JP2004087093A - Magnetic transfer system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a magnetic recording medium that is not corroded after a magnetic transfer process in a magnetic transfer system. <P>SOLUTION: In this magnetic transfer system comprising a holding device 11 for holding and storing the magnetic recording medium 2, a magnetic transferring device 12 for performing magnetic transfer, and a transporting device for transporting the magnetic recording medium 2 from the holding device 11 to the magnetic transferring device 12 or from the magnetic transferring device 12 to the holding device 11, each of the holding device 11, a gripping part for gripping the magnetic recording medium 2 of the transporting device 13 and master carriers 3 and 4 of an adhering device 20 of the magnetic transferring device 12 and an inner diameter positioning pin 18b is made of materials, wherein each content of chloride, surfur compounds and a nitrogen oxide is ≤0. 5 ppm. <P>COPYRIGHT: (C)2004,JPO

Description

表１に示すとおり、本発明の実施例１〜８はいずれの評価においても可以上であり、比較例１、２はいずれの評価も不良との結果であった。
【図面の簡単な説明】
【図１】本発明の実施形態に係る磁気転写システムの概略構成図
【図２】磁気記録媒体保持装置を示す斜視図
【図３】磁気転写装置の要部斜視図
【図４】両面転写用の密着装置の分解斜視図
【図５】片面転写用の密着装置の分解斜視図
【図６】磁気転写方法の基本工程を示す図
【符号の説明】
２　　スレーブ媒体
３，４　　マスター担体
３ａ　　マスター担体の基板
３ｂ　　磁性層
１１　　保持装置
１２　　磁気転写装置
１３　　搬送装置
１４　　マスター担体保持装置
１５　　マスター担体搬送装置
１８ｂ　位置決めピン
２０、２０’　　密着装置
２１　　弾性体[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a magnetic transfer system for magnetically transferring information from a magnetic transfer master carrier carrying information to be transferred to a magnetic recording medium to a magnetic recording medium.
[0002]
[Prior art]
In general, with the increase in the amount of information, a magnetic recording medium is desired that has a large capacity for recording a large amount of information, is inexpensive, and can read out a necessary portion preferably in a short time and can perform so-called high-speed access. As an example of this, a high-density magnetic recording medium made of a flexible disk such as a hard disk or ZIP (Iomega Corporation) is known. These high-density magnetic recording media have an information recording area composed of narrow tracks. In order to reproduce a signal with a high S / N by accurately scanning a narrow track width with a magnetic head, a so-called tracking servo technique is used. It plays a big role.
[0003]
Servo information such as track positioning servo signals, track address signals, and reproduction clock signals must be recorded in advance on the magnetic recording medium as a preformat when the magnetic recording medium is manufactured. Preformatting is performed using an apparatus (servo track writer). The preformatting by the conventional servo recording apparatus needs to be recorded by the magnetic head one by one on the magnetic recording medium, so that it takes a considerable time and there is a problem in terms of production efficiency.
[0004]
On the other hand, as a method for performing preformatting accurately and efficiently, methods for transferring a pattern carrying servo information of a master carrier onto a magnetic recording medium by magnetic transfer have been proposed in Patent Documents 1-3.
[0005]
Magnetic transfer corresponds to the information pattern of the master carrier by applying a magnetic field for transfer with the master carrier carrying the information to be transferred in close contact with a magnetic recording medium (slave medium) such as a magnetic disk medium. The magnetic pattern to be transferred is magnetically transferred to the slave medium, and can be recorded statically without changing the relative position of the master carrier and the slave medium, enabling accurate preformat recording. Moreover, there is an advantage that the time required for recording is extremely short.
[0006]
In addition, as a magnetic transfer method, the present applicant employs a soft magnetic layer having a small coercive force as a magnetic layer formed on the convex surface of the substrate of the master carrier, and directs the magnetic layer of the slave medium in one direction of the track in advance. A method of transferring a magnetic pattern to a magnetic layer of a slave medium by applying a transfer magnetic field in a direction substantially opposite to the initial DC magnetization direction of the slave medium in a state of being magnetized and in close contact with the soft magnetic layer of the master carrier. This is proposed in Patent Document 4 and the like.
[0007]
[Patent Document 1]
JP 63-183623 A
[0008]
[Patent Document 2]
Japanese Patent Laid-Open No. 10-40544
[0009]
[Patent Document 3]
Japanese Patent Application Laid-Open No. 10-269566
[0010]
[Patent Document 4]
Japanese Patent Laid-Open No. 2001-14667
[0011]
[Problems to be solved by the invention]
The system for performing magnetic transfer as described above is basically a device for holding and storing a magnetic recording medium as a slave medium, a device for transporting the magnetic recording medium, and applying a magnetic field by closely contacting the slave medium and the master carrier. A material using chlorine or sulfur such as rubber is used for each part such as a storage part, a grip part, and a close contact member that are in contact with a magnetic recording medium. However, magnetic recording media as slave media, particularly hard disks, are vulnerable to chlorine, sulfur, etc., and there is a problem that they will corrode when they come into contact with them. In addition, if residues containing the same elements adhere to the magnetic transfer master carrier used, it is apparent that not only the slave medium but also the magnetic layer on the master carrier is corroded, and the life of the master carrier is greatly reduced. Became.
[0012]
In view of the above circumstances, an object of the present invention is to provide a magnetic transfer system that does not corrode a slave medium. It is another object of the present invention to provide a magnetic transfer system that does not corrode the master carrier.
[0013]
[Means for Solving the Problems]
A magnetic transfer system of the present invention includes a holding device for holding a magnetic recording medium,
Magnetic transfer in which magnetic transfer is performed by applying a magnetic field for transfer in a state where the magnetic recording medium and a magnetic transfer master carrier having a magnetic layer carrying information to be transferred to the magnetic recording medium are in close contact with each other Equipment,
A magnetic transfer system comprising a conveying device for grasping the magnetic recording medium and conveying between the holding device and the magnetic transfer device,
At least the magnetic recording of the holding device, magnetic transfer device, and transport device
The contacting portion is made of a material having a chlorine, sulfur compound and nitrogen oxide content of 0.5 ppm or less.
[0014]
The magnetic transfer system further includes a master carrier holding device that holds the magnetic transfer master carrier, and a master carrier transport device that holds the magnetic transfer master carrier and transports it between the master carrier holding device and the magnetic transfer device. In addition, at least a portion of the master carrier holding device, the magnetic transfer device, and the master carrier transport device that comes into contact with the magnetic transfer master carrier is a material having a chlorine, sulfur compound, and nitrogen oxide content of 0.5 ppm or less. It is desirable to be configured.
[0015]
Here, “the contents of chlorine, sulfur compounds and nitrogen oxides are all 0.5 ppm or less” means that the amount of gas detected in the outgas evaluation is 0.5 ppm or less, respectively. Preferably it is 0.4 ppm or less, More preferably, it is 0.2 ppm or less.
[0016]
Here, ion chromatography is used as an evaluation method for outgas evaluation. Specifically, first, a sample piece is cut out from the base material so as to have a mass of about 5 g, and this sample piece is obtained at 200 ° C., Ar / O. ₂ Heat for 5 hours in a stream of air and generate 1% H ₂ O ₂ The chlorine, sulfur compound, and nitrogen oxide ions are respectively quantified.
[0017]
Here, when the content of the sulfur compound is 0.5 ppm or less, it means that the content of each sulfur compound is 0.5 ppm or less when containing a plurality of sulfur compounds. The total content of may exceed 0.5 ppm. Similarly, the content of nitrogen oxides of 0.5 ppm or less means that when a plurality of nitrogen compounds are contained, the content of each nitrogen oxide is 0.5 ppm or less. The total content of nitrogen compounds may exceed 0.5 ppm. Therefore, in reality, the content of the sulfur compound having the highest content among the sulfur compounds detected by the above-described ion chromatography method and the content of the nitrogen oxide having the highest content among the detected nitrogen oxides are evaluated.
[0018]
As the sulfur compound having the highest content, SO ₄ NO is the most nitrogen oxide content. ₃ As the content of sulfur compounds and nitrogen oxides, SO ₄ , NO ₃ It is good also as what evaluates content of.
[0019]
In addition, configurations of “at least a portion of the holding device, the magnetic transfer device, and the conveyance device that are in contact with the magnetic recording medium” and “a portion of the master carrier holding device, the magnetic transfer device, and the master carrier conveyance device that is in contact with at least the master carrier” As the base material, polyimide, polyacetal, polyether ketone, polyimide amide, polyether imide, polypropylene, tetrafluoroethylene resin, perfluoro-ethylene-propylene, perfluoroalkoxyl alkane and the like are preferable.
[0020]
In order to reduce the content of chlorine, sulfur compounds, and nitrogen oxides to 0.5 ppm or less, the constituent base material is annealed in a vacuum in a raw material state at a high temperature (about 200 ° C.) for about 5 hours. It is also effective to perform a degassing process by performing the process.
[0021]
Even when the constituent base material contains more than 0.5 ppm of chlorine, sulfur compound and / or nitrogen oxide, 0.5 ppm or less on the surface that directly contacts the magnetic recording medium or master carrier. There is no problem as long as the material is coated. Examples of the coating method include a sputtering method and an ion plating method. The coating material is preferably a material having solid lubricating properties such as sputtered carbon, DLC (diamond-like carbon), molybdenum disulfide, and titanium nitride. The coating thickness is in the range of 5 nm or more and less than 1 μm. If the thin film is thinner than 5 nm, the role of the gas barrier becomes insufficient, and if it is 1 μm or more, the protective layer may be peeled off by an external force applied when handling the magnetic recording medium. A more preferable film thickness is 10 nm or more and 500 nm or less. When the adhesion between the covering material and the constituent base material cannot be secured, the constituent base material surface may be subjected to ashing treatment with oxygen gas or the like, or the constituent base material surface may be provided with an adhesive layer made of Si, Ti, Al or the like. .
[0022]
In addition, the “close state” includes not only a state in which they are completely in contact with each other but also a state in which both are facing each other.
[0023]
Examples of the magnetic transfer master carrier include those having information as the magnetization pattern of the magnetic layer and those carrying information by a magnetic layer formed in a pattern (so-called patterned master), the latter being particularly preferred.
[0024]
The patterned master carrier is preferably composed of a substrate on which a concavo-convex pattern corresponding to information to be transferred is formed and a magnetic layer formed thereon, and a soft or semi-rigid magnetic layer is particularly preferable as the magnetic layer. .
[0025]
Further, during magnetic transfer using a patterned master carrier, the magnetic layer of the magnetic recording medium is DC magnetized in one direction of the track direction, and the DC magnetized magnetic recording medium and the master carrier are in close contact with each other Therefore, it is desirable to perform magnetic transfer by applying a transfer magnetic field in a direction substantially opposite to the direct current magnetization.
[0026]
【The invention's effect】
According to the magnetic transfer system of the present invention, a holding device that holds a magnetic recording medium, a magnetic transfer device that applies a transfer magnetic field by closely contacting the magnetic recording medium and a master carrier, and a conveying device that grips and conveys the magnetic recording medium. In addition, since at least a portion in contact with the magnetic recording medium is made of a material in which the content of chlorine, sulfur compound and nitrogen oxide is 0.5 ppm or less, the magnetic recording medium is chlorine, sulfur compound, Corrosion caused by these substances does not occur because they do not touch nitrogen compounds. Therefore, a magnetic recording medium having been magnetically transferred can be manufactured with a high yield.
[0027]
Further, a master carrier holding device that holds the magnetic transfer master carrier, a magnetic transfer device, and a master carrier transport device that grips and transports the master carrier, at least a portion in contact with the master carrier is made of chlorine, a sulfur compound, and a nitrogen oxide. If any of the contents is made of a material having a content of 0.5 ppm or less, the master carrier is not corroded by chlorine or the like, so that the life of the master carrier can be extended.
[0028]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail.
[0029]
FIG. 1 is a schematic configuration diagram of a magnetic transfer system of the present invention. The magnetic transfer system in the present embodiment includes a holding device 11 that holds and stores the magnetic recording medium 2 before magnetic transfer, a magnetic transfer device 12 that performs magnetic transfer, and a magnetic recording medium 2 from the holding device 11 to the magnetic transfer device 12 or The transfer device 13 for transferring from the magnetic transfer device 12 to the holding device 11, the master carrier holding device 14 for holding and storing the master carriers 3 and 4, and the master carriers 3 and 4 from the master carrier holding device 14 to the magnetic transfer device 12 or magnetically. It comprises a master carrier transport device 15 that transports from the transfer device 12 to the master carrier holding device 14.
[0030]
The magnetic recording medium 2 accommodated in the holding device 11 is conveyed to the magnetic transfer device 12 by the conveying device 13, and after the magnetic transfer, the magnetic recording medium 2 is conveyed again to the holding device 11 by the conveying device 13. Two holding devices and two conveying devices may be provided, and separate holding devices and conveying devices may be used before and after magnetic transfer.
[0031]
The master carrier accommodated in the master carrier holding device 14 is conveyed to the magnetic transfer device 12 by the master carrier conveying device 15, and after the magnetic transfer, is again conveyed to the holding device 14 by the conveying device 15.
[0032]
2 is a perspective view of a magnetic recording medium stocker that is a holding device 11, FIG. 3 is a perspective view of a main part of the magnetic transfer device 12, and FIGS. 4 and 5 are slave media (magnetic recording media) to which a transfer magnetic field is applied. An exploded perspective view of the master carrier contact device 20 (20 ′) is shown.
[0033]
The holding device 11 is used for moving the magnetic recording medium 2 from a processing device such as a burnish that is performed before magnetic transfer to the magnetic transfer device, or for assembling the magnetic recording medium after magnetic transfer in a post-magnetic transfer process. This is a stocker for holding and storing a magnetic recording medium when moving to a processing apparatus. This stocker is grooved on the inside so that a plurality of magnetic recording media can be held vertically, and the contents of chlorine, sulfur compounds and nitrogen oxides are all 0.5 ppm or less. It is composed of materials. The master carrier holding device 14 similarly uses a stocker having a similar configuration made of a material having a chlorine, sulfur compound and nitrogen oxide content of 0.5 ppm or less.
[0034]
As shown in FIG. 3, the magnetic transfer device 12 includes a close contact device 20 (20 ′) and an electromagnet device 5 (5a, 5b) which is an embodiment of a magnetic field generator.
[0035]
FIG. 4 shows a contact device 20 when performing double-sided simultaneous transfer. The contact device 20 transfers information such as a servo signal onto the lower recording surface of the magnetic recording medium 2 that is a slave medium. A master carrier 3, an upper master carrier 4 that transfers information such as a servo signal to the upper recording surface of the slave medium 2, and a lower correction member 16 that adsorbs and holds the lower master carrier 3 to correct flatness are provided. A lower pressure contact member 18 and an upper pressure contact member 19 provided with an upper correction member 17 (same configuration as the lower correction member 16) for adhering and holding the upper master carrier 4 to correct the flatness are provided. And the lower master carrier 3 and the upper master carrier 4 are brought into close contact with both surfaces of the slave medium 2.
[0036]
The lower master carrier 3 and the upper master carrier 4 are disk-shaped discs having rigidity, and have a transfer information carrying surface with a fine uneven pattern closely attached to the recording surface of the slave medium 2 on one side, and the opposite. The surface on the side is held by vacuum suction on the lower correction member 16 and the upper correction member 17. The lower master carrier 3 and the upper master carrier 4 are arranged at positions other than the portion where the fine concavo-convex pattern is formed and intake holes of correction members 16 and 17 to be described later in order to improve the adhesion with the slave medium 2 as necessary. A minute hole is formed through the front and back at a position that does not communicate with the medium, and is provided so as to suck and discharge air between the contact surfaces with the slave medium 2.
[0037]
The lower correction member 16 (the same applies to the upper correction member 17) is provided in a disk shape corresponding to the size of the master carrier 3, and is provided with a suction surface 16a. The suction surface 16a has approximately 25 to 100 intake holes 16b having a diameter of about 2 mm or less, which are substantially evenly opened. Although not shown, the suction hole 16b is sucked by being connected to a vacuum pump through an intake passage led from the inside of the correction member 16 to the outside of the lower pressure contact member 18, and closely attached to the suction surface 16a. The back surface of the carrier 3 is vacuum-sucked, and the flatness of the master carrier 3 is corrected along the suction surface 16a.
[0038]
The lower pressure contact member 18 and the upper pressure contact member 19 are disc-shaped, and one or both of them are provided so as to be movable in the axial direction, and are opened and closed by an opening / closing mechanism (pressing mechanism, fastening mechanism, etc.) not shown. Welded with pressure. The outer periphery has flanges 18a and 19a, and when closed, the flanges 18a and 19a of the upper and lower pressure contact members 18 and 19 come into contact with each other to keep the inside sealed. A pin 18 b that engages and positions the inner diameter of the slave medium 2 is formed at the center of the lower pressure contact member 18. Further, the lower pressure contact member 18 and the upper pressure contact member 19 are linked to a rotation mechanism (not shown) and are integrally rotated.
[0039]
In order to sequentially perform double-sided magnetic transfer on a plurality of slave media by a set of lower master carrier 3 and upper master carrier 4, the contact device 20 is attached to the adsorption surface 16 a of the lower correction member 16 and the upper correction member 17. The lower master carrier 3 and the upper master carrier 4 are respectively held by vacuum suction with their center positions aligned. Then, in the open state in which the upper pressure contact member 19 and the lower pressure contact member 18 are separated from each other, the slave medium 2 is set with the center position aligned, and then the upper pressure contact member 19 and the lower pressure contact member 18 are brought close to each other to be closed. Then, the master carriers 3 and 4 are brought into close contact with both surfaces of the slave medium 2. Thereafter, the upper and lower electromagnet devices 5 are brought close to the upper and lower surfaces of the close contact device 20 by the movement of the upper and lower electromagnet devices 5 or the close contact device 20, and a magnetic field for transfer is applied by the electromagnet device 5 while rotating the close contact device 20. The transfer information of the lower master carrier 3 and the upper master carrier 4 is magnetically transferred and recorded on the recording surface of the slave medium 2.
[0040]
FIG. 5 shows a contact device 20 ′ when performing single-sided transfer. This contact device 20 ′ includes a lower master carrier 3 that transfers information such as a servo signal onto the lower recording surface of the slave medium 2. An elastic body 21 (cushion material) that contacts the upper recording surface of the slave medium 2, and a lower pressure contact member 18 that includes a lower correction member 16 that adsorbs and holds the lower master carrier 3 to correct flatness; And an upper pressure contact member 19 for holding the elastic body 21, which are pressed in a state where their center positions are aligned, and the master carrier 3 is brought into close contact with one surface of the slave medium 2 and the elastic body 21 is brought into close contact with the opposite surface. That is, the configuration is the same except that the upper master carrier 4 in the embodiment is changed to the elastic body 21 and the upper correction member 17 is not installed.
[0041]
The elastic body 21 is formed in a disk shape from a material having elastic characteristics, and is held by the upper pressure contact member 19. The material of the elastic body 21 has a characteristic of following and deforming the surface shape of the slave medium 2 when a contact pressure is applied, and restoring the surface property before the pressure is applied when the slave medium 2 is peeled off from the master carrier 3. The surface of the elastic body 21 in contact with the slave medium 2 is formed in a planar shape parallel to the master carrier 3 or a convex shape on the slave medium 2 side.
[0042]
The contact device 20 ′ of the present embodiment first aligns the center position with the attracting surface 6a of the lower correction member 6 in order to sequentially perform magnetic transfer to the plurality of slave media 2 by one lower master carrier 3. The lower master carrier 3 is held by vacuum suction. Then, in the open state in which the upper pressure contact member 19 and the lower pressure contact member 18 are separated from each other, the slave medium 2 is set with the center position aligned, and then the upper pressure contact member 19 and the lower pressure contact member 18 are brought close to each other to be closed. Then, the master carrier 3 is brought into close contact with one surface of the slave medium 2 by pressing the elastic body 11. Thereafter, similarly to the above, the upper and lower electromagnet devices 5 are brought close to the upper and lower surfaces of the close contact device 20 ′, and a magnetic field for transfer is applied by the electromagnet device 5 while rotating the close contact device 20 ′ to transfer the lower master carrier 3. Information is magnetically transferred and recorded on one surface of the slave medium 2. Thereafter, in another process, the upper master carrier 4 is brought into close contact with the opposite surface of the slave medium 2 and magnetic transfer is performed in the same manner.
[0043]
In the contact device 20 when performing double-sided transfer, the master carriers 3 and 4 and the positioning pins 18b, and in the contact device 20 when performing single-sided transfer, magnetic recording media such as the master carrier 3, the elastic body 21, and the positioning pins 18b. 2 and the parts contacting the master carriers 3 and 4 are made of materials having a chlorine, sulfur compound and nitrogen oxide content of 0.5 ppm or less. In addition, since the residual resist may contain sulfur in the case of using a resist during patterning for producing the unevenness, the master carrier may be one in which the residual resist is removed by dry cleaning before being in close contact with the magnetic recording medium. use. In addition, it is preferable that each part of the contact device 20 is made of a material in which the contents of chlorine, sulfur compounds, and nitrogen oxides are all 0.5 ppm or less.
[0044]
The conveying device 13 conveys a magnetic recording medium from the holding device 11 to the magnetic transfer device 12 or from the magnetic transfer device 12 to the holding device 11. Specifically, the transport device 13 is a robot arm provided with a chuck portion (gripping portion) that chucks the inner diameter of the magnetic recording medium 2, and the chuck portion has any content of chlorine, sulfur compounds, and nitrogen compounds. Is also made of a material that is 0.5 ppm or less. The same applies to the master carrier transport device 14.
[0045]
In addition, as structural base materials such as stockers, positioning device positioning pins and elastic members, and robot arm chucks, polyimide, polyacetal, polyether ketone, polyimide amide, polyether imide, polypropylene, tetrafluoroethylene resin, par Fluoro-ethylene-propylene, perfluoroalkoxy alkane and the like can be used. In order to reduce the content of chlorine, sulfur compound and nitrogen oxide in the constituent base material to 0.5 ppm or less respectively, the constituent base material is in the state of a raw material in vacuum at a high temperature (about 200 ° C.) for 5 hours. It is effective to perform a degassing process by performing a degree of annealing process. Even when the constituent base material contains more than 0.5 ppm of chlorine, sulfur compound and / or nitrogen oxide, 0.5 ppm or less on the surface that directly contacts the magnetic recording medium or master carrier. It is sufficient that the material to be coated is coated. Examples of the coating method at this time include a sputtering method and an ion plating method. The coating material is preferably a material having solid lubricating properties such as sputtered carbon, DLC (diamond-like carbon), molybdenum disulfide, and titanium nitride. The coating film thickness is preferably in the range of 5 nm or more and less than 1 μm, and more preferably 10 nm or more and 500 nm or less. If the adhesion between the covering material and the constituent base material cannot be ensured, the constituent base material surface may be subjected to ashing treatment with oxygen gas or the like, or the constituent base material surface may be provided with an adhesive layer made of Si, Ti, Al or the like. .
[0046]
Next, a transfer process in the magnetic transfer system of this embodiment will be briefly described.
[0047]
First, the master carriers 3 and 4 housed in the master carrier holding device 14 are set in the contact device 20 with their inner diameters chucked by the master carrier transport device 15. On the other hand, the holding device 11 stores the magnetic recording medium 2 that is initially magnetized in one direction of the track, and the magnetic recording medium 2 is in close contact with the holding device 11 with its inner diameter chucked by the transport device 13. It is transported to the slave medium storage unit of the apparatus 20 and set in the storage unit. In this manner, the magnetic transfer is performed as described above in a state where the master carriers 3 and 4 and the magnetic recording medium 2 are set in the contact device 20 and are in close contact with each other. The application direction of the transfer magnetic field at this time is substantially opposite to the initial magnetization direction of the magnetic recording medium 2. Thereafter, the magnetic recording medium 2 that has been magnetically transferred is transported from the contact device 20 to the holding device 11 by the transport device 13.
[0048]
The magnetic transfer system of the present embodiment is a material in which the portion in contact with the magnetic recording medium 2 and the portion in contact with the master carriers 3 and 4 all have a chlorine, sulfur compound and nitrogen oxide content of 0.5 ppm or less. Therefore, corrosion of the master carrier and the magnetic recording medium after the magnetic transfer step can be suppressed, and a magnetic recording medium having been magnetically transferred can be manufactured with a high yield.
[0049]
Hereinafter, the principle of the magnetic transfer method in the present embodiment will be described with reference to FIG. The magnetic transfer method of this embodiment uses a magnetic transfer master carrier comprising a substrate and a magnetic layer coated on the irregular surface of the substrate with a concavo-convex pattern corresponding to the information to be transferred. 6A is a method of transferring information as a magnetic pattern onto a magnetic recording medium as a slave medium. FIG. 6A shows a step of applying a magnetic field in one direction to DC magnetize the slave medium, and FIG. FIG. 6C is a diagram showing a state after magnetic transfer, in which a carrier and a slave medium are brought into close contact with each other and a magnetic field is applied in the opposite direction. In FIG. 6, only one recording surface (magnetic layer) of the magnetic recording medium 2 is shown.
[0050]
First, as shown in FIG. 6A, first, an initial DC magnetic field Hin is applied to the slave medium 2 in one direction in the track direction, and the magnetic layer of the slave medium 2 is initially magnetized in one direction in the track in advance. Thereafter, as shown in FIG. 6B, the magnetic transfer surface (recording surface) of the slave medium 2 and the information carrying surface formed by coating the magnetic layer 3b on the concave / convex pattern of the substrate 3a of the master carrier 3 are brought into close contact with each other. Then, magnetic transfer is performed by applying a transfer magnetic field Hdu in the direction opposite to the initial DC magnetic field Hin in the track direction of the slave medium 2. As a result, as shown in FIG. 6C, information corresponding to the uneven pattern of the information carrying surface of the master carrier 3 is magnetically transferred and recorded on the magnetic transfer surface (track) of the slave medium 2.
[0051]
Even if the concave / convex pattern of the substrate 3a of the master carrier 3 is a negative pattern having a concave / convex shape opposite to the positive pattern of FIG. 6, the direction of the initial DC magnetic field Hin and the direction of the transfer magnetic field Hdu are opposite to those described above. By setting the direction, the same information can be magnetically transferred and recorded.
[0052]
Further, when the substrate 3a is a ferromagnetic material such as Ni, magnetic transfer can be performed only by the substrate 3a, and the magnetic layer 3b is not necessarily covered, but a magnetic layer 3b having good transfer characteristics is provided. Thus, better magnetic transfer can be performed. When the substrate 31 is a nonmagnetic material, it is necessary to provide the magnetic layer 3b.
[0053]
Further, if a protective film such as diamond-like carbon (DLC) is coated on the uppermost layer, this protective film improves the contact durability and enables multiple times of magnetic transfer. Further, a Si film may be formed under the DLC protective film by sputtering or the like.
[0054]
In this embodiment, magnetic transfer using a patterned master has been described as an example. However, in a magnetic transfer system using a magnetic transfer master in which a magnetic pattern is formed on a high coercive force magnetic layer. Similarly, if the portion in contact with the magnetic recording medium, which is a slave medium, is made of a material having a chlorine, sulfur compound and nitrogen oxide content of 0.5 ppm or less, the same effect can be obtained. it can.
[0055]
【Example】
Next, the results of evaluating the magnetic transfer systems of the examples and comparative examples of the present invention will be described.
[0056]
First, the master carrier and magnetic transfer medium used in each system will be described.
[0057]
The master carrier was provided with a disk-shaped Ni substrate manufactured using a stamper manufacturing method as a substrate. The Ni substrate serves as a soft magnetic layer that increases the effect of sucking the magnetic flux. In the range of 20-40 mm in the radial direction from the center of the disk of the Ni substrate, the track width is 1.0 μm, the track pitch is 1.1 μm, the bit length is 0.2 μm at the position of 20 mm in the radial direction, which is the innermost circumference, An uneven pattern signal having a groove depth of 0.2 μm was formed.
[0058]
A FeCo 30 at% layer was formed as a magnetic layer on a Ni substrate by a sputtering method at a substrate temperature of 25 ° C. At this time, the Ar sputtering pressure was set to 0.15 Pa (1.08 mTorr), and the input power was 2.80 W / cm. ² It went on condition of. A DLC protective layer was formed to 5 nm on the FeCo magnetic layer.
[0059]
As a slave medium, 1.33 × 10 in a vacuum deposition apparatus (Shibaura Metronics: S-50S sputtering apparatus) ^-5 Pa (1.0 × 10 ^-7 After reducing the pressure to Torr), the glass plate was heated to 200 ° C. under the condition of introducing Ar to 0.4 Pa (3.0 mTorr), CrTi 30 nm, CoCrPt 30 nm, saturation magnetization Ms: 5.7 T (4500 Gauss), A 3.5-inch disk-shaped magnetic recording medium provided with a magnetic layer having a coercive force Hc of 199 kA / m (2500 Oe) was used.
[0060]
The magnetic transfer system of Example 1 was configured by using polyether ketone A material in a portion in contact with the slave medium (slave medium handling portion) and a portion in contact with the master carrier (master carrier handling portion). Gas content of this material is chlorine: 0.3 ppm, NO ₃ : 0.3 ppm, SO ₄ : 0.3 ppm. In addition, SO detected most as a sulfur oxide here. ₄ NO detected most as nitrogen oxides ₃ It evaluated by content of (it is the same also in the following).
[0061]
The magnetic transfer system of Example 2 was configured using polyetherketone B material for the slave medium handling part and the master carrier handling part. Gas content of this material is chlorine, NO ₃ And SO ₄ All were 0.2 ppm or less (analyzer resolution or less).
[0062]
In the magnetic transfer system of Example 3, polyether ketone A material was used for the slave medium handling part and the master carrier handling part, and a DLC protective film was coated on the surface thereof by 10 nm. The amount of gas contained in the polyetherketone A material is the same as in Example 1, and the amount of gas contained after DLC coating is chlorine, NO. ₃ And SO ₄ All were 0.2 ppm or less (analyzer resolution or less).
[0063]
The magnetic transfer system of Example 4 was configured using polyimide for the slave medium handling part and the master carrier handling part. Gas content of this material is chlorine, NO ₃ And SO ₄ All were 0.2 ppm or less (analyzer resolution or less).
[0064]
In the magnetic transfer system of Example 5, a perfluoroalkoxy alkane A material was used for the slave medium handling part and the master carrier handling part, and the surface thereof was coated with DLC at 100 nm. Perfluoroalkoxy alkane A material contains chlorine: 0.7 ppm, NO ₃ : 0.8 ppm, SO ₄ : 0.9 ppm, the gas content after DLC coating is chlorine, NO ₃ And SO ₄ All were 0.2 ppm or less (analyzer resolution or less).
[0065]
The magnetic transfer system of Example 6 had the same configuration as that of Example 5 except that DLC was 5 nm. Gas content after DLC coating is chlorine: 0.4 ppm, NO ₃ : 0.5 ppm, SO ₄ : 0.4 ppm.
[0066]
The magnetic transfer system of Example 7 had the same configuration as that of Example 5 except that DLC was 1.5 μm. Gas content after DLC coating is chlorine, NO ₃ And SO ₄ All were 0.2 ppm or less (analyzer resolution or less).
[0067]
The magnetic transfer system of Example 8 was configured using perfluoroalkoxyl alkane B material for the slave medium handling part and the master carrier handling part. Perfluoroalkoxy alkane B material contains chlorine: 0.5 ppm, NO ₃ : 0.4 ppm, SO ₄ : 0.3 ppm.
[0068]
The magnetic transfer system of Comparative Example 1 was configured using nitrile rubber (NBR). Gas content of NBR is chlorine: 1.2 ppm, NO ₃ : 0.9 ppm, SO ₄ : 0.9 ppm.
[0069]
The magnetic transfer system of Comparative Example 2 was configured such that the DLC protective film was not coated on the surface in Example 5.
[0070]
The durability evaluation method between the master carrier and the slave medium is as follows.
[0071]
The contact pressure between the master carrier and the slave medium is 4.9 × 10 ^-5 Pa (5.0 kgf / cm ² And after repeating contact and peeling 10,000 times, the master carrier and the slave medium are kept in an environment of 40 ° C.-90 RH% for 1 week. Thereafter, the surface of the master carrier and the surface of the slave medium are randomly observed with a differential interference microscope at 50 magnifications at a magnification of 480 times. In this 500 field of view, if the number of deposits / cracks (corresponding to corrosion) in the magnetic layer is 2 or less, it is good (◯), 3 or 4 are acceptable (Δ), and 5 or more are bad ( X).
[0072]
Further, the slave medium is installed in an electromagnetic conversion characteristic measuring apparatus (SS-60 manufactured by Kyodo Electronics), and a head (reproducing head gap 0.12 μm, reproducing track width 0.41 μm, recording head gap 0.2 μm, recording track width 0). GMR head with a diameter of .67 μm), and a linear velocity at a radius of 40 mm is 10 m / sec and a radius of 15 to 40 mm is scanned 10,000 times at a speed of 1 reciprocation / second. The medium after the head scan was taken out, and the entire surface of the slave was observed with a differential interference microscope at a magnification of 50 times.
[0073]
Table 1 shows the observation results and the evaluation results.
[0074]
[Table 1]

As shown in Table 1, Examples 1 to 8 of the present invention were acceptable in any evaluation, and Comparative Examples 1 and 2 were results in which both evaluations were poor.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of a magnetic transfer system according to an embodiment of the present invention.
FIG. 2 is a perspective view showing a magnetic recording medium holding device.
FIG. 3 is a perspective view of essential parts of a magnetic transfer apparatus.
FIG. 4 is an exploded perspective view of a contact device for double-sided transfer.
FIG. 5 is an exploded perspective view of a contact device for single-sided transfer.
FIG. 6 is a diagram showing basic steps of a magnetic transfer method.
[Explanation of symbols]
2 Slave media
3,4 Master carrier
3a Master carrier substrate
3b Magnetic layer
11 Holding device
12 Magnetic transfer device
13 Transport device
14 Master carrier holding device
15 Master carrier transport device
18b Positioning pin
20, 20 'contact device
21 Elastic body

Claims (3)

A holding device for holding a magnetic recording medium;
Magnetic transfer in which magnetic transfer is performed by applying a magnetic field for transfer in a state where the magnetic recording medium and a magnetic transfer master carrier having a magnetic layer carrying information to be transferred to the magnetic recording medium are in close contact with each other Equipment,
A magnetic transfer system comprising a conveying device for grasping the magnetic recording medium and conveying between the holding device and the magnetic transfer device,
At least a portion of the holding device, the magnetic transfer device, and the conveying device that comes into contact with the magnetic recording medium is made of a material having a chlorine, sulfur compound, and nitrogen oxide content of 0.5 ppm or less. Magnetic transfer system characterized by A master carrier holding device for holding the magnetic transfer master carrier;
A master carrier transporting device for gripping the magnetic transfer master carrier and transporting between the master carrier holding device and the magnetic transfer device;
Of the master carrier holding device, the magnetic transfer device, and the master carrier transport device, at least the portions that come into contact with the master carrier for magnetic transfer each have a chlorine, sulfur compound, and nitrogen oxide content of 0.5 ppm or less. 2. The magnetic transfer system according to claim 1, wherein the magnetic transfer system is made of a certain material. The magnetic transfer system according to claim 1, wherein the sulfur compound is SO ₄ , and the nitrogen oxide is NO ₃ .

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