JP2004060668A5 - - Google Patents

Claims (4)

At least a first member and a second member provided with raceway grooves disposed opposite to each other, and a plurality of rolling elements disposed between the raceway grooves of both members so as to be freely rollable. In the rolling device in which one of the first member and the second member moves relative to the other by
Boron (B) and nitrogen (N A rolling device comprising a BCN layer made of a diamond-like carbon film containing). The metal is a steel material, and on the raceway groove or rolling surface,
An underlayer having a composition containing at least one or more of chromium (Cr), tungsten (W), titanium (Ti), silicon (Si), nickel (Ni), and iron (Fe);
An intermediate layer containing the constituent elements of the underlayer and carbon (C);
The BCN layer;
The rolling device according to claim 1, wherein are formed in this order. The content of boron (B) and nitrogen (N) in the B-C-N layer is 40 atom% or less for boron (B) and 58 atom% for nitrogen (N) in the entire B-C-N layer. The rolling device according to claim 1 or 2, wherein the total of boron (B) and nitrogen (N) is 80 atomic% or less. The thickness of the underlayer is 40 nm to 500 nm, the thickness of the intermediate layer is 40 nm to 500 nm, the thickness of the B—C—N layer is 0.22 μm to 4.0 μm, and the total thickness of these three layers is 0. The rolling device according to claim 2, which is 3 μm to 5.0 μm.