JP2004084692A - Assembled rotary joint - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain an assembled rotary joint capable of supplying various fluids by joining a first rotary joint provided with a flow passage of slurry fluid or a vacuum passage with a second rotary joint provided with a fluid passage of air or the like. <P>SOLUTION: The first rotary joint which has a first mechanical seal and a second mechanical seal and seals the flow passage, and the second rotary joint which has a communication passage communicating to the flow passage of the first rotary joint and other passage are joined with the second rotary joint by placing the first rotary joint on the upstream side of the fluid, and communicated to each passage. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an assembled rotary joint having multiple passages. More specifically, the present invention relates to an assembled rotary joint provided in a pipe of a surface polishing apparatus or the like and having a number of passages for slurry fluid, air, pure water, vacuum, and the like.
[0002]
[Prior art]
As a related art of the present invention, there is a rotary joint device shown in FIG. FIG. 5 is a sectional view of the entire rotary joint device for slurry fluid.
In FIG. 4, reference numeral 50 denotes a box of the polishing apparatus. A rotating shaft 52 is rotatably attached to the box 50, and the rotating shaft 52 is rotated by a motor 70 via gears. The rotating shaft 52 is vertically mounted on the box 50 because the workpiece is mounted on a processing table in a plane. A pad 60 is attached to a lower end portion of the rotating shaft 52, and a rotary joint 51 for supplying a slurry fluid is attached to an upper portion directly connected to the pad 60.
An air supply rotary joint 53 is mounted on the upper part of the rotary shaft 52.
[0003]
An air passage to which air is supplied from an air supply rotary joint 53 provided above the rotating shaft 52 penetrates downward in the axial direction of the rotating shaft 52.
The flow passage of the slurry fluid supply rotary joint 51 to which the slurry fluid is supplied passes through in the axial direction of the rotating shaft 52. In addition, the slurry fluid supply rotary joint 51 is provided with an air passage so as to allow air to pass therethrough in addition to the vacuum passage and the cooling passage in addition to the slurry fluid flow passage. For this reason, the rotary joint 51 for supplying the slurry fluid is provided with a large number of passages, so that it becomes large in the radial direction. When the rotary joint 51 for supplying the slurry fluid becomes large, it becomes difficult to mount the rotary joint 51 due to the space required for mounting the polishing machine. Further, if the rotary joint 51 is mounted near the pad 60 of the rotating shaft 52, an excessive force acts on the rotating shaft due to the relation of centrifugal force, which affects the polishing accuracy.
[0004]
Further, as a related art of the present invention, there is a rotary joint 100 as shown in FIG. The rotary joint 100 is provided in a pipe passage of a surface polishing apparatus for polishing the surface of a silicon wafer. The rotary joint 100 is provided with a cylindrical joint body 101. A rotating body 102 is rotatably mounted in an inner peripheral surface 101A of the joint body 101.
A flange portion 102A is provided at one end of the rotating body 102, and the flange portion 102A is connected to a polishing pad (not shown).
The slurry fluid passage 103 provided in the rotating body 102 and the fluid passage of the polishing pad are connected so as to communicate with each other.
[0005]
A cap-shaped rotary sealing ring 105 is fitted to the upper end of the rotating body 102 in the figure via an O-ring. The rotary seal ring 105 is provided with a communication path at the center and communicates with the slurry fluid path 103, and has a sealing surface 105A on the tip end surface. This rotary seal ring 105 is made of a silicon carbide material.
[0006]
A fixed seal ring 106 is provided at a position facing the rotary seal ring 105. The fixed sealing ring 106 is movably fitted to the inner peripheral surface of the fluid passage of the head cover 110 provided at the end of the joint body 101. The fixed sealing ring 106 has a conical shape provided with a cylindrical portion 106A fitted into the supply passage 111 of the head cover 110 via an O-ring attached to a groove of the joint body 101 and an opposing sealing surface 106B1 closely contacting the sealing surface 105A. It is formed on the seal portion 106B. An intermediate passage 107 is provided on the inner periphery of the stationary seal ring 106, and the intermediate passage 107 communicates with the slurry fluid passage 103 and the supply passage 111. Since the slurry fluid flows in from the supply passage 111, the stationary sealing ring 106 must be made of silicon carbide made of a hard material similarly to the rotary sealing ring 105 from the viewpoint of abrasion. The stationary seal ring 106 is pressed against the rotary seal ring 105 by a coil spring 108.
Since the first mechanical seal 104 is configured separately from the second mechanical seal 116, the axial space between the two components is increased and the structure is complicated. Further, because of the fitting structure of the cylindrical portion 106A of the fixed sealing ring 106 and the pressing structure by the coil spring, the fixed sealing ring 106 has a longitudinal structure in the axial direction.
[0007]
The rotating seal ring 105 and the fixed seal ring 106 constitute a first mechanical seal 104. A cooling passage 109 is formed on the outer periphery of the first mechanical seal 104 between the first mechanical seal 104 and the joint main body 101. The cooling passage 109 communicates with the cooling inlet / outlet 109A, and the cooling water flowing into the cooling passage 109 from the cooling inlet / outlet 109A returns to the cooling inlet / outlet 109A. Therefore, the circulation of the cooling water is not efficient and the cooling effect is inferior.
In the cooling passage 109, it is impossible to cool the second mechanical seal 116 described below. In addition, when a fluid such as gas or pure water flows through the flow passage 115, heat generation and abrasion are promoted at the same time as heat generation because there is no lubricating effect on each seal surface of the second mechanical seal 116 as compared with industrial water or the like.
[0008]
Further, the joint main body 101 is provided with an annular non-slurry fluid passage 113 provided on the inner periphery communicating with the fluid passage port 113A. This fluid passage 113 communicates with a flow passage 115 provided in the rotating body 102.
A second mechanical seal 116 is provided at a connection between the flow passage 115 and the non-slurry fluid passage 113. The second mechanical seal 116 includes a third mechanical seal 117 and a fourth mechanical seal 118.
[0009]
The third mechanical seal 117 includes a first rotary seal ring 117A slidably fitted to the rotating body 102 and a first fixed seal ring 117B fixed to the joint body 101.
The fourth mechanical seal 118 includes a first rotary seal ring 118A slidably fitted to the rotating body 102 and a first fixed seal ring 118B fixed to the joint body 101.
The first rotary seal rings 117A and 118A are elastically pressed by the respective leaf springs 120 and 120 toward the first fixed seal rings 117B and 118B.
[0010]
The above-described flow passage 115 is formed by an annular first flow passage 115 </ b> A formed by fitting the sleeve 121 into an annular groove provided in the rotating body 102 and a second axial passage formed through a radial hole. It is composed of a flow passage 115B. Therefore, there is no room to form another passage that penetrates the rotating body 102 in the axial direction. In order to form another passage, the diameter of the rotating body 102 of the rotary joint 100 must be increased. In the case of the large-diameter rotary joint 100, the rotating body 102 has an inertial force, which is a problem as a polishing apparatus. Further, there is a problem of a mounting space in precision processing, so that the polishing apparatus cannot be used.
[0011]
Since the flow passage 115 is composed of the first flow passage 115A and the second flow passage 115B, there is a problem that machining is difficult and the number of parts increases.
Furthermore, since the first circumferential passage 115A of the annular groove is formed in the rotating body 102, the whole circumferential direction becomes a passage, so that it is difficult to provide another fluid passage. If this fluid passage is forcibly formed, the rotating body 102 will have a larger diameter. Furthermore, when the rotating body 102 has a large diameter, the second mechanical seal 116 also has a large diameter. Therefore, the large-diameter sliding surface of the second mechanical seal 116 is rapidly worn due to the peripheral speed.
[0012]
[Problems to be solved by the invention]
SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a rotary joint with a large number of necessary flow passages and a shaft. The object of the present invention is to reduce the length in the direction so that various kinds of necessary rotary joints can be combined.
[0013]
Another object of the present invention is to make the flow passage for slurry large in diameter to prevent the flow passage from being clogged with the slurry and to prevent the flow passage from being worn by the slurry.
Another object of the present invention is to prevent the pad from oscillating by the action of centrifugal force by the rotary joint during rotation of the rotating shaft.
[0014]
[Means for Solving the Problems]
The present invention has been made to solve the above-described technical problem, and the technical solution is configured as follows.
[0015]
The assembly rotary joint of the present invention according to claim 1 is a first mechanical seal for sealingly connecting a connection passage for slurry fluid between a supply passage of a main body and a flow passage of a rotation shaft, and a connection between the main body and the rotation shaft. A first rotary joint having a second mechanical seal for sealingly communicating the communication passage of the fluid passage, a second flow passage provided on the second rotating shaft, another fluid supply hole provided on the second fluid passage and the second body, and A second rotary joint having a single sealing device for sealingly communicating a communication passage with another fluid passage provided in the second rotary shaft, and a second rotary joint having the first rotary joint on the upstream side of the fluid; And the respective passages are communicated.
[0016]
In the assembled rotary joint according to the first aspect of the present invention, the first rotary joint has a mechanical seal structure that withstands a slurry fluid, pure water, or a vacuum, and can achieve durability and miniaturization with respect to a fluid under special conditions. This has the effect of being possible. In addition, the second rotary joint allows other fluid passages to flow only through a fluid passage such as an air passage or industrial water so that a simple sealing device of a less complicated mechanism such as a low-performance mechanical seal can be used. A large number of fluid passages can be formed in the shaft. By connecting such a first rotary joint upstream of the second rotary joint, a fluid that is difficult to seal is supplied from the first rotary joint, and a fluid that does not reduce the durability even with a sealing device having a simple structure is the second fluid. A large number of fluid passages can be provided so as to supply from two rotary joints. As a result, there is an effect that the use of the assembled rotary joint can be expanded.
In particular, the seal of the fluid passage of the second rotary joint can be made compact by using a simple sealing device such as packing. For this reason, it becomes easy to couple the second rotary joint to the first rotary joint, and it is possible to reduce the size of the whole assembled rotary joint, solve the problem of the mounting place, and expand the mounting application.
[0017]
The assembled rotary joint of the present invention according to claim 2 has a second communication passage communicating with a first communication passage provided on an inner periphery of a sealing surface of a first fixed sealing ring, and surrounds the second communication passage. A first mechanical seal having a first rotary seal ring having a slurry seal surface in close contact with a seal surface and having a fluid seal surface and a holding surface on a surface opposite to the slurry seal surface; A rotating shaft having a slurry fluid flow passage in close contact with the holding surface of the second communication passage, and a second seal surface surrounding the rotary ring and having a second seal surface in close contact with the fluid seal surface at one end. A second mechanical seal having a fixed sealing ring and a third rotating sealing ring held at the other end in close contact with the rotating shaft; and a hermetic seal between an inner peripheral passage surface of the second mechanical seal and the rotating shaft. Fluid passage A first rotary joint having a first fluid passage provided in the main body and a second fluid passage provided in the rotary shaft communicating with the fluid passage through a communication passage provided in the second mechanical seal; A second rotary shaft having a second slurry fluid flow passage communicating with the slurry fluid flow passage of the rotary joint and a second fluid passage communicating with the fluid passage, and having another fluid passage for supplying another fluid; And a second rotary joint having another fluid supply port for supplying the other fluid passage, wherein the rotation axis of the first rotary joint and the second rotation axis of the second rotary joint are each The passages are connected and connected.
[0018]
In the assembled rotary joint according to the second aspect of the present invention, since the entire length of the first rotary seal ring that seals with the first stationary seal ring can be configured to be reduced in the axial direction, the axial length of the rotary joint can be reduced. It is possible to reduce the size. At the same time, since the first rotary seal ring has a structure pressed by the resilient means of the second mechanical seal, the joint between the rotary shaft and the first rotary seal ring only needs to be in a joined state capable of sealing. In addition, the axial length of the first rotary seal ring can be shortened, and the diameter of the communication passage can be increased. Therefore, it is possible to effectively prevent the problem that the slurry fluid is clogged when passing through the communication passage and that the communication passage is worn by the slurry such as the abrasive.
When the first rotary joint, which can be reduced in size, is combined with the second rotary joint having a simple structure capable of supplying the other fluid, a multi-passage assembled rotary joint can be easily formed.
[0019]
According to a third aspect of the present invention, there is provided an assembled rotary joint, wherein the second mechanical seal has a structure in which one seal device and the other seal device are symmetrically arranged, and a second mechanical seal is provided between the one seal device and the other seal device. The first fluid passage and the second fluid passage communicate with each other via the communication passage.
[0020]
In the assembled rotary joint according to the third aspect of the present invention, the second mechanical seal is constituted by one seal device and the other seal device arranged symmetrically, so that the gap between the seal devices is communicated with the communication passage. It is possible to provide a communication passage that connects the fluid passage and the first fluid passage as a part of the above.
Further, since the fluid passage is formed directly between the second mechanical seal and the rotating shaft, the diameter of the entire rotating shaft can be reduced to the extent that the diameter of the flowing passage is increased. Further, the fluid seal surface and the slurry seal surface of the first rotary seal ring can be pressed against each other by a spring means for resiliently pressing the second mechanical seal. For this reason, the shape and mounting structure of the first rotary seal ring can be simplified. The fact that the first rotary joint can be formed in a small size enables a structure in which the second rotary joint can be coupled.
Furthermore, it is possible to form a fluid passage directly between the inner peripheral passage surface of the second stationary seal ring and the third stationary seal ring and the rotation shaft, thereby allowing the first fluid passage and the second fluid passage to communicate with each other. And the diameter of the slurry fluid flow passage of the rotating shaft can be increased.
[0021]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an assembled rotary joint according to a preferred embodiment of the present invention will be described in detail with reference to the drawings. Each drawing described below is a drawing based on a design drawing whose dimensional relationship is accurate.
[0022]
FIG. 1 is a sectional view of a polishing apparatus 80 incorporating an assembled rotary joint 1 according to the present invention.
In FIG. 1, reference numeral 50 denotes a box of the polishing apparatus 80. A rotating shaft 20 is rotatably attached to the box 50 via a bearing, and the rotating shaft 20 is rotated by a motor 40 via a pair of gears 42 and 43. The gear chamber 51 of the box 50 in which the gears 42 and 43 are located is filled with a lubricating liquid.
Further, the rotating shaft 20 is vertically mounted on the box 50 because the rotary shaft 20 mounts a processed product on a flat surface and processes the processed product. A pad 60 is attached to the lower end of the rotating shaft 20. A first rotary joint 1 for supplying a slurry fluid, which rotates through the pad 60 and the rotary shaft 20, is mounted on the upper portion of the rotary shaft 20. Below the first rotary joint 1, a second rotary joint 30 for supplying air, which is directly connected integrally with the first rotary joint 1, is provided.
[0023]
As shown in FIG. 2, the first rotary joint 1 is provided with a large-diameter slurry fluid flow passage 12 at the center. Further, a fluid passage 14 serving as a vacuum passage is provided, and further, a pure water passage can be provided. As described above, the first rotary joint 1 is provided with a fluid passage such as an abrasive, a high-viscosity liquid, a corrosive fluid, a high-temperature high-pressure fluid, or a fluid that adversely affects the sealing device as a fluid to be circulated. .
The first rotary joint 1 is designed to have a mechanism capable of withstanding such a severely affected fluid. For example, a sealing ring for sealing a fluid is made of cemented carbide, silicon carbide, or a ceramic material. Furthermore, the sealing device is configured as a mechanical seal.
[0024]
The second rotary joint 30 uses a material or a seal device as a rotary joint provided with a mechanism that withstands air, water, or the like, as a second rotary joint for supplying air or the like. This makes it possible to use a low-cost material. Further, the sealing device can use an O-ring or packing made of a rubber material.
[0025]
Although not shown, the rotary shaft 20 is provided with a slurry fluid passage and a fluid passage such as a vacuum as a fluid passage of the first rotary joint 1 as shown in FIG. Is provided. Further, an air passage, a gas passage, and an industrial water passage through which air is supplied from the second rotary joint 30 as shown in FIGS.
In addition, the rotary shaft 20 is provided with a fluid passage as a fluid passage for the first rotary joint 1 so as to allow passage of gas in addition to a vacuum passage and a cooling passage. Thus, the rotary shaft 20 is provided with a number of fluid passages.
Then, the fluid having a severe effect is supplied through the first rotary joint 1. Further, normal fluid such as water and air is supplied through the second rotary joint 30.
[0026]
FIGS. 2 to 4 show an assembled rotary joint A according to a second preferred embodiment of the present invention. FIG. 2 is a sectional view of the first rotary joint 1. FIG. 3 is a sectional view of the second rotary joint 30. FIG. 4 is a plan view of FIG. The rotary joints 1 and 30 of FIGS. 2 and 3 are combined to form an assembled rotary joint A.
[0027]
The first rotary joint 1 as one of the assembled rotary joints A shown in FIG. 2 is a rotary joint for supplying a slurry fluid, and supplies a fluid containing an abrasive, a high-viscosity fluid, a pure water fluid, a special gas, and the like. In FIG. 2, which is designed by adding a technology invented to be suitable for the joint, a through hole 11 through which a first rotating shaft (hereinafter, also referred to as a rotating shaft) 20 penetrates is formed in the main body 10 for a joint. Is provided. In addition, the first main body (hereinafter, also referred to as main body) 10 has a first main body 10A, a second main body 10B, and a third main body 10C which are integrally connected by bolts C in the axial direction.
The upper end of the through hole 11 of the first main body 10A is formed in the supply passage 12A for introducing the slurry fluid. A pipe screw is formed in the supply passage 12A so that the pipe can be connected. In the through hole 11 below the supply passage 12A, an annular concave portion 11A having a small tapered surface to which the elastic O-ring 15 is attached is formed. Further, the through hole 11 of the first main body 10A is formed with a large-diameter hole 11B at the lower side in the figure, so that the first rotary seal ring 3 can be disposed. An outlet 13B of the cooling passage 13 communicates with the large-diameter hole 11B.
[0028]
The first fixed sealing ring 2 is disposed in the recess 11A of the first main body 10A via an elastic O-ring 15. The first fixed sealing ring 2 has a first communication passage 12B passing through the center thereof.
A sealing surface 2A is formed at one end of the first fixed sealing ring 2 so as to surround the first communication passage 12B. Further, a tapered groove 2B facing the annular concave portion 11A is formed on the outer peripheral surface.
The elastic O-ring 15 compressed between the annular concave portion 11A and the tapered groove 2B causes the sealing surface 2A of the first fixed sealing ring 2 to be used for slurry of the first rotary sealing ring 3 by the action of the two tapering surfaces in contact with each other. It is resiliently pressed against the sealing surface 3A and is in close contact. At the same time, the O-ring 15 effectively prevents the slurry fluid from entering the cooling passage 13. Since the first fixed sealing ring 2 is supported by the elastic O-ring 15, it can be formed smaller in the axial direction and the radial direction as compared with the size of the first communication passage 12B.
The elastic O-ring 15 is made of nitrile rubber, fluorine rubber, chloroprene rubber, polyurethane rubber, or the like. The first stationary seal ring 2 is made of silicon carbide, a super-hard alloy, ceramic or the like.
[0029]
The first rotary seal ring 3 is disposed in the large-diameter hole 11B of the first main body 10A. On the first fixed sealing ring 2 side of the first rotary sealing ring 3, a slurry sealing surface 3A is formed so as to surround the second communication hole. In the center of the first rotary seal ring 3, a second communication passage 12C that can communicate with the first communication passage 12B is formed.
Further, a fluid seal surface 3B is formed on a surface of the first rotary seal ring 3 opposite to the slurry seal surface 3A in the axial direction. A fitting surface 3C is formed in the fluid seal surface 3B, and one end of the rotating shaft 20 is fitted to the fitting surface 3C via an O-ring. The communication passage (hereinafter, also referred to as a first communication passage) 12 of the cylindrical rotary shaft 20 communicates with the first communication passage 12C.
The first rotary seal ring 3 is movable in the axial direction by a pin 20 </ b> A provided at one end of the rotary shaft 20, but is configured to rotate together with the rotary shaft 20. The first rotary seal ring 3 and the rotary shaft 20 may be fitted and connected. The first rotary seal ring 3 is also made of a hard material such as silicon carbide. The first fixed seal ring 2 and the first rotary seal ring 3 form a pair to form a first mechanical seal 8.
[0030]
The second mechanical seal 4 is mounted on the inner peripheral surface 11C of the through hole 11 of the second main body 10B.
The second mechanical seal 4 includes one seal device 5 and the other seal device 6. One sealing device 5 is formed of a second stationary sealing ring 5 </ b> A and a fluid sealing surface 3 </ b> B of the first rotating sealing ring 3. The other sealing device 6 includes a third stationary sealing ring 6A and a third rotating sealing ring 6B.
The second stationary sealing ring 5A has an L-shaped cross section. The second stationary sealing ring 5A has an inner peripheral surface where the cylindrical outer peripheral surface 5A1 is a through hole 11 of the main body 10 via an O-ring 25. 11C is movably fitted in the axial direction, and is non-rotatably held by a fixing pin provided on the second main body 10B. The second seal surface 5A3 provided on the flange-shaped end surface is pressed by a coil spring (spring means) 16 and is in close contact with the fluid seal surface 3B of the first rotary seal ring 3. The inner peripheral passage surface 5A4 of the second stationary sealing ring 5A forms a fluid passage 14 with a space between the inner peripheral passage surface 5A4 and the rotating shaft 20.
[0031]
The other sealing device 6 includes a third stationary sealing ring 6A and a third rotary sealing ring 6B. The third stationary sealing ring 6A is formed in the same shape as the second stationary sealing ring 5A, and is arranged symmetrically with the second stationary sealing ring 5A with respect to the center line of the inner peripheral surface 11C of the second main body 10B.
Like the second fixed sealing ring 5A, the third fixed sealing ring 6A is provided with a cylindrical outer peripheral surface 6A1 and a third sealing surface 6A3 on the distal end surface. Further, it is held non-rotatably by a fixing pin provided on the second main body 10B.
The inner peripheral passage surface 6A4 of the third stationary sealing ring 6A forms a fluid passage 14 with a space between the inner peripheral passage surface 6A4 and the rotating shaft 20, similarly to the second stationary sealing ring 5A. A communication path 14C is formed between the second fixed sealing ring 5A and the third fixed sealing ring 6A and communicates with the first fluid passage 14A.
Since the sealing fluid does not pass through the sealing rings 5A, 6A, 6B of the one sealing device 5 and the other sealing device 6, not only a hard material such as silicon carbide but also carbon or the like can be used as necessary. It is possible.
[0032]
Further, the second stationary sealing ring 5A and the third stationary sealing ring 6A are elastically pressed by spring means of the coil spring 16 in directions opposite to each other. The coil spring 16 is inserted and held in a passage 13C provided in the second main body 10B. The passage 13C communicates with the cooling passage 13.
The main body 10 is provided with a supply port 13A for supplying cooling water to the cooling passage 13 on the other sealing device 6 side, and an outlet 13B for discharging this cooling water on the first fixed sealing ring 2 side. Have been. This cooling passage 13 is excellent in cooling effect because the distance from the other sealing device 6 to the first fixed sealing ring 2 is short. In addition, since the slurry sealing surface 3A and the fluid sealing surface 3B of the first rotary seal ring 3 are cooled from the outer peripheral surface, the sealing effect as well as the cooling effect for each sealing surface is exhibited.
[0033]
On the other hand, the third rotary seal ring 6B which is in close contact with the third seal surface 6A3 of the third fixed seal ring 6A is formed in an L-shaped cross section, and the cylindrical inner peripheral surface 6B1 is fitted to the rotary shaft 20 via an O-ring. I'm wearing
The third seal surface 6B3 provided on the end face of the third rotary seal ring 6B is in close contact with the third seal surface 6A3 of the second fixed seal ring 6A. The third rotary seal ring 6B is rotated by being held by a drive pin provided on the rotary shaft 20.
Further, a packing 17 for sealing between the outer peripheral surface of the third rotary sealing ring 6B and the main body 10 is fitted. The packing 17 seals the communication between the cooling passage 13 and the bearing 21.
[0034]
Two bearings 21 arranged in parallel are provided between the rotating shaft 20 and the through hole 11 below the packing 17 of the main body 10 in the drawing. The rotating shaft 20 is rotatably held via a bearing 21 held by the main body 10. Since this bearing 21 is mounted near the second mechanical seal 4, it stably supports the second mechanical seal 4 and the first rotary seal ring 3.
[0035]
In the main body 10, a second fluid passage 14 having an axial hole communicating with the fluid passage 14 in the second mechanical seal 4 is formed in the axial direction. Further, the main body 10 is provided with a first fluid passage 14A penetrating through a communication hole 14C between the one seal device 5 and the other seal device 6.
A vacuum device (not shown) communicates with the outside of the first fluid passage 14A by piping. Then, the polished processed product or the like is vacuum-adsorbed through the second fluid passage 14 or the slurry fluid attached to the processed product is sucked.
In particular, the fluid passage 14 is used for evacuation. In the vacuum passage, no liquid is interposed between the fluid sealing surface 3B, the second sealing surface 5A3, and the third sealing surface 6A3. , 6A3 tend to generate heat and wear out rapidly. However, since the cooling passage 13 is provided on the outer periphery of the sealing surfaces 3B, 5A3, 6A3, heat generation and wear are effectively prevented.
[0036]
The main body 10 is further provided with a drain hole 18. The drain hole 18 is for discharging cooling water or the like when leaked.
Further, a flange portion is formed at a lower portion of the rotary shaft 20 in the figure, and another component such as a second rotary joint 30 for air supply is attached via the flange with a bolt B.
[0037]
FIG. 3 is a sectional view of the second rotary joint 30 for supplying air. FIG. 4 is a plan view of the upper part of the second rotary joint 30 of FIG.
3 and 4, a sleeve 33A is fitted on the second rotating shaft 33.
Further, a second flow passage 12 communicating with the first flow passage 12 of the first rotating shaft 20 in FIG. 2 is formed in the axial direction. Further, a first air passage 31 and a second air passage 32 are formed in the second rotation shaft 33 through the sleeve 33A on the outer peripheral side, respectively, and formed into holes which are bent in an L-shape in the axial direction therefrom. Have been.
Further, a second fluid passage 14 communicating with the fluid passage 14 of the first rotary joint 1 in FIG. 2 penetrates through the second rotary shaft 33 in the axial direction.
[0038]
On the other hand, the second main body 40 is provided with a first air supply port 31 </ b> A communicating with the first air passage 31.
Further, a second air supply port 32 </ b> A communicating with the second air passage 32 is provided in the second main body 40. A seal device 35 is fitted on both sides of the first air supply port 31A and the second air supply port 32A between the fitting of the sleeve 33A and the second main body 40. Then, both sides of each of the air passages 31, 32 of the sleeve 33A and the respective air supply ports 31A, 32A are sealed by the sealing devices 35.
The seal device 35 is a packing 35, and the packing 35 has a special shape in which the inner peripheral side is formed of a fluororesin ring and the outer peripheral side is formed of a rubber ring. The rubber ring and the fluororesin ring are fitted and integrated with each other.
The outer peripheral surface of the sleeve 33A that slides with the packing 35 is provided with hard plating indicated by fine hatching. The sliding surface with the packing 35 is configured not to be worn. In addition, 40 is a drain receiving container.
[0039]
The assembly of the first rotary joint 1 and the second rotary joint 30 configured as described above is the assembled rotary joint A. In this assembled rotary joint A, as an example, the slurry fluid flowing through all the flow passages 12 of the assembled rotary joint A is a fluid containing an abrasive for polishing the liquid crystal glass. Further, the fluid passage 14 is a vacuum passage used for a suction means for sucking the liquid crystal glass and moving it from the processing apparatus to another. Alternatively, the processing liquid or the like attached to the liquid crystal glass is sucked using a vacuum passage.
This slurry fluid contains a high concentration of the abrasive in order to polish the surface of the liquid crystal glass with the abrasive.
If the flow passage 12 has a small diameter as in the related art, there is a problem that this abrasive clogs the flow passage 12. If the diameter of the flow passage 12 is small, the abrasive must be flowed with a high-speed fluid due to the relationship between the polishing rate. As described above, when the abrasive flows at high speed, the abrasive flowing through the flow passage 12 wears as if the flow passage 12 was scraped off, causing a failure.
[0040]
The first rotary joint 1 has the structure of the first rotary seal ring 3, the second mechanical seal 4 directly forms the first fluid passage 14 surrounding the rotary shaft 20, and the first rotary joint 1 is formed by the spring means of the second mechanical seal 4. Since the one-rotation sealing ring 3 is configured to be pressed, the first rotary joint 1 can be made compact. Then, the connection can be made with the same diameter as the small second rotary joint 30. Since the second rotary joint 30 seals air, water, and the like, it is a fluid that does not cause a problem in sealing. For this reason, the sealing device 35 provided in the second rotary joint 30 can be a sealing device having a simple structure such as packing or an O-ring. The seal device 35 as a single unit is a device such as a packing, and does not have a complicated configuration such as a mechanical seal.
Further, since the fluid passage 14 can be formed directly between the inner peripheral surface of the second mechanical seal 4 and the rotating shaft 20, even if the diameter of the flow passage 12 is increased, the second mechanical seal 4 is connected to the first flow passage 12. It is possible to make the diameter smaller in comparison. For this reason, since the peripheral speed of the second sealing surface 5A3, the third sealing surface 6A3, and the third sealing surface 6B3 can be reduced, the sliding heat generation of the sealing surfaces 5A3, 6A3, 6B3 can be prevented. Then, even if the first fluid passage 14 is a vacuum passage, it is possible to prevent wear of each of the seal surfaces 5A3, 6A3, 6B3.
Further, since the cooling water circulates from the outer periphery of the mechanical seal 4 to the outer periphery of the first fixed sealing ring 2 via the cooling passage 13, heat generation and wear of each seal surface against slurry fluid and vacuum are effectively prevented.
The assembled rotary joint A is also used for polishing semiconductor wafers and the like. Further, the fluid passage 14 is also used as a flow path for air and pure water as required.
【The invention's effect】
ADVANTAGE OF THE INVENTION According to the assembled rotary joint of this invention, the 1st rotary joint is made upstream and it has the effect of connecting a 2nd rotary joint to a 1st rotary joint by the effect which can be made small.
The first rotary seal ring having a structure in which a slurry seal surface is provided at one end and a fluid seal surface is provided at the other end and pressed against the first fixed seal ring by a spring means provided in the mechanical seal has a shorter axial length. In addition to this, there is an effect that the fitting and holding of the rotating shaft can be simplified. With these configurations, it is possible to reduce the axial length of the first fixed sealing ring and the first rotary sealing ring even if the flow passage has a large diameter. Therefore, the flow passage is not clogged with the slurry fluid, and the wear of the flow passage can be prevented.
Further, there is an effect that the polishing speed can be improved by increasing the flow of the slurry fluid flowing through the flow passage.
In this way, the first rotary joint exhibits a durable ability even when a fluid under severe conditions is flowed.
[0042]
On the other hand, the second rotary joint to which the first rotary joint is connected does not have the first mechanical seal that crosses the rotation axis, and is made to flow air or water with good conditions. become. For this reason, a large number of fluid passages can be formed in the second rotary joint even with a small-diameter rotary shaft. As a result, by classifying the conditions of the fluid into the first rotary joint and the second rotary joint, it is possible to obtain a multi-path assembled rotary joint in which a large number of fluid passages can be easily provided.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of a polishing machine in a state where an assembly rotary joint according to an embodiment of the present invention is attached to the polishing machine.
FIG. 2 is a sectional view of one first rotary joint of an assembled rotary joint according to a second embodiment of the present invention.
FIG. 3 is a sectional view of a second rotary joint attached to a lower end of the first rotary joint according to the present invention.
FIG. 4 is a plan view of a second rotary joint of FIG. 3;
FIG. 5 is a sectional view of a conventional rotary joint.
FIG. 6 is a cross-sectional view of another conventional rotary joint.
[Explanation of symbols]
A Assembly Rotary Joint 1 First Rotary Joint 2 First Fixed Seal Ring 2A Seal Surface 2B Taper Groove 3 First Rotary Seal Ring 3A Slurry Seal Surface 3B Fluid Seal Surface 3C Holding Surface 4 Second Mechanical Seal 5 One Sealing Device 5A second fixed seal ring 5A1 cylindrical outer peripheral surface 5A3 second seal surface 5A4 inner peripheral passage surface 6 the other sealing device 6A third fixed seal ring 6A1 cylindrical outer peripheral surface 6A3 third seal surface 6A4 inner peripheral passage surface 6B third rotary seal Ring 6B1 Cylindrical inner peripheral surface 6B3 Third seal surface 8 First mechanical seal 10 Main body 10A First main body 10B Second main body 10C Third main body 11 Through hole 12 Flow passage 12A Supply passage 12B First communication passage 12C Second communication passage 13 Cooling passage 13A Supply port 13B Outlet 13C Passage 14 Fluid passage 14A First fluid passage 15 Elastic O-ring 16 Means (coil spring)
17 Packing 18 Drain 20 Rotary shaft 20A Pin 21 Bearing 25 O-ring 30 Second rotary joint 31 Other fluid passage 31A Other fluid supply holes 33 Second rotary shaft 34 Second body

Claims (3)

A first mechanical seal for sealingly connecting a connecting passage for slurry fluid between a supply passage of the main body and a flow passage of the rotary shaft, and a second mechanical seal for sealingly connecting a communication passage of a fluid passage between the main body and the rotary shaft. Communication between a first rotary joint having a mechanical seal, a second fluid passage provided on a second rotating shaft, a second fluid passage, another fluid supply hole provided on a second body, and another fluid passage provided on a second rotating shaft; A second rotary joint having a single sealing device for sealingly connecting the passages, and a second rotary joint having the first rotary joint upstream of the fluid and connected to the second rotary joint, and the respective passages being connected to each other; . A second communication passage provided on the inner periphery of the sealing surface of the first fixed sealing ring and having a second communication passage communicating with the first communication passage, and a slurry sealing surface surrounding the second communication passage and in close contact with the sealing surface; A first mechanical seal having a first rotary seal ring having a fluid seal surface and a holding surface on a surface opposite to the slurry seal surface, the first mechanical seal being in close contact with the holding surface of the first rotary seal ring; A rotating shaft having a fluid passage for slurry fluid communicating therewith, a second stationary sealing ring surrounding the rotating ring and having a second sealing surface in close contact with the sealing surface for fluid at one end, and having the rotating shaft at the other end; A second mechanical seal having a third rotating seal ring held in close contact, and a fluid passage sealed between an inner peripheral passage surface of the second mechanical seal and the rotating shaft; One fluid passage and the rotary shaft A first rotary joint having a second fluid passage communicating with the fluid passage through a communication passage provided in the second mechanical seal, and a second slurry fluid having a fluid passage communicating with the slurry fluid of the first rotary joint. A second rotary shaft having a flow passage and a second fluid passage communicating with the fluid passage, having another fluid passage for supplying another fluid, and having another fluid supply port for supplying the other fluid passage; An assembled rotary joint, comprising: a second rotary joint, wherein the rotary shaft of the first rotary joint and the second rotary shaft of the second rotary joint are connected to each other through the respective passages. The second mechanical seal is configured such that one seal device and the other seal device are symmetrically arranged, and the first fluid passage and the first fluid passage are connected via a communication passage between a combination of the one seal device and the other seal device. The assembly rotary joint according to claim 1, wherein the second fluid passage is in communication with the second fluid passage.

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