JP2004025749A - Liquid ejection head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid ejection head in which evaporation of liquid or some component thereof from a part of a diaphragm susceptible to oscillatory displacement of a pressure generating element is suppressed. <P>SOLUTION: The liquid ejection head comprises a channel unit 1 having a nozzle opening 2, a pressure generating chamber 4 communicating with the nozzle opening 2, a chamber 8 for storing liquid being supplied to the pressure generating chamber 4 and a diaphragm 6 closing the openings of the pressure generating chamber 4 and the storing chamber 8, a head case 9 being pasted with the channel unit 1, and a pressure generating element 11 being contained in the space 10 of the head case 9 and imparting a pressure variation to the pressure generating chamber 4 wherein an airtightness keeping member 22 is interposed between the head case 9 and a head substrate 14. Liquid or some component thereof evaporates to fill the space 10 and sustention of evaporation is suppressed by the elevated vapor pressure. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a liquid ejecting head that ejects droplets from nozzle openings by vibration of a pressure generating element.
[0002]
[Prior art]
Liquid ejection heads using a pressure generating element are known for various liquids, and among them, a typical one is a recording head employed in an ink jet recording apparatus. it can. Therefore, the prior art will be described with reference to FIGS. 5 and 6 by taking an example of the recording head of the ink jet recording apparatus.
[0003]
This recording head includes a flow path unit 1 having a nozzle opening 2 and a head case 9 to which the flow path unit 1 is adhered.
[0004]
The flow path unit 1 includes a nozzle plate 3 in which nozzle openings 2 are arranged in a row on a nozzle forming surface 3A, a flow path substrate 5 in which pressure generating chambers 4 communicating with the nozzle openings 2 are arranged, A diaphragm 6 for closing a lower opening of the chamber 4 is laminated. An ink storage chamber 8 that communicates with each pressure generation chamber 4 via an ink flow path 7 and stores ink introduced into each pressure generation chamber 4 is formed in the flow path substrate 5. Note that the entire recording head is indicated by reference numeral H.
[0005]
The head case 9 as a base member of the recording head H is formed by injection molding of a thermosetting resin or a thermoplastic resin, and a pressure generating element 11 is accommodated in a space 10 penetrating vertically. The pressure generating element 11 has a rear end side fixed to a fixed substrate 12 attached to the head case 9 and a front end surface fixed to an island portion 6A on the lower surface of the diaphragm 6.
[0006]
The pressure generating chambers 4, the pressure generating elements 11, and the nozzle openings 2 are arranged in a large number in a direction perpendicular to the plane of FIG. That is, in this example, two nozzle rows are formed, and the same type of ink is ejected using each nozzle row as one unit.
[0007]
Each of the pressure generating elements 11 is connected to an input conductive line 13 as shown in FIGS. 5 and 6, and each conductive line 13 is inserted into a through hole 14 </ b> A It is connected to the upper printed wiring 15. The printed wirings 15 are collected and connected to a flexible flat cable 17 via a connector 16. The flexible flat cable 17 is connected to a drive circuit (not shown). When a drive signal from the drive circuit is input to the pressure generating element 11, the pressure generating element 11 is expanded and contracted in the longitudinal direction, and the pressure generating chamber 4 The ink in the pressure generating chamber 4 is ejected from the nozzle opening 2 as ink droplets by changing the pressure in the inside. Although the through-hole 14A has almost no gap due to the insertion of the conductive wire 13, the size of the through-hole 14A is exaggerated in order to make it easier to understand the ventilation state in that portion. .
[0008]
On the other hand, pressure fluctuations in the ink storage chamber 8 during ejection are released to a portion of the head case 9 corresponding to the ink storage chamber 8 through a diaphragm 6 made of a polyphenylene sulfide film (hereinafter, referred to as a “PPS film”). A damper recess 18 is formed. When the damper recess 18 is provided as an independent space that does not communicate with the outside, the air in the damper recess 18 passes through the PPS film diaphragm 6 and elutes into the ink, and the pressure inside the damper recess 18 is reduced. , And the tension of the diaphragm 6 is increased, so that a sufficient damper effect is not easily obtained. Therefore, by forming an external communication path 19 that penetrates from the bottom surface of the damper concave portion 18 toward the opposite side surface of the head case 9 and communicates the damper concave portion 18 to the atmosphere, the above-described damper concave portion 18 is formed. Prevents the pressure drop inside.
[0009]
By the way, since the opening area of the damper recess 18 is large, the area of the diaphragm 6 covering this opening area also becomes large. In particular, while the use of the ink jet recording apparatus is suspended, the The moisture is converted into water vapor, passes through the diaphragm 6 having a large area, and flows into the damper recess 18. Then, this steam is released to the atmosphere through the external communication passage 19 as the pressure rises. Due to such a phenomenon, the amount of water in the ink is reduced and the viscosity of the ink is increased, so that proper ink droplet ejection is hindered when the apparatus is restarted.
[0010]
Therefore, in order to reduce evaporation of water in the ink as much as possible, a portion having a small flow passage area is formed in the external communication passage 19, or a bent portion having a large flow passage resistance is formed in the flow passage shape. As a result, water evaporation is suppressed while performing a damper function.
[0011]
[Problems to be solved by the invention]
However, in the above-described conventional device, the correspondence in the portion of the damper recess 18 is made as described above, but as shown in FIG. 6B, the diaphragm receiving the vibration displacement of the pressure generating element 11 is used. 6, that is, the water vapor in the ink that has passed through the vibration displacement portion 6B of the vibration plate 6 located around the island portion 6A is supplied from the space 10 to the surface contact portion between the head substrate 14 and the head case 9. Released into the atmosphere through a small gap. Alternatively, it is released to the atmosphere through the through hole 14A. Therefore, in order to reduce the evaporation of water in the ink as much as possible, it is necessary to suppress the atmospheric release of the water vapor transmitted through the vibration displacement portion 6B by some means.
[0012]
As described above, the vapor of the liquid passing through the vibration displacement portion 6B is the vapor of the liquid itself, or the vapor of a specific component in the liquid. Loss of liquid and maintenance of a normal liquid composition.
[0013]
The present invention has been made in view of such circumstances, and a liquid ejecting head that suppresses a liquid or a certain component in the liquid from evaporating from a part of a vibration plate that receives vibration displacement of a pressure generating element. The purpose is to provide.
[0014]
[Means for Solving the Problems]
In order to achieve the above object, a liquid ejecting head according to the present invention includes a nozzle opening, a pressure generating chamber communicating with the nozzle opening, a storage chamber storing liquid to be supplied to the pressure generating chamber, and a pressure generating chamber and a storage chamber. A flow path unit having a diaphragm closing the opening, a head case to which the flow path unit is adhered, and pressure generation that is housed in a space formed in the head case and applies pressure fluctuation to the pressure generation chamber. A liquid ejecting head including an element and a head substrate that covers an opening of a space of the head case, wherein an airtightness maintaining material is present between the head case and the head substrate.
[0015]
That is, in the liquid jet head of the present invention, the airtightness maintaining material is present between the head case and the head substrate.
[0016]
As described above, since the slight gap at the surface contact portion between the head case and the head substrate is completely sealed by the airtight holding material, the space of the head case communicating with the diaphragm is airtight. The presence of the holding material results in a closed space. Accordingly, when a liquid or a component in the liquid, for example, moisture permeates through the diaphragm in the state of water vapor, and becomes saturated in the closed space to increase the vapor pressure, the water vapor flows into the space further. And the loss of liquid or certain components in the liquid is minimized, and changes in the composition of the liquid can be at substantially harmless levels. In particular, the surface abutting portion between the head case and the head substrate is finished with high precision flatness on both abutting surfaces. Even if a small gap is formed, complete sealing is achieved by the airtight material, which is advantageous in terms of precision control of parts.
[0017]
In the liquid jet head of the present invention, when the airtightness maintaining material is present between a seal end face formed on a portion of the head case opposite to the flow path unit and the head substrate, the airtightness is maintained. Since the holding material is present between the seal end face and the head substrate, the seal end face can be finished to a flat surface that is as easy to seal as possible or a surface suitable for the surface shape of the head substrate, and the airtight holding material can be sealed. It can be present in a state with good properties, and excellent airtightness can be obtained.
[0018]
In the liquid jet head according to the aspect of the invention, when the airtightness maintaining member is arranged so as to surround the opening of the space, the airtightness arranged at a surface contact portion between the head case and the head substrate. The holding material surrounds the opening of the space, and the airtight holding material performs an airtight holding function in a so-called endless form, so that the steam filled in the space does not leak to the outside from the surface abutting portion.
[0019]
In the liquid jet head of the present invention, when the hermeticity maintaining material is made of a low elasticity material, since the elasticity of the material is at a low level, the low airtightness is maintained between the head case and the head substrate. When the elastic material is pressurized, a moderate elastic reaction force is obtained, which is suitable for blocking the passage of steam. In other words, for example, for a vapor pressure that evaporates at room temperature, it is optimal to cut off with a low elastic substance. Furthermore, since the elastic reaction force when the low elastic substance is pressed is very small, it is possible to avoid deformation of the head case and especially the head substrate.
[0020]
In the liquid ejecting head according to the present invention, when the low elasticity substance is a gelled substance, a flexible state without moderate elasticity, viscosity or fluidity can be obtained by the gelled substance, so that the surrounding environment can be improved. Even if the temperature and humidity change, or an external force such as vibration caused by transportation or the like is applied, the low-elastic substance hardly flows or breaks, and the function as an airtight material can be maintained.
[0021]
In the liquid jet head of the present invention, when the hermeticity maintaining material present between the seal end face and the head substrate is a molded elastic part, the molded elastic part is moved to the seal end face with the seal end face. Since it is only necessary to dispose the liquid ejecting head and the head substrate, the assembling operation of the liquid ejecting head is simplified. In addition, since it is a molded part, the dimensional accuracy of the part can be accurately set in advance, and the sealing state between the seal end face and the head substrate is ensured.
[0022]
In the liquid jet head according to the present invention, when the airtightness maintaining material that is present between the seal end face and the head substrate is a semi-fluid elastic seal material, the elastic seal material is semi-fluid. Therefore, the airtightness retaining material can be made to exist on the sealing end face or the predetermined location of the head substrate by applying the airtightness, and the airtightness retaining material can be made to exist at the best location for airtightness maintenance. In addition, since the elastic sealing material is provided with semi-fluidity, it is appropriately spread when pressed between the sealing end surface and the head substrate, and adheres to the sealing end surface of the elastic sealing material and the head substrate. The area is large, which is suitable for improving the airtightness maintenance function.
[0023]
In the liquid jet head of the present invention, when the passage opening of the conduction line provided in the head substrate is sealed, the gap in the passage portion of the conduction line is completely closed, so that the head case and the head In addition to hermetic sealing with the substrate, perfect vapor sealing is achieved.
[0024]
In the liquid ejecting head of the present invention, when a sealing process is performed to close the through holes that leak gas from the head substrate, the function of maintaining the airtightness of the head substrate itself is ensured. Can be reduced to a level that does not substantially hinder the release of steam. Although the hermetic quality of the head substrate itself is sufficiently ensured, the through hole may be formed with a small probability. By performing such a sealing process for closing the through hole, a higher degree of airtightness is realized.
[0025]
In the liquid ejecting head of the present invention, when the liquid ejecting head is used for an ink jet recording apparatus, the water content in the ink is reduced as much as possible even when the ink jet recording apparatus is paused for a long time. Therefore, normal ink droplet ejection can be obtained when the apparatus is used after a pause.
[0026]
BEST MODE FOR CARRYING OUT THE INVENTION
Next, embodiments of the present invention will be described in detail.
[0027]
The liquid ejecting head of the present invention can function for various liquids as described above, and in the illustrated embodiment, as a typical example, the present liquid ejecting head is applied to an ink jet recording apparatus. An example is shown.
[0028]
FIGS. 1 to 4 are views showing an embodiment of the liquid ejecting head according to the present invention. Members having the same functions as those of the recording head H described with reference to FIGS. Reference numerals are given in FIGS.
[0029]
The recording head H includes a channel unit 1 having a nozzle opening 2 and a head case 9 to which the channel unit 1 is attached.
[0030]
The flow path unit 1 includes a nozzle plate 3 in which nozzle openings 2 are arranged in a row on a nozzle forming surface 3A, a flow path substrate 5 in which pressure generating chambers 4 communicating with the nozzle openings 2 are arranged, A diaphragm 6 for closing a lower opening of the chamber 4 is laminated. An ink storage chamber 8 that communicates with each pressure generation chamber 4 via an ink flow path 7 and stores ink introduced into each pressure generation chamber 4 is formed in the flow path substrate 5.
[0031]
The head case 9 as a base member of the recording head H is formed by injection molding of a thermosetting resin or a thermoplastic resin, and a pressure generating element 11 is accommodated in a space 10 penetrating vertically. The pressure generating element 11 has a rear end side fixed to a fixed substrate 12 attached to the head case 9 and a front end surface fixed to an island portion 6A on the lower surface of the diaphragm 6.
[0032]
The pressure generating chambers 4, the pressure generating elements 11, and the nozzle openings 2 are arranged in a large number in a direction perpendicular to the plane of FIG. That is, in this example, two nozzle rows are formed, and the same type of ink is ejected using each nozzle row as one unit.
[0033]
As shown in FIG. 1, each of the pressure generating elements 11 is connected to an input conductive line 13, and each of the conductive lines 13 is inserted into a through hole 14 </ b> A of the head substrate 14 and then printed on the head substrate 14. It is connected to the wiring 15. The printed wirings 15 are collected and connected to a flexible flat cable 17 via a connector 16. The flexible flat cable 17 is connected to a drive circuit (not shown). When a drive signal from the drive circuit is input to the pressure generating element 11, the pressure generating element 11 expands and contracts in the longitudinal direction and vibrates the diaphragm 6. By causing the pressure in the pressure generating chamber 4 to fluctuate, the ink in the pressure generating chamber 4 is ejected from the nozzle openings 2 as ink droplets.
[0034]
A seal end face 20 is formed in a portion of the head case 9 opposite to the flow path unit 1. The seal end face 20 is finished to have a high flatness, and the head substrate 14 having a flat shape is attached in a state of being in close contact with the seal end face 20. Although the structure for attaching the head substrate 14 to the head case 9 is not shown, an example thereof is a method such as screwing. In this way, a surface contact portion between the seal end face 20 and the head substrate 14 is formed.
[0035]
On the other hand, pressure fluctuations in the ink storage chamber 8 during ejection are released to a portion of the head case 9 corresponding to the ink storage chamber 8 through a diaphragm 6 made of a polyphenylene sulfide film (hereinafter, referred to as a “PPS film”). A damper recess 18 is formed. When the damper recess 18 is provided as an independent space that does not communicate with the outside, the air in the damper recess 18 passes through the PPS film diaphragm 6 and elutes into the ink, and the pressure inside the damper recess 18 is reduced. , And the tension of the diaphragm 6 is increased, so that a sufficient damper effect is not easily obtained. Therefore, by forming an external communication path 19 that penetrates from the bottom surface of the damper concave portion 18 toward the opposite side surface of the head case 9 and communicates the damper concave portion 18 to the atmosphere, the above-described damper concave portion 18 is formed. Prevents the pressure drop inside.
[0036]
By the way, since the opening area of the damper recess 18 is large, the area of the diaphragm 6 covering this opening area also becomes large. In particular, while the use of the ink jet recording apparatus is suspended, the The moisture is converted into water vapor, passes through the diaphragm 6 having a large area, and flows into the damper recess 18. Then, the water vapor is released to the atmosphere through the external communication path 19. Due to such a phenomenon, the amount of water in the ink is reduced and the viscosity of the ink is increased, so that proper ink droplet ejection is hindered when the apparatus is restarted.
[0037]
Therefore, in order to reduce evaporation of water in the ink as much as possible, a portion having a small flow passage area is formed in the external communication passage 19, or a bent portion having a large flow passage resistance is formed in the flow passage. Thus, moisture evaporation is suppressed while performing a damper function.
[0038]
The space 10 in which a number of pressure generating elements 11 are accommodated is open to the seal end face 20, and reference numeral 21 indicates the opening. Between the head case 9, that is, the seal end face 20 and the head substrate 14, an airtight holding member 22 is interposed while surrounding the opening 21. Since the airtightness holding member 22 surrounds the periphery of the opening 21 endlessly, it is arranged in the form of a long and thin line as shown in FIG. In FIG. 1, the black portions are the airtightness holding members 22. In addition, the one shown in FIG. 2 surrounds the periphery of the two openings 21, and the portion disposed between the two openings 21 and 21 may be removed.
[0039]
The airtight material 22 is preferably made of a low elastic material such as silicone rubber, an adhesive or a foam, and more preferably a gelled silicone gel. As such an airtight material 22, a material having appropriate low elasticity, viscosity, small thermal expansion coefficient and the like is suitable.
[0040]
Various arrangements of the airtightness holding member 22 can be adopted as illustrated in FIG. (A) and (B) show an example in which an elastic material such as synthetic rubber is molded, (A) is an example of a cross-sectional shape like an O-ring, and (B) is It is a thin sheet-shaped packing type, and has elongated window holes corresponding to the openings 21 and 21 as shown in the figure.
[0041]
FIGS. 3C, 3D, and 3E show a case where a semi-fluid hermetic material 22 such as butyl rubber is interposed, and FIG. The airtightness maintaining material 22 is applied to one of the surfaces by an application nozzle so as to surround the periphery of the opening 21, and is crushed between the seal end face 20 and the head substrate 14.
[0042]
(D) is a diagram in which a groove 23 surrounding the periphery of the opening 21 is formed in the head substrate 14, and a semi-fluid hermetic material 22 is filled in the groove 23 with an injection nozzle, and a tight seal is formed therein. The end face 20 is adhered. Note that the groove 23 may be formed on the head case 9 side, or may be formed on both the head case 9 and the head substrate 14.
[0043]
(E) is obtained by adding a ridge 24 to that of (D) in order to enhance airtightness. The ridge 24 is formed on the seal end face 20. As shown in (E), the ridge 24 is pressed into the airtight material 22 in the groove 23, so that the airtight material 22 is pressurized and the inner surface of the groove 23 and the ridge are formed. 24 and the seal end face 20 are strongly adhered to each other, and the function of maintaining airtightness is more reliably achieved.
[0044]
As described above, the airtight holding member 22 interposed between the head case 9 and the head substrate 14 blocks the release of water vapor from the ink that has passed through the vibration displacement portion 6B to the atmosphere. Then, when the water vapor becomes saturated in the closed space 10 and the vapor pressure becomes high, the water vapor no longer passes through the vibration displacement portion 6B, and the evaporation of the water in the ink is suppressed.
[0045]
FIG. 4 shows airtightness maintenance at a location where the conductive line 13 passes through the through hole 14A. Also in this drawing, as described above, the gap between the through hole 14A and the conductive line 13 is exaggerated and enlarged. A sealing material 25 made of a synthetic resin material such as silicone gel, which is a low elastic substance, is filled in the through hole 14A. The sealing material 25 covers a connection portion between the conductive wire 13 and the printed wiring 15 and a part of the printed wiring 15 or penetrates into the through hole 14A, thereby maintaining the airtightness of a portion where the conductive wire 13 passes. Has been done.
[0046]
The above-described sealing material 25 is applied to a predetermined location by a coating nozzle similarly to the above-described airtightness holding material 22, but a molding method may be adopted instead. That is, the portion of the through-hole 14A is set in a molding die, and the sealing material 25 is injected into the portion to keep the portion where the conducting wire 13 passes airtight. In addition, as the sealing material 25, a material having the same material composition as that of the airtightness holding material 22 may be used.
[0047]
As described above, the sealing material 25 disposed at the portion where the conductive line 13 passes through the through hole 14A performs an airtight maintenance function together with the airtightness maintenance member 22, so that the water vapor from the ink that has passed through the vibration displacement portion 6B is removed. Blocks release to atmosphere. Then, when the water vapor becomes saturated in the closed space 10 and the vapor pressure becomes high, the water vapor no longer passes through the vibration displacement portion 6B, and the evaporation of the water in the ink is suppressed.
[0048]
In the case where a pattern is formed on both surfaces or a circuit is formed in a laminated pattern, through holes are sometimes formed in the head substrate 14 for electrode connection between layers. Therefore, by performing a sealing process for closing the head substrate, a higher air-tightness maintaining function of the head substrate itself is ensured. Therefore, it is possible to reduce the water vapor release of the entire recording head to a level that does not substantially hinder the recording head. Become. The above sealing treatment can be performed by, for example, coating the surface of the head substrate 14 with a polymer material such as silicone gel having excellent viscoelasticity, or potting a through-hole portion.
[0049]
Although the above-described embodiment is a recording head used in an ink jet recording apparatus, the liquid ejecting head according to the present invention is not limited to ink for an ink jet recording apparatus, but includes glue, nail polish, and conductive ink. Liquid (liquid metal) or the like can be ejected.
[0050]
【The invention's effect】
As described above, according to the liquid ejecting head of the present invention, the small gap at the surface abutting portion between the head case and the head substrate is completely sealed by the airtight holding material, so that the liquid communication head communicates with the diaphragm. The space of the head case is in the form of a closed space due to the presence of the airtightness retaining material. Accordingly, when a liquid or a component in the liquid, for example, moisture permeates through the diaphragm in the state of water vapor, and becomes saturated in the closed space to increase the vapor pressure, the water vapor flows into the space further. And the loss of liquid or certain components in the liquid is minimized, and changes in the composition of the liquid can be at substantially harmless levels. In particular, the abutting portion between the head case and the head substrate is finished with high precision flatness on both abutting surfaces. However, complete sealing is achieved by the airtight material, which is advantageous in terms of precision control of parts.
[0051]
Further, when the liquid ejecting head is used for an ink jet recording apparatus, even if the ink jet recording apparatus is paused for a long time, the water content in the ink is not reduced as much as possible, After use of the apparatus, normal ink droplet ejection can be obtained.
[Brief description of the drawings]
FIGS. 1A and 1B are views showing a liquid jet head according to an embodiment of the present invention, wherein FIG. 1A is a sectional view and FIG. 1B is an enlarged sectional view.
FIG. 2 is a plan view of the liquid jet head of the present invention as viewed from a head substrate side.
FIG. 3 is a diagram showing an example of the presence of an airtight material, showing five examples from (A) to (E).
FIGS. 4A and 4B are diagrams of an embodiment in a portion where a conducting wire passes, where FIG. 4A is a plan view and FIG.
FIG. 5 is an exploded perspective view showing a conventional example.
6A and 6B are views showing a conventional example, in which FIG. 6A is a sectional view and FIG. 6B is an enlarged sectional view.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Flow path unit 2 Nozzle opening 3 Nozzle plate 3A Nozzle formation surface 4 Pressure generating chamber 5 Flow path substrate 6 Vibrating plate 6A Island 6B Vibration displacement part 7 Ink flow path 8 Storage chamber, ink storage chamber 9 Head case 10 Space 11 Pressure Generating element 12 Fixed substrate 13 Conducting wire 14 Head substrate 14A Through hole 15 Printed wiring 16 Connector 17 Flexible flat cable 18 Recess 19 for damper 19 External communication path 20 Seal end face 21 Opening 22 Airtight holding material 23 Groove 24 Ridge 25 Sealing material

Claims (10)

A flow path unit having a nozzle opening, a pressure generating chamber communicating with the nozzle opening, a storage chamber for storing liquid supplied to the pressure generating chamber, and a diaphragm closing the opening of the pressure generating chamber and the storage chamber; A head case to which a path unit is attached, a pressure generating element that is housed in a space formed in the head case and applies pressure fluctuation to the pressure generating chamber, and a head substrate that covers an opening in the space of the head case. A liquid ejecting head comprising: a liquid-jet head, wherein an airtight material is present between the head case and the head substrate. 2. The liquid jet head according to claim 1, wherein the airtightness maintaining material is provided between the seal end face formed at a portion of the head case opposite to the flow path unit and the head substrate. 3. 3. The liquid jet head according to claim 1, wherein the airtight material is arranged so as to surround an opening of the space. The liquid jet head according to claim 1, wherein the airtight material is made of a low elastic material. The liquid jet head according to claim 4, wherein the low elasticity material is a gelled material. The liquid jet head according to any one of claims 2 to 4, wherein the hermeticity maintaining material existing between the seal end surface and the head substrate is a molded elastic component. The liquid jet head according to any one of claims 2 to 4, wherein the hermeticity maintaining material existing between the seal end surface and the head substrate is a semi-fluid elastic sealing material. The liquid ejecting head according to any one of claims 1 to 7, wherein a passage opening of the conduction line provided in the head substrate is sealed. The liquid ejecting head according to any one of claims 1 to 8, wherein a sealing process is performed to close a through hole that leaks gas from the head substrate. A liquid ejecting head according to claim 1, wherein the liquid ejecting head is used for an ink jet recording apparatus.

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