JP2004090136A - Micro hand - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micro hand, small-sized, costing low, and exhibiting a high-accuracy function. <P>SOLUTION: This micro hand includes end effectors 3, 14 having finger pieces 4, 5. The effector 3 is disposed to penetrate inside the effector 14. At least one of the effectors 3, 14 is connected to a base 2 through three link mechanisms 6, 7. The central parts (the top part) of the link mechanisms 6, 7 are connected to the lower surfaces of the corresponding end effectors, and expanded in three ways from the centers of the end effectors 6, 7 with the midway to the tip extending along the outer surface of the base 2. In the base 2, a plate-like arm 8 forming a part of each link mechanism 6, 7 is expanded from the upper surface of the base toward the link mechanisms 6, 7, and the midway to the tip is extended along the outer surface of the base. The plate-like arm 8 is connected to the link mechanisms 6, 7, and integrally formed. A piezoelectric element 90 for operating the link mechanisms is disposed in the base 2. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
INDUSTRIAL APPLICABILITY The present invention can be used in industrial fields that require fine operations, such as biotechnology, medicine, and manufacturing and inspection of semiconductor integrated circuits, and can accurately and easily perform fine operations such as positioning, transferring, cutting, and joining of minute objects. The present invention relates to a microhand suitable for use in a sample stage mechanism for performing precise positioning or the like.
[0002]
[Prior art]
As a micromanipulator suitable for fine work under a microscope, when performing a fine operation with one finger piece, for example, there is a three-degree-of-freedom micromanipulator described in JP-A-10-138177.
[0003]
This prior art is a three-degree-of-freedom micromanipulator developed focusing on the fact that, in microscopic work under a microscope, translational three-degree-of-freedom movements in three axes orthogonal to each other are the main operations. The three link mechanisms connecting the end effectors realize precise positioning control of the end effectors with three degrees of freedom.
[0004]
As for the link mechanism, three pairs of four-degree-of-freedom link mechanisms such as an RRPP mechanism, an RPRP mechanism, a PRPR mechanism, and an RPPR mechanism are combined in parallel by combining a rotation pair and a translation pair (R is a rotation pair and P is a translation pair). By making the end effector operate in three degrees of freedom, the both ends of the hinge part of the rotating pair and the connecting rod part of the translation pair can be made thin to enable the rotation pair and the translation pair. ing.
[0005]
This conventional technique does not require a ball joint or the like in a hinge portion or the like, and has an advantage that the components and the mechanism can be simplified. However, specific proposals have been made on how to fabricate a flexible structure that constitutes a link mechanism of a micromanipulator so as to be inexpensive and miniaturized, its material, and the arrangement of an actuator as a mechanism for driving. Not.
[0006]
The present inventors previously disclosed in Japanese Patent Application Laid-Open No. 8-132363 (Patent No. 2560262) and the like a micro-hand mechanism provided with two small chopstick-shaped finger pieces (hand pieces) that function as fingers. (Manipulator). The micro-hand mechanism having the chopstick-shaped finger pieces realizes grasping, lifting, rotating, moving, and opening a small object of about several μm under an optical microscope.
[0007]
In this prior art, an upper parallel link mechanism and a lower parallel link mechanism that control a motion with six degrees of freedom are arranged in two stages. The upper parallel link mechanism moves one of the two finger pieces (the first finger piece and the second finger piece) to generate a minute relative movement between the finger pieces. The lower parallel link mechanism positions the first finger and the second finger relative to an object located in a wide work space. The upper parallel link mechanism includes two end effectors (base, support) having respective finger pieces. Of these, one end effector (post) is disposed in a penetrating state on the other end effector (base), and is fixed to the intermediate base. The other end effector (substrate) has a needle tip (fingertip) aligning mechanism and is connected to the intermediate base via six link mechanisms. Each link incorporates a piezoelectric element. Each link is made expandable and contractable by the piezoelectric element, and one end effector (substrate) is slightly displaced to cause the finger to perform a chopstick-like operation. The number of piezo piezoelectric elements used for each of the six links is three, which is three times with one finger mechanism, and four times as large with the two finger mechanism.
[0008]
As the number of piezoelectric elements increases, the control system becomes complicated and the cost increases. Therefore, the present inventors further disclosed in Japanese Patent Application No. 2000-388700 a translational three-degree-of-freedom two-finger micro-hand mechanism (manipulator). Has been proposed.
[0009]
[Problems to be solved by the invention]
SUMMARY OF THE INVENTION An object of the present invention is to provide a two-fingered micro-hand capable of accurately and easily performing a fine work by grasping a minute object, or performing simple and highly accurate positioning by applying to a precision positioning stage mechanism or the like. It is to provide a mechanism. In particular, it is an object of the present invention to provide an unprecedented small-sized micro hand capable of exhibiting high-precision functions by integrating the end effector, the link mechanism, and the base member.
[0010]
[Means for Solving the Problems]
The present invention is basically configured as follows in order to solve the above problems.
(1) The micro hand includes a pair of end portions (end effectors) each having a finger piece. One end effector is disposed penetrating inside the other end effector. At least one of the end effectors is connected to the base via three link mechanisms. The three link mechanisms are plate-shaped link mechanisms integrally formed by sheet metal processing or etching processing and formed by a combination of a rotating pair and a translation pair. The center (top) of each of the three link mechanisms is connected to the lower surface of the corresponding end effector, and extends in three directions from the center of the end effector, and extends from the middle to the tip along the outer surface of the base. On the base, a plate-like arm which is a part of the link mechanism extends from the center of the upper surface of the base in the direction of the link mechanism, and extends from the middle to the tip along the outer surface of the base. This plate-shaped arm is connected to or integrated with the link mechanism. The base is provided with an actuator that applies a force to each of the plate-shaped arms to operate the link mechanism.
(2) In the case where both of the above-mentioned end effectors (first and second end effectors) are operated by three link mechanisms, respectively, the link mechanism of the above-described sheet-shaped or etched plate-shaped molded body is used. In addition, the first and second end effectors are connected to a common base via respective link mechanisms.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0012]
FIG. 1 is a perspective view of a micro hand mechanism according to a first embodiment of the present invention, FIG. 2 is an exploded perspective view thereof, and FIG. 3 is a partially omitted vertical sectional view of the first embodiment.
[0013]
The micro hand 1 shown in FIG. 1 is used in combination with one or more or other forms of micro hands (manipulator elements). Even in the case of using a single object, the needle 4 and the needle 5 serving as finger pieces can perform a chopstick-like operation, and a minute object can be picked up or transferred by the fine operation.
[0014]
The microhand 1 includes a columnar base 2, a first end effector (for example, a cylinder) 3 having a needle 4, and a second end effector (a Body) 14, one set of three link mechanisms 6, another set of three link mechanisms 7, and six plate-like arms 8 that are a part of the link mechanisms 6 and 7.
[0015]
The end effector 14 has a hole 140 for disposing the end effector 3 inside the end effector 3.
[0016]
The link mechanism 6 is screwed to the lower surface of the end effector 3, and the link mechanism 7 is screwed to the lower surface of the end effector 14. The plate arm 8 is screwed to the upper surface of the base 2.
[0017]
FIG. 5 is a perspective view of the link mechanism 6 alone, and FIG. 8 is a development view in which a part thereof is omitted (two of the three link mechanisms are omitted). FIG. 6 is a perspective view of the link mechanism 7 alone, and FIG. 9 is a development view in which a part thereof is omitted (two of the three link mechanisms are omitted). FIG. 10 is a development view in which a part of the single plate-shaped arm 8 is omitted.
[0018]
The link mechanisms 6 and 7 and the plate arm 8 are formed by processing a flexible thin plate (for example, a spring material such as phosphor bronze).
[0019]
The three link mechanisms 6 are integrally formed and spread in three directions at intervals of 120 degrees from the central portion 60 of the top portion (movable plate portion) 6a as shown in FIG. 5, and a portion 6b extending from the middle to the tip is shown in FIG. Is bent at an angle slightly larger than 90 degrees, and is formed along the outer surface of the base 2 during assembly (FIGS. 1 and 3). A screw hole 61 is provided at the center of the top of the three link mechanisms 6. The three link mechanisms 6 are attached to the lower surface of the end effector 3 by tightening the screws 42 via a screw hole 61 and a screw hole 42 (shown in FIG. 3) provided in the center of the lower surface of the end effector 3.
[0020]
On the other hand, another set of three link mechanisms 7 is integrally formed and, as shown in FIG. 6, extends in three directions at intervals of 120 degrees from the central portion 70 of the top portion (movable plate portion) 7a, and extends from the middle to the tip. 7b is bent at an angle where the bending angle θ is somewhat larger than 90 degrees, as described above, and forms along the outer surface of the base 2 during assembly (FIGS. 1 and 3). A hole 71 for penetrating the effector 3 is provided at the center of the top portion 70 of each of the three link mechanisms 7. The link mechanism 7 is provided with a screw hole 72 for attachment near the through hole 71, and is screwed through the screw hole 72 and the screw hole 40 (shown in FIG. 3) provided in the center of the lower surface of the end effector 14. By tightening 41, the three link mechanisms 7 are attached to the lower surface of the end effector 14.
[0021]
The six plate-like arms 8 are integrally formed and, as shown in FIG. 2, spread in six directions at intervals of 60 degrees from the central part 80 of the top part (movable plate part) 8a. The bending angle θ is bent at an angle slightly larger than 90 degrees, and the shape is along the outer surface of the base 2 during assembly (FIGS. 1 and 3). A screw hole 81 is provided at the center of the top of the plate arm 8. The six plate-shaped arms 8 are attached to the upper surface of the base 2 by tightening the screws 83 via the screw holes 81 and the screw holes 82 provided at the center of the upper surface of the base 2.
[0022]
In the assembled state of the micro hand, the plate arm 8 is located inside the plate link mechanisms 6 and 7. A part 8b of the plate arm 8 is superimposed on a part of the link mechanism 6, 7 (a part along the outer surface of the base 2) 6b, 7b. By passing the screw 90 through the screw holes 65 and 75 provided at the distal ends of the link mechanisms 6 and 7 and the screw hole 85 provided at the distal end of the plate arm 8, each of the link mechanisms 6 and 7 has a plate-like shape. It is connected to the arm 8 at the terminal position. The link mechanisms 6, 7 and the plate arm 8 may be integrally formed.
[0023]
In this case, the link mechanism (upper plate) 6 and the plate-shaped arm (lower plate) 8 are spaced at 120 °, the link mechanism (upper plate) 7 and the plate-shaped arm (lower plate) 8 are spaced at 120 °, and The link mechanisms (upper plates) 6 and 7 are connected to the plate arm 8 in a state where the link mechanisms 6 and 7 are shifted at an angle of 60 °.
[0024]
In this way, the end effectors 3 and 14 are connected to the upper surface of the base 2 via the link mechanisms 6 and 7 and the plate-like arm 8. The link mechanisms 6 and 7 are respectively upper halves of the three link mechanisms, and the plate arm 8 is a lower half of the three link mechanisms.
[0025]
Each of the three link mechanisms 6 and 7 is configured by a four-degree-of-freedom link mechanism in which a rotation pair R and a translation pair P are combined, and thus the end effectors 3 and 14 are translated. The operation has three degrees of freedom.
[0026]
The three link mechanisms 6, 7 have a shape that expands in three directions as shown in FIGS. 8 and 9 in the unfolded state. Angle). In addition, the six plate-shaped arms 8 have a shape that expands in six directions as shown in FIG. 10 in the expanded state. In the assembled state, it is bent substantially at a right angle at the intermediate position 18d as described above.
[0027]
As shown in FIG. 7, three arms are integrally formed at intervals of 120 degrees with respect to the plate arm 8, and two sets of the arms are attached to the upper end surface of the base 2 with the sets shifted by 60 degrees. Is also good.
[0028]
Here, the principles of the rotation pair R and the translation pair P formed in the link mechanisms 6 and 7 will be described with reference to FIGS.
[0029]
As shown in FIG. 12A, by connecting a pair of pair members 19 with a thin portion (constricted portion) 23, a rotating pair R can be realized. That is, the arc hinge shown in FIG. 12A can be regarded as a rotation pair R having one degree of freedom if the displacement is minute.
[0030]
As shown in FIG. 12 (b), both ends of a pair of parallel pair members (upper and lower sides) 20 are connected by a pair of connecting rods (left and right sides) 21 via respective thin portions (constrictions) 22. Then, a flexible structure (parallelogram link) realizing the translation pair P can be formed. That is, the structure as shown in FIG. 12B draws a circular orbit centered on the bottom hinge (thin portion) 22 if the displacement is large, but it is regarded as a translational pair P having one degree of freedom within a minute displacement. Can be.
[0031]
When designing a three-degree-of-freedom parallel mechanism using three link mechanisms, a translational three-degree-of-freedom operation can be realized by combining these pairs R and P. However, at least two directions of the hinge are required, and it becomes difficult to fabricate the mechanism.
[0032]
Here, as shown in FIG. 13A, by punching a slit 25 in the thin plate 24, hinges (narrow portions) 23 are formed on both sides of the slit 25, and the rotating pair R can be easily formed. Further, as shown in FIG. 13B, by combining punching and bending with one thin plate 24, the direction of the hinge (constriction) 22 is changed, and the translation corresponding to FIG. The even number P can be realized. In FIG. 13B, a square hole 30 (having a slit 28 in the corner) and a small slit 29 (aligned in the width direction with the slit 28) are punched, and the side plate 27 is bent. Thereby, the constricted portion 22 can be formed and its direction can be changed. The pair of side plate portions 27 serve as connecting rod portions (corresponding to the connecting rod portions 21 in FIG. 12) that connect the pair of pairs 26 (corresponding to the pair of pairs 20 in FIG. 12).
[0033]
In this embodiment, the link mechanisms 6 and 7 are configured by combining the link elements (rotational pair R and translational pair P) shown in FIGS.
[0034]
As shown in FIGS. 2 and 5 to 9, each of the link arm portions 6 b and 7 b of the link mechanisms 6 and 7 has slits 100 and 101 in the width direction at both ends in the longitudinal direction, and positions indicated by reference numeral 6 d. Bend at. The portions 100 'and 101' where the plate width is reduced by these slits substantially serve as hinge portions, and a total of three rotating pairs R (corresponding to FIG. 13A) are formed.
[0035]
It should be noted that various forms of the slit are conceivable and are not limited to those of the embodiment.
[0036]
In the plate-like arm 8, as shown in FIG. 10, a widthwise slit 18 is formed at one longitudinal end of each plate-like arm portion 8 'oriented in six directions, and each arm portion 8' is indicated by 8d. It is bent at the position.
[0037]
In the link mechanisms 6 and 7, a square hole 10 (a notch slit 10 'extending in the width direction at the corner) is provided between the tip of the link arm portion 6b, 7b and the bent portion (intermediate portion) 6d, 7d. And a slit 11 are formed. The notch 10 'and the slit 11 correspond to slits indicated by reference numerals 28 and 29 in FIG. 13B, and a hinge 22 is formed between the slit 10' and the slit 11.
[0038]
Side plates 12 are formed on the left and right sides of the link mechanisms 6 and 7 in the width direction of the link arms 6b and 7b. This side plate portion 12 is bent at the position of the broken line H in FIGS. 8 and 9, and corresponds to the connecting rod portion 27 in FIG. 12B. The notch slit 10 ′ extends so as to intersect the bending line H. By bending the side plate portion 12, the direction of the hinge portion 22 can be changed.
[0039]
Reference numeral 13 corresponds to the pair of even pairs 26 in FIG. That is, a pair of side plates (connecting rods) 12 and a pair of pairs 13 form a parallelogram link. A parallelogram link can be regarded as a translation pair P when viewed within a small displacement.
[0040]
According to the above configuration, each of the link mechanisms 6 and 7 has three rotating pairs R and one translation pair P by forming a flexible plate material. FIG. 11 is a schematic view showing a combination of a rotating pair R and a translation pair P according to the present embodiment. FIG. 11A shows a pair mechanism viewed from the side of the link mechanism in the present embodiment, and FIG. Is the pair mechanism viewed from the front.
[0041]
As shown in FIG. 2, in this embodiment, each of the link mechanisms 6, 7 employs three RPRR mechanisms. This mechanism is pushed up by a piezoelectric element 90 (FIG. 3) via a plate-like arm (lower plate) 8 so that the tops (movable plates) 6a, 7a of the three link mechanisms 6, 7 have three axes of three degrees of freedom. Exercise can be given.
[0042]
Next, the driving mechanism of this embodiment will be described with reference to FIG.
[0043]
As shown in FIG. 3, for example, a piezoelectric element is used as an actuator 90 serving as a driving source of the micro hand. Six piezoelectric elements 90 are prepared in accordance with the number of link mechanisms 6 and 7. Piezoelectric elements 90 are arranged on the base (cylindrical body) 2 around the axis at intervals of 60 °.
[0044]
That is, as shown in FIGS. 2 and 4, the mounting groove 2a of the actuator extends from the upper end to the lower end of the base 2 on the outer peripheral surface of the base 2 in accordance with the position of each link mechanism 6, 7 (link arm 6b, 7b). Six piezo-electric elements 90 are mounted in the grooves 2a.
[0045]
As shown in FIG. 4, a lead wire lead-out groove 2c of the piezo piezoelectric element 90 is formed along the groove 2a and the inner surface of the groove 2a and the upper surface of the base.
[0046]
As shown in FIG. 3, one end (upper end) of the piezoelectric element 90 faces the upper surface of the base, and is in contact with the back surface of the top (movable plate) 8 a of the plate arm 8. The other end (lower end) of the piezoelectric element 90 is received by the bottom plate 2a, and a preload is applied to the piezoelectric element 90 by a screw 31 provided on the bottom plate 2a. In this manner, a structure is made such that no gap is formed between the contact surface between the upper end of the piezoelectric element 90 and the back surface of the top 8a of the plate arm 8. The screw 31 is also used for the purpose of performing coarse needle stitching.
[0047]
That is, after the distance between the needle tip of the needle 4 and the needle tip of the needle 5 is visually measured using the support 36 and the moving table 38, the screw 31 is rotated under the optical microscope to perform coarse movement positioning.
[0048]
The receiving surface of the plate-shaped arm 8 is formed by expanding and contracting each of the three piezoelectric elements 90 corresponding to each of the three link mechanisms 6 and 7 or by individually changing the degree of expansion and contraction in accordance with a control signal. By pressing A, each pair can be driven.
[0049]
In the micro hand 1 of the present embodiment, three (one set) of link mechanisms 6 constituting the RPRR mechanism of FIG. 11 are arranged at intervals of 120 ° around the central axis between the base 2 and the end effector 3. They are arranged symmetrically. Another set of link mechanisms (three link mechanisms) 7 are symmetrically arranged between the base 2 and the end effector 14 at intervals of 120 around the central axis. That is, a total of six link mechanisms are symmetrically arranged at intervals of 60 ° around the center line axis when viewed from the base 2.
As the piezoelectric element 61, for example, a stacked type is used.
[0050]
Reference numerals 32 and 32 'are lead wires for supplying a voltage to the actuator 90. The piezo piezoelectric element used as the actuator 90 has a quick response and a small displacement and high output, but has a very large hysteresis, and it is difficult to perform accurate positioning by open-loop control using only a drive voltage. Therefore, it is desirable to measure the amount of displacement and perform feedback control. In this case, particularly, a compact displacement measuring means and a servo drive system are required.
[0051]
As such a displacement measuring means, a strain gauge is directly attached in the direction of expansion and contraction of the actuator 90 (not shown), and a computer as shown by reference numeral 33 is used as a servo system of these piezoelectric elements. A software servo, an analog servo using an operational amplifier, or the like can be employed.
[0052]
The command signal of the servo system control circuit 33 is sent to the actuator (piezoelectric element) 90 via the lead wires 32 and 32 '.
[0053]
The drive control of each set of three actuators 90 corresponding to the link mechanisms 6 and 7 pushes the receiving surface A of the plate-shaped arm 8 which is a contact portion with the link mechanisms 6 and 7, and the end effectors 3 and 4 The needle (fingers 4, 5) is finely operated by operating one or both of them by a predetermined amount as required.
[0054]
In this case, when the plate arm 8 is pushed up by the actuator 90, the link arm 6b (7b) of the corresponding link mechanism 6 or 7 performs the opening operation by the lever operation of the plate arm 8.
[0055]
The fine operation of the micro hand detects the amount of displacement of each actuator 90 from the strain gauge, and the servo control circuit 33 calculates the current positions of the needles (finger pieces) 4 and 5 from the amount of displacement and feeds back the current position. This is performed by comparing with a predetermined positioning command value and servo-driving the actuator 90 until the deviation amount disappears.
[0056]
The microhand according to the present embodiment can realize a chopstick operation by giving only one of the needles 4 and 5 (for example, the needle 5) a forefinger-like operation and the other giving a thumb-like operation. . In this case, fine movements of rotation (twist), opening / closing, and retreat are given to the needle 5, and fine movements of the needle 4 are mainly given to the needle 4.
[0057]
When a simple chopstick-like operation is performed, only one of the two link mechanisms 6 and 7 may be driven by the actuator 90. FIG. 14 shows a modification (second embodiment). In the reference numerals in FIG. 14, the same reference numerals as those in the above-described embodiment indicate the same or common components.
[0058]
In the embodiment of FIG. 14, only one set (one) of three link mechanisms (for example, the link mechanism 7 on the end effector 14 side) is used to operate only the end effector 14 in three translational degrees of freedom. The end effector 3 was configured to be fixed to the upper surface of the base 2. Although not shown, the upper surface of the end effector 14 has a needle 5 and needle adjustment mechanisms 36 and 37 as shown in FIG. The plate-like arms 8 are formed by integrally forming three pieces arranged around the axis at intervals of 120 degrees. A through hole 200 for the end effector 3 is formed at the top of the plate arm 8, and a screw hole (not shown) for fixing the plate arm 8 to the upper surface of the base 2 is provided around the through hole 200.
[0059]
The manner of coupling the three link mechanisms 7 and the plate-like arms 8 is the same as that of the above-described embodiment, but the link mechanism 7 and the plate-like arms 8 can be integrally formed by pressing.
[0060]
Also in the present embodiment, it is possible to realize a micro hand that performs a fine chopstick-like operation using the needles 4 and 5.
[0061]
The three-degree-of-freedom micro-hand shown in FIG. 1 may be configured as a pair (two fingers), or may be used in an arbitrary number to apply to fine work such as positioning, handling, cutting, and joining of minute objects. Or a precision positioning stage mechanism.
[0062]
According to the present embodiment, the link mechanism of the micro hand can be manufactured by simple press punching and bending of a thin plate, so that the processing is easy. Therefore, the manufacturing cost can be reduced.
[0063]
Moreover, the two end effectors can be arranged inside and outside with a common center, and the link mechanism connecting the end effector and the base is mostly a portion along the lower surface of the end effector and a base. Can be composed of a part along the outer surface of the base and a part along the top surface of the base. Therefore, a high-performance micro hand can be downsized.
[0064]
In addition, when expanding the working area, when increasing the leverage of the link mechanism as a method of realizing the downsizing while maintaining the miniaturization, the link arm is not extended horizontally, but is bent at the outer periphery of the base and extends along the outer peripheral surface. This is made possible by making the shape.
[0065]
Therefore, according to the present embodiment, it is possible to provide a micro-hand mechanism that can be easily installed on a microscope or the like by enlarging the work area while maintaining the miniaturization.
[0066]
In this embodiment, the actuator 90 is a piezoelectric element. However, the present invention is not limited to this, and a bimorph type piezoelectric element or the like can be used. For example, the operation can be performed by attaching a bimorph type piezoelectric element to the link arms 6b and 7b and pushing up the link.
[0067]
FIG. 15 is a perspective view showing a micro hand according to the third embodiment of the present invention.
[0068]
This embodiment is an example in which two or more microhand modules are connected in series. Here, the hand modules 110 and 111 are connected in two stages in series.
[0069]
The configuration of the hand module 110 is the same as the structure of the micro hand 1 shown in FIG. 1, and a description thereof will be omitted. In the present embodiment, an intermediate movable element (intermediate effector) 14 'is further coupled to the base 2 of the hand module 110, and this intermediate effector 14' is composed of a set (three) of link mechanisms 7 'and It is connected to the next base 2 'via the arm 8. In this way, a plurality of hand modules can be connected in series.
[0070]
The hand module 110 functions as a hand for performing a finger operation, and the next-stage hand module 111 functions as a wrist, and with the addition of a hand module, can also perform an elbow-like function, thereby expanding the work area. can do.
[0071]
A groove 51 is provided in the base 2 'of the lower hand module 111, and a screw 31 in FIG. 3 is turned through a tool through this groove so that the leading ends of the needles 4, 5 as finger pieces can be roughly adjusted. .
[0072]
16 and 17 are a top view and a partial front view of a micro hand according to a fourth embodiment of the present invention.
[0073]
In this embodiment, the basic configuration is the same as that of the above-described embodiment, and the following structure is added.
[0074]
A movable adjustment plate 172 capable of arbitrarily adjusting the inclination and the direction thereof is attached to one surface of the end effector 14 located on the outside of the pair of end effectors 3 and 14 via a plurality of screw knobs 171.
[0075]
Specifically, male screws 173 are arranged at 120 intervals on the end effector 14, and an annular movable adjustment plate 172 is fitted to the male screws 173 so as to be supported by a spring 174. A screw-type knob (female screw) 171 for holding the plate 171 was attached. With this configuration, the inclination and the direction of the movable adjustment plate 172 can be arbitrarily adjusted by the operation amount (movement amount) of each screw-type knob.
[0076]
The needle 5 is attached to the movable adjustment plate 172 via needle tip alignment mechanisms 36 and 37.
[0077]
According to the present embodiment, the needle adjustment of the needles 4 and 5 can be performed by the movable adjustment plate 172.
[0078]
In the above-described embodiments, the link mechanisms 6 and 7 may be manufactured by etching (for example, photo-etching) technology for finely processing a semiconductor, in addition to punching and bending by a press. It is. In this case, the material of the link mechanism is made of silicon or the like.
[0079]
According to the three-degree-of-freedom microhand of the two-finger mechanism of the present embodiment, the characteristic that translational three-degree-of-freedom is the main operation in fine work is effectively used, and the three-linkage mechanism of the three-degree-of-freedom of the end effector is used. It is possible to realize precise positioning control and grasp, lift, rotation, movement, and opening of a minute object. It is also possible to realize the assembling of a micromachine. Furthermore, the present invention can be applied as a minute displacement mechanism of a rotary joint and a linear motion joint.
[0080]
【The invention's effect】
According to the present invention, by integrating the end effector, the link mechanism, and the base member, it is possible to realize a small-sized, low-cost microhand capable of exhibiting a highly accurate function.
[Brief description of the drawings]
FIG. 1 is a perspective view of a micro hand according to a first embodiment of the present invention.
FIG. 2 is an exploded perspective view of the micro hand.
FIG. 3 is a longitudinal sectional view in which a part of the micro hand is omitted.
FIG. 4 is a perspective view of a base used for the microhand.
FIG. 5 is a perspective view of a first link mechanism used in the micro hand.
FIG. 6 is a perspective view of a second link mechanism used in the micro hand.
FIG. 7 is a perspective view showing a modified example of a plate-like arm used for the microhand.
FIG. 8 is a partially omitted expanded view of the first link mechanism.
FIG. 9 is a partially omitted development view of the second link mechanism.
FIG. 10 is a partially omitted development view of the plate arm.
FIG. 11 is an explanatory view showing the operation principle of the link mechanism.
FIG. 12 is a principle diagram showing elements of a rotation pair R and a translation pair P.
FIG. 13 is a principle diagram showing elements of a rotation pair R and a translation pair P applied to the embodiment.
FIG. 14 is a partially omitted sectional view of a microhand according to a second embodiment of the present invention.
FIG. 15 is a perspective view of a micro hand according to a third embodiment of the present invention.
FIG. 16 is a top view according to a fourth embodiment of the present invention.
FIG. 17 is a partial front view according to a fourth embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Micromanipulator, 2 ... Base, 3 ... End effector, 4, 5 ... Finger piece (needle), 6, 7 ... Link mechanism, 8 ... Plate arm, 90 ... Actuator.

Claims (10)

Each of the micro-hands has a pair of ends (hereinafter, referred to as “end effectors”) having finger pieces, and one end effector is disposed inside the other end effector in a penetrating state, and at least one of the end effectors is provided. Is connected to the base via three link mechanisms,
The three link mechanisms are plate-shaped link mechanisms integrally formed by sheet metal processing or etching processing and formed by a combination of a rotating pair and a translation pair. The tops of the three link mechanisms are connected to the lower surface of the corresponding end effector, and the center of the end effector. From the middle to the tip extending along the outer surface of the base from the middle,
In the base, a plate-like arm that becomes a part of the link mechanism extends from the center of the base upper surface in the direction of the link mechanism, and extends from the middle to the tip along the outer surface of the base. A micro-hand, which is connected to or integrally formed with the link mechanism, and the base is provided with an actuator for applying a force to each of the plate-shaped arms to operate the link mechanism. The micro hand has first and second end effectors each having a finger piece. The first end effector is disposed in a penetrating state inside the second end effector, and the first and second end effectors are respectively provided. Connected to a common base via a link mechanism,
The link mechanism is a plate-like link mechanism formed by forming a rotation pair and a translation pair by performing at least bending processing and punching processing, or etching processing on a flexible plate,
A micro hand, wherein an actuator for driving the link mechanism is provided on the base. 3. The microhand according to claim 1, wherein the base forms a columnar block, and the actuator includes a piezoelectric element, and the piezoelectric element is incorporated in the columnar block. Each of the pair of end effectors is connected to a common base via the three link mechanisms and the plate-shaped arm, and the plate-shaped arms are spaced by 60 degrees according to the total number and arrangement of the link mechanisms. 2. The micro hand according to claim 1, wherein the micro hand is composed of a total of six, and these plate-shaped arms are integrally formed and collectively attached to one end surface of the base. Each of the pair of end effectors is connected to a common base via the three link mechanisms and the plate-like arm, and the plate-like arms are spaced at 120 degrees according to the total number and arrangement of the link mechanisms. 2. The microhand according to claim 1, wherein two sets of three arms formed integrally are used, and these sets are attached to one end face of the base while being shifted by 60 degrees. The finger has a needle shape, and at least one of the end effectors has a first needle tip adjusting mechanism for coarsely adjusting the needle tip of the fingers and a second needle tip for performing a fine needle tip adjusting operation. The microhand according to claim 1 or 2, further comprising an alignment mechanism. The base forms a columnar block, and an intermediate movable element (hereinafter, referred to as an “intermediate effector”) is coupled to the base. The intermediate effector is connected to the next base through the same three link mechanisms and plate-like arms as described above. The micro hand according to claim 1, which is connected to the micro hand. Each of the link mechanisms is formed by processing a flexible plate material, and has a plate-like link arm portion having a width in a direction around the axis of the end effector, and both ends in a longitudinal direction of each of the link arm portions. A hinge part that can be regarded as a rotating pair even in the middle position and within a minute displacement, and a translation pair even if located between the one end in the longitudinal direction and the middle part and within the minute displacement. The link element is formed, and the hinge part serving as the rotating pair is formed by providing a slit or a thin portion in the width direction of the link arm part, and the link element serving as the translation pair is formed by a parallelogram link part. 3. The micro hand according to claim 1, wherein the micro hand is configured. The actuator is constituted by a piezoelectric element, and a preload is applied to the piezoelectric element, and the preload is configured to also serve as a first needle-pointing mechanism for performing a coarse needle-pointing operation of the finger pieces. The micro hand according to claim 1 or 2, wherein A movable adjustment plate capable of arbitrarily adjusting the inclination and the direction thereof is attached to one surface of the end effector located outside of the pair of end effectors via a plurality of screw knobs, and one finger piece is attached to the movable adjustment plate. The microhand according to claim 1, which is mounted.

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