JP2004028532A - Air cleaning method and air shower device using it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an air cleaning method capable of removing dust and decomposing/removing chemical substance, a floating microbe, a virus or the like with a simple structure, and to provide an air shower device using it. <P>SOLUTION: Positive ions and negative ions capable of decomposing/removing the floating microbe or the chemical substance by an electric discharge of an ion generator inside a duct of an air circulation circuit connected with a discharge port and a suction port of a third space adjacently sandwiched by a first space and a second space are generated , and is circulated through the circuit by a blowing means. Thereby, the floating microbe or the chemical substance inside the third space can be decomposed and removed without using a special filter. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an air shower room adjacent to a clean room (including a sterile room) in a semiconductor manufacturing plant, a liquid crystal display manufacturing plant, a food factory, a hospital, and the like, and an air purification method therefor.
[0002]
[Prior art]
Conventionally, semiconductor factories, LCD display factories, food factories, etc. have been favoring production in relatively clean spaces with little dust. There is a need for an extremely clean environment that removes chemicals that also adversely affect the reliability of manufactured products.
[0003]
Here, it is said that the largest source of dust in the clean room is workers in the room.However, when workers enter the clean room, dustproof clothes, hats, gloves, shoes, masks, goggles, etc. It is obliged to remove dust adhering to the clothes by using an air shower device.
[0004]
Such an air shower device is generally installed between a clean room and a front room for wearing dust-proof clothes, etc., and dust attached to the dust-proof clothes is injected into the air by spraying air. It diffuses, thereby removing dust.
[0005]
FIG. 1 is a front view, a side view, and a top view showing a structural example of a conventional general air shower device. In these figures, 1a is a pre-filter, 2a is a turbo fan, 3a is a high-performance dust collecting filter composed of a HEPA filter or the like, 4a is an air outlet, and 5a is an entrance door.
[0006]
All persons enter the air shower room S in order to remove dust adhering to clothes and the like when entering the clean room. Upon entering the room, the turbo fan 2a operates and clean air is blown out from the air outlet 4a. The flow of the clean air first passes through the pre-filter 1a, the air is pressurized by the turbo fan 2a, and the high-speed clean air is blown out from the air blow-out port 4a through the high-performance dust collecting filter 3a. The blown clean air removes dust adhering to clothes and the like of the human body, and is sucked into the pre-filter 1a again to circulate.
[0007]
Further, Japanese Patent Application Laid-Open No. 11-63605 discloses a ventilation method for an air shower room provided adjacent to a sterile room. The air shower room must be kept in a sterile condition by performing formalin fumigation at regular intervals, as in the sterile room, but after the formalin fumigation, the air shower room is filled with formalin odor. Therefore, it is necessary to exhaust air efficiently in a short time. FIG. 2 is a sectional view showing the air shower room 11 and the sterile room 12. The air in the sterile room 12 is sucked into the air shower room 1 through the suction filter 16, and the air in the air shower room 11 is exhausted to the sterile room 12 through the discharge filter 17. Although the room 12 is ventilated, the formalin is not removed by a chemical method in particular, and since the air in the air shower room is always exhausted into the adjacent clean room, the volume of the space to be cleaned becomes large, and the fan, In terms of equipment such as filters, the scale becomes large, and above all, an independent air purification system cannot be formed as an air shower room.
[0008]
In the conventional method, dust diffused in the air can be removed by injecting air in an air shower room using a HEPA filter or the like. However, gaseous chemical substances that affect the productivity of semiconductor devices and the like can be removed. In order to decompose and remove such substances, it is necessary to use a so-called chemical filter or an ion exchange filter in which various chemicals are added to activated carbon. Generally, a chemical filter is configured to remove a chemical substance by a chemical reaction between the gaseous chemical contaminant and various chemicals, and can selectively remove the gaseous substance depending on the type of the chemical.
[0009]
On the other hand, when an ion exchange filter is used, gaseous chemical substances in the air come into contact with and adsorb to ion exchange fibers provided in the ion exchange filter. And clean air is obtained.
[0010]
[Problems to be solved by the invention]
However, when the chemical filter is used, the chemical substance is removed by a chemical reaction between the gaseous chemical contaminant and various chemicals. In some cases, the chemicals may volatilize and flow into the clean room to become polluting chemicals. Furthermore, even if it is hard to volatilize with use, there is a risk that the reaction product generated by the chemical reaction may be released or volatilized from the activated carbon and flow into the clean room.
[0011]
In addition, in the case of an ion exchange filter, a reaction product is not generated unlike a chemical filter, so there is no risk that the reaction product volatilizes and a chemical contaminant flows into the clean room. Easy to keep clean.
[0012]
However, when an ion exchange filter is used, it is necessary to periodically exchange ion exchange fibers in the ion exchange filter due to the amount of contaminated chemical substances adsorbed and deterioration over time. There are many problems, such as the cost of the ion exchange filter and the time and labor required for replacement.
[0013]
Further, the above-mentioned filter system is capable of removing dust and selectively removing contaminant chemical substances, but in addition to decomposing chemical substances, it cannot sterilize and remove harmful bacteria such as airborne bacteria, viruses and MRSA. .
[0014]
In order to solve the above-mentioned problems, the present invention provides an air purification method and an air shower device using the same, which are capable of removing dust with a simple configuration and decomposing and removing chemical substances, floating bacteria, viruses, and the like. The purpose is to do.
[0015]
[Means for solving the problem]
In order to solve the above problem, the air purification method of the present invention connects a suction port and a discharge port of the third space in a third space adjacent to and sandwiched between the first space and the second space. An air circulation circuit is formed by a duct, a blowing means, and a filter, and positive ions and negative ions generated by electric discharge are used to remove floating bacteria and chemical substances in the third space. And
[0016]
According to the above configuration, positive ions and negative ions capable of decomposing and removing airborne bacteria and chemical substances by an ion generator are introduced into the duct of the air circulation circuit to which the suction port and the discharge port of the third space are connected. By generating and circulating through the circuit by the blowing means, floating bacteria or chemical substances in the third space can be decomposed and removed.
[0017]
The air shower device of the present invention includes a duct connecting a suction port and a discharge port of the third space in a third space adjacent to and sandwiched between the first space and the second space; An air circulation circuit is formed by the filter, and an ion generator that discharges positive ions and negative ions by discharging to remove suspended bacteria and chemical substances is provided.
[0018]
According to the above configuration, in the duct of the air circulation circuit where the suction port and the discharge port of the third space are connected, ion generation that releases positive ions and negative ions capable of decomposing and removing floating bacteria and chemical substances is provided. A vessel is provided. The positive ion and the negative ion are generated by the ion generator and circulated in the circuit by the air blowing means, so that floating bacteria or chemical substances in the third space can be decomposed and removed.
[0019]
In one embodiment, an electrode portion of the ion generator is provided at a discharge port of the third space, and is further arranged so that the electrode can be seen from the third space. .
[0020]
According to the above configuration, the positive ions and the negative ions generated by the ion generator are discharged to the third space by the airflow generated by the blowing means, but the electrode portion of the ion generator is discharged. Since it is provided in the mouth, fresh positive ions and negative ions can be released into the third space, so that floating bacteria or chemical substances can be decomposed and removed efficiently.
[0021]
In one embodiment, in the air circulation circuit, the discharge port is provided on a top surface of the third space, and the suction port is provided on a bottom surface of the third space.
[0022]
According to the above configuration, the discharge port of the air circulation circuit is provided on the top surface of the third space, and the suction port is provided on the bottom surface of the third space. The positive ions and negative ions are discharged from the top surface of the third space and are sucked into the bottom surface. Accordingly, the airflow is downflow, and the positive ions and the negative ions are distributed almost uniformly in the third space, and the direction of the airflow and the settling direction of the dust scattered in the third space are in the same direction. The third space can be purified.
[0023]
In one embodiment, in the air circulation circuit, the ion generator is provided on the upstream side with respect to the third space, and further on the downstream side with respect to the blower and the filter. .
[0024]
According to the above configuration, the positive ions and the negative ions generated by the ion generator are released to the third space without passing through the blowing means and the filter. Collisions can be avoided and most of them can reach the third space, so that floating bacteria and chemical substances can be efficiently decomposed and removed.
[0025]
In one embodiment, the positive ions are H + (H2O) m (m is an arbitrary natural number), and the negative ions are O2- (H2O) n (n is an arbitrary natural number).
[0026]
According to the above configuration, the positive ions and the negative ions generated from the ion generator by discharge are H ions as positive ions. ⁺ (H ₂ O) _n (N is an arbitrary natural number) and O is a negative ion. ^2- (H ₂ O) _n (N is an arbitrary natural number). H ⁺ (H ₂ O) _n (N is an arbitrary natural number), O ^2- (H ₂ O) _n Is most stably generated, and when these positive ions and negative ions are simultaneously generated in the air, a chemical reaction occurs and hydrogen peroxide H, which is an active species, is generated. ₂ O ₂ Or, it generates a hydroxyl radical, OH. These hydrogen oxides H ₂ O ₂ Alternatively, the hydroxyl radical OH exhibits an extremely strong activity, whereby it is possible to decompose and remove airborne bacteria, viruses and chemical substances.
[0027]
In one embodiment, the third space or the second space includes a motion sensor, and controls driving of the ion generator based on a detection result of the motion sensor. I have.
[0028]
According to the above configuration, the third space includes the motion sensor. Therefore, when a person enters the third space, the ion generator is driven, and when no person is entering the room, the ion generator does not need to be driven. Therefore, ions can be generated as needed, and electrode life of the ion generator can be suppressed to extend the life.
[0029]
In one embodiment, in the third space, a second air circulation circuit different from the air circulation circuit is provided, and a discharge port provided in the second air circulation circuit is provided in the third space. It is characterized by being provided on the side wall.
[0030]
According to the above configuration, since a plurality of air circulation circuits in the third space can be provided, an air circulation circuit containing positive ions and negative ions for the purpose of decomposing and removing floating bacteria and chemical substances, By providing an air circulation circuit for scattering dust with a fast air flow, purification can be performed efficiently according to the purpose.
[0031]
In one embodiment, based on the detection result of the human sensor, when there is no person in the third space, the first air circulation circuit is driven, and when there is a person in the third space. Drives the first air circulation circuit and the second air circulation circuit.
[0032]
According to the above configuration, when there is no person in the third space, by driving the ion generator and the first air circulation circuit, positive ions and negative ions for the purpose of decomposing and removing floating bacteria and chemical substances are formed. By releasing ions, the air in the third space can be purified. Further, when a person enters the third space, the second air circulation circuit is driven by the detection of the human sensor to blow clean air, which has a high flow rate and is purified in advance, to the person entering the room. Dust, airborne bacteria, and chemical substances attached to the human body are scattered and can be efficiently decomposed and removed.
[0033]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0034]
First, the well-known principle of decomposing floating bacteria and chemical substances by positive and negative ions used in the present invention and details of the ion generator will be described.
[0035]
The principle of operation of an ion generator is that when a high alternating current voltage (often a pulse voltage) is applied between the electrodes of an ion generator having an ion generation electrode that forms a plasma region and generates ions, the ion is discharged and discharged. The generating electrode generates positive ions and negative ions. The generated positive ion is H ⁺ (H ₂ O) _n (N is an arbitrary natural number) and O is a negative ion. ^2- (H ₂ O) _n (N is an arbitrary natural number) is most stably generated. When these positive ions and negative ions are simultaneously generated in the air, they undergo a chemical reaction, and hydrogen peroxide H, an active species, is produced. ₂ O ₂ Or, it generates a hydroxyl radical, OH. These hydrogen oxides H ₂ O ₂ Alternatively, the hydroxyl radical OH exhibits an extremely strong activity, which can remove airborne bacteria.
[0036]
In order to diffuse the positive and negative ions generated by the ion generator over a wider range, it is desirable to further include a blower that emits by passing through the ion generator. In the case where there is no air blowing means and the ion generator alone is used, before the positive and negative ions generated by the ion generator sufficiently diffuse into the space, the charge may be lost and the effect may be lost. However, the operation method is not particularly limited, and may be a continuous operation or a method of repeating operation and stop.
[0037]
Such an air shower device in which an ion generator and a blowing means are combined has an extremely effective action for sterilization and disinfection.
[0038]
FIG. 3 is a schematic diagram showing an outline of the ion generator used in the present invention.
[0039]
A dielectric 102 is provided on the surface of the ion generator 101, and a dielectric electrode 104 is provided on the back side of the dielectric 102. An ion generating electrode 103 is provided on the surface of the dielectric 102 so as to oppose the dielectric electrode 104. Installed. In FIG. 3, the shape of the ion generating electrode 103 is a net shape, but is not particularly limited, and may be a known shape, for example, a needle type, as long as it can generate ions.
[0040]
The ion generating electrode 103 and the induction electrode 104 are connected to a high-voltage pulse driving circuit 106 through a lead wire 105. The high-voltage pulse drive circuit 106 is formed inside the ion generator 101. When a pulse voltage having a peak value of, for example, 2.7 kV consisting of a positive and negative voltage is applied between the ion generating electrode 103 and the induction electrode 104 to the ion generator having such a configuration, positive ions and negative ions are generated at the ion generating electrode 103. Ions are generated. When these positive ions and negative ions are released into the air by the blowing means, they can kill airborne bacteria and viruses existing in the air.
[0041]
FIG. 4 shows a schematic diagram of a waveform of a pulse voltage applied to the ion generation electrode and the induction electrode of the ion generator. A pulse voltage on a sine wave that gradually attenuates is applied for T1 seconds, and then a pause time of T2 seconds is set. This cycle is repeated. The condition of the pulse voltage in the normal mode of the ion generator is such that the frequency of the sine wave is 20 kHz and the pulse repetition period is 60 Hz. Further, T1 is 1 millisecond, T2 is about 15.7 milliseconds (1000 / 60-1), and the applied peak voltage is +2.7 kV for the positive voltage and -2.7 kV for the negative voltage. The use of such pulse driving has an advantage that ozone, which is generated simultaneously with positive and negative ions, is not easily generated.
[0042]
Positive ions and negative ions generated from such an ion generator are extremely effective in sterilizing and eliminating bacteria floating in the air, but are completely harmless to the human body. In addition, this ion generator can be driven with low power consumption and can be operated continuously with high reliability.
[0043]
In an air shower device equipped with an ion generator and a blowing means, in order to obtain a sterilizing / sterilizing effect in the space, the ion concentration at a position 10 cm away from the ion generator of the ion generator must be positive ions or negative ions. Both 10,000 pieces / cm ³ If it is set so that it becomes, about 2000 positive ions and negative ions in the space / cm ³ The ion concentration is of the order of magnitude, and a sufficient bactericidal / bactericidal effect can be obtained. If a sufficient space cannot be maintained due to an increase in the space, the output of the blowing means may be adjusted or the number of ion generators may be increased. By combining the ion generator and the blowing means in this manner, positive and negative ions can be released in accordance with the space to be sterilized, and an effective sterilizing and sterilizing action can be obtained.
[0044]
Therefore, in an air shower device including such an ion generator that generates positive ions and negative ions and a blowing means, by supplying positive ions and negative ions into the space, it is possible to obtain the effect of sterilization and sterilization. Can be.
(1st Embodiment)
FIG. 5 shows an air shower device according to the first embodiment of the present invention. The air shower device includes an air shower room 201 having a hermetically sealed shape, and the air shower room 201 is sandwiched between a clean room 202 and a front room 203 and is installed adjacent to each other. Further, a door 204 is provided between the air shower room 201 and the clean room 202, and a door 205 is provided between the air shower room 201 and the front room 203. The ceiling 210 of the air shower room 201 is provided with a discharge port 221 for discharging air, and the floor 211 is provided with a suction port 222 for sucking air. A duct 230 for circulating air and a blowing unit 240 are connected to the air shower chamber 201 via a discharge port 221 and a suction port 222. Further, a plurality of ion generators 101 for emitting positive ions and negative ions are provided near the outlet 221 of the ceiling 210, and a HEPA filter 235 for capturing dust and the like is provided below the floor 211.
[0045]
When the ion generator 101 is driven, H ⁺ (H ₂ O) _n And O ^2- (H ₂ O) _n A positive ion and a negative ion composed of are generated. When the blowing means 240 is driven, air containing positive ions and negative ions flows into the air shower chamber 201, and a downflow is formed toward the suction port 222.
[0046]
When a person in the front room 203 enters the clean room 202, dust attached to clothes in the air shower room 201 provided between the front room 203 and dust / floating bacteria (mold) contained in the air flowing in by opening the door 205. Bacteria, Escherichia coli, MRSA, etc.) ・ Decompose and remove chemical substances (ammonia, acetaldehyde, methane gas, acetic acid, carbon monoxide, carbon dioxide, formaldehyde, etc.) and further purify the air in the air shower room 201 The door 204 connected to the clean room 202 is opened, and the user enters the clean room 202.
[0047]
According to this process, clean air containing positive ions and negative ions forms a downflow from the ceiling 211 to the floor 212 in the air shower chamber 201 and is exhausted from the floor 212 by Thus, the turbulence of the airflow can be reduced, and the dust scattered from the clothes of the person can be efficiently exhausted to the outside from the suction port 222 without blowing up. Dust discharged from the air shower chamber is captured and removed by a HEPA filter 235 provided below the floor 212 and capable of capturing extremely fine dust of, for example, 0.3 μm or less. In addition, floating bacteria and chemical substances diffused in the air shower chamber 201 are decomposed and removed by positive ions and negative ions released from the outlet 221, so that air recirculated through the duct 230 is substantially purified. Become clean.
[0048]
In the air shower device of the present embodiment, the ion generator 101, the air shower chamber 201, and the HEPA filter 235 are arranged in this order on the downstream side of the blowing unit 240, but the HEPA filter 235 is It may be provided between the generators 101, may be provided between the blowing means 240 and the ion generator 101, and may be provided between the air shower chamber 201 and the blowing means 240, respectively. Also, one or more ion generators 101 may be provided in accordance with the volume of the air shower chamber 201 and the air volume of the air blowing means 240.
(Second embodiment)
FIG. 6 shows an air shower device according to a second embodiment of the present invention. The air shower device includes an air shower room 201 having a hermetically sealed shape, and the air shower room 201 is sandwiched between a clean room 202 and a front room 203, and is installed adjacent to each other. Further, a door 204 is provided between the air shower room 201 and the clean room 202, and a door 205 is provided between the air shower room 201 and the front room 203. The ceiling 210 of the air shower room 201 is provided with a discharge port 220 for discharging air, and the floor 211 is provided with a suction port 221 for sucking air. A duct 230 for circulating air and a blowing unit 240 are connected to the air shower chamber 201 via a discharge port 221 and a suction port 222. In the vicinity of the outlet 221 of the ceiling 210, an ion generator 101 that emits positive ions and negative ions is provided. Under the floor 211, a HEPA filter 235 that captures extremely fine dust of, for example, 0.3 μm or less is provided. It is provided. Further, a duct 231 branched from an inlet of the duct 230 is provided, and a compressor 250 and a solenoid valve 251 are provided in the duct 231 so as to be connected to a discharge port 223 provided on a side wall of the air shower chamber 201. Has been.
[0049]
FIG. 7 shows a schematic diagram of the air flow of the air shower device of the present embodiment. The air blown from the blowing means 240 passes through the vicinity of the ion generator 101 via the duct 230, and is discharged from the discharge port 221 to the air shower chamber 201. On the other hand, the air compressed by the compressor 250 passes through the solenoid valve 251 and is discharged from the discharge port 223 into the air shower chamber 201. In the air shower chamber 201, air containing positive ions and negative ions released from the discharge port 221 and compressed air released from the discharge port 223 are mixed. The air discharged from the suction port 222 to the outside of the room passes through the HEPA filter 235 and is again circulated to the blowing means 240 and the compressor 250 via the ducts 230 and 231.
[0050]
In the air shower device of the present embodiment, when a person in the front room 203 enters the clean room 202, purification is performed in the air shower room 201 provided therebetween by the following process.
[0051]
Dust, bacteria, chemical substances, and the like attached to the clothes of the entrant can be efficiently scattered into the room by opening the electromagnetic valve 251 and ejecting the air compressed by the compressor 250 from the outlet 223. At this time, since a plurality of outlets 223 are provided on the side wall of the air shower room 201 at the top and bottom, the outlet 223 is efficiently sprayed from the head to the feet of the occupant. Air containing positive ions and negative ions is discharged from the outlet 221 above the occupant by the blowing means 240. Since this airflow is a downflow, dust scattered from a room entrant or dust flowing from the front room 203 can be quickly led to the suction port 222. Furthermore, floating bacteria and chemical substances scattered in the air shower chamber 201 are decomposed and removed in the air by positive ions and negative ions that fall from above.
[0052]
In the present embodiment, the compressor 250 is used. However, a fan motor may be used instead of the compressor 250, or a duct shape whose cross-sectional area becomes small near the outlet may be used.
(Third embodiment)
FIG. 8 shows an air shower device according to a third embodiment of the present invention. In the present embodiment, a human sensor 260 is further provided in the air shower room 201 in the second embodiment.
[0053]
In the air shower room 201, the blowing means 240 and the ion generator 101 are driven in advance, and air containing positive ions and negative ions circulates in the room. When a person enters the air shower room 201, the human sensor 260 detects entry of the person, and the detection result is sent to a control unit (not shown). The control means (not shown) drives the compressor 250 and opens the solenoid valve 251 to inject compressed air from the discharge port 223, and dust, bacteria, chemical substances, etc. attached to the clothes of the occupant. In the room. Since the inside of the air shower chamber 201 is a downflow of air containing positive ions and negative ions, dust scattered from a room entrant and dust flowing from the front chamber 203 can be quickly led to the suction port 222. Furthermore, floating bacteria and chemical substances scattered in the air shower chamber 201 can be decomposed and removed in the air by positive ions and negative ions that fall from above.
[0054]
After a certain period of time (for example, 5 to 30 seconds) has elapsed, the solenoid valve 251 is closed, the compressor 250 is stopped, and air containing positive ions and negative ions is circulated, so that an air shower in which a person enters the room. After purifying the air in the chamber 201 to the same level as the clean room 202, the door 204 is opened to enter the clean room. At this time, when the door 204 is opened, the air in the air shower room 201 flows into the clean room 202. However, the air in the air shower room 201 is clean from which dust, floating bacteria and chemical substances have been removed. The user can enter the room without contaminating the inside of the room 202.
[0055]
In the present embodiment, the ion generator 101 is driven even when a person is entering the room and discharging air from the discharge port 223, but air is discharged from the discharge port 223 based on detection of a human sensor. In the case of emission, the ion generator 101 may be stopped and only the air blowing means 240 may be driven. In this way, the electrode deterioration of the ion generator 101 is suppressed without significantly lowering the purification ability. You can also.
[0056]
In the present embodiment, a human sensor is used, but it is only necessary to detect a person entering the air shower room 201. Therefore, the same effect can be obtained by providing a pressure sensor on the floor 211 to detect entry, or by providing the door 205 with an open / close detection unit.
[0057]
【The invention's effect】
As described above, according to the present invention, it is possible to remove dust in a space with a simple configuration, and to obtain an excellent effect of decomposing and removing chemical substances, floating bacteria, viruses, etc. without using a special filter. Can be
[Brief description of the drawings]
FIG. 1 is a structural example of a conventional general air shower device.
FIG. 2 is a diagram showing a conventional ventilation method of an air shower room disposed adjacent to a sterile room.
FIG. 3 is a diagram showing an outline of an ion generator used in the present invention.
FIG. 4 is a diagram showing a waveform of a pulse voltage applied to an ion generation electrode and an induction electrode of the ion generator used in the present invention.
FIG. 5 is a diagram showing an air shower device according to the first embodiment of the present invention.
FIG. 6 is a view showing an air shower device according to a second embodiment of the present invention.
FIG. 7 is a diagram showing a flow of air in an air shower device according to a second embodiment of the present invention.
FIG. 8 is a view showing an air shower device according to a third embodiment of the present invention.
[Explanation of symbols]
101 Ion generator
102 Dielectric
103 Ion generation electrode
104 dielectric electrode
105 Lead wire
106 High voltage pulse drive circuit
201 Air Shower Room
202 Clean Room
203 Front room
204, 205 door
210 Ceiling
211 floor
221 spout
222 suction port
230 duct
235 HEPA filter
240 blowing means

Claims (10)

In a third space adjacent to and sandwiched between the first space and the second space,
A duct connecting a suction port and a discharge port of the third space,
A first air circulation circuit is formed by the blowing means and the filter,
An air purification method, wherein positive ions and negative ions generated by electric discharge are used to remove floating bacteria and chemical substances in the third space. In a third space adjacent to and sandwiched between the first space and the second space,
A duct connecting a suction port and a discharge port of the third space,
A first air circulation circuit is formed by the blowing means and the filter,
An air shower device comprising an ion generator for discharging positive ions and negative ions by discharging to remove floating bacteria and chemical substances. An electrode portion of the ion generator is provided at a discharge port of the third space,
3. The air shower device according to claim 2, wherein the electrode is arranged so as to be visible from the third space. In the air circulation circuit,
4. The air shower device according to claim 2, wherein the outlet is provided on a top surface of the third space, and the suction port is provided on a bottom surface. 5. In the first space, the second space, and the third space,
5. The air shower device according to claim 2, wherein the air cleanliness in the space satisfies first space ≧ third space ≧ second space. In the first air circulation circuit,
The ion generator is located upstream with respect to the third space;
The air shower device according to claim 2, wherein the air shower device is further provided on a downstream side with respect to the blowing unit and the filter. The said positive ion is H + (H2O) m (m is arbitrary natural numbers), and the said negative ion is O2- (H2O) n (n is arbitrary natural numbers), The Claims 2 thru | or 6 characterized by the above-mentioned. Air shower device. The third space includes a motion sensor,
The air shower device according to claim 2, further comprising a control unit configured to control driving of the ion generator based on a detection result of the human sensor. In the third space,
A second air circulation circuit separate from the first air circulation circuit;
9. The air shower device according to claim 2, wherein a discharge port formed in the second air circulation circuit is provided on a side wall of the third space. Based on the detection result of the human sensor,
When there is no person in the third space, the first air circulation circuit is driven,
The air shower device according to claim 8, wherein the first air circulation circuit and the second air circulation circuit are driven when a person is present in the third space.

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