JP2003299917A - Connector type in-line filter - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a connector type in-line filter capable of removing air bubbles occurring on the primary side or secondary side of a filter film or on both sides thereof when a liquid is filtered and gradually accumulated to close the pores of the filter film. <P>SOLUTION: In the connector type in-line filter 10, a vent passage 34 pierces a filter support member 12 radially from the position of the inner end surface 22 of the filter support member 12 to open in the outside surface 32 thereof and is formed to the rear end part 18 of the filter support member 12. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an in-line filter for filtering a liquid, and more particularly, to a slurry used for a substrate for manufacturing electronic parts such as a semiconductor wafer and a glass substrate for manufacturing a liquid crystal device, and a slurry for general industry. The present invention relates to a connector type in-line filter for filtering a large amount of liquid medicine such as used liquid.

[0002]

2. Description of the Related Art Conventionally, as a connector-type in-line filter, for example, one for gas having a screen fixed to a pipe joint as described in JP-A-6-312109, and JP-A-7-213824. There is known one in which the filter 4 is hermetically attached by the hedge 6 at the open end of the connector, as described in Japanese Patent Laid-Open Publication No. 2000-242242.

[0003] Such a conventional connector type in-line filter is characterized by being of an in-line type, that is, since the filter member including the filter element is arranged in the pipe, the protruding portion outside the pipe is small and it is not bulky as a whole. In addition to the above-mentioned feature, it is advantageous in terms of cost because it is a feature of a connector type, that is, an additional component for connecting a pipe, such as a fastening ring, is unnecessary. However, these conventional connector type in-line filters are disclosed in, for example, Japanese Patent Laid-Open No. 6-3121.
When the main object to be filtered is a gaseous fluid as in No. 09, no vent holes are naturally provided in the flow passage, but the object to be filtered is oil, that is, liquid. −
Even in the case of No. 213824, such a vent hole is not provided.

Therefore, if air bubbles are generated on either or both of the upstream (primary) side and the downstream (secondary) side of the filter membrane when the liquid is filtered using these filters, these air bubbles will not escape. Since it does not exist, the pores of the filter membrane are gradually closed, and eventually the filtration efficiency decreases with time.

The problem of such bubbles that may occur when filtering a liquid is not of the connector type.
The apparatus as described in No. 326570 is dealt with by a method of extracting gas through a gas vent pipe inserted from the secondary side. However, in a connector type in-line filter, a structure for removing bubbles that gradually accumulate when filtering a liquid has never been considered.

[0006]

A connector capable of removing air bubbles generated on each side or both sides of a primary and secondary sides of a filter membrane when filtering a liquid and gradually accumulating to block pores of the filter membrane. It is to provide an in-line filter of the formula.

[0007]

According to the present invention, there is provided a connector type in-line filter which does not cause the above-mentioned problem of bubbles. Specifically, (1) a connector-type in-line filter for filtering a liquid by inserting it in a joint portion of a pipe line, the front end being opened to the primary side of the supply liquid and the rear end of the secondary side. Has ends and
A filter support member in the form of a short cylinder provided with a liquid outlet for passing filtered liquid at the rear end, and an open end joined to an inner end surface position of the rear end of the filter support member and aligned with the liquid outlet, A filter member having a closed end facing the open end and extending a predetermined length to the primary side of the supply liquid, wherein the filter support member radially extends the filter support member from the inner end surface position of the rear end portion. A connectorized in-line filter is provided having a vent passage therethrough that opens to an outer surface. A gas trap is connected to the vent passage, and the bubble gas accumulated at the inner end of the filter support member is separated via this gas trap and discharged to the outside of the pipe through an appropriate pipe line.

(2) According to a preferred embodiment of the present invention, in the connector type in-line filter having the above-mentioned constitution (1), the filter member includes an outer cylinder and an inner cylinder having a large number of openings, and these outer cylinders. And a cylindrical filter element disposed between the inner cylinder and the closed cylinder, the closed end being a cap member fixed to the outer cylinder and the inner cylinder.

(3) According to a preferred embodiment of the present invention, a rear end portion of the filter support member has an outer joint portion for fitting the secondary side pipe, and a front end portion thereof has an inner joint portion for fitting to the primary side pipe. Parts.

Each of the primary side and secondary side pipes for interposing the connector type in-line filter of the present invention is typically loosely fitted to the coupling end of the secondary side pipe and provided at this coupling end. This is a type in which the joint ends of the joint members locked at the locking flange positions are fitted to the joint ends of the primary side pipes to be joined to each other. Therefore, the outer coupling portion and the inner coupling portion of the filter support member of the in-line filter of the present invention have the same threaded portion as the coupling end portion of the primary side pipe and the coupling end portion of the joint member, respectively. can do.

(4) According to a preferred embodiment of the present invention, in the connector type in-line filter having the above-mentioned constitutions (1) and (2), the filter member is detachably attached to the filter supporting member. Can be If the filter member is not such a detachable one, the connector type in-line filter of the present invention is of a disposable type. Further, the filter supporting member can be a molded product made of a suitable thermoplastic resin or metal material having oxidation resistance, alkali resistance, chemical resistance, solvent resistance and the like depending on the liquid to be treated.

An outer cylinder and an inner cylinder of the filter member,
Similarly, the cap member forming the closed end can be made of a suitable thermoplastic resin or metal material having oxidation resistance, alkali resistance, chemical resistance, solvent resistance, etc., depending on the liquid to be treated. Yes, and depending on the materials used, any technique such as welding or gluing can be used to join the filter support member.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in detail with reference to FIGS. 1, 2 and 3 in connection with embodiments. Figure 1
Is a connector type in-line filter 1 according to the present invention.
A cross-sectional side view of 0 is shown. In-line filter 10
Is composed of two members, a filter support member 12 and a filter member 14 which can be detachably attached to the filter support member 12 or integrally attached thereto.

The filter support member 12 is shown as "a" in FIG.
2 has a front end 16 which is open to the primary side of the feed liquid and a rear end 18 which is also located on the secondary side of the feed liquid, also designated by “b” in FIG. Typically, it has the form of a short cylinder. The rear end portion 18 is provided with a liquid outlet 20 for sending the filtered liquid, which is supplied from the primary side and has passed through the filter member described below, to the secondary side pipe.

The above-mentioned filter member 14 is joined to the position of the inner end surface 22 of the rear end portion 18 of the filter support member 12. The filter member 14 is the filter support member 12
The open end 2 aligned with the liquid outlet 20 at the inner end surface 22 of the
4 and a closed end 26 facing the open end 24,
It extends for a predetermined length in the primary side of the supply liquid, that is, in the direction of "a" in FIG.

In the illustrated embodiment, the filter support member 1 of the connector type in-line filter 10 of the present invention.
2 is a secondary side pipe 1 at the outer peripheral portion of the rear end portion 18.
Has an outer joint portion 28 for fitting the joint end portion 7 of the joint member 5 of FIG.
It has an inner joint portion 30 for fitting the joint end portion of the primary side pipe 9.

As mentioned above, the respective pipings on the primary side and the secondary side through which the connector type in-line filter 10 of the present invention is inserted are typically as illustrated in FIG. At the coupling end of the secondary side pipe 1, its locking flange 3
The joint end portion 7 of the joint member 5 loosely fitted in the locked position is fitted and tightened to the joint end portion 11 of the primary side pipe 9 so as to be fluid-tightly coupled to each other. For that purpose, such fitting and tightening thread groove portions are formed inside the joint end portion 7 of the joint member 5, while on the other hand, outside the corresponding joint end portion 11 of the primary side pipe 9,
A thread groove portion that can be engaged with the thread groove portion of the coupling end portion 7 is formed.

Therefore, when the connector type in-line filter 10 of the present invention is interposed between the primary and secondary side pipes by using the pipe joint member 5 as described above, the inner connection of the filter support member 12 is performed. In the portion 30 and the outer joint portion 28, the same thread groove portions as those of the joint end portion 11 of the primary side pipe 9 and the joint end portion 7 of the joint member 5 of the secondary side pipe 1 are formed, respectively.

Further, in the connector type in-line filter 10 of the present invention, the most important feature is that the filter support member 12 is radially penetrated from the position of the inner end face 22 to the rear end portion 18 of the filter support member 12. A vent passage 34 is formed that opens into the outer surface 32. As shown in FIG. 3, the vent passage 34 extends along the inner end surface 22 of the filter support member 12 between the outer joint portion 28 and the inner joint portion 30 and at a position where the joint member 5 is not covered. The sidewall 36 of the filter support member is preferably formed through the radial direction. At the end of the vent passage 34 on the side of the outer surface 32, there is further formed a connecting portion 38 such as a thread groove for connecting a gas trap conduit (not shown).

By providing this vent passage 34, in the connector type in-line filter 10 of the present invention, it is generated outside the filter member 14 during the treatment of the liquid to be treated, and the inner end surface of the inner cavity 40 of the filter support member 12 is formed. Bubbles gradually accumulating near 22 can be discharged outside the pipe at any time by using the gas trap connected to the vent passage 34, so that there is no problem that the treatment efficiency decreases with time.

Further, as described above, the connector type in-line filter 10 of the present invention has a structure in which it is interposed between each of the primary side and secondary side pipes, and the vent passage 34 for degassing is supported by the filter. Opening to the outer surface 32 of the member 12 allows the conduit from the gas trap to be directly connected to the vent passage 34 without the need for an additional conduit, thus providing a non-bulky, in-line form of nature. Combined with the characteristics of, the overall structure becomes relatively simple.

The filter member 14 used in the connector type in-line filter 10 of the present invention is extended to the primary side of the supply liquid by a predetermined length, and the filter supporting member 1 is provided.
2 has an open end 24 that is joined to the inner end surface 22 of the rear end portion 18 and is aligned with the liquid outlet 20 of the filter support member 12.
And a closed end 26 opposite to the open end 24.

When the filter member 14 is detachable from the filter support member 12 as described above, each of the filter support member 12 and the filter member 14 is provided with, for example, a matching thread groove. The filter supporting member 12 may be configured to be joined to the position of the inner end surface 22 of the rear end portion 18 of the filter supporting member 12 while being engaged with each other. On the other hand, when the filter member 14 is integrated with the filter support member 12, the filter member 14 is integrated at the position of the inner end surface 22 of the rear end portion 18 of the filter support member 12 by welding or using a suitable adhesive. To join together.

The filter member 14 includes an outer cylinder 42 having a large number of openings, an inner cylinder 44 positioned at a constant distance from the outer cylinder 42, and these outer cylinders 42.
And a cylindrical filter element 46 disposed between the inner cylinder 44. Such a structure of the filter member 14 is disclosed in JP-A-5-111622 and JP-A-5-6.
4728. The closed end 26 can also be a cap member secured to the outer cylinder 42 and the inner cylinder 44.

The filter element 46 is generally of a wound type or a pleated type, but it is preferable to select and use it based on the properties of the liquid to be treated. Further, as the material of the filter element 46, a non-thermoplastic tetrafluoroethylene resin,
From polypropylene, polyethylene, polysulfone, polyamide, polycarbonate, polyether sulfone, vinylidene fluoride resin, polyether ketone, etc., which are thermoplastics, they can be selectively used depending on the properties of the liquid to be treated.

On the other hand, the outer cylinder 42, the inner cylinder 44 and the cap member are also made of polypropylene, polyethylene,
A thermoplastic resin such as polysulfone, polyamide, polycarbonate, polyether sulfone, polyether ketone, or thermoplastic fluororesin or a metal can be selected according to the properties of the liquid to be treated.

The connecting end surface of the primary side pipe 9 in which the connector type in-line filter 10 of the present invention is interposed,
A primary recess, designated by numeral 48 in FIG. 2, is provided for locating a sealing means for sealing the coupling end face of the secondary pipe 1, for example an O-ring. Therefore, at the rear end portion 18 of the filter supporting member 12 of the connector-type in-line filter 10 of the present invention, there is also provided a rear end recess 50 in which an O-ring for sealing the coupling end surface of the secondary side pipe 1 is arranged. It is formed. The O-ring arranged in the primary side recess 48 of the coupling end surface of the primary side pipe 9 is the front end surface 52 of the filter support member 12.
Used to seal (see FIG. 3).

Although the present invention has been described with reference to the embodiments, it should be understood that various modifications can be made within the invention. For example, as each of the primary side and secondary side piping for interposing the present invention, in addition to the one using a union joint such as the joint member described in the embodiment, the flanges formed at the joint end positions are bolted together. It is possible to use a type that is used and joined.

When used for such a flange type pipe, the front end face 52 and the rear end portion 18 of the filter support member 12 of the in-line filter 10 of the present invention have the respective flanges of the primary side pipe and the secondary side pipe. Bolt insertion holes are formed at positions corresponding to the bolt holes of the portions.

[0030]

According to the connector type in-line filter of the present invention, when the liquid to be treated is filtered, it is generated on each side or both sides of the primary and secondary sides of the filter membrane and gradually accumulates to form a fine filter membrane. A connector-type in-line filter that can easily remove air bubbles that block holes is provided.

[Brief description of drawings]

FIG. 1 is a sectional side view of a connector type in-line filter according to the present invention.

FIG. 2 is a cross-sectional side view showing the connector type in-line filter of the present invention of FIG. 1 in a state of being interposed between each pipe on the primary side and the secondary side.

FIG. 3 is an enlarged sectional side view of a filter support member of the connector type in-line filter of FIG.

[Explanation of symbols]

10 connector type in-line filter 12 Filter support member 14 Filter member 16 front end 18 rear end 20 Liquid outlet 22 Inner end face 24 open end 26 closed end 28 outer joint 30 inner joint 32 outer surface 34 Vent passage 36 Side wall 38 Connection 40 lumen 42 outer cylinder 44 inner cylinder 46 filter elements 48 Primary side recess 50 Rear end recess 52 Front end face

Claims (4)

[Claims] 1. A connector-type in-line filter (10) for filtering a liquid by interposing at a joint portion of a pipe line, the front end (16) opening to a primary side of a supply liquid, and a secondary And a rear end portion (18) of the filter support member (12) in the form of a short cylinder having a liquid outlet (20) through which a filtered liquid passes, and a rear end portion of the filter support member. Open end (24) joined to the inner end face position (22) of the part and aligned with the liquid outlet
And a filter member (1) having a closed end (26) facing the open end and extending a predetermined length to the primary side of the supply liquid.
4), wherein the filter support member (12) has a vent passage (3) that opens from the position of the inner end surface (22) of the rear end portion (18) to the outer surface (32) through the filter support member in the radial direction.
Connector type in-line filter having 4). 2. A filter member (14) comprising an outer cylinder (42) and an inner cylinder (44) having multiple openings, a cylindrical filter element (46) disposed between the outer cylinder and the inner cylinder, The connector type in-line filter according to claim 1, wherein the closed end (26) is a cap member fixed to the outer cylinder and the inner cylinder. 3. An outer coupling part (2) to which a rear end part (18) of the filter support member (12) can fit a secondary pipe.
The connector type in-line filter according to claim 1 or 2, further comprising: (8), and a front end portion (16) having an inner coupling portion (30) into which the primary side pipe can be fitted. 4. The connector type in-line filter according to claim 1, wherein the filter member (14) is detachably attached to or integrated with the filter support member (12).