JP2004079281A - Ultraviolet light generator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To control a generation amount of ultraviolet light without complicating operation. <P>SOLUTION: An ultraviolet light generator is provided with a discharge tube 1 to transmit ultraviolet light 5, a paired electrode 2 arranged around the discharge tube 1, and a power source 3 to apply AC voltage or pulse voltage to the paired electrode 2. The generator generates the ultraviolet light by electricity discharged inside the discharge tube 1 by applying the AC voltage or the pulse voltage to the paired electrode 2. The generator is also provided with a control means 6 to control the generation amount of the ultraviolet light by controlling the AC voltage or the pulse voltage applied to the paired electrode 2 by the power source 3. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an ultraviolet ray generating apparatus that generates ultraviolet rays from a mixed gas such as a rare gas such as xenon and oxygen and the like by creeping discharge, and more particularly to an ultraviolet ray generating apparatus that can control the amount of ultraviolet rays.
[0002]
[Prior art]
Ultraviolet rays are widely used for sterilizing, disinfecting, and decolorizing water and sewage, deodorizing and decolorizing industrial water, bleaching pulp, and sterilizing medical equipment.
[0003]
There are a mercury lamp and an excimer lamp as an ultraviolet ray generating device for generating such an ultraviolet ray. Ultraviolet rays having wavelengths of 254 nm and 185 nm are generated from the low-pressure mercury lamp. On the other hand, when xenon, krypton, and argon are used as the cold air medium, the excimer lamp emits ultraviolet rays of 172 nm, 146 nm, and 126 nm, respectively.
[0004]
As shown in FIG. 13, this type of ultraviolet ray generating device has an electrode 2 disposed around a discharge tube 1 made of a dielectric container that can transmit ultraviolet rays 5, 2 is provided with a power supply 3 for applying an AC voltage or a pulse voltage. Then, by applying an AC voltage or a pulse voltage to the electrode 2 by the power source 3 to cause a discharge inside the discharge tube 1, the ultraviolet rays 5 are generated.
[0005]
[Problems to be solved by the invention]
However, such a conventional ultraviolet ray generator has the following problems.
[0006]
That is, it is difficult to freely control the amount of generated ultraviolet light in the conventional ultraviolet light generating device. For this reason, in the case of realizing the amount of generated ultraviolet rays according to the application, it is necessary to adjust the amount by appropriately using a filter or the like, and there is a problem that the operation becomes complicated.
[0007]
In addition, since the applied voltage when starting the discharge and the applied voltage for maintaining the discharge are different voltages, it is difficult to start the discharge and maintain the discharge under the same conditions. Therefore, there is a problem that the applied voltage must be changed between the start of the discharge and the maintenance of the discharge, resulting in a complicated operation.
[0008]
In this case, as a result of changing the applied voltage by reducing the applied voltage at the time of maintaining the discharge, it becomes difficult to maintain the discharge, and in some cases, the discharge may not be maintained. When the discharge cannot be maintained in this way, it is necessary to reapply a voltage for starting the discharge, which also complicates the operation.
[0009]
The present invention has been made in view of such circumstances, and it is an object of the present invention to provide an ultraviolet ray generator capable of controlling the amount of ultraviolet ray generation without complicating operation.
[0010]
[Means for Solving the Problems]
In order to achieve the above object, the present invention takes the following measures.
[0011]
That is, the invention according to claim 1 includes a dielectric container capable of transmitting ultraviolet light, an electrode disposed around the dielectric container, and a power supply for applying an AC voltage or a pulse voltage to the electrode. An ultraviolet generator that generates an ultraviolet ray by causing a discharge inside the dielectric container by applying an AC voltage or a pulse voltage to the dielectric container, by controlling an AC voltage or a pulse voltage applied to the electrode by a power supply. And voltage control means for controlling the amount of generated ultraviolet light.
[0012]
The invention according to claim 2 includes a dielectric container capable of transmitting ultraviolet light, an electrode disposed around the dielectric container, and a power supply for applying an AC voltage or a pulse voltage to the electrode. An ultraviolet ray generating device that generates an ultraviolet ray by applying a voltage or a pulse voltage to generate a discharge inside a dielectric container, and an AC waveform of an AC voltage applied to an electrode by a power supply or applied to an electrode by a power supply A waveform control means is provided for controlling the amount of generated ultraviolet light by controlling the pulse waveform of the applied pulse voltage.
[0013]
The invention according to claim 3 includes a dielectric container that can transmit ultraviolet light, an electrode disposed around the dielectric container, and a power supply that applies an AC voltage or a pulse voltage to the electrode. An ultraviolet ray generating device that generates an ultraviolet ray by applying a voltage or a pulse voltage to generate a discharge inside a dielectric container, and an AC frequency of an AC voltage applied to an electrode by a power supply or an AC voltage applied to an electrode by a power supply Frequency control means for controlling the amount of generated ultraviolet light by controlling the pulse repetition frequency of the applied pulse voltage.
[0014]
According to a fourth aspect of the present invention, there is provided a dielectric container capable of transmitting ultraviolet light, an electrode disposed around the dielectric container, and a power supply for applying an AC voltage or a pulse voltage to the electrode. An ultraviolet ray generating device that generates an ultraviolet ray by causing a discharge inside a dielectric container by applying a voltage or a pulse voltage, by subjecting an AC voltage or a pulse voltage applied to an electrode by a power supply to a frequency modulation process. Frequency modulation means for controlling the amount of generated ultraviolet light.
[0015]
According to a fifth aspect of the present invention, in the ultraviolet generating apparatus according to the fourth aspect of the present invention, the frequency modulating means performs frequency modulation processing on the AC voltage or the pulse voltage so as to operate with a continuous wave for a predetermined time. .
[0016]
According to a sixth aspect of the present invention, in the ultraviolet ray generating apparatus according to any one of the first to fifth aspects, a discharge start power supply for applying a discharge start pulse voltage for starting discharge to the electrode is added. Become.
[0017]
According to a seventh aspect of the present invention, in the ultraviolet ray generator according to the sixth aspect of the present invention, the discharge start power supply applies a discharge start pulse voltage to the electrodes at predetermined time intervals.
[0018]
The invention according to claim 8 includes a dielectric container capable of transmitting ultraviolet light, an electrode disposed around the dielectric container, and a power supply for applying an AC voltage or a pulse voltage to the electrode. An ultraviolet ray generating device that generates an ultraviolet ray by causing a discharge inside a dielectric container by applying a voltage or a pulse voltage, and further includes a discharge determination unit that determines a discharge state when a discharge is detected. Become.
[0019]
According to a ninth aspect of the present invention, there is provided a dielectric container capable of transmitting ultraviolet light, an electrode disposed around the dielectric container, and a power supply for applying an AC voltage or a pulse voltage to the electrode. An ultraviolet ray generating device that generates an ultraviolet ray by applying a voltage or a pulse voltage to generate a discharge inside the dielectric container. When the discharge is detected, it is determined that the inside of the dielectric container is in a discharge state, and a detection signal is generated. And a voltage control means for controlling an AC voltage or a pulse voltage applied by a power supply based on a detection signal output from the discharge determination means, and controlling an amount of generated ultraviolet rays. .
[0020]
According to a tenth aspect of the present invention, in the ultraviolet ray generating device according to the eighth or ninth aspect, an ultraviolet ray detecting sensor for judging a discharge state by detecting generated ultraviolet rays is used as the discharge judging means. .
[0021]
According to an eleventh aspect of the present invention, in the ultraviolet ray generating apparatus according to the eighth or ninth aspect, the visible light sensor determines the discharge state by detecting visible light generated together with the generated ultraviolet light as the discharge determining means. Is used.
[0022]
In a twelfth aspect of the present invention, there is provided an ultraviolet ray generator for generating an ultraviolet ray by causing a discharge inside the discharge tube by supplying electric power to the discharge tube, and a power measuring means for measuring the power supplied to the discharge tube; A discharge determination unit configured to determine that the inside of the discharge tube is in a discharge state based on the power measured by the measurement unit.
[0023]
The invention according to claim 13 is an ultraviolet ray generator that supplies electric power or current from a power supply to the discharge tube to cause a discharge inside the discharge tube to generate ultraviolet light, wherein the electric power or current supplied by the power supply is measured. / Current measuring means, and discharge determining means for determining a discharging state based on the power or current measured by the power / current measuring means.
[0024]
According to a fourteenth aspect of the present invention, in the ultraviolet ray generating apparatus according to any one of the eighth to thirteenth aspects, a discharge starting pulse voltage for starting a discharge in the dielectric container is applied to the electrode. A power supply and re-discharge means for applying a discharge start pulse voltage to the electrode when the discharge determination means does not determine that the battery is in a discharge state are added to the discharge start power supply.
[0025]
According to a fifteenth aspect of the present invention, in the ultraviolet generating apparatus according to the fourteenth aspect, even when a discharge start pulse voltage is applied from a discharge start power supply to the electrode by the re-discharge means, the discharge state is determined by the discharge determination means. If it is not determined that the above-mentioned condition is satisfied, an application stopping means for stopping the application of the discharge start pulse voltage to the electrodes is added to the discharge start power supply.
[0026]
According to a sixteenth aspect of the present invention, in the ultraviolet generating apparatus of the fourteenth aspect, even if a pulse voltage for starting discharge is applied from the power source for starting discharge to the electrode by the re-discharge means, the discharge state is determined by the discharge determination means. If it is not determined that the discharge state is satisfied, the re-discharge means determines that the discharge state is in the discharge state by the discharge determination means even if the discharge start voltage is again applied to the electrode from the discharge power supply a predetermined number of times. If not, an application stopping means for stopping the application of the discharge start pulse voltage to the electrodes is added to the discharge start power supply.
[0027]
Therefore, in the ultraviolet ray generating apparatus according to the first to sixteenth aspects of the present invention, the amount of ultraviolet rays can be controlled by taking the above measures. In particular, in the ultraviolet ray generating device according to the invention of claims 15 and 16, by stopping the re-discharge, the dielectric container can be protected.
[0028]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0029]
(First Embodiment)
A first embodiment of the present invention will be described with reference to FIGS.
[0030]
FIG. 1 is a configuration conceptual diagram illustrating an example of the ultraviolet ray generating device according to the first embodiment.
[0031]
That is, the ultraviolet ray generating apparatus according to the present embodiment includes a discharge tube 1, an electrode pair 2, a power supply 3, a power supply line 4, a control device 6, a discharge detection sensor 7, and a power measurement monitor 8. Do it.
[0032]
The discharge tube 1 is formed of a dielectric container that can transmit ultraviolet light. The electrode pairs 2 are arranged around the discharge tube 1 so as to face each other. The electrode pair 2 arranged in this manner supplies high-frequency power to the discharge tube 1 by a capacitive coupling method when an AC voltage or a pulse voltage is applied from a power supply 3 via a power supply line 4. The supplied power is measured by the power measurement monitor 8, and the measured value is output to the control device 6.
[0033]
By supplying the high-frequency power to the discharge tube 1 in this manner, a discharge is generated inside the discharge tube 1 and the ultraviolet rays 5 are generated. The discharge detection sensor 7 measures the amount of the generated ultraviolet light 5 and outputs the measured value to the control device 6. As the discharge detection sensor 7, for example, a commonly used ultraviolet ray detection sensor or visible light sensor is used. When the ultraviolet ray 5 is generated from the discharge tube 1, visible light is also generated at the same time. When a visible light sensor is used as the discharge detection sensor 7, the visible light generated simultaneously with the ultraviolet light 5 is detected.
[0034]
Note that, instead of the discharge detection sensor 7, the discharge state of the discharge tube 1 may be detected based on the measurement value of the power measurement monitor 8. In this case, the correlation between the measured value of the power measurement monitor 8 and the discharge start power in the discharge tube 1 is grasped in advance, and if the measured value exceeds the threshold power, the discharge is generated. Is determined.
[0035]
The control device 6 controls the AC voltage or the pulse voltage applied by the power supply 3 to the electrode pair 2 based on the measurement value output from the discharge detection sensor 7 and the measurement value measured by the power measurement monitor 8, and discharges. By controlling the input, the generation amount of the ultraviolet rays 5 is controlled.
[0036]
FIG. 2 is a correlation diagram showing a relationship between a peak value (V) of a voltage applied to the electrode pair 2 and a discharge input (W) which is power input to the discharge tube 1. As shown in FIG. 2, the discharge starts when the voltage peak value exceeds a certain threshold voltage T, and thereafter, the discharge input also increases as the voltage peak value increases. In proportion to the increase of the discharge input, the generation amount of the ultraviolet rays 5 also increases.
[0037]
Therefore, in the ultraviolet ray generating apparatus according to the present embodiment, the control unit 6 controls the power supply 3, controls the applied amount of the AC voltage or the pulse voltage, and controls the discharge input, thereby controlling the generated amount of the ultraviolet light 5. I do.
[0038]
Next, the operation of the ultraviolet generator according to the present embodiment configured as described above will be described.
[0039]
That is, in the ultraviolet ray generator according to the present embodiment, as shown in FIG. 2, the control device 6 uses the power supply 3 by utilizing the fact that the generation amount of the ultraviolet ray 5 also increases as the voltage peak value increases. The discharge input is controlled by controlling the AC voltage or the pulse voltage applied by. As a result, the generation amount of the ultraviolet rays 5 is controlled.
[0040]
In addition, the discharge input amount and the ultraviolet ray generation amount are measured by the power measurement monitor 8 and the discharge detection sensor 7, and the measurement results are output to the control device 6. Thus, the control device 6 can control the discharge input while monitoring the discharge input amount and the amount of generated ultraviolet light, so that the desired amount of the ultraviolet light 5 can be easily generated.
[0041]
As described above, in the ultraviolet ray generating apparatus according to the present embodiment, the control device 6 controls the AC voltage or the pulse voltage applied by the power supply 3 by the above-described operation, so that the amount of the ultraviolet ray 5 generated Can be controlled. As a result, it is possible to generate a desired amount of ultraviolet light 5 depending on the application.
[0042]
In addition, as shown in FIG. 1, instead of an ultraviolet ray generator that uses a face-to-face electrode pair 2 and supplies high-frequency power to the discharge tube 1 in a capacitive coupling system, as shown in FIG. Even when the high-frequency power is supplied to the discharge tube 1 by the inductive coupling method using the pattern electrode 10, the same operation and effect can be obtained.
[0043]
(Second embodiment)
A second embodiment of the present invention will be described with reference to FIGS.
[0044]
4 to 6 are diagrams showing examples of a waveform pattern of an AC voltage supplied from the power supply 3. FIG. 4 shows a case of a sine wave, FIG. 5 shows a case of a triangular wave, and FIG. Are respectively shown.
[0045]
FIG. 7 is a diagram showing the relationship between the rise of the voltage supplied to the discharge tube 1 and the amount of generated ultraviolet rays.
[0046]
FIG. 8 is a diagram showing the relationship between the voltage supplied to the discharge tube 1 and the amount of generated ultraviolet rays when the frequency of the applied AC voltage is changed. This is J. Phys. D: Appl. Phys. 5, P562-P568 (1972), and the input energy P (Wm ^-1 ) Is a parameter proportional to the voltage, and η (%) on the vertical axis is a parameter proportional to the amount of generated ultraviolet light. FIG. 8 shows that as the frequency increases, the ultraviolet ray generation efficiency η increases.
[0047]
The ultraviolet ray generator according to the second embodiment is a modification of the ultraviolet ray generator according to the first embodiment, and the configuration is the same as the configuration shown in FIG. 1 or FIG. Only the control method performed by the device 6 is different. That is, in the ultraviolet ray generator according to the present embodiment, the control device 6 controls the amount of ultraviolet ray generation by changing the rising or the frequency in the waveform pattern of the AC voltage or the pulse voltage applied by the power supply 3. I have to.
[0048]
That is, the power supply 3 applies a voltage having a waveform pattern as shown in FIGS. 4, 5, and 6 to the electrode pair 2 or the coil-type electrode 11 to cause a discharge inside the discharge tube 1 to generate an excimer. The ultraviolet rays 5 are generated by generating a state.
[0049]
The control device 6 controls the power supply 3 based on the measurement value output from the discharge detection sensor 7 and the measurement value output from the power measurement monitor 8, and generates a waveform as shown in FIG. 4, FIG. 5, and FIG. Rise in pattern (ΔV / t _a ) Or frequency f _a And a voltage is applied to the electrode pair 2 or the coil-type electrode 11.
[0050]
Voltage rise (ΔV / t _a ), The amount of ultraviolet radiation also increases in accordance with the characteristics shown in FIG. Also, the frequency f _a As shown in FIG. 8, the ultraviolet ray generation efficiency η increases, so that the amount of generated ultraviolet rays increases.
[0051]
Therefore, in the ultraviolet ray generating apparatus according to the present embodiment, the control device 6 controls the power supply 3 and the voltage rise (ΔV / t) _a ) And frequency f _a By controlling such a waveform, the generation amount of the ultraviolet rays 5 is controlled.
[0052]
Next, the operation of the ultraviolet generator according to the present embodiment configured as described above will be described.
[0053]
That is, in the ultraviolet ray generating device according to the present embodiment, as shown in FIGS. 7 and 8, the amount of generation of ultraviolet rays 5 also increases with increasing voltage rise and increasing voltage frequency. Utilizing this, the discharge input is controlled by controlling the waveform of the AC voltage or the pulse voltage applied by the power supply 3 by the control device 6. As a result, the generation amount of the ultraviolet rays 5 is controlled.
[0054]
The discharge input amount and the ultraviolet ray generation amount are measured by the power measurement monitor 8 and the discharge detection sensor 7, and the measured values are output to the control device 6. As a result, the control device 6 can control the waveform while monitoring the discharge input amount and the ultraviolet ray generation amount, so that the desired amount of the ultraviolet ray 5 can be easily generated.
[0055]
As described above, in the ultraviolet ray generating device according to the present embodiment, the control device 6 controls the waveform of the AC voltage or the pulse voltage applied by the power supply 3 by the above-described operation, thereby The amount of generation can be controlled. As a result, it is possible to generate a desired amount of ultraviolet light 5 depending on the application.
[0056]
(Third embodiment)
A third embodiment of the present invention will be described with reference to FIG.
[0057]
The ultraviolet ray generator according to the third embodiment is a modification of the ultraviolet ray generator according to the first embodiment, and the configuration is the same as the configuration shown in FIG. 1 or FIG. Only the control method performed by the device 6 is different. That is, in the ultraviolet ray generator according to the present embodiment, the control device 6 controls the amount of ultraviolet ray generation by frequency-modulating the AC voltage or the pulse voltage applied by the power supply 3.
[0058]
The frequency modulation process performed by the control device 6 will be described with reference to FIG.
[0059]
FIG. 9A is a diagram illustrating a basic waveform of an AC voltage applied by the power supply 3 to the electrode pair 2 or the coil-type electrode 10. The frequency of this basic waveform is f _m It is.
[0060]
The control device 6 controls the frequency f of the AC voltage as shown in FIG. _m FIG. 9B shows a frequency f _m Modulation frequency f at a frequency of 1/100 to 1/10000 of _k To perform a frequency modulation process. As a result, as shown in FIG. 9C, the modulation frequency f _k Duty width ratio (d ₁ / D ₂ ) Is controlled continuously to control the discharge input, thereby controlling the generation amount of the ultraviolet rays 5.
[0061]
Note that such frequency modulation processing can be performed not only on an AC voltage having a waveform pattern as shown in FIG. 9A but also on a pulse voltage (not shown).
[0062]
Next, the operation of the ultraviolet generator according to the present embodiment configured as described above will be described.
[0063]
That is, in the ultraviolet generating device according to the present embodiment, as shown in FIG. 9, an AC voltage frequency-modulated by the control device 6 is supplied from the power supply 3 to the electrode pair 2 or the coil-type electrode 10. The generation amount of the ultraviolet rays 5 generated from the discharge tube 1 is determined by the duty width ratio (d as shown in FIG. 9C). ₁ / D ₂ ) Is controlled continuously.
[0064]
The discharge input amount and the ultraviolet ray generation amount are measured by the power measurement monitor 8 and the discharge detection sensor 7, and the measured values are output to the control device 6. As a result, the controller 6 monitors the duty input width ratio (d ₁ / D ₂ ) Can be controlled continuously, so that a desired amount of ultraviolet rays 5 can be easily generated.
[0065]
As described above, in the ultraviolet ray generator according to the present embodiment, the control device 6 performs the frequency modulation process on the AC voltage or the pulse voltage applied by the power supply 3 by the above operation, and Ratio (d ₁ / D ₂ ) Can be controlled to control the amount of the ultraviolet rays 5 to be generated. As a result, it is possible to generate a desired amount of ultraviolet light 5 depending on the application.
[0066]
(Fourth embodiment)
A fourth embodiment of the present invention will be described with reference to FIGS.
[0067]
FIG. 10 is a conceptual diagram showing an example of the configuration of an ultraviolet ray generating apparatus according to the fourth embodiment. The same parts as those in FIG. 1 are denoted by the same reference numerals, and the description thereof will be omitted. State.
[0068]
That is, the ultraviolet ray generator according to the present embodiment has a configuration in which a power source 11 for starting discharge is added to the ultraviolet ray generator having the configuration shown in FIG. The power supply 11 for starting discharge supplies a pulse voltage for starting discharge to the electrode pair 2 under the control of the control device 6.
[0069]
The controller 6 grasps in advance the voltage at which discharge is started in the discharge tube 1, and when discharging the discharge tube 1, uses this voltage as a discharge start pulse voltage from the discharge start power supply 11 to the electrode pair 2. To be supplied. As a result, when discharge starts and ultraviolet rays are emitted from the discharge tube 1, the discharge detection sensor 7 measures the amount of the generated ultraviolet rays 5 and outputs the measured value to the control device 6. Thereby, the control device 6 grasps the discharge state.
[0070]
Further, the control device 6 may always discharge the discharge tube 1 by supplying a discharge start pulse voltage from the discharge start power supply 11 to the electrode pair 2 at regular intervals. Alternatively, when it is determined based on the measurement value from the discharge detection sensor 7 that the discharge tube 1 is not discharging, the discharge start power supply 11 supplies the electrode pair 2 with the discharge start pulse voltage. You may do it. In this case, if the discharge tube 1 does not discharge even if the discharge start pulse voltage is supplied a predetermined number of times or more, the discharge tube 1 may be out of order. Therefore, the supply of the discharge start pulse voltage to the discharge start power supply 11 is stopped. At the same time, a failure signal may be issued from the control device 6 to notify the operator of the abnormality.
[0071]
Next, the operation of the ultraviolet generator according to the present embodiment configured as described above will be described.
[0072]
That is, in the ultraviolet ray generator according to the present embodiment, the discharge start pulse voltage specified by the control device 6 is supplied from the discharge start power supply 11 to the electrode pair 2 singly or continuously at a constant interval. Is done. This discharge start pulse voltage is a voltage that is grasped in advance. As a result, the discharge of the discharge tube 1 starts, and ultraviolet rays are emitted from the discharge tube 1. Then, the amount of the generated ultraviolet rays is measured by the discharge detection sensor 7, and the measured value is output to the control device 6, whereby the control device 6 grasps the start of the discharge.
[0073]
When a discharge start pulse voltage is continuously supplied from the discharge start power supply 11 to the electrode pair 2 at a constant interval, ultraviolet rays are always emitted from the discharge tube 1. The amount of generated ultraviolet rays is also measured by the discharge detection sensor 7, and the measured value is output to the control device 6, whereby the control device 6 grasps the discharge state and the amount of generated ultraviolet light.
[0074]
When the control device 6 determines that the discharge tube 1 is not discharging based on the measurement value from the discharge detection sensor 7, the discharge start power supply 11 sends a discharge start pulse to the electrode pair 2. A voltage may be supplied. In this case, if the discharge tube 1 does not start discharging even if the discharge start pulse voltage is supplied a predetermined number of times or more, the control device 6 stops supplying the discharge start pulse voltage. In this case, since there is a possibility that the discharge tube 1 has failed, a failure signal can be issued to notify the operator of the abnormality.
[0075]
As described above, in the ultraviolet ray generator according to the present embodiment, by the above-described operation, the discharge start pulse voltage is applied to the electrode pair 2 from the discharge start power supply 11 only once or at a constant interval. By continuously supplying, discharge of the discharge tube 1 can be started.
[0076]
When the discharge has not been started, it is possible to grasp the fact and to cause the discharge start power supply 11 to supply the discharge start pulse voltage to the electrode pair 2 again. In this case, if the discharge tube 1 does not start discharging even if the discharge start pulse voltage is supplied a predetermined number of times or more, the discharge tube 1 may be faulty. The supply of the start pulse voltage can be stopped. Further, in this case, a failure signal can be issued to notify the operator of the abnormality.
[0077]
In addition, as shown in FIG. 10, an induction coil type coil as shown in FIG. 11 is used instead of an ultraviolet ray generator that uses a face-to-face type electrode pair 2 and supplies a high-frequency power to the discharge tube 1 by a capacitive coupling method. Even when the high-frequency power is supplied to the discharge tube 1 by the inductive coupling method using the pattern electrode 10, the same operation and effect can be obtained.
[0078]
(Fifth embodiment)
A fifth embodiment of the present invention will be described with reference to FIGS.
[0079]
The ultraviolet ray generator according to the fifth embodiment is a modification of the ultraviolet ray generator according to the fourth embodiment, and the configuration is the same as the configuration shown in FIG. 10 or FIG. Only the control method performed by the device 6 is different. That is, in the ultraviolet ray generating device according to the present embodiment, the control device 6 controls the amount of ultraviolet ray generation by performing frequency modulation processing on the discharge start voltage applied by the discharge start power supply 11.
[0080]
The frequency modulation process performed by the control device 6 will be described with reference to FIG.
[0081]
FIG. 9A is a diagram illustrating a basic waveform of a discharge start voltage applied to the electrode pair 2 or the coil electrode 10 by the discharge start power supply 11. The frequency of this basic waveform is f _m It is.
[0082]
The control device 6 controls the frequency f of the AC voltage as shown in FIG. _m FIG. 9B shows a frequency f _m Modulation frequency f at a frequency of 1/100 to 1/10000 of _k To perform a frequency modulation process. As a result, as shown in FIG. 9C, the modulation frequency f _k Duty width ratio (d ₁ / D ₂ ) Is controlled continuously to control the discharge input, thereby controlling the generation amount of the ultraviolet rays 5.
[0083]
Further, such a modulation frequency f _k The discharge start voltage converted into a waveform having _m Modulation may be performed so as to be continuously repeated every time.
[0084]
As described above, by modulating the discharge start voltage and then supplying the voltage from the discharge start power supply 11 to the electrode pair 2 or the coil-type electrode 10, the same operation and effect as in the fourth embodiment can be obtained. Can be.
[0085]
Although the preferred embodiments of the present invention have been described with reference to the accompanying drawings, the present invention is not limited to such configurations. Within the scope of the invented technical concept of the claims, those skilled in the art will be able to conceive various changes and modifications, and those changes and modifications will be described in the technical scope of the present invention. It is understood that it belongs to.
[0086]
【The invention's effect】
As described above, according to the present invention, it is possible to realize an ultraviolet ray generator capable of controlling the amount of generated ultraviolet rays without complicating operation.
[Brief description of the drawings]
FIG. 1 is a conceptual diagram illustrating a configuration of an example of an ultraviolet ray generator according to a first embodiment.
FIG. 2 is a correlation diagram showing a relationship between a peak value of a voltage applied to an electrode pair and a discharge input which is power input to a discharge tube.
FIG. 3 is a conceptual diagram showing a configuration of a modified example of the ultraviolet ray generator according to the first embodiment.
FIG. 4 is a diagram showing an example of a waveform pattern of an AC voltage supplied from a power supply (in the case of a sine wave).
FIG. 5 is a diagram showing an example of a waveform pattern of an AC voltage supplied from a power supply (in the case of a triangular wave).
FIG. 6 is a diagram showing an example of a waveform pattern of an AC voltage supplied from a power supply (in the case of a substantially sine wave).
FIG. 7 is a diagram showing a relationship between a rise of a voltage supplied to a discharge tube and an amount of generated ultraviolet light.
FIG. 8 is a diagram showing the relationship between the amount of ultraviolet light generated and the voltage supplied to the discharge tube when the frequency of the applied AC voltage is changed.
FIG. 9 shows a basic waveform of an AC voltage applied by a power supply, a waveform of a modulation wave for modulating the basic waveform, and a waveform after the modulation of the basic waveform.
FIG. 10 is a conceptual configuration diagram showing an example of an ultraviolet ray generator according to a fourth embodiment.
FIG. 11 is a conceptual diagram showing a configuration of a modification of the ultraviolet ray generator according to the fourth embodiment.
FIG. 12 is a waveform after modulation of an AC voltage applied by a power supply for starting discharge.
FIG. 13 is a conceptual diagram of a configuration of a conventional ultraviolet ray generating apparatus.
[Explanation of symbols]
1 .... discharge tube
2 ... Electrode pair
3. Power supply
4: Feeding line
5 ... UV light
6 ... Control device
7 ... Discharge detection sensor
8 ... Power measurement monitor
10 ... Coil type electrode
11 Power supply for starting discharge

Claims (16)

A dielectric container capable of transmitting ultraviolet light,
Electrodes arranged around the dielectric container,
A power supply for applying an AC voltage or a pulse voltage to the electrode,
An ultraviolet ray generator that generates an ultraviolet ray by causing a discharge inside the dielectric container by applying an AC voltage or a pulse voltage to the electrode by the power supply,
An ultraviolet ray generator comprising a voltage control means for controlling an amount of the generated ultraviolet ray by controlling an AC voltage or a pulse voltage applied to the electrode by the power supply. A dielectric container capable of transmitting ultraviolet light,
Electrodes arranged around the dielectric container,
A power supply for applying an AC voltage or a pulse voltage to the electrode,
An ultraviolet ray generator that generates an ultraviolet ray by causing a discharge inside the dielectric container by applying an AC voltage or a pulse voltage to the electrode by the power supply,
By controlling an AC waveform of an AC voltage applied to the electrode by the power supply or a pulse waveform of a pulse voltage applied to the electrode by the power supply, a waveform control means for controlling the generation amount of the generated ultraviolet light is provided. UV generator equipped. A dielectric container capable of transmitting ultraviolet light,
Electrodes arranged around the dielectric container,
A power supply for applying an AC voltage or a pulse voltage to the electrode,
An ultraviolet ray generator that generates an ultraviolet ray by causing a discharge inside the dielectric container by applying an AC voltage or a pulse voltage to the electrode by the power supply,
Frequency control for controlling the amount of generated ultraviolet light by controlling the AC frequency of an AC voltage applied to the electrode by the power supply or the pulse repetition frequency of a pulse voltage applied to the electrode by the power supply UV generator comprising means. A dielectric container capable of transmitting ultraviolet light,
Electrodes arranged around the dielectric container,
A power supply for applying an AC voltage or a pulse voltage to the electrode,
An ultraviolet ray generator that generates an ultraviolet ray by causing a discharge inside the dielectric container by applying an AC voltage or a pulse voltage to the electrode by the power supply,
An ultraviolet ray generator comprising frequency modulation means for controlling an amount of the generated ultraviolet ray by frequency-modulating an AC voltage or a pulse voltage applied to the electrode by the power supply. The ultraviolet ray generator according to claim 4,
An ultraviolet ray generator, wherein the frequency modulating means performs a frequency modulation process on the AC voltage or the pulse voltage so as to operate in a continuous wave for a predetermined time. The ultraviolet ray generator according to any one of claims 1 to 5,
An ultraviolet ray generator to which a discharge start power supply for applying a discharge start pulse voltage for starting the discharge to the electrode is added. The ultraviolet ray generator according to claim 6,
An ultraviolet ray generator, wherein the discharge start power supply applies the discharge start pulse voltage to the electrodes at predetermined time intervals. A dielectric container capable of transmitting ultraviolet light,
Electrodes arranged around the dielectric container,
A power supply for applying an AC voltage or a pulse voltage to the electrode,
An ultraviolet ray generator that generates an ultraviolet ray by causing a discharge inside the dielectric container by applying an AC voltage or a pulse voltage to the electrode by the power supply,
An ultraviolet ray generating apparatus to which a discharge judging means for judging a discharge state when the discharge is detected is added. A dielectric container capable of transmitting ultraviolet light,
Electrodes arranged around the dielectric container,
A power supply for applying an AC voltage or a pulse voltage to the electrode,
An ultraviolet ray generator that generates an ultraviolet ray by causing a discharge inside the dielectric container by applying an AC voltage or a pulse voltage to the electrode by the power supply,
When the discharge is detected, a discharge determination unit that determines that the inside of the dielectric container is in a discharge state and outputs a detection signal,
An ultraviolet ray generating apparatus further comprising voltage control means for controlling an AC voltage or a pulse voltage applied by the power supply based on a detection signal output from the discharge judging means to control an amount of generated ultraviolet rays. The ultraviolet ray generating device according to claim 8 or 9, wherein an ultraviolet ray detection sensor for judging a discharge state by detecting the generated ultraviolet ray is used as the discharge judging means. The ultraviolet generator according to claim 8 or 9, wherein a visible light sensor that determines a discharge state by detecting visible light generated together with the generated ultraviolet light is used as the discharge determination unit. In an ultraviolet ray generating device that generates an ultraviolet ray by causing a discharge inside the discharge tube by supplying power to the discharge tube,
Power measuring means for measuring the power supplied to the discharge tube,
An ultraviolet ray generator comprising: a discharge determination unit that determines that the inside of the discharge tube is in a discharge state based on the power measured by the power measurement unit. An ultraviolet ray generating device that generates an ultraviolet ray by causing a discharge inside the discharge tube by supplying power or current from a power supply to the discharge tube,
Power / current measuring means for measuring power or current supplied by the power supply;
An ultraviolet ray generator comprising: a discharge determination unit that determines a discharge state based on the power or current measured by the power / current measurement unit. The ultraviolet ray generator according to any one of claims 8 to 13,
A discharge start power supply for applying a discharge start pulse voltage for starting discharge inside the dielectric container to the electrode,
An ultraviolet ray generating apparatus further comprising re-discharge means for applying the discharge start pulse voltage of the electrode to the discharge start power supply when the discharge judgment means does not judge that the battery is in the discharge state. The ultraviolet ray generator according to claim 14,
Even when a pulse voltage for starting discharge of the electrode is applied from the power source for starting discharge by the re-discharge means, if the discharge determination means does not determine the discharge state, the discharge start power An ultraviolet ray generating apparatus to which an application stopping means for stopping application of the discharge start pulse voltage to the electrode is added to a power supply. The ultraviolet ray generator according to claim 14,
Even if the discharge start pulse voltage is applied to the electrode from the discharge start power supply by the re-discharge unit, if the discharge determination unit does not determine the discharge state, the re-discharge unit When the discharge determination unit does not determine that the battery is in the discharge state even if the discharge determination unit does not determine that the discharge state is in the discharge state even after repeating the predetermined number of times of re-applying the discharge start pulse voltage from the discharge power supply to the electrode. An ultraviolet ray generator, wherein an application stopping means for stopping application of the discharge start pulse voltage to the electrode is added to a power supply for use.

Images