JP2004003443A - Fluid machineries, such as pump and accumulator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a diaphragm pump in which a sediment is not accumulated in a liquid chamber of a pump. <P>SOLUTION: A suction opening 18 and a discharge opening 19 are provided on an inner wall 4a. A stroke for sucking liquid from the suction opening 18 into the liquid chamber 9 by reciprocating motion of a diaphragm 7, and a stroke for discharging the liquid in the liquid chamber 9 into the discharge opening 19, are conducted alternately. The suction opening 18 is designed to eject the suction liquid for a circumferential wall 9a in the liquid chamber 9 by being provided at a side wall of a projection end of a check valve 20 for suction secured as projecting from the inner wall 4a of the pump body 1 into the liquid chamber 9a. Therefore, the suction liquid ejected from the suction opening 18 generates a circular flow along the inner wall 9a in the liquid chamber 9 to agitate the inside of the liquid chamber 9 with the circular flow, enabling feed of new liquid always by lessening the liquid accumulation in the liquid chamber 9, and preventing the sediment from settling and agglomerating in the liquid chamber 9 even using the liquid containing sediments such as slurry, etc. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a fluid device such as a bellows pump and an accumulator.
[0002]
[Prior art]
For example, a bellows pump or a diaphragm pump that does not generate particles due to the operation of a pump is used as a pump used for circulating or transferring a chemical solution in various processes such as cleaning of the surface of an IC or a liquid crystal in a semiconductor manufacturing apparatus. (For example, JP-A-3-179184). In addition, since this type of pump generates pulsation due to the reciprocating motion of the bellows, an accumulator is used in combination to reduce the pulsation (for example, JP-A-6-17752 and JP-A-10-196521).
[0003]
[Problems to be solved by the invention]
However, in the above-mentioned bellows type pump, diaphragm type pump, accumulator, etc., in order to prevent a decrease in processing performance such as washing, it is required that the transfer liquid stays in the pump and the accumulator in a small amount, and that a new liquid is constantly supplied. However, particularly in bellows type pumps and accumulators, the suction port of the pump and the inflow port of the accumulator eject suction liquid and inflow liquid into the liquid chamber in a direction parallel to the axial direction (reciprocating direction) of each bellows. As a result, the liquid easily stayed in the stretchable portions of the bellows, and was easily contaminated. In addition, when a liquid containing a substance that precipitates, such as a slurry such as silica, is used as a polishing liquid for chemical mechanical polishing [Chemical Mechanical Polishing (CMP)] of a semiconductor wafer or a hard disk built into a computer, the precipitated substance is used in the pump. Or settled in the accumulator or aggregated, which could affect the life of the pump and the accumulator.
[0004]
An object of the present invention is to solve such a problem, to reduce the stagnation of a liquid inside a pump or an accumulator, to always supply a new liquid, and to reduce a sediment such as a slurry. It is an object of the present invention to provide a fluid device that can prevent a precipitated substance from settling or aggregating inside a pump or an accumulator even when a liquid containing the same is used.
[0005]
[Means for Solving the Problems]
The invention according to claim 1 of the present invention is characterized in that a diaphragm made of a bottomed tubular bellows that can expand and contract in the axial direction is fixed to the bottom wall of the pump body inside the pump body. And a liquid chamber is formed inside the diaphragm, and a suction port and a discharge port are provided on an inner wall of the bottom wall facing the liquid chamber, so that the diaphragm is driven. A fluid device comprising a reciprocating pump configured to alternately perform a process of sucking the liquid from the suction port into the liquid chamber through the expansion port and a process of discharging the liquid in the liquid chamber from the discharge port, The suction port is provided so as to jet the suction liquid toward an inner peripheral wall of the diaphragm in a direction different from the axial direction in the liquid chamber.
[0006]
The invention according to claim 2 is the fluid device according to claim 1, wherein the suction port is fixed to protrude into the liquid chamber from an inner wall of the pump body facing the liquid chamber, and a protruding tip end of the check valve for suction. It is provided on the side surface.
[0007]
According to the first and second aspects of the present invention, since the suction port is provided so as to jet the suction liquid toward the inner peripheral wall of the diaphragm, the suction liquid spouting from the suction port is formed on the inner periphery of the diaphragm. A swirling flow is generated along the swirling flow, and the liquid chamber is stirred by the swirling flow. Therefore, the retention of the liquid in the liquid chamber is reduced so that a new liquid can always be supplied.Also, when a liquid containing a precipitated substance such as a slurry is used, the precipitated substance is prevented from settling or coagulating in the liquid chamber. Can be prevented.
[0008]
The invention according to claim 3 is characterized in that, in the accumulator main body, a diaphragm formed of a bottomed cylindrical bellows which can be expanded and contracted in the axial direction is fixed to a bottom wall of the accumulator main body at a lower end opening peripheral portion thereof. A liquid chamber is provided inside the diaphragm and an air chamber is formed outside, and an inlet and an outlet are provided on an inner wall of the accumulator body facing the liquid chamber. A fluid device comprising an accumulator adapted to be balanced by air pressure in the air chamber, wherein the inflow port flows into an inner peripheral wall of the diaphragm in a direction different from the axial direction in the liquid chamber. It is characterized by being provided to eject liquid.
[0009]
According to a fourth aspect of the present invention, in the fluid device according to the third aspect, a protruding tip end of a discharge check valve fixed so that the inflow port protrudes into the liquid chamber from an inner wall facing the liquid chamber of the accumulator body. It is provided on the side surface.
[0010]
According to the third and fourth aspects of the present invention, since the inflow port is provided so as to eject the inflow liquid toward the inner peripheral wall of the diaphragm, the inflow liquid ejected from the inflow port is formed on the inner periphery of the diaphragm. A swirling flow is generated along the swirling flow, and the liquid chamber is stirred by the swirling flow. Therefore, the retention of the liquid in the liquid chamber is reduced so that a new liquid can always be supplied.Also, when a liquid containing a precipitated substance such as a slurry is used, the precipitated substance is prevented from settling or coagulating in the liquid chamber. Can be prevented.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
One embodiment of a fluid device according to the present invention will be described with reference to FIGS. The fluid device of this embodiment is formed by combining a reciprocating pump P and an accumulator A for reducing the pulsation thereof.
[0012]
In FIG. 1, a pump body 1 of a reciprocating pump P has a cylindrical casing 3 whose upper end is closed by an upper wall 2, and a bottom wall body 4 that closes the open lower end of the casing 3 in an airtight manner. It becomes. A liquid inflow path 5 and a liquid outflow path 6 are formed in the bottom wall 4.
[0013]
In the casing 3, a diaphragm 7 made of a cylindrical bellows having a bottom and capable of expanding and contracting along the direction of the axis B is disposed with the axis B being vertical. The diaphragm 7 is formed of a fluororesin such as PTFE (polytetrafluoroethylene) or PFA (perfluoroalkoxy) having excellent heat resistance and chemical resistance. The inner space of the pump body 1 is separated into a liquid chamber 9 inside the diaphragm 7 and an air chamber 10 outside the diaphragm 7 by being pressed and fixed in an airtight manner on the upper surface of the diaphragm 4.
[0014]
In FIG. 2, the diaphragm 7 is not only in a stretched state, but also in a stretched state in which the mountain-folded portions 71 and the valley-folded portions 72 are alternately formed vertically, and also in FIGS. As shown in (c), even in the contracted state, the lower fold 71b of the upper and lower folds 71a, 71b of each mountain fold 71 is formed to be inclined downward toward the axis B. . The inclination angle α of the lower fold-shaped portion 71b under the contracted state of each mountain folded portion 71, that is, the angle α formed with the horizontal line L orthogonal to the axis B is 1 to 45 °, more preferably 5 to 15 °. . However, the upper fold 71a of each mountain fold 71, when contracted, is formed so as to be inclined downward at the same inclination angle as the lower fold 71b as shown in FIG. It is optional to form it horizontally in parallel with a horizontal line L orthogonal to the axis B as shown in FIG. 6B, or to form it ascending upward toward the axis B as shown in FIG. is there. In addition, although the corner of each fold part of each mountain fold part 71 and the valley fold part 72 is provided with a corner in the illustrated example, a radius (two-dot chain line R) may be provided at the corner.
[0015]
In FIG. 1, the pump body 1 is provided with a reciprocating drive device 22 for driving the diaphragm 7 to expand and contract. The reciprocating drive device 22 is configured such that a cylinder 11 is formed on the upper surface side of the upper wall 2 of the pump body 1 so that the axis thereof coincides with the axis B of the diaphragm 7, and the piston 12 that reciprocates in the cylinder 11 is formed on the upper wall. The diaphragm 7 is connected to the center of the closed upper end 7b of the diaphragm 7 by a piston rod 13 penetrating therethrough. Pressurized air supplied from a pressurized air supply device (not shown) such as a compressor is supplied to the inside of the cylinder 11 and the air chamber 10 through air holes 14 and 15 formed in the cylinder 11 and the upper wall 2 respectively. They are supplied alternately. That is, the proximity sensors 16a and 16b are attached to the cylinder 11, while the sensor sensing members 17 are attached to the piston 12, and the sensor sensing members 17 alternately approach the proximity sensors 16a and 16b as the piston 12 reciprocates. Thus, the supply of the pressurized air supplied from the pressurized air supply device into the cylinder 11 and the supply to the air chamber 10 are automatically and alternately switched. As the piston 12 reciprocates, the diaphragm 7 made of bellows moves and expands and contracts.
[0016]
A suction port 18 and a discharge port 19 are provided on an inner wall 4a of the bottom wall 4 of the pump body 1 facing the liquid chamber 9 so as to communicate with the inflow path 5 and the outflow path 6, respectively. The inner wall 4a is formed so as to have a downward inclination of 1 to 45 °, more preferably 5 to 15 ° toward the discharge port 19, and the discharge port 19 is formed at the lowest position of the inner wall 4a which is preferably formed in a conical shape. Should be formed. However, it does not matter that the discharge port 19 is located on the axis B of the diaphragm 7 or at a position deviated from the axis B.
[0017]
The suction port 18 is different from the direction of the axis B in the liquid chamber 9 on the side surface of the protruding tip of the check valve 20 for suction fixed to the bottom wall body 4 so as to protrude into the liquid chamber 9 from the inner wall 4a. The suction liquid is ejected toward the circumferential wall 9a in the direction, that is, the inner peripheral wall of the diaphragm 7 made of a bellows in the illustrated example.
[0018]
As shown in FIG. 3, the check valve 20 for suction includes a cylindrical valve casing 201 and a ball valve body 202, and the valve casing 201 is fixed to the bottom wall body 4 with its axis D vertical. The illustrated suction check valve 20 has a structure in which ball valves 202 are provided in two stages, upper and lower. The valve casing 201 is divided into upper and lower parts, and is composed of a first valve casing 201a and a second valve casing 201b. A first ball valve body 202a and a second ball valve body 202b are respectively provided in the first valve casing 201a and the second valve casing 201b. The interior is decorated.
[0019]
The first valve casing 201a is formed in a cylindrical shape and has an inlet 203 opened at the lower end, and the male screw 204 provided on the outer periphery thereof is screwed into the female screw 205 provided on the bottom wall body 4 so that its axis D is vertical and the bottom wall is formed. It is fixed to the body 4.
The second valve casing 201b is formed in a cylindrical shape having a diameter larger than that of the first valve casing 201a, has the above-described suction port 18 opened at the upper side surface, and is provided with a male screw 207 at the outer periphery of the lower end. In the second valve casing 201b, the male screw 207 is screwed into a female screw 208 provided on the bottom wall 4 above the female screw 205 on the upper side of the female screw 205 and having a diameter larger than the inner diameter of the female screw 205. 209 is fixed to the bottom wall 4 so as to project concentrically with the first valve casing 201a and into the liquid chamber 9 by screwing into the male screw 210 at the upper end of the outer periphery of the first valve casing 201a. At this time, a valve seat body 212 having a valve seat 211 is incorporated between an upper end of the first valve casing 201a and an inner peripheral lower end of the second valve casing 201b. A valve seat 213 is provided at an open end of the inflow passage 5 facing the inlet 203 at the lower end of the first valve casing 201a. The first and second valve casings 201a and 201b and the first and second ball valve bodies 202a and 202b are formed of a fluororesin, such as PTFE and PFA, having excellent heat resistance and chemical resistance similar to the material of the diaphragm 7. I have.
[0020]
At this time, the first ball valve body 202a closely adheres to the valve seat 213 in the first valve casing 201a by its own weight, and the second ball valve body 202b closely adheres to the valve seat 211 in the second valve casing 201b by its own weight. To prevent liquid backflow. At the time of sucking the liquid, the first and second ball valve bodies 202a and 202b are separated upward from the valve seats 213 and 211 to open the valve, and the liquid from the inflow passage 5 is provided on the inner periphery of the first valve casing 201a. The suction port of the second valve casing 201b passes between the vertical groove 214 and the first ball valve body 202a and between the vertical groove 215 provided on the inner periphery of the second valve casing 201b and the second ball valve body 202b. Ejected from 18 toward the circumferential wall 9 a in the liquid chamber 9.
[0021]
At this time, the suction port 18 is provided so as to jet the suction liquid toward the circumferential wall 9a in the liquid chamber 9 in a direction different from the direction of the axis B, so that the liquid jetted from the suction port 18 In FIG. 4, the flow direction is swirled along the circumferential wall 9a in the liquid chamber 9 as indicated by an arrow S, and this swirling flow eliminates stagnation and aggregation in the liquid chamber 9, especially at the stretchable portion of the diaphragm 7. Can always be replaced with a new solution. 4 shows a state of a process of extending the diaphragm 7 and sucking the liquid, FIG. 5 shows a state of a process of contracting the diaphragm 7 and discharging the liquid, and FIG. 6 is a sectional view taken along line HH in FIG. It is. 4 and 5 show a suction check valve 20 having only one ball valve body 202 in a single valve casing 201.
[0022]
On the other hand, in the accumulator A, as shown in FIG. 1, the accumulator main body 25 includes a cylindrical casing 27 whose upper end is closed by an upper wall 26, and a bottom wall body that hermetically closes the open lower end of the casing 27. 28.
[0023]
In the casing 27, a diaphragm 29 made of a bottomed cylindrical bellows which can be expanded and contracted along the direction of the axis C is disposed with the axis C being vertical. The diaphragm 29 is formed of a fluororesin such as PTFE and PFA which are excellent in heat resistance and chemical resistance, and its lower end opening peripheral edge 29a is pressed and fixed to the upper surface of the bottom wall 28 by an annular fixing plate 30 in an airtight manner. Thereby, the internal space of the accumulator main body 25 is separated into the liquid chamber 31 inside the diaphragm 29 and the air chamber 32 outside the diaphragm 29.
[0024]
A liquid inflow path 33 and an outflow path 34 are formed in the bottom wall 28 of the accumulator body 25. An inflow port 23 and an outflow port 24 are provided on an inner wall 28a of the bottom wall 28 facing the liquid chamber 31 so as to communicate with an inflow path 33 and an outflow path 34, respectively. The inflow passage 33 is connected to the downstream end side of the outflow passage 6 of the reciprocating pump P through a joint 65 in a communicating manner.
[0025]
As in the case of the inner wall 4a of the liquid chamber of the reciprocating pump P, the inner wall 28a of the liquid chamber 31 of the accumulator A has a downward inclination of 1 to 45 °, more preferably 5 to 15 ° toward the outlet 24, as in the case of the inner wall 4a of the reciprocating pump P. The outlet 24 may be formed at the lowest position of the inner wall 28a which is formed in a bent shape, preferably a conical shape. However, it does not matter whether the outlet 24 is located on the axis C of the diaphragm 29 or is located at a position deviated from the axis C.
[0026]
As in the case of the diaphragm 7 of the reciprocating pump P, as shown in FIG. 7, the diaphragm 29 has a stretchable portion formed by continuously forming the mountain fold portions 291 and the valley fold portions 292 of the diaphragm 29 alternately up and down. In the expanded state as well as in the contracted state as shown in FIGS. 7A, 7B and 7C, the lower folds of the upper and lower folds 291a and 291b of each mountain fold 291. The portion 291b is formed so as to be inclined downward toward the axis C. The inclination angle α of the lower fold portion 291b under the contracted state of each of the mountain fold portions 291 described above, that is, the angle α formed with the horizontal line L orthogonal to the axis C is 1 to 45 °, preferably 5 to 15 °. And However, the upper fold portion 291a of each mountain fold portion 291 is formed to have a downward inclination at the same inclination angle as the lower fold portion 291b as shown in FIG. It is optional to form it horizontally in parallel with a horizontal line L orthogonal to the axis C as shown in FIG. 6B, or to form it to be inclined upward toward the axis C as shown in FIG. is there. In the illustrated example, corners of the respective fold portions of the mountain fold portions 291 and the valley fold portions 292 are provided with corners, but the corners may be provided with a radius (two-dot chain line R).
[0027]
1 and 8, the inlet 23 of the inner wall 28a of the liquid chamber 31 is provided at the projecting tip of the discharge check valve 21 fixed to the bottom wall 28 so as to protrude into the liquid chamber 31 from the inner wall 28a. On the side surface, the inflow liquid is ejected toward the circumferential wall 31a in the liquid chamber 31 in a direction different from the direction of the axis C, that is, the inner peripheral wall of the diaphragm 29 made of bellows in the illustrated example.
[0028]
The discharge check valve 21 has the same structure as that of the suction check valve 20. As shown in FIG. 8, the discharge check valve 21 includes a cylindrical valve casing 220 and a ball valve body 221, and the valve casing 220 is fixed to the bottom wall body 28 with its axis G being vertical. The valve casing 220 is divided into upper and lower parts and includes a first valve casing 220a and a second valve casing 220b. The first valve casing 220a and the second valve casing 220b respectively have a first ball valve body 221a and a second ball valve body 221b. The interior is decorated.
[0029]
The first valve casing 220a is formed in a cylindrical shape and has an inlet 223 opened at a lower end, and a male screw 224 provided on the outer periphery thereof is screwed into a female screw 225 provided on the bottom wall body 28 so that its axis G is lengthened so that the bottom wall is formed. It is fixed to the body 28.
The second valve casing 220b is formed in a cylindrical shape having a diameter larger than that of the first valve casing 220a. The second valve casing 220b has the inflow port 23 opened at a side surface at an upper end, and a male screw 227 is provided at an outer periphery at a lower end thereof. In the second valve casing 220b, the male screw 227 is screwed into a female screw 228 provided on the upper stage side of the female screw 225 of the bottom wall body 28 with a diameter larger than the inner diameter of the female screw 225, and a female screw provided on a lower end inner periphery thereof. 229 is fixed to the bottom wall body 28 so as to project concentrically with the first valve casing 220a and into the liquid chamber 31 by screwing into the male screw 230 at the upper end of the outer periphery of the first valve casing 220a. At that time, a valve seat body 231 having a valve seat 230 is incorporated between an upper end of the first valve casing 220a and an inner peripheral lower end of the second valve casing 220b. A valve seat 232 is provided at the open end of the inflow passage 33 facing the inlet 223 at the lower end of the first valve casing 220a.
[0030]
At this time, the first ball valve body 221a is in close contact with the valve seat 232 in the first valve casing 221a by its own weight, and the second ball valve body 221b is in close contact with the valve seat 230 in the second valve casing 220b by its own weight. To prevent liquid backflow. At the time of discharging the liquid into the liquid chamber 31, the first and second ball valve bodies 221a and 221b are respectively opened upward by being separated from the valve seats 232 and 230, and the liquid from the reciprocating pump P is supplied to the first valve casing 220a. The second valve passes between the vertical groove 233 provided on the inner circumference and the first ball valve body 221a and between the vertical groove 234 provided on the inner circumference of the second valve casing 220b and the second ball valve body 221b. The liquid is ejected from the inlet 23 of the casing 220b toward the circumferential wall 31a in the liquid chamber 31.
[0031]
At this time, since the inflow port 23 is provided so as to jet the inflow liquid toward the circumferential wall 31 a in the liquid chamber 31 in a direction different from the direction of the axis C, the liquid jetted from the inflow port 23 is provided. Swirls along the circumferential wall 31a in the liquid chamber 31. This swirling flow can eliminate stagnation and aggregation in the liquid chamber 31, especially at the expansion and contraction portions of the diaphragm 29, and can be constantly replaced with new liquid. it can.
The first and second valve casings 220a and 220b and the first and second ball valve bodies 221a and 221b are made of fluorine such as PTFE and PFA which are excellent in heat resistance and chemical resistance similarly to those of the suction check valve 20. Molded with resin.
[0032]
As shown in FIG. 9, an air port 35 is formed near the center of the outer surface of the upper wall 26 of the casing 27 of the accumulator A, and a valve case 37 with a flange 36 is fitted into the air port 35, 36 is removably fastened and fixed to the outside of the upper wall 26 with bolts 38 and the like.
[0033]
An intake port 39 and an exhaust port 40 are formed in the valve case 37 in parallel. When the capacity of the liquid chamber 31 increases beyond a predetermined range, air having a pressure equal to or higher than the maximum pressure value of the transfer liquid is supplied to the air supply port 39 to fill the air chamber 32 with the air supply port 39. An automatic air supply valve mechanism 41 for increasing the pressure is provided. The exhaust port 40 is provided with an automatic exhaust valve mechanism 42 that exhausts air from the air chamber 32 and lowers the sealing pressure in the air chamber 32 when the capacity of the liquid chamber 31 decreases beyond a predetermined range.
[0034]
The automatic air supply valve mechanism 41 includes an air supply valve chamber 43 formed in the valve case 37 in communication with the air supply port 39, and the air supply port 39 slidable along the axial direction in the valve chamber 43. An air supply valve body 44 that opens and closes, a spring 45 that constantly urges the valve body 44 to a closed position, and a valve seat 46 of the air supply valve body 44 at the inner end are provided. It has a guide member 48 having a through hole 47 communicating with the chamber 32 and screwed into the valve case 37, and a valve push rod 49 slidably inserted into the through hole 47 of the guide member 48. Do it. In a state where the liquid pressure in the liquid chamber 31 is the average pressure and the diaphragm 29 is at the reference position S, the air supply valve body 44 is in close contact with the valve seat 46 of the guide member 48 to close the air supply port 39 and The end 49a of the valve push rod 49 facing the air chamber 32 is separated from the closed upper end 29b of the diaphragm 29 by the stroke E.
[0035]
On the other hand, the automatic exhaust valve mechanism 42 has an exhaust valve chamber 50 formed in the valve case 37 so as to communicate with the exhaust port 40, and opens and closes the exhaust port 40 slidably along the axial direction in the valve chamber 50. Exhaust valve body 51, an exhaust valve rod 53 provided with the valve element 51 at the front end, and a flange 52 at the rear end, and a through hole through which the exhaust valve rod 53 is screwed and fixed in the exhaust valve chamber 50. A spring receiver 55 having a hole 54, a cylindrical slider 56 slidably inserted into the rear end side of the exhaust valve rod 53 and being prevented from being removed by a flange 52, an exhaust valve body 51 and a spring receiver 55 , And an opening spring 58 disposed between the spring receiver 55 and the slider 56. The inner diameter of the through hole 54 of the spring receiver 55 is larger than the shaft diameter of the exhaust valve rod 53, and a gap 59 is formed therebetween. The exhaust valve chamber 50 and the air chamber 32 communicate with each other through the gap 59. I have. When the diaphragm 29 is at the reference position S, the exhaust valve body 51 closes the exhaust port 40 and the rear flange 52 at the rear end of the exhaust valve rod 53 is separated from the inner surface of the closed end 56a of the slider 56 by a stroke F. are doing.
[0036]
The air chamber side end of the valve case 37 is extended in the direction inside the air chamber 32 as shown by a virtual line 60 in FIG. 9, and at this extended end, the diaphragm 29 exceeds a predetermined stroke E in the direction in which the liquid chamber 31 expands. A stopper 61 is provided for restricting further movement of the diaphragm 29 when the valve push rod 49 is moved until the valve push rod 49 is operated.
[0037]
Next, the operation of the reciprocating pump P and the accumulator A having the above configuration will be described.
Now, when pressurized air is supplied from a pressurized air supply device (not shown) such as a compressor into the cylinder 11 through the air hole 14, the piston 12 moves up in the x direction in FIG. The transfer liquid in the inflow path 5 is ejected from the suction port 18 to the circumferential wall 9a in the liquid chamber 9 through the check valve 20 for suction. At this time, the suction liquid ejected from the suction port 18 generates a swirling flow along the circumferential wall 9a in the liquid chamber 9, and the liquid chamber is stirred by the swirling flow, so that the liquid stays in the liquid chamber 9. Therefore, it is possible to always supply a new liquid, and when a liquid containing a precipitate such as a slurry is used, precipitation of the precipitate in the liquid chamber 9 and aggregation thereof can be prevented well. When the pressurized air is supplied into the air chamber 10 through the air hole 15 and exhausted from the air hole 14, the piston 12 descends in the y direction in FIG. The transfer liquid in 9 is discharged from the discharge port 19. As described above, the diaphragm 7 expands and contracts by the reciprocating motion of the piston 12 in the cylinder 11, so that the suction stroke from the suction port 18 and the discharge stroke to the discharge port 19 are alternately repeated to perform a predetermined reciprocating motion. A pump action is performed. When the transfer liquid is fed toward a predetermined portion by the operation of the reciprocating pump P, the reciprocating pump discharge pressure generates pulsation due to repetition of peaks and valleys.
[0038]
Here, the transfer liquid discharged from the inside of the liquid chamber 9 of the reciprocating pump P through the discharge port 19 passes through the inflow path 33 and the inflow port 23 of the accumulator A and flows from the inflow port 23 of the discharge check valve 21 to the liquid chamber. The liquid is sprayed toward a circumferential wall 31 a in the liquid chamber 31, temporarily stored in the liquid chamber 31, and then flows out of the outlet 24 to the outflow path 34. At this time, when the discharge pressure of the transfer liquid is at the peak of the discharge pressure curve, the transfer liquid expands and deforms the diaphragm 29 so as to increase the capacity of the liquid chamber 31, so that the pressure is absorbed. At this time, the flow rate of the transfer liquid flowing out of the liquid chamber 31 is smaller than the flow rate supplied from the reciprocating pump P.
As described above, the transfer liquid from the inflow port 23 is jetted toward the circumferential wall 31a in the liquid chamber 31. Therefore, the inflow liquid generates a swirling flow along the circumferential wall 31a in the liquid chamber 31. The inside of the liquid chamber 31 is stirred by the swirling flow. Therefore, the retention of the liquid in the liquid chamber 31 is reduced so that a new liquid can always be supplied. In addition, when a liquid containing a precipitated substance such as a slurry is used, the precipitated substance precipitates in the liquid chamber 31, Aggregation can be prevented well.
[0039]
Further, when the discharge pressure of the transfer liquid reaches the valley of the discharge pressure curve, the pressure of the transfer liquid becomes lower than the sealing pressure in the air chamber 32 compressed due to the elongation deformation of the diaphragm 29 of the accumulator A, The diaphragm 29 contracts and deforms. At this time, the flow rate flowing out of the liquid chamber 31 is larger than the flow rate of the transfer liquid flowing into the liquid chamber 31 from the reciprocating pump P. The pulsation is absorbed and reduced by the repetitive operation, that is, the change in the capacity of the liquid chamber 31.
[0040]
By the way, if the discharge pressure from the reciprocating pump P rises and fluctuates during the above operation, the capacity of the liquid chamber 31 is increased by the transfer liquid, and the diaphragm 29 is greatly extended and deformed. When the amount of extension deformation of the diaphragm 29 exceeds the predetermined range E, the closed upper end portion 29b of the diaphragm 29 pushes the valve push rod 49 toward the valve chamber. As a result, the air supply valve body 44 in the automatic air supply valve mechanism 41 is opened against the spring 45, and a high air pressure is supplied into the air chamber 32 through the air supply port 39, and the sealing pressure in the air chamber 32 is reduced. To rise. Therefore, the amount of extension deformation of the diaphragm 29 beyond the stroke E is restricted, and the capacity of the liquid chamber 31 is prevented from being excessively increased. At this time, if the stopper 61 is provided at the air chamber side end of the valve case 37, the closed upper end portion 29b of the diaphragm 29 abuts on the stopper 61, and it is possible to reliably prevent the diaphragm 29 from being excessively expanded and deformed. Therefore, it is advantageous in preventing damage. Then, since the diaphragm 29 contracts toward the reference position S with an increase in the sealing pressure in the air chamber 32, the valve push rod 49 separates from the closed upper end portion 29b of the diaphragm 29, and the air supply valve body 44 is closed again. Returning to the position, the sealing pressure in the air chamber 32 is fixed in the adjusted state.
[0041]
On the other hand, when the discharge pressure from the reciprocating pump P fluctuates, the capacity of the liquid chamber 31 is reduced by the transfer liquid, and the diaphragm 29 is largely contracted and deformed. When the amount of contraction deformation of the diaphragm 29 exceeds a predetermined range F, the slider 56 of the automatic exhaust valve mechanism 42 is biased by the opening spring 58 as the closed upper end 29b of the diaphragm 29 moves in the contraction direction b. The diaphragm 29 moves in the contraction direction b, and the inner surface of the closed end 56 a of the slider 56 engages with the flange 52 of the exhaust valve rod 53. As a result, the exhaust valve rod 53 moves in the direction b and the exhaust valve body 51 opens the exhaust port 40, so that the sealed air in the air chamber 32 is discharged from the exhaust port 40 into the atmosphere, and The filling pressure decreases. Therefore, the amount of contraction deformation of the diaphragm 29 beyond the stroke F is regulated, and the capacity of the liquid chamber 31 is prevented from being excessively reduced. Since the diaphragm 29 extends toward the reference position S with the decrease in the sealing pressure in the air chamber 32, the slider 56 is pushed by the closed upper end 29b of the diaphragm 29 and moves in the direction a while opening the spring 58. And the exhaust valve body 51 closes the exhaust port 40 again by the urging action of the closing spring 57. Thereby, the sealing pressure in the air chamber 32 is fixed in the adjusted state. As a result, the pulsation can be efficiently absorbed and the pulsation width can be suppressed to be small irrespective of the fluctuation of the discharge pressure from the liquid chamber 9 of the reciprocating pump P.
[0042]
In the accumulator of the above embodiment, the air chamber 32 is provided with an automatic pressure adjusting mechanism including an automatic air supply valve mechanism 33 and an automatic exhaust valve mechanism 34. Is not always necessary. The pressure adjustment may be performed manually.
[0043]
As in the above embodiment, in the reciprocating pump P, the suction port 18 is formed on the side surface of the protruding tip of the suction check valve 20 so that the suction liquid is in a direction different from the direction of the axis B in the liquid chamber 9. Since it is provided so as to be ejected toward the circumferential wall 9a, the liquid ejected into the liquid chamber 9, particularly the liquid containing the precipitated substance such as slurry, also flows while rotating along the circumferential wall 9a, and the liquid chamber 9 The inner circumferential wall 9a, especially in the above-described embodiment, does not stagnate at the stretched portion of the diaphragm 7 made of bellows, and always exhibits the action of being replaced with a new liquid. Also in the accumulator A, the inflow port 23 is formed on the side surface of the protruding tip of the discharge check valve 21 so that the liquid is directed toward the circumferential wall 31 a in a direction different from the direction of the axis C in the liquid chamber 31. Since the liquid is ejected, the liquid ejected into the liquid chamber 31 flows while rotating along the circumferential wall 31a, and is constantly replaced with a new liquid without causing stagnation.
[0044]
In the above embodiment, in the reciprocating pump P, the suction port 18 is formed on the side surface of the protruding tip of the suction check valve 20, but the suction port 18 is formed in the inner wall 4a of the pump body 1 as shown in FIG. It may open obliquely upward so as to eject the liquid toward the circumferential wall 9a in the liquid chamber 9. Also in the accumulator A, the outlet 23 is formed on the inner wall 28a of the accumulator body 25 itself toward the circumferential wall 31a in the liquid chamber 31 instead of forming the outlet 23 on the side of the protruding tip of the discharge check valve 21. It may open obliquely upward so as to squirt.
[0045]
In the above embodiment, since the diaphragm 7 of the reciprocating pump P and the diaphragm 29 of the accumulator A are provided with their axes B and C being vertical (vertical), a liquid containing a sedimented substance such as a slurry may be used. It is possible to reduce as much as possible that the sedimentary substance stays in the stretchable portions of the diaphragms 7 and 29, but the present invention is not limited to this, and the diaphragm 7 of the reciprocating pump P and the diaphragm 29 of the accumulator A are respectively provided. The reciprocating pump P and the accumulator A may be of a type in which the axes B and C are set horizontally (horizontally).
In addition, the check valve 20 for suction and the check valve 21 for discharge of the reciprocating pump P have the valve casings 201 and 220 set vertically, respectively, and the valve seats 211 (213) and 230 (232) in the valve casings 201 and 220 respectively. ), A self-weight closing mechanism that does not use a ball urging spring is adopted, in which the ball valve bodies 202 and 221 adhere to each other by their own weight to prevent backflow of the liquid, so that a liquid containing a sedimented substance such as slurry is used. In this case, it is also advantageous that the sedimentary substance can be prevented from staying or agglomerating in the respective check valves 20 and 21, but the present invention is not limited to this. The stop valve 20 and the discharge check valve 21 may be used.
[0046]
If the suction check valve 20 and the discharge check valve 21 are each provided with the ball valve bodies 202 and 221 in two upper and lower stages as in the above-described embodiment and have a double closed structure, reliable quantitative determination of the transfer liquid can be achieved. The valve casings 201 and 220 are advantageously divided into upper and lower parts so that the ball valve bodies 202 and 221 can be easily assembled in two upper and lower stages, respectively. 201b and 220b, but the invention is not limited to this. A single ball valve body 202 may be provided, and the valve casings 201 and 220 may be formed as a single body. (See FIG. 4).
[0047]
In the reciprocating pump P, when the inner wall 4a of the liquid chamber 9 is formed so as to be inclined downward toward the discharge port 19, the liquid containing the precipitated substance such as slurry also flows along the downward inclined surface of the inner wall 4a. Advantageously, it is possible to smoothly discharge toward the discharge port 19 and prevent the sedimentary substance from accumulating and solidifying on the inner wall 4a, but the inner wall 4a may be flat. Similarly, also in the accumulator A, since the inner wall 28a of the liquid chamber 31 is formed so as to be inclined downward toward the outflow port 24, the liquid containing the sedimented substance such as the slurry also falls on the downward inclined surface of the inner wall 28a. It is possible to smoothly discharge along the outflow port 24 to prevent the sedimentary substance from accumulating and solidifying on the inner wall 28a, but the inner wall 28a may be flat.
[0048]
In the reciprocating pump P, not only when the expanded and contracted portions formed by continuously forming the mountain-folded portions 71 and the valley-folded portions 72 of the diaphragm 7 alternately up and down are in the expanded state but also in the contracted state, Since the lower fold 71b of the upper and lower folds 71a and 71b is formed so as to be inclined downward toward the axis B, a transfer liquid containing a sedimentary substance such as a slurry is used as the transfer liquid. Also in this case, the sedimentary substance easily slides down along the downwardly inclined surface of the inner surface of the fold 71b under the mountain fold 71 in the diaphragm 7, so that the sedimentary substance stagnates and accumulates on the inner surface of the fold 71b. Therefore, the sedimentation and aggregation of the sediment in the reciprocating pump P can be more effectively prevented together with the prevention of the sedimentation of the sediment on the conical inner wall 4a. Similarly, in the accumulator A, even when a liquid containing a precipitation substance such as a slurry is used as the transfer liquid, the precipitation substance in the diaphragm 29 is a downward slope of the inner surface of the fold 291b below the mountain fold 291. Along the inner surface of the fold-shaped portion 291b to prevent the stagnation and accumulation of the sediment on the inner surface of the conical inner wall 28a. Precipitation and aggregation of the precipitate can be more effectively prevented. However, it is not necessarily limited to the diaphragms 7 and 29 having such a shape.
[0049]
Note that the fluid device of the present invention is not limited to the reciprocating pump P provided with the accumulator A for preventing pulsation of the reciprocating pump P as in the above-described embodiment, and is constituted by the reciprocating pump P alone as shown in FIG. It goes without saying that the same can be applied to the object. In this case, the configuration is the same as that of the reciprocating pump P, except that the reciprocating pump P is configured alone and the check valve for discharge 21 is externally attached to the downstream end of the discharge path 6. The same members are denoted by the same reference numerals and description thereof will be omitted. More specifically, the present invention is not limited to liquids containing precipitated substances such as slurries, but can also be applied to ultrapure water or chemicals having a severe purity that prevents stagnation.
[0050]
【The invention's effect】
According to the present invention, in the reciprocating pump or the accumulator, the liquid ejected from the suction port or the inlet generates a swirling flow along the inner peripheral wall of the diaphragm, and the swirling flow agitates the liquid chamber. The new product can always supply new liquid by eliminating stagnation of the liquid, and can effectively prevent the precipitated substance from settling in the liquid chamber and coagulating when using a liquid containing a precipitated substance such as a slurry. Play.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional front view of a reciprocating pump and an accumulator of a fluid device.
FIG. 2 is an enlarged sectional view of a telescopic portion of a diaphragm of the reciprocating pump.
FIG. 3 is an enlarged sectional view of a suction check valve of the reciprocating pump.
FIG. 4 is a cross-sectional view showing a flow state of a liquid in a suction stroke of a reciprocating pump.
FIG. 5 is a cross-sectional view showing a flow state of a liquid in a discharge stroke of a reciprocating pump.
FIG. 6 is a sectional view taken along line HH in FIG. 5;
FIG. 7 is an enlarged sectional view of a telescopic portion of a diaphragm of the accumulator.
FIG. 8 is an enlarged sectional view of a discharge check valve of a reciprocating pump provided in the accumulator.
FIG. 9 is an enlarged vertical sectional front view of the automatic pressure adjusting mechanism of the accumulator.
FIG. 10 is a cross-sectional view of a main part of a reciprocating pump showing another embodiment.
FIG. 11 is an overall vertical sectional front view of a reciprocating pump showing still another embodiment.
[Explanation of symbols]
P reciprocating pump
B Pump body axis
1 Pump body
4 Bottom wall of reciprocating pump
4a Inner wall
5 Inflow path of reciprocating pump
6 Outflow path of reciprocating pump
7 Reciprocating pump diaphragm
9 Reciprocating pump liquid chamber
18 Suction port
19 Discharge port
20 Check valve for suction
21 Check valve for discharge
A accumulator
C Accumulator body axis
23 Inlet of accumulator
24 Accumulator outlet
25 Accumulator body
29 Accumulator diaphragm
31 Liquid chamber of accumulator
32 Accumulator air chamber
33 Accumulator inflow path
34 Accumulator Outflow

Claims (4)

Inside the pump body, a diaphragm made of a cylindrical bellows with a bottom that can be expanded and contracted in the axial direction is fixed at the lower end opening peripheral edge to the bottom wall of the pump body so that the diaphragm moves and expands and contracts. A liquid chamber is provided inside the liquid crystal chamber, and a suction port and a discharge port are provided on an inner wall of the bottom wall facing the liquid chamber, and the liquid chamber enters the liquid chamber from the suction port by the drive expansion and contraction of the diaphragm. A fluid device comprising a reciprocating pump configured to alternately perform a step of sucking a liquid and a step of discharging the liquid in the liquid chamber from a discharge port,
A fluid device, wherein the suction port is provided so as to eject a suction liquid toward an inner peripheral wall of the diaphragm in a direction different from the axial direction in the liquid chamber. 2. The fluid device according to claim 1, wherein the suction port is provided on a side surface of a protruding distal end portion of the suction check valve fixed so as to protrude into the liquid chamber from an inner wall of the pump body facing the liquid chamber. 3. Inside the accumulator main body, a diaphragm made of a bottomed cylindrical bellows that can be expanded and contracted in the axial direction is fixed to the bottom wall of the accumulator main body with a lower end opening peripheral edge thereof, and a liquid chamber is provided inside the diaphragm. An air chamber is provided on the outside, and an inlet and an outlet are provided on an inner wall of the accumulator body facing the liquid chamber, and the liquid pressure in the liquid chamber is balanced by the air pressure in the air chamber. Fluid device comprising an accumulator as described above,
The fluid device, wherein the inflow port is provided so as to eject the inflow liquid toward an inner peripheral wall of the diaphragm in a direction different from the axial direction in the liquid chamber. 4. The fluid device according to claim 3, wherein the inflow port is provided on a side surface of a protruding distal end of a discharge check valve fixed to protrude into the liquid chamber from an inner wall of the accumulator body facing the liquid chamber. 5.

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