JP2003332546A - Solid-state image pickup element and imaging device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a solid-state image pickup element which can efficiently converge incident light in an optical sensor and can eliminate light shielding for other places than the optical sensor, and also to provide an imaging device using the same. <P>SOLUTION: In a pixel section 16, the optical sensor 6, and a liquid crystal lens 30 which controls the refracting direction of the light incident into the optical sensor 6 by means of an applied voltage are disposed in this order in the light progressing direction. A top electrode applied with the applied voltage is split into electrodes 10a and 10b. By applying different voltages to the electrodes 10a and 10b of the top electrode, a tilting angle of a liquid crystal molecule is changed, thereby controlling the light incidence to the optical sensor section 6. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state image pickup device and an image pickup device, which are suitable for focusing light on a light sensing portion.

[0002]

2. Description of the Related Art First, as shown in FIG. 7, the structure and charge transfer process of a conventional two-dimensional solid-state image pickup device 69 are as follows.

That is, the incident light that is incident on the optical sensor portion 56 which forms the image area central portion 57 and the image area peripheral portion 58 of the solid-state image pickup element 69 generates an electric charge in the optical sensor portion 56, and the electric charge is generated in the sensor portion. 56 to vertical register section (VCCD: Vertical Charge Coupled De
vise: The same applies hereinafter. ) 55 to the horizontal register unit (HCC).
D: Horizontal Charge Coupled Devise: The same applies hereinafter. ) 67.

Next, in the horizontal register section 67,
For example, by alternately applying two-phase different transfer pulse voltages having the same pulse every other pole, charge transfer is controlled in the vicinity of the substrate surface in the horizontal register section 67, and the progress and stop of the charge are stopped. Are repeated, and the signals are sequentially and promptly transferred to the amplifier output terminal 68.

Next, as shown in FIG. 8, on the conventional solid-state image pickup device 69, an on-chip lens is provided on each pixel portion 66 as a means (light condensing means) for improving the light sensitivity of the optical sensor portion 56. There is one forming 51 (Japanese Patent Laid-Open No. 5-
326903). Here, on the semiconductor substrate 70, as shown in FIG. 7, a plurality of pixel portions 6 forming an image area central portion 57 and an image area peripheral portion 58.
6 is formed, the structure in the vicinity of one pixel portion 66 will be described as a representative in FIG.

In the pixel portion 66, a charge transfer path region 72, which is an N-type conductive region, and an optical sensor portion 56 are formed on a P-type semiconductor substrate 70 made of Si, and a gate insulating film is formed thereon. 71 and the transfer electrode 55 are formed, and the transfer gate of the vertical register portion is configured. Transfer electrode 55
A light-shielding film 54 for preventing light from entering the charge transfer region is provided on the insulating film 64, and the convex portion 9 is further provided thereon.
0 (concave lens portion) and concave portion 91 (convex lens portion) are combined to form an in-layer lens 53, a transparent insulating layer 73, a color filter 52, and a convex portion 90 (convex lens portion). An on-chip lens 51 for the purpose of improvement is formed. Illustration of the channel stopper and the like is omitted.

[0007]

At this time, since each on-chip lens 51 is made of a material such as resin and cannot be easily deformed, the shape and refractive index of the on-chip lens 51 are incident. Depending on the light condition,
It is difficult to distinguish each pixel and change it appropriately.

Therefore, as shown in FIG.
When the light source 65 is sufficiently distant from the image area central portion 57 and the peripheral portion 58, which are composed of a plurality of pixel portions 66, the incident light from the light source 65 is emitted from the image area central portion 5.
7 and the peripheral portion 58, and becomes normal incident light that is incident almost perpendicularly to the surface, and the solid-state imaging device 69 of FIG.
As shown in FIG. 8 which is a sectional view taken along the line A ′, the vertically incident light is condensed by the convex portion 90 of the on-chip lens 51 into the concave portion 91 of the intralayer lens 53, and the convex lens action causes the direction of the optical sensor portion 56. The light is sufficiently refracted and is relatively efficiently focused on the optical sensor unit 56.

On the other hand, as shown in FIG. 10B, the image area central portion 5 including a plurality of pixel portions 66.
When the light source 65 approaches the 7 and the peripheral portion 58,
The incident light from the light source 65 is incident on the central portion 57 of the image area substantially perpendicularly, but is obliquely incident on the peripheral portion 58 in an oblique direction.
9, which is a sectional view taken along the line AA ′ of the solid-state imaging device 69, the convex portion 90 of the on-chip lens 51 and the in-layer lens 53 in the image area peripheral portion 58, depending on the incident position of oblique incident light. Even if the light is refracted by the convex portion 90 or the concave portion 91, it is difficult to collect the light on the optical sensor portion 56.

Therefore, depending on the conditions such as the incident angle or the incident position of the obliquely incident light, the central portion 57 of the image area where it is easy to collect light and the peripheral portion 58 where it is difficult to collect light are collected to the respective optical sensor parts 56. A difference occurs in the amount of light, and the characteristics of each photosensor unit 56 for each pixel unit 66, such as the sensitivity (indicating a transfer rate that is a ratio that is effectively used for an image) or smear (indicating a non-transfer rate). Variation will occur.

Further, when the incident light which cannot be condensed on the optical sensor portion 56 is incident on the charge transfer electrode 55 or the like provided on the side of the optical sensor portion 56, electric charge is generated in the semiconductor substrate to have a charge transfer function. The light-shielding film 5 for preventing light from entering the exposed surface of the charge transfer electrode 55 in order to cause troubles.
4 is required, which increases the number of manufacturing steps of the pixel portion 66.

The present invention has been made in view of the above situation, and an object thereof is to efficiently collect incident light on a photo-sensing section and to perform a light-shielding treatment on a portion other than the photo-sensing section. An object of the present invention is to provide a solid-state imaging device that can be omitted, and an imaging device using the same.

[0013]

That is, according to the present invention, a light sensing portion and a light collecting means for controlling a refraction direction of light incident on the light sensing portion by an applied voltage are sequentially arranged along a light traveling direction. In the solid-state image sensor described above, the electrodes to which the applied voltage is applied are divided into a plurality of areas, and by applying different voltages to these electrodes, a region where light incidence on the photo-sensing unit is controlled is defined. The present invention relates to a solid-state image pickup device having the image pickup device and an image pickup apparatus including the solid-state image pickup device.

The present invention also provides a solid-state image pickup device in which a light sensing portion and a light condensing means for controlling a refraction direction of incident light on the sensing portion by an applied voltage are sequentially arranged along a light traveling direction. The present invention relates to a solid-state image sensor having a region in which the shape of the electrode of the light-collecting means is changed corresponding to a light-sensing unit, and an image-capturing apparatus including the solid-state image sensor.

According to the present invention, the electrodes to which the voltage applied to the light converging means is applied are divided into a plurality of electrodes, and by applying different voltages to these electrodes, the electrodes are sequentially moved along the light traveling direction. In order to optimally control the refraction direction of the incident light to the light sensing unit for each of the arranged solid-state image sensors, the angle is arbitrary with respect to the solid-state image sensor, including an oblique direction. The incident light coming in can be efficiently condensed on the light sensing portion.

Further, by providing a region in which the shape of the electrode of the light collecting means is changed corresponding to the light sensing portion, even if the electrodes are divided and the same voltage is applied to them, the traveling direction of the light In order to optimally control the refraction direction of the incident light to the photo-sensing section for each solid-state image sensor sequentially arranged along the direction, the oblique direction with respect to the solid-state image sensor is also set so as to be optimally controlled for each region corresponding to each electrode. It is possible to efficiently collect the incident light entering at any angle including the light sensing portion.

Further, since the refraction direction of the incident light to the light sensing portion of each solid-state image pickup element sequentially arranged along the light traveling direction is optimally controlled for each region corresponding to each electrode, Since it becomes difficult for the incident light to enter the portion other than the light sensing portion, it is possible to omit the light shielding measure for forming the light shielding film on the portion other than the light sensing portion.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION In order to control the light converging means at a high speed and with high accuracy, it is desirable that the light condensing means is composed of a liquid crystal element.

Further, in order to control the light converging means with high accuracy, of the pair of transparent electrodes forming the liquid crystal element, the light incident side or the light emitting side electrode is divided with respect to the light sensing portion. Is desirable.

Further, it is desirable that the liquid crystal constituting the liquid crystal element has a negative or positive dielectric anisotropy.

Further, it is desirable that a lens means (for example, an intralayer lens) for condensing is added between the condensing means and the light sensing portion as an auxiliary means of the condensing means.

In addition, it is preferable that a charge transfer unit is provided at a side of the light sensing unit in order to transfer charges generated in the light sensing unit.

Further, it is desirable that the image pickup device comprising the solid-state image pickup device is constructed as a CCD camera or as a light receiving part of a single lens reflex type camera.

Preferred embodiments of the present invention will be described below in detail with reference to the drawings.

First Embodiment As shown in FIG. 1A, the structure of the pixel section 16 when no voltage is applied (at the time of initial setting) in the present embodiment is a P-type semiconductor substrate 20 made of Si. A transfer path region 22 which is an N-type conductive region and an optical sensor portion 6 are formed on the gate insulating film 21 and the transfer electrode 5 of the vertical register portion.
Is provided. Then, if necessary, a light-shielding film 4 is provided on the insulating film 14, and on top of that, an in-layer lens 3 composed of a combination of a concave portion 41 (convex lens portion) and a convex portion 40 (concave lens portion), a transparent insulating film. The layer 23, the color filter 2, and the liquid crystal lens 30 are provided. The channel stopper and the like are not shown.

Here, the liquid crystal lens 30 which plays the role of a condenser lens is a negative type liquid crystal molecule 31 having a negative dielectric anisotropy.
A liquid crystal layer 13 in which (a collection of a large number of liquid crystal molecules is actually regarded as one, and the director thereof is represented) is homogeneously aligned, and transparent for applying a voltage to the liquid crystal layer 13. Upper (split) electrodes 10a, 10
b, a transparent lower (common) electrode 11, a polarization filter 12 that transmits only light having a certain polarization direction, and the like.

The lower electrode 11 is continuously formed so as to cover the color filter 2, but the upper electrodes 10a and 1a
0b is provided with an opening 32 between them and is formed separately on both sides of the optical sensor unit 6. The position of the opening 32 is almost directly above the optical sensor unit 6.

The variable voltage power supply 9 is composed of the transparent upper electrode 1
0a, 10b and the transparent lower electrode 11 are connected. The polarity and size of the variable voltage power supply 9 are determined by the electrode 10
It is variable (or constant) for each a and 10b, and in the present embodiment, unless otherwise specified, the liquid crystal molecules 31 are stationary at right angles to the lower electrode 11 when no voltage is applied, and when a voltage is applied. It is assumed that the liquid crystal molecules 31 are tilted obliquely with respect to the lower electrode 11 and in the left-right opposite direction with respect to the photosensor portion 6 in accordance with the magnitude of the applied voltage.

Further, as shown in FIG. 7, a plurality of pixel portions 16 having the same structure as described above are combined to form an image area. Here, the structure will be described with one pixel portion 16 as a representative example. To do.

In this pixel portion 16, the liquid crystal lens 30 is formed as a condenser lens, but since the opening 32 is provided between the upper electrodes 10a and 10b to which a voltage is applied, the upper electrodes 10a and 10b are formed. When a voltage is applied to each of the and lower electrodes 11, a non-uniform electric field is generated in the liquid crystal layer 13.

At this time, the orientation of the liquid crystal molecules 31 having a negative dielectric anisotropy is as follows: the lower part 35 of the upper electrode 10a, the lower part 36 of the boundary between the upper electrode 10a and the opening 32, the lower part 37 of the opening 32, and the opening. Lower part 3 of the boundary between the part 32 and the upper electrode 10b
8, in the region such as the lower portion 39 of the upper electrode 10b, the liquid crystal layer 13 can be used as a condenser lens because the refractive index distribution is generated in the liquid crystal layer 13 uniformly or nonuniformly.

That is, since the state of the tilt angle or the like of the liquid crystal molecules 31 in each liquid crystal layer 13 can be freely adjusted by the value of the applied voltage, the state of the incident angle or the incident position of the incident light can be changed. Accordingly, the optimum refractive index distribution can be formed.

Here, FIG. 1A shows a state when obliquely incident light is incident on the pixel portion 16 when no voltage is applied, and all the liquid crystal elements 31 are orthogonal to the lower electrode 11. In the lower portion 35 of the upper electrode 10a, the lower boundary portion 36, the lower boundary portion 38, and the lower portion 39 of the upper electrode 10b, the oblique incident light is reflected by each liquid crystal element 31 in these regions and is almost equal to the optical sensor unit 6. The light enters vertically and then refracts toward the optical sensor portion 6 side by the action of the convex portion 40 of the intralayer lens 3. However, when the incident position of the in-layer lens 3 on the convex portion 40 is relatively far from the optical sensor unit 6 and the incident angle is deep, it does not reach the optical sensor unit 6 and is incident on the light-shielding film 4 and is reflected. , Is not focused on the optical sensor unit 6.

On the other hand, as shown in FIG. 1B, since the lower portion 37 of the opening 32 is located almost directly above the optical sensor portion 6, the obliquely incident light causes each liquid crystal molecule 31 in this region to be inclined.
The light is refracted by the optical sensor unit 6 by the inner lens 3
Is incident almost vertically by each of the electrodes 10a, 1 and
Since different voltages are applied to 0b, the tilted liquid crystal molecules 3 are provided on the light-shielding film 4 which is away from the optical sensor section 6.
It can be refracted inward by 1 and can be efficiently refracted by the in-layer lens 3 with respect to the optical sensor section 6.

That is, FIG. 1B shows the pixel portion 16 at the time of applying a voltage, and in the lower portion 35 of the electrode 10a, the polarities of the voltage variable power source 9 are reversed so that each liquid crystal element 3 is formed.
1 is tilted to the left with respect to the lower electrode 11, and since the same strong electric field as that of the lower portion 35 of the electrode 10a is not applied to the lower portion 36 of the boundary, the inclination angle of each liquid crystal molecule 31 in this region is lower than that of the opening 32. It is inclined at an angle intermediate between the orthogonal angle of 37 and the inclination angle of the lower portion 35 of the electrode 10a.

In the lower part 39 of the electrode 10b,
By applying a voltage with a normal polarity, each liquid crystal element 31 is tilted to the right with respect to the lower electrode 11, and at the boundary lower part 38, the same strong electric field as that of the lower part 39 of the electrode 10b is not applied. The tilt angle of the liquid crystal element 31 in the region is the opening 3
2 is an intermediate angle between the angle of the lower portion 37 of 2 and the inclination angle of the lower portion 35 of the electrode 10b.

Then, the lower portions 35 of the electrodes 10a and 10b,
The obliquely incident light incident on the region of 39 and the lower portions 36 and 38 of the boundary is refracted by each liquid crystal molecule 31, and the in-layer lens 3
The optical function of the optical sensor unit 6 by the lens action of the convex portion 40 and the concave portion 41
Since the light travels in the direction of, the light can be easily focused on the optical sensor unit 6 without being reflected by the light shielding film 4 or the like.

In the lower part 37 of the opening 32, FIG.
As in the case of (a), the light is incident on the optical sensor unit 6.

As shown in FIG. 2, even when the incident light is vertically incident, the vertically incident light is incident on each liquid crystal molecule 3
It will be easily understood that the light is refracted by 1 and is easily condensed on the optical sensor portion 6 through the intralayer lens 3.

As described above, according to the present embodiment, the upper electrode for applying the voltage applied to the liquid crystal lens 30 is divided into 10a and 10b, and these electrodes 10a and 1b are divided.
Since different voltages are applied to 0b, the refraction direction of the obliquely incident light to the photosensor unit 6 for each pixel unit 16 is optimally controlled for each upper electrode, so that each pixel is controlled. The oblique incident light that enters the portion 16 at an arbitrary angle can be efficiently focused on the photosensor portion 6, and the variation in the photosensitivity characteristic of each pixel portion 16 can be improved.

Since the condenser lens is composed of the liquid crystal lens 30, the tilt angle and the tilt direction of the liquid crystal molecules 31 are controlled by the voltage applied to the upper electrode of the liquid crystal lens 30 to change the refractive index. Therefore, it is possible to form a condenser lens having an optimum light refractive index according to incident light from an arbitrary angle, and it is possible to perform finer light refraction control of the liquid crystal lens 30.

Further, since the refraction direction of the obliquely incident light is optimally controlled, it becomes difficult for the incident light to hit the portion other than the optical sensor portion 6, and the light shielding film 4 in the portion other than the optical sensor portion 6 becomes difficult.
Can be omitted or reduced.

Further, when the solid-state image pickup device 69 composed of the pixel portion 16 is used by incorporating it in a camera or the like, light can be incident on the optical sensor portion 6 with an amount of light received corresponding to the aperture value. Can be taken under the proper exposure condition.

Second Embodiment In the present embodiment, as shown in FIG.
Width (or shape) of the upper electrodes 10a and 10b so that the position of 2 shifts from the top of the optical sensor unit 6 to the left by a predetermined distance.
Is changed, that is, the size and position of the opening 32 are optimized in advance in accordance with the incident angle of the oblique incident light with respect to each pixel unit 16, which is different from the first embodiment. Is basically the same.

That is, by changing the shape of the upper electrodes 10a and 10b of the liquid crystal lens unit 30 corresponding to the optical sensor unit 6, voltages of the same polarity and magnitude are applied to the electrodes 10a and 10b, respectively. Also, since the refraction direction of the incident light on the optical sensor unit 6 for each pixel unit 16 is optimally controlled, the incident light incident on the pixel unit 16 at an arbitrary angle can be efficiently used. Can be focused on. The mechanism of this refraction is the same as that described in the first embodiment.

Therefore, as shown in FIGS. 3B and 7, the light refractive index of the pixel portion 66 near the image area central portion 57 and the light refractive index of the pixel portion 66 near the image area peripheral portion 58 are Since it can be optimized for each of the obliquely incident lights, even when the value of the voltage applied to the liquid crystal layer 13 on all the pixel portions 66 is the same, the refractive index distribution of the liquid crystal lens 30 is different for each pixel portion 66. Even if it is not changed, the obliquely incident light surely enters the optical sensor unit 6, and it is possible to improve the variations in the sensitivity characteristics and the like among the pixel units 66.

Further, the upper electrodes 10a and 10
Since the same voltage is applied to b, the control operation of the photorefractive index can be performed relatively easily.

In addition, it goes without saying that the same operational effects as those of the above-described first embodiment also occur in this embodiment.

Third Embodiment In the present embodiment, as shown in FIG. 4, the upper electrode 10a is formed.
And 10b have the same length as in the second embodiment,
The second embodiment is the same as the second embodiment except that the upper electrode 10c is added with a slight gap provided between the upper electrodes 10a and 10b.

That is, since the upper electrode 10c is provided, an electric field is applied to almost the entire area of the liquid crystal layer 13, so that the variable voltage power supply 9 causes the upper electrodes 10a, 10a and 10b.
The same voltage is applied to b and 10c to tilt each liquid crystal element 31 to the right with respect to the lower electrode 11. by this,
The obliquely incident light that enters the liquid crystal layer 13 receives each liquid crystal molecule 31.
Is refracted by the optical sensor unit 6 through the inner lens 3
It becomes easier to focus light on.

Since the upper electrode is provided on almost the entire surface, all the liquid crystal molecules 31 can be driven, and the refractive index of the liquid crystal lens 30 can be controlled over the entire area.

In addition, it goes without saying that the same operational effects as those of the above-described first or second embodiment also occur in this embodiment.

Fourth Embodiment In the present embodiment, the upper electrode 10c is also provided as in the third embodiment, but as shown in FIG. 5A, the lower electrode 11 is not applied to the lower electrode 11 when no voltage is applied. The liquid crystal element 31 is the same as that of the first embodiment except that a positive type liquid crystal element which is parallel to the liquid crystal and is orthogonal to the voltage application is used for the liquid crystal element 31.

Therefore, as shown in FIG. 5B, the liquid crystal molecules 31 under the upper electrodes 10a, 10b, and 10c are tilted or erected by applying a voltage, so that the liquid crystal molecules 31 under the upper electrodes 10a, 10b, and 10c are removed from the first embodiment. Since the angle can be made almost the same as that of the form (see FIG. 1B), the incident state of the obliquely incident light is similar, and the light collecting effect is good.

In this embodiment, since the liquid crystal element 31 is in parallel with the lower electrode 11 when no voltage is applied, the inside of the optical sensor section 6 is not driven when the solid-state image pickup element including the plurality of pixel sections 16 is not driven. It becomes easy to prevent the incidence of light on the.

Since the liquid crystal molecules 31 corresponding to the upper electrode 10c can be driven, a finer refractive index control of the liquid crystal lens 30 can be performed.

In addition, it goes without saying that the same operational effects as those of the above-described first embodiment also occur in this embodiment.

Fifth Embodiment In this embodiment, as shown in FIG. 6A, a single-lens reflex type camera in which a solid-state image pickup device 69 having the same structure as that shown in FIG. It is about. As shown in FIG. 6B, this solid-state image pickup device 69 has a liquid crystal lens 30 which may be provided with an upper electrode 10c.

Recently, not only compact cameras but also FIG.
As shown schematically in (a), a solid-state image sensor is also used in a single-lens reflex camera 27 provided with an interchangeable lens 28, a shutter 26, etc., but in such a single-lens reflex camera 27, The exit pupil distance changes when the lens 28 is exchanged for the subject 29 or the like. That is, in a lens with a relatively long focal length, the incident light in the peripheral portion of the light flux is close to parallel light as shown by the broken line in the figure, but in a lens with a short focal length the incident light in the peripheral portion is shown by the solid line. As described above, the oblique incidence is increased, which reduces the incident light on the optical sensor unit as described above. Therefore, even if it is attempted to provide an on-chip lens for improving the shading characteristics, its design becomes very difficult, and once the on-chip lens is built, its change is very difficult.

Therefore, as shown in FIG. 6B, when the liquid crystal lens 30 is used and the oblique incident light from the subject 29 is incident on the liquid crystal lens 30, the state of the liquid crystal element 31 is set to the first embodiment. In the same manner as described above, the light can be refracted in accordance with the applied voltage and condensed on the optical sensor unit 6. Moreover, even when the focus is changed after the lens is exchanged (that is, even for incident light with different incident angles). ), By changing conditions such as the voltage applied to the liquid crystal lens 30, the tilt angle of the liquid crystal molecules 31 under the upper electrodes 10a and 10b can be changed so that the light can be always focused on the optical sensor unit 6.

Therefore, even if the focal position (exit pupil distance) changes due to lens replacement, the incident light is refracted only by changing the voltage applied to the liquid crystal lens 30 so that the light always enters the optical sensor unit 6 efficiently. Is possible. Moreover, this can be easily realized only by changing the voltage applied to the liquid crystal lens 30.

In addition, also in this embodiment, the same operational effect as in the above-described first embodiment can be obtained.

The embodiment described above can be further modified based on the technical idea of the present invention.

For example, the upper electrodes 10a, 10b, 10
c, the shape and position of the lower electrode 11 and the opening 32, the voltage value of the voltage applied to each electrode, the polarity, etc. may be arbitrarily selected. Further, the upper electrode may be common and the lower electrode may be divided.

Further, the solid-state image pickup device of the present embodiment is CC
It may be applied to a D camera or the like. Instead of the liquid crystal lens 30 described above, the traveling direction of light can be changed by an applied voltage.
For example, an electro-optical element such as BBO (Beta Barium Borate) may be used.

[0066]

As described above, according to the present invention,
The electrodes to which the voltage applied by the light converging means is applied are divided into a plurality of electrodes. By applying different voltages to these electrodes, the light sensing of each solid-state imaging device sequentially arranged along the light traveling direction is performed. In order for the refraction direction of the incident light to the section to be optimally controlled for each region corresponding to each electrode,
The incident light incident on the solid-state image sensor at an arbitrary angle can be efficiently focused on the light sensing unit.

Further, by providing a region where the shape of the electrode of the light collecting means is changed corresponding to the light sensing portion, even if the electrodes are divided and the same voltage is applied to them, the light traveling direction In order to optimally control the refraction direction of the incident light to the light-sensing unit for each solid-state imaging device sequentially arranged along the The incident light coming in can be efficiently condensed on the light sensing portion.

Further, since the refraction direction of the incident light to the light sensing portion of each solid-state image pickup element sequentially arranged along the traveling direction of light is optimally controlled for each region corresponding to each electrode, Since it becomes difficult for the incident light to enter the portion other than the light sensing portion, it is possible to omit the light shielding measure in the portion other than the light sensing portion.

[Brief description of drawings]

FIG. 1 is a sectional view (a) of a pixel portion when no voltage is applied when obliquely incident light is incident and a sectional view (b) of a pixel portion when voltage is applied in the first embodiment of the present invention. .

FIG. 2 is a sectional view of the pixel portion when a voltage is applied at the time of vertical incidence.

FIG. 3 is a sectional view (a) of a pixel portion when no voltage is applied and a sectional view (b) of a pixel portion when a voltage is applied according to a second embodiment of the present invention.

FIG. 4 is a sectional view of a pixel portion when a voltage is applied according to a third embodiment of the present invention.

5A and 5B are a sectional view (a) of a pixel portion when no voltage is applied and a sectional view (b) of a pixel portion when a voltage is applied according to a fourth embodiment of the present invention.

FIG. 6 is a sectional view (a) of a single-lens reflex camera according to a fifth embodiment of the present invention and a sectional view (b) of a pixel portion when a voltage is applied.

FIG. 7 is a partial plan view of a solid-state image sensor according to a conventional example.

8 is a sectional view taken along line AA ′ of FIG. 7 when vertically incident light is incident on the pixel portion.

FIG. 9 is a similar sectional view when obliquely incident light is incident on the pixel portion.

FIG. 10 is a schematic perspective view (a) when vertically incident light is incident on the image area and a schematic perspective view (b) when obliquely incident light is incident on the image area.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... On-chip lens, 2 ... Color filter, 3 ... In-layer lens, 4 ... Light-shielding film, 5 ... Charge transfer electrode, 6 ... Photosensor part, 7 ... Image area center part, 8 ... Image area peripheral part, 9 ... Variable voltage power supplies, 10a, 10b, 10c ...
Upper electrode, 11 ... Lower electrode, 12 ... Polarization filter, 13
... liquid crystal layer, 14 ... insulating film, 16 ... pixel portion, 20 ... semiconductor substrate, 21 ... gate insulating film, 22 ... transfer path region, 23 ...
Transparent insulating layer, 26 ... Shutter, 27 ... Single-lens reflex camera, 28 ... Lens, 29 ... Subject, 30 ... Liquid crystal lens,
31 ... Liquid crystal element, 32 ... Opening part, 35 ... Upper electrode 10a
, 36 ... Lower part of boundary between upper electrode 10a and opening 32, 37 ... Lower part of opening 32, 38 ... Lower part of boundary between opening 32 and upper electrode 10b, 39 ... Lower part of upper electrode 10b, 40 ... Convex Part, 41 ... concave part

Claims (12)

[Claims] 1. A solid-state imaging device in which a photo-sensing section and a condensing means for controlling a refraction direction of incident light to the sensing section by an applied voltage are sequentially arranged along a traveling direction of light, and the applied voltage is A solid-state imaging device having an area to which an electrode to be applied is divided and a region in which light incidence on the photo-sensing unit is controlled by applying different voltages to these electrodes. 2. A solid-state image sensor in which a light-sensing unit and a light-collecting unit that controls the refraction direction of light incident on the sensing unit according to an applied voltage are sequentially arranged along the traveling direction of light. The solid-state image sensor having a region in which the shape of the electrode of the light condensing unit is changed in accordance with. 3. The solid-state imaging device according to claim 2, wherein the electrodes are divided into a plurality of parts, and the same voltage is applied to each other. 4. The solid-state imaging device according to claim 1, wherein the incident light is obliquely incident on the light sensing unit. 5. The solid-state image sensor according to claim 1, wherein the light condensing unit is composed of a liquid crystal element. 6. The solid-state imaging device according to claim 5, wherein, of the pair of transparent electrodes forming the liquid crystal element, a light incident side electrode or a light emitting side electrode is divided with respect to the light sensing unit. 7. The solid-state image sensor according to claim 5, wherein the liquid crystal forming the liquid crystal element has a negative or positive dielectric anisotropy. 8. The solid-state image sensor according to claim 1, further comprising a lens unit for collecting light between the light collecting unit and the light sensing unit. 9. The solid-state imaging device according to claim 1, wherein a charge transfer unit is provided on the side of the light sensing unit. 10. An image pickup apparatus comprising the solid-state image pickup device according to claim 1. 11. The imaging device according to claim 10, configured as a CCD camera. 12. The image pickup apparatus according to claim 10, which is configured as a single-lens reflex type camera.