JP2003270042A - Fabry-perot filter apparatus, its manufacturing method, and operating method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a Fabry-Perot filter apparatus, a method for manufacturing the Fabry-Perot filter apparatus, and a method for operating the Fabry-Perot filter apparatus. <P>SOLUTION: In the Fabry-Perot filter apparatus, the method for manufacturing the Fabry-Perot filter apparatus, and the method for operating the Fabry- Perot filter apparatus, a Fabry-Perot filter and at least one color filter layer are used, both of them are assembled on a substrate, and at least two optical transducer elements formed in the substrate are covered. In the apparatus and the methods, at least one color filter layer is constituted of at least two color filter elements of different colors which are each individually recorded in the optical transducer elements at least out of the two optical transducer elements. The apparatus and the methods are prepared for heightened optical discrimination characteristics. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention generally relates to a Fabry-Perot filter device, and more particularly to a Fabry-Perot filter device having improved performance.

[0002]

BACKGROUND OF THE INVENTION Fabry-Perot filters are optical interference filters used to provide desirable optical properties in both optical sensing and light emitting applications. In particular, it is used as a photocomponent in an optical spectrophotometer for the analysis of samples of various compositions in the usual, but not exclusively, application of Fabry-Perot filters.

The Fabry-Perot filter is, in short,
It was clearly gained as an optical component in optical devices used in various fields of application, but
The Fabry-Perot filter is not without its problems.

From that point, it is often difficult to fabricate Fabry-Perot filters efficiently with enhanced optical discrimination.

Therefore, it is desirable to provide a Fabry-Perot filter device that can be manufactured with enhanced performance, especially with enhanced optical discrimination.

The present invention is directed to achieving the above goals.

In the manufacturing technology of Fabry-Perot filter devices, various Fabry-Perot filter devices having desirable characteristics have been disclosed.

[0008] A Fabry-Perot filter device, which is included in the Fabry-Perot filter device, but is not limited to the Fabry-Perot filter device, is disclosed in the following patents, which is (1) Kata.
giri et al., U.S. Pat. No. 4,859,060 (in a Fabry-Perot filter device with adjustable interferometric characteristics, one of the Fabry-Perot filter devices).
The Fabry-Perot filter device is manufactured so that the distance between the pair of partially reflective layers can be changed), (2) Zoch
Bauer, U.S. Pat. No. 5,357,340 (in a Fabry-Perot filter device with enhanced optical properties, wherein 1
A pair of Fabry-Perot filters instead of two Fabry-Perot filters), (3) Cole et al.
US Pat. Nos. 55,503,73 (with fabrication using a microlens layer in conjunction with a Fabry-Perot filter device in a Fabry-Perot filter device with enhanced optical performance) and (4) Lehto et al., US Patent No. 5,818,586 (in an additional Fabry-Perot filter device with adjustable interferometric characteristics,
Manufacturing the Fabry-Perot filter device such that the spacing of the pair of partially reflective layers in the Fabry-Perot filter device can be varied.

Similarly, although not particularly limited to the Fabry-Perot filter device, Okamoto
U.S. Pat. No. 6,094,272 discloses a distance tolerance color discriminator that defines a measure of reflectance or transmissivity of at least two colors, red, green and blue, for samples having colors that it is desirable to discriminate. .

The disclosures of each of the above-referenced related art references are hereby incorporated by reference in their entirety.

Desirable in the fabrication technology of Fabry-Perot filter devices is an additional Fabry-Perot filter device that can be manufactured with enhanced performance, especially with enhanced optical signature.

[0012]

The present invention is aimed at achieving the above goals.

A first object of the present invention is to provide a Fabry-Perot filter device, a method of manufacturing the Fabry-Perot filter device, and a method of operating the Fabry-Perot filter device.

A second object of the present invention is to provide the Fabry-Perot filter device, the method of manufacturing the Fabry-Perot filter device, and the method of operating the Fabry-Perot filter device, the first object of the present invention. In which the Fabry-Perot filter device is manufactured with enhanced performance.

[0015]

According to the two objects of the invention, the present invention provides a Fabry-Perot filter device, a method of manufacturing the Fabry-Perot filter device, and a method of operating the Fabry-Perot filter device. It

According to the invention, the Fabry-Perot filter device comprises, in a first embodiment, a substrate having at least two optical transducer elements formed therein. The Fabry-Perot filter device comprises in a second embodiment a Fabry-Perot filter assembled on the substrate and covering the at least two optical transducer elements, wherein the Fabry-Perot filter is ,
It consists of a pair of partially reflective layers separated by a transmissive material. Finally, the Fabry-Perot filter device, in a third embodiment, consists of at least one color filter layer, which is also assembled on the substrate and covers the at least two optical transducer elements, Therein, the at least one color filter layer comprises at least two color filter elements of different colors, each of which is recorded on an individual light transducer element in the at least two light transducer elements. To be done.

With regard to the Fabry-Perot filter device according to the invention, a method for manufacturing the Fabry-Perot filter device according to the invention and a method for operating the Fabry-Perot filter device according to the invention are considered.

The present invention provides a Fabry-Perot filter device, a method of manufacturing the Fabry-Perot filter device, and a method of operating the Fabry-Perot filter device, wherein the Fabry-Perot filter device is enhanced in performance. , Especially with enhanced optical discrimination properties.

In the present invention, in order to achieve the above-mentioned object, a substrate used in the Fabry-Perot filter device is combined with a Fabry-Perot filter similarly assembled on the substrate, and Assembling at least one color filter layer overlying at least two similarly formed optical transducer elements. In the Fabry-Perot filter device,
The at least one color filter layer comprises at least two color filter elements of different colors, each color filter element being recorded on a separate light transducer element in the at least two light transducer elements. In the Fabry-Perot filter device of the present invention, the presence of the color filter layer provides for, among other things, enhanced optical discrimination in the Fabry-Perot filter device.

[0020]

DETAILED DESCRIPTION OF THE INVENTION The present invention provides a Fabry-Perot filter device, a method of manufacturing the Fabry-Perot filter device, and a method of operating the Fabry-Perot filter device, thereby enhancing the Fabry-Perot filter device. Manufactured with enhanced performance, particularly optical discrimination characteristics.

In the present invention, in order to achieve the above object,
On a substrate used in the Fabry-Perot filter device, in combination with a Fabry-Perot filter similarly assembled on the substrate, covering at least two similarly formed optical transducer elements in the substrate. , Assembling at least one color filter layer. In the Fabry-Perot filter device, the at least one color filter layer includes at least two different colors, each color filter element being recorded on a separate light transducer element in the at least two light transducer elements. It is composed of color filter elements. In the Fabry-Perot filter device of the present invention, the presence of the color filter layer provides for, among other things, the enhanced optical discrimination of the Fabry-Perot filter device.

In a preferred embodiment of the invention, the invention is best described with the proviso that it is a Fabry-Perot filter device on the sensing side using direct illumination and a series of photodiodes already formed in a semiconductor substrate. However, the present invention is not intended to be limited to direct illumination and Fabry-Perot filter devices so manufactured. On the contrary, the Fabry-Perot filter device according to the present invention may be manufactured using a substrate other than a semiconductor substrate and a photoactive phototransducer device other than a photodiode, such as a photoreceptor or a light emitter. Similarly, Fabry-Perot filter devices according to the present invention may be used in direct illumination and sensing applications (ie, absorption and transmission spectrophotometric applications), as well as indirect illumination and sensing applications (ie, fluorescence spectrophotometric applications). Field).

Referring now to FIG. 1, there is shown a schematic cross-sectional view of a Fabry-Perot filter device made in accordance with a preferred embodiment of the present invention.

Shown in FIG. 1 is a Fabry-Perot filter arrangement 11 in the first embodiment, which is usually a Fabry-Perot filter arrangement 11, which in the first embodiment comprises a series of photodiodes, The semiconductor substrate 10 is formed with 12a, 12b and 12c formed therein.

In a preferred embodiment of the present invention, with respect to the semiconductor substrate 10, the definition of the semiconductor substrate in the microelectronics manufacturing technology of semiconductor integrated circuits is defined by one of the dopant polarities, various dopant concentrations and a plurality of crystal orientations. Nevertheless, in a preferred embodiment of the present invention, the semiconductor substrate 10 is N- or P-type.
It is common and desirable to have a (100) silicon semiconductor substrate having a -dopant concentration.

Similarly, in a preferred embodiment of the invention said series of photodiodes, 12a, 12b and 1
With respect to 2c, the series of photodiodes, 12a, 12b and 12c, are also common in the microelectronic fabrication technology for semiconductor integrated circuits, and the semiconductor substrate 10
Seen in comparison, a series of regions generally having a high dopant concentration and opposite dopant polarities are formed along with implanting the semiconductor substrate 10. In a preferred embodiment of the invention, each of said series of photodiodes, 12a, 12b and 12c, generally and desirably, has a line width of about 10 to about 2000 microns.

In the schematic cross-sectional view of FIG. 1, the first spacer layer 14 and the second spacer layer 22, which are each formed on the semiconductor substrate 10, are the same as the series of photodiodes, 12a, 12b and Although shown with 12c, the present invention, however, requires only a minimum of two photoactive light transducer regions, such as photodiodes, to provide one Fabry-Perot filter device according to the present invention.

In a preferred embodiment of the present invention, the first
In regard to the spacer layer 14 and the second spacer layer 22 of FIG. 1, each of the first spacer layer 14 and the second spacer layer 22 is a conventional spacer material in semiconductor microelectronics fabrication technology, in particular FIG. It can be formed from a spacer material transparent to radiation whose intensity is sensed and classified by the series of photodiodes, 12a, 12b and 12c, when operating the Fabry-Perot transducer element shown in schematic cross-section.

In a preferred embodiment of the present invention, the first spacer layer 14 and the second spacer layer 22.
Is generally and desirably formed from a dielectric material, silicon oxide, and is formed to a thickness of about 0 to about 10 micrometers, although other materials and thicknesses may be used in the Fabry-Perot filter device of the present invention. You may use.

The schematic cross-sectional view of FIG. 1 also shows a Fabry-Perot filter 19 formed by being sandwiched between the first spacer layer 14 and the second spacer layer 22. However, it comprises a first partially reflective layer 16 which is separated from a second partially reflective layer 20 by means of an interferometric spacer layer 18.

In a preferred embodiment of the present invention, with respect to the interferometric spacer layer 18, the interferometric spacer layer 18 was used to form the first spacer layer 14 and the second spacer layer 22. The interferometric measuring spacer layer 1 may be formed by using the method and the material.
8 generally and desirably is manufactured in compliance with strict tolerances to provide said Fabry-Perot filter 19 in a Fabry-Perot filter device according to a preferred embodiment of the present invention. Generally and desirably, the interferometric spacer layer 22 is from about 100 to about 50.
It is formed with a thickness selected from the range of 000 angstroms and may be formed of silicon oxide as a dielectric material.

In a preferred embodiment of the present invention, the first partially reflective layer 16 and the second partially reflective layer 20.
With regard to the first partially reflective layer 16 and the second
The partially reflective layer 20 may be formed of any of a plurality of reflective materials that are common in the microelectronics manufacturing technology for semiconductor integrated circuits, but the thickness is selected from the range that gives the partially reflective characteristics to the reflective material. . Generally and desirably, such reflective materials will be metallic materials, but are not limited to metallic materials such as aluminum, silver and gold. Generally and desirably, the first partially reflective layer 16 and the second partially reflective layer 20 are formed of a reflective metallic material, silver, and have a thickness of about 100 to about 600 angstroms.

Finally, in the schematic cross-sectional view of FIG. 1, the color filter layer 2 formed on the second spacer layer 22 is shown.
4 is shown, which completes the manufacture of the Fabry-Perot filter device 11 according to a preferred embodiment of the present invention.

In a preferred embodiment of the present invention, with respect to the color filter layer 24, the color filter layer 24 is
Are three color filter elements of different colors, 24a,
Although comprised of 24b and 24c, the present invention generally requires a minimum of two different color filter elements to provide a color filter layer. Similarly, in the present invention and in a preferred embodiment of the present invention, each of the color filter elements, 24a, 24b and 24c in the color filter layer 24 corresponds in the series of photodiodes, 12a, 12b and 12c. Photodiodes 12a, 12b
Or recorded in 12c.

In a preferred embodiment of the present invention, with respect to the color filter layer 24, the color filter layer 24 can be formed by using a conventional color filter material in a microelectronics manufacturing technique. Generally and preferably, the series of color filter elements in the color filter layer 24,
24a, 24b and 24c are formed using a series of different colored patterned photoresist layers, although other colored layers may be used. In a preferred embodiment of the invention said series of color filter elements, 24a, 24b.
And 24c are generally and desirably red, green,
Although comprised of a series of blue transmissive color filter elements, the present invention is not specifically limited to only the series of red, green, blue transmissive color filter elements, 24a, 24b and 24c. .

Finally, the schematic cross-sectional view of FIG. 1 also shows a sample medium 26, which is a medium through which the radiation beam 28 on the irradiation side passes, which, in the end, is the series of photodiodes, 12a. , 12b and 12c.

In a preferred embodiment of the present invention, with respect to the sample medium 26, the sample medium 26
Is a liquid, gas, solid or alternative mixture,
That is, otherwise common mixtures, otherwise may be subjected to analysis when using a Fabry-Perot filter device.

In a preferred embodiment of the invention, with respect to the radiation beam 28, it is suitable for providing the radiation beam 28, otherwise generally known in the art and for analyzing the sample medium 26. , Any of a plurality of radiation sources may be used. Generally and desirably, but not exclusively, the radiation beam 28 is directed from a white light visible light source.

It will be understood by those skilled in the art, and in the context of operating a Fabry-Perot filter device, the schematic cross-section of which is shown in FIG.
Sample medium 26 and color filter element 24
In selecting a, 24b, and 24c, in analyzing the sample medium 26, in addition to increasing wavelength discrimination, this also increases accuracy and sensitivity.

Similarly, this is also understood by those skilled in the art, although not specifically described in the context of the schematic cross-section of FIG. 1, but shown in FIG. The Fabry-Perot filter device 11 generally and desirably uses methods and materials for microelectronic fabrication of semiconductor integrated circuits, which are otherwise conventional in microelectronic fabrication technology of semiconductor integrated circuits. The whole is manufactured. Such a microelectronic manufacturing method for a semiconductor integrated circuit can be used to manufacture a sample confinement structure containing a sample such as the sample medium 26 in the Fabry-Perot filter device according to the present invention. .

Furthermore, in a preferred embodiment of the present invention,
Although the present invention is explained in the context of a Fabry-Perot filter device in which a Fabry-Perot filter is assembled closer to the substrate than the color filter layer, the Fabry-Perot filter device of the present invention is a Fabry-Perot filter based on the substrate and It is also planned to reverse the order of the color filter layers.

Finally, as will also be understood by those skilled in the art, the Fabry-Perot filter device 11 shown in the schematic cross-sectional view of FIG. 1 has been described in the context of the interferometric spacer layer 18 having a fixed dimension, On the other hand, a Fabry-Perot filter device according to the present invention may be manufactured and assembled to provide adjustable interferometric characteristics with the Fabry-Perot filter device disclosed in the "Background Art", but in this document Again, all related technologies of the "Background" are fully described here by source.

[0043]

EXAMPLE Referring now to FIG. 2, there is shown a graph of transmittance versus wavelength for a Fabry Perot filter.
The Fabry-Perot filter has (1) a thickness of about 400
0 Å silicon dioxide interferometric spacer layer, so formed on one side first, (2) about 4
A first silver partially reflective layer formed to a thickness of 00 angstroms, resulting in a second silver partially reflective layer formed to a thickness of about 40 angstroms on the other side. ,,.

As shown in the graph of FIG.
Multiple transmittance peaks in the wavelength range of 0-700 nanometers may interfere with efficient and accurate detection and quantification of the sample, but the sample shows a transmittance profile in the graph of Figure 2. The manufactured Fabry-Perot filter is analyzed using the Fabry-Perot filter device assembled therein.

Referring now to FIG. 3, there is shown a graph of relative intensity versus wavelength of a typical white light radiation source that may be used as the illumination source in a Fabry-Perot filter device according to the present invention.

As illustrated in the graph of FIG.
The white light source has approximately 440 nanometers, 5
The major spectral emission peaks at 50 and 625 nanometers may interfere with efficient and accurate detection and quantification of the sample, but the sample has a transmittance profile in the graph of FIG. The Fabry-Perot filter device having the Fabry-Perot filter shown therein assembled therein and the white light radiation source whose emission characteristics are shown in the graph of FIG. 3 are analyzed.

Referring now to FIG. 4, there is shown a plot of transmittance versus wavelength for a series of color filter elements in a color filter layer that may be used in a Fabry-Perot filter device according to the present invention, where: The Fabry-Perot filter device uses (1) a Fabry-Perot filter having a transmittance characteristic shown in the graph of FIG. 2 and (2) a white light radiation source having a radiation characteristic shown in the graph of FIG.

As illustrated in the graph of FIG.
The curve corresponding to reference numeral 32 corresponds to the color filter element for blue light transmission. Similarly, the curve corresponding to reference numeral 34 corresponds to the color filter element providing for the transmission of green light. Finally, the curve corresponding to reference numeral 36 corresponds to the color filter element providing for the transmission of red light.

5 (A), 5 (B) and 5 (C), the fact that the graphs of FIG. 4 show the spectral characteristics are filtered by the individual color filter elements. Thus, a series of relative intensity vs. wavelength graphs are shown derived from the graph of FIG.

5 (A), 5 (B) and 5 (C)
As shown in the graph of FIG. 3, when filtering is performed by the individual color filter element having the spectral characteristic shown in the graph of FIG. 4 of the white light radiation source according to the graph of FIG. Provision is made for individual identification of multiple major peaks therein. Therefore, the peaks shown in the graphs of FIGS. 5 (A), 5 (B) and 5 (C) associated with such color filter element identification are
The individual peak intensities may be separately normalized with respect to each other to determine the associated radiation intensities more efficiently and accurately. Similarly, by accurately determining, classifying and normalizing the accompanying radiant intensity and characteristics, the radiant intensity and radiative characteristic or absorption intensity of the sample can be determined for the sample to be analyzed in the Fabry-Perot filter device according to the invention. And absorption characteristics can be determined more efficiently and with high accuracy (ie, the incomplete quantification or characterization of the associated emission characteristics does not likely obscure the sample characteristics, and therefore the associated emission characteristics). A more accurate determination of the characteristics provides for more accurate determination of sample characteristics).

It will be understood by those skilled in the art that the preferred embodiments and examples of the present invention are illustrative of the present invention rather than limiting of the present invention. The Fabry-Perot filter device according to the preferred embodiments and examples of the invention may be revised and modified with respect to the materials, structures and dimensions used to manufacture it, nevertheless according to the invention. Provided is a Fabry-Perot filter device, and the accompanying, Fabry-Perot filter device.

The above-mentioned objects, features and advantages of the present invention have been clarified in the explanation of the above-mentioned "Embodiment of the Invention". The "embodiment of the invention" will be described with reference to the accompanying drawings, and the accompanying drawings correspond to the material portion of the present disclosure as follows.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view of a Fabry-Perot filter device according to a preferred embodiment of the present invention.

FIG. 2 is a graph of transmittance versus wavelength for a Fabry-Perot filter of the configuration silver-silicon dioxide / silver that may be used in a Fagally-Perot filter device according to the present invention.

FIG. 3 is a graph of relative intensity versus wavelength of a white light visible light source that may be used in a Fabry-Perot filter device according to the present invention.

FIG. 4 is a graph of transmittance versus wavelength for a series of color filter elements that may be used in a color filter layer in a Fabry-Perot filter device according to the present invention.

5 (A), (B) and (C) are a series of relative intensity vs. wavelength graphs of early white light visible light sources that may be used in the Fabry-Perot apparatus according to the graph of FIG. These are after incorporating in the Fabry-Perot device the color filter layer having the series of color filters according to the graph of FIG. 4 formed therein.

[Explanation of symbols]

10: Semiconductor substrate 11: Fabry Perot filter device 12: Series of photodiodes 14, 22: Spacer layer 16, 20: Partial reflective layer 18: Interferometric measurement spacer layer 19: Fabry Perot filter 24: Color filter layer 26: Sample medium 28: Radiation beam on irradiation side

Claims (16)

[Claims] 1. A pair of Fabry-Perot filters assembled on the substrate and covering the at least two optical transducer elements with a substrate having at least two optical transducer elements formed therein, the pair being separated by a transmissive material. A Fabry-Perot filter comprising at least two partially-reflecting layers of at least one color filter layer, which is also assembled on the substrate and covers the at least two optical transducer elements. A Fabry-Perot fill comprising at least one color filter layer composed of at least two color filter elements of different colors, each color filter element being recorded on an individual light transducer element in the element. Apparatus. 2. The Fabry-Perot filter device of claim 1, wherein the light transducer element is a light emitter element. 3. The Fabry-Perot filter device according to claim 1, wherein the optical transducer element is an optical sensor element. 4. The Fabry-Perot filter device according to claim 1, wherein the substrate is a semiconductor substrate, and the optical transducer element is a semiconductor optical sensor element. 5. The Fabry-Perot filter device according to claim 1, wherein the pair of partially reflective layers are separated by a fixed distance. 6. The Fabry-Perot filter device of claim 1, wherein the pair of partially reflective layers are separated by a variable distance. 7. A method of manufacturing a Fabry-Perot filter device, the method comprising: providing a substrate having at least two optical transducer elements formed therein; assembling a Fabry-Perot filter on the substrate; Covering the at least two optical transducer elements, the Fabry-Perot filter comprising a pair of partially reflective layers separated by a transmissive material; and at least one color filter layer, also the substrate. Assembled above, covering said at least two light transducer elements, said at least one color filter layer consisting of at least two color filter elements of different colors, each of said at least one color filter element comprising: At least Also recorded with individual light transducer elements in two light transducer elements. 8. The method of claim 7, wherein the color light transducer element is a light emitter element. 9. The method of claim 7, wherein the light transducer element is a light sensor element. 10. The method of claim 7, wherein the substrate is a semiconductor substrate and the optical transducer element is a semiconductor photosensor element. 11. The method of claim 7, wherein the pair of partially reflective layers are separated by a fixed distance. 12. The method of claim 7, wherein the pair of partially reflective layers are separated by a variable distance. 13. A method of operating a Fagally-Perot filter device, the method comprising the steps of providing a Fagally-Perot filter device, the device forming at least two photosensor transducer elements therein. A Fabry-Perot filter assembled on said substrate and covering said at least two optical sensor transducer elements, said Fabry-Perot filter comprising a pair of partially reflective layers separated by a transmissive material; This is also at least one color filter layer assembled on said substrate and covering said at least two photosensor transducer elements, said at least two
Said at least one color filter layer consisting of at least two color filter elements of different colors, each color filter element being recorded on an individual photosensor transducer element of one of the photosensor transducer elements; A Fabry-Perot filter device and an assembled sample chamber on the at least one color filter layer; and a radiation source arranged to illuminate the sample in the sample chamber; Introducing into the sample chamber to illuminate the sample in the sample chamber, and analyzing the sample based on comparing differences in photoelectric effect between the at least two photosensor transducer elements. No way. 14. The method of claim 13, wherein the substrate is a semiconductor substrate and the photosensor transducer element is a semiconductor photosensor transducer element. 15. The method of claim 13, wherein the pair of partially reflective layers are separated by a fixed distance. 16. The method of claim 13, wherein the pair of partially reflective layers are separated by a variable distance.