JP2003344043A - Scanner-retaining apparatus and scanning probe microscope - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To restrain amplification in the inclination of a scanner fixing stand due to the backlash and deviation of a slide rail, and the vibration of the scanner fixing stand due to external factors. <P>SOLUTION: A scanner support member (SU) is composed of a piezoelectric body where a tip section retaining a probe (54) or a workpiece (W) is composed as a free end, and comprises a scanner (52) that can be stretched in a Z direction where the tip section can travel in the directions of X and Y axes, a slider (47) for supporting the base edge section of the scanner (52), and a slide base (36) for slidably supporting the slider (47). The scanner-retaining apparatus comprises a slide surface (36d) that is vertical to the direction of Z axis while the slider (47) is in contact with the slide base (36), and the scanner support member (SU) where the tip of the probe (54) and the surface of the workpiece (W) are arranged nearly at the same positions to the direction of the Z axis. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to STM (Scanning).
Tunneling Microscope), A
FM (Atomic Force Microscope),
UHV (Ultra High Vacuum) -STM (Ultra High Vacuum Scanning Tunnel Microscope), UHV (Ultra High Vacuu
m) -AFM (Ultra High Vacuum Atomic Force Microscope) and other scanning probe microscopes (SPM: Scanning Probe Microscope)
In particular, the present invention relates to a scanner holding device and a scanning probe microscope that reduce the amount of displacement of the scanner tip due to the inclination of the scanner support member when the scanner is roughly moved and reduce the amplitude of the scanner tip due to the vibration of the scanner support member. Regarding

[0002]

2. Description of the Related Art FIGS. 16A and 16B are explanatory views of a scanner portion of a conventional SPM (scanning probe microscope) provided with X and Y sliders, FIG. 16A being a partial sectional view, and FIG. 16B being FIG. 16A.
It is the figure seen from XVIB-XVIB. 17A and 17B are explanatory views of a scanner portion of an SPM having a conventional plane slider, FIG. 17A is a partial cross-sectional view, and FIG. 17B is a view seen from XVIIB of FIG. 17A. In order to facilitate understanding of the following description, in the drawings, the front-back direction is the X-axis direction, the left-right direction is the Y-axis direction, and the up-down direction is the Z-axis direction, and arrows X, -X, Y, -Y, The directions indicated by Z and -Z are indicated as front, rear, right, left, upper, lower, respectively.
Alternatively, the front side, the rear side, the right side, the left side, the upper side, and the lower side.
In addition, in the figure, "○" in "○" means an arrow from the back of the paper to the front, and "○" in "○" indicates the front of the paper. Shall mean the arrow from to the back.

Conventional SPM (Scanning Probe Microscop)
e, a scanner holding device of a scanning probe microscope) as a mechanism for performing coarse movement at the time of inspecting a sample, one using X and Y sliders (coarse movement mechanism shown in FIG. 16) and one using a plane slider (coarse movement shown in FIG. 17). Dynamic mechanism) is known.

(Coarse movement mechanism shown in FIG. 16) In FIG. 16, an X slide base 01 is fixedly supported by an SPM main body (not shown). A pair of X slide rails 02 parallel to the X axis are provided at both ends of the X slide base 01 in the Y axis direction.
Is fixedly supported, and the X slide base 01 has an X
One end of the slider tension spring 03 is fixedly supported. The other end of the X slider tension spring 03 is fixedly supported by the X slider 04, and the X slider tension spring 03 pulls the X slider toward the X slide base 01 side. Therefore, the X-slider 04 is positioned by abutting on the X-slide rail 02, and moves on the X-slide rail 02 along the X-axis.
It is supported so as to be slidable in the axial direction. The X slider unit SUx is configured by the members indicated by the reference numerals 01 to 04.

A Y slide base 06, which moves integrally with the X slider 04, is fixed to the lower surface of the X slider 04. A pair of Y slide rails 07 parallel to the Y axis are fixedly supported at both ends of the Y slide base 06 in the X axis direction. One end of a Y slider tension spring 08 is fixedly supported at the center of the Y slide base 06. The other end of the Y slider tension spring 08 has a Y slider 0
9 is fixed and supported, and a Y slider tension spring 08 pulls the Y slider 09 toward the Y slide base 06 side. Therefore, the Y slider 09 is positioned in contact with the Y slide rail 07, and is supported so as to be slidable in the Y axis direction on the Y slide rail 07. The members indicated by the reference numerals 06 to 09 form a Y slider unit SUy. The X slider unit SUx and the Y slider unit SUy form a scanner support member SU.

A scanner fixing base 010 is fixed to the lower surface of the Y slider 09, and the scanner fixing base 01 is fixed.
At 0, a scanner 011 composed of a cylindrical piezoelectric body and a plurality of electrodes is fixedly supported. The scanner 011 has an X scanner 011a for fine movement in the X direction, a Y scanner 011b for fine movement in the Y direction, and a Z scanner 011c for fine movement in the Z direction. A probe holder 012 is fixedly supported on the lower surface of the scanner 011 and
Reference numeral 12 is a probe 0 that is in contact with the surface of the sample W for inspection.
13 are provided.

In the conventional SPM having the X, Y sliders 04, 09 shown in FIG. 16, the coarse moving member (not shown) moves the X, Y sliders 04, 09 in the X, Y, Z directions (coarse movement). The probe 013 is moved to the inspection start position. Then, while the scanner 011 is finely moved in the X, Y, and Z axis directions, the sample W is moved by the tip of the probe 013.
The surface of the sample W is scanned to inspect the surface of the sample W.

(Coarse movement mechanism shown in FIG. 17) In FIG. 17, a disc-shaped slide base 01 'is not shown in the figure and is an SPM.
It is fixedly supported by the body. The slide base 01 '
Has a thin plate portion 01a 'on the outer peripheral side and a thick plate portion 01b' on the inner peripheral side. One ends of three slider tension springs 016 are fixedly supported on the thin plate portion 01a '. A plane slider 017 that moves in the XY plane is fixedly supported at the other end of the slider tension spring 016, and a plane slider 017 having a surface opposite to the thick plate portion 01b 'has three plane sliders 017.
Two slide balls 018 are embedded. Since the plane slider 017 is pulled toward the slide base 01 'by the slider tension spring 016, the slide ball 018 abuts against the thick plate portion 01b' while being pressed. Therefore, the plane slider 017
Is supported with respect to the slide base 01 'so as to be positioned and slidably movable. The plane slider 0
A scanner fixing base 010 is fixedly attached to the lower surface of 17, and the scanner fixing base 010 has X, Y, and Z scanners 011a to 011 composed of a piezoelectric body and electrodes.
The scanner 011 having c is fixed. And
A probe 013 is supported on the lower surface of the scanner 011 via a probe holder 012. The code 0
A flat slide unit (scanner support member) SUh is configured by the members 1 ', 016 to 018.

In the conventional SPM having the plane slider 017 shown in FIG. 17, the plane slider 017 is coarsely moved in the X, Y, and Z directions by a coarse movement member (not shown), and the tip of the probe 013 is moved to the scanning start position. Let Then, while slightly moving the scanner 011 in the X, Y, and Z axis directions, the tip of the probe 013 scans the surface of the sample to inspect the sample W.

[0010]

FIG. 18 is a view showing the action of a conventional SPM having a slider during coarse movement.
Is an explanatory view of the Y slide unit of the SPM of FIG. 16 and the scanner portion, FIG. 18B is an explanatory view of the action at the time of coarse movement, and FIG. 18C is the inclination angle θ of the scanner fixing base and the displacement of the probe tip shown in FIGS. It is explanatory drawing of the angular relationship with (delta) d. In the SPM having the conventional coarse movement mechanism shown in FIGS. 16 and 17, the scanner fixing base 010 is moved by using the slider (04, 09; 017). Since there is no perfect flat (smooth) surface in engineering,
Slider (04,09; 017) and slide rail (0
2, 07; 018), there is always unevenness on the slide surface that is the contact surface.

In FIG. 18, the Y slide unit SU
When the y-slider 09 of y slides, the surface of the Y-slide rail 07 and the Y-slider 09 causes backlash and displacement, and the tip of the probe 013 deviates from the set center line and inclines (see FIG. 18B). . As long as a coarse movement mechanism using such a slider (04, 09; 017) is adopted, rattling or deviation due to unevenness of the slide surface is always caused during coarse movement (during slide), and the scanner 011 tilts. . As a result, the tip of the probe 013 is displaced from the target position (the position indicated by the broken line in FIGS. 18A, 18B, and 18C).

This tilt and vibration of the scanner fixing base (described later)
The displacement (displacement) of the tip of the probe 013 from the target position by δd (see FIG. 18C), the inclination angle of the scanner fixing base 010 by θ, and the Y slide rail 07 and the probe 01.
When the distance from the tip of 3 is L (see FIGS. 18A and 18C), these relationships are approximately represented by the following equation (1). δd = L · sin θ …………………………………… (1) From equation (1), when the length of the scanner 011 and the probe 013 becomes long, L becomes large and the deviation δd becomes large. I understand. Note that these relationships are similarly established not only in the Y slide unit SUy but also in the X slide unit SUx and the plane slide unit SUh.

The degree of backlash and displacement is determined by the rail (02,0).
7; 018) accuracy, parallelism, smoothness of slide surface, design accuracy of each member including the fixing base 010, and how to assemble each member. However, no matter how the accuracy or smoothness is improved, there is always backlash or deviation as long as the structure is such that it slides, and the scanner fixing base 010 tilts. When the scanner fixing base 010 is tilted, the position of the tip of the probe 013 is displaced from the target position. When the tip of the probe 013 deviates from the target position, the distance between the probe 013 and the sample (scan object) changes and the scanning start position also deviates, so that an error occurs in the result even if scanning (fine movement) is performed. Or the target scan range cannot be scanned.

When the scanner fixing base 010 vibrates due to external factors such as sound and vibration transmitted from the outside,
According to the equation (1), the amplitude of the scanner fixing base 010 is amplified, and the tip of the probe 013 supported by the scanner 011 vibrates with a large amplitude δd. The probe 013
If the amplitude of the tip of the sample W increases, the accuracy of the SPM image on the surface of the sample W decreases, and the inspection of the sample W cannot be performed with the original accuracy.

As shown in FIGS. 16 and 17, an SPM scanner 011 provided with a conventional coarse movement mechanism is constructed by using a piezoelectric material. The longer the length of the scanner 011 using the piezoelectric body, the wider the scanning range for the same voltage. Therefore, a long scanner 011 is required to obtain a wide range of SPM images (inspection results). Further, the lower the temperature of the piezoelectric body, the smaller the deformation amount with respect to the same voltage. Therefore, when the scanner 011 is used at a low temperature, the scanning range becomes narrow. Therefore, the scanner 011 is set to the low temperature SP.
When used with M, the scanner 011 must be lengthened to obtain the required scan range. However, from the above formula (1), if the length L of the scanner 011 is increased,
Since the displacement of the inclination of the tip of the probe 013 and the amplitude δd of the vibration are amplified, the accuracy of the obtained SPM image is reduced.

Further, since a low temperature SPM uses a refrigerant such as liquid helium, the vibration caused by the boiling of the refrigerant causes
The scanner fixing base 010 may vibrate, and the amplitude of the vibration may be amplified at the tip of the probe 013. Therefore,
When the scanner 011 scans a wide range or when the scanner 011 is used at a low temperature SPM, the generated vibration has a great influence on the SPM image, and causes a decrease in the accuracy of the SPM image that requires high accuracy. .

In view of the above circumstances, the present invention provides the following (O0
The contents of 1) and (O02) are considered to be technical issues. (O01) To suppress amplification of vibration of the scanner fixing base due to external factors such as inclination of the scanner fixing base due to backlash or displacement of the slide rail at the scanner tip. (O02) To provide an SPM (scanning probe microscope) capable of obtaining a highly accurate SPM image by suppressing the vibration of the scanner tip.

[0018]

The present invention, which has solved the above-mentioned problems, will now be described. Elements of the present invention include elements of the embodiment in order to facilitate correspondence with the elements of the embodiment described later. Add the ones in parentheses. Further, the reason why the present invention is described in association with the reference numerals of the embodiments described later is to facilitate understanding of the present invention and not to limit the scope of the present invention to the embodiments.

(Invention) In order to solve the above-mentioned problems, the scanner holding device of the present invention has the following structural requirements (A01),
(A02) is provided. (A01) A piezoelectric body having a base end supported and a tip end holding a probe (54) or a sample (W) formed as a free end, and connecting both ends of the base end and the tip end. Scanners (52), (A02), which are axially expandable and contractible, and whose tip portion is movable in X-axis and Y-axis directions perpendicular to the Z-axis and perpendicular to each other (A02).
A slider (47; 64, 69) for supporting the base end of
A scanner supporting member (SU, SU ') having a slide base (36; 61, 66) slidably supporting the slider (47; 64, 69), wherein the slider (47; 64, 69) is The slide base (3
6; 61, 66) and a slide surface (36d; 64d, 69d) perpendicular to the Z-axis direction that slides and moves, and the tip of the probe (54) or the surface of the sample (W) with respect to the Z-axis direction. The scanner support members (SU, SU ') arranged at substantially the same position.

(Operation of the Present Invention) In the scanner holding device of the present invention having the above-mentioned requirements, the scanner (52) is extendable in the Z-axis direction, perpendicular to the Z-axis, and perpendicular to each other in the X-axis and Y-axis directions. Since the tip part is composed of a movable piezoelectric body, the probe (54) or sample (W) held at the tip part of the scanner (52) is
It can be moved (finely moved) in the Y and Z axis directions. The slider (47; 64, 69) is connected to the slide base (3
6; 61, 66) and a sliding surface (36d; 64d, 69d) perpendicular to the Z-axis direction that slides and moves, and the tip of the probe (54) or the surface of the sample (W) is Z.
They are arranged at substantially the same position with respect to the axial direction.

Therefore, the sliders (47; 64,
69) when the slide movement (coarse movement) of the slide surface (36d; 64d, 69d) occurs,
Even if the slider (47; 64, 69) tilts, the tip of the probe (54) or the surface of the sample (W) slides on the slide surface (36
d; 64d, 69d) and substantially the same position in the Z direction, there is almost no displacement of the tip of the probe (54) or the surface of the sample (W). That is, the scanner holding device of the present invention can suppress the amount of displacement of the tip of the probe (54) or the surface of the sample (W) when the slider (47; 64, 69) is tilted.

Even when the slide base (36; 61, 66) vibrates due to external factors, the slide surface (36d; 64d, 69d) and the tip of the probe (54) or the surface of the sample (W) become Z. Since the sliders (47; 64, 6) are arranged at substantially the same position in the axial direction,
9) and the vibration of the base end of the scanner (52)
4) It is possible to prevent amplification at the tip or the surface of the sample (W).

Further, the scanning probe microscope of the present invention is
A scanner holding device (SD, SD ') having the above-mentioned structural requirements (A01), (A02) is provided. In the scanning probe microscope of the present invention equipped with the scanner holding device (SD, SD ′) having the above-mentioned requirements, the slider (47) is caused by the inclination of the slide surface (36d; 64d, 69d) and the vibration due to external factors. 64, 69)
Almost no displacement (tilt) or vibration of the tip of the probe (54) or the surface of the sample (W) supported by is generated, and the displacement amount and amplitude are not amplified. Therefore, the scanning probe microscope of the present invention provides an SPM image obtained by scanning the tip of the probe (54) or the surface of the sample (W) by making the tip of the probe (54) and the surface of the sample (W) substantially in contact with each other. An SPM image with high accuracy can be obtained without deterioration.

[0024]

BEST MODE FOR CARRYING OUT THE INVENTION Next, a sample holder supporting device of an embodiment of the present invention will be described with reference to the drawings, but the present invention is not limited to the following embodiment.

(Embodiment 1) FIG. 1 is an explanatory view of Embodiment 1 of a scanning probe microscope of the present invention, FIG. 1A is a view showing a state in which an STM cell of the scanning probe microscope is at a sample exchange position, and FIG. 1B. FIG. 6 is a diagram showing a state in which the STM cell is at a sample observation position. In FIG. 1, low temperature UHV (UltraHigh Vacuum) -ST as a scanning probe microscope of Example 1
An M (Scanning Tunneling Microscope), that is, a low temperature ultra-high vacuum scanning tunneling microscope SPM has a cryostat 2 supported via a vibration isolation member 1. A UHV inner chamber 3 is formed inside the cryostat 2. During the sample inspection, the inner chamber 3 is cooled by a coolant such as liquid helium in the cryostat 2 and kept in a high vacuum state by a vacuum pump (not shown). An STM cell support device 4 is arranged at a sample observation position P1 on the bottom of the inner chamber 3. The STM cell supporting device 4 is a device for fixedly supporting the STM cell S inside the cryostat 2.

A sample exchange chamber 6 is provided above the inner chamber 3, and the sample exchange chamber 6 is provided.
Sample exchange ports 6a and 6b are formed on both left and right sides (Y-axis direction) of the. At the sample exchange position P2 set in the sample exchange chamber 6, an STM cell exchange device (not shown) is used to pass the STM through the sample exchange ports 6a and 6b.
The cell S is replaced.

On the upper side surface of the sample exchange chamber 6, there is provided a cylindrical transport rod accommodating portion 7 extending upward. An MGL transport rod 8 as an STM cell transport member is slidably and rotatably supported inside the transport rod accommodating portion 7. A plurality of rod magnets 9 are fixed to the upper end of the MGL transport rod 8. Further, an STM cell attachment / detachment holding pin 8a (see FIGS. 3A and 3D) extending in the horizontal direction is provided at the lower end of the MGL transport rod 8. The transport rod accommodating portion 7
An MGL transport member 11 is slidably and rotatably supported on the outer surface of the. The MGL transport member 1
1 has the same number of carrier magnets 12 as the rod magnets 9, and a tensile magnetic force is generated between the carrier magnets 12 and the rod magnets 9. That is, by vertically moving or rotating the MGL transport member 11, the MG
The L transport rod 8 can be moved up and down and rotated.

Therefore, the MGL transport rod 8 is
The STM cell S held by the attachment / detachment holding pin 8a at the lower end can be conveyed between the sample exchange position P2 (see FIG. 1A) and the sample observation position P1 (see FIG. 1B). Further, while the STM cell S is transported to the sample observation position P1, the MGL transport member 11 is rotated to move the MGL.
By rotating the transport rod 8, the STM cell S can be mounted on the STM cell supporting device 4. With the transport rod accommodating portion 7, the MGL transport rod 8, the rod magnet 9, the transport magnet 11, the MGL transport member 12, and the like,
Magnetic loader (Ma
(gnetic Loader) MGL is configured.

2A and 2B are explanatory views of the STM cell of the scanning probe microscope according to the first embodiment. FIG. 2A is a front view, FIG. 2B is a view seen from an arrow IIB in FIG. 2A, and FIG. 2C is II in FIG. 2A.
A view seen from the line C-IIC, and FIG. 2D is the line IID-II of FIG. 2A.
2D is a perspective view of the attachment / detachment lever shown in FIG. 2D, and FIG. 2F is a perspective view of the lever support member shown in FIG. 2D. 3A and 3B are explanatory views of a method for mounting the STM cell on the STM cell supporting device, FIG. 3A is a diagram showing a state in which the STM cell is conveyed to the STM cell supporting device, and FIG. 3B is an STM cell attaching / detaching rod for the STM cell. FIG. 3C is a view showing a state where the STM cell attaching / detaching rod is rotated, and FIG. 3C is a view showing a state where the STM cell attaching / detaching rod is attached to the STM cell attaching / detaching device. FIG. 3E is a view showing the state of being let
A view seen from the line IE-IIIE, and FIG. 3F is the IIIF of FIG. 3A.
-IIIF line sectional view, FIG. 3G is the IIIG-IIIG of FIG. 3C.
FIG. 3H is a sectional view taken along the line IIIH-IIIH in FIG. 3D.

2 and 3, the STM cell supporting device 4 includes a cylindrical case 16 (see FIG. 3) and a supporting device side terminal plate 17 fixed to the upper end of the case 16.
And a cylindrical member 18 provided on the upper surface of the supporting device side terminal plate 17, and an upper end plate 19 provided on the upper surface. In FIG. 3, the case 16 has an STM cell housing portion 16a having a cylindrical inner peripheral surface, and coarse movement member insertion grooves 16b, 16b formed on both left and right sides (Y axis direction) of the STM cell housing portion 16a (see FIG. 3E and FIG. 3G) and the X coarse movement member insertion groove 16c formed in the rear portion (the -X side portion).
(See FIGS. 3E to 3H).

The terminal plate 17 on the supporting device side is the S
It has a circular hole 17a having a diameter slightly smaller than that of the TM cell accommodating portion 16a, and a plurality of electric connection terminals 17b (on the both sides of the right front portion (+ X + Y portion) and the left rear portion (−X−Y portion) of its upper surface). (See FIG. 3A). An inner peripheral surface 18a of the cylindrical member 18 has a diameter larger than that of the circular hole 17a, and a space is formed above the electric connection terminal 17b.

The upper end plate 19 has an elliptical hole 19a, and the elliptical hole 19a has the same major axis as the inner peripheral surface 18a of the cylindrical member 18 (see FIGS. 3E and 3G), so that the electrical connection can be made. It is formed so that the upper side of the terminal 17b is opened to the outside (the electric connection terminal 17b can be seen from above the upper end plate 19). Oval hole 1 in the upper end plate 19
The cylindrical member 1 is provided on the lower surface of both side portions of 9a in the minor axis direction.
8 is provided with an STM cell locking portion 19b that projects inward from the inner peripheral surface 18a. Further, the upper end plate 19 is formed with coarse movement member insertion grooves 19c and 19c corresponding to the coarse movement member insertion grooves 16b and 16b.
Therefore, from above (+ Z direction), the Y-axis coarse movement rod Ry (described later, see FIGS. 1 and 4 to 7) and the coarse movement member insertion grooves 19c, 19c and the coarse movement member insertion grooves 16b, 16b are passed. Z-axis coarse movement rod Rz (described later, FIGS. 1 and 4 to 7)
Can be inserted inside the case 16.

(STM Cell) In FIGS. 2 and 3, the STM cell S of the first embodiment is a cylindrical scanner housing case C.
And an elliptical cell-side terminal plate 22 provided on an upper end thereof in a plan view, a lever support member 23 provided on an upper surface of the cell-side terminal plate 22, and a detachable member rotatably supported by the lever support member 23. Lever 24 (locked member, see FIG. 2E). Electrical connection terminals 22a are provided on the lower surfaces of both ends in the longitudinal direction of the oval cell-side terminal plate 22 via a plurality of conductive members. 3A and 3B, the cell-side terminal plate 22
Passes through the oblong hole 19a and the cylindrical member 18 of the upper end plate 19 of the STM cell supporting device 4 from the upper side to the lower side, and is supported on the upper surface of the supporting device side terminal plate 17. At that time, the electrical connection terminals 17b on the upper surface of the supporting device side terminal plate 17 and the electrical connection terminals 22a of the holding member side terminal plate 22 are connected. Further, in the rear portion of the holding member side terminal plate 22, a through hole 22b for inserting an X-axis coarse movement rod Rx, which will be described later, corresponding to the X coarse movement member insertion groove 16c (see FIGS. 3E and 3G). )
Are formed.

In FIG. 2, the lever support member 23
Is a lower portion 23a (see FIG. 2F) that rotatably supports the attachment / detachment lever 24 in the range of 90 ° about the vertical axis, and the detachment of the attachment / detachment lever 24 supported by the lower portion 23a to the upper side. A disc-shaped upper portion 23b fixed to the upper surface of the lower portion 23a for stopping (see FIGS. 2A and 2B).
And have. A pin penetrating elongated hole 23c is formed in the center of the upper portion 23b. As shown in FIG. 2E, the attachment / detachment lever 24 has a central circular portion 24a and protruding portions 24b, 24b protruding on both sides thereof. A pin insertion opening 24c is formed in the central circular portion 24a, and an inclined surface 24 is formed in the protruding portions 24b, 24b.
d and 24d are formed.

Next, referring to FIG. 1 and FIG.
A method of mounting the M cell S on the STM cell supporting device 4 will be described. At the sample exchange position P2 (see FIG. 1), the STM cell attachment / detachment holding pin 8a of the MGL transport rod 8 is inserted into the pin penetrating elongated hole 23c of the lever support member 23 and the pin insertion port 24c of the attachment / detachment lever 24 to attach / detach. Lever 2
Rotate 4 90 °. At this time, the pin penetrating elongated hole 23
c and the pin insertion opening 24c are in a state of intersecting with each other as shown in FIG. 3E. At this time, the STM cell attachment / detachment holding pin 8a is connected to the upper portion 23b of the lever supporting member 23.
The MGL transport rod 8 holds the STM cell S because it abuts the lower surface of the SGL (state of FIG. 1A). In this state, the MGL transport rod 8 is operated to transport the STM cell S to the sample observation position P1 (FIGS. 1B and 3A).
State). Then, the cell side terminal plate 22 of the STM cell S is placed on the supporting device side terminal plate 17 of the STM cell supporting device 4 (state of FIG. 3A), and the M
The GL transport rod 8 is pressed downward (state of FIG. 3B).
Then, when the MGL transport rod 8 is rotated 90 °, the inclined surfaces 24d of the protrusions 24b, 24b of the attachment / detachment lever 24 come into contact with the lower surface of the STM cell locking portion 19b, and the STM
The cell S is pressed downward (state of FIG. 3C). At this time, the electrical connection terminals 1 on the upper surface of the support device side terminal plate 17
7b and holding member side terminal plate 22 electrical connection terminal 22
and a are firmly connected. Then, at this time, the pin through-hole 23c and the pin insertion port 24c are in communication with each other (see FIG. 3G), so that the MGL transport rod 8 is moved upward from the pin through hole 23c and the pin insertion port 24c (Z. Direction) (see FIG. 3D).
When removing the STM cell S from the STM cell supporting device 4, it can be removed by performing the reverse procedure.

FIG. 4 is a sectional view of the essential part of the STM cell of the first embodiment. 5 is a cross-sectional view taken along the line VV of FIG. 4, FIG. 5A is a view in which a gear taken along the line VV is omitted, and FIG. 5B is a view illustrating a gear taken along the line VV. FIG. 6 shows the STM of the first embodiment.
6A and 6B are an explanatory view of a main part of a cell scanner holding device, FIG. 6A is a cross-sectional view, FIG. 6B is a view seen from the VIB direction of FIG.
6C is a diagram viewed from the VIC direction in FIG. 6B.

In FIG. 4, the scanner housing case C is shown.
Is a lower end side (-Z end side) of the sample holder holding wall C1, a scanner holding device support wall C2 fitted to the upper part of the sample holder holding wall C1, and an upper part of the scanner holding wall C2. It has a wall C3. The sample holder holding wall C1
Has a conical outer shape, and the sample holder 26
A holder mounting groove (not shown) for detachably holding the is formed. The sample holder 26 includes a holder body 26a that holds the sample W, a holder mounting member 26b that engages with a holder mounting groove (not shown) of the holder holding wall C1, and a holder mounting member 26b.
It has a held member 26c which is held by a holder carrying member (not shown) when the sample holder 26 is attached and detached and carried. The sample holder 26 is mounted on the holder holding wall C1 before the STM cell S is transported into the inner chamber 3. The sample holder 2 is attached to the holder holding wall C1.
A mechanism for attaching and detaching 6 and a holder conveying member are conventionally known,
For example, since it is described in Japanese Patent Application Laid-Open No. 2001-272324, Japanese Patent Application Laid-Open No. 9-153338, etc., detailed description will be omitted.

The scanner holding wall C2 has a lower thin-walled cylindrical portion 27, an upper thick-walled cylindrical portion 28, and an upper end Z-axis coarse movement member support portion 29. In FIG. 5, an X-axis coarse movement member penetrating elongated hole 27a (see FIG. 5) is formed at the rear (−X axis side) of the upper end of the thin-walled cylindrical portion 27, and on the left side (−Y axis side). Is a Y-axis coarse movement member penetrating elongated hole 27b (see FIG.
5) is formed. The Z-axis coarse movement member support portion 29 has a large diameter hole H1 having a cylindrical peripheral surface formed on the upper end side, and a medium diameter smaller than the large diameter hole H1 and formed below the large diameter hole H1. It has a small diameter hole H2 and a small diameter hole H3 formed below the medium diameter hole H2 and having a smaller diameter than the middle diameter hole H2. The small diameter hole H3 communicates with the inside of the thick-walled cylindrical portion 28. . A transmission gear support 29d (see FIG. 5A) communicating with the large diameter hole H1 is formed on the right side (+ Y side) of the Z-axis coarse movement member support 29. And
An upper middle-diameter hole H2 ′ (see FIG. 4) having the same diameter as the middle-diameter hole H2 of the Z-axis coarse movement member support portion 29 is formed in the central portion of the upper wall C3 of the scanner housing case C.

In FIGS. 4 and 5, the Z-axis rough movement member supporting portion 29 has a Z-axis rough movement inside the space surrounded by the large diameter hole H1, the medium diameter hole H2 and the upper middle diameter hole H2 'of the upper wall C3. The moving gear 32 is arranged. The Z-axis coarse movement gear 32 includes a gear portion 32a housed in the large diameter hole H1 and a core portion 32b housed in the medium diameter hole H2 and the upper middle diameter hole H2 '.
And a through hole 32c having a thread groove is formed at the center of the core portion 32b. The core portion 32
b is rotatably supported in the medium diameter hole H2 and the upper medium diameter hole H2 'via bearings.

The transmission gear support 29d has a shaft G0a.
(See FIG. 4) Transmission gear G0 rotatably supported at the center
And the transmission gear G0 is
It meshes with 2a. The right part of the transmission gear G0 is arranged so as to project to the outside of the scanner housing case C, and a gear Rz1 (see FIG. 4) fixed to the lower end of the Z-axis coarse movement rod Rz meshes with the protruding part. ing. The Z-axis coarse movement rod Rz is rotatably and slidably supported in the cryostat 2. A bellows B1 (see FIG. 1A) is arranged outside the upper end portion of the Z-axis coarse movement rod Rz, and the upper end of the Z-axis coarse movement rod Rz airtightly penetrates a plate fixed to the upper end of the bellows B1. Z
By rotating the shaft coarse movement rod Rz, the transmission gear G0 and the Z axis coarse movement gear 32 can be rotated. The Z-axis coarse movement gear 32, the transmission gear G0, the Z-axis coarse movement rod Rz and the like constitute a Z-axis coarse movement device SSz.

In FIG. 4, the scanner holding device SD is arranged inside the thin-walled cylindrical portion 27 and the thick-walled cylindrical portion 28 of the scanner holding device supporting wall C2. The scanner holding device SD has a held portion 34 that extends upward through the small diameter hole H3 and a cylindrical slide base 36 having an outer diameter substantially the same as the inner diameter of the thick-walled cylindrical portion 28. There is. A thread groove 34a is formed on the outer peripheral surface of the held portion 34, and the thread groove 34a meshes with the thread groove of the through hole 32c of the Z-axis coarse movement gear 32. The slide base 36 is formed integrally with the held portion 34,
It has a base top wall 36a and a cylindrical base cylinder wall 36b connected below the base top wall 36a. Three base side spring support holes 36c (see FIG. 6B) are formed on the lower surface of the base top wall 36a. In addition, a rotation preventing groove (not shown) is formed on the outer peripheral surface of the base cylindrical wall 36b of the slide base 36, and the thick cylindrical portion 2 is formed.
The non-illustrated detent pin formed on the inner wall of the No. 8 engages the detent groove to prevent the slide base 36 from rotating. Therefore, by rotating the Z-axis coarse movement rod Rz, the Z-axis coarse movement gear 32 rotates, but the slide base 36 cannot rotate, so the slide base 36 moves in the vertical direction (Z-axis direction) (Z Axis coarse movement). A slide groove (slide surface) 36d (see FIGS. 6B and 6C) is formed in the lower end portion of the base cylinder wall 36b in the radial direction at every central angle of 120 ° (a total of three places).

Next, the configurations of the X-axis coarse movement device and the Y-axis coarse movement device will be described. Since both devices have the same configuration, only the Y-axis coarse movement device will be described and the X-axis coarse movement device will be described. A detailed description of the moving device will be omitted. The base tube wall 36
A b-shaped Y-axis adjusting member mounting hole 38 (see FIG. 4) having a quadrangular cross section is formed on the left side (−Y side) of the central portion in the up-down direction (Z-axis direction) and a circular cross section is formed on the right side (+ Y side). A Y-axis pressing member mounting hole 39 is formed. The Y-axis adjusting member mounting hole 38 has an outer small diameter hole 38a (see FIG. 4) and an inner large diameter hole 38b. The pressing member mounting hole 39
Has an outer large-diameter hole 39a and an inner small-diameter hole 39b, and a female screw 39c is formed at the outer end of the large-diameter hole 39a.

In FIG. 4, the Y-axis adjusting member mounting hole 3
A Y-axis adjusting member 41 is attached to the unit 8. The Y-axis adjusting member 41 is integrally formed with a prism-shaped outer portion 41a that fits in a small-diameter hole portion outside the Y-axis adjusting member mounting hole 38 and a prism-shaped inner portion 41b that fits in a large-diameter hole portion 38b. ing.
A contact slant surface 41c is formed at the outer end of the prismatic outer portion 41a so as to slant downward as it goes outward. An inner end surface of the prismatic interior 41b of the Y-axis adjusting member 41 is formed into a spherical shape. The outer end portion of the Y-axis adjusting member 41 penetrates the Y-axis coarse movement member penetrating elongated hole 27b and projects to the outside of the scanner housing case C. Then, the lower end portion of the Y-axis coarse movement rod Ry (see FIGS. 1 and 4), which is slidably supported in the inner chamber 3 in the vertical direction, abuts on the abutting inclined surface 41c protruding outward. . A bellows B2 (see FIG. 1) is arranged outside the upper end portion of the Y-axis coarse movement rod Ry, like the Z-axis coarse movement rod Rz, and the upper end of the Y-axis coarse movement rod Ry is located at the upper end of the bellows B2. Airtightly penetrates the fixed plate.

In FIG. 4, the Y-axis pressing member mounting hole 3
A Y-axis pressing member 42 is attached to the unit 9. The Y-axis pressing member 42 has one end supported by a mounting screw 42a screwed into the female screw 39c of the large-diameter hole 39a outside the Y-axis pressing member mounting hole 39 (see FIG. 4), and the mounting screw 42a. And a cylindrical cap 42c that is pressed inward by the other end of the pressing spring 42b. The cap 42c has a spherical pressing portion 42c1 on the inner end side that fits into the small diameter hole portion 39b of the Y-axis pressing member mounting hole 39, and a stopper portion 42c2 on the outer end side that fits into the large diameter hole portion 39a. Have. The Y-axis adjusting member 41, Y
A Y-axis coarse movement device SSy is configured by the shaft pressing member 42, the Y-axis coarse movement rod Ry and the like.

The X-axis coarse movement device SSx is similar to the Y-axis coarse movement device SSy in the rear side (-X) of the base cylindrical wall 36b.
Formed on the front side (+ X side) of the base cylinder wall 36b, and the X-axis adjusting member 43 (see FIG. 5) mounted in the X-axis adjusting member mounting hole (not shown) having a quadrangular cross section. The X-axis pressing member 44 (see FIG. 6B) mounted in the X-axis pressing member mounting hole (see FIG. 6) having a circular cross section and the contact inclined surface 43c (see FIG. 5) of the X-axis adjusting member 43 are contacted with each other. X to touch
It is composed of a shaft coarse movement rod Rx and the like. The X-axis coarse movement rod Rx includes the through hole 22b (see FIGS. 3E and 3G) formed in the cell-side terminal plate 22 and X.
It contacts the contact inclined surface 43c (see FIG. 5) of the X-axis adjusting member 43 through the coarse movement member insertion groove 16c.

In FIG. 4, a cylindrical flat slider 47 is arranged inside the slide base 36.
The flat slider 47 has a slider top wall 47a and a slider cylinder wall 47b, and a slider side spring support hole 47c is formed in the center of the upper surface of the slider top wall 47a. At the lower end of the slider cylinder wall 47b, three slider legs 47d are formed corresponding to the slide groove 36d.
Are formed so as to project outward, and spherical slide balls 48 are embedded in the upper surfaces of the slider legs 47d.

The flat slider 47 is urged upward (toward the slide base 36) by a tension spring 49 having both ends fixedly supported by the base side spring support hole 36c and the slider side spring support hole 47c. Have been). As a result, the spherical surface of the slide ball 48 comes into contact (press contact) with the slide surface 36d while being pressed. Therefore, the plane slider 47 is positioned in the up-down direction (Z-axis direction) and in the front-rear, left-right (XY direction, that is, Z
It is supported so as to be slidable in the direction (perpendicular to the axis). And, to the front, back, left and right of the outer peripheral surface of the plane slider 47,
The X-axis adjusting member 43, the X-axis pressing member 44, the Y-axis adjusting member 41, and the Y-axis pressing member 42 are in contact with each other. Therefore, when the X-axis coarse movement rod Rx and the Y-axis coarse movement rod Ry are operated and adjusted in the vertical direction (Z-axis direction), the X-axis adjustment member 43 and the Y-axis adjustment member 41 are respectively moved in the front-back direction (X-axis direction). ) And in the left-right direction (Y-axis direction), the plane slider 47 can be moved in the X-axis direction and the Y-axis direction (X-axis coarse movement, Y-axis coarse movement). The slide base 36, the plane slider 47, the slide ball 48, the tension spring 49, and the like constitute a plane slide unit SUh (scanner support member SU).

The slider top wall 47 of the plane slider 47
A cylindrical scanner fixing base 51 is fixed to the lower surface of a. On the lower surface of the scanner fixing base 51, a cylindrical scanner 52 composed of a piezoelectric body and a plurality of electrodes is provided.
Is fixedly supported. The scanner 52 is an upper XY scanner 52 that can be finely moved in the X and Y directions when energized.
a and a lower Z scanner 52b that can expand and contract in the Z direction (fine movement in the Z axis direction) when energized. Since the lower end portion of the scanner 52 is not fixed and is configured as a free end, the lower end portion is slightly moved in the X, Y, and Z axis directions by energization. A probe 54 for inspecting a sample surface is provided on the lower surface of the scanner 52 via a probe holder 53. The position of the tip of the probe 54 in the vertical direction (Z-axis direction) is determined by the slide surface (slide groove) 3
It is set to be substantially the same as the position of 6d in the vertical direction (Z-axis direction). The flat slide unit SU
h, the scanner holding device S by the scanner fixing base 51, the scanner 52, the probe holder 53, the probe 54, and the like.
D is configured.

(Operation of Embodiment 1) In the low-temperature high-vacuum scanning tunneling microscope (low-temperature UHV-STM; scanning probe microscope of Embodiment 1) SPM having the above structure, the STM cell S equipped with the sample holder 26 is mounted. As mentioned above,
At the sample exchange position P2, the STM cell S is MGL.
It is held by the transport rod 8, transported to the sample observation position P1, and mounted on the cell support device 4 at the bottom of the inner chamber 3.

The STM cell S is the STM cell supporting device 4
, The coarse movement rods Rx to Rz are operated, and the X-axis coarse movement rod Rx and the Y-axis coarse movement rod Ry are respectively attached to the abutting inclined portions 42c and Y of the X-axis adjusting member 42.
The abutting inclined portion 43c of the shaft adjusting member 43 is brought into contact with the gear Rz1 of the Z-axis coarse movement rod Rz and the transmission gear G0. Then, the X-axis coarse movement rod Rx and the Y-axis coarse movement rod Ry are operated and adjusted in the vertical direction to move the X-axis adjustment member 43 and the Y-axis adjustment member 41 back and forth along the X-axis direction and the Y-axis direction, respectively. To move. As a result, the plane slider 47 is moved forward and backward (left and right) (X-axis, Y-axis direction), and the position of the tip of the probe 54 is moved (X-axis coarse movement, Y-axis coarse movement). After the completion of the X-axis coarse movement and the Y-axis coarse movement, the Z-axis coarse movement rod Rz is operated to rotate the transmission gear G0.
As a result, the scanner holding device SD is moved in the vertical direction (Z-axis coarse movement) so that the tip of the probe 54 approaches (closes) the surface of the sample W. In this embodiment, the coarse movement range (adjustable range) of the tip of the probe 54 is
It is set to about ± 3 mm in each of the X and Y axis directions and about 5 mm in the Z axis direction.

The probe 5 is moved by the coarse movement of the X, Y and Z axes.
4 With the tip moved to the scanning start position, the probe 54 is moved while finely moving the scanner 52 in the X, Y, and Z axis directions.
The surface of the sample W is scanned by the tip of the. In this embodiment, the fine movement range (scannable range) of the tip of the probe 54 is set to about ± 10 μm in each of the X and Y axis directions and about 6 μm in the Z axis direction. The coarse movement range and the fine movement range can be changed according to the application, function and the like. After the inspection of the range scannable by the scanner 52 is completed, the coarse movement rods Rx, Ry, Rz are operated again to move the probe 5
The tip of 4 is moved to the next scanning start position, and the inspection is sequentially performed.

7A and 7B are enlarged views of the main part of the scanner holding device according to the first embodiment. FIG. 7A is an explanatory view in a normal state, and FIG. 7B is an explanatory view in a tilted state due to coarse movement. In FIG. 7, when the X-axis coarse movement and the Y-axis coarse movement are performed (state of FIG. 7A), the plane slider 47 is a slide surface (slide groove) 36d of the slide base 36 and the slide ball 4 of the plane slider 47.
Slide along the contact surface with 8 (coarse movement). At this time, play or displacement may occur due to minute unevenness on the surface of the slide surface 36d or the slide ball 48. Due to this backlash or deviation, the plane slider 47 may tilt or vibrate (vibrate repeatedly inclining) at the scanning start position (see FIG. 7B). However, the slide groove 36d (slide surface) which is the position of the center (fulcrum) of this inclination
The contact portion between the slide ball 48 and the slide ball 48 is
It is set at substantially the same position as the tip of No. 4 in the vertical direction. Therefore, the distance L (see FIG. 18) in the Z-axis direction between the fulcrum (center of inclination) and the tip of the probe 54 is almost zero.
Becomes That is, according to the equation (1) (δd = L · sin θ), the displacement δd of the inclination or the vibration becomes almost 0, and the probe 5
The tip of 4 hardly displaces or vibrates (see FIG. 7B). Therefore, the scanning probe microscope S of the first embodiment
In PM, the tip of the probe 54 is prevented from being displaced from the scanning start position at the start of scanning, and scanning in the target scanning range becomes possible. In addition, the inspection result (SPM) generated when the tip of the probe 54 is displaced from the scanning start position
It is possible to prevent the occurrence of error in the image) and the deviation of the analysis position.

Further, for example, when liquid helium is used as the refrigerant in the cryostat 2, the slide base 36 and the plane slider 47 may resonate and vibrate due to the vibration of the liquid helium during boiling. In addition to this, it may resonate and vibrate due to sound transmission, vibration of the room in which the low temperature UHV-STM is installed, and the like. However, even in the case of vibration caused by an external factor other than such coarse movement, since the slide surface (slide groove 36d) which is the fulcrum of vibration is set at substantially the same position as the probe 54, the vibration is generated at the tip of the probe 54. Can be prevented from being amplified by. Therefore, it is possible to prevent the accuracy of the SPM image obtained when the probe 54 scans the surface of the sample W from being lowered by the vibration caused by an external factor.

Further, in the case of the low temperature UHV-SPM in which the inspection is performed in the inner chamber 3, the range of the fine movement of the piezoelectric body is narrowed due to the low temperature, so that the scanner is lengthened to obtain the necessary scanning range (fine movement range). Must. Conventionally, as the length of the scanner becomes longer, the displacement / amplitude of the probe tip due to the inclination / vibration of the plane slider 47 is amplified and becomes larger. However, in the scanner holding device SD of the first embodiment, the slide surface (slide groove 36
Since d) is set at substantially the same position as the tip of the probe 54, vibration of the tip of the probe 54 can be suppressed even if the scanner 52 becomes long.

In the ultra-high vacuum state where the inspection is performed by the low temperature UHV-SPM of the first embodiment, the probe 54 and the sample W are used.
The conduction of radiant heat between and the surroundings is proportional to the fourth power of the temperature difference regardless of the distance. The conventional scanner holding device (see FIG.
6), since the scanner 011 and the probe 013 and the sample W are exposed, the temperature variation of the probe 013 and the sample W is likely to be large due to the variation of the external temperature.
This adversely affected the inspection result (decrease in accuracy of SPM image). In the scanner holding device SD of the first embodiment, the scanner 5
2 includes a plane slider 47 and a slide base 36.
Is doubly covered by. Therefore, when the flat slider 47 and the slide base 36 are made of a material having good heat conductivity, the probe 54 and the sample W are thermally shielded by the flat slider 47 against radiant heat from the outside, and the flat surface is also flat. Slider 47 is slide base 3
Further thermally shielded by 6. As a result, the probe 54 and the sample W are doubly heat shielded.
By such double heat shield, fluctuations in the temperature of the probe 54 and the sample W are suppressed, so that the temperature is stable and a highly accurate SPM image can be obtained. Therefore, in the case of the low temperature UHV-STM of the first embodiment, the cylindrical flat slider 47 and the slide base 36 not only amplify the tilt and vibration at the tip of the probe 54, but also serve as a heat shield between the probe 54 and the outside. To work. Further, in the first embodiment, due to the double heat shield described above,
Since the heat flow into the sample W from the outside can be suppressed small, the sample can be efficiently cooled and the sample can be kept at a lower temperature than in the past. Further, since the double heat shield enables efficient cooling, consumption of liquid helium as a refrigerant can be suppressed.

As a result, the probe 5 at the time of coarse movement of X, Y and Z
4 Inclination and vibration of the tip can be prevented, and fluctuations in temperature of the probe 54 and the sample W can be suppressed by the heat shield by the slide base 36 and the plane slider 47. Therefore, the scanning probe microscope (low temperature UHV-S
The TM) SPM can obtain a highly accurate SPM image. Although the slide groove 36d as the slide surface is formed in the first embodiment, the slide groove 36d is not formed,
The ring-shaped lower end surface of the base top wall 36b can be used as a slide surface.

(Second Embodiment) FIG. 8 is an exploded perspective view of a scanner holding device according to a second embodiment. FIG. 9 is an enlarged view of a main part of the scanner holding device according to the second embodiment, FIG. 9A is a side view, and FIG.
FIG. 9B is a view seen from the IXB direction in FIG. 9A. FIG. 10 is a sectional view of a main part of the scanner holding device according to the second embodiment.
Is a sectional view taken along line XA-XA of FIG. 9B, and FIG. 10B is a sectional view taken along line XB-XB of FIG. 10A. In the description of the scanner holding device according to the second embodiment, constituent elements corresponding to those of the scanner holding device according to the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted.

The scanner holding device SD 'of the second embodiment is a flat slider 47 of the scanner holding device SD of the first embodiment.
In this embodiment, an XY slider is used instead of the above. Figure 8 ~
In FIG. 10, a rectangular tube-shaped scanner holding device S arranged inside an STM cell (not shown) having an inner wall of a rectangular tube shape.
D'has an X slide base 61 (see FIG. 8). The X slide base 61 is an X base top wall 61a.
And a left end wall (-Y end wall) 61b and a right end wall (+ Y end wall) connected to both left and right (Y axis direction) ends of the X base top wall 61a.
61b '. A held portion 34 having a screw groove 34a is integrally formed on the X base top wall 61a. Then, a pair of plate-shaped X-axis adjusting member support portions 61c (see FIGS. 8 and 10A) are provided at the central portions in the Z-axis direction at the front and rear ends (+ X end and −X end) of the X slide base 61.
And an X-axis pressing member support portion 61d (see FIGS. 9B and 10A).

In FIG. 10A, an X-axis adjusting member mounting hole 38 'is formed in the X-axis adjusting member supporting portion 61c, and an X-axis pressing member mounting hole 39' is formed in the X-axis pressing member supporting portion 61d. Has been formed. The X-axis adjusting member mounting hole 38 'and the X-axis pressing member mounting hole 39' are configured similarly to the Y-axis adjusting member mounting hole 38 and the Y-axis pressing member mounting hole 39 of the first embodiment, respectively. An X-axis adjusting member 43 is supported in the X-axis adjusting member mounting hole 38 'so as to be movable back and forth (X-axis direction), and the X-axis pressing member mounting hole 39' is pressed in the X-axis pressing member mounting hole 39 '. The portion 44 is supported so as to be movable back and forth. 8 to 10, left and right end walls (Y end wall and -Y end wall) 61b, 6 of the X slider 61 are shown.
A pair of X slide rails 62, 62 extending in the front-rear direction (X axis direction) are fixedly supported on the lower surface (-Z surface) of 1b '. Further, the right end wall (+ Y end wall) 61b 'is formed with an X base elongated hole 61e (see FIGS. 8 and 9A) through which the prismatic outer portion 41a of the Y axis adjusting member 41 penetrates. The lower surface of the X base top wall 61a (-
One end of the X slider tension spring 63 is supported at the center of the (Z plane).

In FIG. 10, the X slide base 6
An X slider 64 is arranged inside the unit 1. The X
The slider 64 has an X slider top wall 64a and a pair of X slider side walls 64b and 64b 'connected to both left and right ends (-Y end and + Y end) of the X slider top wall 64a. An X slide portion 64 protruding outward is provided at a lower end portion (-Z end portion) of each of the pair of slider side walls 64b and 64b '.
c, 64c are formed. The X slide unit 64
c and 64c include the pair of X slide rails 62, 62.
Is formed, and X slide surfaces 64d and 64d (see FIGS. 8 and 10B) are provided on the upper surface (+ Z surface).

The upper surface of the X slider top wall 64a (+ Z
The other end of the X slider tension spring 63 is fixedly supported on the surface), and the X slider 64 is pulled upward (on the X slide base 61 side). Therefore, the X slide rail 62 is pressed and contacted (pressed) to the X slide surface 64d. Therefore, the X
Due to the contact between the slide surface 64d and the X slide rail 62, the X slider 64 is positioned in the Z axis direction and supported so as to be slidable in the X axis direction. Then, as shown in FIG. 8, on the right side (+ Y side) of the X slider side wall 64b ', like the right end wall (+ Y end wall) 62b' of the X slide base 61, the prismatic shape of the Y-axis adjusting member 41 is formed. An X slider long hole 64e (see FIGS. 8 and 10B) through which the outside 41a (see FIG. 10B) passes is formed.
X by the members indicated by the reference numerals 61 to 64
The slide unit SUx is configured.

In FIGS. 8 and 10, a Y slide base 66 is fixed to the lower surface (-Z surface) of the X slider top wall 64a, and the X slider 64 and the Y slide base 6 are attached.
6 moves integrally. The Y slide base 66 is Y
Base top wall 66a (see FIG. 8) and the Y base top wall 6
6a has a pair of front and rear Y base side walls 66b and 66b 'connected to the front and rear ends (+ X end and -X end). And
As shown in FIG. 10A, the Y-base front side wall 66b is in contact with the X-axis adjusting member 43, and the Y-base rear side wall 66b 'is formed.
The X-axis pressing member 44 is in contact with. Therefore, X
By moving in and out the axial coarse movement rod Rx in the vertical direction (Z direction), the X-axis adjusting member 43 is moved forward and backward (X-axis direction) to move the Y slide base 66 and the X slider 64 in the X axis. Direction (X-axis coarse movement).

In FIGS. 8 and 10, Y-axis pressing member supporting portions 66c (FIGS. 8 and 1) are provided at the central portions in the Z-axis direction at the left and right ends (-Y axis end and + Y axis end) of the Y slide base 66.
0B) and a Y-axis adjusting member support portion 66d (see FIG. 10B). Then, a Y-axis pressing member mounting hole 39 is formed in the Y-axis pressing member supporting portion 66c.
A Y-axis adjusting member mounting hole 38 is formed in the shaft adjusting member supporting portion 66d. Then, the Y-axis pressing member mounting hole 39
The Y-axis pressing member 42 is supported so as to be movable back and forth in the Y-axis direction, and the Y-axis adjusting member 41 is supported by the Y-axis adjusting member support portion 66d so as to be movable forward and backward in the Y-axis direction. The Y-axis pressing member mounting hole 39, the Y-axis adjusting member mounting hole 38, the Y-axis pressing member 42, and the Y-axis adjusting member 41 are respectively configured similarly to those of the first embodiment. Lower end surfaces (-Z end surfaces) of the pair of Y base side walls 66b and 66b '.
Y slide rail 6 that extends in the left-right direction (Y-axis direction)
7 (see FIGS. 8 and 10A) are fixedly supported. The vertical position (Z-axis direction) of the Y slide rail 67 is set to be substantially the same as the vertical position of the X slide rail 62. Further, one end of a Y slider tension spring 68 (see FIG. 10) is fixedly supported at the central portion of the lower surface (−Z surface) of the Y base top wall 66a.

In FIGS. 8 and 10, a Y slider 69 is arranged inside the Y slide base 66.
The Y slider 69 includes a Y slider top wall 69a (see FIG. 8) and a pair of Y slider side walls 69b and 69 connected to both front and rear ends (+ X end and -X end) of the Y slider top wall 69a.
b ′ (see FIGS. 8 and 10A). The lower end portions of the pair of slider side walls 69b and 69b '(-Z
Y slide portions 69c, 69 protruding outward are provided at the end portions).
c (see FIGS. 8 and 10A) is formed. The Y slide portions 69c, 69c are formed with steps for engaging the pair of Y slide rails 67, 67, and the Y slide surface 69d on the upper surface (+ Z surface) side of the Y slide portion 69c.
Is in contact with the Y slide rail 67. The Y slider tension spring 68 is fixedly supported on the upper surface (+ Z surface) of the Y slider top wall 69a, and the Y slider 69 is moved upward (+ Z axis direction) by the Y slider tension spring 68.
Has been pulled to. Therefore, the Y slide surface 69
d is in contact with the Y slide rail 67 while being pressed. As a result, the Y slider 69 is positioned in the vertical direction (Z-axis direction) and is supported so as to be slidable in the Y-axis direction.

In FIGS. 8 and 10B, a pair of left and right pressed portions 69e, 69e 'are fixedly supported at the Z direction central portions of the left and right ends (-Y end and + Y end) of the Y slider 69. As shown in FIG. 10B, the Y-axis pressing member 42 abuts on the right side (−Y side) pressed portion 69e, and the Y axis adjusting member 4 contacts the left side (+ Y side) pressed portion 69e ′.
1 is in contact. Therefore, when the Y-axis coarse movement rod Ry is moved in and out in the vertical direction (Z-axis direction) and adjusted, the Y-axis adjusting member 41 moves in the horizontal direction (Y-axis direction) and the Y slider 69 moves in the horizontal direction. (Y axis coarse movement). The Y slide unit SUy is configured by the members indicated by the reference numerals 66 to 69. The X
Slide unit SUx and Y slide unit SU
The scanner support member SU ′ is constituted by y.

The Y slider top wall 69 of the Y slider 69
A cylindrical scanner fixing base 51, a cylindrical scanner 52, and a probe holder 53 are provided inside a as in the first embodiment.
And a probe 54 is supported. The scanner supporting member SU ′, the scanner fixing base 51, the scanner 52, the probe holder 53, the probe 54 and the like constitute a scanner holding device SD ′. In the scanner holding device SD ′ of the second embodiment, unlike the scanner holding device SD of the first embodiment, a large sample can be observed and the probe 54 can be used.
In order to allow the approach point (the position where the probe 54 and the sample W are close) to be observed from the outside, the position of the tip portion of the probe 54 in the Z-axis direction is
It is set so as to slightly project from the positions of the X slide surface 64d and the Y slide surface 69d in the Z axis direction. Then, the position of the sample W is also moved downward corresponding to the protrusion of the tip of the probe.

(Operation of Embodiment 2) FIG. 11 is an enlarged view of a main part of the scanner holding device of Embodiment 2, FIG. 11A is an explanatory view at a normal time, and FIG. 11B is an explanatory view at a time of inclination due to coarse movement. . In the scanning probe microscope SPM of the second embodiment including the scanner holding device SD ′ having the above-described configuration, the X slider 62 and the Y slider 69 are moved (X axis coarse movement) by the X, Y axis coarse movement rods Rx, Ry. , Y-axis coarse movement).
Then, similarly to the first embodiment, the scanner holding device SD ′ is moved in the vertical direction (Z-axis coarse movement) by the Z-axis coarse movement rod Rz, and the tip of the probe 54 is moved to the inspection start position (scan start position) of the sample W. ) To. After the X, Y, and Z axis coarse movement, the scanner 52 is finely moved in the X, Y, and Z axis directions to scan the tip of the probe 54 along the sample W surface, and the sample W surface is inspected.

In FIG. 11, the X and Y sliders 6 are
During the coarse movement of 4, 69, the unevenness of the surface of the X slide surface 64d and the Y slide surface 69d, and the X, Y slide surface 64
The X-slider 64 and the Y-slider 69 are caused by the backlash and the deviation between the d, 69d and the X, Y slide rails 62, 67.
Tilts, or due to external factors, the X, Y slider 6
4,69 may vibrate. In the scanner holding device SD ′ of the second embodiment, the position of the tip of the probe 54 is the X slide surface 64d and the Y slide surface 69, which are fulcrums of vibration.
A position slightly protruding in the Z-axis direction from the position of d (L ≠
Since it is set to 0), the tip of the probe 54 slightly tilts and vibrates (see FIG. 11B). But probe 5
The distance L in the Z-axis direction between the tip of No. 4 and the X, Y slide surfaces 64d, 69d (that is, the amount of protrusion of the tip of the probe 54) is
Since it is sufficiently close to 0 as compared with the conventional coarse movement mechanism, the vibration at the tip of the probe 54 can be dramatically suppressed as compared with the conventional case. As a result, the sample W is larger than the inner diameter of the Y slider 69,
Even if the tip of the probe 54 has to be projected more than the lower ends of the X, Y sliders 64, 69, the conventional SP
The vibration at the tip of the probe 54 can be suppressed more than M. This protrusion amount affects the vibration of the tip of the probe 54 and appears as an error in the SPM image, so that the protrusion amount can be arbitrarily set within the allowable error range.

Therefore, in the scanning probe microscope SPM having the scanner holding device SD 'of the second embodiment, X,
Since it is possible to suppress the inclination of the tip of the probe 54 during the coarse movement of the Y sliders 64 and 69 and vibration due to external factors,
It is possible to obtain an SPM image with higher accuracy than before.

Incidentally, the scanner holding device SD 'of the second embodiment.
Are surrounded on all sides by an X slide base 61, an X slider 64, a Y slide base 66, and a Y slider 69. Therefore, since the scanner 52 and the probe 54 are doubly surrounded by the scanner holding device SD ', the X slide base 61, the X slider 64, the Y slide base 66, and the Y slider 69 are formed of a material having good thermal conductivity. Then, the XY slide members (61, 64, 6
6,69) can be used as a heat shield. Therefore, the scanner holding member SD ′ according to the second embodiment also has a high heat shield effect, as in the scanner holding device SD according to the first embodiment. In the second embodiment, when the sample holder can be arranged in the Y slider 69, as in the first embodiment,
It is also possible to set the position of the tip of the probe 54 and the position of the slide surface 64d to be substantially the same position in the Z-axis direction.

(Embodiment 3) FIG. 12 is an overall explanatory view of Embodiment 3 of the scanning probe microscope of the present invention. FIG. 13 is an enlarged view of a main part of the stage unit according to the third embodiment. 14
12 is an enlarged plan view of the stage unit of Example 3, and FIG.
It is the figure seen from arrow XIV. FIG. 15 is an explanatory diagram of a slide base positioning member according to the third embodiment. In the description of the scanner holding device according to the third embodiment, constituent elements corresponding to those of the scanner holding device SD ′ according to the second embodiment are designated by the same reference numerals, and detailed description thereof will be omitted.

In FIG. 12, the scanning probe microscope SPM of the third embodiment has a sample chamber A1. On the outer wall 71 forming the sample chamber A1, the sluice valve 7 is provided on the + Z side portion.
2 is connected to the sample exchange chamber A2, the stage support flange 73 is provided on the −Z side portion, and the observation window 7 is provided on the + X side.
6 is provided.

A sample holder transfer member 77 is supported on the outer wall (not shown) of the sample exchange chamber A2 so as to be movable back and forth in the Z-axis direction. The holder transfer member 77 transfers the sample holder 26 between the sample chamber A1 and the sample exchange chamber A2 through the sluice valve 72. 12 and 13, the large base 78 arranged in the sample chamber A1 is supported inside the stage support flange 73. A small base 80 is supported on the large base 78 via four vibration isolation units 79. Positioning member through holes 78a and 80a (see FIG. 13) are formed in the large base 78 and the small base 80, respectively.

(Sample Stage) As shown in FIGS. 12 to 14, a sample stage support member 8 integrally formed with the small base 80 is provided at the tip (Z side end) of the small base 80.
6 is provided. The sample stage support member 86 has one sample holder through hole 86a (FIG.
3)) and three stage support holes 86b formed on the outside thereof. The sample stage support member 8
A sample stage T is arranged on the −Z side of 6. The sample stage T has a stage support leg 87 that fits into the stage support hole 86b and a sample stage body 88, and the sample stage T is fixedly supported by the sample stage support member 86. A sample holder mounting hole 88a is formed in the center of the stage body 88.

(Probe Stage) A Z slide base 91 (see FIG. 14) is movably supported on the small base 80 by a rail (not shown) extending in the Z axis direction. The −Z side end of the Z slide base 91 is connected to the connecting lever 92, and the connecting lever 92 is connected to the base moving rod 93. The base moving rod 93 can be moved in the Z-axis direction by the manual operation member 94. The Z slide base 91 is pulled in the + Z direction by two tension springs 96, 96 (see FIG. 14) and positioned by a positioning member 97 (see FIG. 15) that abuts on the front end surface of the Z slide base 91. Has been done. In FIG. 15, the positioning member 97 has a U-shaped portion 97a at the upper end portion and a linear rod portion 97b extending downward from the central portion thereof, and the hinge connecting portion at the upper end portion of the linear rod portion 97b. 97c is provided.

In FIGS. 13 and 15, a pair of hinge connecting members 98, 98 are fixed to the lower surface of the small base 80 at positions corresponding to the positioning member through holes 80a. The positioning member 97 includes the pair of hinge connecting members 98, 98.
It is possible to swing in the Z-axis direction with the hinge connecting portion 97c connected by the hinge as the swing center. Both ends of the U-shaped portion 97a of the positioning member 97 are in contact with the end surface of the Z slide base 91 facing the + Z direction,
The lower end portion penetrates the positioning member through hole 78a (see FIGS. 13 and 15) of the large base 78 and is in contact with the tip portion (Z-side end) of the slide base position control rod 99. The slide base position control rod 99 can be moved and adjusted (Z axis coarse movement) in the Z axis direction by a base position control motor unit MZ (see FIG. 12) supported on the outer surface of the stage support flange 73. In addition, the connecting lever 92, the base moving rod 93, and the manual operation member 94.
Can freely move in the Z-axis direction, and when the Z slide base 91 is roughly moved in the Z-axis direction by the base position control motor unit MZ, the connecting lever 9
It is possible to perform Z-axis coarse movement without being hindered by 2 or the like.

In FIGS. 13 and 14, the holding device supporting member 100 is fixedly supported by bolts on the Z slide base 91, and the connecting device 100a at the + Z side end of the holding device supporting member 100 has a rectangular tubular shape. The X base top wall 64a of the scanner holding device SD ″ is fixedly supported. The scanner holding device SD ″ has the same configuration as the scanner holding device SD ′ of the second embodiment except for the following three points. ,
Detailed description is omitted. (1) The retained portion 34 is omitted. (2) Attach the tip of the probe 54 to the X, Y sliders 64, 69.
The point that protrudes outward from the slide surface of. (3) The Z-axis connecting the front end and the base end of the scanner 52 is arranged laterally.

(Operation of the Third Embodiment) In the scanning probe microscope SPM including the scanner holding device SD ″ of the third embodiment having the above-described structure, the sample holder 26 holding the sample is conveyed by the holder conveying member 77, It is mounted on the sample stage T arranged in the sample chamber A1. After mounting the sample holder 26 on the sample stage T, the slide base position control rod 9 is moved by the base position control motor unit MZ.
9 is adjusted to move the Z slide base 91 in the Z axis direction so that the distance between the tip of the probe 54 and the surface of the sample W becomes a set distance (Z axis coarse movement).

After the Z axis coarse movement, the X and Y axis coarse movement rods R
The X slider 62 and the Y slider 69 are moved (X axis coarse movement, Y axis coarse movement) by x and Ry, and the probe 5 is moved.
The tip of 4 is moved to the inspection start position (scanning start position) of the sample W. After the coarse movement of X, Y and Z, the scanner 52 is moved to X, Y and
While slightly moving in the Z-axis direction, the tip of the probe 54 scans the sample W to inspect the surface of the sample W.

The scanner holding device SD ″ of the third embodiment is similar to the scanner holding device SD ′ of the second embodiment in that the tip of the probe 54 is the fulcrum of inclination and vibration, and the Z of the X and Y slide surfaces 64d and 69d. Although it is set at a position (L ≠ 0) slightly protruding with respect to the axial direction, the distance L in the Z-axis direction between the tip of the probe 54 and the X, Y slide surfaces 64d, 69d.
However, since it is close to 0 compared to the conventional coarse movement mechanism, probe 5
4 The inclination of the tip and the displacement of vibration can be dramatically suppressed compared to the conventional case. As a result, even when the sample W is larger than the inner diameter of the Y slider 69 and the tip of the probe 54 needs to be projected more than the slide surface as in the third embodiment, vibration at the tip of the probe 54 is larger than that of the conventional SPM. Can be suppressed.

Therefore, in the scanning probe microscope SPM having the scanner holding device SD ″ of the third embodiment, X,
Since it is possible to suppress the inclination of the tip of the probe 54 and the amount of displacement of vibration when the Y sliders 64 and 69 are coarsely moved, it is possible to obtain an SPM image with higher accuracy than in the past. In the third embodiment, when the sample holder 26 can be arranged in the Y slider 69, the position of the tip of the probe 54 and the position of the slide surface 64d are substantially the same in the Z-axis direction as in the first embodiment. It is also possible to set so that

(Modifications) Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above-mentioned embodiments, but is within the scope of the gist of the present invention described in the claims. Thus, various changes can be made. A modified example is illustrated below. (H01) In each of the above embodiments, the coarse movement members SSx, SS
The shape, arrangement position, and configuration of each member of y are not limited to the configuration of each embodiment, and any coarse movement device that can adjust the position of the slider can be used. (H02) In each of the above embodiments, the scanner holding device S
It is also possible to mount the sample holder 26 on the tip of the scanner 52 of D, SD ′, SD ″, fix the probe 54, and scan the sample holder 26 by the scanner 52 to inspect the surface of the sample W. (H03) In each of the above embodiments, the probe 54 is set to X, Y.
It is also possible to have a configuration in which the sample holder 26 is coarsely moved and the sample holder 26 is roughly Z-moved. (H04) In the first embodiment, the slide surface 36d and the tip of the probe 54 are set to be substantially at the same position in the Z-axis direction. However, this is the same as in the second and third embodiments. It is also possible to set so as to project below the slide surface 36d. (H05) In each of the above-described embodiments, the tip of the probe 54 can be set to be located above the slide surface 36d (the tip of the probe 54 is housed inside the slider 47). Even in this case, the slide surface 36
Since the distance L in the Z-axis direction between d and the tip of the probe 54 is sufficiently small, the vibration at the tip of the probe 54 can be dramatically suppressed as compared with the conventional one for the same reason as described in the second and third embodiments. (H06) In each of the above-described embodiments, the slider tension spring is used to position and slide the slider. However, it is possible to use any structure in which the slider is pressed against the slide base to be positioned and slidable. That is, it is also possible to adopt a configuration in which the slider is pulled by utilizing an electric field or magnetic force, or a configuration in which the slider is pressed against the slide base from the outside.

[0083]

The scanner holding device and the scanning probe microscope of the present invention described above can achieve the following effects. (E01) The vibration of the tip of the probe can be suppressed by not transmitting rattling or deviation of the slide rail or external vibration to the scanner fixing base. (E02) By suppressing the vibration of the probe tip, it is possible to provide an SPM (scanning probe microscope) capable of obtaining a highly accurate SPM image. (E03) Since the probe is heat shielded by the scanner holding device, it is possible to suppress the temperature change near the probe and improve the accuracy of the SPM image.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a first embodiment of a scanning probe microscope of the present invention, and FIG. 1A is an ST of the scanning probe microscope.
FIG. 1B is a diagram showing a state in which the M cell is at the sample exchange position, and FIG.
It is a figure which shows the state in which a TM cell exists in a sample observation position.

2 is an S of the scanning probe microscope of Example 1. FIG.
2A is a front view, FIG. 2B is a view seen from an arrow IIB in FIG. 2A, and FIG. 2C is a IIC in FIG. 2A.
2D is a view seen from the line -IIC, and FIG. 2D is the line IID-IID of FIG. 2A.
FIG. 2E is a perspective view of the attachment / detachment lever shown in FIG. 2D, and FIG. 2F is a perspective view of the lever support member shown in FIG. 2D.

FIG. 3 is an explanatory diagram of a method of mounting the STM cell on the STM cell supporting device, FIG. 3A is a diagram showing a state in which the STM cell is transported to the STM cell supporting device, and FIG. 3B is an STM cell attaching / detaching process. FIG. 3C is a view showing a state in which the STM cell supporting device is pressed by the operating rod, FIG. 3C is a view showing a state in which the STM cell attaching / detaching rod is rotated and the STM cell is attached to the STM cell supporting device, and FIG. 3D is an STM cell attaching / detaching rod. Showing the state of being detached upward, and FIG. 3E is a view of III of FIG. 3A.
FIG. 3F is a view seen from the line E-IIIE, and FIG.
FIG. 3G is a sectional view taken along line IIIF-IIIG in FIG. 3C, and FIG. 3H is a sectional view taken along line IIIH-IIIH in FIG. 3D.

FIG. 4 is a cross-sectional view of essential parts of an STM cell of Example 1.

5 is a sectional view taken along line VV of FIG. 4, and FIG.
FIG. 5B is a view in which the gear of the VV line cross section is omitted, and FIG. 5B is a view in which the gear of the VV line cross section is described.

6A and 6B are explanatory views of a main part of the scanner holding device for the STM cell according to the first embodiment. FIG. 6A is a sectional view, FIG. 6B is a view seen from the VIB direction of FIG. 6A, and FIG. 6C is a view of FIG. 6B. VIC
It is the figure seen from the direction.

7A and 7B are enlarged views of a main part of the scanner holding device according to the first embodiment. FIG. 7A is an explanatory diagram of a normal state, and FIG. 7B is an explanatory diagram of an inclined state due to coarse movement.

FIG. 8 is an exploded perspective view of a scanner holding device according to a second embodiment.

9A and 9B are enlarged views of a main part of the scanner holding device according to the second embodiment. FIG. 9A is a side view and FIG. 9B is IX of FIG. 9A.
It is the figure seen from the B direction.

10 is a cross-sectional view of a main part of a scanner holding device according to a second embodiment, FIG. 10A is a cross-sectional view taken along line XA-XA of FIG. 9B, and FIG. 10B is a cross-sectional view taken along line XB-XB of FIG. 10A.

FIG. 11 is an explanatory diagram of a slide base positioning member according to a second embodiment.

FIG. 12 is an overall explanatory diagram of a scanning probe microscope according to a third embodiment of the present invention.

FIG. 13 is an enlarged view of a main part of a stage unit according to a third embodiment.

FIG. 14 is an enlarged plan view of a stage unit according to a third embodiment, which is a view as seen from an arrow XIV in FIG.

FIG. 15 is an explanatory diagram of a slide base positioning member according to a third embodiment.

FIG. 16 is a schematic diagram of an S including a conventional X and Y slider.
16A is an explanatory view of a scanner portion of a PM (scanning probe microscope), FIG. 16A is a partial cross-sectional view, and FIG. 16B is a view seen from XVIB-XVIB of FIG. 16A.

FIG. 17 is an SP equipped with a conventional planar slider.
17A is an explanatory view of a scanner portion of M, FIG. 17A is a partial sectional view, and FIG. 17B is a view seen from XVIIB of FIG. 17A.

FIG. 18 is a diagram showing an operation of a conventional SPM having a slider during coarse movement; FIG. 18A is an explanatory diagram of a Y slide unit and a scanner portion of the SPM of FIG. 16;
Is an explanatory view of the action during coarse movement, and FIG. 18C is the same as FIG. 18A and FIG.
8B is an explanatory diagram of an angular relationship between the tilt angle θ of the scanner fixing base and the displacement δd of the probe tip shown in FIG. 8B. FIG.

[Explanation of symbols]

SD, SD '... Scanner holding device, SU, SU' ... Scanner support member, W ... Sample, 36; 61, 66 ... Slide base, 36d; 64d, 69d ... Sliding surface, 47;
64, 69 ... Sliders, 52 ... Scanners, 54 ... Probes.

Claims (2)

[Claims] 1. A scanner holding device having the following constituent features (A01) and (A02), wherein (A01) a base end is supported and a tip end holding a probe or a sample is a free end. It is composed of a piezoelectric body configured and is expandable and contractable in the Z-axis direction connecting both ends of the base end portion and the tip end portion,
A scanner in which the tip portion is movable in the X-axis and Y-axis directions that are perpendicular to the Z axis and perpendicular to each other, (A02) A slider that supports the base end portion of the scanner, and a slider that slidably supports the slider. A scanner supporting member having a slide base, wherein a slide surface perpendicular to the Z-axis direction in which the slider contacts the slide base and slides, and the probe tip or the sample surface are substantially in the Z-axis direction. The scanner support member arranged at the same position. 2. A scanning probe microscope provided with the scanner holding device according to claim 1.