JP2003315046A - Vibrator and vibrating gyroscope - Google Patents
Vibrator and vibrating gyroscopeInfo
- Publication number
- JP2003315046A JP2003315046A JP2002117549A JP2002117549A JP2003315046A JP 2003315046 A JP2003315046 A JP 2003315046A JP 2002117549 A JP2002117549 A JP 2002117549A JP 2002117549 A JP2002117549 A JP 2002117549A JP 2003315046 A JP2003315046 A JP 2003315046A
- Authority
- JP
- Japan
- Prior art keywords
- vibrating piece
- driving
- axis
- detecting
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、振動子および振動
型ジャイロスコープに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator and a vibration type gyroscope.
【０００２】[0002]
【従来の技術】例えば自動車の車体回転速度フィードバ
ック式の車両制御方法に用いる回転速度センサーに、振
動型ジャイロスコープを使用することが検討されてい
る。こうしたシステムにおいては、操舵輪の方向をハン
ドルの回転角度によって検出する。これと同時に、実際
に車体が回転している回転速度を振動ジャイロスコープ
によって検出する。そして、操舵輪の方向と実際の車体
の回転速度を比較して差を求め、この差に基づいて車輪
トルク、操舵角に補正を加えることによって、安定した
車体制御を実現する。2. Description of the Related Art For example, use of a vibration type gyroscope as a rotation speed sensor used in a vehicle body rotation speed feedback type vehicle control method has been studied. In such a system, the direction of the steered wheels is detected by the rotation angle of the steering wheel. At the same time, the rotational speed at which the vehicle body is actually rotating is detected by the vibration gyroscope. Then, the direction of the steered wheels is compared with the actual rotation speed of the vehicle body to obtain a difference, and based on the difference, the wheel torque and the steering angle are corrected to realize stable vehicle body control.
【０００３】こうした振動型ジャイロスコープでは、３
軸方向の各回転角速度を検出することが望まれる。本出
願人は、３軸方向の各回転角速度を検出するための振動
型ジャイロスコープを、特開２００１−１２９５３号公
報において開示した。これは、一体の平面的な振動子を
使用し、２つの回転軸の周りの各回転角速度を検出可能
としたものである。In such a vibration type gyroscope, 3
It is desired to detect each rotational angular velocity in the axial direction. The present applicant has disclosed a vibration type gyroscope for detecting each rotational angular velocity in three axial directions in Japanese Patent Laid-Open No. 2001-12953. This uses an integrated planar oscillator, and can detect each rotational angular velocity around two rotation axes.
【０００４】[0004]
【発明が解決しようとする課題】この振動型ジャイロス
コープは、２つの回転軸の回りの各回転角速度を測定で
きる点で優れたものであり、パッケージへの取り付けも
容易であった。しかし、この振動型ジャイロスコープを
用いて各回転角速度を測定した場合、振動子において発
生するノイズやバラツキによって、出力誤差が生じるこ
とがあった。This vibrating gyroscope is excellent in that it can measure the rotational angular velocities around the two rotary shafts, and can be easily attached to the package. However, when each rotational angular velocity is measured using this vibrating gyroscope, an output error may occur due to noise and variations generated in the vibrator.
【０００５】本発明の課題は、少なくとも互いに直交す
る第一の軸および第二の軸の回りの各回転角速度を検出
するときに、振動子におけるノイズやばらつきを抑制
し、出力誤差を低減可能とすることである。An object of the present invention is to suppress noise and variations in a vibrator and reduce an output error when detecting each rotational angular velocity about at least a first axis and a second axis which are orthogonal to each other. It is to be.
【０００６】[0006]
【課題を解決するための手段】本発明は、少なくとも互
いに直交する第一の軸および第二の軸の回りの各回転角
速度を検出するときに利用される振動子であって、第一
の軸の回りの回転角速度を検出するための第一の駆動振
動片および第一の検出振動片と、第二の軸の回りの回転
角速度を検出するための第二の駆動振動片および第二の
検出振動片と、第一の駆動振動片、第一の検出振動片、
第二の駆動振動片、および第二の検出振動片を接続して
いる連結部とを備えており、第一の駆動振動片の駆動振
動モードの固有共振周波数が、第二の駆動振動片の駆動
振動モードの固有共振周波数と異なっていることを特徴
とする。SUMMARY OF THE INVENTION The present invention is a vibrator for use in detecting respective rotational angular velocities about at least a first axis and a second axis which are orthogonal to each other. A first driving vibrating piece and a first detecting vibrating piece for detecting a rotational angular velocity around the second driving vibrating piece, and a second driving vibrating piece and a second detecting vibrating piece for detecting a rotational angular velocity around the second axis. A vibrating piece, a first driving vibrating piece, a first detecting vibrating piece,
The second drive vibrating piece, and a connecting portion connecting the second detection vibrating piece, the natural resonance frequency of the drive vibration mode of the first drive vibrating piece, the second drive vibrating piece It is characterized by being different from the natural resonance frequency of the drive vibration mode.
【０００７】従来の２軸検出用振動子においては、駆動
振動片に駆動振動を励振した後、第一の検出振動片にお
いて例えばＸ軸周りの回転角速度を検出し、第二の検出
振動片においてＹ軸周りの回転角速度を検出する。ここ
で、第一の検出振動片において検出される検出振動モー
ドと第二の検出振動片において検出される検出振動モー
ドとは、同じ駆動振動モードに基づいて励振された振動
モードである。このため、たとえ第一の検出振動片と第
二の検出振動片とが分離されていても、両者の間で結合
が発生し、回転角速度の測定値にノイズやバラツキを発
生させることを見いだした。In the conventional two-axis detecting vibrator, after the driving vibration is excited in the driving vibrating piece, for example, the rotational angular velocity around the X axis is detected in the first detecting vibrating piece and the second detecting vibrating piece is detected. The angular velocity of rotation about the Y axis is detected. Here, the detection vibration mode detected by the first detection vibration piece and the detection vibration mode detected by the second detection vibration piece are vibration modes excited based on the same drive vibration mode. Therefore, it was found that even if the first detection vibrating piece and the second detection vibrating piece are separated, coupling occurs between the two, causing noise and variations in the measured value of the rotational angular velocity. .
【０００８】本発明者は、第一の回転軸の周りの回転角
速度を検出するために利用する駆動振動片と、第二の回
転軸の周りの回転角速度を検出するために利用する駆動
振動片とを分離し、互いに異なる周波数で励振すること
を想到した。この結果、前述のような結合や干渉が抑制
されることを見いだした。The inventor of the present invention uses a drive vibrating piece used to detect the rotational angular velocity about the first rotation axis and a drive vibrating piece used to detect the rotational angular velocity about the second rotation axis. It was conceived to separate and from and to excite at different frequencies. As a result, they have found that the above-mentioned coupling and interference are suppressed.
【０００９】本発明においては、各回転軸に対応して駆
動振動片を分離するのと共に、各駆動振動片における駆
動振動モードの固有共振周波数を互いに異ならせる。こ
の際には、検出振動における結合や干渉を抑制するとい
う観点からは、第一の駆動振動片の駆動振動モードの固
有共振周波数ｆ１と、第二の駆動振動片の駆動振動モー
ドの固有共振周波数ｆ２との差（ｆ１−ｆ２）は、３ｋ
Ｈｚ以上であることが好ましく、６ｋＨｚ以上であるこ
とが更に好ましい。In the present invention, the drive vibrating piece is separated corresponding to each rotary shaft, and the natural resonance frequencies of the drive vibrating modes of the drive vibrating pieces are made different from each other. At this time, from the viewpoint of suppressing coupling and interference in the detected vibration, the natural resonance frequency f1 of the drive vibration mode of the first drive vibrating piece and the natural resonance frequency of the drive vibration mode of the second drive vibrating piece. The difference from f2 (f1-f2) is 3k
The frequency is preferably Hz or higher, more preferably 6 kHz or higher.
【００１０】また、第一の駆動振動片の駆動振動モード
の固有共振周波数ｆ１と、第二の駆動振動片の駆動振動
モードの固有共振周波数ｆ２とは、互いに倍数波の関係
にないことが好ましい。ここで、倍数波の関係にないと
は、例えば２倍波、３倍波に該当しないことを意味して
いる。一般的には、は各駆動振動モードの各固有共振周
波数が、互いに整数倍に該当しないことを意味してい
る。Further, it is preferable that the natural resonance frequency f1 of the driving vibration mode of the first driving vibrating piece and the natural resonance frequency f2 of the driving vibration mode of the second driving vibrating piece do not have a multiple wave relationship with each other. . Here, not having a relationship of a multiple wave means, for example, not corresponding to a second wave or a third wave. Generally, means that the natural resonance frequencies of the drive vibration modes do not correspond to integral multiples of each other.
【００１１】[0011]
【発明の実施の形態】好適な実施形態においては、第三
の軸の回りの回転角速度を検出するための第三の駆動振
動片および第三の検出振動片をさらに備えており、連結
部は、第三の駆動振動片および第三の検出振動片をさら
に接続していてもよい。In a preferred embodiment, a third driving vibrating piece and a third detecting vibrating piece for detecting the rotational angular velocity about the third axis are further provided, and the connecting portion is The third driving vibrating piece and the third detecting vibrating piece may be further connected.
【００１２】また、好適な実施形態においては、第一の
駆動振動片の駆動振動モードの固有共振周波数ｆ１が、
第三の駆動振動片の駆動振動モードの固有共振周波数ｆ
３と異なっている。この場合には、検出振動における結
合や干渉を抑制するという観点からは、（ｆ１−ｆ３）
は、３ｋＨｚ以上であることが好ましく、６ｋＨｚ以上
であることが更に好ましい。In a preferred embodiment, the natural resonance frequency f1 of the driving vibration mode of the first driving vibration piece is
Natural resonance frequency f of the driving vibration mode of the third driving vibrating piece
Different from 3. In this case, from the viewpoint of suppressing coupling and interference in the detected vibration, (f1-f3)
Is preferably 3 kHz or higher, and more preferably 6 kHz or higher.
【００１３】好適な実施形態においては、第二の駆動振
動片の駆動振動モードの固有共振周波数ｆ２が、第三の
駆動振動片の駆動振動モードの固有共振周波ｆ３と異な
っている。この場合には、検出振動における結合や干渉
を抑制するという観点からは、（ｆ２−ｆ３）は、３ｋ
Ｈｚ以上であることが好ましく、６ｋＨｚ以上であるこ
とが更に好ましい。In a preferred embodiment, the natural resonance frequency f2 of the drive vibration mode of the second drive vibration piece is different from the natural resonance frequency f3 of the drive vibration mode of the third drive vibration piece. In this case, from the viewpoint of suppressing coupling and interference in the detected vibration, (f2-f3) is 3k.
The frequency is preferably Hz or higher, more preferably 6 kHz or higher.
【００１４】各駆動振動片の駆動振動モードの固有共振
周波数を制御する方法自体は公知である。例えば、駆動
振動片の材質、幅、厚さ、長さを変更することによっ
て、対応する駆動振動片の駆動振動モードの固有共振周
波数を変更することができる。A method itself for controlling the natural resonance frequency of the driving vibration mode of each driving vibrating piece is known. For example, by changing the material, width, thickness and length of the drive vibrating piece, the natural resonance frequency of the drive vibrating mode of the corresponding drive vibrating piece can be changed.
【００１５】また、好適な実施形態においては、振動子
が所定の平面に沿って延びており、第一の軸が前記平面
に垂直な軸であってもよい。Further, in a preferred embodiment, the vibrator may extend along a predetermined plane, and the first axis may be an axis perpendicular to the plane.
【００１６】図１は、本発明の第一の実施形態に係る振
動子１Ａの平面図である。振動子１Ａは、所定平面、即
ちＸＹ平面に沿って延びている。図２は、図１に示す振
動子１Ａにおいて、第二の軸すなわちＸ軸の回りの回転
角速度を検出するときに利用される要部を模式的に示
す。図３は、図１に示す振動子１Ａにおいて、第三の軸
すなわちＹ軸の回りの回転角速度を検出するときに利用
される要部を模式的に示す。FIG. 1 is a plan view of a vibrator 1A according to the first embodiment of the present invention. The vibrator 1A extends along a predetermined plane, that is, an XY plane. FIG. 2 schematically shows a main part used when detecting the rotational angular velocity around the second axis, that is, the X axis in the vibrator 1A shown in FIG. FIG. 3 schematically shows a main part used when detecting the rotational angular velocity around the third axis, that is, the Y axis in the vibrator 1A shown in FIG.
【００１７】振動子１Ａは、所定平面に垂直な軸である
第一の軸すなわちＺ軸の回りの回転角速度を検出するた
めの第一の駆動振動片１４Ａ、１４Ｂ、１４Ｃ、１４Ｄ
および第一の検出振動片２０Ａ、２０Ｂと、Ｘ軸の回り
の回転角速度を検出するための第二の駆動振動片３０
Ａ、３０Ｂおよび第二の検出振動片４０Ａ、４０Ｂと、
Ｙ軸の回りの回転角速度を検出するための第三の駆動振
動片５０Ａ、５０Ｂおよび第二の検出振動片６０Ａ、６
０Ｂと、これらの駆動振動片および検出振動片を接続し
ている連結部６とを備えている。The vibrator 1A is a first drive vibrating piece 14A, 14B, 14C, 14D for detecting a rotational angular velocity around a first axis which is an axis perpendicular to a predetermined plane, that is, the Z axis.
And the first detection vibrating pieces 20A and 20B and the second driving vibrating piece 30 for detecting the rotational angular velocity around the X axis.
A, 30B and second detection vibrating pieces 40A, 40B,
Third drive vibrating pieces 50A, 50B and second detecting vibrating pieces 60A, 6 for detecting the rotational angular velocity around the Y axis.
0B and a connecting portion 6 connecting the driving vibrating piece and the detecting vibrating piece.
【００１８】振動片２０Ａ、２０Ｂの先端側には、幅の
広い重量部２０ａが設けられている。振動片３０Ａ、３
０Ｂ、４０Ａ、４０Ｂの先端側には、幅の広い重量部３
０ａ、４０ａが設けられている。振動片５０Ａ、５０
Ｂ、６０Ａ、６０Ｂの先端側には、幅の広い重量部５０
ａ、６０ａが設けられている。A wide weight portion 20a is provided on the tip side of the vibrating bars 20A and 20B. Vibrating piece 30A, 3
0B, 40A, 40B has a wide weight part 3 on the tip side.
0a and 40a are provided. Vibrating piece 50A, 50
A wide weight portion 50 is provided on the tip side of B, 60A, and 60B.
a and 60a are provided.
【００１９】振動子１Ａは、たとえば重心ＧＯおよびそ
の近傍を支持部１００によって実装基板（図示せず）に
固定されて利用される。The vibrator 1A is used, for example, by fixing the center of gravity GO and its vicinity to a mounting substrate (not shown) by the support portion 100.
【００２０】各軸の回りの回転角速度の検出方法を概略
的に述べる。ただし、各軸に対する検出方法における駆
動手段および検出手段は周知慣用技術であるので、図示
省略する。A method of detecting the rotational angular velocity around each axis will be briefly described. However, the drive means and the detection means in the detection method for each axis are well-known and commonly used techniques, and are not shown.
【００２１】まず、Ｚ軸の回りの回転角速度の検出に係
る構成および動作について述べる。振動子１Ａの連結部
６は、振動子１Ａの重心ＧＯを中心として、４回対称の
正方形をしている。連結部６の周縁部から、四方に向か
って放射状に、二つの支持部１５Ａ、１５Ｂと二つの第
一の検出振動片２０Ａ、２０Ｂとが突出しており、両者
は互いに分離されている。第一の駆動振動片１４Ａ、１
４Ｂは、支持部１５Ａの先端側から支持部１５Ａに直交
する方向に延びるように設けられている。第一の駆動振
動片１４Ｃ、１４Ｄは、支持部１５Ｂの先端側から支持
部１５Ｂに直交する方向に延びるように設けられてい
る。First, the configuration and operation relating to detection of the rotational angular velocity around the Z axis will be described. The connecting portion 6 of the vibrator 1A has a four-fold symmetric square centered on the center of gravity GO of the vibrator 1A. Two support portions 15A and 15B and two first detection vibrating pieces 20A and 20B are radially protruded from the peripheral portion of the connecting portion 6 in four directions, and are separated from each other. First drive vibrating piece 14A, 1
4B is provided so as to extend from the tip end side of the support portion 15A in a direction orthogonal to the support portion 15A. The first drive vibrating pieces 14C and 14D are provided so as to extend from the tip end side of the support portion 15B in a direction orthogonal to the support portion 15B.
【００２２】駆動モードにおいては、第一の駆動振動片
１４Ａ、１４Ｂ、１４Ｃ、１４Ｄを支持部１５Ａ、１５
Ｂの末端部分を中心として矢印ＡＹのようにＸＹ面内で
Ｙ軸の方向に屈曲振動させる。検出モードにおいては、
支持部１５Ａ、１５Ｂが連結部６への付け根を中心とし
て矢印ＣＸのようにＸ軸の方向に周方向に屈曲振動し、
これに対応して第一の検出振動片２０Ａ、２０Ｂが矢印
ＢＹのように屈曲振動する。第一の検出振動片２０Ａ、
２０Ｂに励起される各検出振動を測定することによっ
て、Ｚ軸の回りの回転角速度を測定する。In the drive mode, the first drive vibrating bars 14A, 14B, 14C and 14D are connected to the supporting portions 15A and 15A.
A bending vibration is made in the Y-axis direction in the XY plane around the end portion of B as shown by an arrow AY. In detection mode,
The support portions 15A and 15B flexurally vibrate in the circumferential direction in the X-axis direction as indicated by an arrow CX around the root of the connecting portion 6,
Corresponding to this, the first detection vibrating pieces 20A and 20B flexurally vibrate as shown by an arrow BY. The first detection vibrating piece 20A,
The rotational angular velocity about the Z axis is measured by measuring each detected vibration excited in 20B.
【００２３】次に、Ｘ軸の回りの回転角速度の検出に係
る構成および動作について述べる。図２に示すように、
連結部６の周縁部から二つの第二の駆動振動片３０Ａ、
３０ＢがＸ軸に沿って突出している。また、連結部６に
おける第二の駆動振動片３０Ａ、３０Ｂの付け根に対向
する周縁部からＸ軸に沿って二つの第二の検出振動片４
０Ａ、４０Ｂが突出している。このように両者は互いに
分離されている。Next, the configuration and operation relating to the detection of the rotational angular velocity around the X axis will be described. As shown in FIG.
Two second driving vibrating pieces 30A from the peripheral portion of the connecting portion 6,
30B projects along the X axis. In addition, two second detection vibrating pieces 4 along the X-axis from the peripheral portion of the connecting portion 6 facing the base of the second drive vibrating pieces 30A and 30B.
0A and 40B are projected. In this way, the two are separated from each other.
【００２４】二つの第二の駆動振動片３０Ａ、３０Ｂを
連結部６への付け根を中心として矢印ＡＹのように屈曲
振動させる。この状態で、振動子１ＡをＸ軸の回りに回
転させると、第二の駆動振動片３０Ａ、３０Ｂは、ＢＺ
のようにＺ軸の方向に振動する。この際、一方の第二の
駆動振動片３０Ａの振動の位相と他方の第二の駆動振動
片３０Ｂの振動の位相とは逆になる。これに応答して、
第二の検出振動片４０Ａ、４０Ｂが、ＣＺのようにＺ軸
の方向に互いに逆位相で振動する。第二の検出振動片４
０Ａ、４０Ｂに励起される各検出振動に基づいて、互い
に逆相の電気信号が発生するので、その差を算出する。
この差から、Ｘ軸の回りの回転角速度を算出する。The two second drive vibrating pieces 30A and 30B are caused to flexurally vibrate as shown by an arrow AY around the base of the connecting portion 6. In this state, when the vibrator 1A is rotated around the X axis, the second drive vibrating pieces 30A and 30B move to the BZ
It vibrates in the Z-axis direction like. At this time, the phase of the vibration of the one second drive vibrating piece 30A is opposite to the phase of the vibration of the other second drive vibrating piece 30B. In response to this,
The second detection vibrating pieces 40A and 40B vibrate in opposite phases in the Z-axis direction like CZ. Second detection vibrating piece 4
Based on the detected vibrations excited by 0A and 40B, electric signals having opposite phases are generated, and the difference between them is calculated.
From this difference, the rotational angular velocity around the X axis is calculated.
【００２５】次に、Ｙ軸の回りの回転角速度の検出に係
る構成および動作について述べる。図３に示すように、
連結部６の周縁部から第三の駆動振動片５０Ａおよび第
三の検出振動片６０ＡがＸ軸およびＹ軸に対して交差す
る方向に沿って突出している。また、連結部６の周縁部
から、第三の駆動振動片５０Ｂおよび第三の検出振動片
６０ＢがＸ軸およびＹ軸に対して交差する方向に沿って
突出している。第三の駆動振動片５０Ａおよび第三の検
出振動片６０Ａと、第三の駆動振動片５０Ｂおよび第三
の検出振動片６０Ｂとは、Ｘ軸に対して線対称の位置に
配置されている。Next, the configuration and operation relating to the detection of the rotational angular velocity around the Y axis will be described. As shown in FIG.
The third driving vibrating piece 50A and the third detecting vibrating piece 60A project from the peripheral portion of the connecting portion 6 along a direction intersecting the X axis and the Y axis. Further, the third drive vibrating piece 50B and the third detecting vibrating piece 60B project from the peripheral portion of the connecting portion 6 along a direction intersecting the X axis and the Y axis. The third drive vibrating piece 50A and the third detecting vibrating piece 60A, and the third driving vibrating piece 50B and the third detecting vibrating piece 60B are arranged at positions symmetrical with respect to the X axis.
【００２６】二つの第三の駆動振動片５０Ａ、５０Ｂを
連結部６への付け根を中心として矢印ＡＸＹのようにＸ
軸およびＹ軸に対して交差する方向に向かって屈曲振動
させる。この状態で、振動子１ＡをＹ軸の回りに回転さ
せると、第三の駆動振動片５０Ａ、５０Ｂは、ＢＺのよ
うにＺ軸方向に振動する。この際、一方の第三の駆動振
動片５０Ａの振動の位相と他方の第三の駆動振動片５０
Ｂの振動の位相とは同じになる。これに応答して、第三
の検出振動片６０Ａ、６０Ｂが、ＣＺのように互いに順
位相で振動する。第三の検出振動片６０Ａ、６０Ｂに励
起される各検出振動に基づいて、互いに順位相の電気信
号が発生するので、その和を算出する。この和に基づい
て、Ｘ軸の回りの回転角速度を算出する。The two third drive vibrating pieces 50A, 50B are centered around the root of the connecting portion 6 and are indicated by X as indicated by arrow AXY.
Flexural vibration is performed in a direction intersecting the axis and the Y axis. In this state, when the vibrator 1A is rotated around the Y axis, the third drive vibrating pieces 50A and 50B vibrate in the Z axis direction like BZ. At this time, the phase of the vibration of the one third drive vibrating piece 50A and the other third drive vibrating piece 50A
The phase of the vibration of B becomes the same. In response to this, the third detection vibrating reeds 60A and 60B vibrate in a mutual phase like CZ. Based on the respective detected vibrations excited in the third detection vibrating pieces 60A, 60B, the electric signals of the respective order phases are generated, and the sum thereof is calculated. The rotational angular velocity around the X axis is calculated based on this sum.
【００２７】図４は、第二の実施形態に係る振動子１Ｂ
の斜視図である。振動子１Ｂにおいては、第一の実施形
態に係る振動子１Ａと同様に、第一の駆動振動片１４
Ａ、１４Ｂ、１４Ｃ、１４Ｄと第一の検出振動片２０
Ａ、２０Ｂを利用して、Ｚ軸の回りの回転角速度が検出
される。Ｚ軸の回りの回転角速度を検出するときの動作
は、図１を参照して説明した振動子１Ａにおける動作と
同様なので説明を省略する。FIG. 4 is a vibrator 1B according to the second embodiment.
FIG. In the vibrator 1B, similar to the vibrator 1A according to the first embodiment, the first drive vibrating piece 14 is used.
A, 14B, 14C, 14D and the first detection vibrating piece 20
The rotational angular velocity around the Z axis is detected using A and 20B. The operation for detecting the rotational angular velocity around the Z axis is the same as the operation in the vibrator 1A described with reference to FIG.
【００２８】第二の実施形態に係る振動子１Ｂにおける
Ｘ軸およびＹ軸の回りの回転角速度の検出方法が、第一
の実施形態に係る振動子１ＡにおけるＸ軸およびＹ軸に
対する検出方法と異なっている。The method of detecting the rotational angular velocities around the X-axis and the Y-axis in the vibrator 1B according to the second embodiment is different from the method for detecting the X-axis and the Y-axis in the vibrator 1A according to the first embodiment. ing.
【００２９】図５は、図４に示す振動子１Ｂにおいて、
Ｘ軸の回りの回転角速度を検出するときに利用される要
部を模式的に示す。図６は、図４に示す振動子１Ｂにお
いて、Ｙ軸の回りの回転角速度を検出するときに利用さ
れる要部を模式的に示す。FIG. 5 shows the vibrator 1B shown in FIG.
9 schematically shows a main part used when detecting a rotational angular velocity around the X axis. FIG. 6 schematically shows a main part used in detecting the rotational angular velocity around the Y axis in the vibrator 1B shown in FIG.
【００３０】図５に示すように第二の駆動振動片３０
Ａ、３０Ｂ、３０Ｃ、３０Ｄを矢印ＡＸＹの方向に屈曲
振動させる。この状態で、振動子１ＡをＸ軸の回りに回
転させると、第二の駆動振動片３０Ａ、３０ＢがＢＺの
ように互いに逆位相で振動し、第二の駆動振動片３０
Ｃ、３０ＤがＢＺのように互いに逆位相で振動する。駆
動振動片３０Ａの振動の位相と駆動振動片３０Ｄの振動
の位相とは同じになる。これに応答して、検出振動片４
０Ａ、４０Ｂが、ＣＺのように互いに逆位相で振動す
る。また、検出振動片４０Ｃ、４０ＤがＣＺのように互
いに逆位相で振動する。なお、検出振動片４０Ａの振動
の位相と検出振動片４０Ｄの振動の位相とは同じにな
る。従って、検出振動片４０Ａ、４０Ｄに励起される各
検出振動に基づいて得られた電気信号と、４０Ｂ、４０
Ｃに励起される各検出振動に基づいて得られた電気信号
とは、互いに逆相である。従って、両電気信号の差をと
り、この差に基づいて、Ｘ軸の回りの回転角速度を算出
する。As shown in FIG. 5, the second driving vibrating piece 30 is used.
A, 30B, 30C and 30D are flexurally vibrated in the directions of arrows AXY. In this state, when the vibrator 1A is rotated around the X axis, the second drive vibrating bars 30A and 30B vibrate in opposite phases like BZ, and the second drive vibrating bar 30A.
C and 30D vibrate in mutually opposite phases like BZ. The vibration phase of the drive vibrating piece 30A and the vibration phase of the driving vibrating piece 30D are the same. In response to this, the detection vibrating piece 4
0A and 40B vibrate in mutually opposite phases like CZ. Further, the detection vibrating pieces 40C and 40D vibrate in opposite phases like CZ. The phase of the vibration of the detection vibrating piece 40A and the phase of the vibration of the detection vibrating piece 40D are the same. Therefore, the electric signals obtained on the basis of the respective detection vibrations excited by the detection vibrating pieces 40A, 40D, and 40B, 40
The electric signals obtained based on the respective detected vibrations excited in C have mutually opposite phases. Therefore, the difference between both electric signals is taken, and the rotational angular velocity around the X axis is calculated based on this difference.
【００３１】図６に示すように第二の駆動振動片３０
Ａ、３０Ｂ、３０Ｃ、３０Ｄを矢印ＡＸＹの方向に屈曲
振動させる。この状態で、振動子１ＡをＹ軸の回りに回
転させると、第二の駆動振動片３０Ａ、３０ＢがＢＺの
ように互いに順位相で振動し、第二の駆動振動片３０
Ｃ、３０ＤがＢＺのように互いに順位相で振動する。な
お、第二の駆動振動片３０Ａの振動の位相と第二の駆動
振動片３０Ｄの振動の位相とは逆になる。これに応答し
て、第二の検出振動片４０Ａ、４０Ｂが、ＣＺのように
互いに順位相で振動する。また、第二の検出振動片４０
Ｃ、４０ＤがＣＺのように互いに順位相で振動する。な
お、検出振動片４０Ａの振動の位相と検出振動片４０Ｄ
の振動の位相とは逆になる。検出振動片４０Ａ、４０Ｂ
に励起される各検出振動に基づく電気信号と、４０Ｃ、
４０Ｄに励起される各検出振動に基づく電気信号とは逆
相になるので、両者の差をとり、この差に基づいて、Ｙ
軸の回りの回転角速度を算出する。As shown in FIG. 6, the second drive vibrating piece 30 is used.
A, 30B, 30C and 30D are flexurally vibrated in the directions of arrows AXY. In this state, when the vibrator 1A is rotated around the Y axis, the second drive vibrating pieces 30A and 30B vibrate in the order phase like BZ, and the second drive vibrating piece 30
C and 30D oscillate in order phase like BZ. The phase of the vibration of the second drive vibrating piece 30A is opposite to the phase of the vibration of the second drive vibrating piece 30D. In response to this, the second detection vibrating pieces 40A and 40B vibrate in the mutual phase like CZ. In addition, the second detection vibrating piece 40
C and 40D oscillate with each other in a ranking phase like CZ. The phase of the vibration of the detection vibrating piece 40A and the detection vibrating piece 40D
The phase of the vibration of is opposite. Detection vibrating piece 40A, 40B
An electric signal based on each detected vibration excited by
Since the electric signal based on each detection vibration excited in 40D has a phase opposite to that of the electric signal, the difference between the two is calculated, and based on this difference, Y
Calculate the angular velocity of rotation about the axis.
【００３２】各振動子の材質は特に限定しないが、水
晶、ＬｉＮｂＯ3、ＬｉＴａＯ3、ニオブ酸リチウム−タ
ンタル酸リチウム固溶体（Ｌｉ（Ｎｂ，Ｔａ）Ｏ3）単
結晶、ホウ酸リチウム単結晶、ランガサイト単結晶等か
らなる圧電単結晶を使用することが好ましい。圧電性材
料としては、圧電単結晶の他に、ＰＺＴ等の圧電セラミ
ックスがある。振動子は、圧電材料や恒弾性合金の他
に、シリコンマイクロマシンにおいて使用されるよう
に、シリコン半導体プロセスによって形成することもで
きる。The material of each vibrator is not particularly limited, but is quartz, LiNbO 3 , LiTaO 3 , lithium niobate-lithium tantalate solid solution (Li (Nb, Ta) O 3 ) single crystal, lithium borate single crystal, Langa. It is preferable to use a piezoelectric single crystal such as a site single crystal. Examples of the piezoelectric material include piezoelectric ceramics such as PZT, in addition to piezoelectric single crystals. The vibrator may be formed by a silicon semiconductor process as used in a silicon micromachine, in addition to the piezoelectric material and the constant elastic alloy.
【００３３】駆動振動片、検出振動片には、公知の駆動
手段、検出手段を設ける。このような駆動手段、検出手
段は、例えば圧電性材料に設けられた金属電極であって
よい。The driving vibrating piece and the detecting vibrating piece are provided with known driving means and detecting means. Such driving means and detecting means may be, for example, metal electrodes provided on a piezoelectric material.
【００３４】[0034]
【発明の効果】以上述べたように、本発明によれば、少
なくとも互いに直交する第一の軸および第二の軸の回り
の各回転角速度を検出するときに利用される振動子にお
いて、出力信号のノイズやバラツキを抑制することがで
きる。As described above, according to the present invention, the output signal of the vibrator used when detecting the respective rotational angular velocities around at least the first axis and the second axis which are orthogonal to each other. It is possible to suppress the noise and the variation of.
【図１】本発明の第一の実施形態に係る振動子１Ａの平
面図である。FIG. 1 is a plan view of a vibrator 1A according to a first embodiment of the present invention.
【図２】図１の振動子１ＡにおいてＸ軸の回りの回転角
速度を検出するときに利用される要部を模式的に示す図
である。FIG. 2 is a diagram schematically showing a main part used when detecting a rotational angular velocity about an X axis in the vibrator 1A of FIG.
【図３】図１の振動子１ＡにおいてＹ軸の回りの回転角
速度を検出するときに利用される要部を模式的に示す図
である。3 is a diagram schematically showing a main part used when detecting a rotational angular velocity about a Y axis in the vibrator 1A of FIG. 1. FIG.
【図４】本発明の第二の実施形態に係る振動子１Ｂの平
面図である。FIG. 4 is a plan view of a vibrator 1B according to a second embodiment of the present invention.
【図５】図４の振動子１ＢにおいてＸ軸の回りの回転角
速度を検出するときに利用される要部を模式的に示す図
である。5 is a diagram schematically showing a main part used when detecting a rotational angular velocity about the X axis in the vibrator 1B of FIG.
【図６】図４の振動子１ＢにおいてＹ軸の回りの回転角
速度を検出するときに利用される要部を模式的に示す図
である。6 is a diagram schematically showing a main part used when detecting a rotational angular velocity about the Y axis in the vibrator 1B of FIG.
１Ａ、１Ｂ 振動子 ６ 連結部 １
４Ａ、１４Ｂ、１４Ｃ、１４Ｄ 第一の駆動振動片
２０Ａ、２０Ｂ、２０Ｃ、２０Ｄ 第一の検出振
動片 ３０Ａ、３０Ｂ 第二の駆動振動片
４０Ａ、４０Ｂ 第二の検出振動片 ５０Ａ、
５０Ｂ 第三の駆動振動片 ６０Ａ、６０Ｂ
第三の検出振動片1A, 1B Transducer 6 Connection part 1
4A, 14B, 14C, 14D First drive vibrating piece
20A, 20B, 20C, 20D 1st detection vibration piece 30A, 30B 2nd drive vibration piece 40A, 40B 2nd detection vibration piece 50A,
50B Third drive vibrating piece 60A, 60B
Third detection vibrating piece
Claims (7)
第二の軸の回りの各回転角速度を検出するときに利用さ
れる振動子であって、 前記第一の軸の回りの回転角速度を検出するための第一
の駆動振動片および第一の検出振動片と、 前記第二の軸の回りの回転角速度を検出するための第二
の駆動振動片および第二の検出振動片と、 前記第一の駆動振動片、前記第一の検出振動片、前記第
二の駆動振動片、および前記第二の検出振動片を接続し
ている連結部とを備えており、 前記第一の駆動振動片の駆動振動モードの固有共振周波
数が、前記第二の駆動振動片の駆動振動モードの固有共
振周波数と異なっていることを特徴とする、振動子。1. A vibrator used to detect each rotational angular velocity about at least a first axis and a second axis orthogonal to each other, the rotational angular velocity about the first axis being detected. A first driving vibrating piece and a first detecting vibrating piece for, a second driving vibrating piece and a second detecting vibrating piece for detecting a rotational angular velocity around the second axis, the first One driving vibrating piece, the first detecting vibrating piece, the second driving vibrating piece, and a connecting portion connecting the second detecting vibrating piece, the first driving vibrating piece The natural resonance frequency of the drive vibration mode of <3> is different from the natural resonance frequency of the drive vibration mode of the second drive vibrating piece.
が、前記第二の駆動振動片の駆動振動モードと倍数波の
関係にないことを特徴とする、請求項１記載の振動子。2. The vibrator according to claim 1, wherein the driving vibration mode of the first driving vibrating piece is not in a relation of a multiple wave with the driving vibration mode of the second driving vibrating piece.
めの第三の駆動振動片および第三の検出振動片をさらに
備えており、 前記連結部が、前記第三の駆動振動片および前記第三の
検出振動片をさらに接続していることを特徴とする、請
求項１または２記載の振動子。3. A third driving vibrating piece for detecting a rotational angular velocity about a third axis, and a third detecting vibrating piece, wherein the connecting portion has the third driving vibrating piece. The vibrator according to claim 1 or 2, further comprising: the third detection vibrating piece.
固有共振周波数が、前記第三の駆動振動片の駆動振動モ
ードの固有共振周波数と異なっていることを特徴とす
る、請求項３記載の振動子。4. The natural resonance frequency of the driving vibration mode of the first driving vibration piece is different from the natural resonance frequency of the driving vibration mode of the third driving vibration piece. The described oscillator.
固有共振周波数が、前記第三の駆動振動片の駆動振動モ
ードの固有共振周波数と異なっていることを特徴とす
る、請求項３または４記載の振動子。5. The natural resonance frequency of the drive vibration mode of the second drive vibration piece is different from the natural resonance frequency of the drive vibration mode of the third drive vibration piece. Or the oscillator according to 4.
り、 前記第一の軸が前記平面に垂直な軸であることを特徴と
する、請求項１〜５のいずれか一つの請求項に記載の振
動子。6. The vibrator according to claim 1, wherein the vibrator extends along a predetermined plane, and the first axis is an axis perpendicular to the plane. The oscillator according to the item.
載の振動子を備えていることを特徴とする、振動型ジャ
イロスコープ。7. A vibrating gyroscope, comprising the vibrator according to claim 1. Description:
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|---|---|---|---|
| JP2002117549A JP3885944B2 (en) | 2002-04-19 | 2002-04-19 | Oscillator and vibratory gyroscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002117549A JP3885944B2 (en) | 2002-04-19 | 2002-04-19 | Oscillator and vibratory gyroscope |
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