JP2004069657A5 - - Google Patents

Claims (11)

A measurement unit that scans a sample with a probe to measure a physical quantity related to the sample surface, a fine movement mechanism that finely moves the probe, a probe approach mechanism that reduces a distance between the probe and the sample, and a wide field of view Applied to a scanning probe microscope comprising a microscope and a focusing drive mechanism for this wide-field microscope,
With the probe approaching mechanism, the probe and the sample are brought close to each other, the focus of the wide-field microscope is focused on the sample surface, the position information of the driving mechanism at this time is stored, and automatic measurement is performed based on the position information Focusing method of scanning probe microscope, characterized in that focusing of said wide field microscope is performed.   2. The focus of a scanning probe microscope according to claim 1, wherein the drive mechanism section is the probe approach mechanism, a focusing drive mechanism for the wide-field microscope, and a height-direction fine movement section of the fine movement mechanism. Matching method.   2. The focusing method for a scanning probe microscope according to claim 1, wherein the wide-field microscope is arranged coaxially with a support portion of the probe.   4. The method of focusing a scanning probe microscope according to claim 3, wherein the wide field microscope is focused on the sample surface.   2. The scanning according to claim 1, wherein when measuring a plurality of samples with the same probe, the storing operation is performed only at the time of the first measurement or measurement of one sample in an arbitrary state. Focusing method of a scanning probe microscope. When the time of the probe exchange or long-term use in companion Udo lift occurs, again, performs focusing, the scanning probe microscope according to claim 1, wherein the storing the position information of the driving mechanism Focusing method. A measurement unit that scans a sample with a probe to measure a physical quantity related to the sample surface, a fine movement mechanism that finely moves the probe, a probe approach mechanism that reduces a distance between the probe and the sample, and a wide field of view Applied to a scanning probe microscope comprising a microscope and a focusing drive mechanism for this wide-field microscope,
The focus of the wide-field microscope is focused on the surface of the probe support, the position information of the drive mechanism at this time is stored, and the wide-field microscope is focused during automatic measurement based on the position information Focusing method of scanning probe microscope characterized by the above.   8. The focusing method for a scanning probe microscope according to claim 7, wherein the driving mechanism section is a driving mechanism for focusing of the wide field microscope and a fine movement section in the height direction of the fine movement mechanism.   9. The focusing method for a scanning probe microscope according to claim 8, wherein the wide-field microscope is arranged coaxially with a support portion of the probe.   8. The scanning according to claim 7, wherein when a plurality of samples are measured with the same probe, the storing operation is performed only at the time of the first measurement or measurement of one sample in an arbitrary state. Focusing method of a scanning probe microscope. When the time of the probe exchange or long-term use in companion Udo lift occurs, again, performs focusing, the scanning probe microscope according to claim 7, wherein the storing the position information of the driving mechanism Focusing method.