JP2004126509A5 - - Google Patents
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- Publication number
- JP2004126509A5 JP2004126509A5 JP2003112577A JP2003112577A JP2004126509A5 JP 2004126509 A5 JP2004126509 A5 JP 2004126509A5 JP 2003112577 A JP2003112577 A JP 2003112577A JP 2003112577 A JP2003112577 A JP 2003112577A JP 2004126509 A5 JP2004126509 A5 JP 2004126509A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US37351702P | 2002-04-18 | 2002-04-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004126509A JP2004126509A (ja) | 2004-04-22 |
| JP2004126509A5 true JP2004126509A5 (OSRAM) | 2009-03-19 |
Family
ID=32298177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003112577A Pending JP2004126509A (ja) | 2002-04-18 | 2003-04-17 | 溶媒及び１９３ｎｍイメージング用フォトレジスト組成物 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7205087B2 (OSRAM) |
| JP (1) | JP2004126509A (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101112545B1 (ko) | 2004-12-16 | 2012-03-13 | 스미또모 가가꾸 가부시끼가이샤 | 감광성 수지 및 상기 감광성 수지로 이루어진 패턴을포함하는 박막 표시판 및 그 제조 방법 |
| TW200634448A (en) * | 2005-02-09 | 2006-10-01 | Showa Denko Kk | Photosensitive composition removing liquid |
| JP4762630B2 (ja) * | 2005-08-03 | 2011-08-31 | 東京応化工業株式会社 | レジスト組成物およびレジストパターン形成方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002030118A (ja) * | 2000-07-14 | 2002-01-31 | Tokyo Ohka Kogyo Co Ltd | 新規コポリマー、ホトレジスト組成物、および高アスペクト比のレジストパターン形成方法 |
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2003
- 2003-04-17 JP JP2003112577A patent/JP2004126509A/ja active Pending
- 2003-04-18 US US10/418,740 patent/US7205087B2/en not_active Expired - Lifetime