JP2004074251A - Laser beam machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser beam machine equipped with a bend mirror vibration proof mechanism for the purpose of protecting a bend mirror from vibration due to expanding/contracting motion during the motion of bellows. <P>SOLUTION: In the laser beam machine, a laser beam Le emitted from a laser generator is guided to the machining head through bends such as a second and first bend mirrors 1, 1'. The machinen is provided with the bend mirror vibration proof mechanism, in which the bend mirror 1 fixed on a support 3 forming a mirror bracket is surrounded with a box 2 having opening in the incident and reflecting directions that are the X axis and Y axis optical paths, an X axis optical path bellows 4 and a Y axis optical path bellows 5 that protect the optical path of the laser beam Le are connected in the two X and Y axis directions on the open side in the incident and reflecting directions of the box 2, thereby making the optical path a hermetically sealed structure then the box 2 is mounted on the mirror bracket 3 through a vibration proof member 7, so that vibration from the optical axis bellows to the bend mirror 1 is dampened and absorbed. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a laser beam machine, and more particularly to a laser beam machine equipped with a bend mirror vibration isolation mechanism.
[0002]
[Prior art]
The optical axis moving device is provided with a bend mirror for propagating laser light (laser beam), and the optical path is sealed using an optical path bellows or the like for the purpose of protecting an optical component comprising the bend mirror. . Also, in order to absorb the volume fluctuation due to the expansion / contraction operation of the optical path bellows and keep the volume in the optical path bellows constant without being affected by the expansion / contraction operation, the bend mirror part is used for the counter bellows of the same volume (X-axis anti-optical path bellows). It is usually arranged on the X-axis optical path on the opposite side, sandwiched and attached to an X-axis bellows rail serving as a guide, and configured to be able to extend and contract while maintaining an appropriate clearance.
[0003]
[Problems to be solved by the invention]
However, in the above-described conventional example, when the bellows expands and contracts and moves due to the clearance between the bellows rail or the guide bar and the member that engages and slides (for example, the guide ring), the bellows expands and contracts. In addition, vibration due to counter bellows (X-axis anti-optical path bellows) provided on the opposite side of the optical path also occurs. When these generated vibrations are transmitted to the bend mirror and the laser beam is vibrated, there is an inconvenient problem such as a waving phenomenon occurs in the workpiece cutting portion, which causes cutting failure.
[0004]
The present invention has been made paying attention to the above points, and provides a laser processing machine equipped with a bend mirror vibration isolating mechanism for protecting a bend mirror from vibration caused by expansion and contraction when the bellows moves. Objective.
[0005]
[Means for Solving the Problems]
This invention can solve the said subject by providing the following structure.
[0006]
(1) A laser processing machine configured to guide a laser beam emitted from a laser oscillator to a processing head via a bent portion such as a second bend mirror and a first bend mirror, and is fixed to a support that forms a mirror bracket. The installed bend mirror is surrounded by an X-axis optical path and a Y-axis optical path that are open on the reflection and reflection directions, and the optical path of the laser beam is protected in both the X-axis and Y-axis directions on the open side of the reflection and reflection directions. The X-axis optical path bellows / Y-axis optical path bellows are connected to make the optical path hermetically sealed, and the box is attached to the mirror bracket via a vibration isolating member, and the vibration from the optical axis bellows to the bend mirror is buffered. A laser processing machine equipped with an absorbing bend mirror vibration isolator.
[0007]
(2) The laser beam machine according to (1), wherein the vibration isolation member is made of an elastic body such as rubber.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of a laser beam machine equipped with a bend mirror vibration isolating mechanism according to the present invention will be described below.
[0009]
FIG. 1A is a partial perspective explanatory view showing the configuration of a bend mirror and a peripheral portion according to the present invention, FIG. 1B is an AA arrow view, FIG. 1C is a BB arrow view, and FIG. FIG. 3 is a perspective view showing a vibration isolating member.
[0010]
Hereinafter, embodiments will be described with reference to the drawings.
[0011]
First, an outline of the related configuration along the optical path of the laser beam Le will be described.
[0012]
As shown in FIG. 1A, the laser beam Le is incident from the upper side of the drawing, is folded back by the second bend mirror 1, proceeds in the right direction of the drawing, and is incident on the first bend mirror 1 ′. It is folded downward by the first bend mirror 1 'and guided to a machining head (not shown).
[0013]
The bend mirrors 1 and 1 'are moved in conjunction with an unillustrated X-axis carriage and a machining head (not shown) that is moved by a Y-axis carriage, and the X-axis optical path bellows 4 follows the movement. The Y-axis optical path bellows 5 that moves and expands and contracts along the guide ring 10 and moves and expands and contracts along the guide bar 9.
[0014]
A laser beam Le emitted from a laser oscillator (not shown) is guided to a machining head (not shown) via a bent portion such as the second bend mirror 1 and the first bend mirror 1 ′, and forms a mirror bracket. A bend mirror (in this case, a second bend mirror) 1 fixed to the support 3 is surrounded by a box (bend mirror box) 2 having an incident and reflection direction opened as an X-axis optical path and a Y-axis optical path. The X-axis optical path bellows 4 / Y-axis optical path bellows 5 that protect the optical path of the laser beam Le in the X-axis and Y-axis two directions on the incident and reflection direction open side are connected to make the optical path hermetically sealed to prevent the box 2 A bend mirror anti-vibration mechanism K is mounted on the support body (mirror bracket) 3 via a vibration member 7, and vibration from the optical path bellows to the bend mirror (second bend mirror) 1 is provided. Buffer, it is constituted to absorb.
[0015]
The vibration isolating member 7 is formed of an elastic body such as sponge rubber or synthetic rubber. As shown in FIG. 1D, in the embodiment, a hole is formed on the inner side in accordance with the shape of the mounting portion. A square ring-shaped body was obtained.
[0016]
That is, the bend mirror 1 is fixed to the mirror bracket 3, and the bend mirror box 2 is not directly fixed to the mirror bracket 3, but a square ring-shaped sponge rubber or synthetic rubber that matches the shape of the base of the bend mirror box 2 is used. The anti-vibration member 7 (see FIG. 1 (d)) formed of an elastic body is interposed so as to float from the mirror bracket 3 to prevent vibration from the optical path bellows.
[0017]
【The invention's effect】
As described above, according to the present invention, when the bellows is moved, the bend mirror vibration-proof mechanism for protecting the bend mirror from the vibration caused by the expansion and contraction operation is provided, which is an important component of the laser processing machine. The optical system can be protected from vibrations caused by the high-speed movement of the bellows and the high-speed expansion and contraction, and cutting failures such as undulation of the cut surface can be prevented.
[Brief description of the drawings]
1A is a partially transparent explanatory view showing the configuration of a bend mirror and a peripheral portion according to the present invention, FIG. 1B is a view taken along arrows AA, FIG. 1C is a view taken along arrows BB, and FIG. Perspective view [Explanation of symbols]
1 Bend mirror (second bend mirror)
1 'bend mirror (first bend mirror)
2 Box (bend mirror box)
3 Support body (mirror bracket)
4 X-axis optical path bellows 5 Y-axis optical path bellows 6 Counter bellows (X-axis anti-optical path bellows)
7 Anti-vibration material 8 X-axis bellows rail 9 Guide bar 10 Guide ring Le Laser beam K Anti-vibration mechanism

Claims (2)

A laser processing machine having a configuration in which a laser beam emitted from a laser oscillator is guided to a processing head via a bent portion such as a second bend mirror and a first bend mirror, and the bend fixed to a support forming a mirror bracket An X-axis that protects the optical path of the laser beam in two directions, the X-axis and Y-axis on the open side of the incident and reflection directions, respectively, by enclosing the mirror in an X-axis optical path and an Y-axis optical path that are used as the Y-axis optical path. Optical path bellows / Y-axis optical path bellows are connected to make the optical path hermetically sealed, and the box is attached to the mirror bracket via an anti-vibration member to absorb and absorb vibration from the optical axis bellows to the bend mirror. A laser processing machine comprising a bend mirror anti-vibration mechanism. 2. The laser beam machine according to claim 1, wherein the vibration isolating member is made of an elastic body such as rubber.

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