JP2003270013A - Ultrasonic transducer and method of manufacturing the same and ultrasonic flowmeter using the same - Google Patents
Ultrasonic transducer and method of manufacturing the same and ultrasonic flowmeter using the sameInfo
- Publication number
- JP2003270013A JP2003270013A JP2002073611A JP2002073611A JP2003270013A JP 2003270013 A JP2003270013 A JP 2003270013A JP 2002073611 A JP2002073611 A JP 2002073611A JP 2002073611 A JP2002073611 A JP 2002073611A JP 2003270013 A JP2003270013 A JP 2003270013A
- Authority
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- Japan
- Prior art keywords
- adhesive
- piezoelectric body
- case
- ultrasonic transducer
- ultrasonic
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、超音波により気体
や液体の流量や流速の計測を行う超音波流量計に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic flowmeter for measuring the flow rate and flow velocity of gas or liquid by ultrasonic waves.
【０００２】[0002]
【従来の技術】従来この種の超音波流量計に用いる超音
波振動子としては、図７に示す。例えば特開平４−３０
９８１７号公報のようなものが知られており、圧電セラ
ミック１を金属振動板２にロー材３でロー付けしてあ
る。2. Description of the Related Art An ultrasonic transducer conventionally used in this type of ultrasonic flowmeter is shown in FIG. For example, Japanese Patent Laid-Open No. 4-30
There is known one such as Japanese Patent No. 9817, in which the piezoelectric ceramic 1 is brazed to the metal diaphragm 2 with the brazing material 3.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら上記従来
の構成では圧電セラミック１が金属振動板２にロー付け
されているため、熱負荷の繰り返し試験（以下熱衝撃試
験という）を行うと、金属振動板２と圧電セラミック１
の熱膨張係数が異なるため、金属振動板２と圧電セラミ
ック１の接着部が破損するという課題を有していた。However, since the piezoelectric ceramic 1 is brazed to the metal diaphragm 2 in the above-mentioned conventional structure, the metal diaphragm is subjected to a repeated heat load test (hereinafter referred to as a thermal shock test). 2 and piezoelectric ceramic 1
However, there is a problem that the bonding portion between the metal vibration plate 2 and the piezoelectric ceramic 1 is damaged due to the different thermal expansion coefficients.
【０００４】本発明では上記課題を解決するもので、熱
衝撃試験に耐えうる接着が可能で、信頼性に優れた超音
波振動子とその製造方法およびそれを用いた超音波流量
計の実現を目的とする。The present invention solves the above-mentioned problems, and realizes an ultrasonic transducer which can be adhered to withstand a thermal shock test and has excellent reliability, a manufacturing method thereof, and an ultrasonic flowmeter using the same. To aim.
【０００５】[0005]
【課題を解決するための手段】本発明は上記課題を解決
するために、超音波振動子を構成する圧電体はケースで
内包し、このケースとの固定を圧電体やケースよりも熱
膨張係数の大きい接着剤で行うことで、熱衝撃試験によ
るケースと圧電体の接続が破損することを防ぐものであ
る。According to the present invention, in order to solve the above-mentioned problems, a piezoelectric body constituting an ultrasonic vibrator is enclosed in a case, and the fixing with this case is performed by a coefficient of thermal expansion larger than that of the piezoelectric body or the case. By using a large adhesive, it is possible to prevent the connection between the case and the piezoelectric body from being damaged by the thermal shock test.
【０００６】上記発明によれば、熱衝撃試験によるケー
スと圧電体の熱膨張係数の違いを接着剤が伸びることに
より緩和するので、ケースと圧電体の接続を破損するこ
とを妨げることができる。この結果屋外で使用する環境
下においても長期間にわたりケースと圧電体の接続を破
損することが防止できる。According to the above invention, the difference in the coefficient of thermal expansion between the case and the piezoelectric body due to the thermal shock test is alleviated by the expansion of the adhesive, so that it is possible to prevent the connection between the case and the piezoelectric body from being damaged. As a result, it is possible to prevent the connection between the case and the piezoelectric body from being damaged for a long period of time even in an environment where it is used outdoors.
【０００７】[0007]
【発明の実施形態】第１の形態の超音波振動子は天部と
側壁部を有する有天ケースと、前記天部の内壁面に接着
剤で固定された圧電体とを備え、前記接着剤は前記有天
ケースと前記圧電体との熱膨張係数の違いを緩和させる
働きを持たせてあり、耐久性のある接続が可能な超音波
振動子を得ることができる。BEST MODE FOR CARRYING OUT THE INVENTION The ultrasonic transducer according to the first aspect comprises a ceiling case having a top portion and a side wall portion, and a piezoelectric body fixed to the inner wall surface of the top portion with an adhesive. Has a function of alleviating the difference in coefficient of thermal expansion between the above-mentioned case and the piezoelectric body, and an ultrasonic transducer capable of durable connection can be obtained.
【０００８】第２の形態の超音波振動子は、第１の形態
の超音波振動子において、接着剤は前記有天ケースや前
記圧電体よりも軟質なものを使用したことにより、膨張
収縮の繰り返し応力を吸収させることが可能な超音波振
動子を得られる。The ultrasonic vibrator according to the second embodiment is different from the ultrasonic vibrator according to the first embodiment in that the adhesive is softer than the above-mentioned case and the piezoelectric body so that expansion and contraction can be prevented. An ultrasonic transducer capable of absorbing repeated stress can be obtained.
【０００９】第３の形態の超音波振動子は、第１の形態
の超音波振動子において、接着剤は可とう性を備え、硬
化ひずみが所定値以下の接着剤を使用したことにより、
ケースの熱応力の動きに追従することが可能となるた
め、ケースと圧電体の接続が維持される超音波振動子を
得ることができる。The ultrasonic transducer of the third aspect is the ultrasonic transducer of the first aspect, in which the adhesive has flexibility and the curing strain is equal to or less than a predetermined value.
Since it is possible to follow the movement of the thermal stress of the case, it is possible to obtain an ultrasonic transducer in which the connection between the case and the piezoelectric body is maintained.
【００１０】またこの超音波振動子は、圧電体固定治具
に圧電体の接着面を開放して固定し、スクリーンの上に
のせた接着剤を圧電体の上に所定形状で接着剤を塗布さ
せる工程と、前記接着剤を塗布した圧電体の上に有天ケ
ースの天部内壁面を置く工程と、前記有天ケースの上か
ら一様に前記圧電体に加重をかける工程と、前記有天ケ
ースに加重をかけた状態で接着剤を硬化させる工程とで
製造するため、ケースと圧電体の接続の破損を防ぐ超音
波振動子の製造が可能となる。In this ultrasonic vibrator, the adhesive surface of the piezoelectric body is opened and fixed to the piezoelectric body fixing jig, and the adhesive placed on the screen is applied onto the piezoelectric body in a predetermined shape. The step of placing the inner wall surface of the ceiling part of the heavenly case on the piezoelectric body coated with the adhesive, the step of uniformly applying a weight to the piezo body from above the heavenly case, Since it is manufactured in a step of curing the adhesive while the case is being weighted, it is possible to manufacture an ultrasonic transducer that prevents damage to the connection between the case and the piezoelectric body.
【００１１】またこの超音波振動子は、圧電体に接着剤
を所定形状に転写する工程と、前記接着剤の厚みを均一
にさせる工程と、前記均一治具の接着剤を前記転写時具
で所定形状に取り出し前記圧電体に塗布させる工程を用
いたことにより、長期間の使用にも耐えうる接続が可能
な超音波振動子の製造が得られる。In this ultrasonic transducer, the step of transferring the adhesive to the piezoelectric body in a predetermined shape, the step of making the thickness of the adhesive uniform, and the step of transferring the adhesive of the uniform jig by the transfer tool are used. By using the process of taking out into a predetermined shape and applying it to the piezoelectric body, it is possible to obtain an ultrasonic transducer capable of connection that can withstand long-term use.
【００１２】皿にこの超音波振動子は、接着剤を所定形
状に加工された接着剤治具に入れる工程と、前記接着剤
治具に埋め込まれた接着剤を圧電体の接着剤塗布面に同
一形状のまま移し変える工程を用いたことにより、信頼
性に優れた超音波振動子の製造が可能となる。In this ultrasonic transducer on a plate, the step of putting the adhesive in an adhesive jig processed into a predetermined shape and the adhesive embedded in the adhesive jig are applied to the adhesive application surface of the piezoelectric body. By using the step of transferring the same shape, it is possible to manufacture an ultrasonic transducer having excellent reliability.
【００１３】またこの超音波流量計は、被測定流体が流
れる流量測定部と、この流量測定部に設けられ超音波を
送受信する第１ないし３いずれかの形態の１対の超音波
振動子と、前記超音波振動子間の伝搬時間を計測する計
測回路と、前記計測回路からの信号に基づいて流量を算
出する流量演算手段とを備えたため、信頼性の高い超音
波流量計をえることができる。This ultrasonic flowmeter further comprises a flow rate measuring section through which the fluid to be measured flows, and a pair of ultrasonic transducers of any one of the first to third modes which are provided in the flow rate measuring section and which transmit and receive ultrasonic waves. Since the measuring circuit for measuring the propagation time between the ultrasonic transducers and the flow rate calculating means for calculating the flow rate based on the signal from the measuring circuit are provided, a highly reliable ultrasonic flowmeter can be obtained. it can.
【００１４】[0014]
【実施例】以下、本発明の実施例について図面を用いて
説明する。なお図面中で同一符号を付しているものは同
一なものであり、詳細な説明は省略する。Embodiments of the present invention will be described below with reference to the drawings. It is to be noted that components having the same reference numerals in the drawings are the same and detailed description thereof will be omitted.
【００１５】図１は本発明の超音波振動子の断面図であ
る。図２は本発明における接着剤を圧電体に塗布した外
観図である。図１、２において、４はケース、５はケー
ス天部内壁、６はケース天部内壁に配置された圧電体、
７はケース天部内壁５と圧電体６を接続する接着剤、８
はケース支持部、９はケース支持部に固定された端子
板、１０ａ、１０ｂは端子板９に設けられた端子、１１
は端子１０ａと端子１０ｂを絶縁するための絶縁部、１
２は端子１０ａと圧電体６を電気的に接続するためのリ
ード線である。FIG. 1 is a sectional view of an ultrasonic transducer of the present invention. FIG. 2 is an external view of the piezoelectric material coated with the adhesive of the present invention. In FIGS. 1 and 2, 4 is a case, 5 is a case top inner wall, 6 is a piezoelectric body arranged on the case top inner wall,
7 is an adhesive that connects the top wall 5 of the case and the piezoelectric body 6;
Is a case support portion, 9 is a terminal plate fixed to the case support portion, 10a and 10b are terminals provided on the terminal plate 9, 11
Is an insulating portion for insulating the terminals 10a and 10b from each other, 1
Reference numeral 2 is a lead wire for electrically connecting the terminal 10a and the piezoelectric body 6.
【００１６】以上のように構成された超音波振動子につ
いて図１を用いて説明する。ケース４はステンレス製、
そして接着剤７は熱硬化性エポキシ系樹脂を用いてお
り、ケース４と圧電体６は接着剤７により接続されてい
る。ケース４と圧電体６とでは、屋外で使用される温度
範囲において約３０％ケース４の熱膨張係数が大きいも
のを使用しており、それに使用する接着剤７の選択項目
として、例えば接着剤７の硬さ、硬化時の内部応力、ガ
ラス転移点（以下Ｔｇ点という）、接着強度の４項目等
があげられる。The ultrasonic transducer configured as above will be described with reference to FIG. Case 4 is made of stainless steel,
The adhesive 7 uses a thermosetting epoxy resin, and the case 4 and the piezoelectric body 6 are connected by the adhesive 7. As the case 4 and the piezoelectric body 6, the one having a large thermal expansion coefficient of about 30% in the case 4 is used in a temperature range used outdoors. Hardness, internal stress upon curing, glass transition point (hereinafter referred to as Tg point), and adhesive strength.
【００１７】硬さは鉛筆硬度評価方法、硬化時の内部応
力は厚み約１３０μｍのフィルムにエポキシ樹脂を約８
０μｍ塗布し硬化後フィルムのそりを評価する方法など
がある。フィルムとしては、例えばポリイミドがあげら
れる。Ｔｇ点は厚さ約１．５mmのサンプルを硬化させ、
既知の熱機械的分析法などで計測される。接着強度はア
ルミ試験片にエポキシ樹脂を塗布し、アルミ試験片で挟
み硬化させたサンプルの強度測定などがある。The hardness is a pencil hardness evaluation method, and the internal stress during curing is about 8 μm of epoxy resin on a film of about 130 μm thick.
There is a method of evaluating the warp of the film after applying 0 μm and curing. Examples of the film include polyimide. At the Tg point, a sample with a thickness of about 1.5 mm is cured,
It is measured by a known thermomechanical analysis method. Adhesive strength can be measured by, for example, applying a epoxy resin to an aluminum test piece, sandwiching the aluminum test piece, and curing the sample.
【００１８】本発明で使用する接着剤７は、鉛筆強度の
硬さの範囲ではＨから５Ｂを基本とし、ＨＢから２Ｂ以
内のもので、Ｂでもかまわない。その硬化時の内部応力
としてはフィルムのそりによる変化率としては５０％以
下を基本とし、少なくとも１０％以下に入るのもを使用
して、限りなく０％に近いものを用いている。そして、
Ｔｇ点としては４０℃から１２０℃を基本とし、５０℃
から９０℃以内のもので、約５９℃を使用している。ま
た、接着強度は５から３０Ｎ／mm2を基本とし、１０Ｎ
／mm2以上のものを使用しており、初期値として１１．
１Ｎ／mm2のものを選んでいる。この接着剤７を用いる
ことにより、例えば８０℃と−４０℃各３０分ごとの繰
り返し熱負荷試験を行ってもケース４と圧電体６の接続
を破壊することなく耐久的に優れたものができる。The adhesive 7 used in the present invention is basically H to 5B within the range of pencil strength, and is within 2B from HB, and B may be used. As the internal stress at the time of curing, the rate of change due to the warpage of the film is basically 50% or less, and the internal stress of at least 10% or less is used, and the value close to 0% is used infinitely. And
The Tg point is basically 40 to 120 ° C, 50 ° C
Within 90 degrees Celsius, using about 59 degrees Celsius. Also, the adhesive strength is basically 5 to 30 N / mm 2 and 10 N
/ Mm 2 or more is used, and the initial value is 11.
1N / mm 2 is selected. By using this adhesive 7, it is possible to obtain one having excellent durability without breaking the connection between the case 4 and the piezoelectric body 6 even if a repeated heat load test is performed every 30 minutes at 80 ° C. and −40 ° C., for example. .
【００１９】次に、本発明の超音波振動子の作成方法に
ついて図３を用いて説明する。圧電体６の接着剤塗布面
に接着剤７を塗布する方法として、例えばスクリーン印
刷方式や転写方式等があげられる。圧電体６は、圧電体
固定治具１３に装着する。圧電体固定治具１３から出る
圧電体６の段差は、０mmから０．２mmを基本とし、約
０．１mm圧電体６の方が高くなるように圧電体固定治具
１３を設計するか図示していない段差調整板を設ける。
前記圧電体固定治具１３を印刷台１４の上に固定し、そ
の上にスクリーン１５をかぶせる。このとき圧電体６と
スクリーンの間ｔは０mmから１．５mmの隙間を設けるこ
とを基本とし、０．３mmから０．８mm以内のもので、約
０．５mm程度の隙間を設けている。スクリーン１５には
圧電体６の接着剤塗布部分にのみ接着剤７が塗布される
ようにほかの部分にマスキングを施してあり、スクリー
ンの開口寸法としては、圧電体６の接着剤塗布部よりも
片側で０mmから０．２mm小さいことを基本とし、約０．
１mm程度小さくしてある。次に、図３の（ｂ）のように
スクリーン１５の上に図示していない脱泡機で空気を抜
いた接着剤７をのせる。接着剤７の塗布はスキージ１６
で行われる。図３の（ｃ）と（ｄ）に示されるようにス
キージ１６は圧電体６に対して垂直方向にある加重をか
けながら、圧電体６に対して水平方向に移動させること
により圧電体６に接着剤７を塗布させる。一度に接着剤
７を塗布する圧電体６の数は１から２５個程度で、塗布
後の接着剤７の厚みが１０から２０μｍの範囲で均一に
塗布される生産可能な数を選択する。次に、図３の
（ｅ）のように接着剤７を塗布した圧電体６を接着剤硬
化治具１７に載せかえる。なお圧電体固定治具１３を接
着剤硬化治具１７の一部品として使用してもかまわな
い。図３の（ｆ）と（ｇ）に示されるように圧電体６の
接着剤の塗布面に上からケース４をかぶせてケース４の
上から、加圧治具１８で圧電体６に向けて一様に加重を
かける。例えば、既知のばね負荷式により加重をかけ、
この状態で接着剤７を硬化させる。このように接着され
たケース４と圧電体６は図示していない圧電体６の電極
部と端子１０ａをリード線１２によりそれぞれハンダ付
けされる。端子板９は、ケース支持部８と電気溶接を行
うことにより固定される。ケース４と端子板９を溶接す
ることにより、電極のグランドになると同時に圧電体６
を封止する役割を果たしている。このときケース内にあ
る空気を乾燥した不活性ガスなどで置換させることで、
圧電体６の電極部や接着剤７の劣化を防止することがで
きる。Next, a method for producing the ultrasonic vibrator of the present invention will be described with reference to FIG. Examples of the method for applying the adhesive 7 to the adhesive application surface of the piezoelectric body 6 include a screen printing method and a transfer method. The piezoelectric body 6 is mounted on the piezoelectric body fixing jig 13. The step difference of the piezoelectric body 6 coming out of the piezoelectric body fixing jig 13 is basically 0 mm to 0.2 mm, and the piezoelectric body fixing jig 13 is designed so that the piezoelectric body 6 is higher by about 0.1 mm. Not provided with a step adjustment plate.
The piezoelectric body fixing jig 13 is fixed on the printing table 14, and the screen 15 is put on it. At this time, a gap of 0 mm to 1.5 mm is basically provided between the piezoelectric body 6 and the screen, and a gap of 0.3 mm to 0.8 mm, about 0.5 mm is provided. Other parts of the screen 15 are masked so that the adhesive 7 is applied only to the part to which the piezoelectric material 6 is applied, and the opening size of the screen is larger than that of the part to which the piezoelectric material 6 is applied. Basically, it is 0 mm to 0.2 mm smaller on one side.
It is about 1 mm smaller. Next, as shown in FIG. 3B, the bleeding adhesive 7 is placed on the screen 15 by a defoaming machine (not shown). Apply adhesive 7 with squeegee 16
Done in. As shown in (c) and (d) of FIG. 3, the squeegee 16 is moved in the horizontal direction with respect to the piezoelectric body 6 by applying a certain weight in the vertical direction to the piezoelectric body 6 to move the piezoelectric body 6 to the piezoelectric body 6. The adhesive 7 is applied. The number of the piezoelectric bodies 6 to which the adhesive 7 is applied at one time is about 1 to 25, and the number which can be produced is selected so that the thickness of the adhesive 7 after application is 10 to 20 μm. Next, as shown in FIG. 3E, the piezoelectric body 6 coated with the adhesive 7 is replaced on the adhesive curing jig 17. The piezoelectric body fixing jig 13 may be used as one component of the adhesive curing jig 17. As shown in (f) and (g) of FIG. 3, the case 4 is covered on the adhesive coating surface of the piezoelectric body 6 from above, and the piezoelectric jig 6 is pressed by the pressing jig 18 from above the case 4. Apply weight evenly. For example, applying a load by a known spring-loaded method,
In this state, the adhesive 7 is cured. The case 4 and the piezoelectric body 6 thus bonded are soldered to the electrode portion (not shown) of the piezoelectric body 6 and the terminal 10a by the lead wire 12, respectively. The terminal plate 9 is fixed to the case support portion 8 by electric welding. By welding the case 4 and the terminal plate 9 together, the piezoelectric body 6 becomes a ground for the electrodes.
Plays a role of sealing. At this time, by replacing the air in the case with a dry inert gas,
It is possible to prevent the electrode portion of the piezoelectric body 6 and the adhesive 7 from being deteriorated.
【００２０】なお、圧電体６に接着剤７を塗布する手段
としての転写方式としては、例えば接着剤の厚みを１０
から２０μｍに均一にした部分から、図４の（ａ）
（ｂ）に示されるように転写ピン１９で前記接着剤７を
必要量だけ転写ピン１９に取り、転写ピン１９を圧電体
６の塗布面につけて接着剤７を塗布させることができ
る。また、図５（ａ）〜（ｃ）に示されるようにポリイ
ミド２０などに接着剤７を転写させる形状分だけ凹加工
２０ａを行い、そこに（ｂ）で示す如く接着剤７を埋め
込み、その上に圧電体６を押し続けて接着剤塗布面に転
写することもできる。As a transfer method for applying the adhesive 7 to the piezoelectric body 6, for example, the thickness of the adhesive is 10
To 20 μm from the uniform portion, as shown in FIG.
As shown in (b), the adhesive 7 can be applied to the transfer pin 19 by applying the required amount of the adhesive 7 to the transfer pin 19 with the transfer pin 19 and attaching the transfer pin 19 to the application surface of the piezoelectric body 6. Further, as shown in FIGS. 5A to 5C, a concave processing 20a is performed by a shape for transferring the adhesive 7 to the polyimide 20 or the like, and the adhesive 7 is embedded therein as shown in FIG. It is also possible to keep pressing the piezoelectric body 6 on the top and transfer it to the adhesive application surface.
【００２１】以上のように作成された超音波振動子を用
いた超音波流量計について図６を用いて説明する。流量
計測部２１には側壁部２２、２３が設けられている。超
音波振動子２４、２５は、送受波面が相対するように側
壁部２２、２３に斜めに設けられた振動子取付穴２６、
２７に固定される。計測流体として、ガスや水、灯油、
石油などの液体の流量を計測することを想定しているた
め、超音波振動子２４、２５と振動子取付穴２６、２７
の間には液体が漏れ出さないようにシール材２８、２９
を施してある。計測手段としては、例えば既知のシング
アラウンド法を用いて、超音波振動子２４、２５の伝搬
時間を計測回路３０で計測することにより、流量演算手
段３１で流量を算出することができる。屋外で使用する
温度範囲において信頼性に優れた超音波振動子２４、２
５を用いることにより、長期間屋外で使用しても超音波
振動子２４、２５が破壊されることなく、耐久性のある
超音波流量計を提供することができる。An ultrasonic flowmeter using the ultrasonic transducer produced as described above will be described with reference to FIG. The flow rate measuring unit 21 is provided with side walls 22 and 23. The ultrasonic transducers 24 and 25 have transducer mounting holes 26 diagonally provided in the side wall portions 22 and 23 so that the transmitting and receiving surfaces face each other.
It is fixed at 27. Gas, water, kerosene,
Since it is assumed that the flow rate of liquid such as oil is measured, the ultrasonic transducers 24, 25 and the transducer mounting holes 26, 27
Between the sealing materials 28, 29 to prevent the liquid from leaking out.
Has been applied. As the measuring means, for example, a known sing-around method is used, and the flow rate calculating means 31 can calculate the flow rate by measuring the propagation time of the ultrasonic transducers 24 and 25 with the measuring circuit 30. Ultrasonic transducers 24 and 2 with excellent reliability in the temperature range used outdoors
By using No. 5, it is possible to provide a durable ultrasonic flowmeter without breaking the ultrasonic transducers 24 and 25 even when used outdoors for a long time.
【００２２】なお、超音波振動子を超音波流量計に用い
るとしていたが、距離センサ等の超音波センサとして用
いても良い。Although the ultrasonic vibrator is used in the ultrasonic flow meter, it may be used as an ultrasonic sensor such as a distance sensor.
【００２３】[0023]
【発明の効果】以上の説明から明らかなように本発明に
よれば、熱衝撃によるケースと圧電体の接続の破損を防
ぐ超音波振動子が得られる。As is apparent from the above description, according to the present invention, it is possible to obtain an ultrasonic vibrator which prevents damage to the connection between the case and the piezoelectric body due to thermal shock.
【図１】本発明の超音波振動子の断面図FIG. 1 is a sectional view of an ultrasonic transducer of the present invention.
【図２】本発明の接着剤を塗布した圧電体の斜視図FIG. 2 is a perspective view of a piezoelectric body coated with the adhesive of the present invention.
【図３】（ａ）〜（ｇ）は本発明の超音波振動子の製造
工程図3 (a) to (g) are manufacturing process diagrams of the ultrasonic transducer of the present invention.
【図４】（ａ）（ｂ）は本発明の超音波振動子の接着剤
塗布工程図4A and 4B are diagrams of an adhesive application process for the ultrasonic vibrator of the invention.
【図５】（ａ）〜（ｃ）は本発明の超音波振動子の接着
剤塗布工程図5A to 5C are diagrams of an adhesive application process of the ultrasonic vibrator of the invention.
【図６】本発明の超音波振動子に用いる超音波流量計の
一部断面図を含む構成図FIG. 6 is a configuration diagram including a partial cross-sectional view of an ultrasonic flowmeter used for the ultrasonic transducer of the present invention.
【図７】従来の超音波振動子の断面図FIG. 7 is a sectional view of a conventional ultrasonic transducer.
４ ケース ６ 圧電体 ７ 接着剤 １６、１７ 超音波振動子 １３ 流量測定部 ２０、２１ シール材 ２２ 計測回路 ２３ 流量演算手段 4 cases 6 Piezoelectric body 7 adhesive 16, 17 Ultrasonic transducer 13 Flow rate measurement unit 20, 21 Seal material 22 Measuring circuit 23 Flow rate calculation means
───────────────────────────────────────────────────── フロントページの続き (72)発明者 入江 庸介 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 Ｆターム(参考） 2F035 DA05 DA16 DA19 5D019 AA17 AA26 BB04 BB18 FF03 HH01 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Yosuke Irie 1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric Sangyo Co., Ltd. F-term (reference) 2F035 DA05 DA16 DA19 5D019 AA17 AA26 BB04 BB18 FF03 HH01
Claims (7)
記天部の内壁面に接着剤で固定された圧電体とを備え、
前記接着剤は前記有天ケースと前記圧電体との熱膨張係
数の違いを緩和させる働きを持たせた超音波振動子。1. A ceiling-mounted case having a top portion and a side wall portion, and a piezoelectric body fixed to an inner wall surface of the top portion with an adhesive,
An ultrasonic transducer in which the adhesive has a function of relaxing a difference in thermal expansion coefficient between the heavenly case and the piezoelectric body.
りも軟質なものを使用した請求項１記載の超音波振動
子。2. The ultrasonic transducer according to claim 1, wherein an adhesive that is softer than the heavenly case and the piezoelectric body is used.
所定値以下の接着剤を使用した請求項１記載の超音波振
動子。3. The ultrasonic transducer according to claim 1, wherein the adhesive has flexibility and a curing strain is a predetermined value or less.
して固定し、スクリーンの上にのせた接着剤を圧電体の
上に所定形状で接着剤を塗布させる工程と、前記接着剤
を塗布した圧電体の上に有天ケースの天部内壁面を置く
工程と、前記有天ケースの上から一様に前記圧電体に加
重をかける工程と、前記有天ケースに加重をかけた状態
で接着剤を硬化させる工程とからなる超音波振動子の製
造方法。4. A step of opening and fixing an adhesive surface of a piezoelectric body to a piezoelectric body fixing jig, and applying an adhesive agent on a screen in a predetermined shape onto the piezoelectric body, The step of placing the inner wall surface of the ceiling part of the heavenly case on the piezoelectric body coated with the agent, the step of uniformly applying the weight to the piezoelectric body from the top of the heavenly case, and the application of the weight to the heavenly case A method of manufacturing an ultrasonic transducer, which comprises a step of curing an adhesive in a state.
状に転写する工程と、前記接着剤の厚みを均一にさせる
工程と、前記均一治具の接着剤を前記転写時具で所定形
状に取り出し前記圧電体に塗布させる工程を用いた請求
項４記載の超音波振動子の製造方法。5. A step of transferring an adhesive to a piezoelectric body in a predetermined shape by a transfer jig, a step of making the thickness of the adhesive uniform, and a step of transferring the adhesive of the uniform jig in the transfer tool by a predetermined shape. The method for manufacturing an ultrasonic transducer according to claim 4, wherein a step of extracting the ultrasonic transducer to the piezoelectric body and applying it to the piezoelectric body is used.
具に入れる工程と、前記接着剤治具に埋め込まれた接着
剤を圧電体の接着剤塗布面に同一形状のまま移し変える
工程を用いた請求項４記載の超音波振動子の製造方法。6. A step of placing the adhesive in an adhesive jig processed into a predetermined shape, and a step of transferring the adhesive embedded in the adhesive jig to the adhesive application surface of the piezoelectric body in the same shape. The method for manufacturing an ultrasonic transducer according to claim 4, wherein the method is used.
流量測定部に設けられ超音波を送受信する請求項１ない
し３のいずれか１項記載の１対の超音波振動子と、前記
超音波振動子間の伝搬時間を計測する計測回路と、前記
計測回路からの信号に基づいて流量を算出する流量演算
手段とを備えた超音波流量計。7. A flow rate measuring section through which a fluid to be measured flows, and a pair of ultrasonic transducers according to claim 1, which are provided in the flow rate measuring section and transmit and receive ultrasonic waves, An ultrasonic flowmeter, comprising: a measuring circuit for measuring a propagation time between acoustic wave transducers; and a flow rate calculating means for calculating a flow rate based on a signal from the measuring circuit.
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| JP2002073611A JP4509458B2 (en) | 2002-03-18 | 2002-03-18 | Ultrasonic vibrator and ultrasonic flow meter using the same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002073611A JP4509458B2 (en) | 2002-03-18 | 2002-03-18 | Ultrasonic vibrator and ultrasonic flow meter using the same |
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| Publication Number | Publication Date |
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| JP4509458B2 JP4509458B2 (en) | 2010-07-21 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018193892A1 (en) * | 2017-04-18 | 2018-10-25 | パナソニックＩｐマネジメント株式会社 | Ultrasonic transceiver |
| WO2020203072A1 (en) | 2019-03-29 | 2020-10-08 | パナソニックＩｐマネジメント株式会社 | Ultrasonic transceiver |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012205184A (en) * | 2011-03-28 | 2012-10-22 | Azbil Corp | Ultrasonic sensor, method for diagnosing abnormality in ultrasonic sensor, and method for recovering abnormality in ultrasonic sensor |
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2002
- 2002-03-18 JP JP2002073611A patent/JP4509458B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018193892A1 (en) * | 2017-04-18 | 2018-10-25 | パナソニックＩｐマネジメント株式会社 | Ultrasonic transceiver |
| JP2018182604A (en) * | 2017-04-18 | 2018-11-15 | パナソニックＩｐマネジメント株式会社 | Ultrasonic transceiver |
| US11226220B2 (en) | 2017-04-18 | 2022-01-18 | Panasonic Intellectual Property Management Co., Ltd. | Ultrasonic transceiver |
| WO2020203072A1 (en) | 2019-03-29 | 2020-10-08 | パナソニックＩｐマネジメント株式会社 | Ultrasonic transceiver |
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| Publication number | Publication date |
|---|---|
| JP4509458B2 (en) | 2010-07-21 |
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