JP2004079830A - Ink marking device of marking prober for manufacture of semiconductor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ink marking device of a marking prober for manufacture of semiconductor that can regulate the rotation of a plunger and make the vertical motion thereof smooth, and extend its service life. <P>SOLUTION: The ink marking device of the marking prober is provided with a plunger 7, an electromagnetic coil holder 2 wherein a cylindrical positioning pin 13 for regulating the rotary operation of the plunger 7 is fixed, and a bearing holder 1 for guiding the vertical motion of the plunger 7. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an ink marking device for a marking prober in semiconductor manufacturing, and more particularly to an ink marking device for a defective chip in a probing process.
[0002]
[Prior art]
Conventionally, techniques in such a field include those disclosed below.
[0003]
FIG. 12 is an external view of a conventional marking device in semiconductor manufacturing. FIG. 12 (a) is a top view and FIG. 12 (b) is a side view.
[0004]
In these figures, 101 is an electromagnetic coil holder, 102 is an ink holder, 103 is an ink core, 104 is a plunger having a disk 104A with positioning notched side surfaces 104B, 105 is an electromagnetic coil, 106 is an electromagnetic coil base, and 107 is a return coil. Spring, 108 is an ink buffer, 109 is an ink guide, and 110 is an upper stopper of the plunger 104.
[0005]
Here, in order to make the ink mark uniform, the plunger 104 needs to be moved up and down without rotating.
[0006]
Therefore, the plunger 104 is provided with a disc 104A with a positioning notch side surface 104B. It is configured to be able to.
[0007]
That is, when the plunger 104 is pulled downward by the exciting force of the electromagnetic coil 105, the ink previously stored in the ink buffer 108 travels along the tip of the plunger 104, thereby performing ink marking on a defective chip. I have.
[0008]
When the excitation of the electromagnetic coil 105 is stopped, the plunger 104 is returned upward to the upper stopper 110 of the plunger 104 by the return spring 107.
[0009]
[Problems to be solved by the invention]
However, in the plunger 104 having the above-mentioned conventional configuration, the notch side surface 104 </ b> B and the side surface 101 </ b> A of the electromagnetic coil holder 101 wear due to friction, so that the backlash increases. Then, when the plunger 104 is moved up and down, the frictional resistance is increased, which causes a malfunction.
[0010]
As a result, when a downward operation failure occurs, a marking error (blank hit) occurs on the chip, and when an upward operation failure occurs, ink is dragged to the wafer surface.
[0011]
For this reason, the life of the conventional marking device is short, that is, less than about one year according to past performance values.
[0012]
Conventionally, in FIG. 12, the connection between the ink buffer 108 and the ink holder 102 is of a screw type. In this case, when removing the ink buffer 108 such as cleaning or refilling the ink, the screw portion is worn, and the outer peripheral portion is scratched or scraped, so that the quality is not satisfactory.
[0013]
Further, since the conventional marking device does not have a function of detecting an operation defect, it has been impossible to minimize the above-described quality defect.
[0014]
The present invention has been made in view of the above circumstances, and has an object to provide an ink marking device of a marking prober in semiconductor manufacturing that can regulate rotation of a plunger and smooth up and down movement, and can extend the life. I do.
[0015]
Another object of the present invention is to provide an ink marking device for a marking prober in semiconductor manufacturing that can detect when a plunger malfunctions.
[0016]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides: (1) an ink marking device for a marking prober in semiconductor manufacturing, comprising: a plunger; and an electromagnetic coil holder to which a cylindrical positioning pin for restricting the rotation of the plunger is fixed. And a bearing holder for guiding the plunger up and down.
[0017]
[2] In an ink marking device of a marking prober in semiconductor manufacturing, a plunger, an electromagnetic coil holder to which a cylindrical positioning pin for restricting the rotation of the plunger is fixed, and a bearing holder for guiding the plunger up and down. And a proximity sensor that operates in accordance with the vertical movement of the plunger.
[0018]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail.
[0019]
FIG. 1 is an external view of a marking device in semiconductor manufacturing according to a first embodiment of the present invention.
[0020]
In this figure, 1 is a bearing holder, 2 is an electromagnetic coil holder, 3 is an ink holder, 4 is a reinforcing plate, 5 is an ink core, 6 is a sensor flag, 7 is a plunger, 8 is an ink buffer, 9 is an ink guide, 10 Is a proximity sensor, 11 is an electromagnetic coil base, 12 is a ball plunger, 13 is a positioning pin, 14 is an electromagnetic coil (solenoid), and 15 is a ball bearing. Mounting screws and the like are omitted here.
[0021]
Hereinafter, the components of the marking device will be described in detail.
[0022]
(1) Plunger FIG. 2 is a configuration diagram of a plunger as a part of the marking device of the present invention. FIG. 2 (a) is a top view, FIG. 2 (b) is a side view, and FIG. 2 (c) is a bottom view. is there.
[0023]
As shown in these figures, the plunger 7 has a flange 7A, an engagement groove 7B of a positioning pin 13 formed on the flange 7A, a lower cylinder 7C, a lower tip 7D, an upper cylinder 7E, and the like. Although the engagement grooves 7B of the positioning pins 13 are formed at four places of the flange 7A, usually only one of them is engaged with the positioning pins 13 and the engagement of the used positioning pins is performed. When the groove 7B is worn, the engaging groove 7B of another positioning pin is used. That is, the remaining three engagement grooves 7B of the positioning pins 13 are used as spares when worn. This can also extend the life of the marking device of the present invention.
[0024]
(2) Electromagnetic Coil Holder FIG. 3 is a configuration diagram of an electromagnetic coil holder as a part of the marking device of the present invention. FIG. 3 (a) is a top view, FIG. 3 (b) is a side view, and FIG. Is a bottom view.
[0025]
In these figures, the electromagnetic coil holder 2 has a main body 2A, a permissible hole 2B of a plunger, a positioning pin 13 fixed to the main body 2A, and the like.
[0026]
(3) Bearing holder (linear motion ball bearing)
FIG. 4 is a configuration diagram of a bearing holder as a part of the marking device of the present invention. FIG. 4 (a) is a top view, FIG. 4 (b) is a side view, and FIG. 4 (c) is a front view.
[0027]
In these drawings, the bearing holder 1 has a main body 1A, a holding hole 1B for a plunger, a ball bearing allowable groove 1C, a mounting hole 1D for a proximity sensor, a fixing portion 1E, and the like.
[0028]
(4) Sensor Flag FIG. 5 is a configuration diagram of a sensor flag as a component of the marking device of the present invention. FIG. 5 (a) is a top view and FIG. 5 (b) is a side view.
[0029]
In these figures, the sensor flag 6 has a main body 6A, a plunger mounting hole 6B, a plunger tightening hole 6C, a flag portion 6D, and the like.
[0030]
(5) Electromagnetic Coil Base FIG. 6 is a configuration diagram of an electromagnetic coil base as a part of the marking device of the present invention. FIG. 6 (a) is a top view and FIG. 6 (b) is a side view.
[0031]
In these figures, the electromagnetic coil base 11 includes a main body 11A, a pedestal 11B, an upper protruding portion 11C of the pedestal 11B, a lower protruding portion 11D of the electromagnetic coil base 11, an engaging portion 11E below the plunger, a through hole 11F, and the like. have.
[0032]
(6) Ink Holder FIG. 7 is a configuration diagram of an ink holder as a part of the marking device of the present invention. FIG. 7 (a) is a top view, FIG. 7 (b) is a side view, and FIG. FIG.
[0033]
In these drawings, the ink holder 3 has a main body 3A, a holding hole 3B of a lower protruding portion 11D of the electromagnetic coil base 11, a fixing hole 3C, and the like.
[0034]
(7) Reinforcement plate The reinforcement plate 4 is a reinforcement plate for fixing the electromagnetic coil holder 2 and the ink holder 3.
[0035]
8A and 8B are configuration diagrams of a reinforcing plate as a part of the marking device of the present invention. FIG. 8A is a front view, and FIG. 8B is a side view.
[0036]
In these figures, the reinforcing plate 4 has a main body 4A, mounting holes 4B, 4C, 4D, 4E and the like.
[0037]
(8) Ink Buffer FIG. 9 is a configuration diagram of an ink buffer as a component of the marking device of the present invention. FIG. 9 (a) is a top view and FIG. 9 (b) is a side view.
[0038]
In these figures, the ink buffer 8 has a main body 8A, an upper bush 8B, a lower bush 8C, a hole 8D, and the like.
[0039]
As described in connection with the problem of the prior art in FIG. 12, conventionally, the connection between the ink buffer 108 and the ink holder 102 is of a screw-in type. However, the thread portion was worn, and the outer peripheral portion was scratched and scraped, so that the quality was not satisfactory.
[0040]
Therefore, in the present invention, as shown in FIG. 9B, a groove 8E is formed below the tapered portion 8B of the ink buffer 8, and an ink having a ball plunger (not shown) corresponding to the groove 8E. It has a holder 3 (see FIG. 7).
[0041]
As shown in FIG. 7A, four female screw holes 3E for mounting a ball plunger are formed at 90-degree intervals. For fixing, a nut (not shown) corresponding to the screw diameter of the ball plunger is used.
[0042]
With the above-described configuration, when the ink buffer 8 is inserted into the ink holder 3, the ball of the ball plunger is fixed by being in close contact with the groove 8E below the tapered portion 8B of the ink buffer 8.
[0043]
As described above, in the present invention, since the screw portion is not used for coupling the ink holder 3 and the ink buffer 8, a dedicated tool (plier or the like) for fixing is not required.
[0044]
Therefore, (1) easy attachment and detachment, (2) reduction of consumable parts, and (3) generation of shavings can be prevented.
[0045]
Next, the operation of the marking device according to the present invention will be described.
[0046]
First, a cylindrical positioning pin 13 is implanted in the electromagnetic coil holder 2, and the positioning pin 13 is assembled so as to engage with the engaging groove 7 </ b> B of the positioning pin 13 formed on the flange 7 </ b> A of the plunger 7.
[0047]
In the bearing allowable groove 1C of the bearing holder 1, for example, four layers of ball bearings 15 are arranged vertically. In addition, 20 to 30 ball bearings 15 may be arranged in one layer.
[0048]
With such a configuration, the plunger 7 is regulated by the positioning pin 13 so as not to rotate, but can be moved smoothly in the vertical direction. In addition, the reproducibility at the time of the vertical movement is enhanced by the positioning pin 13.
[0049]
As described above, the linear motion ball bearing 15 having an inner diameter of 4 mm is inserted into the bearing holder 1, and the plunger 7 can be guided by the linear motion ball bearing 15 of the bearing holder 1 to perform a smooth linear motion. That is, since the linear motion ball bearing 15 is disposed on the circumference of the upper cylindrical body 7E of the plunger 7, the vertical movement of the plunger 7 is extremely smooth, and the rotation of the plunger 7 is prevented. The shape can be uniformly provided.
[0050]
As described above, according to the first embodiment of the present invention, the plunger 7 is prevented from rotating by the positioning pin 13 and is guided by the bearing holder 1. In particular, since the half-peripheral surface of the positioning pin 13 formed of a cylindrical body comes into contact with the plunger 7 in the rotation preventing portion, the contact area can be reduced, frictional resistance can be sharply reduced, and smooth linear motion can be performed.
[0051]
As described above, the effect of realizing a longer life of the components of the marking device can be obtained.
[0052]
Next, a second embodiment of the present invention will be described.
[0053]
FIG. 10 is a system configuration diagram of a marking device in semiconductor manufacturing according to a second embodiment of the present invention, and FIG. 11 is an operation time flowchart of the system of the marking device in semiconductor manufacturing according to the second embodiment of the present invention.
[0054]
In these figures, 21 is a sensor amplifier for amplifying a signal from the proximity sensor 10, 22 is a controller, 23 is a synchronous signal processing board, 24 is a prober, and an I / F board (station I / F board) is provided therein. It has.
[0055]
The operation of this system will be described.
[0056]
(1) When the coil ON signal TP2 is input from the prober 24, the plunger 7 moves downward. The sensor flag 6 fixed to the plunger 7 moves to the detection range of the proximity sensor 10 (corresponding to the marking time of 34 ms in FIGS. 11A and 11D).
[0057]
(2) The proximity sensor 10 detects the sensor flag 6 and sends the result to the sensor amplifier 21.
[0058]
(3) The sensor amplifier 21 amplifies the signal and sends it to the controller 22.
[0059]
(4) The synchronization signal (TTL signal) from the prober 24 is amplified by the synchronization signal processing board 23 and sent to the controller 22.
[0060]
(5) The controller 22 outputs an alarm signal to the prober 24 if a sensor signal is not input while the synchronization signal is being input [the marking time 34 ms in FIG. 11D] [FIG. 11E]. [FIG. 11 (f)]. When the prober 24 receives the alarm signal, the prober 24 regards the malfunction of the marking device, outputs an alarm, and automatically stops.
[0061]
The controller 22 does not output an alarm signal if a sensor signal is input [FIG. 11B] while the synchronization signal is being input [marking time 34 ms in FIG. 11A] [FIG. 11C]. . The prober 24 regards the operation as normal and starts the marking process for the next chip.
[0062]
As described above, according to the second embodiment, in the event that a malfunction occurs in the marking device, the malfunction is detected and fed back to the device to minimize the above-described quality defects. be able to.
[0063]
It should be noted that the present invention is not limited to the above embodiments, and various modifications are possible based on the spirit of the present invention, and these are not excluded from the scope of the present invention.
[0064]
【The invention's effect】
As described above, according to the present invention, the following effects can be obtained.
[0065]
(A) The rotation of the plunger can be restricted, the vertical movement can be smooth, and the life can be extended.
[0066]
(B) Since the screw portion is not used for coupling the ink holder and the ink buffer, maintenance is easy and the life is short, and a special tool (plier or the like) for fixing is not required.
[0067]
(C) It is possible to reliably detect the malfunction of the plunger at the time of the malfunction, and to minimize the quality failure.
[Brief description of the drawings]
FIG. 1 is an external view of a marking device in semiconductor manufacturing according to a first embodiment of the present invention.
FIG. 2 is a configuration diagram of a plunger as a part of a marking device in semiconductor manufacturing according to the first embodiment of the present invention.
FIG. 3 is a configuration diagram of an electromagnetic coil holder as a part of a marking device in semiconductor manufacturing according to the first embodiment of the present invention.
FIG. 4 is a configuration diagram of a ball bearing holder as a part of a marking device in semiconductor manufacturing according to the first embodiment of the present invention.
FIG. 5 is a configuration diagram of a sensor flag as a part of a marking device in semiconductor manufacturing according to the first embodiment of the present invention.
FIG. 6 is a configuration diagram of an electromagnetic coil base as a part of a marking device in semiconductor manufacturing according to the first embodiment of the present invention.
FIG. 7 is a configuration diagram of an ink holder as a part of a marking device in semiconductor manufacturing according to the first embodiment of the present invention.
FIG. 8 is a configuration diagram of a reinforcing plate as a part of a marking device in semiconductor manufacturing according to the first embodiment of the present invention.
FIG. 9 is a configuration diagram of an ink buffer as a part of a marking device in semiconductor manufacturing according to the first embodiment of the present invention.
FIG. 10 is a system configuration diagram of a marking device in semiconductor manufacturing according to a second embodiment of the present invention.
FIG. 11 is an operation time flowchart of a system of a marking device in semiconductor manufacturing according to a second embodiment of the present invention.
FIG. 12 is an external view of a marking device in a conventional semiconductor manufacturing.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Bearing holder 1A Bearing holder main body 1B Plunger holding hole 1C Ball bearing allowable groove 1D Proximity sensor mounting hole 1E Fixed part 2 Electromagnetic coil holder 2A Electromagnetic coil holder main body 2B Plunger allowable hole 3 Ink holder 3A Ink holder main body 3B Holding hole 3C Fixing hole 3E Female screw hole 4 Reinforcement plate 4A Reinforcement plate body 4B, 4C, 4D, 4E Mounting hole 5 Ink core 6 Sensor flag 6A Sensor flag body 6B Plunger mounting hole 6C Plunger tightening hole 6D Flag portion 6E Groove 7 Plunger 7A Flange 7B Positioning pin engagement groove 7C Lower cylinder 7D Lower tip 7E Upper cylinder 8 Ink buffer 8A Ink buffer main body 8B Upper bush 8C Lower bush 8D Hole 9 Ink guide 10 Proximity sensor 11 Electromagnetic coil 11A Electromagnetic coil base body 11B Pedestal 11C Upper protruding portion 11D Lower protruding portion 11E Lower engaging portion 11F of plunger Through hole 12 Ball plunger 13 Positioning pin 14 Electromagnetic coil (solenoid)
15 Ball bearing 21 Sensor amplifier 22 Controller 23 Synchronous signal processing board 24 Prober

Claims (2)

(A) a plunger;
(B) an electromagnetic coil holder to which a cylindrical positioning pin for restricting rotation of the plunger is fixed;
(C) an ink marking apparatus for a marking prober in semiconductor manufacturing, comprising: a bearing holder for guiding the vertical movement of the plunger. (A) a plunger;
(B) an electromagnetic coil holder to which a cylindrical positioning pin for restricting rotation of the plunger is fixed;
(C) a bearing holder for guiding the vertical movement of the plunger;
(D) An ink marking device for a marking prober in semiconductor manufacturing, comprising a proximity sensor that operates according to the vertical movement of the plunger.

Images