17, the actuator 4, and the sensor 5. The auxiliary mass 18 converts the signal of the sensor 5 with the displacement converter 6, and outputs the command value generated by the command signal generator 19. After comparing and calculating the six-axis control amounts with the compensator 7, the auxiliary mass 18 is supported in a non-contact manner by the control for distributing to the drive signal of the actuator 4 by the distributor 8. As a result, the position of the auxiliary mass 18 with respect to the box 17 is controlled so as to be a command value generated by the command signal generator 19, and the auxiliary mass 18 is relatively moved with respect to the base 15 to have six degrees of freedom. Operating force can be applied to the table 15 having The control law of the compensator 7 is set so that this operating force weakens the vibration transmitted from the fixed part 1 to the table 15, and the directional control device 13 mounted on the table 15 is isolated.

In the case of this embodiment as well, as in Embodiment 1, the vibration can be completely separated into six degrees of freedom, the translational component and the rotational component can be made non-interfering, and all the six degrees of freedom components of the vibration can be controlled. it can.
Further, since all the six-degree-of-freedom components can be controlled by one auxiliary mass 18 using ten actuators 4, it is possible to use the actuator for vibration suppression with a small number of degrees of freedom.

In the above-described reference example, the control law of the compensator 7 is set such that the vibration of the pointing control device 13 is performed. However, if the command signal generator 19 generates an oscillating command value, the pointing control device The pointing control device 13 can also be vibrated, for example, for performing a vibration environment test or the like of the thirteenth embodiment.

Further, as in the case of Reference Example 7, one in which the actuator 4, the sensor 5, and the auxiliary mass 18 are disposed in the box 17 is one vibration suppression unit, and each unit has an active control axis having two degrees of freedom. By arranging the three vibration suppression units on the base 15, it is possible to cope with the case where the directional control device 13 to be mounted is large.
In addition, as in the case of the first embodiment, by incorporating the second drive mechanism 13b inside the box 17, a part of the directivity control device 13 can be used also as the vibration control mechanism, so that it is possible to avoid an increase in the size of the entire device. Can be.
Further, the passive control and the active control are switched according to the natural frequency of the vibration damping unit 2 as in the case of the above-described reference example 2, the feedforward compensator 10 is used as in the case of the reference example 4, and the reference examples 5 and 6 are used. As in the case of the above, the gain mode of the compensator 7 may be switched, and it goes without saying that the same effects as those of the above-described respective reference examples can be obtained.

Embodiment 1 FIG.
FIG. 18 is a configuration diagram showing an overall configuration example of the swinging part gripping mechanism according to Embodiment 1 of the present invention. (A) shows a locked state, and (b) shows a released state. FIG. 19 shows an example of the shape of a cam plate used in the present embodiment. In these figures, reference numeral 20 denotes a swinging unit, such as a vibration control unit 2 of the vibration control mechanism or a mirror of an observation device of the pointing control device 13 as shown in each of the above-mentioned reference examples. 21 is a first gripping arm for gripping the swinging part, 22 is a second gripping arm for gripping the swinging part, 23 is a cam plate for driving the gripping arms 21 and 22, 23a and 23b are through holes, and 24 is a through-hole. An end plate 25 to which one end of the gripping arm is pivotally mounted is a cam plate driving actuator 25 such as a motor. The cam plate 23 has through-holes 23a and 23b having a shape as shown in FIG. 19, and the grip arms 21 and 22 have central portions that pass through the through-holes 23a and 23b, respectively, and have one end axially attached to the end plate 24. Have been. FIG. 20 shows the relationship between the rotation angle of the cam plate 23 and the radius of curvature.

Next, the operation will be described.
As shown in FIGS. 19 and 20, at a position where the rotation angle of the cam plate 23 rotationally driven by the cam plate driving actuator 25 is θ ₀ (that is, at one end of the through hole), the hole is moved from the rotation center of the cam plate 23 to the hole. The distance to 23a, 23b, that is, the radius of curvature r ₀ is maximized, and the gripping arms 21, 22 are separated from the swinging part 20 and are in the released state as shown in FIG. To the swinging portion 20 to the lock state, it rotates the cam plate 23 by a cam driving actuator 25 and the position of theta ₂ (i.e. the position of the other end of the through hole). At the position where the rotation angle of the cam plate 23 is θ ₂ , the radius of curvature r ₂ becomes small, and the gripping arms 21 and 22 sandwich the swinging part 20 from both sides as shown in FIG.
There is an approximately inverse relationship between the radius of curvature and the gripping force of the oscillating portion 20, and the smaller the radius of curvature of the cam plate 23, the greater the gripping force. Therefore, at the position of the rotation angle θ ₁ where the cam plate 23 is between θ ₀ and θ ₂ (that is, at the center of the through hole), the radius of curvature r ₁ is minimum in these sections and the gripping force is maximum. Therefore, it is possible to prevent after the cam plate 23 is made in a locked state of the rotation angle theta _2, the loosening in the direction of the released state. That is, the gripping mechanism once locked has a self-holding function. To change from the locked state to the released state, the cam plate driving actuator 25 may be rotated in the reverse direction, and the rotation angle of the cam plate 23 may be rotated from θ ₂ to θ ₀ .

As described above, in the present embodiment, since the wire or the like is not used, and it is possible to prevent loosening in the direction of the released state after the locked state, the swinging part can be fixed with high reliability in a small size. At the same time, the effect on peripheral devices at the time of grip release can be significantly reduced. The transition from the released state to the holding state, the transition from the holding state to the released state, and the repetition of these steps are possible.

In the above-described embodiment, the case where the gripping arms 21 and 22 are pivotally attached to the end plate 24 at one end has been described. An embodiment in this case is shown in FIG. (A) shows a locked state, and (b) shows a released state. In this case, the shape of the cam plate 23 may be, for example, as shown in FIG. That is, the radius of curvature r ₀ is minimized at the rotation angle θ ₀ of the cam plate 23 so that the gripping arms 21 and 22 are in the released state. When the cam plate 23 is rotated to θ ₂ , the radius of curvature r ₂ is It becomes larger, and the swinging unit 20 is held by the holding arms 21 and 22. Further, in the state where the cam plate rotation angle is θ ₁ between θ ₀ and θ ₂ , the radius of curvature r ₁ may be maximized in these sections. FIG. 23 shows a relationship diagram between the rotation angle of the cam plate 23 and the radius of curvature.
In this case, there is an approximately proportional relationship between the radius of curvature and the gripping force of the oscillating portion 20, and the gripping force increases as the radius of curvature of the cam plate 23 increases.

In the above-described embodiment, the case where the number of the gripping arms 21 and 22 is two is shown, but three or more gripping arms may be used. For example, in the case of three, the gripping arms may be arranged at intervals of 120 degrees.
Needless to say, a configuration suitable for gripping a flange or the like may be applied to a portion of the swinging portion 20 gripped by the gripping arms 21 and 22.
Further, the cam plate driving actuator 25 may be any actuator such as a motor as long as it can generate a rotational force.
Further, when driving in only one direction from the released state to the locked state or from the locked state to the released state, the cam plate driving actuator 25 may be a paraffin actuator, a rotary spring, or the like in addition to a motor.

FIG. 1 is a configuration diagram illustrating an overall configuration of a vibration control mechanism for a pointing control device according to a first embodiment of the present invention. FIG. 2 is a configuration diagram illustrating a configuration of a pointing control device in FIG. 1. FIG. 3 is a sectional view taken along line AA of FIG. 2. It is a front view which shows an example of arrangement | positioning of the non-contact electromagnet type | mold actuator and the non-contact electrostatic capacitance type displacement sensor which concerns on the reference example 1. It is a side view which shows an example of arrangement | positioning of the non-contact electromagnet type | mold actuator and the non-contact electrostatic capacitance type displacement sensor which concerns on the reference example 1. It is a bottom view which shows an example of arrangement | positioning of the non-contact electromagnet type | mold actuator and the non-contact electrostatic capacitance type displacement sensor which concerns on the reference example 1. It is a front view which shows the other example of arrangement | positioning of the non-contact electromagnet type | mold actuator and the non-contact capacitance type displacement sensor which concerns on the reference example 1. It is a side view which shows the other example of arrangement | positioning of the non-contact electromagnet type | mold actuator and the non-contact electrostatic capacitance type displacement sensor which concerns on the reference example 1. It is a bottom view which shows the other example of arrangement | positioning of the non-contact electromagnet type | mold actuator and the non-contact electrostatic capacitance type displacement sensor which concerns on the reference example 1. FIG. 9 is a configuration diagram illustrating a vibration control mechanism for a pointing control device according to a third embodiment of the present invention. FIG. 9 is a configuration diagram illustrating a vibration control mechanism for a pointing control device according to a fourth embodiment of the present invention. FIG. 9 is a configuration diagram illustrating a vibration control mechanism for a pointing control device according to a fifth embodiment of the present invention. FIG. 13 is a configuration diagram illustrating a vibration control mechanism for a pointing control device according to a sixth embodiment of the present invention. FIG. 13 is a configuration diagram illustrating a vibration control mechanism for a pointing control device according to a seventh embodiment of the present invention. FIG. 18 is a top view illustrating an example of the arrangement of the vibration damping units as viewed from above a fixing portion according to Reference Example 7. It is a block diagram showing a vibration control mechanism for a pointing control device according to Embodiment 8 of the present invention. It is a bottom view which shows the arrangement | positioning of the sensor and the actuator attached to the box in connection with Reference Example 8. 3A and 3B are configuration diagrams illustrating an example of a swinging part gripping mechanism according to the first embodiment of the present invention, wherein FIG. 3A illustrates a locked state, and FIG. 3B illustrates a released state. FIG. 19 is an explanatory diagram illustrating an example of a shape of a cam plate used in FIG. 18. FIG. 20 is a characteristic diagram illustrating a relationship between a rotation angle and a radius of curvature of the cam plate illustrated in FIG. 19. It is a block diagram which shows the other example of the rocking | swiveling part holding mechanism concerning Embodiment 1 of this invention, (a) shows a lock state, (b) shows a release state. FIG. 22 is an explanatory diagram showing an example of a shape of a cam plate used in FIG. 21. FIG. 23 is a characteristic diagram showing a relationship between a rotation angle and a radius of curvature of the cam plate shown in FIG. 22. FIG. 9 is a configuration diagram illustrating a conventional vibration control device. FIG. 9 is a configuration diagram illustrating a conventional pointing control device.

Explanation of reference numerals

1} fixed part, {2} damping part, {3} coil spring, {4,401-414} non-contact electromagnet type actuator, {4a} magnetic pole plate, {5,501-506} non-contact capacitance type displacement sensor, {6} displacement converter, {7} compensator, 8} distributor, {9} onboard equipment, {10} feedforward compensator, {11} mode switcher, {11a} personal computer, {12} mode discriminator, {13} pointing control device, {13a, 13b} first and second drive mechanisms, {15} units, {16} columns, 17} box, {18} auxiliary mass, {19} command signal generator, {20} swing part, {21, 22} first and second gripping arms, {23} cam plate, {24} end plate, {25} cam plate drive actuator, {} 101 floor, {102} mount, {103} active vibration isolation member, {104} surface plate, {105} structure, {106} movable member, {107} internal structure member, {108a} vertical actuator, {109x, 109y} detector, {110} low-pass filter, {111} A / D conversion , 112 digital signal processor, 113 computer, 114 D / A converter, 115 amplifier, 118 passive vibration isolation member, 130 controller, 131 motor, 201 transmission / reception telescope, 202 coarse capture tracking mechanism, 203 fine capture tracking mechanism, 204 pointing Sensor, {205} tracking sensor, {206} communication light receiver, {207} optical line difference correction mechanism, 208 laser light source, 83 and 86 a beam splitter, 85 a dichroic mirror, the laser beam from 100 other station.

Claims (1)

At least two gripping arms that are pivotally supported at one end or the central portion and grip the swinging portion at least at the other end from at least two opposing directions, and have a through-hole through the central portion or the one end of the gripping arm to rotate. A cam plate for driving the gripping arm, wherein the through-hole is formed such that the distance from the center of rotation increases or decreases in the order of one end, the other end, and the center, and the gripping arm is connected to one end of the through-hole. The gripping arm is separated from the swinging part when it is located at the position, the swinging part is gripped when it is located at the other end, and the gripping force of the swinging part is increased when it is located at the center. A swinging part gripping mechanism.

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