JP2003315590A - Device and method for connecting optical device parts - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical device parts connecting device with which a facing time can be drastically shortened by simplifying a facing process, whose structure can be simplified and with which an optical axis can be adjusted in a short period of time, and to provide a method for connecting optical device parts. <P>SOLUTION: A laser measuring instrument 309 measures three-dimensional position data of side faces of planar waveguide type optical device parts 301 and 302, a data processing part 315 calculates positional deviation and turning deviation from the measured three-dimensional position data, and a motor drive control part adjusts positional deviation and turning deviation on the basis of the calculated positional deviation and turning deviation. The laser measuring instrument 309 measures four measuring areas which are two measuring areas extending over two planar waveguide type optical devices and two measuring areas that come across the respective optical waveguides of the two planar optical waveguides. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical device component coupling apparatus and an optical device component coupling method, and more particularly to an optical device component coupling method for optically coupling planar waveguide type optical device components used in the field of optical communication. The present invention relates to a device and an optical device component coupling method.

[0002]

2. Description of the Related Art FIG. 5 is a perspective view showing an external configuration of a coupled planar waveguide type optical device component, and FIG. 6 is an overall schematic diagram showing a configuration of a conventional optical device component coupling device.

With the development of optical device technology, various planar waveguide type optical device parts such as a planar waveguide type arrayed waveguide diffraction grating and a planar waveguide type LN (lithium niobate) optical attenuator have been developed. These planar waveguide type optical device components are modularized by coupling with a fiber array, or modularized by coupling planar waveguide type optical device components with each other.

FIG. 5 shows a planar waveguide type optical device component 11.
And 12 are connected to each other, and 13 is
The optical waveguide of the planar waveguide type optical device component 11, 14 is
The optical waveguide of the planar waveguide type optical device component 12, 15 is
A fiber array 16 optically coupled to the optical waveguide 13,
The fiber array is optically coupled to the optical waveguide 14.

In the case where the planar waveguide type optical device components are joined together by adjusting their surfaces and adjusting their optical axes, for example, Japanese Unexamined Patent Application Publication No. 2-212058
This can be performed using an optical module tester capable of surface-aligning and adjusting the optical axis of the optical device and the fiber array as shown in FIG. 2 of Japanese Patent Laid-Open No. 00108863.

The apparatus shown in FIG. 6 includes component holding portions 203 and 204 respectively holding the planar waveguide type optical device components 11 and 12 optically coupled by the opposing coupling surfaces, and component holding portions 203 and 204 respectively. Movable movable stages 205 and 206 that are mounted and correct relative rotation deviations between the coupling surfaces facing each other, and movable movable stages 207 and 208 that mount the movable stages 205 and 206 and correct position deviations, respectively. And CCD cameras 210 and 209 with a zoom lens for respectively imaging the coupling surfaces of the held planar waveguide type optical device components 11 and 12 from the front, a light source 211, a light receiver 212, and a motor drive control unit 213.
And a data processing unit 214 and an image processing unit 215.

The procedure of surface alignment and optical axis adjustment associated with coupling is as follows. First, the planar waveguide type optical device components 11 and 12 are held by the component holding portions 203 and 204, respectively, and the CCD cameras 209 and 210 with zoom lenses are lowered. The entire coupling surface of the planar waveguide type optical device parts 11 and 12 is imaged at a magnification, and three measurement points of each coupling surface and the direction parallel to the coupling surface of the measurement points of the optical waveguide are taken from the captured image data. The image processing unit 215 measures the X-axis coordinate value in the X-axis direction and the Y-axis coordinate value in the Y-axis direction perpendicular to the upper surface.

Next, the magnification of the zoom lens of the CCD cameras 209 and 210 is increased, and the focus of each measurement point is in focus. The Z-axis coordinate value of the image processing unit 2
Measure at 15.

The data processing unit 214 is an image processing unit 215.
Measurement point coordinate value data (X-axis coordinate value, Y
Based on the axial coordinate value and the Z-axis coordinate value), the rotational deviation θx of the coupling surface about the X axis and the rotational deviation θy of the coupling surface about the Y axis are calculated, and the motor drive control unit 213 determines Based on the rotation deviation θx and the rotation deviation θy calculated by the data processing unit 214, the movement stage 205 or 206 is moved so that the coupling surface becomes parallel to correct the rotation deviation. After the correction of the rotation deviation, the coupling surface is imaged and measured again, the rotation deviations θx and θy are calculated, and the correction is repeated until the coupling surfaces become parallel.

Next, the data processor 214 calculates the rotational deviation θz of the coupling surface about the Z axis based on the coordinate data of the measurement points, and the motor drive controller 213 makes the data processor 21.
Based on the rotational deviation θz calculated in step 4, the moving stage 205 or 206 is moved so that the coupling surface becomes parallel to correct the rotational deviation. After the rotation deviation is corrected, the coupling surface is imaged and measured again, the rotation deviation θz is calculated, and the correction is repeated until the coupling surface becomes parallel.

Next, the planar waveguide type optical device component 11,
The optical axes of the 12 coupling surfaces are adjusted. Data processing unit 214
Calculates the positional deviation from the measurement point coordinate value data, and the motor drive control unit 213 controls the moving stage 207 or 208 so that the coupling surfaces will face each other based on the positional deviation calculated by the data processing unit 214. The optical waveguides 13 and 14 are moved so that the optical waveguides 13 and 14 approach each other.

The light from the light source 211 is fed to the fiber array 15
The data processing unit 214 monitors the amount of light emitted from the fiber array 16 by the light receiver 212 while moving the moving stage 207 or 208 by the motor drive control unit 213, and adjusts to the position where the amount of received light is maximum. To do.

After that, the planar waveguide type optical device component 1
An ultraviolet curable resin is dropped on the bonding surfaces of Nos. 1 and 12 and ultraviolet rays are irradiated to fix them.

[0014]

However, in the prior art, CCD cameras 209 and 210 with a zoom lens are used.
To a low magnification, the planar waveguide type optical device parts 11 and 12
The first processing unit 215 measures an image of the entire coupling surface and measures three measurement points of each coupling surface and the X-axis coordinate value and the Y-axis coordinate value of the measurement point of the optical waveguide from the imaged image data. The CCD cameras 209 and 21 in which the process and the zoom lens of the CCD cameras 209 and 210 are magnified so that each measurement point is in focus
The second step of measuring the Z-axis coordinate value of each measurement point by the image processing unit 215 from the moving distance of 0 in the Z-axis direction and the image sharpness, and the rotation deviation θx of the coupling surface based on the measurement point coordinate value data. And a rotational deviation θy of the coupling surface are calculated by the data processing unit 214, and the motor drive control unit 213 moves the moving stage 205 or 206 so that the coupling surface becomes parallel to correct the rotational deviation. The data processing unit 214 calculates the rotation deviation θz of the coupling surface from the measurement point coordinate value data, and the motor drive control unit 213 moves the moving stage 205 or 206 so that the coupling surface becomes parallel to correct the rotation deviation. Since it includes the fourth step, there is a problem that the number of face-to-face processes increases and the face-to-face alignment takes time.

Further, in the prior art, CCD cameras 209, 2 with a zoom lens are provided for accurately capturing the coupling surface.
10 and the image processing unit 213 are required, and since the coupling surfaces are arranged to face each other, the strokes of the moving ledges 207 and 208 become long, and the structure of the apparatus becomes large.

Further, in the prior art, the optical waveguides 13, 1
Since the positional deviation is corrected before the four are brought close to each other and are arranged opposite to each other, the optical waveguide 1 after the approach due to the accuracy of stage movement is approached.
There is a problem that it takes a long time to adjust the optical axis because the positional deviations of 3 and 14 are large and the range of monitoring the emitted light is large.

The present invention has been made in view of such problems, and an object of the present invention is to simplify the face-to-face process so that the face-to-face time can be significantly shortened and the structure of the apparatus can be reduced. It is an object of the present invention to provide an optical device component coupling apparatus and an optical device component coupling method which can simplify the optical axis adjustment in a short time.

[0018]

The present invention has the following constitution in order to solve the above problems. The gist of the invention according to claim 1 is an optical device component coupling apparatus for aligning coupling surfaces for coupling two planar waveguide type optical devices, wherein the two planar waveguide type optical devices are coupled. Position data measuring means for measuring the three-dimensional position data of the side surfaces of the two planar waveguide type optical devices in a state where the surfaces are opposed to each other, and rotation is performed from the three-dimensional position data measured by the position data measuring means. Data processing means for calculating a shift amount and moving stage means for adjusting the rotation shift between the two planar waveguide type optical devices based on the rotation shift amount calculated by the data processing means. It exists in a characteristic optical device component coupling apparatus. According to a second aspect of the present invention, there is provided an optical device component coupling apparatus for performing alignment of coupling surfaces and adjustment of an optical axis for coupling two planar waveguide type optical devices, wherein the two planar waveguides are provided. Position data measuring means for measuring three-dimensional position data of the side surfaces of the two planar waveguide type optical devices while holding the coupling surfaces of the waveguide type optical device facing each other, and the position data measuring means for measuring the three-dimensional position data. Data processing means for calculating a positional deviation amount and a rotational deviation amount from three-dimensional position data, and the two planar waveguide type lights based on the positional deviation amount and the rotational deviation amount calculated by the data processing means. And a moving stage means for adjusting the positional deviation and the rotational deviation between the devices. Further, the gist of the invention according to claim 3 is that the position data measuring means is a laser measuring device that measures a distance from a side surface of the two planar waveguide type optical devices. It exists in the optical device component coupling apparatus described. A fourth aspect of the present invention is characterized in that the side surface of the planar waveguide type optical device for measuring the three-dimensional position data is a surface on which an optical waveguide is formed. The optical device component coupling apparatus according to any one of 1. Claim 5
The gist of the invention described is that the position data measuring means has two measurement areas that straddle the two planar waveguide type optical devices and two locations that cross the respective optical waveguides of the two planar waveguide type optical devices. The optical device component coupling apparatus according to any one of claims 1 to 4, wherein the three-dimensional position data of four measurement areas including the measurement area of (3) are measured. The gist of the invention according to claim 6 is 2
An optical device component coupling method for aligning coupling surfaces in order to couple two planar waveguide type optical devices, wherein the two planar waveguide type optical devices are held with the coupling surfaces facing each other. Three-dimensional position data of the side surface of one planar waveguide type optical device is measured, a rotation deviation amount is calculated from the measured three-dimensional position data, and the two planar waveguides are calculated based on the calculated rotation deviation amount. The optical device component coupling method is characterized in that the rotational displacement between the optical devices is adjusted. The gist of the invention of claim 7 is as follows.
What is claimed is: 1. An optical device component coupling method for aligning coupling surfaces and adjusting an optical axis in order to couple two planar waveguide optical devices, wherein the coupling surfaces of the two planar waveguide optical devices are opposed to each other. The three-dimensional position data of the side surfaces of the two planar waveguide type optical devices are measured in a state of being held, the positional shift amount and the rotational shift amount are calculated from the measured three-dimensional position data, and the calculated position is calculated. The optical device component coupling method is characterized in that the positional displacement and the rotational displacement between the two planar waveguide type optical devices are adjusted based on the displacement amount and the rotational displacement amount. Further, the gist of the invention according to claim 8 is that the distance from the side surface of the two planar waveguide type optical devices is measured by a laser measuring device, and
The optical device component coupling method according to claim 6 or 7, wherein dimensional position data is measured. A ninth aspect of the present invention is that the side surface of the planar waveguide type optical device for measuring the three-dimensional position data is a surface on which an optical waveguide is formed. The optical device component coupling method described in any one of 1. Further, the gist of the invention according to claim 10 is to provide two measurement areas that straddle the two planar waveguide type optical devices, and two measurement areas that cross the respective optical waveguides of the two planar waveguide type optical devices. 7. The three-dimensional position data of four measurement areas of and are measured.
The optical device component coupling method according to any one of items 1 to 9. Further, the gist of the invention according to claim 11 is that the two planar waveguide type optical device components are coupled by performing surface alignment or optical axis adjustment using the optical axis adjusting method according to any one of claims 6 to 10. The present invention resides in a planar waveguide type optical device component.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is an overall schematic view showing a configuration of an embodiment of an optical device component coupling apparatus according to the present invention.
[Fig. 2] is a view showing an adjustment axis for surface alignment and optical axis adjustment performed by the optical device component coupling device shown in Fig. 1.

In this embodiment, referring to FIG. 1, component holding portions 303 and 304 for holding the planar waveguide type optical device components 301 and 302, respectively, and a component holding portion 303,
Moving stages 305 and 306 for mounting the respective 304 and adjusting the θx axis, the θy axis, and the θz axis,
The moving stages 305 and 306 are mounted on the X-axis,
Moving stages 307, 30 for adjusting the Y-axis and the Z-axis
8, laser measuring instrument 309, laser measuring instrument 309 X
Stage 310 for moving the axes, Y-axis and Z-axis
A light source 311 for making light incident on the planar waveguide type optical device component 301, a light receiver 312 for receiving light emitted from the planar waveguide type optical device component 302, and moving stages 305, 306, 307, 308, A motor drive control unit 313 that drives 310, a trigger pulse transmission unit 314 that outputs a synchronous trigger pulse signal, and positional deviation amounts ΔX and Δ
The data processing unit 315 calculates Y, ΔZ and rotation deviation amounts Δθx, Δθy, Δθz. In addition, X axis, Y
The axes, Z axis, θx axis, θy axis, and θz axis have the relationship shown in FIG.

Next, the operation of this embodiment will be described in detail with reference to FIGS. 3 and 4. FIG. 3 is a diagram showing a measurement area measured by the laser measuring device shown in FIG. 1, and FIG. 4 is a measurement waveform diagram obtained from the three-dimensional position data by the data processing unit shown in FIG.

In this embodiment, first, the planar waveguide type optical device components 301 and 302 are respectively attached to the component holder 3.
03 and 304, and the moving stage 307 or 308 is moved under the control of the motor drive control unit 313 to move the coupling surface of the planar waveguide type optical device component 301 and the coupling surface of the planar waveguide type optical device component 302. Face them close to each other.

Next, while moving the laser measuring device 309 by the moving stage 310 based on the control of the motor drive controller 313, the side surface of the planar waveguide type optical device component 301 and the planar waveguide type optical device component which are brought close to each other are moved. The measurement areas 41, 42, 43, 4 shown in FIG.
Measure from above for each of the four. Planar waveguide optical device component 3 measured by laser measuring instrument 309
Optical waveguides are formed on the side surfaces of 01 and 302.

The measurement areas 41 and 42 are parallel to the Z axis and extend over both the planar waveguide type optical device components 301 and 302, and the laser measuring instrument 3 in the measurement areas 41 and 42 is used.
In the measurement by 09, the X axis is fixed, the Z axis point is continuously shifted, and the distance between the laser measuring device 309 and the planar waveguide type optical device components 301 and 302 in the Y axis direction is continuously measured. The measurement areas 43 and 44 are parallel to the X-axis and cross the optical waveguides formed on the side surfaces of the planar waveguide type optical device components 301 and 302, and are measured by the laser measuring instrument 309 in the measurement areas 43 and 44. For the measurement, the Z axis is fixed, the X axis points are continuously shifted, and the laser measuring device 309 in the Y axis direction and the planar waveguide type optical device component 3 are used.
The distance from 01 and 302 is continuously measured.

Measurement area 4 by laser measuring device 309
When 1 is measured, the X-axis and the Y-axis of the moving stage 310 are fixed, and the height data (with the synchronization trigger pulse signal output from the trigger pulse signal transmitting unit 314 as a trigger in synchronization with the movement of the Z-axis). Since the distance between the laser measuring device 309 and the planar waveguide type optical device components 301 and 302 is acquired, the measurement data becomes three-dimensional position data. Similarly, the measurement areas 42, 43, 44 also become three-dimensional position data.
That is, the three-dimensional position data obtained by the measurement of the laser measuring device 309 is the locus of the X and Z coordinates of the movement of the laser measuring device 309 and the planar waveguide type optical device component 301 measured by the laser measuring device 309 of the Y coordinate. , 302 to the height distance y.

For example, when measuring the measurement area 41 or 42, assuming that the X coordinate is a fixed value x ₀ , the Y coordinate is a height distance y, and the Z coordinate is a moving distance z, the three-dimensional position data is (x ₀ , Y, z), x ₀ is a fixed value (for example, x ₀ = 5 mm), and y is within the range of the laser measuring device measurable distance (for example, −1 mm <y <+1 m).
m), and z moves by the measurement area length of the measurement area 41 or 42 (for example, 0 mm <z <+5 mm).

Height of measuring area 41 or 42 y
Is measured at the timing of the Z coordinate movement.
For example, if the Z-axis moves 1 μm, the trigger pulse signal transmitter
The 314 outputs the synchronization trigger pulse signal once,
The height distance y is measured once by using the riga pulse signal as a trigger.
It When the Z coordinate moves 5mm, trigger pulse signal is sent
The synchronous trigger pulse signal is output 5000 times from the section 314.
The height distance y is measured 5000 times,
The three-dimensional position data (X, Y, Z) is (x₀, Y ₁,
0.001 mm) to (x₀, Y₅₀₀₀, 5.000m
m points will be 5000 points.

The data processing unit 315 is used for the laser measuring device 30.
The measurement waveform diagram shown in FIG. 4 is created based on the three-dimensional position data obtained by the measurement of the measurement areas 41, 42, 43, and 44 by 9. In FIG. 4, the measurement waveform 51
Corresponds to the three-dimensional position data of the measurement area 41, the measurement waveform 52 corresponds to the three-dimensional position data of the measurement area 42, the measurement waveform 53 corresponds to the three-dimensional position data of the measurement area 43, and the measurement waveform 54 corresponds to the three-dimensional position data of the measurement area 44.

In FIG. 4, a point A1 on the measurement waveform 51 is a measurement start point, a point A2 is an end face point of the planar waveguide optical device 301, and a point A.
3 is an end face point of the planar waveguide type optical device 302, and point A4 is a measurement end point.

Further, in FIG. 4, a point B1 on the measurement waveform 52 is a measurement start point, and a point B2 is
An end face point of the planar waveguide type optical device 301, a point B3 is an end face point of the planar waveguide type optical device 302, and a point B4 is a measurement end point.

In FIG. 4, the point C1 on the measurement waveform 53 is the measurement start point and the point C2 is
This is a point directly above the waveguide of the planar waveguide type optical device 31, and the area directly above the waveguide is 10 μm from the surface other than directly above the waveguide.
You can see that it is getting excited.

Further, in FIG. 4, a point D1 on the measurement waveform 54 is a measurement start point, and a point D2 is
This is a point directly above the waveguide of the planar waveguide type optical device 302.

From the created measurement waveform diagram, the data processing unit 315 determines the points A2 and A3 on the measurement waveform 51.
Difference in the Y-axis direction ΔY1, point B on the measured waveform 52
2 and the point B3 in the Y-axis direction difference ΔY2, measurement waveform 5
Difference AY3 in the Y-axis direction between the point A2 on 1 and the point B2 on the measurement waveform 52, the point A3 on the measurement waveform 51
Difference ΔY in the Y-axis direction between the point B3 on the measurement waveform 52 and
4. Z of point A2 and point A3 on the measured waveform 51
The difference ΔZ1 in the axial direction, the difference ΔZ2 in the Z-axis direction between points B2 and B3 on the measurement waveform 52, the slope between points A1 and A2 on the measurement waveform 51, and the measurement waveform 51
The difference Δθx between the slopes of the points A3 and A4 above
1. Inclination between points B1 and B2 on the measurement waveform 52, and points B3 and B4 on the measurement waveform 52
Difference Δθx2 from the slope with point C on the measured waveform 53
1 and the difference between point C2 and X-axis direction ΔX1, measured waveform 5
Difference in the X-axis direction between point D1 and point D2 on 4
Find X2. The difference in the X-axis direction between the point A1 on the measurement waveform 51 and the point B1 on the measurement waveform 52 is the distance a between the measurement start point of the measurement area 41 and the measurement start point of the measurement area 42 shown in FIG. Become.

The data processing unit 315 determines ΔX1, ΔX2, ΔY1, ΔY2, ΔY obtained from the created measurement waveform diagram.
3, ΔY4, ΔZ1, ΔZ2, Δθx1, Δθx2, a
Thus, the positional deviation amounts ΔX, ΔY, ΔZ and the rotational deviation amount Δ
θx, Δθy, and Δθz are obtained.

The positional deviation amounts ΔX, ΔY, ΔZ and the rotational deviation amounts Δθx, Δθy, Δθz are ΔX = ΔX1-ΔX2, ΔY = (ΔY1 + ΔY2) / 2, ΔZ = (ΔZ1 + ΔZ2) / 2, Δθx = (Δθ × 1 + Δθ × 2) / 2, Δθy = tan−1 · (ΔZ1−ΔZ2) / a, Δθz = tan−1 · (ΔY3−ΔY4) / a, respectively.

The motor drive control unit 313 has the positional deviation amounts ΔX, ΔY, ΔZ calculated by the data processing unit 315.
And the rotation deviation amounts Δθx, Δθy, and Δθz,
Moving stage 307 or 308 and moving stage 30
5 or 306 is moved to correct the positional deviation and rotational deviation of the facing coupling surfaces of the planar waveguide type optical device components 301 and 302.

After correcting the positional deviation and the rotational deviation,
The measurement areas 41, 42, 43, 44 are measured, and the positional deviation amounts ΔX, ΔY, ΔZ and the rotational deviation amount Δθ are measured in the same procedure.
x, Δθy, Δθz are calculated by the data processing unit 315, and if the calculated positional deviation amounts ΔX, ΔY, ΔZ and the rotational deviation amounts Δθx, Δθy, Δθz are equal to or larger than the threshold value, the correction is performed again, and the positional deviation amount ΔX, ΔY and ΔZ and rotation deviation amount Δθ
The measurement and the correction are repeated until x, Δθy, and Δθz become the threshold values or less.

After the correction of the positional deviation and the rotational deviation is completed, the light from the light source 311 is supplied to the planar waveguide type optical device component 301.
The data processing unit 315, while moving the moving stage 307 or 308 by the motor drive control unit 313, monitors the light amount emitted from the planar waveguide type optical device component 302 by the light receiver 312, and the maximum light receiving amount is received. Adjust the position so that

After that, the planar waveguide type optical components 301, 30
An ultraviolet curable resin is dropped on the bonding surface of No. 2 and irradiated with ultraviolet rays to be fixed by adhesion. The planar waveguide type optical components 301, 30
The step of dropping the ultraviolet curable resin on the bonding surface of No. 2 and irradiating it with ultraviolet rays to bond and fix may be performed after correcting the positional deviation and the rotational deviation by omitting the optical axis adjusting step by the light from the light source 311.

As described above, according to the present embodiment, the first step of measuring the laser in the state where the coupling surfaces of the planar waveguide type optical device components 301 and 302 are close to and face each other, and the measurement Since the surface alignment can be performed by the second step of calculating the rotation deviations θx, θy, and θz from the data and correcting them simultaneously, the surface alignment step can be simplified and the surface alignment time can be greatly shortened. There is an effect that can be.

Further, according to the present embodiment, based on the three-dimensional position data measured by using the laser measuring device 309 in a state where the coupling surfaces of the planar waveguide device components 301 and 302 are close to and face each other. Since the surface alignment process can be performed by using the zoom lens, the CCD camera with the zoom lens and the image processing unit are not required, and the strokes of the moving stages 311 and 312 can be shortened.
This has the effect of simplifying the structure of the device.

Further, according to the present embodiment, in the state where the coupling surfaces of the planar waveguide type optical device components 301 and 302 are brought close to each other, the laser measuring instrument 309 corrects the positional deviation with high accuracy. There is an effect that it is possible to adjust the optical axis in a short time while monitoring the emitted light with a small displacement of position.

It should be noted that the present invention is not limited to the above-mentioned embodiments, and it is apparent that the respective embodiments can be modified appropriately within the scope of the technical idea of the present invention. Further, the number, position, shape, etc. of the above-mentioned constituent members are not limited to those in the above-mentioned embodiment, and the number, position, shape, etc. suitable for carrying out the present invention can be adopted. In addition, in each figure, the same components are denoted by the same reference numerals.

[0045]

The optical device component coupling apparatus and the optical device component coupling method of the present invention include a first step of performing laser measurement in a state where coupling surfaces of planar waveguide type optical device components are brought close to and face each other, Rotational deviation θx, θ from measured data
Since the surface alignment can be performed by the second step of calculating y and θz and correcting them at the same time, the surface alignment step can be simplified and the surface alignment time can be greatly shortened. .

Furthermore, in the optical device component coupling apparatus and the optical device component coupling method of the present invention, the three-dimensional measurement using a laser measuring device is performed with the coupling surfaces of the planar waveguide device components being closely opposed to each other. Since the surface matching process can be performed based on the position data, the CCD camera with the zoom lens and the image processing unit are not required, and
Since the stroke of the moving stage can be shortened, the structure of the device can be simplified.

Further, in the optical device component coupling apparatus and the optical device component coupling method of the present invention, the laser measuring instrument accurately corrects the positional deviation with the coupling surfaces of the planar waveguide type optical device components being brought close to each other. Therefore, there is an effect that the positional deviation of the optical waveguide is small and the optical axis can be adjusted in a short time while monitoring the emitted light.

[Brief description of drawings]

FIG. 1 is an overall schematic diagram showing a configuration of an embodiment of an optical device component coupling device according to the present invention.

FIG. 2 is a diagram showing an adjustment axis for surface alignment and optical axis adjustment performed by the optical device component coupling apparatus shown in FIG.

3 is a diagram showing a measurement area measured by the laser measuring instrument shown in FIG.

4 is a measurement waveform diagram obtained from three-dimensional position data by the data processing unit shown in FIG.

FIG. 5 is a perspective view showing an external configuration of a coupled planar waveguide type optical device component.

FIG. 6 is an overall schematic diagram showing a configuration of a conventional optical device component coupling apparatus.

[Explanation of symbols]

301, 302 planar waveguide device components 303, 304 component holders 305, 306, 307, 308, 310 moving stage 309 laser measuring device 311 light source 312 light receiver 313 motor drive control unit 314 trigger pulse transmitting unit 315 data processing unit 41 , 42, 43, 44 Measurement area 51, 52, 53, 54 Measurement waveform

Claims (11)

[Claims] 1. An optical device component coupling apparatus for aligning coupling surfaces for coupling two planar waveguide optical devices, wherein the coupling surfaces of the two planar waveguide optical devices are opposed to each other. Position data measuring means for measuring the three-dimensional position data of the side surfaces of the two planar waveguide type optical devices in the held state, and a rotation deviation amount is calculated from the three-dimensional position data measured by the position data measuring means. An optical device comprising: a data processing means; and a moving stage means for adjusting a rotation deviation between the two planar waveguide type optical devices based on the rotation deviation amount calculated by the data processing means. Parts joining device. 2. An optical device component coupling device for aligning coupling surfaces and adjusting an optical axis for coupling two planar waveguide type optical devices, the coupling of the two planar waveguide type optical devices. Position data measuring means for measuring the three-dimensional position data of the side surfaces of the two planar waveguide type optical devices in a state where the surfaces are opposed to each other, and a position based on the three-dimensional position data measured by the position data measuring means. Data processing means for calculating a shift amount and a rotation shift amount; and a position shift between the two planar waveguide type optical devices based on the position shift amount and the rotation shift amount calculated by the data processing means. An optical device component coupling apparatus comprising: a moving stage unit that adjusts a rotational deviation. 3. The optical device component coupling according to claim 1, wherein the position data measuring means is a laser measuring device that measures a distance from a side surface of the two planar waveguide type optical devices. apparatus. 4. The side surface of the planar waveguide type optical device for measuring the three-dimensional position data is a surface on which an optical waveguide is formed, according to any one of claims 1 to 3. Optical device component coupling equipment. 5. The position data measuring means includes two measurement areas extending across the two planar waveguide type optical devices,
5. The three-dimensional position data of four measurement areas, two measurement areas crossing the optical waveguides of each of the two planar waveguide type optical devices, is measured. The optical device component coupling apparatus as described above. 6. An optical device component coupling method for aligning coupling surfaces to couple two planar waveguide optical devices, wherein the coupling surfaces of the two planar waveguide optical devices are opposed to each other. The three-dimensional position data of the side surfaces of the two planar waveguide type optical devices are measured in the held state, the rotation deviation amount is calculated from the measured three-dimensional position data, and the rotation deviation amount is calculated based on the calculated rotation deviation amount. An optical device component coupling method comprising adjusting a rotational shift between the two planar waveguide type optical devices. 7. An optical device component coupling method for aligning coupling surfaces and adjusting an optical axis for coupling two planar waveguide type optical devices, the coupling of the two planar waveguide type optical devices. The three-dimensional position data of the side surfaces of the two planar waveguide type optical devices are measured with the surfaces facing each other, and the positional deviation amount and the rotational deviation amount are calculated from the measured three-dimensional position data, An optical device component coupling method comprising adjusting a positional deviation and a rotational deviation between the two planar waveguide type optical devices based on the calculated positional deviation amount and the rotational deviation amount. 8. The optical device according to claim 6, wherein the three-dimensional position data is measured by measuring a distance from a side surface of the two planar waveguide type optical devices by a laser measuring device. Part connection method. 9. The side surface of the planar waveguide type optical device for measuring the three-dimensional position data is a surface on which an optical waveguide is formed, according to any one of claims 6 to 8. Optical device component coupling method. 10. A measurement at four locations including two measurement areas that straddle the two planar waveguide type optical devices and two measurement areas that cross the respective optical waveguides of the two planar waveguide type optical devices. 10. The optical device component coupling method according to claim 6, wherein the three-dimensional position data of the area is measured. 11. A planar waveguide type in which the two planar waveguide type optical device parts are coupled by performing surface alignment or optical axis adjustment using the optical axis adjusting method according to any one of claims 6 to 10. Optical device parts.