JP2004061491A5 - - Google Patents
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- Publication number
- JP2004061491A5 JP2004061491A5 JP2003090441A JP2003090441A JP2004061491A5 JP 2004061491 A5 JP2004061491 A5 JP 2004061491A5 JP 2003090441 A JP2003090441 A JP 2003090441A JP 2003090441 A JP2003090441 A JP 2003090441A JP 2004061491 A5 JP2004061491 A5 JP 2004061491A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2002-0044716A KR100516828B1 (en) | 2002-07-29 | 2002-07-29 | method for preventing over-detecting of optical detection and system for performing the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004061491A JP2004061491A (en) | 2004-02-26 |
| JP2004061491A5 true JP2004061491A5 (en) | 2005-12-22 |
| JP4133509B2 JP4133509B2 (en) | 2008-08-13 |
Family
ID=30439406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003090441A Expired - Fee Related JP4133509B2 (en) | 2002-07-29 | 2003-03-28 | Method and system for preventing erroneous detection of optical inspection |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4133509B2 (en) |
| KR (1) | KR100516828B1 (en) |
| CN (1) | CN100456024C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102353697B (en) * | 2011-08-31 | 2015-04-29 | 上海华虹宏力半导体制造有限公司 | Defect on-line assessment method |
| CN105865979B (en) * | 2016-03-30 | 2019-03-12 | 南京邮电大学 | A kind of apparatus and method measuring microlayer model electrowetting |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03160450A (en) * | 1989-11-17 | 1991-07-10 | Fujitsu Ltd | Method for inspecting defect of mask |
| JPH04198742A (en) * | 1990-11-28 | 1992-07-20 | Matsushita Electric Ind Co Ltd | Wiring pattern inspecting device |
| US5563702A (en) * | 1991-08-22 | 1996-10-08 | Kla Instruments Corporation | Automated photomask inspection apparatus and method |
| JP3189500B2 (en) * | 1993-06-25 | 2001-07-16 | 松下電器産業株式会社 | Apparatus and method for inspecting appearance of electronic components |
| JP3812020B2 (en) * | 1996-11-27 | 2006-08-23 | 松下電器産業株式会社 | Electronic component observation apparatus and electronic component observation method |
| JPH10221041A (en) * | 1997-02-10 | 1998-08-21 | Toppan Printing Co Ltd | Method for inspecting defect |
| IL133522A0 (en) * | 1997-06-17 | 2001-04-30 | Yuki Engineering System Co Ltd | Device for checking sheet packaging |
| US6282309B1 (en) * | 1998-05-29 | 2001-08-28 | Kla-Tencor Corporation | Enhanced sensitivity automated photomask inspection system |
| JP3678007B2 (en) * | 1998-07-10 | 2005-08-03 | 松下電器産業株式会社 | Electronic component recognition apparatus and electronic component recognition method in electronic component mounting apparatus |
| JP2001208693A (en) * | 2000-01-26 | 2001-08-03 | Dainippon Printing Co Ltd | Method and apparatus for inspecting plate-shaped workpiece |
-
2002
- 2002-07-29 KR KR10-2002-0044716A patent/KR100516828B1/en not_active IP Right Cessation
-
2003
- 2003-03-28 JP JP2003090441A patent/JP4133509B2/en not_active Expired - Fee Related
- 2003-04-21 CN CNB031225802A patent/CN100456024C/en not_active Expired - Fee Related